CA2116714C - Quasi-monolithic saturable optical element - Google Patents
Quasi-monolithic saturable optical elementInfo
- Publication number
- CA2116714C CA2116714C CA002116714A CA2116714A CA2116714C CA 2116714 C CA2116714 C CA 2116714C CA 002116714 A CA002116714 A CA 002116714A CA 2116714 A CA2116714 A CA 2116714A CA 2116714 C CA2116714 C CA 2116714C
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- CA
- Canada
- Prior art keywords
- optical element
- optical
- laser beam
- laser
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/3523—Non-linear absorption changing by light, e.g. bleaching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
- H01S3/1123—Q-switching
- H01S3/113—Q-switching using intracavity saturable absorbers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08059—Constructional details of the reflector, e.g. shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
- H01S3/1106—Mode locking
- H01S3/1112—Passive mode locking
- H01S3/1115—Passive mode locking using intracavity saturable absorbers
- H01S3/1118—Semiconductor saturable absorbers, e.g. semiconductor saturable absorber mirrors [SESAMs]; Solid-state saturable absorbers, e.g. carbon nanotube [CNT] based
Abstract
Saturable absorption, polarization, and retroreflection are integrated into a single solid-state optical element (10). The optical element (10) comprises an undoped substrate (14) having front and rear surfaces disposed at a predetermined angle. A
dielectric coating (15) is disposed on the rear surface of the substrate (14), and at least one saturable absorber platelet (11) is disposed on the front surface of the substrate (14). The saturable absorbing species used in the platelet(s) (11) are either F2- color-centers in lithium fluoride or Cr4+ dopant ions in one of several suitable host optical materials. Linear polarization of the laser beam (13a) is achieved by orienting the input face of the optical element (10) at Brewster's angle. The dielectric coating (15) (mirror) on the back surface of the optical element (10) provides 100% reflectivity. The optical element (10) is a monolithic, simple to fabricate, easy to align multi-functional element for use in a laser resonator (12). The optical element (10) provides passive Q-switching, discrimination for linear polarization, and laser beam reflection. The mirror is an integral part of the optical element (10), and it is easy to align the integrated polarizer. By aligning the optical element (10) for retroreflection, the Brewster's angle condition is automatically met and optimal polarization discrimination is achieved. The optical element (10) improves the quality and efficiency of lasers in which it is employed. The present invention is easy to align and reduces the number of optical elements in the laser, thereby improving system reliability.
dielectric coating (15) is disposed on the rear surface of the substrate (14), and at least one saturable absorber platelet (11) is disposed on the front surface of the substrate (14). The saturable absorbing species used in the platelet(s) (11) are either F2- color-centers in lithium fluoride or Cr4+ dopant ions in one of several suitable host optical materials. Linear polarization of the laser beam (13a) is achieved by orienting the input face of the optical element (10) at Brewster's angle. The dielectric coating (15) (mirror) on the back surface of the optical element (10) provides 100% reflectivity. The optical element (10) is a monolithic, simple to fabricate, easy to align multi-functional element for use in a laser resonator (12). The optical element (10) provides passive Q-switching, discrimination for linear polarization, and laser beam reflection. The mirror is an integral part of the optical element (10), and it is easy to align the integrated polarizer. By aligning the optical element (10) for retroreflection, the Brewster's angle condition is automatically met and optimal polarization discrimination is achieved. The optical element (10) improves the quality and efficiency of lasers in which it is employed. The present invention is easy to align and reduces the number of optical elements in the laser, thereby improving system reliability.
Description
2~16714 QUASI-MONOLITHIC SATURABLE OPTICAL ELEMENT
BACKGROUND OF THE INVENTION
1. Field of the Invention.
5The present invention relates generally to solid-state optical elements, and more particularly, to a quasi-monolithic saturable optical element that provides for saturable absorption, pol~n7~ion, and rellw~;nection in a single solid-state optical ck..Pn 2. Description of Related Art.
Each of the individual functions performed by the present invention (saturable 10 absorption, polari_ation, and retrûreflection) is generally well known in the art. Satur-able absorbers are well-known in the art. B~ cr's angle orientation for polarization selection is well known. Dielectric high reflection coatings can be deposited on sub-strates without difficulty using conventional practices. Although individual devices exist that perforrn each of the above functions, the disadvantages and difficulties asso-15 ciated with aligning three functionally different elements are believed to be self-evident.
By way of example, U.S. Patent No.4,084,883, entitled "Reflective Polariza-tion Retarder and Laser Apparatus Utilizing Same", issued to Eastrnan et al. discloses a reflective polarization layer for a laser element. U.S. Patent No.4,104,598 entitled "Laser Internal Coupling Modulation Arrangement with Wire Grid Polarizer Serving as 20 a Reflector and Coupler", issued to Abrams discloses a laser having a cornbined reflec-tor and wire grid polarizer. U.S. Patent No.4,875,220 entitled "Laser Tube for Polar-2il6714 ized Laser Emission", issued to Krueger et al., has two integrated laser miITors, and thc integrated mirror has a polarizing surface thereon. U.S. Patent No.5,097,481 entitled "Gas Laser Having Two Longinl~lin~l Modes of Laser Oscillationn, issued to Fritzsche et al. is similar to the Krueger et al. patent. U.S. Patent No.5,101,415 entitled "Laser Resonator Mirror with Wavelength Selective Coatings on Two Surfaces", issued to Kolb et al. discloses a laser mirror having reflective surfaces which operate in first and second wavelength modes.
In addition to the above-cited patents, prior work relating to solid-state saturable absc,l~ls is typiffed by the following publications. An article entitled "Formation, optical plopel ~es, and laser operation of F2- centers in LiF", by W. Gellermann et al., in J. Appl. Phys., 61, 1297 (1987) investigates the forrnation conditions, optical pro~
erties, and lasing behavior of F2- color centers in LiF crystals. An article entitled "Phototropic centers in chromium-doped garnets", by L.I. Krutova et al., in Opt.Spectrosc (USSR), 63, 695 (1987) discusses the use of chromium-doped garnets as passive Q switches. A presentation entitled "Room telllpe,dtul~ O-switching of Nd:YAG by F2- color centers in LiF," presented by D.S. Sumida et al., CLEO, San Francisco, CA, Paper WM5 (1986), discusses research on the passive Q-switch prop-erties of F2-:LiF, a color center material of interest for solid-state laser designs because of its saturation behavior at high intensity levels. An article éntitled "Room Tempera-ture Laser Action and Q-Switching of F-Aggregate Color Centers in LiF" by S. C.
Rand, et al., presented at the 5th International Conference on Dyn~rnic~l Processes in the Excited State of Solids, Lyon, France, 14 July, 1985, indicates that passhe ~
switching by F2- centers in gamma-irradiated LiF produced 30 ns Nd.YAG pulses. An article entitled "Photochromic properties of a gadolinium-scandiu~gallium garnetcrystal," by E.V. Zharikov et al, Preprint #238, USSR Academy of Sciences, Tn~tit~lte of General Physics, Moscow (1985) discucses the photochromic p~vpe.~ies of a GSGG:Cr, Nd crystals.
However, the above-cited prior art does not disclose combining three functions (saturable absorption, polarization, and retroreflection) into one elern~,nt and no such prior art devices appear to exist. Therefore, it is an objective of the present invention to provide a quasi-monolithic saturable optical element that provides for saturable absorp-tion, polarization, and retroreflection in a single solid-state optical element.
SUMMARY OF THE INVENTION
In order to meet the above and other objectives, the present invention provides an optical element for use in a laser resonator having an optical axis along which a laser beam propagates. The optical element provides for saturable absorption, polarization, 2 ~ 6 7 ~ 4 and retroreflection of the laser beam in an integrated package. The optical element comprises an undoped substrate having front and rear surfaces that are disposed at a predetermined apex angle with respect to each other. The substrate is relatively transparent to the laser beam provided by the laser resonator. A
dielectric coating is disposed on the rear surface of the undoped substrate, and at least one saturable absorber platelet is disposed on the front surface of the substrate. The saturable absorber platelet has a front surface that is disposed at Brewster's angle with respect to the optical axis of the laser resonator. Saturable absorption of the laser beam is provided by the optical element using saturable absorber platelet(s);
polarization of the laser beam is provided by orienting the front surface of the optical element at Brewster's angle relative to the optical axis of the laser resonator; and retroreflection of the laser beam is provided by the dielectric coating.
A further aspect of this invention is as follows:
An optical element for use in a laser resonator having an optical axis along which a laser beam is adapted to propagate, and that provides for saturable absorption, polarization, and retroreflection of said laser beam, said optical element characterized by:
an undoped substrate having front and rear surfaces that are disposed at a predetermined apex angle with respect to each other, and wherein said substrate is relatively transparent to said laser beam provided by said laser resonator;
~A~
a dielectric coating disposed on said rear surface of said undoped substrate that is adapted to reflect said laser beam;
a saturable absorber platelet disposed on said front surface of said undoped substrate that has a front surface that is adapted to be disposed at Brewster's angle with respect to said optical axis of said laser resonator;
and wherein saturable absorption of said laser beam is provided by said saturable absorber, polarization of said laser beam is provided by orienting said front surface of said optical element at Brewster's angle relative to said optical axis of said laser resonator, and retroreflection of said laser beam is provided by said dielectric coating.
The present invention thus integrates three separate optical functions, including saturable absorption, polarization, and retroreflection, into a single solid-state optical element. The saturable absorbing species provided by the platelet(s) are either F2 color-centers in lithium fluoride or Cr4+ dopant ions in one of several suitable host optical materials. Suitable single-crystal host materials may include, for example, yttrium aluminum garnet (YAG), yttrium scandium aluminum garnet (YSAG), yttrium scandium gallium garnet (YSGG), gadolinium scandium aluminum garnet (GSAG), gadolinium scandium gallium garnet (GSGG), gadolinium gallium garnet (GGG), gadolinium indium gallium garnet (GIGG), yttrium ortho-silicate (YOS), Mg2SiO4 (Forsterite), or suitable single crystal combinations of the above. Optionally, the host optical material may be a glassy or amorphous material.
7 ~1 4 -3b-The appropriate linear polarization of the laser beam is achieved by orienting the input face of the optical element at Brewster's angle. The deposited dielectric coating (mirror) on the back surface of the optical element provides 100% reflectivity.
The optical element thus comprises a monolithic, simple to fabricate, easy to align multi-functional element for use in a laser resonator. The present invention, in addition to passive Q-switching, discriminates for linear polarization, and serves as a 100% reflecting mirror or reflector. Because the mirror is an integral part of the optical element, a key benefit is the easy alignment of the integrated polarizer.- By aligning the optical element for retroreflection as is typically done for a normal incidence 100% reflectivity mirror, the Brewster's angle condition is automatically met and optimal polarization discrimination is achieved.
Typically for Brewster's angle elements, the angle of incidence must be optimized individually. In the present invention, that optimization step is not required.
~:~1&714 The present invention provides an optical element that improves the quality and provides for a more efficient and compact laser device in which it is employed.
Furthe. "lore, the present invention is easy to align and reduces the number of optical elements in the laser device. The reduction in the number of elements provides for irnproved system reliability.
Combining three functions (saturable absorption, polarization, and ~l~flec-tion) into a single optical element overcomes the disadvantages and difficulties associ-ated with aligning three functionally different ek ~ in conventional laser devices.
The benefits of the present invention should be apl)al~n~ when c~ a~d to conven-tional devices and in particular, the relative ease of aligning a single integrated device of the present invention is far superior to techniques employed in conventional devices.
BRIEF DESCRIPTION OF THE DRAWINGS
The various features and advantages of the present invention may be more readily understood with reference to the following clet~ilçd description taken in conjunction with the ~ccomp~nying drawings, wherein like ~erer~nce numerals designate like structu~l elements, and in which:
Fig. 1 shows a quasi-monolithic optical element in accordance with the princi-ples of the present invention having an arbitrary number of saturable absorber platelets;
Fig. 2 shows a room-te,~ a~ule absorbance spectrum of LiF:F2- color centers;
and Fig. 3 shows a room-temperature absorbance spectrum of CP+~oped GSGG.
DESCRIPTION OF THE PREFERRED EMBOD~MENTS
A laser structure comprises a lasing meY1ium located between a pair of mirrors which define the laser reson~tor cavity . One mirror reflects subst~nt~ y all of the laser light and is referTed to as the "high reflector" n~irror, and the second rnirror partially transrnits and partially reflects the laser light and is referred to as the "output coupler", as described, for example, in U.S. Patent No. 5,101,415, previously referenced. In accordance with the present invention, the high-reflector mirror is replaced with and augmented by the multi-functional optical element of the present invention, as described in detail below.
Referring now to the drawing figures, Fig. I shows a quasi-monolithic optical element 10 in accordance with the principles of the present invention. The quasi-mono-lithic optical element 10 is shown having an arbitrary number of saturable absorber platelets 11. The term "quasi-monolithic" is used since the optical element 10 of the present invention is not a single piece, or truly monolithic. The quasi-monolithic 2i~6714 optical element 10 is shown disposed at an end of a laser resonator 12, and the optical axis 13 of the laser resonator 12 having a laser beam 13a propagating therealong is also shown.
The quasi-monolithic optical element 10 includes a substrate 14 comprising an 5 undoped host optical material which has approximately the same refractive index as the saturable absorber platelets 11 described below. The substrate 14 is transparent to the laser bearn 1 3a. The substrate 14 is formed in the shape of a wedge having front and rear surfaces 14a, 14b disposed at a predele~ ed apex angle ~A with respect to each other. The substrate 14 has a lOO~o reflecting dielectric coating 15 disposed on the rear 10 surface 14b thereof. The dielectric coating 15 may co~ ;se a standard multilayer dielectric material, formed of tit~nil~m dioxide and silicon dioxide (TiO~/SiO2) or silicon dioxide and zirconium dioxide (sio2lzro2)~ for e~mple, which is deposited on therear surface 14b using well-known coating deposition techniques.
A plurality of saturable absorber platelets 1 la, 1 lb, 1 lc are stacked on top of 15 each other and are secured together and to the front surface 14a of the substrate 14 by means of individual layers of optical cement 16, for example. Fig. 1 shows the use of three saturable absorber platelets 1 la, 1 lb, 1 lc for the purposes of example only. It is to be understood that other numbers of saturable absorber platelets 11 may be employed, including a single platelet 11, dep~" ding upon the type of laser resonator 12 20 and the saturable absorbing species used in the saturable absc~rber platelet 11. The optical cement 16 is also transparent to the laser beam 13a, and is nominally index-m~tched to the substrate 14. An optical cement 16 such as an epoxy rnaterial that is available from Hartel Enterprises, Pacoirna, California, may be employed. A na¢mal plane 17 to an exposed surface of the topmost or front saturable absorber platelet 11 is 25 shown, and the optical element 10 is disposed within the laser resonator 12 at an angle ~JB between the norrnal 17 and the optical axis 13 of the resonator 12. As is shown in Fig. 1, the angle of incidence of the laser beam 13 at the surface of the dielectric coating 15 is 90~. The definitions and specified values for ~A and ~g are given below.
The substrate 14 is undoped for two reasons. First, with regard to the F2- color30 centers in LiF, for exarnple, these centers anneal away at the elevated te,llpe,~tures required to provide the hard dielectric coating 15. Second, if the substrate 14 were doped with a saturable absorber species, then its optical densitv would vary as a function of transverse dimension across the aperture. As a result, the optical element 10 would optically bleach in a spatially nonuniform manner. Consequently, the optical 35 element 10 is constructed in the manner stated above.
The optical element 10 of the present invention provides the integration of three optical functions into a single optical component that can then be aligned in the laser 2~16714 resor~or generally indicated at 12, by optimizing the retroreflected return off the high reflectivity rear surface 14b of the optical ele.~cnt 10 provided by the 100% reflecting dielectric coating t5. The integration is accomplished by using the optical cement 16 to fuse one or more saturable absorber platelets 11 to the substrate 14 and to each other to 5 form a single quasi-monolithic element 10.
As was mentioned above, in order for the optical elelnent 10 to exhibit low lossat the interfaces between platelets 11, the optical cement 16 should be index-..~ h~d to the subs~ale 14. For non-index-matched situations, one must trade off the benefit of additional polarization dis.;.i.,lination for increased passive lo-ss. The d~ d aspects of each of the three functions perforrned by the optical element 10 will now be addressed.
The saturable absorption is accomplished through either the generation of F2-color centers using electron beam irradiation or the doping of Cr4 ' in suitable crystals, such as ~dolinium scandium gallium garnet, for example, that comprise the saturable absorber platelets 11. More particularly, suitable single~rystal host optical m~t~ ls for the substrate 14 may include, for example, yttrium aluminum garnet (YAG), yttrium sc~nflillm aluminum garnet (YSAG), yttrium scandium gallium garnet (YSGG), gadolinium scandium aluminllm garnet (GSAG), gadolinium sc~ndium gallium garnet (GSGG), gadolinium gallium garnet (GGG), gadolinium indium gallium garnet (GIGG), yttrium orthosilicate (YOS), Mg2SiO4 (Forsterite), or suitable single crystal combinations of the above. Alternatively, the host optical material may be a glassy or amorphous m--ateriaL
The fabrication issues associated with F2- color centers are such that 2-3 mm thick platelets 11 of irradiated LiF provide a maximum optical density per platelet 11.
The required total optical density for a particular application is achieved by h~ccn~l'at-ing greater or fewer platelets 11 into the design of the optical elernent 10. For Cr4+-doped garnets, the nature of the crystal growth process allows for virtually any reason-able optical density to be achieved with a single platelet 11. Both saturable absorber species have demonstrated passive Q-switching at a laser wavelength of app-vxilllately one micrometer, and other wavelengths are feasible. The F2- color center absorption band ranges from about 900-1100 nm while the CP+ absorption band extends from 900 1200 nm. Fig. 2 shows a room-temperature absorbance spectrum of LiF:F2- color centers, while Fig. 3 shows a room-temperature absorbance spectrum of CP+-doped Cr:Nd:GSGG (gadolinium scandium gallium garnet).
The polarization discrimination for linearly polarized laser light is obtained by orienting the front surface 21 of the optical element 10 at Brewster's angle with respect to the optical axis 13 of the laser resonator 12 such that the "p" polarization is transmit-2il~714 ted without loss. In practice however, this condition is autom~tically s~ti~fied when thc optical elernent 10 is optimized for proper ~ o,cflection of the laser beam 13. At 1.06 ~m, for example, the refractive index and Brewste~s angle for a LiF substrate 14 arc 1.386 and 54.2~, respectively. Similarly, for other garnets, such as gadolinium sc~n~iium gallium garnet in particular, the values are 1.94 and 62.7~ lcs~li~/ely.
To obtain lOO~o reflectivity off the rear surface 14b of the optical elemcnt lQ
the dielectric laser coating 15 is evaporated onto the substrate 14 that comprises an undoped host material, which has applo~i-nately the same lG~la~ e index as the saturable absorber platelets 11, described above. After the coating process, the coated substrate 14 forms a mirror or reflector that is then fused to the saturable absorber platelet(s) 11 by means of the optical cement 16. The undoped reflector compri~ing the coated substrate 14 is designed so that, at the proper orientation for lGI-o,eflection (i.e.
the angle of incidence of the laser beam 13 at the coated surface 14b is 90~), the fr~nt surface 14a and hence the front surface 21 of the optical ele-rnent 10 is a~ltom~ti~lly aligned at Brewster's angle. In general, the apex angle ~A iS uniquely defined using simple geometlical arguments and is given by Sin-l (sin ~g/n}, where ~B iS BIG~ S
angle and n is the refractive index of the substrate 14. For platelets 11 comprising LiF
and GSGG, ~A iS 18.4~ and 27.3~ respectively at A =l.06 ~m. In operation, a col.~pen-sation wedge 22 having the identical composition and apex angle as the ~b~ e 14 rnay be inserted into the path of the laser bearn 13 and having the opposite orien~tion relative to the substrate 14 (i.e., rotated 180~ relative to the substrate) in order to alleviate therrnal beam steering effects.
Thus there has been described an improved quasi-monolithic saturable optical element that provides for saturable absorption, polarization, and ~e~u,eflection in a single solid-state optical element. It is to be understood that the above-described embolim~nts are merely illustrative of some of the rnany specific emb~iments that represent applications of the principles of the present invention. Clearly, n~ll.,,ous and other arrangements can be readily devised by those skilled in the art without depamng from the scope of the invention.
BACKGROUND OF THE INVENTION
1. Field of the Invention.
5The present invention relates generally to solid-state optical elements, and more particularly, to a quasi-monolithic saturable optical element that provides for saturable absorption, pol~n7~ion, and rellw~;nection in a single solid-state optical ck..Pn 2. Description of Related Art.
Each of the individual functions performed by the present invention (saturable 10 absorption, polari_ation, and retrûreflection) is generally well known in the art. Satur-able absorbers are well-known in the art. B~ cr's angle orientation for polarization selection is well known. Dielectric high reflection coatings can be deposited on sub-strates without difficulty using conventional practices. Although individual devices exist that perforrn each of the above functions, the disadvantages and difficulties asso-15 ciated with aligning three functionally different elements are believed to be self-evident.
By way of example, U.S. Patent No.4,084,883, entitled "Reflective Polariza-tion Retarder and Laser Apparatus Utilizing Same", issued to Eastrnan et al. discloses a reflective polarization layer for a laser element. U.S. Patent No.4,104,598 entitled "Laser Internal Coupling Modulation Arrangement with Wire Grid Polarizer Serving as 20 a Reflector and Coupler", issued to Abrams discloses a laser having a cornbined reflec-tor and wire grid polarizer. U.S. Patent No.4,875,220 entitled "Laser Tube for Polar-2il6714 ized Laser Emission", issued to Krueger et al., has two integrated laser miITors, and thc integrated mirror has a polarizing surface thereon. U.S. Patent No.5,097,481 entitled "Gas Laser Having Two Longinl~lin~l Modes of Laser Oscillationn, issued to Fritzsche et al. is similar to the Krueger et al. patent. U.S. Patent No.5,101,415 entitled "Laser Resonator Mirror with Wavelength Selective Coatings on Two Surfaces", issued to Kolb et al. discloses a laser mirror having reflective surfaces which operate in first and second wavelength modes.
In addition to the above-cited patents, prior work relating to solid-state saturable absc,l~ls is typiffed by the following publications. An article entitled "Formation, optical plopel ~es, and laser operation of F2- centers in LiF", by W. Gellermann et al., in J. Appl. Phys., 61, 1297 (1987) investigates the forrnation conditions, optical pro~
erties, and lasing behavior of F2- color centers in LiF crystals. An article entitled "Phototropic centers in chromium-doped garnets", by L.I. Krutova et al., in Opt.Spectrosc (USSR), 63, 695 (1987) discusses the use of chromium-doped garnets as passive Q switches. A presentation entitled "Room telllpe,dtul~ O-switching of Nd:YAG by F2- color centers in LiF," presented by D.S. Sumida et al., CLEO, San Francisco, CA, Paper WM5 (1986), discusses research on the passive Q-switch prop-erties of F2-:LiF, a color center material of interest for solid-state laser designs because of its saturation behavior at high intensity levels. An article éntitled "Room Tempera-ture Laser Action and Q-Switching of F-Aggregate Color Centers in LiF" by S. C.
Rand, et al., presented at the 5th International Conference on Dyn~rnic~l Processes in the Excited State of Solids, Lyon, France, 14 July, 1985, indicates that passhe ~
switching by F2- centers in gamma-irradiated LiF produced 30 ns Nd.YAG pulses. An article entitled "Photochromic properties of a gadolinium-scandiu~gallium garnetcrystal," by E.V. Zharikov et al, Preprint #238, USSR Academy of Sciences, Tn~tit~lte of General Physics, Moscow (1985) discucses the photochromic p~vpe.~ies of a GSGG:Cr, Nd crystals.
However, the above-cited prior art does not disclose combining three functions (saturable absorption, polarization, and retroreflection) into one elern~,nt and no such prior art devices appear to exist. Therefore, it is an objective of the present invention to provide a quasi-monolithic saturable optical element that provides for saturable absorp-tion, polarization, and retroreflection in a single solid-state optical element.
SUMMARY OF THE INVENTION
In order to meet the above and other objectives, the present invention provides an optical element for use in a laser resonator having an optical axis along which a laser beam propagates. The optical element provides for saturable absorption, polarization, 2 ~ 6 7 ~ 4 and retroreflection of the laser beam in an integrated package. The optical element comprises an undoped substrate having front and rear surfaces that are disposed at a predetermined apex angle with respect to each other. The substrate is relatively transparent to the laser beam provided by the laser resonator. A
dielectric coating is disposed on the rear surface of the undoped substrate, and at least one saturable absorber platelet is disposed on the front surface of the substrate. The saturable absorber platelet has a front surface that is disposed at Brewster's angle with respect to the optical axis of the laser resonator. Saturable absorption of the laser beam is provided by the optical element using saturable absorber platelet(s);
polarization of the laser beam is provided by orienting the front surface of the optical element at Brewster's angle relative to the optical axis of the laser resonator; and retroreflection of the laser beam is provided by the dielectric coating.
A further aspect of this invention is as follows:
An optical element for use in a laser resonator having an optical axis along which a laser beam is adapted to propagate, and that provides for saturable absorption, polarization, and retroreflection of said laser beam, said optical element characterized by:
an undoped substrate having front and rear surfaces that are disposed at a predetermined apex angle with respect to each other, and wherein said substrate is relatively transparent to said laser beam provided by said laser resonator;
~A~
a dielectric coating disposed on said rear surface of said undoped substrate that is adapted to reflect said laser beam;
a saturable absorber platelet disposed on said front surface of said undoped substrate that has a front surface that is adapted to be disposed at Brewster's angle with respect to said optical axis of said laser resonator;
and wherein saturable absorption of said laser beam is provided by said saturable absorber, polarization of said laser beam is provided by orienting said front surface of said optical element at Brewster's angle relative to said optical axis of said laser resonator, and retroreflection of said laser beam is provided by said dielectric coating.
The present invention thus integrates three separate optical functions, including saturable absorption, polarization, and retroreflection, into a single solid-state optical element. The saturable absorbing species provided by the platelet(s) are either F2 color-centers in lithium fluoride or Cr4+ dopant ions in one of several suitable host optical materials. Suitable single-crystal host materials may include, for example, yttrium aluminum garnet (YAG), yttrium scandium aluminum garnet (YSAG), yttrium scandium gallium garnet (YSGG), gadolinium scandium aluminum garnet (GSAG), gadolinium scandium gallium garnet (GSGG), gadolinium gallium garnet (GGG), gadolinium indium gallium garnet (GIGG), yttrium ortho-silicate (YOS), Mg2SiO4 (Forsterite), or suitable single crystal combinations of the above. Optionally, the host optical material may be a glassy or amorphous material.
7 ~1 4 -3b-The appropriate linear polarization of the laser beam is achieved by orienting the input face of the optical element at Brewster's angle. The deposited dielectric coating (mirror) on the back surface of the optical element provides 100% reflectivity.
The optical element thus comprises a monolithic, simple to fabricate, easy to align multi-functional element for use in a laser resonator. The present invention, in addition to passive Q-switching, discriminates for linear polarization, and serves as a 100% reflecting mirror or reflector. Because the mirror is an integral part of the optical element, a key benefit is the easy alignment of the integrated polarizer.- By aligning the optical element for retroreflection as is typically done for a normal incidence 100% reflectivity mirror, the Brewster's angle condition is automatically met and optimal polarization discrimination is achieved.
Typically for Brewster's angle elements, the angle of incidence must be optimized individually. In the present invention, that optimization step is not required.
~:~1&714 The present invention provides an optical element that improves the quality and provides for a more efficient and compact laser device in which it is employed.
Furthe. "lore, the present invention is easy to align and reduces the number of optical elements in the laser device. The reduction in the number of elements provides for irnproved system reliability.
Combining three functions (saturable absorption, polarization, and ~l~flec-tion) into a single optical element overcomes the disadvantages and difficulties associ-ated with aligning three functionally different ek ~ in conventional laser devices.
The benefits of the present invention should be apl)al~n~ when c~ a~d to conven-tional devices and in particular, the relative ease of aligning a single integrated device of the present invention is far superior to techniques employed in conventional devices.
BRIEF DESCRIPTION OF THE DRAWINGS
The various features and advantages of the present invention may be more readily understood with reference to the following clet~ilçd description taken in conjunction with the ~ccomp~nying drawings, wherein like ~erer~nce numerals designate like structu~l elements, and in which:
Fig. 1 shows a quasi-monolithic optical element in accordance with the princi-ples of the present invention having an arbitrary number of saturable absorber platelets;
Fig. 2 shows a room-te,~ a~ule absorbance spectrum of LiF:F2- color centers;
and Fig. 3 shows a room-temperature absorbance spectrum of CP+~oped GSGG.
DESCRIPTION OF THE PREFERRED EMBOD~MENTS
A laser structure comprises a lasing meY1ium located between a pair of mirrors which define the laser reson~tor cavity . One mirror reflects subst~nt~ y all of the laser light and is referTed to as the "high reflector" n~irror, and the second rnirror partially transrnits and partially reflects the laser light and is referred to as the "output coupler", as described, for example, in U.S. Patent No. 5,101,415, previously referenced. In accordance with the present invention, the high-reflector mirror is replaced with and augmented by the multi-functional optical element of the present invention, as described in detail below.
Referring now to the drawing figures, Fig. I shows a quasi-monolithic optical element 10 in accordance with the principles of the present invention. The quasi-mono-lithic optical element 10 is shown having an arbitrary number of saturable absorber platelets 11. The term "quasi-monolithic" is used since the optical element 10 of the present invention is not a single piece, or truly monolithic. The quasi-monolithic 2i~6714 optical element 10 is shown disposed at an end of a laser resonator 12, and the optical axis 13 of the laser resonator 12 having a laser beam 13a propagating therealong is also shown.
The quasi-monolithic optical element 10 includes a substrate 14 comprising an 5 undoped host optical material which has approximately the same refractive index as the saturable absorber platelets 11 described below. The substrate 14 is transparent to the laser bearn 1 3a. The substrate 14 is formed in the shape of a wedge having front and rear surfaces 14a, 14b disposed at a predele~ ed apex angle ~A with respect to each other. The substrate 14 has a lOO~o reflecting dielectric coating 15 disposed on the rear 10 surface 14b thereof. The dielectric coating 15 may co~ ;se a standard multilayer dielectric material, formed of tit~nil~m dioxide and silicon dioxide (TiO~/SiO2) or silicon dioxide and zirconium dioxide (sio2lzro2)~ for e~mple, which is deposited on therear surface 14b using well-known coating deposition techniques.
A plurality of saturable absorber platelets 1 la, 1 lb, 1 lc are stacked on top of 15 each other and are secured together and to the front surface 14a of the substrate 14 by means of individual layers of optical cement 16, for example. Fig. 1 shows the use of three saturable absorber platelets 1 la, 1 lb, 1 lc for the purposes of example only. It is to be understood that other numbers of saturable absorber platelets 11 may be employed, including a single platelet 11, dep~" ding upon the type of laser resonator 12 20 and the saturable absorbing species used in the saturable absc~rber platelet 11. The optical cement 16 is also transparent to the laser beam 13a, and is nominally index-m~tched to the substrate 14. An optical cement 16 such as an epoxy rnaterial that is available from Hartel Enterprises, Pacoirna, California, may be employed. A na¢mal plane 17 to an exposed surface of the topmost or front saturable absorber platelet 11 is 25 shown, and the optical element 10 is disposed within the laser resonator 12 at an angle ~JB between the norrnal 17 and the optical axis 13 of the resonator 12. As is shown in Fig. 1, the angle of incidence of the laser beam 13 at the surface of the dielectric coating 15 is 90~. The definitions and specified values for ~A and ~g are given below.
The substrate 14 is undoped for two reasons. First, with regard to the F2- color30 centers in LiF, for exarnple, these centers anneal away at the elevated te,llpe,~tures required to provide the hard dielectric coating 15. Second, if the substrate 14 were doped with a saturable absorber species, then its optical densitv would vary as a function of transverse dimension across the aperture. As a result, the optical element 10 would optically bleach in a spatially nonuniform manner. Consequently, the optical 35 element 10 is constructed in the manner stated above.
The optical element 10 of the present invention provides the integration of three optical functions into a single optical component that can then be aligned in the laser 2~16714 resor~or generally indicated at 12, by optimizing the retroreflected return off the high reflectivity rear surface 14b of the optical ele.~cnt 10 provided by the 100% reflecting dielectric coating t5. The integration is accomplished by using the optical cement 16 to fuse one or more saturable absorber platelets 11 to the substrate 14 and to each other to 5 form a single quasi-monolithic element 10.
As was mentioned above, in order for the optical elelnent 10 to exhibit low lossat the interfaces between platelets 11, the optical cement 16 should be index-..~ h~d to the subs~ale 14. For non-index-matched situations, one must trade off the benefit of additional polarization dis.;.i.,lination for increased passive lo-ss. The d~ d aspects of each of the three functions perforrned by the optical element 10 will now be addressed.
The saturable absorption is accomplished through either the generation of F2-color centers using electron beam irradiation or the doping of Cr4 ' in suitable crystals, such as ~dolinium scandium gallium garnet, for example, that comprise the saturable absorber platelets 11. More particularly, suitable single~rystal host optical m~t~ ls for the substrate 14 may include, for example, yttrium aluminum garnet (YAG), yttrium sc~nflillm aluminum garnet (YSAG), yttrium scandium gallium garnet (YSGG), gadolinium scandium aluminllm garnet (GSAG), gadolinium sc~ndium gallium garnet (GSGG), gadolinium gallium garnet (GGG), gadolinium indium gallium garnet (GIGG), yttrium orthosilicate (YOS), Mg2SiO4 (Forsterite), or suitable single crystal combinations of the above. Alternatively, the host optical material may be a glassy or amorphous m--ateriaL
The fabrication issues associated with F2- color centers are such that 2-3 mm thick platelets 11 of irradiated LiF provide a maximum optical density per platelet 11.
The required total optical density for a particular application is achieved by h~ccn~l'at-ing greater or fewer platelets 11 into the design of the optical elernent 10. For Cr4+-doped garnets, the nature of the crystal growth process allows for virtually any reason-able optical density to be achieved with a single platelet 11. Both saturable absorber species have demonstrated passive Q-switching at a laser wavelength of app-vxilllately one micrometer, and other wavelengths are feasible. The F2- color center absorption band ranges from about 900-1100 nm while the CP+ absorption band extends from 900 1200 nm. Fig. 2 shows a room-temperature absorbance spectrum of LiF:F2- color centers, while Fig. 3 shows a room-temperature absorbance spectrum of CP+-doped Cr:Nd:GSGG (gadolinium scandium gallium garnet).
The polarization discrimination for linearly polarized laser light is obtained by orienting the front surface 21 of the optical element 10 at Brewster's angle with respect to the optical axis 13 of the laser resonator 12 such that the "p" polarization is transmit-2il~714 ted without loss. In practice however, this condition is autom~tically s~ti~fied when thc optical elernent 10 is optimized for proper ~ o,cflection of the laser beam 13. At 1.06 ~m, for example, the refractive index and Brewste~s angle for a LiF substrate 14 arc 1.386 and 54.2~, respectively. Similarly, for other garnets, such as gadolinium sc~n~iium gallium garnet in particular, the values are 1.94 and 62.7~ lcs~li~/ely.
To obtain lOO~o reflectivity off the rear surface 14b of the optical elemcnt lQ
the dielectric laser coating 15 is evaporated onto the substrate 14 that comprises an undoped host material, which has applo~i-nately the same lG~la~ e index as the saturable absorber platelets 11, described above. After the coating process, the coated substrate 14 forms a mirror or reflector that is then fused to the saturable absorber platelet(s) 11 by means of the optical cement 16. The undoped reflector compri~ing the coated substrate 14 is designed so that, at the proper orientation for lGI-o,eflection (i.e.
the angle of incidence of the laser beam 13 at the coated surface 14b is 90~), the fr~nt surface 14a and hence the front surface 21 of the optical ele-rnent 10 is a~ltom~ti~lly aligned at Brewster's angle. In general, the apex angle ~A iS uniquely defined using simple geometlical arguments and is given by Sin-l (sin ~g/n}, where ~B iS BIG~ S
angle and n is the refractive index of the substrate 14. For platelets 11 comprising LiF
and GSGG, ~A iS 18.4~ and 27.3~ respectively at A =l.06 ~m. In operation, a col.~pen-sation wedge 22 having the identical composition and apex angle as the ~b~ e 14 rnay be inserted into the path of the laser bearn 13 and having the opposite orien~tion relative to the substrate 14 (i.e., rotated 180~ relative to the substrate) in order to alleviate therrnal beam steering effects.
Thus there has been described an improved quasi-monolithic saturable optical element that provides for saturable absorption, polarization, and ~e~u,eflection in a single solid-state optical element. It is to be understood that the above-described embolim~nts are merely illustrative of some of the rnany specific emb~iments that represent applications of the principles of the present invention. Clearly, n~ll.,,ous and other arrangements can be readily devised by those skilled in the art without depamng from the scope of the invention.
Claims (10)
1. An optical element for use in a laser resonator having an optical axis along which a laser beam is adapted to propagate, and that provides for saturable absorption, polarization, and retroreflection of said laser beam, said optical element characterized by:
an undoped substrate having front and rear surfaces that are disposed at a predetermined apex angle with respect to each other, and wherein said substrate is relatively transparent to said laser beam provided by said laser resonator;
a dielectric coating disposed on said rear surface of said undoped substrate that is adapted to reflect said laser beam;
a saturable absorber platelet disposed on said front surface of said undoped substrate that has a front surface that is adapted to be disposed at Brewster's angle with respect to said optical axis of said laser resonator;
and wherein saturable absorption of said laser beam is provided by said saturable absorber, polarization of said laser beam is provided by orienting said front surface of said optical element at Brewster's angle relative to said optical axis of said laser resonator, and retroreflection of said laser beam is provided by said dielectric coating.
an undoped substrate having front and rear surfaces that are disposed at a predetermined apex angle with respect to each other, and wherein said substrate is relatively transparent to said laser beam provided by said laser resonator;
a dielectric coating disposed on said rear surface of said undoped substrate that is adapted to reflect said laser beam;
a saturable absorber platelet disposed on said front surface of said undoped substrate that has a front surface that is adapted to be disposed at Brewster's angle with respect to said optical axis of said laser resonator;
and wherein saturable absorption of said laser beam is provided by said saturable absorber, polarization of said laser beam is provided by orienting said front surface of said optical element at Brewster's angle relative to said optical axis of said laser resonator, and retroreflection of said laser beam is provided by said dielectric coating.
2. The optical element of Claim 1 wherein said saturable absorber platelet is characterized by lithium fluoride (LiF) having F2- color-centers disposed therein such that said undoped substrate has a predetermined optical density.
3. The optical element of Claim 1 wherein said saturable absorber platelet is characterized by a host optical material having Cr4+ dopant ions disposed therein such that said undoped substrate has a predetermined optical density.
4. The optical element of Claim 3 wherein said host optical material is characterized by a single-crystal optical material.
5. The optical element of Claim 4 wherein said single-crystal optical material is selected from the group consisting of yttrium aluminum garnet (YAG), yttrium scandium aluminum garnet (YSAG) yttrium scandium gallium garnet (YSGG), gadolinium scandium aluminum garnet (GSAG), gadolinium scandium gallium garnet (GSGG), gadolinium gallium garnet (GGG), gadolinium indium gallium garnet (GIGG), yttrium orthosilicate (YOS), M g2SiO4 and single crystal combinations thereof.
6. The optical element of Claim 3 wherein said host optical material is characterized by a glassy optical material.
7. The optical element of Claim 1 wherein said undoped substrate is characterized by a material having approximately the same refractive index as said saturable absorber platelet.
8. The optical element of Claim 1 wherein said dielectric coating is characterized by multiple layers of titanium dioxide and silicon dioxide.
9. The optical element of Claim 1 wherein said dielectric coating is characterized by multiple layers of silicon dioxide and zirconium dioxide.
10. The optical element of Claim 1 which is characterized by a plurality of said saturable absorber platelets stacked on top of each other and secured together and to said front surface of said undoped substrate by means of individual layers of optically transparent cement.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US030,763 | 1993-03-12 | ||
| US08/030,763 US5303256A (en) | 1993-03-12 | 1993-03-12 | Quasi-monolithic saturable optical element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2116714A1 CA2116714A1 (en) | 1994-09-13 |
| CA2116714C true CA2116714C (en) | 1997-12-16 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002116714A Expired - Fee Related CA2116714C (en) | 1993-03-12 | 1994-03-01 | Quasi-monolithic saturable optical element |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US5303256A (en) |
| EP (1) | EP0615319B1 (en) |
| JP (1) | JP2820367B2 (en) |
| KR (1) | KR940022118A (en) |
| CA (1) | CA2116714C (en) |
| DE (1) | DE69405431T2 (en) |
| ES (1) | ES2106390T3 (en) |
| IL (1) | IL108888A (en) |
| NO (1) | NO940857L (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5847871A (en) * | 1994-04-05 | 1998-12-08 | Raytheon Company | Monolithic multifunctional optical elements |
| US5701326A (en) * | 1996-04-16 | 1997-12-23 | Loral Vought Systems Corporation | Laser scanning system with optical transmit/reflect mirror having reduced received signal loss |
| US5841798A (en) * | 1996-05-07 | 1998-11-24 | Raytheon Company | Eyesafe laser transmitter with brewster angle Q switch in single resonator cavity for both pump laser and optical parametric oscillator |
| US6172795B1 (en) | 1997-05-30 | 2001-01-09 | Cambridge Scientific, Inc. | Optical shutter device |
| US6035079A (en) * | 1998-08-11 | 2000-03-07 | Trw Inc. | Saturable absorber based optical inverter |
| US6466593B1 (en) * | 2000-01-06 | 2002-10-15 | Raytheon Company | Variable path length passive Q switch |
| US6826205B1 (en) * | 2000-05-22 | 2004-11-30 | Lightwave Electronics Corporation | Etalon enhanced saturable reflector for mode-locked lasers |
| CA2314783A1 (en) * | 2000-08-01 | 2002-02-01 | Kenneth Lloyd Westra | A method of making a high reflectivity micro mirror and a micro mirror |
| JP2002286547A (en) * | 2000-12-28 | 2002-10-03 | Inst Of Physical & Chemical Res | Wide band normal incidence telescope |
| JP2003015173A (en) * | 2001-06-20 | 2003-01-15 | Agilent Technol Inc | Device for storing optical signal |
| DE60227854D1 (en) * | 2001-10-01 | 2008-09-04 | Sony Corp | Polarization-selective prism for a projector |
| US6733587B2 (en) * | 2001-10-05 | 2004-05-11 | Triquint Technology Holding Co. | Process for fabricating an article comprising a magneto-optic garnet material |
| JP3848167B2 (en) | 2002-01-17 | 2006-11-22 | スガツネ工業株式会社 | Caster lock display device |
| EP1431824A1 (en) * | 2002-12-18 | 2004-06-23 | ASML Netherlands B.V. | Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| EP1431827A1 (en) * | 2002-12-18 | 2004-06-23 | ASML Netherlands B.V. | Lithographic apparatus, mirror element, device manufacturing method, and beam delivery system |
| US7319708B2 (en) * | 2005-02-22 | 2008-01-15 | Lockheed Martin Coherent Technologies, Inc. | Variable pulse repetition frequency passively Q-switched laser |
| US8031749B2 (en) | 2005-09-20 | 2011-10-04 | Jds Uniphase Corporation | Passively Q-switched microlaser with controllable peak power density |
| US8224189B1 (en) | 2007-02-02 | 2012-07-17 | Sunlight Photonics Inc. | Retro-directive target for free-space optical communication and method of producing the same |
| US9007678B2 (en) * | 2010-12-21 | 2015-04-14 | Lockheed Martin Corporation | Monolithic fixed optical delay generators |
| US9559628B2 (en) | 2013-10-25 | 2017-01-31 | Black & Decker Inc. | Handheld power tool with compact AC switch |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3444478A (en) * | 1966-05-12 | 1969-05-13 | North American Rockwell | Bleachable reflectance output coupler |
| US3696310A (en) * | 1970-10-01 | 1972-10-03 | Bell Telephone Labor Inc | Mode-locking in semiconductor lasers |
| US4104598A (en) * | 1975-06-09 | 1978-08-01 | Hughes Aircraft Company | Laser internal coupling modulation arrangement with wire grid polarizer serving as a reflector and coupler |
| SE404571B (en) * | 1976-03-09 | 1978-10-09 | Ericsson Telefon Ab L M | DEVICE FOR A PULSE, Q-SWITCHED LASER |
| US4084883A (en) * | 1977-02-28 | 1978-04-18 | The University Of Rochester | Reflective polarization retarder and laser apparatus utilizing same |
| US4191931A (en) * | 1978-02-06 | 1980-03-04 | Sanders Associates, Inc. | Cooled laser q-switch |
| EP0315031A1 (en) * | 1987-11-05 | 1989-05-10 | Siemens Aktiengesellschaft | Laser tube for polarised beam |
| US5097481A (en) * | 1988-01-21 | 1992-03-17 | Siemens Aktiengesellschaft | Gas laser having two longitudinal modes of laser oscillation |
| US5101415A (en) * | 1990-09-14 | 1992-03-31 | Coherent, Inc. | Laser resonator mirror with wavelength selective coatings on two surfaces |
| US5119382A (en) * | 1990-12-24 | 1992-06-02 | Mcdonnell Douglas Corporation | Tetravalent chromium doped passive Q-switch |
| US5237577A (en) * | 1991-11-06 | 1993-08-17 | At&T Bell Laboratories | Monolithically integrated fabry-perot saturable absorber |
-
1993
- 1993-03-12 US US08/030,763 patent/US5303256A/en not_active Expired - Lifetime
-
1994
- 1994-03-01 CA CA002116714A patent/CA2116714C/en not_active Expired - Fee Related
- 1994-03-07 IL IL10888894A patent/IL108888A/en active IP Right Grant
- 1994-03-10 NO NO940857A patent/NO940857L/en unknown
- 1994-03-11 ES ES94103818T patent/ES2106390T3/en not_active Expired - Lifetime
- 1994-03-11 EP EP94103818A patent/EP0615319B1/en not_active Expired - Lifetime
- 1994-03-11 DE DE69405431T patent/DE69405431T2/en not_active Expired - Fee Related
- 1994-03-11 KR KR1019940004770A patent/KR940022118A/en active IP Right Grant
- 1994-03-14 JP JP6042816A patent/JP2820367B2/en not_active Expired - Lifetime
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|---|---|
| DE69405431T2 (en) | 1998-04-09 |
| JPH077201A (en) | 1995-01-10 |
| JP2820367B2 (en) | 1998-11-05 |
| US5303256A (en) | 1994-04-12 |
| DE69405431D1 (en) | 1997-10-16 |
| IL108888A (en) | 1996-12-05 |
| EP0615319B1 (en) | 1997-09-10 |
| NO940857D0 (en) | 1994-03-10 |
| EP0615319A2 (en) | 1994-09-14 |
| EP0615319A3 (en) | 1995-08-23 |
| NO940857L (en) | 1994-09-13 |
| ES2106390T3 (en) | 1997-11-01 |
| CA2116714A1 (en) | 1994-09-13 |
| KR940022118A (en) | 1994-10-20 |
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