CA2232973A1 - Flip chip underfill system and method - Google Patents

Flip chip underfill system and method

Info

Publication number
CA2232973A1
CA2232973A1 CA002232973A CA2232973A CA2232973A1 CA 2232973 A1 CA2232973 A1 CA 2232973A1 CA 002232973 A CA002232973 A CA 002232973A CA 2232973 A CA2232973 A CA 2232973A CA 2232973 A1 CA2232973 A1 CA 2232973A1
Authority
CA
Canada
Prior art keywords
dispensing element
viscous material
substrate
dispensing
positioner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002232973A
Other languages
French (fr)
Other versions
CA2232973C (en
Inventor
Carlos E. Bouras
Duong T. La
Andre S. Gamelin
Alan R. Lewis
Mark S. Meier
Alec J. Babiarz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nordson Corp
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to CA002489818A priority Critical patent/CA2489818C/en
Publication of CA2232973A1 publication Critical patent/CA2232973A1/en
Application granted granted Critical
Publication of CA2232973C publication Critical patent/CA2232973C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1042—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material provided with means for heating or cooling the liquid or other fluent material in the supplying means upstream of the applying apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1007—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material
    • B05C11/101—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material responsive to weight of a container for liquid or other fluent material; responsive to level of liquid or other fluent material in a container
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1007—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material
    • B05C11/1013—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material responsive to flow or pressure of liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1015—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1015—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target
    • B05C11/1018—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target responsive to distance of target
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1015—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target
    • B05C11/1021—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target responsive to presence or shape of target
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0225—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector

Abstract

A system (30) for dispensing a viscous material onto a substrate (16) which includes a dispensing element (22), a viscous material reservoir (20) and a metering device (25) coupled between the reservoir (20) and the dispensing element (22) for metering a variable amount of a viscous material through the dispensing element (22). The dispensing element (22) and metering device (25) can be moved by a positioner (32) along a predetermined pattern adjacent a surface of a substrate (16). A weigh scale (52) located adjacent the substrate (16) receives a metered amount of the viscous material and produces signals representative of a variable weight of the material dispensed during a predetermined time interval. A controller (40) adjusts a speed of movement of the positioner (32) along the predetermined pattern to cause the dispensing element (22) to dispense a desired amount of material based on a calculated flow rate. Alternatively, the controller (40) adjusts a rate of delivery based on the calculated flow rate.
CA002232973A 1995-10-13 1996-10-08 Flip chip underfill system and method Expired - Lifetime CA2232973C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA002489818A CA2489818C (en) 1995-10-13 1996-10-08 A system for dispensing a viscous material onto a substrate

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US54305295A 1995-10-13 1995-10-13
US08/543,052 1995-10-13
PCT/US1996/016153 WO1997013586A1 (en) 1995-10-13 1996-10-08 Flip chip underfill system and method

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CA002489818A Division CA2489818C (en) 1995-10-13 1996-10-08 A system for dispensing a viscous material onto a substrate

Publications (2)

Publication Number Publication Date
CA2232973A1 true CA2232973A1 (en) 1997-04-17
CA2232973C CA2232973C (en) 2006-01-10

Family

ID=24166389

Family Applications (2)

Application Number Title Priority Date Filing Date
CA002232973A Expired - Lifetime CA2232973C (en) 1995-10-13 1996-10-08 Flip chip underfill system and method
CA002489818A Expired - Lifetime CA2489818C (en) 1995-10-13 1996-10-08 A system for dispensing a viscous material onto a substrate

Family Applications After (1)

Application Number Title Priority Date Filing Date
CA002489818A Expired - Lifetime CA2489818C (en) 1995-10-13 1996-10-08 A system for dispensing a viscous material onto a substrate

Country Status (7)

Country Link
US (3) US5906682A (en)
EP (2) EP1256387B1 (en)
JP (2) JP3280385B2 (en)
AU (1) AU7262496A (en)
CA (2) CA2232973C (en)
DE (2) DE69631428T2 (en)
WO (1) WO1997013586A1 (en)

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US6541304B1 (en) 2003-04-01
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AU7262496A (en) 1997-04-30
DE69637838D1 (en) 2009-04-02
CA2489818A1 (en) 1997-04-17
EP1256387A3 (en) 2006-03-22
EP1256387B1 (en) 2009-02-18
EP0854759B1 (en) 2004-01-28
EP0854759A1 (en) 1998-07-29
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DE69631428T2 (en) 2004-12-02
CA2232973C (en) 2006-01-10

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