CA2289860C - Solid bi-layer structures for use with high viscosity inks in acoustic ink printing and methods of fabrication - Google Patents
Solid bi-layer structures for use with high viscosity inks in acoustic ink printing and methods of fabrication Download PDFInfo
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- CA2289860C CA2289860C CA002289860A CA2289860A CA2289860C CA 2289860 C CA2289860 C CA 2289860C CA 002289860 A CA002289860 A CA 002289860A CA 2289860 A CA2289860 A CA 2289860A CA 2289860 C CA2289860 C CA 2289860C
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- acoustic
- substrate
- ink
- mold
- pedestal
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14008—Structure of acoustic ink jet print heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14322—Print head without nozzle
Abstract
Low acoustic solid wave attenuation structures are formed with an electroformed nickel mold, and are incorporated within acoustic ink emitters, between the focusing lens and surface of an ink layer. The structures have characteristics of low attenuation of acoustic waves to increase the efficiency of acoustic wave transmission within the acoustic ink emitter.
Using the described structures, acoustic ink printers can accurately emit materials having high viscosity, including hot melt inks.
Using the described structures, acoustic ink printers can accurately emit materials having high viscosity, including hot melt inks.
Description
I
SOLID BI-LAYER STRUCTURES
FOR USE WITH HIGH VISCOSITY INKS IN
ACOUSTIC INK PRINTING AND METHODS OF FABRICATION
BACKGROUND OF THE INVENTION
This invention relates to acoustic ink printing and, more particularly, to acoustic ink printing with hot melt inks.
Acoustic ink printing is a promising direct marking technology because it does not require the nozzles of the small ejection orifices which have been a major cause of the reliability and pixel placement accuracy problems that conventional drop on demand and' continuous stream ink jet printers have experienced.
It has been shown that acoustic ink printers that have print heads comprising acoustically illuminated spherical or Fresnel focusing lenses can print precisely positioned picture elements (pixels) at resolutions which are sufficient for high quality printing of complex images. See, for example, the co-pending and commonly assigned U.S. Patent No. 4,751,529 on uMicrolenses for Acoustic Printing", and U.S. Patent No. 4,751,530 on "Acoustic Lens Arrays for Ink Printing" to Elrod et al.
It also has been found that the size of the individual pixels printed by such a printer can be varied over a significant range during operation.
Although acoustic lens-type droplet emitters currently are favored, there are other types of droplet emitters which may be utilized for acoustic ink printing, including (1) piezoelectric shell transducers or an acoustic lens-type drop emitter, such as described in Lovelady et al U.S. Pat. No. 4,308,547, which issued Dec. 29, 1981 on a "Liquid Drop Emitter," and (2) interdigitated transducer (IDT's), such as described in commonly assigned U.S.
Patent No. 4,697,195 on "Nozzleless Liquid Droplet Ejectors", to Quate et al. Furthermore, acoustic ink printing technology is compatible with various print head configurations; including (1) single emitter embodiments for raster scan printing, (2) matrix configured arrays for matrix printing, and (3) several different types of page width arrays, ranging from (I) single row, sparse arrays for hybrid forms of parallel/serial printing, to (ii) multiple row staggered arrays with individual emitters for each of the pixel positions or addresses within a page width address field (i.e., single emitter/pixel/line) for ordinary line printing.
For performing acoustic ink printing with any of the aforementioned droplet emitters, each of the emitters launches a converging acoustic beam into a pool of ink, with the angular convergence of the beam being selected so that it comes to focus at or near the free surface (i.e., the liquid/air interface) of the pool. Moreover, controls are provided for modulating the radiation pressure which each beam exerts against the free surface of the ink. That permits the radiation pressure of each beam to make brief, controlled excursions to a sufficiently high pressure level to overcome the restraining force of surface tension, whereby individual droplets of ink are emitted from the free surface of the 1:\mss\xer2134.app 2 ink on command, with sufficient velocity to deposit them on a nearby recording medium.
Hot melt inks have the known advantages of being relatively clean and economical to handle while they are in a solid state and of being easy to liquify in situ for the printing of high quality images . Another advantage lies in that there is no need to dry paper (as in water-based inks) and no bleeding of different colors.
These advantages are of substantial value for acoustic ink printing, especially if provision is made for realizing them without significantly complicating the acoustic ink printing process or materially degrading the quality of the images that are printed.
A drawback of using hot melt inks in acoustic ink printing is that such inks have a relatively high viscosity. Particularly, the inks can be in the form of, but are not limited to, a solid material at room temperature and are liquidified at elevated temperatures to achieve a viscosity of approximately 5-lOcp. When hot melt inks are used to fill in the complete focal zone of an acoustic lens, as is the case with a standard acoustic ink printer, significant acoustic attenuation occurs in the focal path. This will, therefore, require that the input power to a printer be raised to a much higher level to overcome the attenuation, which in turn results in increased power consumption and stress on the system. When too much of an acoustic wave is attenuated, it is not possible to emit ink drops, _or undesirable undeformed, or misdirected ink drops with very low velocity are generated.
1:\msa\xer2134.app FIGURE 1 provides a view of an exemplary acoustic ink printing element 10 to which the present invention may be applied. Of course, other configurations may also have the present invention applied thereto.
As shown, the element 10 includes a glass layer 12 having an _ _ electrode layer 14 disposed thereon. A piezoelectric layer 16, preferably formed of zinc oxide, is positioned on the electrode layer 14 and an electrode 18 is disposed on the piezoelectric layer 16. Electrode layer 14 and electrode 18 are connected through a surface wiring pattern representatively shown at 20 and cables 22 to a radio frequency (RF) power source 24 which generates power that is transferred to the electrodes 14 and 18. On a side opposite the electrode layer 14, a lens 26, preferably a concentric Fresnel lens, is formed. Spaced from the lens 26 is a liquid level control plate 28, having an aperture 30 formed therein. Ink 32 is retained between the liquid level control plate 28, having an aperture 30 formed therein. Ink 32 is retained between the liquid level control plate 28 and the glass layer 12, and the aperture 30 is aligned with the lens 26 to facilitate emission of a droplet 34 from ink surface 36. Ink surface 36 is, of course, exposed by the aperture 30.
The lens 26, the electrode layer 14, the piezoelectric layer 1:\mas\xer2134.app 4 16, and the electrode 18 are formed on the glass layer 12 through known photolithographic techniques. The liquid level control plate 28 is subsequently positioned to be spaced from the glass layer 12.
The ink 32 is fed into the space between the plate 28 and the glass layer 12 from an ink supply (not shown).
A droplet emitter is disclosed in commonly assigned U.S.
Patent to Hadimioglu et al. U.S. Patent No. 5,565,113, entitled "Lithographically Defined Ejection Units" and in commonly assigned U.S. Patent No. 5,591,490 to Quate entitled "Acoustic Deposition of Material Layers".
While the above concepts provide advantages, drawbacks exist.
Particularly, an ink print head in which the above device is implemented is required to perform repetitive tasks at a high level of frequency. Further, such a device is implemented in a hostile environment with large fluctuations in heat and operating parameters. Therefore, there is a concern as to.the robustness of the liquid cell when used in:a print head. Particularly, there are concerns that use of the capping structure may be insufficient to maintain the integrity of the liquid cell. Another drawback is the difficulty of filling the liquid cell with a layer of liquid so as to maintain the liquid cell free from air pockets or bubbles which would disrupt the acoustic waves traveling through the liquid cell.
In view of the above, it is considered desirable to develop an emitter in an acoustic ink print head which can emit hot. melt ink.
The print head should be robust and able to operate with a high degree of reliability, is economical to make, and is manufactured consistent with fabrication techniques of existing acoustic ink print heads.
SUMMARY OF THE INVENTION
The present invention describes bi-layer structures integrated into individual emitters of an acoustic ink print head which enables the print head to emit droplets of high viscosity fluid such as hot melt inks. The bi-layer structure is provided above the glass substrate but below the ink surface of the acoustic ink emitter and is used to avoid attenuation of acoustic waves which would occur in a reservoir full of high-viscosity fluids.
In accordance with another aspect of the present invention, there is provided a method of manufacturing a low acoustic wave attenuation element within an acoustic emitter, the method comprising the steps of:
etching a substrate such that an upper surface of the substrate takes on a desired form;
depositing, by an electroforming process, a layer of nickel onto the etched upper surface of the substrate and thereby forming an electroformed nickel mold;
separating the substrate and the electroformed nickel mold;
utilizing the electroformed nickel mold in a process to form a solid low acoustic wave attenuation element;
and incorporating the solid low acoustic wave attenuation element into the acoustic emitter designed to emit drops of a high viscosity fluid.
In accordance with another aspect of the present invention, there is provided a method of fabricating an acoustic emitter element to optimize acoustic energy transfer to a high viscosity fluid, comprising:
etching a substrate into a desired form;
depositing, by an electroforming process, a layer of metallic material onto an etched upper surface of the substrate and thereby forming an electroformed metallic mold;
separating the mold from the etched substrate;
utilizing the mold in a process to fabricate a pedestal carrier which forms a solid low acoustic wave attenuation element;
forming Fresnel lenses on a glass substrate and depositing a polyimide planerization layer over said Fresnel lenses; and positioning and attaching the polyimide planerization layer to a bottom surface of the pedestal carrier.
In accordance with another aspect of the present invention, there is provided a method of manufacturing an acoustic emitter structure comprising:
fabricating a base structure having a top surface and a bottom surface;
fixedly attaching a transducer to the bottom surface of the base, said transducer having connections for receiving an energy source for generating acoustic waves from said transducer;
forming acoustic Fresnel lenses on the upper surface of the base;
etching a substrate to a desired form;
depositing a layer of metallic material onto the substrate to form a mold;
separating the mold from the etched substrate; and utilizing the mold in a process to fabricate a pedestal carrier which forms a solid low acoustic wave attenuation element;
depositing a polyimide planerization layer over said acoustic Fresnel lenses; and positioning and attaching the pedestal carrier to the upper surface of the base.
A benefit of the present invention is an improvement in the accuracy and functionality of an acoustic ink print head which is intended to emit droplets of a high-viscosity fluid such as hot melt inks.
Another benefit of the present invention is that such a structure is compatible with present fabrication techniques for acoustic ink print heads wherein emitters are beneficially lithographically defined and formed using conventional thin-film processing (such as vacuum deposition, epitaxial growth, wet etching, dry etching.
and plating).
These together with other objects of aspect of the invention, along with the various features of novelty which characterize the invention, are pointed out with particularity in the claims annexed to and forming a part of this disclosure. For a better understanding of the invention, its operating advantages and the specific objects obtained by its uses, reference should be made to the accompanying drawings and descriptive matter in which there are illustrated preferred embodiments of the 7a invention.
BRIEF DESCRIPTION OF THE DRAWINGS
The invention will be better understood and objects other than those set forth above will become apparent when consideration is given to the following detailed description thereof. Such description makes reference to the annex drawings wherein:
FIG. 1 is a cross-sectional view of an acoustic ink emitter including a liquid cell filled with a relatively low attenuation liquid;
FIGS. 2A-2E illustrate the steps in the formation of a pedestal for use in an acoustic ink printer of the present invention;
FIG. 3 illustrates the pedestal carrier of FIG. 2 within an acoustic ink printer configuration;
FIG. 4 is a side view of a near-field type probe within an acoustic ink emitter; and 7b FIG. 5 is a two-layer solid structure for focusing an acoustic wave within an acoustic ink emitter.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
As an acoustic ink emitter has been described in some detail in connection with FIG. 1, the following descriptions of multiple or single acoustic ink emitters are shown in a more simplified depiction. It is to be appreciated, however, that the following embodiments are intended to be incorporated within known acoustic ink print heads including emitters such as described in FIG. 1.
Referring now to FIGS. 2A-2E, steps in a fabrication process are illustrated for forming a pedestal carrier with pedestals having the acoustic properties of low sound velocity and low attenuation of acoustic energy. The pedestal carrier to be described below is intended to be incorporated within an acoustic ink print head in order to allow the print head to function with high viscosity fluids such as phase-change inks, including hot melt inks. In phase-change acoustic ink printing, the loss of acoustic energy from a lens, such as a Fresnel lens, to meniscus of an ink at the aperture where the ink emission takes place, is extremely large due to the high viscosity of the molten wax of 1:\mss\xer2134.app the hot melt ink. In order to reduce the acoustic loss, a solid layer of material with low attenuation of acoustic energy and low sound velocity is used to replace a significant area originally occupied by the hot melt ink located between the lens and an upper plate.
The immediately following discussion proposes a fabrication process to build the structure which will maintain the acoustic energy, and at the same time minimize hindrance to the ink flow inside a print head.
Turning attention to FIG. 2A, a substrate 50 has been etched by an existing etching technique, including those techniques known in wet etching and dry etching. The etching results in an upper surface of repeating v-channels 52 and flat planar portions 54. Etched substrate 50 may be a silicon or other known material used in mold formation. Also, while etching has been used in this embodiment, it would be within one of ordinary skill in the art to use other known techniques to obtain substrate 50.
In FIG. 2B, a layer of nickel or other material which can be used as the mold is deposited on the upper surface of etched substrate 50. The nickel is deposited in accordance with known electroforming processes, to form nickel mold 56. The etched silicon 50 and electroformed nickel mold 56 are separated, as disclosed in FIG. 2C. Removal of silicon substrate 50 can be accomplished by a variety of procedures including dissolving the silicon, pulling apart the silicon and nickel halves, or other known techniques.
1:\msa\xer2134.app The electroformed nickel mold 56 is then used as part of an injection molding process or as a thermal stamp ,in order to form a material, such as plastic, into a solid low acoustic wave attenuation element 58, as shown in FIG. 2D. Whatever material is selected to form the solid low acoustic wave attenuation element 58, it is desirable that it have the characteristic of low attenuation of acoustic energy.
In figure 2E, the solid element 58 is shown separated from electroformed nickel mold 56 illustrating the formation of a pedestal carrier 60, having a plurality of pedestals 62. The implementation of the pedestal carrier 60 and its integration into an acoustic ink print head is illustrated in the simplified view of FIG. 3. As previously noted, for simplification, some of the elements of acoustic ink print head 70 are shown in block form.
Acoustic ink print head 70 of FIG. 3 includes commonly used and configured transducers 72, a base such as glass substrate 74, and acoustic lenses, such as Fresnel lenses 72. A polyimide planerization layer 78 is deposited over Fresnel lenses 76, and pedestal carrier 60 is positioned and attached on polyimide planerization layer 78. A metal aperture plate 80 is located on the top surface of pedestal carrier 60 and spacers such as polyimide spacers 82 can be placed within v-channels 84 of pedestal carrier 60 as supports for metal aperture plate 80. A
1:\mss\xer2134.app hot melt ink 86 is made to flow between the upper surfaces of pedestal carrier 60 and the lower surface of metal aperture plate 80, which is also formed to provide for aperture 88, past which ink drops are emitted. Alternatively, the ink could be allowed to refill under capillary forces only as droplets are ejected.
In operation, when any one of transducers 72 are energized by an RF source (not shown), the acoustic energy from the energized transducer 72 passes through base 74 to acoustic lens 76. Each acoustic lens passes the acoustic energy through the polyimide planerization level 78 and pedestal 62 of pedestal carrier 60, and then the beam converges to a small focal area at the ink surface. Without the implementation of pedestal carrier 60 with pedestals 62, the acoustic waves would travel through a longer path of a high-viscosity material, i.e. the hot melt ink.
As previously noted, materials having high viscosity such as hot melt ink have a detrimental effect on the transmission of acoustic energy due to their high attenuation of acoustic waves.
However, in the present embodiment, the plastic material of pedestals 62 provides a lower attenuation path for the acoustic waves, thereby resulting in an increased percentage of energy transference to the ink surface (i.e., the meniscus) 86a. The foregoing results in an improved transmission efficiency of the acoustic energy for emitting ink_drops.
It is to be appreciated that the pedestal height can be reduced, thus increasing the pedestal planar portion to ensure 1:\mss\xer2134.app 1 1 total coverage of the acoustic transmission wave and to increase ink flow if necessary. Specifically, by lowering the height of the pedestal, more area will be provided for ink flow.
The sidewalls of the pedestals will be defined having precise angles as will be determined by anisotropic etching of the silicon. The planar top portion of the pedestal needs to be as wide or slightly wider than the acoustic beam at the pedestal height, to allow the acoustic beam to pass undistorted.
Pedestal carrier 60 meets the acoustic requirements of high acoustic transmission and may be injection-molded with polypheneylene sulfide or a kevlar/nylon composite.
Additionally, pedestal carrier 60 can be constructed using lithographic processes, such as those disclosed in U.S. Patent No. 5,565,113 to Hadimioglu et al. on "Lithographically Defined Ejection Units. The present figures show spacer 82 at each of the v-channels 84.
Alternatively, this plate support can be provided in less than all of the channels, or the plate could be attached only outside the lens region so it is not attached to any channel.
Turning attention to FIG. 4, another embodiment of the present invention is illustrated. Particularly, shown is a simplified depiction of a near-field probe which may be implemented in accordance w-ith the teachings of the present invention. FIG. 4 shows a single acoustic ink emitter 100. In this embodiment, acoustic ink emitter 100 includes among other elements, a transducer 102, base 104~and acoustic lens 106. Above lens 106 is near-field probe 108 carried on probe carrier 110.
The probe carrier 110 can be constructed and integrated into acoustic ink emitter 100 in a manner similar to that described in connection with the forgoing embodiment. In this embodiment, near-field probe 108 replaces the pedestal formation of FIG. 3.
Near-field probe 108 has a tip 112 which is made smaller than a diameter of an emitted drop 114. By this construction, the acoustic waves will diffract off of tip 112, and therefore the thickness level 116 of ink 118 above tip 112 should be equal to or less than the desired drop diameter. It is to be appreciated tip 112 may have various configurations including but not limited to a rounded tip.
Near-field probe 108 can be made of the same material as the pedestals of FIG. 3, and in particular those materials which provide a low acoustic attenuation for sound waves traveling therethrough. Thus, it is to be appreciated that the width of the near-field probe is designed such that at least selected portions of the acoustic waves travel within the probe body.
Benefits of the present embodiment are that the RF frequency does not determine the drop size and therefore the RF frequency can be lowered to obtain a lower attenuation in the liquid or a higher viscosity fluid can be used. In order to achieve low-loss focusing from transducer 102, it will be desirable to have the length of the near-field probe 108 significantly longer than a wavelength of the acoustic waves being transmitted. This 1:\mas\xer2134.app 1 3 distance would, most likely be on the order of a few millimeters.
It is also noted that in this embodiment, the acoustic wave intensity will decrease with r~2 dependence, where r is the distance measured from tip 112 to the surface of the ink.
Therefore, to maintain the acoustic intensity at the ink surface within t 10%, the ink thickness will be kept within t.~5~m, assuming that the ink thickness is approximately 10~m. A benefit of the present embodiment shown in FIG. 4 is that it allows an increase in the amount of ink which can be held in the reservoir.
Specifically, there is less structure and therefore more area for the hot melt ink.
Turning attention to FIG. 5, a further embodiment of the present invention is disclosed. This embodiment is directed to focusing the acoustic waves in a solid material. As with the previous descriptions, the main concept is to print with materials having a relatively high viscosity, such as hot melt inks, which may be solid at room temperature and liquefy at elevated temperatures to achieve a viscosity of about 5-lOcp. In the embodiment of FIG. 5, the majority of the focal path is comprised of solid material that has the properties of a low acoustic loss and low sound velocity.
The low attenuation characteristic of the solids assure that attenuation of acoustic sound waves of emitter 120 will be lowered, thereby reducing the amount of input power required.
Low sound velocity is desired so that there will be a significant change in the sound velocity from first solid 122 to second solid 1:\msa\xer2134.app 1 4 bi-layer material 124. Such a construction also increases the ease of the fabrication of Fresnel lens 106.
Materials having acceptable properties include polyphenylene sulfide. This material can be cast, spun, molded, or otherwise attached to first solid 122. Additionally, if desirable the top surface can be polished to achieve a planer top surface. The embodiment of FIG. 5 can be further modified by removing significant amounts of bi-layer material 124 at locations other than for the small areas on the lenses to increase the fluid path for the ink layer 118 on top of solid bi-layer material 124.
This configuration can be achieved by various fabrication techniques including molding.
Ink layer 118 will be significantly thinner than that of other embodiments, whereby reduced acoustic attenuation throughout the entire subsurface is achieved.
With respect to the above description then, it is to be realized that the optimal dimensional relationships for the parts of the invention, to include variations in size, materials, shape, form, function and manner of operation, assembly and use are deemed readily apparent and obvious to one skilled in the art and all equivalent relations to those illustrated in the drawings and described in the specification are intended to be encompassed by the present invention.
Therefore, the forgoing is considered as illustrative only of the principles of the invention. Further, since numerous modifications and changes will readily occur to those skilled in 1:\mss\xer2134.app 1 5 the art, it is not desired to limit the invention to the exact construction and operation shown and described and accordingly, all suitable modifications and equivalents may be resorted to falling within the scope of the invention.
1:\msa\xer2134.app 1 6
SOLID BI-LAYER STRUCTURES
FOR USE WITH HIGH VISCOSITY INKS IN
ACOUSTIC INK PRINTING AND METHODS OF FABRICATION
BACKGROUND OF THE INVENTION
This invention relates to acoustic ink printing and, more particularly, to acoustic ink printing with hot melt inks.
Acoustic ink printing is a promising direct marking technology because it does not require the nozzles of the small ejection orifices which have been a major cause of the reliability and pixel placement accuracy problems that conventional drop on demand and' continuous stream ink jet printers have experienced.
It has been shown that acoustic ink printers that have print heads comprising acoustically illuminated spherical or Fresnel focusing lenses can print precisely positioned picture elements (pixels) at resolutions which are sufficient for high quality printing of complex images. See, for example, the co-pending and commonly assigned U.S. Patent No. 4,751,529 on uMicrolenses for Acoustic Printing", and U.S. Patent No. 4,751,530 on "Acoustic Lens Arrays for Ink Printing" to Elrod et al.
It also has been found that the size of the individual pixels printed by such a printer can be varied over a significant range during operation.
Although acoustic lens-type droplet emitters currently are favored, there are other types of droplet emitters which may be utilized for acoustic ink printing, including (1) piezoelectric shell transducers or an acoustic lens-type drop emitter, such as described in Lovelady et al U.S. Pat. No. 4,308,547, which issued Dec. 29, 1981 on a "Liquid Drop Emitter," and (2) interdigitated transducer (IDT's), such as described in commonly assigned U.S.
Patent No. 4,697,195 on "Nozzleless Liquid Droplet Ejectors", to Quate et al. Furthermore, acoustic ink printing technology is compatible with various print head configurations; including (1) single emitter embodiments for raster scan printing, (2) matrix configured arrays for matrix printing, and (3) several different types of page width arrays, ranging from (I) single row, sparse arrays for hybrid forms of parallel/serial printing, to (ii) multiple row staggered arrays with individual emitters for each of the pixel positions or addresses within a page width address field (i.e., single emitter/pixel/line) for ordinary line printing.
For performing acoustic ink printing with any of the aforementioned droplet emitters, each of the emitters launches a converging acoustic beam into a pool of ink, with the angular convergence of the beam being selected so that it comes to focus at or near the free surface (i.e., the liquid/air interface) of the pool. Moreover, controls are provided for modulating the radiation pressure which each beam exerts against the free surface of the ink. That permits the radiation pressure of each beam to make brief, controlled excursions to a sufficiently high pressure level to overcome the restraining force of surface tension, whereby individual droplets of ink are emitted from the free surface of the 1:\mss\xer2134.app 2 ink on command, with sufficient velocity to deposit them on a nearby recording medium.
Hot melt inks have the known advantages of being relatively clean and economical to handle while they are in a solid state and of being easy to liquify in situ for the printing of high quality images . Another advantage lies in that there is no need to dry paper (as in water-based inks) and no bleeding of different colors.
These advantages are of substantial value for acoustic ink printing, especially if provision is made for realizing them without significantly complicating the acoustic ink printing process or materially degrading the quality of the images that are printed.
A drawback of using hot melt inks in acoustic ink printing is that such inks have a relatively high viscosity. Particularly, the inks can be in the form of, but are not limited to, a solid material at room temperature and are liquidified at elevated temperatures to achieve a viscosity of approximately 5-lOcp. When hot melt inks are used to fill in the complete focal zone of an acoustic lens, as is the case with a standard acoustic ink printer, significant acoustic attenuation occurs in the focal path. This will, therefore, require that the input power to a printer be raised to a much higher level to overcome the attenuation, which in turn results in increased power consumption and stress on the system. When too much of an acoustic wave is attenuated, it is not possible to emit ink drops, _or undesirable undeformed, or misdirected ink drops with very low velocity are generated.
1:\msa\xer2134.app FIGURE 1 provides a view of an exemplary acoustic ink printing element 10 to which the present invention may be applied. Of course, other configurations may also have the present invention applied thereto.
As shown, the element 10 includes a glass layer 12 having an _ _ electrode layer 14 disposed thereon. A piezoelectric layer 16, preferably formed of zinc oxide, is positioned on the electrode layer 14 and an electrode 18 is disposed on the piezoelectric layer 16. Electrode layer 14 and electrode 18 are connected through a surface wiring pattern representatively shown at 20 and cables 22 to a radio frequency (RF) power source 24 which generates power that is transferred to the electrodes 14 and 18. On a side opposite the electrode layer 14, a lens 26, preferably a concentric Fresnel lens, is formed. Spaced from the lens 26 is a liquid level control plate 28, having an aperture 30 formed therein. Ink 32 is retained between the liquid level control plate 28, having an aperture 30 formed therein. Ink 32 is retained between the liquid level control plate 28 and the glass layer 12, and the aperture 30 is aligned with the lens 26 to facilitate emission of a droplet 34 from ink surface 36. Ink surface 36 is, of course, exposed by the aperture 30.
The lens 26, the electrode layer 14, the piezoelectric layer 1:\mas\xer2134.app 4 16, and the electrode 18 are formed on the glass layer 12 through known photolithographic techniques. The liquid level control plate 28 is subsequently positioned to be spaced from the glass layer 12.
The ink 32 is fed into the space between the plate 28 and the glass layer 12 from an ink supply (not shown).
A droplet emitter is disclosed in commonly assigned U.S.
Patent to Hadimioglu et al. U.S. Patent No. 5,565,113, entitled "Lithographically Defined Ejection Units" and in commonly assigned U.S. Patent No. 5,591,490 to Quate entitled "Acoustic Deposition of Material Layers".
While the above concepts provide advantages, drawbacks exist.
Particularly, an ink print head in which the above device is implemented is required to perform repetitive tasks at a high level of frequency. Further, such a device is implemented in a hostile environment with large fluctuations in heat and operating parameters. Therefore, there is a concern as to.the robustness of the liquid cell when used in:a print head. Particularly, there are concerns that use of the capping structure may be insufficient to maintain the integrity of the liquid cell. Another drawback is the difficulty of filling the liquid cell with a layer of liquid so as to maintain the liquid cell free from air pockets or bubbles which would disrupt the acoustic waves traveling through the liquid cell.
In view of the above, it is considered desirable to develop an emitter in an acoustic ink print head which can emit hot. melt ink.
The print head should be robust and able to operate with a high degree of reliability, is economical to make, and is manufactured consistent with fabrication techniques of existing acoustic ink print heads.
SUMMARY OF THE INVENTION
The present invention describes bi-layer structures integrated into individual emitters of an acoustic ink print head which enables the print head to emit droplets of high viscosity fluid such as hot melt inks. The bi-layer structure is provided above the glass substrate but below the ink surface of the acoustic ink emitter and is used to avoid attenuation of acoustic waves which would occur in a reservoir full of high-viscosity fluids.
In accordance with another aspect of the present invention, there is provided a method of manufacturing a low acoustic wave attenuation element within an acoustic emitter, the method comprising the steps of:
etching a substrate such that an upper surface of the substrate takes on a desired form;
depositing, by an electroforming process, a layer of nickel onto the etched upper surface of the substrate and thereby forming an electroformed nickel mold;
separating the substrate and the electroformed nickel mold;
utilizing the electroformed nickel mold in a process to form a solid low acoustic wave attenuation element;
and incorporating the solid low acoustic wave attenuation element into the acoustic emitter designed to emit drops of a high viscosity fluid.
In accordance with another aspect of the present invention, there is provided a method of fabricating an acoustic emitter element to optimize acoustic energy transfer to a high viscosity fluid, comprising:
etching a substrate into a desired form;
depositing, by an electroforming process, a layer of metallic material onto an etched upper surface of the substrate and thereby forming an electroformed metallic mold;
separating the mold from the etched substrate;
utilizing the mold in a process to fabricate a pedestal carrier which forms a solid low acoustic wave attenuation element;
forming Fresnel lenses on a glass substrate and depositing a polyimide planerization layer over said Fresnel lenses; and positioning and attaching the polyimide planerization layer to a bottom surface of the pedestal carrier.
In accordance with another aspect of the present invention, there is provided a method of manufacturing an acoustic emitter structure comprising:
fabricating a base structure having a top surface and a bottom surface;
fixedly attaching a transducer to the bottom surface of the base, said transducer having connections for receiving an energy source for generating acoustic waves from said transducer;
forming acoustic Fresnel lenses on the upper surface of the base;
etching a substrate to a desired form;
depositing a layer of metallic material onto the substrate to form a mold;
separating the mold from the etched substrate; and utilizing the mold in a process to fabricate a pedestal carrier which forms a solid low acoustic wave attenuation element;
depositing a polyimide planerization layer over said acoustic Fresnel lenses; and positioning and attaching the pedestal carrier to the upper surface of the base.
A benefit of the present invention is an improvement in the accuracy and functionality of an acoustic ink print head which is intended to emit droplets of a high-viscosity fluid such as hot melt inks.
Another benefit of the present invention is that such a structure is compatible with present fabrication techniques for acoustic ink print heads wherein emitters are beneficially lithographically defined and formed using conventional thin-film processing (such as vacuum deposition, epitaxial growth, wet etching, dry etching.
and plating).
These together with other objects of aspect of the invention, along with the various features of novelty which characterize the invention, are pointed out with particularity in the claims annexed to and forming a part of this disclosure. For a better understanding of the invention, its operating advantages and the specific objects obtained by its uses, reference should be made to the accompanying drawings and descriptive matter in which there are illustrated preferred embodiments of the 7a invention.
BRIEF DESCRIPTION OF THE DRAWINGS
The invention will be better understood and objects other than those set forth above will become apparent when consideration is given to the following detailed description thereof. Such description makes reference to the annex drawings wherein:
FIG. 1 is a cross-sectional view of an acoustic ink emitter including a liquid cell filled with a relatively low attenuation liquid;
FIGS. 2A-2E illustrate the steps in the formation of a pedestal for use in an acoustic ink printer of the present invention;
FIG. 3 illustrates the pedestal carrier of FIG. 2 within an acoustic ink printer configuration;
FIG. 4 is a side view of a near-field type probe within an acoustic ink emitter; and 7b FIG. 5 is a two-layer solid structure for focusing an acoustic wave within an acoustic ink emitter.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
As an acoustic ink emitter has been described in some detail in connection with FIG. 1, the following descriptions of multiple or single acoustic ink emitters are shown in a more simplified depiction. It is to be appreciated, however, that the following embodiments are intended to be incorporated within known acoustic ink print heads including emitters such as described in FIG. 1.
Referring now to FIGS. 2A-2E, steps in a fabrication process are illustrated for forming a pedestal carrier with pedestals having the acoustic properties of low sound velocity and low attenuation of acoustic energy. The pedestal carrier to be described below is intended to be incorporated within an acoustic ink print head in order to allow the print head to function with high viscosity fluids such as phase-change inks, including hot melt inks. In phase-change acoustic ink printing, the loss of acoustic energy from a lens, such as a Fresnel lens, to meniscus of an ink at the aperture where the ink emission takes place, is extremely large due to the high viscosity of the molten wax of 1:\mss\xer2134.app the hot melt ink. In order to reduce the acoustic loss, a solid layer of material with low attenuation of acoustic energy and low sound velocity is used to replace a significant area originally occupied by the hot melt ink located between the lens and an upper plate.
The immediately following discussion proposes a fabrication process to build the structure which will maintain the acoustic energy, and at the same time minimize hindrance to the ink flow inside a print head.
Turning attention to FIG. 2A, a substrate 50 has been etched by an existing etching technique, including those techniques known in wet etching and dry etching. The etching results in an upper surface of repeating v-channels 52 and flat planar portions 54. Etched substrate 50 may be a silicon or other known material used in mold formation. Also, while etching has been used in this embodiment, it would be within one of ordinary skill in the art to use other known techniques to obtain substrate 50.
In FIG. 2B, a layer of nickel or other material which can be used as the mold is deposited on the upper surface of etched substrate 50. The nickel is deposited in accordance with known electroforming processes, to form nickel mold 56. The etched silicon 50 and electroformed nickel mold 56 are separated, as disclosed in FIG. 2C. Removal of silicon substrate 50 can be accomplished by a variety of procedures including dissolving the silicon, pulling apart the silicon and nickel halves, or other known techniques.
1:\msa\xer2134.app The electroformed nickel mold 56 is then used as part of an injection molding process or as a thermal stamp ,in order to form a material, such as plastic, into a solid low acoustic wave attenuation element 58, as shown in FIG. 2D. Whatever material is selected to form the solid low acoustic wave attenuation element 58, it is desirable that it have the characteristic of low attenuation of acoustic energy.
In figure 2E, the solid element 58 is shown separated from electroformed nickel mold 56 illustrating the formation of a pedestal carrier 60, having a plurality of pedestals 62. The implementation of the pedestal carrier 60 and its integration into an acoustic ink print head is illustrated in the simplified view of FIG. 3. As previously noted, for simplification, some of the elements of acoustic ink print head 70 are shown in block form.
Acoustic ink print head 70 of FIG. 3 includes commonly used and configured transducers 72, a base such as glass substrate 74, and acoustic lenses, such as Fresnel lenses 72. A polyimide planerization layer 78 is deposited over Fresnel lenses 76, and pedestal carrier 60 is positioned and attached on polyimide planerization layer 78. A metal aperture plate 80 is located on the top surface of pedestal carrier 60 and spacers such as polyimide spacers 82 can be placed within v-channels 84 of pedestal carrier 60 as supports for metal aperture plate 80. A
1:\mss\xer2134.app hot melt ink 86 is made to flow between the upper surfaces of pedestal carrier 60 and the lower surface of metal aperture plate 80, which is also formed to provide for aperture 88, past which ink drops are emitted. Alternatively, the ink could be allowed to refill under capillary forces only as droplets are ejected.
In operation, when any one of transducers 72 are energized by an RF source (not shown), the acoustic energy from the energized transducer 72 passes through base 74 to acoustic lens 76. Each acoustic lens passes the acoustic energy through the polyimide planerization level 78 and pedestal 62 of pedestal carrier 60, and then the beam converges to a small focal area at the ink surface. Without the implementation of pedestal carrier 60 with pedestals 62, the acoustic waves would travel through a longer path of a high-viscosity material, i.e. the hot melt ink.
As previously noted, materials having high viscosity such as hot melt ink have a detrimental effect on the transmission of acoustic energy due to their high attenuation of acoustic waves.
However, in the present embodiment, the plastic material of pedestals 62 provides a lower attenuation path for the acoustic waves, thereby resulting in an increased percentage of energy transference to the ink surface (i.e., the meniscus) 86a. The foregoing results in an improved transmission efficiency of the acoustic energy for emitting ink_drops.
It is to be appreciated that the pedestal height can be reduced, thus increasing the pedestal planar portion to ensure 1:\mss\xer2134.app 1 1 total coverage of the acoustic transmission wave and to increase ink flow if necessary. Specifically, by lowering the height of the pedestal, more area will be provided for ink flow.
The sidewalls of the pedestals will be defined having precise angles as will be determined by anisotropic etching of the silicon. The planar top portion of the pedestal needs to be as wide or slightly wider than the acoustic beam at the pedestal height, to allow the acoustic beam to pass undistorted.
Pedestal carrier 60 meets the acoustic requirements of high acoustic transmission and may be injection-molded with polypheneylene sulfide or a kevlar/nylon composite.
Additionally, pedestal carrier 60 can be constructed using lithographic processes, such as those disclosed in U.S. Patent No. 5,565,113 to Hadimioglu et al. on "Lithographically Defined Ejection Units. The present figures show spacer 82 at each of the v-channels 84.
Alternatively, this plate support can be provided in less than all of the channels, or the plate could be attached only outside the lens region so it is not attached to any channel.
Turning attention to FIG. 4, another embodiment of the present invention is illustrated. Particularly, shown is a simplified depiction of a near-field probe which may be implemented in accordance w-ith the teachings of the present invention. FIG. 4 shows a single acoustic ink emitter 100. In this embodiment, acoustic ink emitter 100 includes among other elements, a transducer 102, base 104~and acoustic lens 106. Above lens 106 is near-field probe 108 carried on probe carrier 110.
The probe carrier 110 can be constructed and integrated into acoustic ink emitter 100 in a manner similar to that described in connection with the forgoing embodiment. In this embodiment, near-field probe 108 replaces the pedestal formation of FIG. 3.
Near-field probe 108 has a tip 112 which is made smaller than a diameter of an emitted drop 114. By this construction, the acoustic waves will diffract off of tip 112, and therefore the thickness level 116 of ink 118 above tip 112 should be equal to or less than the desired drop diameter. It is to be appreciated tip 112 may have various configurations including but not limited to a rounded tip.
Near-field probe 108 can be made of the same material as the pedestals of FIG. 3, and in particular those materials which provide a low acoustic attenuation for sound waves traveling therethrough. Thus, it is to be appreciated that the width of the near-field probe is designed such that at least selected portions of the acoustic waves travel within the probe body.
Benefits of the present embodiment are that the RF frequency does not determine the drop size and therefore the RF frequency can be lowered to obtain a lower attenuation in the liquid or a higher viscosity fluid can be used. In order to achieve low-loss focusing from transducer 102, it will be desirable to have the length of the near-field probe 108 significantly longer than a wavelength of the acoustic waves being transmitted. This 1:\mas\xer2134.app 1 3 distance would, most likely be on the order of a few millimeters.
It is also noted that in this embodiment, the acoustic wave intensity will decrease with r~2 dependence, where r is the distance measured from tip 112 to the surface of the ink.
Therefore, to maintain the acoustic intensity at the ink surface within t 10%, the ink thickness will be kept within t.~5~m, assuming that the ink thickness is approximately 10~m. A benefit of the present embodiment shown in FIG. 4 is that it allows an increase in the amount of ink which can be held in the reservoir.
Specifically, there is less structure and therefore more area for the hot melt ink.
Turning attention to FIG. 5, a further embodiment of the present invention is disclosed. This embodiment is directed to focusing the acoustic waves in a solid material. As with the previous descriptions, the main concept is to print with materials having a relatively high viscosity, such as hot melt inks, which may be solid at room temperature and liquefy at elevated temperatures to achieve a viscosity of about 5-lOcp. In the embodiment of FIG. 5, the majority of the focal path is comprised of solid material that has the properties of a low acoustic loss and low sound velocity.
The low attenuation characteristic of the solids assure that attenuation of acoustic sound waves of emitter 120 will be lowered, thereby reducing the amount of input power required.
Low sound velocity is desired so that there will be a significant change in the sound velocity from first solid 122 to second solid 1:\msa\xer2134.app 1 4 bi-layer material 124. Such a construction also increases the ease of the fabrication of Fresnel lens 106.
Materials having acceptable properties include polyphenylene sulfide. This material can be cast, spun, molded, or otherwise attached to first solid 122. Additionally, if desirable the top surface can be polished to achieve a planer top surface. The embodiment of FIG. 5 can be further modified by removing significant amounts of bi-layer material 124 at locations other than for the small areas on the lenses to increase the fluid path for the ink layer 118 on top of solid bi-layer material 124.
This configuration can be achieved by various fabrication techniques including molding.
Ink layer 118 will be significantly thinner than that of other embodiments, whereby reduced acoustic attenuation throughout the entire subsurface is achieved.
With respect to the above description then, it is to be realized that the optimal dimensional relationships for the parts of the invention, to include variations in size, materials, shape, form, function and manner of operation, assembly and use are deemed readily apparent and obvious to one skilled in the art and all equivalent relations to those illustrated in the drawings and described in the specification are intended to be encompassed by the present invention.
Therefore, the forgoing is considered as illustrative only of the principles of the invention. Further, since numerous modifications and changes will readily occur to those skilled in 1:\mss\xer2134.app 1 5 the art, it is not desired to limit the invention to the exact construction and operation shown and described and accordingly, all suitable modifications and equivalents may be resorted to falling within the scope of the invention.
1:\msa\xer2134.app 1 6
Claims (8)
1. A method of manufacturing a low acoustic wave attenuation element within an acoustic emitter, the method comprising the steps of:
etching a substrate such that an upper surface of the substrate takes on a desired form;
depositing, by an electroforming process, a layer of nickel onto the etched upper surface of the substrate and thereby forming an electroformed nickel mold;
separating the substrate and the electroformed nickel mold;
utilizing the electroformed nickel mold in a process to form a solid low acoustic wave attenuation element; and incorporating the solid low acoustic wave attenuation element into the acoustic emitter designed to emit drops of a high viscosity fluid.
etching a substrate such that an upper surface of the substrate takes on a desired form;
depositing, by an electroforming process, a layer of nickel onto the etched upper surface of the substrate and thereby forming an electroformed nickel mold;
separating the substrate and the electroformed nickel mold;
utilizing the electroformed nickel mold in a process to form a solid low acoustic wave attenuation element; and incorporating the solid low acoustic wave attenuation element into the acoustic emitter designed to emit drops of a high viscosity fluid.
2. The method according to claim 1 wherein the step of forming the solid low acoustic wave attenuation element includes forming a pedestal carrier having at least one pedestal including inwardly angled walls and a planar top portion.
3. The method according to claim 2 wherein the angled walls are formed to be distanced from each other such that at least a selected portion of the acoustic waves travel within an area defined by the angled walls, the selected portion of the acoustic waves having sufficient energy to emit an ink drop.
4. The method according to claim 1 wherein emitting a drop of high viscosity fluid comprises emitting a hot melt ink.
5. A method of fabricating an acoustic emitter element to optimize acoustic energy transfer to a high viscosity fluid, comprising:
etching a substrate into a desired form;
depositing, by an electroforming process, a layer of metallic material onto an etched upper surface of the substrate and thereby forming an electroformed metallic mold;
separating the mold from the etched substrate;
utilizing the mold in a process to fabricate a pedestal carrier which forms a solid low acoustic wave attenuation element;
forming Fresnel lenses on a glass substrate and depositing a polyimide planerization layer over said Fresnel lenses; and positioning and attaching the polyimide planerization layer to a bottom surface of the pedestal carrier.
etching a substrate into a desired form;
depositing, by an electroforming process, a layer of metallic material onto an etched upper surface of the substrate and thereby forming an electroformed metallic mold;
separating the mold from the etched substrate;
utilizing the mold in a process to fabricate a pedestal carrier which forms a solid low acoustic wave attenuation element;
forming Fresnel lenses on a glass substrate and depositing a polyimide planerization layer over said Fresnel lenses; and positioning and attaching the polyimide planerization layer to a bottom surface of the pedestal carrier.
6. The method according to claim 5 further including:
forming said etched substrate into a series of repeating v-channels and flat planar portions;
positioning spacers within the v-channels of the pedestal carrier; and positioning and attaching a metal aperture plate to a top surface of the pedestal carrier.
forming said etched substrate into a series of repeating v-channels and flat planar portions;
positioning spacers within the v-channels of the pedestal carrier; and positioning and attaching a metal aperture plate to a top surface of the pedestal carrier.
7. A method of manufacturing an acoustic emitter structure comprising:
fabricating a base structure having a top surface and a bottom surface;
fixedly attaching a transducer to the bottom surface of the base, said transducer having connections for receiving an energy source for generating acoustic waves from said transducer;
forming acoustic Fresnel lenses on the upper surface of the base;
etching a substrate to a desired form;
depositing a layer of metallic material onto the substrate to form a mold;
separating the mold from the etched substrate; and utilizing the mold in a process to fabricate a pedestal carrier which forms a solid low acoustic wave attenuation element;
depositing a polyimide planerization layer over said acoustic Fresnel lenses; and positioning and attaching the pedestal carrier to the upper surface of the base.
fabricating a base structure having a top surface and a bottom surface;
fixedly attaching a transducer to the bottom surface of the base, said transducer having connections for receiving an energy source for generating acoustic waves from said transducer;
forming acoustic Fresnel lenses on the upper surface of the base;
etching a substrate to a desired form;
depositing a layer of metallic material onto the substrate to form a mold;
separating the mold from the etched substrate; and utilizing the mold in a process to fabricate a pedestal carrier which forms a solid low acoustic wave attenuation element;
depositing a polyimide planerization layer over said acoustic Fresnel lenses; and positioning and attaching the pedestal carrier to the upper surface of the base.
8. The method according to claim 7 further including:
forming said etched substrate into a series of repeating v-channels and flat planar portions;
positioning spacers within the v-channels of the pedestal carrier; and positioning and attaching a metal aperture plate to a top surface of the pedestal carrier.
forming said etched substrate into a series of repeating v-channels and flat planar portions;
positioning spacers within the v-channels of the pedestal carrier; and positioning and attaching a metal aperture plate to a top surface of the pedestal carrier.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/218,924 US6416678B1 (en) | 1998-12-22 | 1998-12-22 | Solid bi-layer structures for use with high viscosity inks in acoustic ink printing and methods of fabrication |
| US09/218,924 | 1998-12-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2289860A1 CA2289860A1 (en) | 2000-06-22 |
| CA2289860C true CA2289860C (en) | 2005-03-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CA002289860A Expired - Fee Related CA2289860C (en) | 1998-12-22 | 1999-11-15 | Solid bi-layer structures for use with high viscosity inks in acoustic ink printing and methods of fabrication |
Country Status (5)
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| US (2) | US6416678B1 (en) |
| EP (1) | EP1013421B1 (en) |
| JP (1) | JP2000185398A (en) |
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|---|---|---|---|---|
| JP2003089202A (en) * | 2001-09-18 | 2003-03-25 | Seiko Epson Corp | Solid ink jet printer |
| EP1304224A1 (en) * | 2001-10-19 | 2003-04-23 | Tonejet Corporation Pty Ltd | Method of forming a three dimensional shape |
| US6846425B2 (en) * | 2002-09-27 | 2005-01-25 | Xerox Corporation | Metal alloy 42 liquid level control/aperture plate for acoustic ink printing printhead |
| JP4282703B2 (en) * | 2006-09-26 | 2009-06-24 | 株式会社東芝 | Inkjet recording device |
| EP2232572A4 (en) * | 2007-12-07 | 2012-10-17 | Alion Inc | Focused acoustic printing of patterned photovoltaic materials |
| US8079676B2 (en) * | 2008-12-16 | 2011-12-20 | Palo Alto Research Center Incorporated | System and method for acoustic ejection of drops from a thin layer of fluid |
| US20100184244A1 (en) * | 2009-01-20 | 2010-07-22 | SunPrint, Inc. | Systems and methods for depositing patterned materials for solar panel production |
| WO2019011674A1 (en) * | 2017-07-12 | 2019-01-17 | Mycronic AB | Jetting devices with acoustic transducers and methods of controlling same |
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| US3211088A (en) * | 1962-05-04 | 1965-10-12 | Sperry Rand Corp | Exponential horn printer |
| JPS58187366A (en) * | 1982-04-28 | 1983-11-01 | Fujitsu Ltd | Fabrication of ink jet head |
| CH649040A5 (en) * | 1982-10-08 | 1985-04-30 | Battelle Memorial Institute | DEVICE FOR PROJECTING DROPLETS OF AN ELECTRICALLY CONDUCTIVE LIQUID. |
| US4748461A (en) | 1986-01-21 | 1988-05-31 | Xerox Corporation | Capillary wave controllers for nozzleless droplet ejectors |
| US4751529A (en) * | 1986-12-19 | 1988-06-14 | Xerox Corporation | Microlenses for acoustic printing |
| US4751534A (en) * | 1986-12-19 | 1988-06-14 | Xerox Corporation | Planarized printheads for acoustic printing |
| US5580827A (en) * | 1989-10-10 | 1996-12-03 | The Board Of Trustees Of The Leland Stanford Junior University | Casting sharpened microminiature tips |
| US5041849A (en) * | 1989-12-26 | 1991-08-20 | Xerox Corporation | Multi-discrete-phase Fresnel acoustic lenses and their application to acoustic ink printing |
| JPH04142940A (en) * | 1990-10-04 | 1992-05-15 | Seiko Epson Corp | Manufacture of nozzle plate for ink jet |
| DE4329728A1 (en) * | 1993-09-03 | 1995-03-09 | Microparts Gmbh | Nozzle plate for fluid jet printhead and method for its manufacture |
| DE69523815T2 (en) | 1994-05-18 | 2002-04-18 | Xerox Corp | Acoustic coating of material layers |
| US5565113A (en) | 1994-05-18 | 1996-10-15 | Xerox Corporation | Lithographically defined ejection units |
| US5694684A (en) * | 1994-06-10 | 1997-12-09 | Canon Kabushiki Kaisha | Manufacturing method for ink jet recording head |
| EP0692383B1 (en) * | 1994-07-11 | 2005-06-15 | Kabushiki Kaisha Toshiba | Ink jet recording device |
| US5520715A (en) * | 1994-07-11 | 1996-05-28 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Directional electrostatic accretion process employing acoustic droplet formation |
| US5631678A (en) * | 1994-12-05 | 1997-05-20 | Xerox Corporation | Acoustic printheads with optical alignment |
| US5912679A (en) | 1995-02-21 | 1999-06-15 | Kabushiki Kaisha Toshiba | Ink-jet printer using RF tone burst drive signal |
| US5593486A (en) | 1995-12-05 | 1997-01-14 | Xerox Corporation | Photochromic hot melt ink compositions |
| US5643357A (en) | 1995-12-08 | 1997-07-01 | Xerox Corporation | Liquid crystalline ink compositions |
| US5667568A (en) | 1996-03-29 | 1997-09-16 | Xerox Corporation | Hot melt ink compositions |
| JPH1016236A (en) * | 1996-06-28 | 1998-01-20 | Copal Co Ltd | Ink jet printer head and its manufacturing method |
| JP2965513B2 (en) * | 1996-07-26 | 1999-10-18 | 富士ゼロックス株式会社 | Printing element and printing apparatus |
| US5698017A (en) | 1996-09-27 | 1997-12-16 | Xerox Corporation | Oxazoline hot melt ink compositions |
| US5693128A (en) | 1997-01-21 | 1997-12-02 | Xerox Corporation | Phase change hot melt ink compositions |
| US6036874A (en) * | 1997-10-30 | 2000-03-14 | Applied Materials, Inc. | Method for fabrication of nozzles for ink-jet printers |
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1998
- 1998-12-22 US US09/218,924 patent/US6416678B1/en not_active Expired - Lifetime
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1999
- 1999-11-15 CA CA002289860A patent/CA2289860C/en not_active Expired - Fee Related
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| EP1013421A2 (en) | 2000-06-28 |
| US6416678B1 (en) | 2002-07-09 |
| EP1013421A3 (en) | 2001-08-08 |
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| DE69906462T2 (en) | 2003-10-30 |
| CA2289860A1 (en) | 2000-06-22 |
| US6644785B2 (en) | 2003-11-11 |
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| DE69906462D1 (en) | 2003-05-08 |
| US20020015074A1 (en) | 2002-02-07 |
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