CA1230496A - Differential pressure sensor - Google Patents
Differential pressure sensorInfo
- Publication number
- CA1230496A CA1230496A CA000481570A CA481570A CA1230496A CA 1230496 A CA1230496 A CA 1230496A CA 000481570 A CA000481570 A CA 000481570A CA 481570 A CA481570 A CA 481570A CA 1230496 A CA1230496 A CA 1230496A
- Authority
- CA
- Canada
- Prior art keywords
- orifice
- differential pressure
- pressure sensor
- diaphragm
- stem
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/38—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
- G01F1/383—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule with electrical or electro-mechanical indication
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
Abstract
DIFFERENTIAL PRESSURE SENSOR
ABSTRACT:
A differential pressure sensor assembly (10) is disclosed, which includes a transducer (12) and a differential pressure sensor. The sensor responds to a fluid pressure change across an orifice (16) of a known size and transfers this sensed pressure differential to the transducer. The electronic elements of the trans-ducer are not exposed to the fluid which may be at an elevated temperature or have entrained particulates.
The fluid flow can be determined by noting the fluid pressure change across the orifice of known size.
ABSTRACT:
A differential pressure sensor assembly (10) is disclosed, which includes a transducer (12) and a differential pressure sensor. The sensor responds to a fluid pressure change across an orifice (16) of a known size and transfers this sensed pressure differential to the transducer. The electronic elements of the trans-ducer are not exposed to the fluid which may be at an elevated temperature or have entrained particulates.
The fluid flow can be determined by noting the fluid pressure change across the orifice of known size.
Description
s3~i DIFFERENTIAL PRESSURE SENSOR
Description 1. Field of the Invention The present invention relates to pressure sensors used in the measurement of pressure in fluid mediums, which mediums may be either liquid or gas.
Description 1. Field of the Invention The present invention relates to pressure sensors used in the measurement of pressure in fluid mediums, which mediums may be either liquid or gas.
2. Prior Art Pressure sensors known in the prior art generally teach a pressure or force responsive diaphragm forming one plate or electrode of a capacitor. This electrode or capacitor plate is subject to deformation, the extent of which is compared to a second electrode means or capacitive plate that is not displaced. As the deformation varies the distance between such capacitor plates, an electrical or electrically translatable signal is produced which can be calibrated to relate the deformation to the deforming force. The production of such capacitor sensors or transducers is well ~nown in the art.
An inherent part of the capacitive sensor structures available today is a ceramic diaphragm operator. However, the deformation of any diaphragm operator results from the differential force acting on both sides of such a diaphragm. This differential force is then translated into an electrical analog signal through an electrode means or capacitive plate sensor 04~
which in fact measures the deformation or displacement of such diaphragm operator. These analog signals are thereafter calibrated or related to the measured or sensed parameter. Such a variable capacitance sensor is illustrated in U.S. Patent No. 3,859, 575 (Lee et al) wherein a rod and plate are provided to react to a force and apply it to capacitive or separated electrode plates calibrated to measure the force applied to the rod.
More specifically, the embodiment taught at figure 4 provides a force applied to rod 90 to increase ~he separation between electrode plates 5 and 23. Diaphragm or plate 96 is primarily provided to ensure centering of rod 90 and may be provided with pressure relieving holes or apertures. Thus, the forces communicated to the electrodes for measurement are provided through rod member 90. Alternatively, pressure forces may be communicated to rod 9 as in Figure 1 through chamber 31 which forces act on the lower surface of the diaphragm.
However, such force is measured as a difference between the pressure on either side of surface 5.
~ means for indicating pressure in subter-ranean formations is taught in U.S. Patent No. 4,125,027 (Clark). This patent discloses a variable capacitance sensor responsive to changes in ambient pressure, not to a differential pressure across an orifice. Further, it uses an arm extending from its diaphragm operator as a centering means to maintain location of its electrode or stator 24. However, there is no means provided to measure a differential pressure across an orifice nor is there any means disclosed to provide such measurement in a remote setting to protect, or provide a protective environment for, the electronics associated with this sensor. U.S. Patent No. 4,38Z,377 (Kleinschmidt et al) ~L~23~9~i teaches a piezoelectric pressure sensor for detecting knock and ping. This sensor is~ designed to be secured in a cylinder head for an internal com~ustion engine with the membrane diaphragm losated within a cylin2er.
The forces being measured are provided at membrane 15.
Again there is no provision in the structure to provide a differential pressure across an orifice in a flow passage. The reference pressure against which ~he sensed pressure is compared may be atmosphere or a vacuum, but it is not a pressure drop across an orifice.
A differential pressure transducer is taught in U.S. Patent No. 4,382,385 (Paros). This transducer includes an air tight enclosure with a pair of pressure ports coupled to opposite sides of a pressure-sensing lS diaphragm or bellows. The force generated by the pressure differential is coupled to a stress-sensitive resonator either directly or through a force-trans-mitting structure. This structure teaches the use of bellows operators in cooperation with a resonator member or resonant sensitive member to provide a measured signal. In U.S. Patent No. 4,0~9,036 ~Geronime) a capacitive type load cell is disclosed having a dia-phragm member mounted to a support for movement relative thereto. However, there is no indication of communic-ation of a pressure or differential pressure across thediaphragm ~ace to provide the force for moving such diaphragm. Furth~r~ the relationship of the diaphragm and support button is provided to reduce radial bending stresses in the diaphragm during loading, which implies that all loading is provided external to the electronic structure. Therefore, Geronime '036 recognizes the need to provide protective environments for electronic components.
The o~jective of the above devices is to prri-`Jld~ 3, variable capacitance type signal to measure applied force.
This measurement is proportional to, or a function of, a change in distance between capacitor plates. Some of the references identified above recognized the problem associated with the introduction of electronic components into harsh environments, but did not propose effective solutions. In the case of Kleinschmidt et al '377, the sensor has been partially encapsulated with an expensive electronic structure to overcome the introduction of the device into a harsh environment. A similar device for force measurement is taught by Everett/Charles Marketing Services, Inc. Their model FT655 includes a force transducer in contact with a mechanical arm to move a pressure transducer diaphragm. This device is advertised specifically for use in an environment exposed to compression forces. The present invention provides a means for measurement of a differential pressure across an orifice in a harsh environment which may include fluids at elevated temperatures and entrained particulates. It utilizes a pressure sensor, particularly a capacitive pressure sensor, without exposing the electronic circuitry thereof to either heat, corrosion or dielectric degradation. Therefore, the pressure drop across an orifice is continuously provided, and as the orifice is of a known size it provides a means to measure flow rate.
Specifically, this invention relates to a differential pressure sensor assembly for measuring the pressure drop across an orifice in a fluid flow passage at a location displaced from sd/J~ -4-~ ~ 3 ~ 7 the orifice and passage, comprising a transducor raeans including a housing, a first diaphragm operatGr, and an electronic signal means sealed in the housing and operabio in response to movement of the first diaphragm operator; a sensing and pressure-response transfer means, including a wall structure defining an enclosure, a second diaphragm operator positioned in the enclosure to define an inlet chamber and an outlet chamber therein, the wall structure defining a stem port, an inlet port communicating betT,Jeen the inlet chamber and the fluid passage upstream of the orifice, and an outlet port communicating beteen the outlet chamber and the fluid passage downstream of the orifice; a stem connected to and operable by the s~cond diaphragm operator, which stem e~tends through the stem port to contact the first diaphragm operator; and seal means to seal fluid flow through the stem port, the pressure drop across the orifice being monitored by the pressure-response transfer means and transmitted by the stem to the transducer means.
The single figure of the drawing illustrates a diagrammatic cross-section of the present invention.
The present invention encompasses a differential pressure sensor assembly for remotely measuring the pressure drop of a fluid across an orifice in a sd/~ -4A-- s -fluid flow passage to sense such fluid flow or pressure drop and communicate the differential pressure to an electrode transducer means such as a capacitive pressure sensor, without introducing extremes in heat or corro-sive atmosphere to the transducer. This sensor assemblyincludes two elements, that is, a transducer and a pressure sensing transfer means to communicate a pressure differential to the transducer. This arrange-ment provides ease of assembly, protects the sensitive electronic elements, and a means to retain the di-electric atmosphere surrounding the electronic elements of the transducer. Therefore, the electronic pressure sensor is being utilized to sense a differential pressure but is insulated from a potentially destructive environment.
The relationship of the parts of an assembly of a differential pressure sensor assembly 10 utilized for the measurement of pressure of a fluid medium is illustrated in the drawing. ~s there shown, a sensor assembly 10 includes three distinct elements: a transducer means 12; a sensing and pressure-response transfer means 14; and, an orifice 16 in a fluid passage 18. Transducer means 12 has a first diaphragm operator 20, a cover or housing 22 and a capacitance plate 24 which is positioned in a chamber 26 defined by cover 22 and diaphragm 2U. Capacitor plate 24 has a lower surface 2 and an upper surface 30. The transducer means, preferably a capacitive pressure transducer, is shown in the reference position with no deflection of its diaphragm 20. In this reference position capacitor plate 24 has an electrode or capacitance plate (not shown) mounted on surface 28 and parallel to a capacitor plate (not shown) mounted on the facing surface 32 ~v~
defined by diaphragm 20. As diaphragm 20 is deflected, the capacitance changes between the plates on surfaces 28 and 32. These plates 28 and ~2 comprise an elec-tronic signal means which cooperates with any suitable electrical circuit (not shown). The capacitance ~aries with changes in diaphragm deformation producing a correspondingly varying signal which, as known in the art, can be related to the force producing the de-flection of diaphragm 20.
Transfer means 14 includes a wall structure 34 defining an enclosure 3~. Positioned in enclosure 36 is a second diaphragm operator 38 which cooperates with wall structure 34 to define an inlet chamber 40 and an outlet chamber 42. Wall structure 34 further defines an inlet port 44, an outlet port 46, and a stem port 48. A
stem 50 is positioned in chamber 42 as shown, and is connected to and operable by second diaphragm operator 38. Stem 50 extends through stem port 48 to contact first diaphragm operator 20. A seal means 52 is provided to seal fluid flow through port 48. Inl~t port 44 communicates between fluid passage 1~ (upstream of orifice 16) and inlet chamber 40, and outlet port 46 communicates between fluid passage 18 (downstream of orifice 16) and outlet chamber 4~.
In operation assembly 10 measures the pressure drop of fluid flow in passage 1~ as the fluid passes through orifice 16, which passage 18 may be an exhaust gas recirculation passage of-an automobile engine. The upstream pressure is communicated to inlet chamber 40 through inlet port 44. The downstream pressure is communicated to chamber 42 of the transfer means through outlet port 46, such downstream fluid pressure being ~3~ 6 lower than the upstream ~luid pressure. Second di~-phragm operator 38, which may be an elastomeric material for greater response, is displaced in response to ~he pressure differential. This diaphragm 38 movement will in turn move stem 50. Stem 50, in contact with first diaphragm 20, communicates this diaphragm 38 movement to the transducer assembly 12 causing diaphragm 20 and its associated capacitive plate means to deflect and vary the capacitance and thus vary an electrical signal, related to the pressure drop through orifice 16.
Therefore, the pressure drop across orifice 16, which is preferably a square-edged orifice, can be measured by a transducer assembly and, as the size of orifice 16 is known, the flow through such orifice can also be determined.
It can now be appreciated that the transducer ~2 will measure a differential pressure across an orifice 16 of a known size without coming into contact with the fluid transferred through fluid passage 1~.
Such measurement in the past would require the fluid to be communicated to either side of diaphragm 2~. Direct contact of the fluid, which may be at an elevated temperature or have entrained particulates, with the capacitive plate mounted side of diaphragm 20 would introduce heat and corrosive atmosphere into this sensitive area. Heat, corrosive atmospheres or part-iculate laden fluids would severely deteriorate, either through corrosion or by disturbing the dielectric constant within such enclosed chamber, the monitoring or calibration of the electronic means. Consequently, it has been the practice to utilize force measurement sensors balanced against atmospheric pressure or a pressure within an enclosed chamber such as 26 of transducer assembly 1Z. This would not provide effec-tive measurement of a differential pressure.
Those skilled in the art will recognize that certain variations can be made in the illustrative embodiment. While only a specific embodiment of the invention has been described and shown, it is apparent that that various alterations and modifications can be made therein. It is, therefore, the intention in the appended claims to cover all such modifications and alterations as may fall within the true scope of the invention.
An inherent part of the capacitive sensor structures available today is a ceramic diaphragm operator. However, the deformation of any diaphragm operator results from the differential force acting on both sides of such a diaphragm. This differential force is then translated into an electrical analog signal through an electrode means or capacitive plate sensor 04~
which in fact measures the deformation or displacement of such diaphragm operator. These analog signals are thereafter calibrated or related to the measured or sensed parameter. Such a variable capacitance sensor is illustrated in U.S. Patent No. 3,859, 575 (Lee et al) wherein a rod and plate are provided to react to a force and apply it to capacitive or separated electrode plates calibrated to measure the force applied to the rod.
More specifically, the embodiment taught at figure 4 provides a force applied to rod 90 to increase ~he separation between electrode plates 5 and 23. Diaphragm or plate 96 is primarily provided to ensure centering of rod 90 and may be provided with pressure relieving holes or apertures. Thus, the forces communicated to the electrodes for measurement are provided through rod member 90. Alternatively, pressure forces may be communicated to rod 9 as in Figure 1 through chamber 31 which forces act on the lower surface of the diaphragm.
However, such force is measured as a difference between the pressure on either side of surface 5.
~ means for indicating pressure in subter-ranean formations is taught in U.S. Patent No. 4,125,027 (Clark). This patent discloses a variable capacitance sensor responsive to changes in ambient pressure, not to a differential pressure across an orifice. Further, it uses an arm extending from its diaphragm operator as a centering means to maintain location of its electrode or stator 24. However, there is no means provided to measure a differential pressure across an orifice nor is there any means disclosed to provide such measurement in a remote setting to protect, or provide a protective environment for, the electronics associated with this sensor. U.S. Patent No. 4,38Z,377 (Kleinschmidt et al) ~L~23~9~i teaches a piezoelectric pressure sensor for detecting knock and ping. This sensor is~ designed to be secured in a cylinder head for an internal com~ustion engine with the membrane diaphragm losated within a cylin2er.
The forces being measured are provided at membrane 15.
Again there is no provision in the structure to provide a differential pressure across an orifice in a flow passage. The reference pressure against which ~he sensed pressure is compared may be atmosphere or a vacuum, but it is not a pressure drop across an orifice.
A differential pressure transducer is taught in U.S. Patent No. 4,382,385 (Paros). This transducer includes an air tight enclosure with a pair of pressure ports coupled to opposite sides of a pressure-sensing lS diaphragm or bellows. The force generated by the pressure differential is coupled to a stress-sensitive resonator either directly or through a force-trans-mitting structure. This structure teaches the use of bellows operators in cooperation with a resonator member or resonant sensitive member to provide a measured signal. In U.S. Patent No. 4,0~9,036 ~Geronime) a capacitive type load cell is disclosed having a dia-phragm member mounted to a support for movement relative thereto. However, there is no indication of communic-ation of a pressure or differential pressure across thediaphragm ~ace to provide the force for moving such diaphragm. Furth~r~ the relationship of the diaphragm and support button is provided to reduce radial bending stresses in the diaphragm during loading, which implies that all loading is provided external to the electronic structure. Therefore, Geronime '036 recognizes the need to provide protective environments for electronic components.
The o~jective of the above devices is to prri-`Jld~ 3, variable capacitance type signal to measure applied force.
This measurement is proportional to, or a function of, a change in distance between capacitor plates. Some of the references identified above recognized the problem associated with the introduction of electronic components into harsh environments, but did not propose effective solutions. In the case of Kleinschmidt et al '377, the sensor has been partially encapsulated with an expensive electronic structure to overcome the introduction of the device into a harsh environment. A similar device for force measurement is taught by Everett/Charles Marketing Services, Inc. Their model FT655 includes a force transducer in contact with a mechanical arm to move a pressure transducer diaphragm. This device is advertised specifically for use in an environment exposed to compression forces. The present invention provides a means for measurement of a differential pressure across an orifice in a harsh environment which may include fluids at elevated temperatures and entrained particulates. It utilizes a pressure sensor, particularly a capacitive pressure sensor, without exposing the electronic circuitry thereof to either heat, corrosion or dielectric degradation. Therefore, the pressure drop across an orifice is continuously provided, and as the orifice is of a known size it provides a means to measure flow rate.
Specifically, this invention relates to a differential pressure sensor assembly for measuring the pressure drop across an orifice in a fluid flow passage at a location displaced from sd/J~ -4-~ ~ 3 ~ 7 the orifice and passage, comprising a transducor raeans including a housing, a first diaphragm operatGr, and an electronic signal means sealed in the housing and operabio in response to movement of the first diaphragm operator; a sensing and pressure-response transfer means, including a wall structure defining an enclosure, a second diaphragm operator positioned in the enclosure to define an inlet chamber and an outlet chamber therein, the wall structure defining a stem port, an inlet port communicating betT,Jeen the inlet chamber and the fluid passage upstream of the orifice, and an outlet port communicating beteen the outlet chamber and the fluid passage downstream of the orifice; a stem connected to and operable by the s~cond diaphragm operator, which stem e~tends through the stem port to contact the first diaphragm operator; and seal means to seal fluid flow through the stem port, the pressure drop across the orifice being monitored by the pressure-response transfer means and transmitted by the stem to the transducer means.
The single figure of the drawing illustrates a diagrammatic cross-section of the present invention.
The present invention encompasses a differential pressure sensor assembly for remotely measuring the pressure drop of a fluid across an orifice in a sd/~ -4A-- s -fluid flow passage to sense such fluid flow or pressure drop and communicate the differential pressure to an electrode transducer means such as a capacitive pressure sensor, without introducing extremes in heat or corro-sive atmosphere to the transducer. This sensor assemblyincludes two elements, that is, a transducer and a pressure sensing transfer means to communicate a pressure differential to the transducer. This arrange-ment provides ease of assembly, protects the sensitive electronic elements, and a means to retain the di-electric atmosphere surrounding the electronic elements of the transducer. Therefore, the electronic pressure sensor is being utilized to sense a differential pressure but is insulated from a potentially destructive environment.
The relationship of the parts of an assembly of a differential pressure sensor assembly 10 utilized for the measurement of pressure of a fluid medium is illustrated in the drawing. ~s there shown, a sensor assembly 10 includes three distinct elements: a transducer means 12; a sensing and pressure-response transfer means 14; and, an orifice 16 in a fluid passage 18. Transducer means 12 has a first diaphragm operator 20, a cover or housing 22 and a capacitance plate 24 which is positioned in a chamber 26 defined by cover 22 and diaphragm 2U. Capacitor plate 24 has a lower surface 2 and an upper surface 30. The transducer means, preferably a capacitive pressure transducer, is shown in the reference position with no deflection of its diaphragm 20. In this reference position capacitor plate 24 has an electrode or capacitance plate (not shown) mounted on surface 28 and parallel to a capacitor plate (not shown) mounted on the facing surface 32 ~v~
defined by diaphragm 20. As diaphragm 20 is deflected, the capacitance changes between the plates on surfaces 28 and 32. These plates 28 and ~2 comprise an elec-tronic signal means which cooperates with any suitable electrical circuit (not shown). The capacitance ~aries with changes in diaphragm deformation producing a correspondingly varying signal which, as known in the art, can be related to the force producing the de-flection of diaphragm 20.
Transfer means 14 includes a wall structure 34 defining an enclosure 3~. Positioned in enclosure 36 is a second diaphragm operator 38 which cooperates with wall structure 34 to define an inlet chamber 40 and an outlet chamber 42. Wall structure 34 further defines an inlet port 44, an outlet port 46, and a stem port 48. A
stem 50 is positioned in chamber 42 as shown, and is connected to and operable by second diaphragm operator 38. Stem 50 extends through stem port 48 to contact first diaphragm operator 20. A seal means 52 is provided to seal fluid flow through port 48. Inl~t port 44 communicates between fluid passage 1~ (upstream of orifice 16) and inlet chamber 40, and outlet port 46 communicates between fluid passage 18 (downstream of orifice 16) and outlet chamber 4~.
In operation assembly 10 measures the pressure drop of fluid flow in passage 1~ as the fluid passes through orifice 16, which passage 18 may be an exhaust gas recirculation passage of-an automobile engine. The upstream pressure is communicated to inlet chamber 40 through inlet port 44. The downstream pressure is communicated to chamber 42 of the transfer means through outlet port 46, such downstream fluid pressure being ~3~ 6 lower than the upstream ~luid pressure. Second di~-phragm operator 38, which may be an elastomeric material for greater response, is displaced in response to ~he pressure differential. This diaphragm 38 movement will in turn move stem 50. Stem 50, in contact with first diaphragm 20, communicates this diaphragm 38 movement to the transducer assembly 12 causing diaphragm 20 and its associated capacitive plate means to deflect and vary the capacitance and thus vary an electrical signal, related to the pressure drop through orifice 16.
Therefore, the pressure drop across orifice 16, which is preferably a square-edged orifice, can be measured by a transducer assembly and, as the size of orifice 16 is known, the flow through such orifice can also be determined.
It can now be appreciated that the transducer ~2 will measure a differential pressure across an orifice 16 of a known size without coming into contact with the fluid transferred through fluid passage 1~.
Such measurement in the past would require the fluid to be communicated to either side of diaphragm 2~. Direct contact of the fluid, which may be at an elevated temperature or have entrained particulates, with the capacitive plate mounted side of diaphragm 20 would introduce heat and corrosive atmosphere into this sensitive area. Heat, corrosive atmospheres or part-iculate laden fluids would severely deteriorate, either through corrosion or by disturbing the dielectric constant within such enclosed chamber, the monitoring or calibration of the electronic means. Consequently, it has been the practice to utilize force measurement sensors balanced against atmospheric pressure or a pressure within an enclosed chamber such as 26 of transducer assembly 1Z. This would not provide effec-tive measurement of a differential pressure.
Those skilled in the art will recognize that certain variations can be made in the illustrative embodiment. While only a specific embodiment of the invention has been described and shown, it is apparent that that various alterations and modifications can be made therein. It is, therefore, the intention in the appended claims to cover all such modifications and alterations as may fall within the true scope of the invention.
Claims (5)
PROPERTY OR PRIVILEGE IS CLAIMED ARE DEFINED AS FOLLOWS:
1. A differential pressure sensor assembly for measuring the pressure drop across an orifice in a fluid flow passage at a location displaced from the orifice and passage, comprising:
a transducer means including a housing, a first diaphragm operator, and an electronic signal means sealed in said housing and operable in response to movement of said first diaphragm operator;
a sensing and pressure-response transfer means, including a wall structure defining an enclosure, a second daphragm operator positioned in said enclosure to define an inlet chamber and an outlet chamber therein, said wall structure defining a stem port, an inlet port communicating between said inlet chamber and said fluid passage upstream of said orifice, and an outlet port communicating between said outlet chamber and said fluid passage downstream of said orifice;
a stem connected to and operable by said second diaphragm operator, which stem extends through said stem port to contact said first diaphragm operator; and seal means to seal fluid flow through said stem port, the pressure drop across said orifice being monitored by said pressure-response transfer means and transmitted by said stem to said transducer means.
a transducer means including a housing, a first diaphragm operator, and an electronic signal means sealed in said housing and operable in response to movement of said first diaphragm operator;
a sensing and pressure-response transfer means, including a wall structure defining an enclosure, a second daphragm operator positioned in said enclosure to define an inlet chamber and an outlet chamber therein, said wall structure defining a stem port, an inlet port communicating between said inlet chamber and said fluid passage upstream of said orifice, and an outlet port communicating between said outlet chamber and said fluid passage downstream of said orifice;
a stem connected to and operable by said second diaphragm operator, which stem extends through said stem port to contact said first diaphragm operator; and seal means to seal fluid flow through said stem port, the pressure drop across said orifice being monitored by said pressure-response transfer means and transmitted by said stem to said transducer means.
2. A differential pressure sensor assembly as claimed in Claim 1 wherein said transducer means is a capacitive pressure transducer.
3 A differential pressure sensor assembly as claimed in Claim 1 wherein said orifice is a square edged orifice.
4. A differential pressure sensor assembly as claimed in Claim 1 wherein said second diaphragm operator is of an elastomeric material.
5. A differential pressure sensor assembly as claimed in Claim 1 wherein said fluid flow passage is an exhaust gas recirculation passage of an automobile engine.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/618,667 US4555952A (en) | 1984-06-08 | 1984-06-08 | Differential pressure sensor |
| US618,667 | 1984-06-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1230496A true CA1230496A (en) | 1987-12-22 |
Family
ID=24478642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000481570A Expired CA1230496A (en) | 1984-06-08 | 1985-05-15 | Differential pressure sensor |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4555952A (en) |
| EP (1) | EP0164240A3 (en) |
| JP (1) | JPS614934A (en) |
| KR (1) | KR860000550A (en) |
| AU (1) | AU4252285A (en) |
| CA (1) | CA1230496A (en) |
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| FR2775784B1 (en) * | 1998-03-05 | 2000-05-12 | Francois Lafay | LEAK DETECTION DEVICE FOR WATER SUPPLY INSTALLATION |
| US6308694B1 (en) | 1999-01-11 | 2001-10-30 | Ford Global Technologies, Inc. | Flow measurement and control |
| US6138504A (en) * | 1998-06-04 | 2000-10-31 | Ford Global Technologies, Inc. | Air/fuel ratio control system |
| US6826966B1 (en) * | 2000-08-09 | 2004-12-07 | Honeywell International Inc. | Flow sensor package |
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| WO2005019785A2 (en) * | 2003-08-11 | 2005-03-03 | Analog Devices, Inc. | Capacitive sensor |
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| JP4657867B2 (en) * | 2005-09-27 | 2011-03-23 | セイコーインスツル株式会社 | Microreactor and microreactor system |
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| US7938105B2 (en) * | 2007-09-25 | 2011-05-10 | Ford Global Technologies, Llc | High flow (delta P) differential pressure EGR system with provision for both flow control and OBD monitor |
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| DE102009024576B4 (en) * | 2009-05-13 | 2011-04-07 | Trafag Ag | Differential Pressure Sensor |
| GB0908982D0 (en) * | 2009-05-26 | 2009-07-01 | David Brown Hydraulics Ltd | Controlled hydraulic systems |
| US20110232614A1 (en) * | 2009-09-25 | 2011-09-29 | Cummins Intellectual Properties , Inc. | System for measuring egr flow and method for reducing acoustic resonance in egr system |
| DE102011056357A1 (en) * | 2011-12-13 | 2013-06-13 | Windmöller & Hölscher Kg | Measuring device for determining the volume flow of glue in a gluing device |
| US8938961B2 (en) | 2011-12-30 | 2015-01-27 | Caterpillar Inc. | EGR flow sensor for an engine |
| US8701497B2 (en) | 2012-03-22 | 2014-04-22 | Frederick H. Grenning | Fluid flow testing system |
| US11406415B2 (en) | 2012-06-11 | 2022-08-09 | Tenex Health, Inc. | Systems and methods for tissue treatment |
| US8899105B2 (en) * | 2012-08-29 | 2014-12-02 | Goutham R. Kirikera | Slim capacitance sensor for downhole applications |
| US9962181B2 (en) | 2014-09-02 | 2018-05-08 | Tenex Health, Inc. | Subcutaneous wound debridement |
| GB2549286B (en) * | 2016-04-11 | 2019-07-24 | Perkins Engines Co Ltd | EGR valve with integrated sensor |
| US10107656B1 (en) | 2017-10-18 | 2018-10-23 | Frederick H. Grenning | Flow-rate measurement nozzle with velocity pressure pickup channel |
| CN110587303B (en) * | 2019-10-18 | 2021-01-26 | 重庆前卫科技集团有限公司 | Assembly method for improving metering precision of diaphragm gas meter |
| ES1266233Y (en) * | 2021-01-19 | 2021-07-28 | Albina Lopez De Armentia Inigo | Fitting for flow and volume measurement and consumption detection in hydrants, hydrants or any type of outlet |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE407903C (en) * | 1925-01-05 | Erich Roucka | Device for measuring physical or chemical quantities | |
| US2406181A (en) * | 1943-01-14 | 1946-08-20 | Wright Aeronautical Corp | Flowmeter |
| US2509078A (en) * | 1945-06-29 | 1950-05-23 | Stover Emory Frank | Fluid meter |
| US3047022A (en) * | 1958-12-24 | 1962-07-31 | Taylor Instrument Co | Pressure responsive device |
| US3245266A (en) * | 1965-02-11 | 1966-04-12 | Electro Mechanical Res Inc | Pressure transducers |
| IL31278A (en) * | 1968-12-16 | 1972-12-29 | Technion Res & Dev Foundation | Differential pressure measuring device |
| US3859575A (en) * | 1974-02-11 | 1975-01-07 | Lee Shih Ying | Variable capacitance sensor |
| CA1038644A (en) * | 1974-04-04 | 1978-09-19 | Rosemount Inc. | Capacitive load cell |
| SE412956B (en) * | 1974-04-04 | 1980-03-24 | Rosemount Inc | CAPACITIVE SENSING DEVICE |
| US3968693A (en) * | 1975-05-21 | 1976-07-13 | Fischer & Porter Co. | Open-loop differential-pressure transmitter |
| GB1572814A (en) * | 1977-04-07 | 1980-08-06 | Robertshaw Skil Ltd | Pressure sensing |
| US4125027A (en) * | 1977-11-04 | 1978-11-14 | Geophysical Research Corporation | Gauge for remotely indicating the pressure of a subterranean formation |
| US4168517A (en) * | 1977-11-10 | 1979-09-18 | Lee Shih Y | Capacitive pressure transducer |
| US4382385A (en) * | 1980-04-17 | 1983-05-10 | Paroscientific, Inc. | Digital differential pressure transducer |
| US4382377A (en) * | 1980-05-16 | 1983-05-10 | Siemens Aktiengesellschaft | Pressure sensor for an internal combustion engine |
-
1984
- 1984-06-08 US US06/618,667 patent/US4555952A/en not_active Expired - Fee Related
-
1985
- 1985-05-15 AU AU42522/85A patent/AU4252285A/en not_active Abandoned
- 1985-05-15 CA CA000481570A patent/CA1230496A/en not_active Expired
- 1985-05-22 EP EP85303609A patent/EP0164240A3/en not_active Withdrawn
- 1985-06-07 KR KR1019850003973A patent/KR860000550A/en not_active Application Discontinuation
- 1985-06-07 JP JP60124065A patent/JPS614934A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| AU4252285A (en) | 1985-12-12 |
| EP0164240A2 (en) | 1985-12-11 |
| KR860000550A (en) | 1986-01-29 |
| US4555952A (en) | 1985-12-03 |
| JPS614934A (en) | 1986-01-10 |
| EP0164240A3 (en) | 1987-06-24 |
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| MKEX | Expiry |