CA2214510A1 - Electrofluidic standard module and custom circuit board assembly - Google Patents

Electrofluidic standard module and custom circuit board assembly

Info

Publication number
CA2214510A1
CA2214510A1 CA002214510A CA2214510A CA2214510A1 CA 2214510 A1 CA2214510 A1 CA 2214510A1 CA 002214510 A CA002214510 A CA 002214510A CA 2214510 A CA2214510 A CA 2214510A CA 2214510 A1 CA2214510 A1 CA 2214510A1
Authority
CA
Canada
Prior art keywords
electrofluidic
module
devices
electrical
fluidic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002214510A
Other languages
French (fr)
Other versions
CA2214510C (en
Inventor
Warren J. Packard
John H. Jerman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Baxter International Inc
IC Sensors Inc
Original Assignee
Baxter International Inc.
Warren J. Packard
John H. Jerman
Ic Sensors Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Baxter International Inc., Warren J. Packard, John H. Jerman, Ic Sensors Inc. filed Critical Baxter International Inc.
Publication of CA2214510A1 publication Critical patent/CA2214510A1/en
Application granted granted Critical
Publication of CA2214510C publication Critical patent/CA2214510C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M1/00Suction or pumping devices for medical purposes; Devices for carrying-off, for treatment of, or for carrying-over, body-liquids; Drainage systems
    • A61M1/14Dialysis systems; Artificial kidneys; Blood oxygenators ; Reciprocating systems for treatment of body fluids, e.g. single needle systems for hemofiltration or pheresis
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15CFLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • F16K99/0003Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005Lift valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • F16K99/0034Operating means specially adapted for microvalves
    • F16K99/0042Electric operating means therefor
    • F16K99/0044Electric operating means therefor using thermo-electric means
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M1/00Suction or pumping devices for medical purposes; Devices for carrying-off, for treatment of, or for carrying-over, body-liquids; Drainage systems
    • A61M1/14Dialysis systems; Artificial kidneys; Blood oxygenators ; Reciprocating systems for treatment of body fluids, e.g. single needle systems for hemofiltration or pheresis
    • A61M1/15Dialysis systems; Artificial kidneys; Blood oxygenators ; Reciprocating systems for treatment of body fluids, e.g. single needle systems for hemofiltration or pheresis with a cassette forming partially or totally the flow circuit for the treating fluid, e.g. the dialysate fluid circuit or the treating gas circuit
    • A61M1/152Details related to the interface between cassette and machine
    • A61M1/1524Details related to the interface between cassette and machine the interface providing means for actuating on functional elements of the cassette, e.g. plungers
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M1/00Suction or pumping devices for medical purposes; Devices for carrying-off, for treatment of, or for carrying-over, body-liquids; Drainage systems
    • A61M1/14Dialysis systems; Artificial kidneys; Blood oxygenators ; Reciprocating systems for treatment of body fluids, e.g. single needle systems for hemofiltration or pheresis
    • A61M1/15Dialysis systems; Artificial kidneys; Blood oxygenators ; Reciprocating systems for treatment of body fluids, e.g. single needle systems for hemofiltration or pheresis with a cassette forming partially or totally the flow circuit for the treating fluid, e.g. the dialysate fluid circuit or the treating gas circuit
    • A61M1/155Dialysis systems; Artificial kidneys; Blood oxygenators ; Reciprocating systems for treatment of body fluids, e.g. single needle systems for hemofiltration or pheresis with a cassette forming partially or totally the flow circuit for the treating fluid, e.g. the dialysate fluid circuit or the treating gas circuit with treatment-fluid pumping means or components thereof
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M1/00Suction or pumping devices for medical purposes; Devices for carrying-off, for treatment of, or for carrying-over, body-liquids; Drainage systems
    • A61M1/14Dialysis systems; Artificial kidneys; Blood oxygenators ; Reciprocating systems for treatment of body fluids, e.g. single needle systems for hemofiltration or pheresis
    • A61M1/15Dialysis systems; Artificial kidneys; Blood oxygenators ; Reciprocating systems for treatment of body fluids, e.g. single needle systems for hemofiltration or pheresis with a cassette forming partially or totally the flow circuit for the treating fluid, e.g. the dialysate fluid circuit or the treating gas circuit
    • A61M1/156Constructional details of the cassette, e.g. specific details on material or shape
    • A61M1/1561Constructional details of the cassette, e.g. specific details on material or shape at least one cassette surface or portion thereof being flexible, e.g. the cassette having a rigid base portion with preformed channels and being covered with a foil
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M1/00Suction or pumping devices for medical purposes; Devices for carrying-off, for treatment of, or for carrying-over, body-liquids; Drainage systems
    • A61M1/14Dialysis systems; Artificial kidneys; Blood oxygenators ; Reciprocating systems for treatment of body fluids, e.g. single needle systems for hemofiltration or pheresis
    • A61M1/15Dialysis systems; Artificial kidneys; Blood oxygenators ; Reciprocating systems for treatment of body fluids, e.g. single needle systems for hemofiltration or pheresis with a cassette forming partially or totally the flow circuit for the treating fluid, e.g. the dialysate fluid circuit or the treating gas circuit
    • A61M1/156Constructional details of the cassette, e.g. specific details on material or shape
    • A61M1/1565Details of valves
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M2205/00General characteristics of the apparatus
    • A61M2205/12General characteristics of the apparatus with interchangeable cassettes forming partially or totally the fluid circuit
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K2099/0073Fabrication methods specifically adapted for microvalves
    • F16K2099/0074Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K2099/0082Microvalves adapted for a particular use
    • F16K2099/0084Chemistry or biology, e.g. "lab-on-a-chip" technology
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K2099/0082Microvalves adapted for a particular use
    • F16K2099/0086Medical applications
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K2099/0082Microvalves adapted for a particular use
    • F16K2099/009Fluid power devices
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • F16K99/0034Operating means specially adapted for microvalves
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/8593Systems
    • Y10T137/87249Multiple inlet with multiple outlet
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/8593Systems
    • Y10T137/877With flow control means for branched passages
    • Y10T137/87885Sectional block structure

Abstract

A miniature electrofluidic module (10, 310) is disclosed, for receiving one or more fluids and for receiving an electrical connection. In accordance with one aspect of the invention, the module (10, 310) includes a substantially flat fluidic manifold layer (64 364) for fluid distribution, a substantially flat electrical layer (80, 380) including an electrical circuit (16, 316) and a substantially flat device layer (13) including micromachined devices (14). The devices (14) may include electrically actuated valves (14) for modulating the flow of fluids. In another aspect of the invention, an electrofluidic module (10, 310) is combined with an electrofluidic circuit board (196, 250). In a further aspect, an electrofluidic system such as a dialysate handling system is 14 disclosed, including a fluidic fixture (196) and an electrofluidic assembly (198) incorporating electrofluidic devices (14). In a still further aspect of the invention, a method is disclosed for interfacing micromachined devices (14) to electrical and fluidic interfaces on a fixture (196, 250) including packaging the devices (14) into a module (10, 310) and providing electrical and fluidic interfaces between the module (10, 310) and the fixture (196, 250).
CA002214510A 1995-03-14 1996-01-26 Electrofluidic standard module and custom circuit board assembly Expired - Fee Related CA2214510C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/404,301 US5640995A (en) 1995-03-14 1995-03-14 Electrofluidic standard module and custom circuit board assembly
US08/404,301 1995-03-14
PCT/US1996/001246 WO1996028664A1 (en) 1995-03-14 1996-01-26 Electrofluidic standard module and custom circuit board assembly

Publications (2)

Publication Number Publication Date
CA2214510A1 true CA2214510A1 (en) 1996-09-19
CA2214510C CA2214510C (en) 2004-06-08

Family

ID=23599061

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002214510A Expired - Fee Related CA2214510C (en) 1995-03-14 1996-01-26 Electrofluidic standard module and custom circuit board assembly

Country Status (6)

Country Link
US (1) US5640995A (en)
EP (1) EP0821766B1 (en)
JP (1) JP4340926B2 (en)
CA (1) CA2214510C (en)
DE (1) DE69627844T2 (en)
WO (1) WO1996028664A1 (en)

Families Citing this family (153)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6230501B1 (en) 1994-04-14 2001-05-15 Promxd Technology, Inc. Ergonomic systems and methods providing intelligent adaptive surfaces and temperature control
US5897553A (en) * 1995-11-02 1999-04-27 Medtronic, Inc. Ball point fluid-assisted electrocautery device
US5964239A (en) * 1996-05-23 1999-10-12 Hewlett-Packard Company Housing assembly for micromachined fluid handling structure
DE19628974C1 (en) * 1996-07-18 1997-11-20 Leica Mikroskopie & Syst Device for vibration isolation of object wrt. a base
DE19631693A1 (en) * 1996-08-06 1998-02-12 Gaswaerme Inst E V Valve arrangement
DE19637822C1 (en) * 1996-09-17 1998-03-26 Deutsch Zentr Luft & Raumfahrt Micromechanical tool
US5971355A (en) * 1996-11-27 1999-10-26 Xerox Corporation Microdevice valve structures to fluid control
US6123316A (en) * 1996-11-27 2000-09-26 Xerox Corporation Conduit system for a valve array
US6152175A (en) * 1997-06-06 2000-11-28 Ckd Corporation Process gas supply unit
IT1293021B1 (en) * 1997-07-10 1999-02-11 Sme Elettronica Spa SEMICONDUCTOR POWER MODULE.
US6076392A (en) * 1997-08-18 2000-06-20 Metasensors, Inc. Method and apparatus for real time gas analysis
US6102068A (en) * 1997-09-23 2000-08-15 Hewlett-Packard Company Selector valve assembly
DE19746585A1 (en) * 1997-10-22 1999-04-29 Merck Patent Gmbh Coupling for micro components with parallel plates
US7497994B2 (en) * 1998-02-24 2009-03-03 Khushroo Gandhi Microfluidic devices and systems incorporating cover layers
US6251343B1 (en) * 1998-02-24 2001-06-26 Caliper Technologies Corp. Microfluidic devices and systems incorporating cover layers
DE19816283A1 (en) * 1998-04-11 1999-10-14 Festo Ag & Co Quantity amplifier device for fluid flows
KR100642025B1 (en) 1998-05-08 2006-11-06 훼스토 악티엔 게젤샤프트 운트 코 A microvalve array
JP2002538431A (en) 1999-02-25 2002-11-12 メタセンサーズ インコーポレイテッド Real-time fluid analysis device and method
DE19909069C2 (en) * 1999-03-02 2001-08-30 Hahn Schickard Ges Micro valve arrangement
AU4099300A (en) * 1999-03-15 2000-10-04 Gesim Gesellschaft Fur Silizium-Mikrosysteme Mbh Manifold
DE19921660A1 (en) * 1999-05-11 2000-11-30 Festo Ag & Co Micro valve assembly has micro valve fixed on housing by valve support which defines fluid duct system for valve and uncouples micro valve from mechanical and thermal influences of housing
DE19921659C2 (en) * 1999-05-11 2002-03-07 Festo Ag & Co Micro-valve arrangement
US6495104B1 (en) * 1999-08-19 2002-12-17 Caliper Technologies Corp. Indicator components for microfluidic systems
US7264617B2 (en) * 2000-02-29 2007-09-04 Alex Freeman Integrally manufactured micro-electrofluidic cables
US6698798B2 (en) 2000-04-13 2004-03-02 California Institute Of Technology Micromachined rubber O-ring microfluidic couplers
US6561208B1 (en) 2000-04-14 2003-05-13 Nanostream, Inc. Fluidic impedances in microfluidic system
US6659982B2 (en) 2000-05-08 2003-12-09 Sterling Medivations, Inc. Micro infusion drug delivery device
US6629949B1 (en) 2000-05-08 2003-10-07 Sterling Medivations, Inc. Micro infusion drug delivery device
US20050277887A1 (en) * 2000-05-08 2005-12-15 Joel Douglas Micro infusion drug delivery device
GB0011575D0 (en) 2000-05-12 2000-07-05 Central Research Lab Ltd An adaptor for receiving a fluidic device
US20010042712A1 (en) * 2000-05-24 2001-11-22 Battrell C. Frederick Microfluidic concentration gradient loop
US6632400B1 (en) * 2000-06-22 2003-10-14 Agilent Technologies, Inc. Integrated microfluidic and electronic components
JP2002144300A (en) * 2000-07-27 2002-05-21 Toshiba Tec Corp Pipe joint, method of manufacturing the same, and fluid device using pipe joint
CA2415055A1 (en) * 2000-08-03 2002-02-14 Caliper Technologies Corporation Methods and devices for high throughput fluid delivery
DE10038288C2 (en) * 2000-08-05 2002-11-14 Festo Ag & Co Electro-fluidic control device
US6890093B2 (en) 2000-08-07 2005-05-10 Nanostream, Inc. Multi-stream microfludic mixers
AU2001281076A1 (en) * 2000-08-07 2002-02-18 Nanostream, Inc. Fluidic mixer in microfluidic system
US6581640B1 (en) * 2000-08-16 2003-06-24 Kelsey-Hayes Company Laminated manifold for microvalve
US6827095B2 (en) * 2000-10-12 2004-12-07 Nanostream, Inc. Modular microfluidic systems
US7017792B2 (en) * 2001-02-02 2006-03-28 Mitsubishi Heavy Industries, Ltd. Integrated piping plate, machining method for same, machining apparatus for same, and machining equipment for same
US6548895B1 (en) 2001-02-21 2003-04-15 Sandia Corporation Packaging of electro-microfluidic devices
US6443179B1 (en) 2001-02-21 2002-09-03 Sandia Corporation Packaging of electro-microfluidic devices
US6802342B2 (en) 2001-04-06 2004-10-12 Fluidigm Corporation Microfabricated fluidic circuit elements and applications
EP1679121A3 (en) * 2001-04-06 2006-07-26 Fluidigm Corporation Microfabricated fluidic circuit elements and applications
US6811695B2 (en) * 2001-06-07 2004-11-02 Nanostream, Inc. Microfluidic filter
US6897557B2 (en) 2001-06-19 2005-05-24 The Regents Of The University Of California Integrated electrical connector
US6490960B1 (en) * 2001-07-11 2002-12-10 Xerox Corporation Muscle-emulating PC board actuator
DE20115733U1 (en) 2001-09-25 2001-12-20 Festo Ag & Co Valve device
JP4041961B2 (en) * 2001-09-26 2008-02-06 ソニー株式会社 FUEL CELL, ELECTRIC DEVICE AND FUEL CELL MOUNTING METHOD
US7258681B2 (en) * 2001-10-04 2007-08-21 Scimed Life Systems, Inc. Angiographic fluid control system
US7172572B2 (en) 2001-10-04 2007-02-06 Boston Scientific Scimed, Inc. Manifold system for a medical device
US6918893B2 (en) 2001-10-04 2005-07-19 Scimed Life Systems, Inc. Multiple port fluid control valves
US6877892B2 (en) * 2002-01-11 2005-04-12 Nanostream, Inc. Multi-stream microfluidic aperture mixers
DE10224750A1 (en) 2002-06-04 2003-12-24 Fresenius Medical Care De Gmbh Device for the treatment of a medical fluid
US20040089357A1 (en) * 2002-06-21 2004-05-13 Christopher Dube Integrated electrofluidic system and method
WO2004009158A2 (en) 2002-07-19 2004-01-29 Baxter International Inc. Systems and methods for performing peritoneal dialysis
US7238164B2 (en) 2002-07-19 2007-07-03 Baxter International Inc. Systems, methods and apparatuses for pumping cassette-based therapies
JP3824160B2 (en) * 2002-08-28 2006-09-20 株式会社島津製作所 High-speed liquid chromatograph mixer
US9956377B2 (en) 2002-09-20 2018-05-01 Angiodynamics, Inc. Method and apparatus for intra-aortic substance delivery to a branch vessel
US20040112593A1 (en) * 2002-12-17 2004-06-17 Mcgregor Ronald W. Hydraulic circuit construction in downhole tools
US7011793B2 (en) * 2003-05-15 2006-03-14 Kionix, Inc. Reconfigurable modular microfluidic system and method of fabrication
US6972955B2 (en) * 2003-09-25 2005-12-06 Harris Corporation Electro-fluidic device and interconnect and related methods
NL1024486C2 (en) * 2003-10-08 2005-04-11 Lionix B V Coupling a component of a module to a component of a motherboard comprises using rigid coupling elements with passages for the exchange of signals between the two components
DE102004062923A1 (en) * 2004-12-28 2006-07-06 Hirschmann Laborgeräte GmbH & Co. KG Device for conveying fluids, method for producing the same and pipette with such a device
US20060195064A1 (en) * 2005-02-28 2006-08-31 Fresenius Medical Care Holdings, Inc. Portable apparatus for peritoneal dialysis therapy
US7935074B2 (en) 2005-02-28 2011-05-03 Fresenius Medical Care Holdings, Inc. Cassette system for peritoneal dialysis machine
US7320338B2 (en) * 2005-06-03 2008-01-22 Honeywell International Inc. Microvalve package assembly
US8197231B2 (en) 2005-07-13 2012-06-12 Purity Solutions Llc Diaphragm pump and related methods
DE102005045393B4 (en) * 2005-09-23 2017-01-05 Drägerwerk AG & Co. KGaA Method for dosing solutions
US7059351B1 (en) * 2005-12-05 2006-06-13 National Taiwan University Surface-tension-guided liquid transportation device
NL1031465C2 (en) * 2006-03-30 2007-10-03 C2V B V Method for constructing a device with fluidic and electrical functions.
CN101505872B (en) * 2006-06-23 2011-12-28 意法半导体股份有限公司 Assembly of a microfluidic device for analysis of biological material
CA2661485A1 (en) * 2006-08-15 2008-10-23 The Government Of The United States Of America, As Represented By The Se Cretary Of The Navy A method and apparatus for attaching a fluid cell to a planar substrate
US8926550B2 (en) * 2006-08-31 2015-01-06 Fresenius Medical Care Holdings, Inc. Data communication system for peritoneal dialysis machine
US8870811B2 (en) * 2006-08-31 2014-10-28 Fresenius Medical Care Holdings, Inc. Peritoneal dialysis systems and related methods
KR100851980B1 (en) * 2006-09-05 2008-08-12 삼성전자주식회사 Centrifugal force based microfluidic device having heat-activative unit, microfluidic system comprinsing the same and method for driving the system
US8491184B2 (en) 2007-02-27 2013-07-23 Deka Products Limited Partnership Sensor apparatus systems, devices and methods
US8366655B2 (en) 2007-02-27 2013-02-05 Deka Products Limited Partnership Peritoneal dialysis sensor apparatus systems, devices and methods
CN101778646B (en) * 2007-05-29 2013-01-30 弗雷塞尼斯医疗保健控股公司 Solutions, dialysates, and related methods
US7909795B2 (en) * 2007-07-05 2011-03-22 Baxter International Inc. Dialysis system having disposable cassette and interface therefore
US8715235B2 (en) * 2007-07-05 2014-05-06 Baxter International Inc. Dialysis system having disposable cassette and heated cassette interface
US8206025B2 (en) * 2007-08-07 2012-06-26 International Business Machines Corporation Microfluid mixer, methods of use and methods of manufacture thereof
US7892197B2 (en) * 2007-09-19 2011-02-22 Fresenius Medical Care Holdings, Inc. Automatic prime of an extracorporeal blood circuit
JP2009089887A (en) * 2007-10-09 2009-04-30 Nikkiso Co Ltd Blood purification apparatus
US8114276B2 (en) * 2007-10-24 2012-02-14 Baxter International Inc. Personal hemodialysis system
AU2013209331B2 (en) * 2007-10-24 2014-11-20 Baxter Healthcare Sa Hemodialysis systems and methods for same
US7905853B2 (en) 2007-10-30 2011-03-15 Baxter International Inc. Dialysis system having integrated pneumatic manifold
US11833281B2 (en) 2008-01-23 2023-12-05 Deka Products Limited Partnership Pump cassette and methods for use in medical treatment system using a plurality of fluid lines
CA2712945C (en) 2008-01-23 2017-06-06 Deka Products Limited Partnership Pump cassette and methods for use in medical treatment system using a plurality of fluid lines
US8057679B2 (en) 2008-07-09 2011-11-15 Baxter International Inc. Dialysis system having trending and alert generation
DE102008033864A1 (en) * 2008-07-19 2010-02-25 Festo Ag & Co. Kg Fluid channel arrangement i.e. channel piece, for supplying and guiding compressed air to electrical or electronic elements, has base body provided with connecting region that is fixed at connecting points of carrier plate
US8192401B2 (en) 2009-03-20 2012-06-05 Fresenius Medical Care Holdings, Inc. Medical fluid pump systems and related components and methods
CA2767668C (en) 2009-07-15 2017-03-07 Fresenius Medical Care Holdings, Inc. Medical fluid cassettes and related systems and methods
US8720913B2 (en) 2009-08-11 2014-05-13 Fresenius Medical Care Holdings, Inc. Portable peritoneal dialysis carts and related systems
US9125305B2 (en) * 2010-03-17 2015-09-01 Delta Design, Inc. Devices with pneumatic, hydraulic and electrical components
EP3279703B2 (en) 2010-07-07 2022-06-29 DEKA Products Limited Partnership Medical treatment system and methods using a plurality of fluid lines
JP5467194B2 (en) * 2010-07-30 2014-04-09 Smc株式会社 Integrated manifold valve for mounting multiple valves
DE102010053973A1 (en) 2010-12-09 2012-06-14 Fresenius Medical Care Deutschland Gmbh Medical device with a heater
EP2654825B1 (en) 2010-12-20 2017-08-02 Fresenius Medical Care Holdings, Inc. Medical fluid cassettes and related systems and methods
GB2488171B (en) * 2011-02-21 2013-10-16 Ion Science Ltd Pneumatic manifold
US9624915B2 (en) 2011-03-09 2017-04-18 Fresenius Medical Care Holdings, Inc. Medical fluid delivery sets and related systems and methods
EP3006059B1 (en) 2011-04-21 2017-09-27 Fresenius Medical Care Holdings, Inc. Medical fluid pumping systems and related devices and methods
US8973613B2 (en) 2011-04-27 2015-03-10 Google Inc. Electrorheological valve
WO2012162515A2 (en) 2011-05-24 2012-11-29 Deka Products Limited Partnership Hemodial ysis system
US9186449B2 (en) 2011-11-01 2015-11-17 Fresenius Medical Care Holdings, Inc. Dialysis machine support assemblies and related systems and methods
US9004881B2 (en) 2012-04-20 2015-04-14 Simmons Development, Llc Modular fluid-driven diaphragm pump and related methods
US9610392B2 (en) 2012-06-08 2017-04-04 Fresenius Medical Care Holdings, Inc. Medical fluid cassettes and related systems and methods
US9500188B2 (en) 2012-06-11 2016-11-22 Fresenius Medical Care Holdings, Inc. Medical fluid cassettes and related systems and methods
CN102734278B (en) * 2012-07-19 2014-10-15 北京理工大学 Hierarchical design method for hydraulic control module of electrohydraulic control system
EP2897673B1 (en) 2012-09-24 2020-01-22 Medline Industries, Inc. Power injector device and method of use
US11369739B2 (en) 2013-01-21 2022-06-28 Medline Industries, Lp Method to provide injection system parameters for injecting fluid into patient
US9389208B2 (en) * 2013-01-25 2016-07-12 Rosemount Analytical Inc. Hermetic manifold for analytical instruments
US9561323B2 (en) 2013-03-14 2017-02-07 Fresenius Medical Care Holdings, Inc. Medical fluid cassette leak detection methods and devices
US9713664B2 (en) 2013-03-15 2017-07-25 Fresenius Medical Care Holdings, Inc. Nuclear magnetic resonance module for a dialysis machine
US9433718B2 (en) 2013-03-15 2016-09-06 Fresenius Medical Care Holdings, Inc. Medical fluid system including radio frequency (RF) device within a magnetic assembly, and fluid cartridge body with one of multiple passageways disposed within the RF device, and specially configured cartridge gap accepting a portion of said RF device
US10006557B2 (en) 2013-03-15 2018-06-26 Asco, L.P. Valve manifold circuit board with serial communication and control circuit line
US9566377B2 (en) 2013-03-15 2017-02-14 Fresenius Medical Care Holdings, Inc. Medical fluid sensing and concentration determination in a fluid cartridge with multiple passageways, using a radio frequency device situated within a magnetic field
US9772386B2 (en) 2013-03-15 2017-09-26 Fresenius Medical Care Holdings, Inc. Dialysis system with sample concentration determination device using magnet and radio frequency coil assemblies
US9597439B2 (en) 2013-03-15 2017-03-21 Fresenius Medical Care Holdings, Inc. Medical fluid sensing and concentration determination using radio frequency energy and a magnetic field
US9856985B2 (en) 2013-03-15 2018-01-02 Numatics, Incorporated Valve manifold circuit board with serial communication circuit line
US9441753B2 (en) 2013-04-30 2016-09-13 Boston Dynamics Printed circuit board electrorheological fluid valve
US10613553B2 (en) 2013-07-09 2020-04-07 Deka Products Limited Partnership Modular valve apparatus and system
US10117985B2 (en) 2013-08-21 2018-11-06 Fresenius Medical Care Holdings, Inc. Determining a volume of medical fluid pumped into or out of a medical fluid cassette
US9528522B2 (en) 2013-11-26 2016-12-27 Beacon Technical Systems, Llc Test and monitoring system for a sump pump installation having a self-monitoring valve module for admitting water to the sump pit
US9528520B2 (en) 2013-11-26 2016-12-27 Beacon Technical Systems, Llc Test and monitoring system for a dual sump pump system
US9534593B2 (en) 2013-11-26 2017-01-03 Beacon Technical Systems, Llc Test and monitoring system for a sump pump installation operable from a remote location
US9525309B2 (en) 2013-11-26 2016-12-20 Beacon Technical Systems, Llc Battery-powered backup power system for a sump pump installation
US9528523B2 (en) 2013-11-26 2016-12-27 Beacon Technical Systems, Llc Test and monitoring system for a sump pump installation having a variable test cycle time out
US9404501B2 (en) 2013-11-26 2016-08-02 Beacon Technical Systems, Llc Sump pump test and monitoring system
US9534606B2 (en) 2013-11-26 2017-01-03 Beacon Technical Systems, Llc Test and monitoring system for a sump pump installation including trend analysis of pump performance
US9523366B2 (en) * 2013-11-26 2016-12-20 Beacon Technical Systems, Llc Test and monitoring system for a sump pump installation having a self-protecting valve assembly for admitting water to the sump container
US9528512B2 (en) 2013-11-26 2016-12-27 Beacon Technical Systems, Llc Test and monitoring system for a battery-powered DC pump installation
US9528873B2 (en) 2013-11-26 2016-12-27 Beacon Technical Systems, Llc Test and monitoring system for a sump pump installation having a self-monitoring liquid level sensing module
US10286135B2 (en) 2014-03-28 2019-05-14 Fresenius Medical Care Holdings, Inc. Measuring conductivity of a medical fluid
WO2015153486A1 (en) * 2014-03-31 2015-10-08 Multerra Bio, Inc. Low-cost packaging for fluidic and device co-integration
SG11201610049UA (en) 2014-06-05 2016-12-29 Deka Products Lp System for calculating a change in fluid volume in a pumping chamber
SG10201909109XA (en) * 2014-12-12 2019-11-28 Deka Products Lp Modular valve apparatus and system
CN116206744A (en) 2015-06-25 2023-06-02 甘布罗伦迪亚股份公司 Medical device systems and methods with distributed databases
AU2016335374A1 (en) * 2015-10-09 2018-04-26 Sysmex Corporation Specimen treatment chip, specimen treatment device, and specimen treatment method
US10208747B2 (en) 2016-02-09 2019-02-19 Beacon Technical Systems, Llc Trap for pump testing and monitoring systems
FR3058496B1 (en) * 2016-11-09 2019-09-06 Permaswage JUNCTION BODY, CONNECTION, HYDRAULIC SYSTEM FOR PASSING A FLUID BETWEEN TWO HYDRAULIC CIRCUITS, ASSEMBLY METHOD THEREFOR
AU2017381172A1 (en) 2016-12-21 2019-06-13 Gambro Lundia Ab Medical device system including information technology infrastructure having secure cluster domain supporting external domain
USD827588S1 (en) * 2016-12-27 2018-09-04 Sony Corporation Chip connector
GB201703233D0 (en) * 2017-02-28 2017-04-12 Ge Healthcare Bio Sciences Ab A modular bio-processing unit and a bio-processing system employing plural units
US11135345B2 (en) 2017-05-10 2021-10-05 Fresenius Medical Care Holdings, Inc. On demand dialysate mixing using concentrates
US11083865B2 (en) * 2017-05-30 2021-08-10 Inogen, Inc. Compact portable oxygen concentrator
SG11202009360WA (en) 2018-03-30 2020-10-29 Deka Products Lp Liquid pumping cassettes and associated pressure distribution manifold and related methods
DE102018112065A1 (en) * 2018-05-18 2019-11-21 Memetis Gmbh Valve with shape memory alloy actuator in flat geometry
CA3182480A1 (en) * 2018-07-10 2020-01-16 Precision Planting Llc Agricultural sampling system and related methods
US11504458B2 (en) 2018-10-17 2022-11-22 Fresenius Medical Care Holdings, Inc. Ultrasonic authentication for dialysis
KR20220039780A (en) 2019-07-26 2022-03-29 램 리써치 코포레이션 Non-elastomeric, non-polymeric, and non-metallic membrane valves for semiconductor processing equipment
AU2021282339B2 (en) * 2020-05-28 2024-02-29 Minnetronix Neuro, Inc. Filtering systems and filtering manifolds for use with filtering systems
US11932129B2 (en) * 2020-12-21 2024-03-19 Nimble Robotics, Inc. Mobile robot having pneumatic charging system

Family Cites Families (63)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3389305A (en) * 1966-08-01 1968-06-18 Gen Motors Corp Mounting and cooling apparatus for semiconductor devices
JPS46614Y1 (en) * 1966-09-14 1971-01-11
US3548849A (en) * 1966-12-15 1970-12-22 Ite Imperial Corp Fluidic circuit package
US3536875A (en) * 1967-10-17 1970-10-27 Westinghouse Air Brake Co Fluid pressure operated magnetic switch
US3547139A (en) * 1968-02-23 1970-12-15 Robert A Van Berkum Fluid logic pack
DE1917727C3 (en) * 1969-04-05 1974-08-01 Samson Apparatebau Ag, 6000 Frankfurt Line system for hydraulically or pneumatically operating switching, control or regulating devices
US3760844A (en) * 1971-07-19 1973-09-25 Westinghouse Air Brake Co Circuit module for fluid distribution
NL150557B (en) * 1971-09-15 1976-08-16 Samson Apparatebau Ag PIPING SYSTEM FOR REGULATING, CONTROL OR MEASURING EQUIPMENT OPERATING WITH GAS OR LIQUID PRESSURE AGENT.
US3766935A (en) * 1971-12-10 1973-10-23 Clippard Instr Labor Inc Valve with modular manifold body
FR2214075B1 (en) * 1973-01-17 1976-11-19 Festo Maschf Stoll G
US3786831A (en) * 1973-04-05 1974-01-22 Clippard Instr Labor Inc Valve with modular manifold body
US3845258A (en) * 1973-05-11 1974-10-29 J Bruels Pneumatic-electric switch apparatus with lock-out feature
US3990468A (en) * 1974-09-20 1976-11-09 The Aro Corporation Universal insert for fabrication of fluid logic elements
US4165139A (en) * 1977-03-22 1979-08-21 Robertshaw Controls Company Manifolding means and system for electrical and/or pneumatic control devices and method
US4093329A (en) * 1977-03-22 1978-06-06 Robertshaw Controls Company Manifolding means and system for electrical and/or pneumatic control devices and methods
US4095864A (en) * 1977-03-30 1978-06-20 Robertshaw Controls Company Modular manifolding means and system for electrical and/or pneumatic control devices and parts and methods
US4095863A (en) * 1977-03-30 1978-06-20 Robertshaw Controls Company Manifold means and system for electrical and/or pneumatic control devices and method
JPS55166163A (en) * 1979-06-13 1980-12-25 Citizen Watch Co Ltd Controller for anesthetic gas
US4458841A (en) * 1981-01-22 1984-07-10 Johnson Controls, Inc. Function control module for air treating systems
FR2504610A1 (en) * 1981-04-24 1982-10-29 Telemecanique Electrique ELECTRICAL DISTRIBUTION SYSTEM FOR PNEUMATIC CONTROL SIGNALS
US4507707A (en) * 1981-12-30 1985-03-26 Willis John G Electro-pneumatic assembly device
DE3238750C1 (en) * 1982-10-20 1988-03-03 Festo-Maschinenfabrik Gottlieb Stoll, 7300 Esslingen Circuit board
DE3427589A1 (en) * 1984-07-26 1986-02-06 Festo KG, 7300 Esslingen VALVE CARRIER
DE3431163A1 (en) * 1984-08-24 1986-03-06 Festo KG, 7300 Esslingen SWITCHING UNIT
DE8514741U1 (en) * 1985-05-18 1986-01-02 Steinbeisser, Georg, Dipl.-Ing., 8043 Unterföhring Skirting and pipe holders
US4629926A (en) * 1985-10-21 1986-12-16 Kiwi Coders Corporation Mounting for piezoelectric bender of fluid control device
US4778451A (en) * 1986-03-04 1988-10-18 Kamen Dean L Flow control system using boyle's law
US5088515A (en) * 1989-05-01 1992-02-18 Kamen Dean L Valve system with removable fluid interface
US4976162A (en) * 1987-09-03 1990-12-11 Kamen Dean L Enhanced pressure measurement flow control system
US4826482A (en) * 1986-03-04 1989-05-02 Kamen Dean L Enhanced pressure measurement flow control system
DE8614741U1 (en) * 1986-05-31 1987-10-01 Robert Bosch Gmbh, 7000 Stuttgart, De
US4821997A (en) * 1986-09-24 1989-04-18 The Board Of Trustees Of The Leland Stanford Junior University Integrated, microminiature electric-to-fluidic valve and pressure/flow regulator
JPH0313991Y2 (en) * 1986-12-29 1991-03-28
US4771204A (en) * 1987-07-30 1988-09-13 Kiwi Coders Corporation Sealing method and means for fluid control device
US5207642A (en) * 1987-08-07 1993-05-04 Baxter International Inc. Closed multi-fluid delivery system and method
GB8724066D0 (en) * 1987-10-14 1987-11-18 Kinetrol Ltd Actuator control means
DE3742830C2 (en) * 1987-12-17 1995-11-16 Teves Gmbh Alfred Valve block assembly
US5236665A (en) * 1988-10-20 1993-08-17 Baxter International Inc. Hollow fiber treatment apparatus and membrane oxygenator
US4869282A (en) * 1988-12-09 1989-09-26 Rosemount Inc. Micromachined valve with polyimide film diaphragm
US5234033A (en) * 1989-04-05 1993-08-10 Festo Kg Fluid power valve unit
DE3914031C2 (en) * 1989-04-28 1993-10-28 Deutsche Aerospace Micromechanical actuator
US5069419A (en) * 1989-06-23 1991-12-03 Ic Sensors Inc. Semiconductor microactuator
US5180623A (en) * 1989-12-27 1993-01-19 Honeywell Inc. Electronic microvalve apparatus and fabrication
FR2661214B1 (en) * 1990-04-19 1992-07-03 Snecma ELECTROHYDRAULIC CONNECTION PLATE FOR TURBOMACHINE REGULATOR.
US5144982A (en) * 1990-10-12 1992-09-08 Milliken Research Corporation Electro-pneumatic valve card assemblies
US5186713A (en) * 1990-11-01 1993-02-16 Baxter International Inc. Extracorporeal blood oxygenation system and method for providing hemoperfusion during transluminal balloon angioplasty procedures
DE4037353C1 (en) * 1990-11-20 1992-03-12 Mannesmann Ag, 4000 Duesseldorf, De
US5234608A (en) * 1990-12-11 1993-08-10 Baxter International Inc. Systems and methods for processing cellular rich suspensions
DE4041579A1 (en) * 1990-12-22 1992-06-25 Bosch Gmbh Robert MICRO VALVE
US5176359A (en) * 1991-05-20 1993-01-05 Photovac International, Inc. Fluid control valve arrangement
US5099884A (en) * 1991-05-24 1992-03-31 Ntn Technical Center (U.S.A.), Inc. Electrorheological fluid plate valve
DE69213340T2 (en) * 1991-05-30 1997-03-27 Hitachi Ltd Valve and its use in a device made of semiconductor material
JP3236057B2 (en) * 1992-04-03 2001-12-04 シャープ株式会社 Infusion device
US5271597A (en) * 1992-05-29 1993-12-21 Ic Sensors, Inc. Bimetallic diaphragm with split hinge for microactuator
DE4222637C2 (en) * 1992-07-10 1998-12-10 Festo Ag & Co Valve arrangement
US5328559A (en) * 1992-09-08 1994-07-12 Ic Sensors, Inc. Groove width trimming
US5338400A (en) * 1993-02-25 1994-08-16 Ic Sensors, Inc. Micromachining process for making perfect exterior corner in an etchable substrate
US5350357A (en) * 1993-03-03 1994-09-27 Deka Products Limited Partnership Peritoneal dialysis systems employing a liquid distribution and pumping cassette that emulates gravity flow
US5324422A (en) * 1993-03-03 1994-06-28 Baxter International Inc. User interface for automated peritoneal dialysis systems
US5325880A (en) * 1993-04-19 1994-07-05 Tini Alloy Company Shape memory alloy film actuated microvalve
US5417235A (en) * 1993-07-28 1995-05-23 Regents Of The University Of Michigan Integrated microvalve structures with monolithic microflow controller
US5329965A (en) * 1993-07-30 1994-07-19 The Perkin-Elmer Corporation Hybrid valving system for varying fluid flow rate
US5364364A (en) * 1993-08-04 1994-11-15 Ivac Corporation Automatic flow control valve system

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EP0821766B1 (en) 2003-05-02
DE69627844T2 (en) 2004-03-11

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