CA2088267A1 - Confocal imaging system for microscopy - Google Patents
Confocal imaging system for microscopyInfo
- Publication number
- CA2088267A1 CA2088267A1 CA002088267A CA2088267A CA2088267A1 CA 2088267 A1 CA2088267 A1 CA 2088267A1 CA 002088267 A CA002088267 A CA 002088267A CA 2088267 A CA2088267 A CA 2088267A CA 2088267 A1 CA2088267 A1 CA 2088267A1
- Authority
- CA
- Canada
- Prior art keywords
- combination
- slit
- reflective
- shaped
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0036—Scanning details, e.g. scanning stages
- G02B21/0048—Scanning details, e.g. scanning stages scanning mirrors, e.g. rotating or galvanomirrors, MEMS mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
- G02B17/0647—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors
- G02B17/0652—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors on-axis systems with at least one of the mirrors having a central aperture
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0028—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders specially adapted for specific applications, e.g. for endoscopes, ophthalmoscopes, attachments to conventional microscopes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
Abstract
A confocal imaging system for use in conjunction with an optical microscope, in which a slit-shaped or bar-shaped beam of light is scanned over the specimen, descanned with a fixed mask and rescanned for viewing or recording, the focussing and scanning system being constituted by wholly reflective optical systems (A1, B1 and A2, B2).
Description
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Title Confocal Imaging System for MicroscoDv :.
: `' ; Field of the invention :
This invention relates to a confocal imaging system for microscopy and, in particular, to such a system which utilises slit scanning.
Prior art The principle of confocal imaging was first described by MinsXy (see U.S. Patent No. 3,013,467). Moving-slit, confocal imaging systems have been described by Baer (U.S.
Patent No. 3,547,512 and Lichtman (see Lichtman, J.W., Sunderland, W.J., and ~ilkinson, R.S. (1989) in The New Biologist 1, 75-82. Also, forms of confocal microscope have been described in which a slit or bar pattern of light is scanned across the specimen and an image of this pattern formed by reflection or emission from the specimen -~
is caused to fall on a stationary slit-shaped aperture.
This use of a stationary slit is a feature of the systems described by Xoester (Koester, C.J. (1980) ~ppl. optics 19, 1749-1757., Burns et al. (Burns, D.H., Hatangadi.
R.B. and Spelman, F.A. (1990) Scanning, 12, 156-160) and of the design of Brakenhoff and Visscher (Brakenhoff, G.J.
& Visscher, K. (1990) Trans. Roy. microsc. Soc. 1, 247-250). A reflecting autocollimating system with no primary aberrations was described by Offner (see A. Offner, Optical Engineering (1975), 14, 131).
Background to the invention ..:
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`` 2088267 ~
.
Confocal imaginq systems have become established as an effective means of eliminating out-of-focus interference in optical microscopy. In these systems only a very small area in the object plane is illuminated at any given time. The illumination in the object plane may be in the form of a single point, an array of points, a single line or an array of lines. A mask with the same geometrical form as the illuminating pattern is incorporated in a plane conjugate with the object plane, so that only signals from the immediate vicinity of the illuminated regions are admitted through the mask into the viewing system. In this way, interfering signals emanating away from the illuminated regions are rejected. A complete image is built up by scanning the illuminating pattern in such a way as to cover the whole of the area of the object plane, whilst keeping the mask in register with the illumination.
~here are advantages in using a slit or array of slits rather than a single point as the pattern of illumination.
For example, a complete image can be formed more rapidly and the instantaneous intensity of illumination required at any single point in the specimen can be reduced. An increase in the rate of formation of images (framing rate) is of particular value, since it can be used with direct -: ~
visual observation to create the impression of continuous imaging. If a slit is used, it is desirable to be able to vary the width of the slit in the mask relative to that of the iiluminated slit-shaped area. In some prior art, such as that of Lichtman, this is impossible, since one and the ; same mask serves to define both the illumination and the area of detection. ~he closest prior art, in this respect, is that of Koester, of Burns et al. and of ' :' ' `
.
``; ~ 20~267 Brakenhoff and Visscher, where the system is so constructed that the detection mask is stationary, so that the mask is easy to adj~st in a continuous fashion during the operation of the microscope system. Koester's system fails to employ the full aperture of the objective lens of the microscope and is therefore compromised in image quality. The system of Baer depends on chromatic dispersion for its operation and is therefore not suitable for the main field of application of confocal microscopes, which is the examination of fluorescence in specimens-The closest prior art (ie that of Burns et al. andVisscher and Brakenhoff) requires lenses to relay the image within the apparatus. This presents considerable problems since the chromatic performance of lenses is poor outside the restricted range of wavelengths for which they are designed. Also, in order to make the instrument conveniently small, the relay lenses must have high numerical apertures, which makes them difficult to design and expensive to manufacture.
.
The invention According to the present in~ention, there is provided, in combination with a microscope, a confocal imaging system comprising means for forming a slit-shaped or bar-shaped illuminating beam, or an array of such beams, a beam-splitting means by which the light is directed into an optical microscope having an objective lens, and an optical scanning means means whereby the illuminating beam or beams is or are caused to scan and be directed into the , . . .
` objection lens of the microscope in order to scan the specimen, such optical scanning means consisting of a ` wholly reflective optical system for both focussing and ;' , ' .' ' :
: ' ,.. , . ~ :
,, - . . -. . : : . ,, : ~ :. : :
"``: `
` W092/02838 PCT/GB91/01268 .' `'.' 2088267 scanning.
Preferably, the same reflective optical system causes the emitted or reflected beam to be descanned (ie brought to a stationary state) and focùssed upon a stationary confocal mask such as a slit of variable width, or an array of such slits.
The stationary slit image delimited by the mask can then be rescanned by a second wholly reflective optical system and brought to focus within an eyepiece or upon the photosensitive surface of a video camera as a two-dimensional image.
In a preferred embodiment the first-mentioned reflective system, and likewise the second reflective system, :
~: consists of a modified Offner autocollimation system, in " which the inner element of the Offner system is caused to ~ oscillate. This modification converts the Xnown Offner '~ relay into a unique reflective scanning system.
;:;
The use of reflective elements for focussing at appropriate points in the system is also an improvement over prior art, in that such elements are inexpensive to , , ~ manufacture and perform well over a very wide range of ... .
wavelengths.
i'.~' , ;, Description of Embodiment The confocal imaging system according to the invention is exemplified in the following description, making reference -~ to the single figure of drawings, in which a preferred system is shown schematically.
.'s .', ,1';
' '~`' ' `~
. , W092/02838 2 ~ ~ PCT/GB91/01268 ~ 0~8 6 ~ 5 -The system is interposed between the objective (OBJ) and the eyepiece (EYE) of a conventional microscope. It includes two Offner reflecting autocolli~ation units (Al,Bl and A2,B2).
An Offner autocollimation system consists of a pair of mirrors with radii of curvature in the ratio l:2. The mirror of smaller radius is convex, the other concave. As described by Offner, this system functions as a l:l :
optical relay if light is reflected through it in the manner shown in the drawing. Thus, the Offner system consisting of mirrors Al and Bl focusses the slit C at the plane shown as a dotted line in the eyepiece (EYE). The other Offner system, consisting of mirrors A2 and B2, creates conjugate foci in the plane OP and on the median plane MP at the slit C and within the lens Ll. The value of the Offner system in the present context is its ease of fabrication, total achromatism and freedom from primary : .
aberrations.
Illumination is injected via a beam splitter (BS). The ' ` light could be provided by an illuminated slit. However, in the preferred embodiment a slit is not used. Instead a parallel laser beam is passed through a cylindrical lens ~` (CL) and then through a conventional spherical lens (L2) ' to provide a focussed line of laser light in the plane OP
i -~ which is conjugate with the object plane. The . illuminating beam is directed through the Offner unit proximal to the microscope (B2, A2).
; , , In accordance with the invention, the Offner units are modified in that the convex mirrors Bl and 82 are each caused to oscillate about an axis perpendicular to the j ~j plane of the diagram, whereby the beam is caused to scan.
.:
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, .
' . ' ' ' : : : ~ ,. , ' ' ' '~ ' : ~ . : . ` ' ' . ' : `' ` ' .
W092/02838 PCT/GB91/0126~
`` ~0~267 6 -Both of the convex mirrors shown in Figure l lie in the aperture planes in relation to the microscope rather than in image planes and they are therefore ideally placed to serve as scaning elements.
The light passes ~rom B2 in a scanning state and enters the objective lens (OBJ) via a coupling lens Ll, which functions to bring the back aperture of the objective into a plane conjugate with that of B2.
.~
The signal from the object being illuminated then traverses this path in reverse and is scanned by the mirror B2. It then passes through the beam splitter BS to the masking slit C where it is brought into focus and traverses the slit. Interfering signals emanating from regions away from the illuminated line are rejected by the slit. The slit is adjustable in width to allow stringent confocal conditions to be imposed (slit narrow) or a brighter image of a less confocal nature to be formed (slit wide). The oscillating mirror Bl in the second Offner unit acts to descan the signal, recreating a stationary two-dimensional image at the mid-plane (MP) which can be viewed directly with the eyepiece or be recorded in a camera.
.
. . .
The movement of the convex mirrors Bl and B2 may take any form that scans the whole field, but sweeps of uniform - angular velocity in alternate directions are preferable as . ~, .
this reduces dead time and gives an image of uniform brightness. In the preferred embodiment the mirror B2 works in synchronism but antiphase to the oscillating mirror Bl.
The beam splitter BS could be either a simple devic~
,;.~ ' . ~. -.
:~
' ' . : . : .
'~ W092~02838 2 0 8 ~ 2 6 7 PCT/GB91/01268 ,.' ~
.
producing any desired ratio of reflected and transmitted intensities, or alternatively a dichromatic reflector - (dichroic) as is conventional in fluorescence microscopyO
:
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.. . , ,, . . .. . . , . . -: : .
~- - - - ; ' :
Title Confocal Imaging System for MicroscoDv :.
: `' ; Field of the invention :
This invention relates to a confocal imaging system for microscopy and, in particular, to such a system which utilises slit scanning.
Prior art The principle of confocal imaging was first described by MinsXy (see U.S. Patent No. 3,013,467). Moving-slit, confocal imaging systems have been described by Baer (U.S.
Patent No. 3,547,512 and Lichtman (see Lichtman, J.W., Sunderland, W.J., and ~ilkinson, R.S. (1989) in The New Biologist 1, 75-82. Also, forms of confocal microscope have been described in which a slit or bar pattern of light is scanned across the specimen and an image of this pattern formed by reflection or emission from the specimen -~
is caused to fall on a stationary slit-shaped aperture.
This use of a stationary slit is a feature of the systems described by Xoester (Koester, C.J. (1980) ~ppl. optics 19, 1749-1757., Burns et al. (Burns, D.H., Hatangadi.
R.B. and Spelman, F.A. (1990) Scanning, 12, 156-160) and of the design of Brakenhoff and Visscher (Brakenhoff, G.J.
& Visscher, K. (1990) Trans. Roy. microsc. Soc. 1, 247-250). A reflecting autocollimating system with no primary aberrations was described by Offner (see A. Offner, Optical Engineering (1975), 14, 131).
Background to the invention ..:
., ., ~ ~ .
.. .
' ''' :: . , . - .
.
`` 2088267 ~
.
Confocal imaginq systems have become established as an effective means of eliminating out-of-focus interference in optical microscopy. In these systems only a very small area in the object plane is illuminated at any given time. The illumination in the object plane may be in the form of a single point, an array of points, a single line or an array of lines. A mask with the same geometrical form as the illuminating pattern is incorporated in a plane conjugate with the object plane, so that only signals from the immediate vicinity of the illuminated regions are admitted through the mask into the viewing system. In this way, interfering signals emanating away from the illuminated regions are rejected. A complete image is built up by scanning the illuminating pattern in such a way as to cover the whole of the area of the object plane, whilst keeping the mask in register with the illumination.
~here are advantages in using a slit or array of slits rather than a single point as the pattern of illumination.
For example, a complete image can be formed more rapidly and the instantaneous intensity of illumination required at any single point in the specimen can be reduced. An increase in the rate of formation of images (framing rate) is of particular value, since it can be used with direct -: ~
visual observation to create the impression of continuous imaging. If a slit is used, it is desirable to be able to vary the width of the slit in the mask relative to that of the iiluminated slit-shaped area. In some prior art, such as that of Lichtman, this is impossible, since one and the ; same mask serves to define both the illumination and the area of detection. ~he closest prior art, in this respect, is that of Koester, of Burns et al. and of ' :' ' `
.
``; ~ 20~267 Brakenhoff and Visscher, where the system is so constructed that the detection mask is stationary, so that the mask is easy to adj~st in a continuous fashion during the operation of the microscope system. Koester's system fails to employ the full aperture of the objective lens of the microscope and is therefore compromised in image quality. The system of Baer depends on chromatic dispersion for its operation and is therefore not suitable for the main field of application of confocal microscopes, which is the examination of fluorescence in specimens-The closest prior art (ie that of Burns et al. andVisscher and Brakenhoff) requires lenses to relay the image within the apparatus. This presents considerable problems since the chromatic performance of lenses is poor outside the restricted range of wavelengths for which they are designed. Also, in order to make the instrument conveniently small, the relay lenses must have high numerical apertures, which makes them difficult to design and expensive to manufacture.
.
The invention According to the present in~ention, there is provided, in combination with a microscope, a confocal imaging system comprising means for forming a slit-shaped or bar-shaped illuminating beam, or an array of such beams, a beam-splitting means by which the light is directed into an optical microscope having an objective lens, and an optical scanning means means whereby the illuminating beam or beams is or are caused to scan and be directed into the , . . .
` objection lens of the microscope in order to scan the specimen, such optical scanning means consisting of a ` wholly reflective optical system for both focussing and ;' , ' .' ' :
: ' ,.. , . ~ :
,, - . . -. . : : . ,, : ~ :. : :
"``: `
` W092/02838 PCT/GB91/01268 .' `'.' 2088267 scanning.
Preferably, the same reflective optical system causes the emitted or reflected beam to be descanned (ie brought to a stationary state) and focùssed upon a stationary confocal mask such as a slit of variable width, or an array of such slits.
The stationary slit image delimited by the mask can then be rescanned by a second wholly reflective optical system and brought to focus within an eyepiece or upon the photosensitive surface of a video camera as a two-dimensional image.
In a preferred embodiment the first-mentioned reflective system, and likewise the second reflective system, :
~: consists of a modified Offner autocollimation system, in " which the inner element of the Offner system is caused to ~ oscillate. This modification converts the Xnown Offner '~ relay into a unique reflective scanning system.
;:;
The use of reflective elements for focussing at appropriate points in the system is also an improvement over prior art, in that such elements are inexpensive to , , ~ manufacture and perform well over a very wide range of ... .
wavelengths.
i'.~' , ;, Description of Embodiment The confocal imaging system according to the invention is exemplified in the following description, making reference -~ to the single figure of drawings, in which a preferred system is shown schematically.
.'s .', ,1';
' '~`' ' `~
. , W092/02838 2 ~ ~ PCT/GB91/01268 ~ 0~8 6 ~ 5 -The system is interposed between the objective (OBJ) and the eyepiece (EYE) of a conventional microscope. It includes two Offner reflecting autocolli~ation units (Al,Bl and A2,B2).
An Offner autocollimation system consists of a pair of mirrors with radii of curvature in the ratio l:2. The mirror of smaller radius is convex, the other concave. As described by Offner, this system functions as a l:l :
optical relay if light is reflected through it in the manner shown in the drawing. Thus, the Offner system consisting of mirrors Al and Bl focusses the slit C at the plane shown as a dotted line in the eyepiece (EYE). The other Offner system, consisting of mirrors A2 and B2, creates conjugate foci in the plane OP and on the median plane MP at the slit C and within the lens Ll. The value of the Offner system in the present context is its ease of fabrication, total achromatism and freedom from primary : .
aberrations.
Illumination is injected via a beam splitter (BS). The ' ` light could be provided by an illuminated slit. However, in the preferred embodiment a slit is not used. Instead a parallel laser beam is passed through a cylindrical lens ~` (CL) and then through a conventional spherical lens (L2) ' to provide a focussed line of laser light in the plane OP
i -~ which is conjugate with the object plane. The . illuminating beam is directed through the Offner unit proximal to the microscope (B2, A2).
; , , In accordance with the invention, the Offner units are modified in that the convex mirrors Bl and 82 are each caused to oscillate about an axis perpendicular to the j ~j plane of the diagram, whereby the beam is caused to scan.
.:
.~ ... .
!. ~
`; :
, ,', :
, .
' . ' ' ' : : : ~ ,. , ' ' ' '~ ' : ~ . : . ` ' ' . ' : `' ` ' .
W092/02838 PCT/GB91/0126~
`` ~0~267 6 -Both of the convex mirrors shown in Figure l lie in the aperture planes in relation to the microscope rather than in image planes and they are therefore ideally placed to serve as scaning elements.
The light passes ~rom B2 in a scanning state and enters the objective lens (OBJ) via a coupling lens Ll, which functions to bring the back aperture of the objective into a plane conjugate with that of B2.
.~
The signal from the object being illuminated then traverses this path in reverse and is scanned by the mirror B2. It then passes through the beam splitter BS to the masking slit C where it is brought into focus and traverses the slit. Interfering signals emanating from regions away from the illuminated line are rejected by the slit. The slit is adjustable in width to allow stringent confocal conditions to be imposed (slit narrow) or a brighter image of a less confocal nature to be formed (slit wide). The oscillating mirror Bl in the second Offner unit acts to descan the signal, recreating a stationary two-dimensional image at the mid-plane (MP) which can be viewed directly with the eyepiece or be recorded in a camera.
.
. . .
The movement of the convex mirrors Bl and B2 may take any form that scans the whole field, but sweeps of uniform - angular velocity in alternate directions are preferable as . ~, .
this reduces dead time and gives an image of uniform brightness. In the preferred embodiment the mirror B2 works in synchronism but antiphase to the oscillating mirror Bl.
The beam splitter BS could be either a simple devic~
,;.~ ' . ~. -.
:~
' ' . : . : .
'~ W092~02838 2 0 8 ~ 2 6 7 PCT/GB91/01268 ,.' ~
.
producing any desired ratio of reflected and transmitted intensities, or alternatively a dichromatic reflector - (dichroic) as is conventional in fluorescence microscopyO
:
~' ''' . .
.
... ~
:, . ' . ::
;''~'"
. .: .
, ~
.'; . ..
, ,',:',~ ':
:.: ':
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.~,'.!
,. :",~
,i,......................... .
,'.,~' ;' ~
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Claims (11)
1. In combination with an optical microscope, a confocal imaging system which comprises means for forming a slit-shaped or bar-shaped illuminating beam, or an array of such beams, a beam-splitting means by which the light is directed into an optical microscope having an objective lens, and an optical scanning means whereby the illuminating beam or beams is or are caused to scan and be directed into the objective lens of the microscope in order to scan the specimen, such optical scanning means consisting of a wholly reflective optical system for both focussing and scanning.
2. The combination claimed in claim 1, wherein, the same reflective optical system causes the beam emitted or reflected from the specimen to be descanned and focussed through the beam splitter on a stationary confocal mask.
3. The combination claimed in claim 2, wherein said mask is a slit of variable width.
4. The combination claimed in claim 2 or 3, wherein the stationary image delimited by the mask is rescanned by a second wholly reflective optical system and brought to a focus for viewing or recording.
5. The combination claimed in any of claims 1 to 4, wherein the first-mentioned reflective system is a modified Offner collimation system in which the inner mirror is caused to rotationally oscillate.
6. The combination claimed in claim 5, wherein the second reflective system is a modified Offner collimation system in which the inner mirror is caused to rotationally oscillate.
7. The combination claimed in claim 6, in which the respective inner mirrors of the two reflective systems oscillate in synchronism but in anti-phase.
8. The combination claimed in claim 7, in which the respective inner mirrors oscillate with uniform angular velocity in alternate rotational senses.
9. The combination claimed in any of claims 1 to 9, in which the means for forming the slit-shaped or bar-shaped beam includes a cylindrical lens which shapes the beam by refraction.
10. The combination claimed in claim 9, wherein the illuminating beam is a laser beam.
11. The combination as claimed in any preceding claim, wherein the full aperture of the objective lens is used.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB909016632A GB9016632D0 (en) | 1990-07-28 | 1990-07-28 | Confocal imaging system for microscopy |
GB9016632.3 | 1990-07-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
CA2088267A1 true CA2088267A1 (en) | 1992-01-29 |
Family
ID=10679843
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002088267A Abandoned CA2088267A1 (en) | 1990-07-28 | 1991-07-26 | Confocal imaging system for microscopy |
Country Status (8)
Country | Link |
---|---|
US (2) | US5452125A (en) |
EP (1) | EP0541625B1 (en) |
JP (1) | JPH05509178A (en) |
AT (1) | ATE135116T1 (en) |
CA (1) | CA2088267A1 (en) |
DE (1) | DE69117761T2 (en) |
GB (1) | GB9016632D0 (en) |
WO (1) | WO1992002838A1 (en) |
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US6388788B1 (en) | 1998-03-16 | 2002-05-14 | Praelux, Inc. | Method and apparatus for screening chemical compounds |
US20030036855A1 (en) * | 1998-03-16 | 2003-02-20 | Praelux Incorporated, A Corporation Of New Jersey | Method and apparatus for screening chemical compounds |
US6548796B1 (en) | 1999-06-23 | 2003-04-15 | Regents Of The University Of Minnesota | Confocal macroscope |
WO2002021109A1 (en) * | 2000-09-04 | 2002-03-14 | Hamamatsu Photonics K.K. | Imaging apparatus |
US6309078B1 (en) | 2000-12-08 | 2001-10-30 | Axon Instruments, Inc. | Wavelength-selective mirror selector |
US6856457B2 (en) * | 2001-03-27 | 2005-02-15 | Prairie Technologies, Inc. | Single and multi-aperture, translationally-coupled confocal microscope |
AU2002332802A1 (en) * | 2001-08-29 | 2003-03-10 | Musc Foundation For Research Development | Line scanning confocal microscope |
WO2005083352A1 (en) * | 2004-02-11 | 2005-09-09 | Filmetrics, Inc. | Method and apparatus for high-speed thickness mapping of patterned thin films |
US20050237530A1 (en) * | 2004-04-26 | 2005-10-27 | Schnittker Mark V | Imaging apparatus for small spot optical characterization |
US7221449B2 (en) * | 2004-06-28 | 2007-05-22 | Applera Corporation | Apparatus for assaying fluorophores in a biological sample |
DE102004034970A1 (en) * | 2004-07-16 | 2006-02-02 | Carl Zeiss Jena Gmbh | Scanning microscope and use |
US7315352B2 (en) | 2004-09-02 | 2008-01-01 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Offner imaging system with reduced-diameter reflectors |
US7173686B2 (en) | 2004-09-02 | 2007-02-06 | Agilent Technologies, Inc. | Offner imaging system with reduced-diameter reflectors |
US7545446B2 (en) * | 2005-08-27 | 2009-06-09 | Hewlett-Packard Development Company, L.P. | Offner relay for projection system |
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KR20140093818A (en) * | 2013-01-17 | 2014-07-29 | 삼성전자주식회사 | System of Measuring Surface Profile |
DE102019115931A1 (en) * | 2019-06-12 | 2020-12-17 | Carl Zeiss Microscopy Gmbh | Optical arrangement for a microscope |
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US3669522A (en) * | 1970-03-20 | 1972-06-13 | Singer Co | Reflective relay optical system for two-axis deflection |
US3951546A (en) * | 1974-09-26 | 1976-04-20 | The Perkin-Elmer Corporation | Three-fold mirror assembly for a scanning projection system |
US4170398A (en) * | 1978-05-03 | 1979-10-09 | Koester Charles J | Scanning microscopic apparatus with three synchronously rotating reflecting surfaces |
US5032720A (en) * | 1988-04-21 | 1991-07-16 | White John G | Confocal imaging system |
DE3853637T2 (en) * | 1988-07-06 | 1995-12-21 | Medical Res Council | ACHROMATIC SCAN SYSTEM. |
US5020891A (en) * | 1988-09-14 | 1991-06-04 | Washington University | Single aperture confocal scanning biomicroscope and kit for converting single lamp biomicroscope thereto |
US5035476A (en) * | 1990-06-15 | 1991-07-30 | Hamamatsu Photonics K.K. | Confocal laser scanning transmission microscope |
US5225923A (en) * | 1992-07-09 | 1993-07-06 | General Scanning, Inc. | Scanning microscope employing improved scanning mechanism |
-
1990
- 1990-07-28 GB GB909016632A patent/GB9016632D0/en active Pending
-
1991
- 1991-07-26 AT AT91913800T patent/ATE135116T1/en not_active IP Right Cessation
- 1991-07-26 JP JP3512831A patent/JPH05509178A/en active Pending
- 1991-07-26 US US07/969,142 patent/US5452125A/en not_active Expired - Lifetime
- 1991-07-26 CA CA002088267A patent/CA2088267A1/en not_active Abandoned
- 1991-07-26 WO PCT/GB1991/001268 patent/WO1992002838A1/en active IP Right Grant
- 1991-07-26 DE DE69117761T patent/DE69117761T2/en not_active Expired - Fee Related
- 1991-07-26 EP EP91913800A patent/EP0541625B1/en not_active Expired - Lifetime
-
1995
- 1995-02-13 US US08/388,145 patent/US5561554A/en not_active Expired - Lifetime
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DE69117761D1 (en) | 1996-04-11 |
US5452125A (en) | 1995-09-19 |
WO1992002838A1 (en) | 1992-02-20 |
ATE135116T1 (en) | 1996-03-15 |
US5561554A (en) | 1996-10-01 |
JPH05509178A (en) | 1993-12-16 |
GB9016632D0 (en) | 1990-09-12 |
EP0541625A1 (en) | 1993-05-19 |
DE69117761T2 (en) | 1996-09-19 |
EP0541625B1 (en) | 1996-03-06 |
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Legal Events
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FZDE | Discontinued |