CA2171649A1 - Discharge device having cathode with micro hollow array - Google Patents

Discharge device having cathode with micro hollow array

Info

Publication number
CA2171649A1
CA2171649A1 CA002171649A CA2171649A CA2171649A1 CA 2171649 A1 CA2171649 A1 CA 2171649A1 CA 002171649 A CA002171649 A CA 002171649A CA 2171649 A CA2171649 A CA 2171649A CA 2171649 A1 CA2171649 A1 CA 2171649A1
Authority
CA
Canada
Prior art keywords
cathode
discharge device
micro
gas
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002171649A
Other languages
French (fr)
Other versions
CA2171649C (en
Inventor
Karl H. Schoenbach
Wojciech W. Byszewski
Frank E. Peterkin
Amin N. Dharamsi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osram Sylvania Inc
Original Assignee
Osram Sylvania Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osram Sylvania Inc filed Critical Osram Sylvania Inc
Priority to CA002565197A priority Critical patent/CA2565197A1/en
Priority to CA002565198A priority patent/CA2565198A1/en
Publication of CA2171649A1 publication Critical patent/CA2171649A1/en
Application granted granted Critical
Publication of CA2171649C publication Critical patent/CA2171649C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/025—Electron guns using a discharge in a gas or a vapour as electron source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/025—Hollow cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/02—Details
    • H01J17/04—Electrodes; Screens
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/02—Details
    • H01J17/04—Electrodes; Screens
    • H01J17/06—Cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/04—Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/067—Main electrodes for low-pressure discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/09—Hollow cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/305—Flat vessels or containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/64—Cathode glow lamps
    • H01J61/66—Cathode glow lamps having one or more specially shaped cathodes, e.g. for advertising purposes alphanumeric
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/70—Lamps with low-pressure unconstricted discharge having a cold pressure < 400 Torr
    • H01J61/72—Lamps with low-pressure unconstricted discharge having a cold pressure < 400 Torr having a main light-emitting filling of easily vaporisable metal vapour, e.g. mercury
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0385—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/70—Lamps with low-pressure unconstricted discharge having a cold pressure < 400 Torr
    • H01J61/76—Lamps with low-pressure unconstricted discharge having a cold pressure < 400 Torr having a filling of permanent gas or gases only
    • H01J61/78—Lamps with low-pressure unconstricted discharge having a cold pressure < 400 Torr having a filling of permanent gas or gases only with cold cathode; with cathode heated only by discharge, e.g. high-tension lamp for advertising
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0382—Cathodes or particular adaptations thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H01S3/2383—Parallel arrangements

Abstract

A discharge device for operation in a gas at a prescribed pressure includes a cathode having a plurality of micro hollows therein, and an anode spaced from the cathode. Each of the micro hollows has dimensions selected to produce a micro hollow discharge at the prescribed pressure. Preferably, each of the micro hollows has a cross-sectional dimension that is on the order of the mean free path of electrons in the gas.
Electrical energy is coupled to the cathode and the anode at a voltage and current for producing micro hollow discharges in each of the micro hollows in the cathode.
The discharge device may include a discharge chamber for maintaining the prescribed pressure. A dielectric layer may be disposed on the cathode when the spacing between the cathode and the anode is greater than about the mean free path of electrons in the gas. Applications of the discharge device include fluorescent lamps, excimer lamps, flat fluorescent light sources, miniature gas lasers, electron sources and ion sources.
CA002171649A 1995-03-14 1996-03-13 Discharge device having cathode with micro hollow array Expired - Fee Related CA2171649C (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CA002565197A CA2565197A1 (en) 1995-03-14 1996-03-13 Discharge device having cathode with micro hollow array
CA002565198A CA2565198A1 (en) 1995-03-14 1996-03-13 Discharge device having cathode with micro hollow array

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/403,477 US5686789A (en) 1995-03-14 1995-03-14 Discharge device having cathode with micro hollow array
US08/403,477 1995-03-14

Related Child Applications (2)

Application Number Title Priority Date Filing Date
CA002565197A Division CA2565197A1 (en) 1995-03-14 1996-03-13 Discharge device having cathode with micro hollow array
CA002565198A Division CA2565198A1 (en) 1995-03-14 1996-03-13 Discharge device having cathode with micro hollow array

Publications (2)

Publication Number Publication Date
CA2171649A1 true CA2171649A1 (en) 1996-09-15
CA2171649C CA2171649C (en) 2007-01-23

Family

ID=23595930

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002171649A Expired - Fee Related CA2171649C (en) 1995-03-14 1996-03-13 Discharge device having cathode with micro hollow array

Country Status (5)

Country Link
US (5) US5686789A (en)
EP (2) EP1020887A3 (en)
JP (1) JPH08339779A (en)
CA (1) CA2171649C (en)
DE (1) DE69611257T2 (en)

Families Citing this family (122)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1046332A (en) * 1996-07-30 1998-02-17 Nec Corp Metallic thin film deposition device
US6005343A (en) * 1996-08-30 1999-12-21 Rakhimov; Alexander Tursunovich High intensity lamp
WO1999016100A1 (en) 1997-09-25 1999-04-01 Fusion Lighting, Inc. Electroded selenium lamp
EP0926705A1 (en) * 1997-12-23 1999-06-30 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Flat radiator with locally modulated surface illumination density
WO1999065060A1 (en) * 1998-06-05 1999-12-16 Ooo 'vysokie Technologii' Method and device for generating optical radiation
JP2000111715A (en) * 1998-10-01 2000-04-21 Canon Inc Reflecting optical device and image pickup device using the device
GB2346007B (en) 1999-01-21 2004-03-03 Imaging & Sensing Tech Corp Getter flash shield
SE514743C2 (en) 1999-03-12 2001-04-09 Abb Ab Photoconductive switch
SE516722C2 (en) 1999-04-28 2002-02-19 Hana Barankova Process and apparatus for plasma gas treatment
DE19920579A1 (en) * 1999-05-04 2000-11-23 Heraeus Noblelight Gmbh UV discharge lamp
US6433480B1 (en) * 1999-05-28 2002-08-13 Old Dominion University Direct current high-pressure glow discharges
AU6534300A (en) 1999-08-09 2001-03-05 Rutgers, The State University High electric field, high pressure light source
US6343089B1 (en) 1999-08-25 2002-01-29 College Of William & Mary Microwave-driven ultraviolet light sources
US6528947B1 (en) 1999-12-06 2003-03-04 E. I. Du Pont De Nemours And Company Hollow cathode array for plasma generation
DE10060002B4 (en) * 1999-12-07 2016-01-28 Komatsu Ltd. Device for surface treatment
BR0016773A (en) * 1999-12-15 2002-09-03 Stevens Inst Technology Capillary discharge non-thermal plasma device with segmented electrode and process to promote chemical reactions.
US7029636B2 (en) 1999-12-15 2006-04-18 Plasmasol Corporation Electrode discharge, non-thermal plasma device (reactor) for the pre-treatment of combustion air
US7094322B1 (en) 1999-12-15 2006-08-22 Plasmasol Corporation Wall Township Use of self-sustained atmospheric pressure plasma for the scattering and absorption of electromagnetic radiation
US7192553B2 (en) 1999-12-15 2007-03-20 Plasmasol Corporation In situ sterilization and decontamination system using a non-thermal plasma discharge
US6955794B2 (en) 1999-12-15 2005-10-18 Plasmasol Corporation Slot discharge non-thermal plasma apparatus and process for promoting chemical reaction
US6923890B2 (en) * 1999-12-15 2005-08-02 Plasmasol Corporation Chemical processing using non-thermal discharge plasma
US6348125B1 (en) * 2000-01-17 2002-02-19 Micron Technology, Inc. Removal of copper oxides from integrated interconnects
US6703771B2 (en) * 2000-06-08 2004-03-09 Trustees Of Stevens Institute Of Technology Monochromatic vacuum ultraviolet light source for photolithography applications based on a high-pressure microhollow cathode discharge
US6533951B1 (en) * 2000-07-27 2003-03-18 Eastman Kodak Company Method of manufacturing fluid pump
US7259508B2 (en) * 2000-08-01 2007-08-21 Witmer Warner H Mini plasma display
US6602653B1 (en) 2000-08-25 2003-08-05 Micron Technology, Inc. Conductive material patterning methods
KR20020045969A (en) * 2000-12-12 2002-06-20 준 최 Discharge lamp of hollow electrode
KR100447900B1 (en) * 2000-12-12 2004-09-08 준 최 Discharge lamp of external hollow electrode
US6451685B1 (en) 2001-02-05 2002-09-17 Micron Technology, Inc. Method for multilevel copper interconnects for ultra large scale integration
US6949877B2 (en) * 2001-03-27 2005-09-27 General Electric Company Electron emitter including carbon nanotubes and its application in gas discharge devices
US6444945B1 (en) * 2001-03-28 2002-09-03 Cp Films, Inc. Bipolar plasma source, plasma sheet source, and effusion cell utilizing a bipolar plasma source
JP3498072B2 (en) * 2001-06-25 2004-02-16 炳霖 ▲楊▼ Light emitter for discharge lamp
JP2004535041A (en) 2001-07-02 2004-11-18 プラズマゾル・コーポレイション Novel electrode for atmospheric pressure plasma irradiation device and method of using the same
US6541915B2 (en) 2001-07-23 2003-04-01 The Board Of Trustees Of The University Of Illinois High pressure arc lamp assisted start up device and method
WO2003032364A1 (en) * 2001-10-04 2003-04-17 Koninklijke Philips Electronics N.V. Low-pressure mercury discharge lamp
US6695664B2 (en) * 2001-10-26 2004-02-24 Board Of Trustees Of The University Of Illinois Microdischarge devices and arrays
US6815891B2 (en) 2001-10-26 2004-11-09 Board Of Trustees Of The University Of Illinois Method and apparatus for exciting a microdischarge
CA2463554A1 (en) * 2001-11-02 2003-05-15 Plasmasol Corporation Non-thermal plasma slit discharge apparatus
US20040050684A1 (en) * 2001-11-02 2004-03-18 Plasmasol Corporation System and method for injection of an organic based reagent into weakly ionized gas to generate chemically active species
KR20030045541A (en) * 2001-12-04 2003-06-11 백홍구 A platelike fluorescent lamp having belt type microhollow cathode
US7112918B2 (en) * 2002-01-15 2006-09-26 The Board Of Trustees Of The University Of Illinois Microdischarge devices and arrays having tapered microcavities
US6686595B2 (en) * 2002-06-26 2004-02-03 Semequip Inc. Electron impact ion source
KR100788472B1 (en) 2002-06-26 2007-12-24 세미이큅, 인코포레이티드 Vapor source for an ion source
US6624583B1 (en) * 2002-06-28 2003-09-23 Motorola, Inc. Method and apparatus for plasma treating a chemical species
US7170223B2 (en) * 2002-07-17 2007-01-30 Hewlett-Packard Development Company, L.P. Emitter with dielectric layer having implanted conducting centers
WO2004019364A1 (en) * 2002-08-23 2004-03-04 California Institute Of Technology Method and apparatus for providing flow-stabilized microdischarges in metal capillaries
KR20040022639A (en) * 2002-09-09 2004-03-16 주식회사 네오바이오텍 The generation method of thin coating film by carbon system material
US20040227469A1 (en) * 2002-10-15 2004-11-18 Karl Schoenbach Flat panel excimer lamp
EP1581458B1 (en) * 2003-01-02 2010-08-11 Ultraviolet Sciences, Inc. Micro-discharge devices and applications
DE10301478A1 (en) * 2003-01-16 2004-07-29 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Electrode for a high pressure discharge lamp
US6869143B2 (en) 2003-04-01 2005-03-22 Bae Industries, Inc. Recliner clutch mechanism for vehicle seat
US7399331B2 (en) * 2003-05-29 2008-07-15 Carrier Corporation Gas phase contaminant removal with low pressure drop
JP4266706B2 (en) * 2003-05-29 2009-05-20 Ｎｅｃライティング株式会社 Narrowband UV-B phototherapy device
US20040238344A1 (en) * 2003-05-30 2004-12-02 Benoit Jeffrey T. Air purification system using excimer lamps for ultra-violet photocatalytic oxidation
US20060272674A1 (en) * 2005-06-02 2006-12-07 Cerionx, Inc. Method and apparatus for cleaning and surface conditioning objects using plasma
US20060162740A1 (en) * 2005-01-21 2006-07-27 Cerionx, Inc. Method and apparatus for cleaning and surface conditioning objects using non-equilibrium atmospheric pressure plasma
US20060162741A1 (en) * 2005-01-26 2006-07-27 Cerionx, Inc. Method and apparatus for cleaning and surface conditioning objects with plasma
US20060272675A1 (en) * 2005-06-02 2006-12-07 Cerionx, Inc. Method and apparatus for cleaning and surface conditioning objects using plasma
EP1631701A4 (en) * 2003-06-16 2009-01-07 Cerionx Inc Atmospheric pressure non-thermal plasma device to clean and sterilize the surface of probes, cannulas, pin tools, pipettes and spray heads
US8366871B2 (en) * 2003-06-16 2013-02-05 Ionfield Holdings, Llc Method and apparatus for cleaning and surface conditioning objects using plasma
US8092643B2 (en) * 2003-06-16 2012-01-10 Ionfield Systems, Llc Method and apparatus for cleaning and surface conditioning objects using plasma
US8092644B2 (en) * 2003-06-16 2012-01-10 Ionfield Systems, Llc Method and apparatus for cleaning and surface conditioning objects using plasma
DE10341115B3 (en) * 2003-09-03 2005-06-23 Klaus Dr. Rennebeck Radiation source, in particular light source
KR20050032178A (en) * 2003-10-01 2005-04-07 삼성전자주식회사 Surface light source device and liquid crystal display device using the same
KR20050045262A (en) * 2003-11-10 2005-05-17 삼성전자주식회사 Surface light source device and display device having the same
EP1789176A2 (en) * 2004-01-22 2007-05-30 Plasmasol Corporation Capillary-in-ring electrode gas discharge generator for producing a weakly ionized gas and method for using the same
EP1715898A4 (en) * 2004-01-22 2007-05-30 Plasmasol Corp Modular sterilization system
US7511426B2 (en) * 2004-04-22 2009-03-31 The Board Of Trustees Of The University Of Illinois Microplasma devices excited by interdigitated electrodes
US8471171B2 (en) * 2004-05-28 2013-06-25 Robert O. Price Cold air atmospheric pressure micro plasma jet application method and device
US7572998B2 (en) * 2004-05-28 2009-08-11 Mohamed Abdel-Aleam H Method and device for creating a micro plasma jet
US8502108B2 (en) * 2004-05-28 2013-08-06 Old Dominion University Research Foundation Method and device for creating a micro plasma jet
JP3889411B2 (en) 2004-05-31 2007-03-07 株式会社東芝 Discharge lamp and discharge electrode
WO2006009881A2 (en) * 2004-06-18 2006-01-26 Innovalight, Inc. Process and apparatus for forming nanoparticles using radiofrequency plasmas
US7573202B2 (en) * 2004-10-04 2009-08-11 The Board Of Trustees Of The University Of Illinois Metal/dielectric multilayer microdischarge devices and arrays
US7297041B2 (en) * 2004-10-04 2007-11-20 The Board Of Trustees Of The University Of Illinois Method of manufacturing microdischarge devices with encapsulated electrodes
KR20070060151A (en) * 2004-10-04 2007-06-12 더 보오드 오브 트러스티스 오브 더 유니버시티 오브 일리노이즈 Microdischarge devices with encapsulated electrodes and method of making
US7385350B2 (en) * 2004-10-04 2008-06-10 The Broad Of Trusstees Of The University Of Illinois Arrays of microcavity plasma devices with dielectric encapsulated electrodes
US20060139039A1 (en) * 2004-12-23 2006-06-29 Dutton David T Systems and methods for a contactless electrical probe
DE102005002142A1 (en) * 2005-01-12 2006-07-20 Forschungsverbund Berlin E.V. Microplasma array
US7477017B2 (en) * 2005-01-25 2009-01-13 The Board Of Trustees Of The University Of Illinois AC-excited microcavity discharge device and method
US7482750B2 (en) * 2005-01-25 2009-01-27 The Board Of Trustees Of The University Of Illinois Plasma extraction microcavity plasma device and method
US20060237030A1 (en) * 2005-04-22 2006-10-26 Cerionx, Inc. Method and apparatus for cleaning and surface conditioning objects with plasma
US20070048176A1 (en) * 2005-08-31 2007-03-01 Plasmasol Corporation Sterilizing and recharging apparatus for batteries, battery packs and battery powered devices
US9808544B2 (en) * 2005-08-31 2017-11-07 Ultraviolet Sciences, Inc. Ultraviolet light treatment chamber
US9511344B2 (en) 2007-12-18 2016-12-06 Ultraviolet Sciences, Inc. Ultraviolet light treatment chamber
US7511281B2 (en) * 2005-08-31 2009-03-31 Ultraviolet Sciences, Inc. Ultraviolet light treatment chamber
US7744039B2 (en) * 2006-01-03 2010-06-29 The Boeing Company Systems and methods for controlling flows with electrical pulses
WO2007146279A2 (en) * 2006-06-12 2007-12-21 The Board Of Trustees Of The University Of Illinois Low voltage microcavity plasma device and addressable arrays
US9157191B2 (en) * 2006-11-02 2015-10-13 Apjet, Inc. Treatment of fibrous materials using atmospheric pressure plasma polymerization
US20090014423A1 (en) * 2007-07-10 2009-01-15 Xuegeng Li Concentric flow-through plasma reactor and methods therefor
US20080220175A1 (en) 2007-01-22 2008-09-11 Lorenzo Mangolini Nanoparticles wtih grafted organic molecules
US20080191193A1 (en) * 2007-01-22 2008-08-14 Xuegeng Li In situ modification of group iv nanoparticles using gas phase nanoparticle reactors
US7622721B2 (en) * 2007-02-09 2009-11-24 Michael Gutkin Focused anode layer ion source with converging and charge compensated beam (falcon)
FR2915311B1 (en) * 2007-04-17 2011-01-07 Saint Gobain FLASHLIGHT WITH DISCHARGE.
US20080284335A1 (en) * 2007-05-16 2008-11-20 Ultraviolet Sciences, Inc. Discharge lamp
US8968438B2 (en) * 2007-07-10 2015-03-03 Innovalight, Inc. Methods and apparatus for the in situ collection of nucleated particles
US8471170B2 (en) 2007-07-10 2013-06-25 Innovalight, Inc. Methods and apparatus for the production of group IV nanoparticles in a flow-through plasma reactor
JP5116085B2 (en) * 2007-08-17 2013-01-09 公益財団法人北九州産業学術推進機構 Discharge lamp
US8101923B2 (en) * 2007-11-12 2012-01-24 Georgia Tech Research Corporation System and method for spatially-resolved chemical analysis using microplasma desorption and ionization of a sample
US7957423B2 (en) * 2008-01-02 2011-06-07 Cisco Technology, Inc. Packet error correction
US8220753B2 (en) * 2008-01-04 2012-07-17 The Boeing Company Systems and methods for controlling flows with pulsed discharges
US8361276B2 (en) 2008-02-11 2013-01-29 Apjet, Inc. Large area, atmospheric pressure plasma for downstream processing
US8049417B2 (en) * 2008-02-22 2011-11-01 Rutgers, The State University High brightness excimer lamp
US8721836B2 (en) * 2008-04-22 2014-05-13 Micron Technology, Inc. Plasma processing with preionized and predissociated tuning gases and associated systems and methods
US9446840B2 (en) * 2008-07-01 2016-09-20 The Boeing Company Systems and methods for alleviating aircraft loads with plasma actuators
US7938707B1 (en) * 2008-07-07 2011-05-10 Sandia Corporation Methods for batch fabrication of cold cathode vacuum switch tubes
WO2010017185A1 (en) 2008-08-04 2010-02-11 Agc Flat Glass North America, Inc. Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition
CN105706314B (en) * 2013-09-24 2020-02-14 伊利诺伊大学受托管理委员会 Modular microplasma microchannel reactor device, microreactor module, and ozone generation device
EA201791237A1 (en) 2014-12-05 2017-11-30 Эй-Джи-Си Флет Гласс Норт Эмерике, Инк. PLASMA SOURCE WITH APPLICATION OF REDUCING EDUCATION OF MACRO PARTICLES COATING AND METHOD OF USING THE PLASMA SOURCE WITH APPLICATION OF DECREASING EDUCATION OF WATER PARTICLES COATING TO DECORATE ESC ESCAPE ELEMENTERS ESC ESCAPE PLAYERS CLEARING ELEMENTS
CN107852805B (en) 2014-12-05 2020-10-16 Agc玻璃欧洲公司 Hollow cathode plasma source
WO2016143105A1 (en) * 2015-03-11 2016-09-15 ギガフォトン株式会社 Excimer laser chamber device
SE541352C2 (en) * 2015-06-03 2019-08-13 Apr Tech Ab Microfluidic array
US9721764B2 (en) 2015-11-16 2017-08-01 Agc Flat Glass North America, Inc. Method of producing plasma by multiple-phase alternating or pulsed electrical current
US9721765B2 (en) 2015-11-16 2017-08-01 Agc Flat Glass North America, Inc. Plasma device driven by multiple-phase alternating or pulsed electrical current
US10573499B2 (en) 2015-12-18 2020-02-25 Agc Flat Glass North America, Inc. Method of extracting and accelerating ions
US10242846B2 (en) 2015-12-18 2019-03-26 Agc Flat Glass North America, Inc. Hollow cathode ion source
US10271415B2 (en) * 2016-04-30 2019-04-23 The Boeing Company Semiconductor micro-hollow cathode discharge device for plasma jet generation
US10711770B2 (en) * 2016-04-30 2020-07-14 Thr Boeing Company Semiconductor micro-hollow cathode discharge device for plasma jet generation
US10658170B2 (en) 2016-06-27 2020-05-19 Eden Park Illumination High-power ultraviolet (UV) and vacuum ultraviolet (VUV) lamps with micro-cavity plasma arrays
US11266003B2 (en) * 2017-06-13 2022-03-01 Zaka-Ul-Islam Mujahid Method and apparatus for generating plasma using a patterned dielectric or electrode
US10269530B1 (en) * 2017-11-29 2019-04-23 Taiwan Semiconductor Manufacturing Co., Ltd. Ion beam source for semiconductor ion implantation
US11349273B2 (en) * 2018-01-17 2022-05-31 Cymer, Llc Apparatus for tuning discharge performance in a laser chamber

Family Cites Families (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1842215A (en) * 1930-06-28 1932-01-19 Westinghouse Lamp Co Electrode for gaseous discharge devices
GB462806A (en) * 1935-10-09 1937-03-16 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Improvements in high-pressure metal-vapour electric discharge devices
US2549355A (en) * 1948-02-28 1951-04-17 Gen Electric Fluorescent lamp
US2812465A (en) * 1954-05-10 1957-11-05 Kenneth J Germeshausen Gaseous-discharge device
US2847605A (en) * 1954-11-18 1958-08-12 Byer Abner Albert Electrode for fluorescent lamps
US2941107A (en) * 1956-01-27 1960-06-14 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Flashtube
US3196043A (en) * 1961-05-17 1965-07-20 Gen Electric Method for making an electrode structure
US3304456A (en) * 1963-03-04 1967-02-14 Gertrude P Copeland Slot cathode
US3383541A (en) * 1965-11-17 1968-05-14 United Aircraft Corp Glow discharge cathode having a large electron beam emitting aperture
US3505553A (en) * 1966-05-12 1970-04-07 Philips Corp Radio-interference-free low-pressure mercury-vapor lamp
US3390297A (en) * 1966-07-01 1968-06-25 Perkin Elmer Corp Shield for hollow cathode lamps
US3515932A (en) * 1967-04-27 1970-06-02 Hughes Aircraft Co Hollow cathode plasma generator
US3662214A (en) * 1970-04-13 1972-05-09 Sperry Rand Corp Gas discharge display apparatus utilizing hollow cathode light sources
US3879830A (en) * 1971-06-30 1975-04-29 Gte Sylvania Inc Cathode for electron discharge device having highly adherent emissive coating of nickel and nickel coated carbonates
US3875629A (en) * 1973-05-18 1975-04-08 Gte Sylvania Inc Method of fabricating cathodes for electron discharge devices
US3906271A (en) * 1974-08-13 1975-09-16 Itt Ceramic cup electrode for a gas discharge device
US3969279A (en) * 1974-08-13 1976-07-13 International Telephone And Telegraph Corporation Method of treating electron emissive cathodes
US4093893A (en) * 1976-11-22 1978-06-06 General Electric Company Short arc fluorescent lamp
US4395770A (en) * 1979-10-05 1983-07-26 Bell Telephone Laboratories, Incorporated Segmented plasma excitation-recombination light source
US4352117A (en) * 1980-06-02 1982-09-28 International Business Machines Corporation Electron source
US4523125A (en) * 1981-07-13 1985-06-11 General Electric Company Fluorescent lamp electrodes
NL8104893A (en) * 1981-10-29 1983-05-16 Philips Nv CATHODE JET TUBE AND SEMICONDUCTOR DEVICE FOR USE IN SUCH A CATHODE JET TUBE.
GB2109160B (en) * 1981-11-06 1985-05-30 Philips Electronic Associated Semiconductor electron source for display tubes and other equipment
US4461970A (en) * 1981-11-25 1984-07-24 General Electric Company Shielded hollow cathode electrode for fluorescent lamp
DE3233584A1 (en) * 1982-09-10 1984-03-15 G. Rau GmbH & Co, 7530 Pforzheim ELECTRODE FOR AN ELECTRICAL DISCHARGE LINE AND PRODUCTION METHOD THEREFOR
EP0146383B1 (en) * 1983-12-20 1992-08-26 Eev Limited Apparatus for forming electron beams
NL8500596A (en) * 1985-03-04 1986-10-01 Philips Nv DEVICE EQUIPPED WITH A SEMICONDUCTOR CATHOD.
US4637853A (en) * 1985-07-29 1987-01-20 International Business Machines Corporation Hollow cathode enhanced plasma for high rate reactive ion etching and deposition
NL8600676A (en) * 1986-03-17 1987-10-16 Philips Nv SEMICONDUCTOR DEVICE FOR GENERATING AN ELECTRONIC CURRENT.
US4825446A (en) * 1986-06-14 1989-04-25 English Electric Valve Company Limited Laser apparatus having cathode bore directing electron beam onto anode
US4795942A (en) * 1987-04-27 1989-01-03 Westinghouse Electric Corp. Hollow cathode discharge device with front shield
US5043627A (en) * 1988-03-01 1991-08-27 Fox Leslie Z High-frequency fluorescent lamp
US5331249A (en) * 1988-09-27 1994-07-19 Yazaki Corporation Discharge tube
JPH0353481A (en) * 1989-07-19 1991-03-07 Yazaki Corp Discharge lamp
US5079473A (en) * 1989-09-08 1992-01-07 John F. Waymouth Intellectual Property And Education Trust Optical light source device
US5063324A (en) * 1990-03-29 1991-11-05 Itt Corporation Dispenser cathode with emitting surface parallel to ion flow
US5359257A (en) * 1990-12-03 1994-10-25 Bunch Kyle J Ballistic electron, solid state cathode
JPH05275061A (en) * 1992-03-24 1993-10-22 Hitachi Ltd Hollow cathode lamp and manufacture thereof
US5343115A (en) * 1992-05-15 1994-08-30 Thomas Electronics Incorporated Efficient large area multi-channel flat fluorescent lamp
GB9216785D0 (en) * 1992-08-07 1992-09-23 Smiths Industries Plc Gas discharge electrodes

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CA2171649C (en) 2007-01-23
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US6346770B1 (en) 2002-02-12
US20020036461A1 (en) 2002-03-28
EP0732719A1 (en) 1996-09-18
DE69611257T2 (en) 2001-04-26
US6072273A (en) 2000-06-06
US6518692B2 (en) 2003-02-11
US5686789A (en) 1997-11-11

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