CA2224189A1 - Wavelet analysis for laser ultrasonic measurement of material properties - Google Patents

Wavelet analysis for laser ultrasonic measurement of material properties

Info

Publication number
CA2224189A1
CA2224189A1 CA002224189A CA2224189A CA2224189A1 CA 2224189 A1 CA2224189 A1 CA 2224189A1 CA 002224189 A CA002224189 A CA 002224189A CA 2224189 A CA2224189 A CA 2224189A CA 2224189 A1 CA2224189 A1 CA 2224189A1
Authority
CA
Canada
Prior art keywords
response signal
dispersive
material properties
ultrasonic measurement
wavelet analysis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002224189A
Other languages
French (fr)
Other versions
CA2224189C (en
Inventor
Petros A. Kotidis
Judith Reich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brown University Research Foundation Inc
Original Assignee
Textron Systems Corporation
Petros A. Kotidis
Judith Reich
Textron Systems Rhode Island (2001) Inc.
Textron Innovations Inc.
Brown University Research Foundation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Textron Systems Corporation, Petros A. Kotidis, Judith Reich, Textron Systems Rhode Island (2001) Inc., Textron Innovations Inc., Brown University Research Foundation filed Critical Textron Systems Corporation
Publication of CA2224189A1 publication Critical patent/CA2224189A1/en
Application granted granted Critical
Publication of CA2224189C publication Critical patent/CA2224189C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G01N29/46—Processing the detected response signal, e.g. electronic circuits specially adapted therefor by spectral analysis, e.g. Fourier analysis or wavelet analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/12—Analysing solids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G01N29/50—Processing the detected response signal, e.g. electronic circuits specially adapted therefor using auto-correlation techniques or cross-correlation techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G01N29/52—Processing the detected response signal, e.g. electronic circuits specially adapted therefor using inversion methods other that spectral analysis, e.g. conjugated gradient inversion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/26—Scanned objects
    • G01N2291/263—Surfaces
    • G01N2291/2634—Surfaces cylindrical from outside

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Signal Processing (AREA)
  • Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Acoustics & Sound (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

A laser ultrasonics technique (18) is used to characterize a composite dispersive response signal from a sample under analysis, such as a semiconductor wafer (16). Rather than measuring individual accoustic wave velocities at specific frequencies, an entire dispersive response signal (fig. 8) is analyzed. In a presently preferred embodiment of this invention the entire dispersive response signal is analyzed using a wavelet-based technique (figs. 4a, 4b), such as dispersive wavelet transform analysis technique.
CA002224189A 1996-04-18 1997-04-10 Wavelet analysis for laser ultrasonic measurement of material properties Expired - Fee Related CA2224189C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/634,286 1996-04-18
US08/634,286 US5724138A (en) 1996-04-18 1996-04-18 Wavelet analysis for laser ultrasonic measurement of material properties
PCT/US1997/005982 WO1997039308A1 (en) 1996-04-18 1997-04-10 Wavelet analysis for laser ultrasonic measurement of material properties

Publications (2)

Publication Number Publication Date
CA2224189A1 true CA2224189A1 (en) 1997-10-23
CA2224189C CA2224189C (en) 2001-06-05

Family

ID=24543173

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002224189A Expired - Fee Related CA2224189C (en) 1996-04-18 1997-04-10 Wavelet analysis for laser ultrasonic measurement of material properties

Country Status (7)

Country Link
US (1) US5724138A (en)
EP (1) EP0834054A1 (en)
JP (1) JPH11508694A (en)
KR (1) KR19990022979A (en)
AU (1) AU2454297A (en)
CA (1) CA2224189C (en)
WO (1) WO1997039308A1 (en)

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US6715354B2 (en) 1998-02-24 2004-04-06 Massachusetts Institute Of Technology Flaw detection system using acoustic doppler effect
US6393384B1 (en) * 1998-04-10 2002-05-21 Textron Systems Corporation Apparatus and method for remote ultrasonic determination of thin material properties using signal correlation
US7612890B2 (en) * 1998-06-30 2009-11-03 Lockheed Martin Corporation System and method for controlling wafer temperature
US6633384B1 (en) 1998-06-30 2003-10-14 Lockheed Martin Corporation Method and apparatus for ultrasonic laser testing
US7545509B2 (en) * 1998-06-30 2009-06-09 Lockheed Martin Corporation System and method for online control of paper elasticity and thickness
US7342665B2 (en) * 1998-06-30 2008-03-11 Drake Jr Thomas E System and method for control of paint thickness
US7561281B2 (en) * 1998-06-30 2009-07-14 Lockheed Martin Corporation System and method for controlling tube thickness
US6411914B1 (en) * 1999-11-29 2002-06-25 Goodrich Corporation System and method for coherent signal detection using wavelet functions
US6728515B1 (en) 2000-02-16 2004-04-27 Massachusetts Institute Of Technology Tuned wave phased array
KR20000036350A (en) * 2000-02-19 2000-07-05 신상훈 diagnosing method of stenosis of carotid arteries used ultrasonic
US6360609B1 (en) 2000-02-23 2002-03-26 Massachusetts Institute Of Technology Method and system for interpreting and utilizing multimode dispersive acoustic guided waves
US6419359B2 (en) 2000-04-11 2002-07-16 James Alan Edwards Surface design method
US6587213B1 (en) 2000-11-15 2003-07-01 The United States Of America As Represented By The Secretary Of The Army Nondestruction coating adhesion evaluation using surface ultrasonic waves and wavelet analysis
US6833554B2 (en) * 2000-11-21 2004-12-21 Massachusetts Institute Of Technology Laser-induced defect detection system and method
KR100497794B1 (en) * 2002-07-26 2005-06-28 김희찬 Ultrasonic inspection method and apparatus using wavelet ultrasonic wave
US7653255B2 (en) 2004-06-02 2010-01-26 Adobe Systems Incorporated Image region of interest encoding
CA2510972C (en) * 2005-06-28 2013-05-14 Nimtech Inc. Advanced ultrasonic interferometer and method of non-linear classification and indentification of matter using same
WO2007130313A2 (en) * 2006-05-02 2007-11-15 Telesis Technologies, Inc. Laser safety system
KR100933042B1 (en) * 2007-07-02 2009-12-21 (주)나노티에스 Touch coordinate recognition method and touch screen device for performing the same
US8297122B2 (en) * 2009-06-19 2012-10-30 Georgia Tech Research Corporation Methods and systems for detecting defects in welded structures
US8256296B2 (en) * 2009-08-03 2012-09-04 Georgia Tech Research Corporation Methods and systems for detecting defects in welded structures utilizing pattern matching
US8146429B2 (en) * 2009-08-03 2012-04-03 Georgia Tech Research Corporation Methods and systems for classifying the type and severity of defects in welds
WO2011069054A2 (en) * 2009-12-04 2011-06-09 Massachusetts Institute Of Technology Phonon-enhanced crystal growth and lattice healing
WO2011074061A1 (en) * 2009-12-14 2011-06-23 キヤノン株式会社 Ultrasonic control device and recording material discrimination device
JP5249975B2 (en) * 2010-02-26 2013-07-31 三菱重工業株式会社 Laser ultrasonic flaw detector
CN102175775B (en) * 2011-01-14 2013-05-08 河南工业大学 Food quality testing system and method based on laser ultrasound erosion mechanism
US10173262B2 (en) 2016-02-04 2019-01-08 The Aerospace Corporation Systems and methods for monitoring temperature using acoustic waves during processing of a material
US10160061B2 (en) * 2016-08-15 2018-12-25 The Aerospace Corporation Systems and methods for modifying acoustic waves based on selective heating

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US3694088A (en) * 1971-01-25 1972-09-26 Bell Telephone Labor Inc Wavefront measurement
US4372163A (en) * 1981-02-03 1983-02-08 Rockwell International Corporation Acoustic measurement of near surface property gradients
US4521118A (en) * 1982-07-26 1985-06-04 Therma-Wave, Inc. Method for detection of thermal waves with a laser probe
DE3242284A1 (en) * 1982-11-16 1984-05-17 Philips Patentverwaltung Gmbh, 2000 Hamburg METHOD AND ARRANGEMENT FOR DETERMINING THE RUNTIME OF AN ULTRASONIC PULSE
US4541280A (en) * 1982-12-28 1985-09-17 Canadian Patents & Development Ltd. Efficient laser generation of surface acoustic waves
US4639669A (en) * 1983-09-26 1987-01-27 Lockheed Missiles & Space Company, Inc. Pulsed electromagnetic nondestructive test method for determining volume density of graphite fibers in a graphite-epoxy composite material
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Also Published As

Publication number Publication date
EP0834054A1 (en) 1998-04-08
AU2454297A (en) 1997-11-07
KR19990022979A (en) 1999-03-25
CA2224189C (en) 2001-06-05
JPH11508694A (en) 1999-07-27
WO1997039308A1 (en) 1997-10-23
US5724138A (en) 1998-03-03

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