CA1202363A - Temperature compensated displacement generating device - Google Patents
Temperature compensated displacement generating deviceInfo
- Publication number
- CA1202363A CA1202363A CA000451008A CA451008A CA1202363A CA 1202363 A CA1202363 A CA 1202363A CA 000451008 A CA000451008 A CA 000451008A CA 451008 A CA451008 A CA 451008A CA 1202363 A CA1202363 A CA 1202363A
- Authority
- CA
- Canada
- Prior art keywords
- piezoelectric element
- displacement
- electrostatic capacitance
- capacitance
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
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Classifications
-
- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B1/00—Sensitive elements capable of producing movement or displacement for purposes not limited to measurement; Associated transmission mechanisms therefor
-
- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B7/00—Compensating for the effects of temperature
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R3/00—Circuits for transducers, loudspeakers or microphones
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/802—Drive or control circuitry or methods for piezoelectric or electrostrictive devices not otherwise provided for
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
Abstract
Abstract of the Disclosure A displacement generation device includes: a bimorph piezoelectric vibrator for receiving an externally applied drive voltage and for generating a displacement in response to the drive voltage; and a temperature-compensation capacitor element electrically connected in series with the piezoelectric vibrator.
The capacitor element has a capacitance with a tem-perature coefficient with the same absolute value but opposite sign to that of the capacitance of the piezo-electric vibrator. When the capacitance of the piezoelectric vibrator changes in accordance with a change in the ambient temperature, the capacitor element properly changes the drive voltage supplied to the piezoelectric vibrator, thereby compensating for the displacement of the piezoelectric vibrator caused by the change in ambient temperature.
The capacitor element has a capacitance with a tem-perature coefficient with the same absolute value but opposite sign to that of the capacitance of the piezo-electric vibrator. When the capacitance of the piezoelectric vibrator changes in accordance with a change in the ambient temperature, the capacitor element properly changes the drive voltage supplied to the piezoelectric vibrator, thereby compensating for the displacement of the piezoelectric vibrator caused by the change in ambient temperature.
Description
The present invention relates in general to a displacement generation device using a piezoelectric displacement element having a piezoelectric e~fect ~or generating a distortion upon a change in an applied voltage and, in particular, to a displacement generation device using a piezoelectric displacement element which vibrates in response to a control voltage signal to achieve a desired vibration mode.
A bimorph cell is generally known as one o~ the typical elements which has a piezoelectric e~ect. The bimorph cell comprises piezoelectric plates which are cemented together in a stacked manner. The bimorph cell may be constructed such that pie~oelectric plates are bonded to a metal plate or the like. The piezoelectric element of this type is e~ectively used as a means for generating a slight periodic displacement in accordance with a change in an applied voltage, and is applied in a variety of fields. For example, the bimorph cell of this type is used as a laser beam deflection element in an optical video disk system or as a video head dis-placement element in a helical scan type VTR. In the optical video disk system, a mirror is mounted at the distal end of the bimorph cell. When a proper voltage signal is applied to this piezoelectric element, the cell is distorted changing the position of a mirror so as to deflect the laser beam. In the helical scan type VTR, the bimorph cell causes proper displacement of the ~ZV~363 video head, thereby performing auto-tracking.
In a special application of the bimorph cell, a deflection unit is pxoposed to peric>dically change the light-receiving position of a solid-state image sensox such as a charge-coupled device (CCD) with respect to an incoming optical image so as to obtain a high-resolution image. A deflection uni-t of an interline transfer type solid-state image sensor is disclosed in Canadian Patent Application Serial No. 426,865 of the same applicant.
According to this reference, a light-receiving surface of the CCD is displaced or vibrated by a bimorph cell at a proper resonance frequency with respect to the incident image beam. The number of picture elements obtained by the CCD can be effectively increased.
Therefore, without actually increasing the number of picture elements of the CCD, a high-quality image can be obtained.
IIowever, the actual displacement of the bimorph cell changes in accordance with its ambient temperature and the type of piezoelectric material used. However, a temperature coefficient of the displacement ~alls within the range of 2,000 to 10,000 ppm/C (-20C to 60C).
For example, when the solid-state image sensor is mounted in a VTR camera, an electronic camera or the like, the temperature changes in accordance with the given circumstances. When the temperature changes, the displacement also changes, as described above. As a 36;~
result, the desired displacement canno-t be obtained, resulting in inconvenience. Therefo:re, a high-resolution image cannot be obtained when a bimorph cell is used in the deflection device of a solid-state image sensor.
It is therefore an object of the present invention to provide a new and improved displacement generation device capable of stably generating a periodic displace-ment irrespective of change in the ambient temperature.
The present invention provides a displacement generation device which comprises: a piezoelectric displacement element for receiving an externally applied drive voltage and for generating a displacement in response ko the drive voltage; and an electrical element connected in a series with said piezoelectric displace-ment element and having a temperature coefficient of an electrostatic capacitance which has a polarity opposite to that of the electrostatic capacitance of said piezoelectric displacement element. The electrical element properly changes the drive voltage applied to the piezoelectric displacement element when the electro-static capacitance of the piezoelectric displacement element changes in accordance ~ith a change in temperature, thereby compensating for the displacement of the piezoelectric displacement element which is caused by the change in temperature.
The present invention is best understood by , ~2~3Z3~3 reference to the accompanying drawings, in which:
Fig. 1 is a circuit diagram showing a displacement genera-tion device according to an embodiment of the presen-t invention;
Fig. 2 is a circuit diagram of an equivalen-t circuit of the displacement generation device of Fig. l;
Figs. 3 to 6 respectively are graphs showing the displacement and the temperature characteristic of the electrostatic capacitance of the displacement generat.ion device of Fig. l; and Fig. 7 is a perspective view showing the overall configuration of a displacement generation device for swinging a solid-state charge-coupled device (CCD) to obtain a high-resolution image according to another embodiment of the present invention.
Fig. 1 illustrates a displacement generation device having a temperature compensation function according to an embodiment of the present inventi.on. In this embodiment, a bimorph vibrator 10 is used to constitute a component 12 for genera-ting a periodic displacement.
The bimorph vibrator 10 is comprised oF two plate-like piezo-electric elements lOa and lOb which are firmly stacked at opposing surfaces thereof, thereby constituting a parallel-connected vibrator. Each plate lOa or lOb is made of a proper piezoelectric material and has a thickness of 0.2 mm, a length of 2~ mm and a width of 5 mm. Each piezoelectric plate lOa or lOb is 3~;3 polarized along the direc-tion of thickness thereof. The piezoelectric plates 10a and lOb have the same polarization direction.
An AC power source 14 is provided to feed the bimorph vibrator lO. The power source 14 has an internal impedance which is sufficiently smaller than the impedance of the bimorph vibrato:r 10. The AC power source 14 is connected to the bimorph vibrator 10 through a temperature-compensation electrical element, for example, a capacitor element 16. One terminal of the AC power source 14 is connected, through the capacitor 16 and a first input terminal 18a, to an adhesion surface of the piezoelectric plates lOa and lOb of the bimorph vibrator 10. The other terminal of the AC power source 14 is connected through a second input terminal 18b to the exposed surfaces of the piezoelectric plates 10a and lOb.
Fig. 2 shows an electrical equivalent circuit of the displacement generation device of Fig. 1. Referring to Fig. 2, a displacement generation section 12 comprising the bimorph vibrator 10 is equivalently represented as a capacitor 20 having a predetermined capacitance. In this embodiment, temperature coefficients of an electrostatic capacitance Cp and a displacement d of the bimorph vibrator were 5,000 ppm/C, and the temperature coefficient ~Cl f the temperature-compensation capacitor 16 having an ~L~0~363 electrostatic capacitance C1 was set to be -5,000 ppm/C. At the same time, the electrostatic capacitance Cl was set to be substantially the same as the capacitance Cp of the bimorph vibrator at room temperature.
The physical theory of the circuit having the above arrangement will be described below.
A piezoelectric material used for a bimorph piezoelectric element must have a large piezoelectric constant ~31~ a large coupling coefficient K31 and sufficient mechanical strength. For example, a PZT
(Pb(Zr, Ti)03) based binary system piezoelectric material and suitable ternary system piezoelectric materials may be used as piezoelectric materials. The ternary system piezoelectric materials include a Pb(Yl/2, Nb1/2)03-(Pb, Sr)TiO3-PbZrO3 based material, a 1/2' 1/2)03-Pb(Ti? Zr)3 based material~ a 1/2' 1/2)03-Pb(Ti, Zr)03 based material a Pb(Sb1/2, Nbl/2)03-Pb(Ti, Zr)o3 based material, and a Pb(Znl/2, Nbl/2)03 based and Pb(La1/2, Nbl/2) based material. In particular, a morphotropic phase boundary material has good piezoelectric characteristics.
It is generally known that the displacement of a bimorph piezoelectric element using one of the piezoelectric materials described above changes in accordance with a change in temperature. The bimorph piezoelectric element has an electrostatic capacitance ~LZ~ i3 , since voltage is applied to -the piezoelec-tric material serving as a dielectric material. The capacitance of the piezoelectric material changes in accordance with a change in the ambient temperature. In extensive studies by the present inventor, it was discovered that the temperature coefficient of the displacement was substantially the same as that of the capacitance. It was also discovered that this tendency does not depend on the shape (length, width and thickness) of the bimorph piezoelectric element.
Figs. 3 to 5 respectively are graphs showing changes in the displacement d and the capacitance C in accordance with a change in temperature T. A drive voltage o~ between O and 200 V (f = 30 Hz or 60 Hz) was applied. This voltage corresponded to an electric field of O to 1 kV/mm. The graph of Fig. 3 shows data obtained when a Pb(Yl/2~ NbI/2)03-(Pb' Sr)Tio3-pbzro3 based material (T-96 available from TOSHIBA CERAMICS
CO., LTD) was used. The graph of Fig. ~ shows data ( 1/2' W1/2)3 Pb(T , Zr)o3 ase material (T-85 available from TOSHIBA CERQMICS CO., LTD) was used. The graph of Fig. 5 shows data obtained when a Pb(Y1/2, Nbl/2)03-(Pb, Sr)TiO3-PbZrO3 based material (an improved material of T-96) was used.
The temperature coef~iclent ~S (= s-l-as/aT) of the displacement d, and the temperature coefficient NC (=
C-l-aC~aT) of the capacitance C of the sample shown in 3~;3 Fig. 3 were 5,100 ppm/C and ~,800 pprn/C, respectively;
those of the sample shown in Fig. 4 were 6,300 ppm/C
and 6,000 ppm/C, respectively; and those of the sample shown in Fig. 5 were 2,800 ppm/C and 2,500 ppm/C, respectively. In this manner 3 the tempera-ture coefficients ~S and ~C of the displacement d and the capac;tance C have substantially the same values. The same results are obtained for any other piezoelectric material. Since the piezoelectric materials are used at a lower temperature than the Curie temperature, the different piezoelectric materials show substantially the same tendency at temperatures lower than the Curie temperature.
When a temperature change occurs that increases the displacement of the bimorph vibrator, the electrostatic capacitance thereof is also increased. In thls case, the series-connected capacitor has a temperature coefficient with the opposite sign to that of the displacement (or capacitance), so tha-t the capacitance of the capacitor is decreased. Therefore, the voltage applied to the bimorph piezoelectric element is decreased to decrease the displacement. On the other hand, when the temperature change occurs that decrease the displacement of the bimorph vibrator, the capaci-tance is increased, thereby increase the displacement.
A capacitor havin0 the temperature coefficient ofthe opposite sign to that of the capacitance of the _ 9 bimorph piezoelectric element may be used to obtain a sa-tis-Fac-tory effect. In addition, when the temperature coe~Ficient ~Cl oF the capacitance of the capacitor satis~ies the following relation:
~ T~- a where ~C : the temperature coefficient of the capacitance of the bimorph piezoelectric element T0 : the reference temperature CltT0) : the capacitance of the capacitor at T0 C(T0) : the capacitance of the bimorph piezoelectric element at T0, and also satisfies the following relation:
~C l ~D~ ~s where aS : the temperature coefficient of the displacement of the bimorph piezoelectric element T0 : the reference temperature CltT0) : the capacitance of the capacitor at T0 CtTo) : the capacitance of the bimorph piezoelectric element at T0, a better piezoelectric effect can be obtained.
Desired capacitance and temperature coefficients of the capacitor can be obtained by properly selecting a dielectric material used therefor. For example, it is known that a ceramic capacitor can have a larye ~20~3~3 dielectric constant and can have any temperature coefficient when a metadielectric layer having the Curie temperature lower than the room temperature is used.
Further, it is also possible to prepare a capacitor having the desired electrical characteristics, when a specific material such as a dielectric material obtained by adding various additives to BaTiO3 or Pb(Mgl/3, N 2/3)3 is use -When a voltage VO is applied to a series circuit of a bimorph piezoelectric element ~of capacitance C~ andto a capacitor (of capacitance C1), the voltage V
applied to the bimorph piezoelectric elernent is given as follows:
V = cC,lc~VO ' .. . . (1) A displacement ~ of the bimorph piezoelectric element is given as follows:
~ = S-V ...(2) where S is the piezoelectric compliance.
A change in the displacement upon a change in the temperature T is given in accordance with equations (l) and t2) as follows:
logV = logC1 - log(C1 -t C) ~ log VO (from ~l)) therefore, VaT = ~ [~ aT] (3) and log~ = logS ~ log V (from (2)) 12C~3~;~
therefore 9 1. a~ l~as + l.av (~, According to equations (3) and (4), l.a~ = l.as + c . l, Now assume that the temperature coefficient of the bimorph piezoelectric element after the capacitor is connected in a series therewith ~S ~ S-aaT : the temperature coefficient of the bimorph piezoelectric element before the capacitor is connected in a series therewith ~C ~ c-aC : the temperature coefficient o~ the capacitance of the bimorph piezoelectric element before the capacitor is connected in a series therewith aCl - C1 aT : the temperature coefficient of the capacitance oF the capacitor, equation (S~ is rewritten as follows:
~ ~ S ~ Cl ~C) ..(6) In order to eliminate the change in displacement of the bimorph piezoelectric element which is caused by a change in temperature, the temperature coefficient must become zero. When the relation ~5 ~ aC is used, the following relations by using equation (6) can be ~Z~:3~3 obtained:
~Cl = ~ C ~C ~(7) a Cl a --(8) The capacitances Cl and C can be expressed as follows:
Cl(T) = Cl(T0) + Cl(T0)-acl~T --(9) C(T) = C(T0) + C(T0) aC ~T ...(10) As previously described, the temperature coefficient aC
is as small as 2,000 t-o 10,000 ppm/C, and can be given as follows:
a = T ~T0).~ .............................. (11) ~r ~S . . . ( 11~ ~
When a capacitor having the temperature coefficient aCl is used, the change in displacement caused by the change in temperature becomes substantially zero.
When an allowable tolerance at a temperature difference ~T is lOO~a %, the following inequality must be satisfied:
-a < ~T~a~ < a ...(12) According to equation (6) -(a/~Tj~Cl + C) < Clac -~ Cacl _ (a/QT)(Cl + C) ...(13) When the same calculation as in equation (11) is performed, the following inequality must be satisfied Cl(T0) a Cl(T0) C(:~O~- ~C ~ ~T(l + C~T0) ) <- ~1 ~ - ~T~ aC ~ ~T(l + -~ - ... (14) ~VL~
For example, if Cl(T0) ~ C(T0), the inequality ~~C
2a/~1 < ~Cl < ~~C ~ 2a/~T must be satisfied. In addi-tion, if a is given a value below ~T-~s, the temperature compensation efFect of the capacitor can effectively occur.
The same considera-tion can be applied to other electrical elements such as inductors and resistors.
In particular, it is preferable to use a capacitor.
Because when a resistor or inductor is used, high impedance and large change therein are required. In addition to this disadvantage, the frequency component of the drive voltage is left, resulting ln inconvenience.
According to the displacement generation device arranged to embody the present invention on the basis of the above theory, when a drive voltage of 200 V (peak voltage) at a 30 Hz frequency was applied to the displacement generation section 12 made of the bimorph piezoelectric element or the bimorph vibrator, the present inventor found that the displacement of the bimorph vibrator 10 became constant, irrespective of any change in ambient temperature. Fig. 6 shows the displacement vs ambient temperature characteristics of the embodiment of Fig. 1. As is apparent from Fig. S, even if the ambient temperature was changed by 100 degrees t~rom -20C to +80C), the displacement d obtained by the bimorph vibrator 10 was substantially constant.
According to the displacement generation device having the bimorph p.iezoelectric element of the present invention 7 the temperature-compensation capacitor, whose temperature coef~icient of the capacitance Cp has the same absolute value but has the opposite sign to that of the equivalenk capacitance (and displacement~ of the bimorph vibrator~ is electrically connected in series with the bimorph vibrator. By this simple arrangement and without an additional temperature compensation unit such as a complex external electronic circuit, the temperature compensation of the displacement of the vibrator can be effectively perFormed. According to the present invention, when the electrical element is connected to the displacement generation section consisting of the bimorph piezoelectric element, the change in capacitance of the displacement generation section caused by the change in ambient temperature of the displacement generation section can be compensated for and kept substantially constant since the drive voltage supplied to the bimorph vibrator is stably supplied ~rom the electrical element in accordance with the change in capacitance of the bimorph vibrator caused by the change in temperatu:re.
Referring to Fig. 7, there is schematically illustrated a displacement generation device as an example of an application in vibrating or swinging a ~ ~f'~
solid-sta-te image sensor such as an area charge-coupled device ~CCD) relative to the incoming optical image.
Referring to Fig. 7, an interlace transfer type charge-coupled device 20 (referred to as an QIT-CCDQ
hereinafter) which has an ordinary number (for example, 500 x 400) of picture elements is arranged to be vibrated or swung relative to the incident image beam, by two rectangular plate-shaped bimorph ~iezoelectric elements 22 and 24. The IT-CCD 20 periodically changes its position, that is, vibrates relative to the incoming optical image. When one frame consists of a p:Lurality of fields, the piezoelectric elements 22 and 24 periodically vibrate the IT-CCD 20 in such a manner as to cause it to occupy different image pickup positions while different field periods are incLuded in one frame period. ~ccordingly, the number of picture elements of an image thus picked up by the IT-CCD 20 which makes the aforementioned specific vibration mode is substantially increased, thereby producing a highly precise image without increasing the actual number of picture elements of the IT-CCD 20 itself.
The arrangement of the position displacement generation ~evice for vibrating or swinging the IT-CCD
20 will now be described with reference to Fig. 7. The piezoelectric elements 22 and 24 are made of a conven-tionally known PZT ternary system piezoelectric ceramic.
Each piezoelectric plate was made by cementing together two piezoelectric ceramic plates of a predetermined size. Elastic support plates 26 and ~8 were made of thin nickel plates which have a predetermined size to maximize their displacement. The support plate 26 has two arcuated portions 26a and 26b at both ends thereof, which serve as springs, while the support plate 28 also has similar arcuated portions 28a and 2~b. The piezo-electric plates 22 and 24 are fixed substantially at the centers o~ the elastic support plates 26 and 28, respectively. The piezoelectric plates 22 and 24 are fixed on a frame 29 (having the shape illustrated) such that the plates 22 and 24 can vibrate along the direc-tions indicated by arrows 30. ~ voltage applied to the piezoelectric plates 22 and 24 is controlled to vibrate the piezoelectric plates 22 and 24 in the same vibration mode (i.e., their displacement and vibrating direction are the same at any given time).
A film connector 32 is adhered to the lower surface of the IT-CCD 20. This film connector 32 has a connector body 32-1, a pair of parallel integral C-shaped leg portions 32-2 and 32-3 which are formed on both lateral sides o~ the connector body 32-1, and a plurality of connection members 34 which are made of conductive rubber. In the C-shaped leg portions 32-2 and 32-3, wiring pàtterns 36 are formed as needed to con~orm to the C-shape of the leg portions 32-2 and 32-3. The IT-CCD 20 is fixed by an adhesive to the long 12~:)Z3~3 side surfaces of the piezoelectric plates 22 and 24.
The frame 29 is mounted with the pie70electric plates 22 and 24 on a baseboard 38; and the C-shaped leg portions 32-2 and 32-3 are bent so that the respective connecting members 34 are properly brought into contact with printed conductive films 40 formed on the top surface of the baseboard 38. The conductive films 40 aTe connected by a known technique to the connecting pins 42, respectively.
A micro-chip capacitor device 46 which serves as a temperature-compensation capacitor is adhered to the piezoelectric plate 22. The adhesion position of the capacitor device 46 on the plate must satisfy the following conditions: (I) the capacitor dèvice 46 will not interfere with the vibration of the piezoelectric plate; and (2) the capacitor device 46 will effeGtively detect a change in ambient temperature. Referring to Fig. 7, the capacitor device 46 was cemented to the central area of the side surface of the piezoelectric plate 22. The electrical connection between the capacitor device 46 and the piezoelectric plate 22 was performed in the same manner as described with reference to Figs.~l and 2. The temperature-compensation capacitor~devlce~(not shown in Flg. 7) was cemented to the piezoelectric plate 24 in the manner described above.
According to ~the embodiment shown in Fig. 7, the ~2~2363 _ 18 -piezoelectric elements or vibrators 22 and 2~ are held as if they are subs-tantially floating in air and are positioned on the baseboard 38 such t:hat the elements 22 and 24 are not Firmly coupled to any other member.
Therefore, a vibration displacement of the piezoelectric elements 22 and 24 per unit voltage applied thereto is ideally increased, so that the IT-CCD 20 can be effectively swung so as to contribute greatly to the high resolution of the CCD pickup image. In addition, the micro-chip capacitors 46 which serve as temperature-compensation electric elements are adhered to the piezoelectric vibrators 22 and 24, respectively.
for the same reason as in the First embodiment, the IT-CCD-20 can be stably vibrated in the desired vibration mode in a simple arrangement without incor-porating any other electrical circuit and irrespective of a change in ambient temperature. Since the micro-chip capacitor device can be used as the necessary temperature compensation electrical element, the element can be easily housed in a CCD package, thereby further simplifying the construction of the device as a whole.
Although the present invention has been shown and described with respect to particular embodiments, various changes and modifications which are obvious to a person skilled in the art to which the invention pertains are deemed to lie within the spirit and scope of the invention.
1~20Z363 In the above embodiments, a parallel-connected bimorph piezoelectric element is used in the displacemen-t generation section. Ho~ever, a bimorph piezoelectric element having plates whose polarization directions are opposed may be used. In addition, the piezoelectric pla-tes are not limited -to two; the piezoelectric element may have only one piezoelectric plate, or three or more piezoelectric plates.
Furthermore, the piezoelectric plates may be fixed on a metal plate or the like as needed.
It should be noted that the piezoelectric displace-ment generation element may be made of a parallel type element or a transverse type element. In the parallel type element, when an electric Field is applied in -the same direction as the polarization direction of the element, the thickness of the element is increased.
When elements of this type are stacked they obtain a large displacement (d33 or k33). On the other hand, in the transverse type element, when an electrical field is applied in a direction perpendicular to the polarization direction, a slip-like displacement occurs. Elements of this type are stacked to obtain a high amplification (dl5 or kl5). According to the present invention, the bimorph, parallel or transverse type piezoelectric element can be used as needed.
A bimorph cell is generally known as one o~ the typical elements which has a piezoelectric e~ect. The bimorph cell comprises piezoelectric plates which are cemented together in a stacked manner. The bimorph cell may be constructed such that pie~oelectric plates are bonded to a metal plate or the like. The piezoelectric element of this type is e~ectively used as a means for generating a slight periodic displacement in accordance with a change in an applied voltage, and is applied in a variety of fields. For example, the bimorph cell of this type is used as a laser beam deflection element in an optical video disk system or as a video head dis-placement element in a helical scan type VTR. In the optical video disk system, a mirror is mounted at the distal end of the bimorph cell. When a proper voltage signal is applied to this piezoelectric element, the cell is distorted changing the position of a mirror so as to deflect the laser beam. In the helical scan type VTR, the bimorph cell causes proper displacement of the ~ZV~363 video head, thereby performing auto-tracking.
In a special application of the bimorph cell, a deflection unit is pxoposed to peric>dically change the light-receiving position of a solid-state image sensox such as a charge-coupled device (CCD) with respect to an incoming optical image so as to obtain a high-resolution image. A deflection uni-t of an interline transfer type solid-state image sensor is disclosed in Canadian Patent Application Serial No. 426,865 of the same applicant.
According to this reference, a light-receiving surface of the CCD is displaced or vibrated by a bimorph cell at a proper resonance frequency with respect to the incident image beam. The number of picture elements obtained by the CCD can be effectively increased.
Therefore, without actually increasing the number of picture elements of the CCD, a high-quality image can be obtained.
IIowever, the actual displacement of the bimorph cell changes in accordance with its ambient temperature and the type of piezoelectric material used. However, a temperature coefficient of the displacement ~alls within the range of 2,000 to 10,000 ppm/C (-20C to 60C).
For example, when the solid-state image sensor is mounted in a VTR camera, an electronic camera or the like, the temperature changes in accordance with the given circumstances. When the temperature changes, the displacement also changes, as described above. As a 36;~
result, the desired displacement canno-t be obtained, resulting in inconvenience. Therefo:re, a high-resolution image cannot be obtained when a bimorph cell is used in the deflection device of a solid-state image sensor.
It is therefore an object of the present invention to provide a new and improved displacement generation device capable of stably generating a periodic displace-ment irrespective of change in the ambient temperature.
The present invention provides a displacement generation device which comprises: a piezoelectric displacement element for receiving an externally applied drive voltage and for generating a displacement in response ko the drive voltage; and an electrical element connected in a series with said piezoelectric displace-ment element and having a temperature coefficient of an electrostatic capacitance which has a polarity opposite to that of the electrostatic capacitance of said piezoelectric displacement element. The electrical element properly changes the drive voltage applied to the piezoelectric displacement element when the electro-static capacitance of the piezoelectric displacement element changes in accordance ~ith a change in temperature, thereby compensating for the displacement of the piezoelectric displacement element which is caused by the change in temperature.
The present invention is best understood by , ~2~3Z3~3 reference to the accompanying drawings, in which:
Fig. 1 is a circuit diagram showing a displacement genera-tion device according to an embodiment of the presen-t invention;
Fig. 2 is a circuit diagram of an equivalen-t circuit of the displacement generation device of Fig. l;
Figs. 3 to 6 respectively are graphs showing the displacement and the temperature characteristic of the electrostatic capacitance of the displacement generat.ion device of Fig. l; and Fig. 7 is a perspective view showing the overall configuration of a displacement generation device for swinging a solid-state charge-coupled device (CCD) to obtain a high-resolution image according to another embodiment of the present invention.
Fig. 1 illustrates a displacement generation device having a temperature compensation function according to an embodiment of the present inventi.on. In this embodiment, a bimorph vibrator 10 is used to constitute a component 12 for genera-ting a periodic displacement.
The bimorph vibrator 10 is comprised oF two plate-like piezo-electric elements lOa and lOb which are firmly stacked at opposing surfaces thereof, thereby constituting a parallel-connected vibrator. Each plate lOa or lOb is made of a proper piezoelectric material and has a thickness of 0.2 mm, a length of 2~ mm and a width of 5 mm. Each piezoelectric plate lOa or lOb is 3~;3 polarized along the direc-tion of thickness thereof. The piezoelectric plates 10a and lOb have the same polarization direction.
An AC power source 14 is provided to feed the bimorph vibrator lO. The power source 14 has an internal impedance which is sufficiently smaller than the impedance of the bimorph vibrato:r 10. The AC power source 14 is connected to the bimorph vibrator 10 through a temperature-compensation electrical element, for example, a capacitor element 16. One terminal of the AC power source 14 is connected, through the capacitor 16 and a first input terminal 18a, to an adhesion surface of the piezoelectric plates lOa and lOb of the bimorph vibrator 10. The other terminal of the AC power source 14 is connected through a second input terminal 18b to the exposed surfaces of the piezoelectric plates 10a and lOb.
Fig. 2 shows an electrical equivalent circuit of the displacement generation device of Fig. 1. Referring to Fig. 2, a displacement generation section 12 comprising the bimorph vibrator 10 is equivalently represented as a capacitor 20 having a predetermined capacitance. In this embodiment, temperature coefficients of an electrostatic capacitance Cp and a displacement d of the bimorph vibrator were 5,000 ppm/C, and the temperature coefficient ~Cl f the temperature-compensation capacitor 16 having an ~L~0~363 electrostatic capacitance C1 was set to be -5,000 ppm/C. At the same time, the electrostatic capacitance Cl was set to be substantially the same as the capacitance Cp of the bimorph vibrator at room temperature.
The physical theory of the circuit having the above arrangement will be described below.
A piezoelectric material used for a bimorph piezoelectric element must have a large piezoelectric constant ~31~ a large coupling coefficient K31 and sufficient mechanical strength. For example, a PZT
(Pb(Zr, Ti)03) based binary system piezoelectric material and suitable ternary system piezoelectric materials may be used as piezoelectric materials. The ternary system piezoelectric materials include a Pb(Yl/2, Nb1/2)03-(Pb, Sr)TiO3-PbZrO3 based material, a 1/2' 1/2)03-Pb(Ti? Zr)3 based material~ a 1/2' 1/2)03-Pb(Ti, Zr)03 based material a Pb(Sb1/2, Nbl/2)03-Pb(Ti, Zr)o3 based material, and a Pb(Znl/2, Nbl/2)03 based and Pb(La1/2, Nbl/2) based material. In particular, a morphotropic phase boundary material has good piezoelectric characteristics.
It is generally known that the displacement of a bimorph piezoelectric element using one of the piezoelectric materials described above changes in accordance with a change in temperature. The bimorph piezoelectric element has an electrostatic capacitance ~LZ~ i3 , since voltage is applied to -the piezoelec-tric material serving as a dielectric material. The capacitance of the piezoelectric material changes in accordance with a change in the ambient temperature. In extensive studies by the present inventor, it was discovered that the temperature coefficient of the displacement was substantially the same as that of the capacitance. It was also discovered that this tendency does not depend on the shape (length, width and thickness) of the bimorph piezoelectric element.
Figs. 3 to 5 respectively are graphs showing changes in the displacement d and the capacitance C in accordance with a change in temperature T. A drive voltage o~ between O and 200 V (f = 30 Hz or 60 Hz) was applied. This voltage corresponded to an electric field of O to 1 kV/mm. The graph of Fig. 3 shows data obtained when a Pb(Yl/2~ NbI/2)03-(Pb' Sr)Tio3-pbzro3 based material (T-96 available from TOSHIBA CERAMICS
CO., LTD) was used. The graph of Fig. ~ shows data ( 1/2' W1/2)3 Pb(T , Zr)o3 ase material (T-85 available from TOSHIBA CERQMICS CO., LTD) was used. The graph of Fig. 5 shows data obtained when a Pb(Y1/2, Nbl/2)03-(Pb, Sr)TiO3-PbZrO3 based material (an improved material of T-96) was used.
The temperature coef~iclent ~S (= s-l-as/aT) of the displacement d, and the temperature coefficient NC (=
C-l-aC~aT) of the capacitance C of the sample shown in 3~;3 Fig. 3 were 5,100 ppm/C and ~,800 pprn/C, respectively;
those of the sample shown in Fig. 4 were 6,300 ppm/C
and 6,000 ppm/C, respectively; and those of the sample shown in Fig. 5 were 2,800 ppm/C and 2,500 ppm/C, respectively. In this manner 3 the tempera-ture coefficients ~S and ~C of the displacement d and the capac;tance C have substantially the same values. The same results are obtained for any other piezoelectric material. Since the piezoelectric materials are used at a lower temperature than the Curie temperature, the different piezoelectric materials show substantially the same tendency at temperatures lower than the Curie temperature.
When a temperature change occurs that increases the displacement of the bimorph vibrator, the electrostatic capacitance thereof is also increased. In thls case, the series-connected capacitor has a temperature coefficient with the opposite sign to that of the displacement (or capacitance), so tha-t the capacitance of the capacitor is decreased. Therefore, the voltage applied to the bimorph piezoelectric element is decreased to decrease the displacement. On the other hand, when the temperature change occurs that decrease the displacement of the bimorph vibrator, the capaci-tance is increased, thereby increase the displacement.
A capacitor havin0 the temperature coefficient ofthe opposite sign to that of the capacitance of the _ 9 bimorph piezoelectric element may be used to obtain a sa-tis-Fac-tory effect. In addition, when the temperature coe~Ficient ~Cl oF the capacitance of the capacitor satis~ies the following relation:
~ T~- a where ~C : the temperature coefficient of the capacitance of the bimorph piezoelectric element T0 : the reference temperature CltT0) : the capacitance of the capacitor at T0 C(T0) : the capacitance of the bimorph piezoelectric element at T0, and also satisfies the following relation:
~C l ~D~ ~s where aS : the temperature coefficient of the displacement of the bimorph piezoelectric element T0 : the reference temperature CltT0) : the capacitance of the capacitor at T0 CtTo) : the capacitance of the bimorph piezoelectric element at T0, a better piezoelectric effect can be obtained.
Desired capacitance and temperature coefficients of the capacitor can be obtained by properly selecting a dielectric material used therefor. For example, it is known that a ceramic capacitor can have a larye ~20~3~3 dielectric constant and can have any temperature coefficient when a metadielectric layer having the Curie temperature lower than the room temperature is used.
Further, it is also possible to prepare a capacitor having the desired electrical characteristics, when a specific material such as a dielectric material obtained by adding various additives to BaTiO3 or Pb(Mgl/3, N 2/3)3 is use -When a voltage VO is applied to a series circuit of a bimorph piezoelectric element ~of capacitance C~ andto a capacitor (of capacitance C1), the voltage V
applied to the bimorph piezoelectric elernent is given as follows:
V = cC,lc~VO ' .. . . (1) A displacement ~ of the bimorph piezoelectric element is given as follows:
~ = S-V ...(2) where S is the piezoelectric compliance.
A change in the displacement upon a change in the temperature T is given in accordance with equations (l) and t2) as follows:
logV = logC1 - log(C1 -t C) ~ log VO (from ~l)) therefore, VaT = ~ [~ aT] (3) and log~ = logS ~ log V (from (2)) 12C~3~;~
therefore 9 1. a~ l~as + l.av (~, According to equations (3) and (4), l.a~ = l.as + c . l, Now assume that the temperature coefficient of the bimorph piezoelectric element after the capacitor is connected in a series therewith ~S ~ S-aaT : the temperature coefficient of the bimorph piezoelectric element before the capacitor is connected in a series therewith ~C ~ c-aC : the temperature coefficient o~ the capacitance of the bimorph piezoelectric element before the capacitor is connected in a series therewith aCl - C1 aT : the temperature coefficient of the capacitance oF the capacitor, equation (S~ is rewritten as follows:
~ ~ S ~ Cl ~C) ..(6) In order to eliminate the change in displacement of the bimorph piezoelectric element which is caused by a change in temperature, the temperature coefficient must become zero. When the relation ~5 ~ aC is used, the following relations by using equation (6) can be ~Z~:3~3 obtained:
~Cl = ~ C ~C ~(7) a Cl a --(8) The capacitances Cl and C can be expressed as follows:
Cl(T) = Cl(T0) + Cl(T0)-acl~T --(9) C(T) = C(T0) + C(T0) aC ~T ...(10) As previously described, the temperature coefficient aC
is as small as 2,000 t-o 10,000 ppm/C, and can be given as follows:
a = T ~T0).~ .............................. (11) ~r ~S . . . ( 11~ ~
When a capacitor having the temperature coefficient aCl is used, the change in displacement caused by the change in temperature becomes substantially zero.
When an allowable tolerance at a temperature difference ~T is lOO~a %, the following inequality must be satisfied:
-a < ~T~a~ < a ...(12) According to equation (6) -(a/~Tj~Cl + C) < Clac -~ Cacl _ (a/QT)(Cl + C) ...(13) When the same calculation as in equation (11) is performed, the following inequality must be satisfied Cl(T0) a Cl(T0) C(:~O~- ~C ~ ~T(l + C~T0) ) <- ~1 ~ - ~T~ aC ~ ~T(l + -~ - ... (14) ~VL~
For example, if Cl(T0) ~ C(T0), the inequality ~~C
2a/~1 < ~Cl < ~~C ~ 2a/~T must be satisfied. In addi-tion, if a is given a value below ~T-~s, the temperature compensation efFect of the capacitor can effectively occur.
The same considera-tion can be applied to other electrical elements such as inductors and resistors.
In particular, it is preferable to use a capacitor.
Because when a resistor or inductor is used, high impedance and large change therein are required. In addition to this disadvantage, the frequency component of the drive voltage is left, resulting ln inconvenience.
According to the displacement generation device arranged to embody the present invention on the basis of the above theory, when a drive voltage of 200 V (peak voltage) at a 30 Hz frequency was applied to the displacement generation section 12 made of the bimorph piezoelectric element or the bimorph vibrator, the present inventor found that the displacement of the bimorph vibrator 10 became constant, irrespective of any change in ambient temperature. Fig. 6 shows the displacement vs ambient temperature characteristics of the embodiment of Fig. 1. As is apparent from Fig. S, even if the ambient temperature was changed by 100 degrees t~rom -20C to +80C), the displacement d obtained by the bimorph vibrator 10 was substantially constant.
According to the displacement generation device having the bimorph p.iezoelectric element of the present invention 7 the temperature-compensation capacitor, whose temperature coef~icient of the capacitance Cp has the same absolute value but has the opposite sign to that of the equivalenk capacitance (and displacement~ of the bimorph vibrator~ is electrically connected in series with the bimorph vibrator. By this simple arrangement and without an additional temperature compensation unit such as a complex external electronic circuit, the temperature compensation of the displacement of the vibrator can be effectively perFormed. According to the present invention, when the electrical element is connected to the displacement generation section consisting of the bimorph piezoelectric element, the change in capacitance of the displacement generation section caused by the change in ambient temperature of the displacement generation section can be compensated for and kept substantially constant since the drive voltage supplied to the bimorph vibrator is stably supplied ~rom the electrical element in accordance with the change in capacitance of the bimorph vibrator caused by the change in temperatu:re.
Referring to Fig. 7, there is schematically illustrated a displacement generation device as an example of an application in vibrating or swinging a ~ ~f'~
solid-sta-te image sensor such as an area charge-coupled device ~CCD) relative to the incoming optical image.
Referring to Fig. 7, an interlace transfer type charge-coupled device 20 (referred to as an QIT-CCDQ
hereinafter) which has an ordinary number (for example, 500 x 400) of picture elements is arranged to be vibrated or swung relative to the incident image beam, by two rectangular plate-shaped bimorph ~iezoelectric elements 22 and 24. The IT-CCD 20 periodically changes its position, that is, vibrates relative to the incoming optical image. When one frame consists of a p:Lurality of fields, the piezoelectric elements 22 and 24 periodically vibrate the IT-CCD 20 in such a manner as to cause it to occupy different image pickup positions while different field periods are incLuded in one frame period. ~ccordingly, the number of picture elements of an image thus picked up by the IT-CCD 20 which makes the aforementioned specific vibration mode is substantially increased, thereby producing a highly precise image without increasing the actual number of picture elements of the IT-CCD 20 itself.
The arrangement of the position displacement generation ~evice for vibrating or swinging the IT-CCD
20 will now be described with reference to Fig. 7. The piezoelectric elements 22 and 24 are made of a conven-tionally known PZT ternary system piezoelectric ceramic.
Each piezoelectric plate was made by cementing together two piezoelectric ceramic plates of a predetermined size. Elastic support plates 26 and ~8 were made of thin nickel plates which have a predetermined size to maximize their displacement. The support plate 26 has two arcuated portions 26a and 26b at both ends thereof, which serve as springs, while the support plate 28 also has similar arcuated portions 28a and 2~b. The piezo-electric plates 22 and 24 are fixed substantially at the centers o~ the elastic support plates 26 and 28, respectively. The piezoelectric plates 22 and 24 are fixed on a frame 29 (having the shape illustrated) such that the plates 22 and 24 can vibrate along the direc-tions indicated by arrows 30. ~ voltage applied to the piezoelectric plates 22 and 24 is controlled to vibrate the piezoelectric plates 22 and 24 in the same vibration mode (i.e., their displacement and vibrating direction are the same at any given time).
A film connector 32 is adhered to the lower surface of the IT-CCD 20. This film connector 32 has a connector body 32-1, a pair of parallel integral C-shaped leg portions 32-2 and 32-3 which are formed on both lateral sides o~ the connector body 32-1, and a plurality of connection members 34 which are made of conductive rubber. In the C-shaped leg portions 32-2 and 32-3, wiring pàtterns 36 are formed as needed to con~orm to the C-shape of the leg portions 32-2 and 32-3. The IT-CCD 20 is fixed by an adhesive to the long 12~:)Z3~3 side surfaces of the piezoelectric plates 22 and 24.
The frame 29 is mounted with the pie70electric plates 22 and 24 on a baseboard 38; and the C-shaped leg portions 32-2 and 32-3 are bent so that the respective connecting members 34 are properly brought into contact with printed conductive films 40 formed on the top surface of the baseboard 38. The conductive films 40 aTe connected by a known technique to the connecting pins 42, respectively.
A micro-chip capacitor device 46 which serves as a temperature-compensation capacitor is adhered to the piezoelectric plate 22. The adhesion position of the capacitor device 46 on the plate must satisfy the following conditions: (I) the capacitor dèvice 46 will not interfere with the vibration of the piezoelectric plate; and (2) the capacitor device 46 will effeGtively detect a change in ambient temperature. Referring to Fig. 7, the capacitor device 46 was cemented to the central area of the side surface of the piezoelectric plate 22. The electrical connection between the capacitor device 46 and the piezoelectric plate 22 was performed in the same manner as described with reference to Figs.~l and 2. The temperature-compensation capacitor~devlce~(not shown in Flg. 7) was cemented to the piezoelectric plate 24 in the manner described above.
According to ~the embodiment shown in Fig. 7, the ~2~2363 _ 18 -piezoelectric elements or vibrators 22 and 2~ are held as if they are subs-tantially floating in air and are positioned on the baseboard 38 such t:hat the elements 22 and 24 are not Firmly coupled to any other member.
Therefore, a vibration displacement of the piezoelectric elements 22 and 24 per unit voltage applied thereto is ideally increased, so that the IT-CCD 20 can be effectively swung so as to contribute greatly to the high resolution of the CCD pickup image. In addition, the micro-chip capacitors 46 which serve as temperature-compensation electric elements are adhered to the piezoelectric vibrators 22 and 24, respectively.
for the same reason as in the First embodiment, the IT-CCD-20 can be stably vibrated in the desired vibration mode in a simple arrangement without incor-porating any other electrical circuit and irrespective of a change in ambient temperature. Since the micro-chip capacitor device can be used as the necessary temperature compensation electrical element, the element can be easily housed in a CCD package, thereby further simplifying the construction of the device as a whole.
Although the present invention has been shown and described with respect to particular embodiments, various changes and modifications which are obvious to a person skilled in the art to which the invention pertains are deemed to lie within the spirit and scope of the invention.
1~20Z363 In the above embodiments, a parallel-connected bimorph piezoelectric element is used in the displacemen-t generation section. Ho~ever, a bimorph piezoelectric element having plates whose polarization directions are opposed may be used. In addition, the piezoelectric pla-tes are not limited -to two; the piezoelectric element may have only one piezoelectric plate, or three or more piezoelectric plates.
Furthermore, the piezoelectric plates may be fixed on a metal plate or the like as needed.
It should be noted that the piezoelectric displace-ment generation element may be made of a parallel type element or a transverse type element. In the parallel type element, when an electric Field is applied in -the same direction as the polarization direction of the element, the thickness of the element is increased.
When elements of this type are stacked they obtain a large displacement (d33 or k33). On the other hand, in the transverse type element, when an electrical field is applied in a direction perpendicular to the polarization direction, a slip-like displacement occurs. Elements of this type are stacked to obtain a high amplification (dl5 or kl5). According to the present invention, the bimorph, parallel or transverse type piezoelectric element can be used as needed.
Claims (15)
1. A displacement generation device comprising:
(a) a piezoelectric element, having an electrostatic capacitance with a predetermined temperature coefficient, for receiving an externally applied drive voltage and for generating a displacement in response to the drive voltage; and (b! electrical element means, electrically connected in series with said piezoelectric element and having an electrostatic capacitance with a temperature coefficient whose sign is opposite to that of the predetermined temperature coefficient, for properly changing the drive voltage to be applied to said piezoelectric element when the electrostatic capacitance of said piezoelectric element changes in accordance with a change in ambient temperature, thereby compensating for the displacement of said piezoelectric element caused by the change in ambient temperature.
(a) a piezoelectric element, having an electrostatic capacitance with a predetermined temperature coefficient, for receiving an externally applied drive voltage and for generating a displacement in response to the drive voltage; and (b! electrical element means, electrically connected in series with said piezoelectric element and having an electrostatic capacitance with a temperature coefficient whose sign is opposite to that of the predetermined temperature coefficient, for properly changing the drive voltage to be applied to said piezoelectric element when the electrostatic capacitance of said piezoelectric element changes in accordance with a change in ambient temperature, thereby compensating for the displacement of said piezoelectric element caused by the change in ambient temperature.
2. A device according to claim 1, wherein said electrical element means comprises a capacitor element.
3. A device according to claim 2, which further comprises AC power source means, connected to said piezoelectric element through said capacitor element, for supplying an AC power voltage as the drive voltage to said piezoelectric element.
4. A device according to claim 3, wherein said piezoelectric element comprises a bimorph piezoelectric element.
5. A device according to claim 3, wherein said electrical element means comprises a parallel type piezoelectric element.
6. A device according to claim 3, wherein said electrical element means comprises a transverse type piezoelectric element.
7. A device according to claim 2, wherein the temperature coefficient of the capacitance of said capacitor element is substantially equal to:
where .alpha.C: the predetermined temperature coefficient of the electrostatic capacitance of said piezoelectric element TO: a reference temperature C1(TO): an electrostatic capacitance of said capacitor element at the reference temperature TO
C(TO): an electrostatic capacitance of said piezoelectric element at the reference temperature TO.
where .alpha.C: the predetermined temperature coefficient of the electrostatic capacitance of said piezoelectric element TO: a reference temperature C1(TO): an electrostatic capacitance of said capacitor element at the reference temperature TO
C(TO): an electrostatic capacitance of said piezoelectric element at the reference temperature TO.
8. A device according to claim 5, wherein the electrostatic capacitance C1(TO) of said capacitor element at the reference temperature TO is set to be equivalent to the electrostatic capacitance C(TO) of said piezoelectric element at said reference temperature TO, so that the temperature coefficient of the capacitance C1(TO) of said capacitor element has substantially the same absolute value as that of the temperature coefficient .alpha.C of the capacitance of said piezoelectric element but has an opposite sign thereto.
9. A device according to claim 2, wherein the temperature coefficient of the capacitance of said capacitor element is substantially equal to:
where .alpha.S: a temperature coefficient of the displacement of said piezoelectric element TO: a reference temperature C1(TO): an electrostatic capacitance of said capacitor element at the reference temperature TO
C(TO): an electrostatic capacitance of said piezoelectric element at the reference temperature TO.
where .alpha.S: a temperature coefficient of the displacement of said piezoelectric element TO: a reference temperature C1(TO): an electrostatic capacitance of said capacitor element at the reference temperature TO
C(TO): an electrostatic capacitance of said piezoelectric element at the reference temperature TO.
10. A device according to claim 9, wherein the electrostatic capacitance C1(TO) of said capacitor element at the reference temperature TO is set to be equivalent to the electrostatic capacitance C(TO) of said piezoelectric element at the reference temperature TO, so that the temperature coefficient of the capacitance C1(TO) of said capacitor element has substantially the same absolute value as that of the temperature coefficient .alpha.S of the displacement of said piezoelectric element but has an opposite sign thereto.
11. A solid-state image sensing device comprising:
(a) a solid-state image sensor which receives image light incident thereon to provide an electrical image pickup signal corresponding to the image light;
(b) piezoelectric element means, mechanically coupled to said image sensor, for receiving an externally applied AC drive voltage and for vibrating said image sensor in response to the AC drive voltage so as to cause said image sensor to periodically vibrate in conformity with relative positions of said image sensor and the image light, said piezoelectric element means having an electrostatic capacitance with a predetermined temperature coefficient; and (c) capacitor means, electrically connected in series with said piezoelectric element means and having an electrostatic capacitance with a temperature coefficient whose sign is opposite to that of the predetermined temperature coefficient, for properly changing the drive voltage to be applied to said piezoelectric element means when the electrostatic capacitance of said piezoelectric element means changes in accordance with a change in ambient temperature, thereby causing said piezoelectric element means to generate a periodic displacement so as to keep the periodic displacement constant independently of the change in ambient temperature.
(a) a solid-state image sensor which receives image light incident thereon to provide an electrical image pickup signal corresponding to the image light;
(b) piezoelectric element means, mechanically coupled to said image sensor, for receiving an externally applied AC drive voltage and for vibrating said image sensor in response to the AC drive voltage so as to cause said image sensor to periodically vibrate in conformity with relative positions of said image sensor and the image light, said piezoelectric element means having an electrostatic capacitance with a predetermined temperature coefficient; and (c) capacitor means, electrically connected in series with said piezoelectric element means and having an electrostatic capacitance with a temperature coefficient whose sign is opposite to that of the predetermined temperature coefficient, for properly changing the drive voltage to be applied to said piezoelectric element means when the electrostatic capacitance of said piezoelectric element means changes in accordance with a change in ambient temperature, thereby causing said piezoelectric element means to generate a periodic displacement so as to keep the periodic displacement constant independently of the change in ambient temperature.
12. A device according to claim 11, wherein said capacitor means comprises a capacitor element.
13. A device according to claim 12, wherein said piezoelectric element means comprises a bimorph piezoelectric element formed in a rectangular plate shape.
14. A device according to claim 11, wherein said piezoelectric element means comprises a parallel type piezoelectric element.
15. A device according to claim 11, wherein said piezoelectric element means comprises a transverse type piezoelectric element.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58053772A JPS59181585A (en) | 1983-03-31 | 1983-03-31 | Displacement generator |
| JP53772/83 | 1983-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1202363A true CA1202363A (en) | 1986-03-25 |
Family
ID=12952102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000451008A Expired CA1202363A (en) | 1983-03-31 | 1984-03-30 | Temperature compensated displacement generating device |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4608506A (en) |
| EP (1) | EP0124250B1 (en) |
| JP (1) | JPS59181585A (en) |
| CA (1) | CA1202363A (en) |
| DE (1) | DE3465649D1 (en) |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4866326A (en) * | 1987-02-19 | 1989-09-12 | Brother Kogyo Kabushiki Kaisha | Driver circuit for piezoelectric actuator, and impact dot-matrix printer using the driver circuit |
| US4841191A (en) * | 1987-02-20 | 1989-06-20 | Hitachi, Ltd. | Piezoelectric actuator control apparatus |
| JPH0671324B2 (en) * | 1987-04-03 | 1994-09-07 | オリンパス光学工業株式会社 | Imaging device |
| JP2508137B2 (en) * | 1987-10-02 | 1996-06-19 | トヨタ自動車株式会社 | Piezo actuator |
| JPH01118447A (en) * | 1987-10-30 | 1989-05-10 | Brother Ind Ltd | Impact type printer |
| DE3809284A1 (en) * | 1988-03-19 | 1989-09-28 | Diehl Gmbh & Co | Control circuit for a piezo-actuator |
| JPH01251965A (en) * | 1988-03-31 | 1989-10-06 | Toshiba Corp | Solid-state image pickup device |
| JPH01283888A (en) * | 1988-05-10 | 1989-11-15 | Brother Ind Ltd | Operating method for piezoelectric actuator loaded device |
| US5051646A (en) * | 1989-04-28 | 1991-09-24 | Digital Instruments, Inc. | Method of driving a piezoelectric scanner linearly with time |
| JP2672160B2 (en) * | 1989-10-23 | 1997-11-05 | キヤノン株式会社 | Vibration type actuator device |
| CA2020185A1 (en) * | 1990-03-05 | 1991-09-06 | Gordon Walter Culp | Electrical drive for a segmented transducer |
| EP0469193A1 (en) * | 1990-08-03 | 1992-02-05 | Koninklijke Philips Electronics N.V. | Temperature stabilized crystal oscillator |
| EP0646798B1 (en) * | 1991-09-24 | 2001-12-05 | Murata Manufacturing Co., Ltd. | Acceleration sensor |
| US5241233A (en) * | 1992-03-16 | 1993-08-31 | Rockwell International Corporation | Electric drive for a rectifying segmented transducer |
| JPH05264391A (en) * | 1992-03-19 | 1993-10-12 | Unisia Jecs Corp | Pressure sensor |
| DE4234237C2 (en) * | 1992-10-10 | 2000-11-30 | Bosch Gmbh Robert | Temperature compensated micro actuator |
| US5489994A (en) * | 1993-10-29 | 1996-02-06 | Eastman Kodak Company | Integrated apertures on a full frame CCD image sensor |
| JP3274047B2 (en) * | 1995-10-05 | 2002-04-15 | 株式会社豊田中央研究所 | Driving device and driving method for piezoelectric actuator |
| JP3233059B2 (en) * | 1997-03-07 | 2001-11-26 | 株式会社村田製作所 | Ultrasonic sensor |
| FR2782420B1 (en) * | 1998-08-13 | 2003-01-17 | Sfim Ind | IMPROVEMENTS ON VIBRATION MOTORS |
| DE10033751B4 (en) * | 2000-07-12 | 2004-09-16 | Lenz, Reimar, Dr. | Digital, high-resolution cinema film camera |
| DE10113802B4 (en) * | 2001-03-21 | 2007-10-18 | Siemens Ag | Device for driving a piezoelectric actuator |
| JP3661602B2 (en) * | 2001-03-27 | 2005-06-15 | 株式会社村田製作所 | Calculation method of temperature characteristics of piezoelectric resonator |
| DE10223553B4 (en) * | 2002-05-27 | 2004-08-05 | Siemens Ag | Method for controlling an actuator and associated control device |
| DE102008030248A1 (en) * | 2008-06-25 | 2009-12-31 | Conti Temic Microelectronic Gmbh | Control circuit and method for controlling piezo unit, in particular trimorphic piezoelectric actuator |
| JP2010263002A (en) * | 2009-04-30 | 2010-11-18 | Brother Ind Ltd | Piezoelectric actuator unit and liquid transporting apparatus including the same |
| WO2012149676A1 (en) | 2011-05-03 | 2012-11-08 | University Of Science And Technology Of China | Switched capacitor charge pump driver for piezoelectric actuator |
| JP5935187B2 (en) * | 2012-08-10 | 2016-06-15 | 日本特殊陶業株式会社 | Piezoelectric ceramics and piezoelectric actuator using the same |
| EP3432372A1 (en) * | 2017-07-20 | 2019-01-23 | Koninklijke Philips N.V. | Actuator structure and actuation method thereof |
| GB2567188A (en) | 2017-10-05 | 2019-04-10 | Ft Tech Uk Ltd | Fluid flow measuring device and associated method |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1840580A (en) * | 1927-07-25 | 1932-01-12 | Bell Telephone Labor Inc | Crystal-controlled oscillator |
| US2157665A (en) * | 1935-10-16 | 1939-05-09 | Telefunken Gmbh | Crystal mounting with temperature compensation |
| NL51407C (en) * | 1937-03-16 | |||
| US3185869A (en) * | 1961-12-01 | 1965-05-25 | Endevco Corp | Transducer |
| US3646413A (en) * | 1970-09-25 | 1972-02-29 | Avco Corp | Piezoelectric-driven variable capacitor |
| AU462333B2 (en) * | 1973-04-25 | 1975-06-19 | Matsushita Electric Industrial, Co. Ltd | Record reproducing'system |
| JPS542043A (en) * | 1977-06-07 | 1979-01-09 | Murata Manufacturing Co | Temperature compensating capacitor and oscillator using same |
| JPS57208418A (en) * | 1981-06-18 | 1982-12-21 | Toyota Central Res & Dev Lab Inc | Vibration sensor of engine |
-
1983
- 1983-03-31 JP JP58053772A patent/JPS59181585A/en active Granted
-
1984
- 1984-03-22 US US06/592,542 patent/US4608506A/en not_active Expired - Fee Related
- 1984-03-27 EP EP84302051A patent/EP0124250B1/en not_active Expired
- 1984-03-27 DE DE8484302051T patent/DE3465649D1/en not_active Expired
- 1984-03-30 CA CA000451008A patent/CA1202363A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| EP0124250B1 (en) | 1987-08-26 |
| EP0124250A1 (en) | 1984-11-07 |
| DE3465649D1 (en) | 1987-10-01 |
| US4608506A (en) | 1986-08-26 |
| JPS6310595B2 (en) | 1988-03-08 |
| JPS59181585A (en) | 1984-10-16 |
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