CA2197829A1 - Surface Acoustic Wave Device - Google Patents

Surface Acoustic Wave Device

Info

Publication number
CA2197829A1
CA2197829A1 CA2197829A CA2197829A CA2197829A1 CA 2197829 A1 CA2197829 A1 CA 2197829A1 CA 2197829 A CA2197829 A CA 2197829A CA 2197829 A CA2197829 A CA 2197829A CA 2197829 A1 CA2197829 A1 CA 2197829A1
Authority
CA
Canada
Prior art keywords
acoustic wave
surface acoustic
wave device
electrode
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA2197829A
Other languages
French (fr)
Other versions
CA2197829C (en
Inventor
Yoshihiro Takahashi
Yasushi Yamamoto
Natsuhiko Sakairi
Shin-Ichi Shikata
Hideaki Nakahata
Kenjiro Higaki
Satoshi Fujii
Hiroyuki Kitabayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
NEC Corp
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Sumitomo Electric Industries Ltd filed Critical NEC Corp
Publication of CA2197829A1 publication Critical patent/CA2197829A1/en
Application granted granted Critical
Publication of CA2197829C publication Critical patent/CA2197829C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02582—Characteristics of substrate, e.g. cutting angles of diamond substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H03H9/02685—Grating lines having particular arrangements
    • H03H9/02716—Tilted, fan shaped or slanted grating lines
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H03H9/02795—Multi-strip couplers as track changers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
    • H03H9/72—Networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/74—Multiple-port networks for connecting several sources or loads, working on the same frequency or frequency band, to a common load or source
    • H03H9/76—Networks using surface acoustic waves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24926—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including ceramic, glass, porcelain or quartz layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

Abstract

A surface acoustic wave device comprises a diamond layer (12) or a substrate (11) with a diamond layer (12) formed thereon, an A1 electrode (13) formed on the diamond layer (12), and a ZnO piezoelectric thin film layer (14) formed on the diamond layer (12) with the A1 electrode (13) covered by the ZnO piezoelectric thin film layer (14). The ZnO piezoelectric thin film layer (14) has a thickness hl within a range defined by 0.65 ~ khl ~ 0.75 while the A1 electrode (13) has a thickness h2 within a range defined by 0.03 ~ kh2 ~ 0.04, where k is given by k = 2.pi. /.lambda.and .lambda. represents an electrode period.
CA002197829A 1996-02-19 1997-02-18 Surface acoustic wave device Expired - Lifetime CA2197829C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP8056992A JPH09223943A (en) 1996-02-19 1996-02-19 Surface acoustic wave device
JP56992/1996 1996-02-19

Publications (2)

Publication Number Publication Date
CA2197829A1 true CA2197829A1 (en) 1997-08-20
CA2197829C CA2197829C (en) 2000-05-16

Family

ID=13042999

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002197829A Expired - Lifetime CA2197829C (en) 1996-02-19 1997-02-18 Surface acoustic wave device

Country Status (5)

Country Link
US (1) US5888646A (en)
EP (1) EP0790705A1 (en)
JP (1) JPH09223943A (en)
KR (1) KR100289784B1 (en)
CA (1) CA2197829C (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19758198A1 (en) 1997-12-30 1999-08-19 Siemens Ag Surface wave (SAW) device on pyroelectric single crystal substrate
DE19758195C2 (en) * 1997-12-30 2000-05-18 Siemens Ag Surface wave (SAW) component on in particular lithium tantalate or niobate substrate
JP3941502B2 (en) * 1999-10-15 2007-07-04 セイコーエプソン株式会社 Surface acoustic wave device
US6972508B2 (en) * 2000-04-28 2005-12-06 Murata Manufacturing Co., Ltd. Surface acoustic wave device
US7518284B2 (en) * 2000-11-02 2009-04-14 Danfoss A/S Dielectric composite and a method of manufacturing a dielectric composite
WO2004027970A1 (en) * 2002-09-20 2004-04-01 Danfoss A/S An elastomer actuator and a method of making an actuator
US7548015B2 (en) * 2000-11-02 2009-06-16 Danfoss A/S Multilayer composite and a method of making such
US8181338B2 (en) * 2000-11-02 2012-05-22 Danfoss A/S Method of making a multilayer composite
US6717327B2 (en) * 2001-04-23 2004-04-06 Murata Manufacturing Co., Ltd. Surface acoustic wave device
AUPR507601A0 (en) * 2001-05-21 2001-06-14 Microtechnology Centre Management Limited Surface acoustic wave sensor
JP2003037467A (en) 2001-07-24 2003-02-07 Murata Mfg Co Ltd Surface acoustic wave device
DE60224844T2 (en) * 2001-12-21 2009-01-08 Danfoss A/S DIELECTRIC ACTUATOR OR SENSOR STRUCTURE AND MANUFACTURING METHOD
US7274909B2 (en) * 2002-10-31 2007-09-25 Nokia Corporation Method and system for selecting data items for service requests
ES2309502T3 (en) 2003-02-24 2008-12-16 Danfoss A/S ELECTROACTIVE ELASTIC COMPRESSION BANDING.
US7880371B2 (en) * 2006-11-03 2011-02-01 Danfoss A/S Dielectric composite and a method of manufacturing a dielectric composite
US7732999B2 (en) * 2006-11-03 2010-06-08 Danfoss A/S Direct acting capacitive transducer
CN102165237A (en) * 2008-04-30 2011-08-24 丹佛斯多能公司 A power actuated valve
EP2294317B1 (en) * 2008-04-30 2013-04-17 Danfoss Polypower A/S A pump powered by a polymer transducer
US8692442B2 (en) 2012-02-14 2014-04-08 Danfoss Polypower A/S Polymer transducer and a connector for a transducer
US8891222B2 (en) 2012-02-14 2014-11-18 Danfoss A/S Capacitive transducer and a method for manufacturing a transducer

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0340510A (en) * 1989-07-06 1991-02-21 Murata Mfg Co Ltd Elastic surface wave device
JP2885349B2 (en) * 1989-12-26 1999-04-19 住友電気工業株式会社 Surface acoustic wave device
JPH04358410A (en) * 1991-06-05 1992-12-11 Sumitomo Electric Ind Ltd Surface acoustic wave element and production thereof
JP3132078B2 (en) * 1991-09-19 2001-02-05 住友電気工業株式会社 Surface acoustic wave device and method of manufacturing the same
JP3205976B2 (en) * 1992-09-14 2001-09-04 住友電気工業株式会社 Surface acoustic wave device
US5576589A (en) * 1994-10-13 1996-11-19 Kobe Steel Usa, Inc. Diamond surface acoustic wave devices

Also Published As

Publication number Publication date
CA2197829C (en) 2000-05-16
KR970063917A (en) 1997-09-12
EP0790705A1 (en) 1997-08-20
KR100289784B1 (en) 2001-05-15
JPH09223943A (en) 1997-08-26
US5888646A (en) 1999-03-30

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Legal Events

Date Code Title Description
EEER Examination request
MKEX Expiry

Effective date: 20170220