CA2378736A1 - Micro-machined mirror device - Google Patents
Micro-machined mirror device Download PDFInfo
- Publication number
- CA2378736A1 CA2378736A1 CA002378736A CA2378736A CA2378736A1 CA 2378736 A1 CA2378736 A1 CA 2378736A1 CA 002378736 A CA002378736 A CA 002378736A CA 2378736 A CA2378736 A CA 2378736A CA 2378736 A1 CA2378736 A1 CA 2378736A1
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- Prior art keywords
- mirror assembly
- mass
- mirror
- movement
- support structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrate Substances 0.000 claims abstract 8
- 238000000034 method Methods 0.000 claims 21
- 238000005459 micromachining Methods 0.000 claims 7
- 230000003287 optical effect Effects 0.000 claims 4
- 230000037361 pathway Effects 0.000 claims 3
- 230000001154 acute effect Effects 0.000 claims 2
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 claims 2
- 230000008878 coupling Effects 0.000 claims 2
- 238000010168 coupling process Methods 0.000 claims 2
- 238000005859 coupling reaction Methods 0.000 claims 2
- 230000000295 complement effect Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 239000000919 ceramic Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
Abstract
A micro machined mirror assembly is provided that includes a micro machined top cap (205), mirror (210), and bottom cap (215) mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T-shaped hinges and includes travel stops that limit motion of the mirror in the x-, y-, and z-directions.
The top and bottom micro machined caps also include travel stops that limit motion of the mirror in the z-direction.
The top and bottom micro machined caps also include travel stops that limit motion of the mirror in the z-direction.
Claims (115)
1. An apparatus for use in making optical measurements, comprising;
(a) a mass having an exposed reflective surface;
(b) a pair of hinges attached to a support structure supporting said mass, said hinges enabling the mass torsional movement about a common axis of the hinges, vertical movement (z-direction), movement along a first planar direction (x-direction) of the reflective surface and movement along a second planar direction (y-direction) of the reflective surface, wherein said vertical, first and second planar directions are orthogonal to each other.
(a) a mass having an exposed reflective surface;
(b) a pair of hinges attached to a support structure supporting said mass, said hinges enabling the mass torsional movement about a common axis of the hinges, vertical movement (z-direction), movement along a first planar direction (x-direction) of the reflective surface and movement along a second planar direction (y-direction) of the reflective surface, wherein said vertical, first and second planar directions are orthogonal to each other.
2. The apparatus of claim 1, wherein said hinges are T-shaped with a first member (leg) attached to the mass and a second member (T-member) attached to the leg and to the support structure at opposite ends of the T-member, said T-member capable of moving in the y-direction, thereby providing compliancy to the mass in the y-direction.
3. The apparatus of claim 2 further comprising at least one x-travel stop limiting movement of the mass in the first planar direction.
4. The apparatus of claim 3 wherein the at least one x-travel stop includes a first member carried by the support structure and a second member carried by the mass.
5. The apparatus of claim 4 wherein the mass has a plurality of sides and wherein the at least one x-travel stop includes a separate travel stop corresponding to each said side of the mass.
6. The apparatus of claim 2 further comprising at least one y-travel stop limiting movement of the mass in the second planar direction.
7. The apparatus of claim 6 wherein at least one y-travel stop includes a member carried by the support structure that limits the movement of the mass in the second planar direction.
8. The apparatus of claim 6 wherein the mass has a plurality of sides and at least one y-travel stop includes a separate member carried by the support structure to limit movement of the mass along each said side of the mass.
9. The apparatus of claim 1 further comprising a first planar stop to limit movement of the mass in a first planar direction and a second planar stop to limit the movement of the mass in the second planar direction.
10. The apparatus of claim 9 wherein the first planar stop includes a first member carried by the support structure and a second member carried by the mass which cooperate with each other to limit travel of the mass in the first planar direction and the second planar stop includes a member carried by the mass that limits travel of the mass in the second planar directions.
11. The apparatus of claim 1 further comprising a vertical travel stop that limits the movement of the mass in a vertical direction is perpendicular to the exposed reflective surface.
12. The apparatus of claim 11 wherein the vertical travel stop includes a separate finger member placed a predetermined distance from each said hinge, each said finger member having length greater than a planar dimensions of the hinges.
13. The apparatus of claim 1 wherein the hinges permit torsional movement of the mass about a common axis of the hinges, said common axis in the y-direction.
14. The apparatus of claim 1 wherein each said hinge has a predetermined torsional (rotational) spring constant and a translational spring constant wherein the torsional spring constant is decoupled from the translational spring constant.
15. A mirror assembly, comprising:
(a) an enclosure having a top opening exposed to the environment;
(b) a mirror having a reflective planar surface; and (c) a pair of hinges attached to said mirror and said support structure to suspend said mirror in the support structure with the reflective planar surface of the mirror exposed to the environment, said hinges allowing the mirror torsional movement about a common axis of the hinges, vertical movement, movement in a first planar directions and movement in a second planar direction.
(a) an enclosure having a top opening exposed to the environment;
(b) a mirror having a reflective planar surface; and (c) a pair of hinges attached to said mirror and said support structure to suspend said mirror in the support structure with the reflective planar surface of the mirror exposed to the environment, said hinges allowing the mirror torsional movement about a common axis of the hinges, vertical movement, movement in a first planar directions and movement in a second planar direction.
16. The mirror assembly of claim 15 wherein the enclosure includes at least one of (i) a tapered upper side or (ii) a cut out to prevent clipping of a light beam striking said mirror at an angle.
17. The mirror assembly according to claim 15 or 16 wherein the support structure further includes a tapered section that limits movement of the mirror in a particular diagonal direction combination of z and x or z and y directions.
18. The mirror assembly according to claim 17 wherein the particular diagonal direction is a combination of one of the (i) z and x axis;
and (ii) z and y axis.
and (ii) z and y axis.
19. The mirror assembly according to any of the claims 15-18 wherein the enclosure includes substantially identical top and bottom caps, each said bottom and top cap including a travel stop that limits movement of the mirror in the vertical direction .
20. The mirror assembly according to claim 15 further comprising a bottom cap and top cap that includes a separate travel stop that limit diagonal movement of the mirror in a particular direction.
21. A mirror assembly, comprising:
a mirror including:
a mirror support structure;
a pair of T-shaped hinges coupled to the mirror support structure; and a mirrored plate coupled to the T-shaped hinges, the mirrored plate including: one or more travel stops for limiting movement of the mirrored plate; a top cap coupled to one side of the mirror, the top cap including:
a top cap support structure including: an opening for permitting light to reflect off of the mirrored plate; and one or more travel stops coupled to the top cap support structure for limiting movement of the mirrored plate; and a bottom cap coupled to another side of the mirror, the bottom cap including:
a bottom cap support structure including an opening; and one or more travel stops coupled to the bottom cap support structure for limiting movement of the mirrored plate.
a mirror including:
a mirror support structure;
a pair of T-shaped hinges coupled to the mirror support structure; and a mirrored plate coupled to the T-shaped hinges, the mirrored plate including: one or more travel stops for limiting movement of the mirrored plate; a top cap coupled to one side of the mirror, the top cap including:
a top cap support structure including: an opening for permitting light to reflect off of the mirrored plate; and one or more travel stops coupled to the top cap support structure for limiting movement of the mirrored plate; and a bottom cap coupled to another side of the mirror, the bottom cap including:
a bottom cap support structure including an opening; and one or more travel stops coupled to the bottom cap support structure for limiting movement of the mirrored plate.
22. The mirror assembly of claim 21, wherein each T-shaped hinge includes:
a translational spring constant; and a rotational spring constant;
wherein the translational spring constant is decoupled from the rotational spring constant.
a translational spring constant; and a rotational spring constant;
wherein the translational spring constant is decoupled from the rotational spring constant.
23. The mirror assembly of claim 21, wherein the mirror support structure comprises an opening that includes a pair of oppositely positioned cut-outs.
24. The mirror assembly of claim 23, wherein the spacing between the edges of the opening and the mirrored plate ranges from about 60 to 100 microns.
25. The mirror assembly of claim 21, wherein the pair of T-shaped hinges include:
a top T-shaped hinge; and a bottom T-shaped hinge positioned in opposing relation to the top T-shaped hinge.
a top T-shaped hinge; and a bottom T-shaped hinge positioned in opposing relation to the top T-shaped hinge.
26. The mirror assembly of claim 21, wherein the mirrored plate includes:
a plate member including a first side and a second side;
a reflective surface coupled to the first side of the plate member;
a cavity formed in the second side of the plate member; and a pair of travel stops coupled to the second side of the plate member.
a plate member including a first side and a second side;
a reflective surface coupled to the first side of the plate member;
a cavity formed in the second side of the plate member; and a pair of travel stops coupled to the second side of the plate member.
27. The mirror assembly of claim 26, wherein the travel stops are positioned in the plane of the plate member.
28. The mirror assembly of claim 27, wherein the travel stops have a length ranging from about 900 to 1100 microns.
29. The mirror assembly of claim 26, wherein the travel stops have a thickness ranging from about 250-350 microns.
30. The mirror assembly of claim 21, wherein each T-shaped hinge includes:
a first member; and a second member coupled to the first member.
a first member; and a second member coupled to the first member.
31. The mirror assembly of claim 30, wherein the first and second members are substantially orthogonal.
32. The mirror assembly of claim 30, wherein the length and diameter of the first member ranges from about 2200 to 2500 microns and 15 to 25 microns.
33. The mirror assembly of claim 30, wherein the length and diameter of the second member ranges from about 800 to 1000 microns and 8 to 15 microns.
34. The mirror assembly of claim 21, wherein each T-shaped hinge provides a torsional spring constant.
35. The mirror assembly of claim 34, wherein the spring constant ranges from about 2x10-8 to 10x10-8 lbf/radian.
36. The mirror assembly of claim 21, wherein the top cap travel stops are positioned in the plane of the top cap support structure.
37. The mirror assembly of claim 21, wherein the thickness of the top cap travel stops are less than the thickness of the top cap support structure.
38. The mirror assembly of claim 21, wherein the opening in the top cap support structure includes a pair of oppositely positioned cut-outs.
39. The mirror assembly of claim 38, wherein the cut-outs include tapered walls.
40. The mirror assembly of claim 39, wherein the taper angle of the tapered walls ranges from about 50 to 60 degrees.
41. The mirror assembly of claim 21, wherein the top cap opening includes tapered walls.
42. The mirror assembly of claim 41, wherein the taper angle of the tapered walls ranges from about 50 to 60 degrees.
43. The mirror assembly of claim 21, wherein the bottom cap travel stops are positioned in the plane of the bottom cap support structure.
44. The mirror assembly of claim 21, wherein the thickness of the bottom cap travel stops are less than the thickness of the bottom cap support structure.
45. The mirror assembly of claim 21, wherein the bottom cap opening includes tapered walls.
46. The mirror assembly of claim 45, wherein the taper angle of the tapered walls ranges from about 50 to 60 degrees.
47. The mirror assembly of claim 21, further including a base member coupled to the bottom cap.
48. The mirror assembly of claim 47, wherein the base member includes one or more drive pads for actuating the mirrored plate.
49. The mirror assembly of claim 47, wherein the base member includes one or more sensing members for sensing the position of the mirrored plate.
50. The mirror assembly of claim 21, wherein the bottom cap further includes one or more support members for supporting the mirrored plate during the manufacturing process.
51. The mirror assembly of claim 21, wherein the length of the top cap travel stops ranges from about 2000 to 2500 microns.
52. The mirror assembly of claim 21, wherein the top cap travel stops have a thickness ranging from about 350 to 380 microns.
53. The mirror assembly of claim 21, wherein the length of the bottom cap travel stops ranges from about 2000 to 2500 microns.
54. The mirror assembly of claim 21, wherein the bottom cap travel stops have a thickness ranging from about 350 to 380 microns.
55. The mirror assembly of claim 21, wherein one or more of the T-shaped hinges include:
a first member; and a second member coupled to the first member;
wherein the second member is one of (i) serpentine, (ii) offset from the center of the first member; and (iii) intersects the first member at an acute angle.
a first member; and a second member coupled to the first member;
wherein the second member is one of (i) serpentine, (ii) offset from the center of the first member; and (iii) intersects the first member at an acute angle.
56. A method of resiliently supporting a mass in a housing, comprising:
limiting translational movement of the mass in the X, Y and Z
directions; and limiting rotational movement of the mass.
limiting translational movement of the mass in the X, Y and Z
directions; and limiting rotational movement of the mass.
57. The method of claim 56, wherein the housing and mass are fabricated by a process including micro-machining a substrate.
58. The method of claim 56, further including:
limiting movement of the mass when it is rotated from a rest position.
limiting movement of the mass when it is rotated from a rest position.
59. The method of claim 58, wherein limiting movement of the mass when it is rotated from a rest position includes limiting translation of the mass when it is rotated from the rest position.
60. An apparatus, comprising:
a housing; and a mass resiliently coupled to the housing, the mass including one or more travel stops for limiting rotational and translational movement of the mass.
a housing; and a mass resiliently coupled to the housing, the mass including one or more travel stops for limiting rotational and translational movement of the mass.
61. The apparatus of claim 60, wherein the housing includes an opening for receiving the mass; and wherein the opening limits the translational movement of the mass.
62. The apparatus of claim 60, further including:
a top cap coupled to the top of the housing; and a bottom cap coupled to the bottom of the housing;
wherein the top and bottom caps limit movement of the mass when it is rotated out of its rest position within the housing.
a top cap coupled to the top of the housing; and a bottom cap coupled to the bottom of the housing;
wherein the top and bottom caps limit movement of the mass when it is rotated out of its rest position within the housing.
63. The apparatus of claim 62, wherein the top and bottom caps includes cutouts.
64. The apparatus of claim 63, wherein each cutout includes tapered side walls.
65. The apparatus of claim 64, wherein the tapered side walls are rotated from the vertical direction at an angle ranging from about 15 to 45 degrees.
66. An apparatus, comprising:
a housing including an opening, the opening including one or more cutouts; and a reflective surface resiliently coupled to the housing.
a housing including an opening, the opening including one or more cutouts; and a reflective surface resiliently coupled to the housing.
67. The apparatus of claim 66, wherein each cutout includes tapered side walls.
68. The apparatus of claim 67, wherein the tapered side walls are rotated from the vertical direction at an angle ranging from about 15 to 45 degrees.
69. The apparatus of claim 66, wherein the housing and reflective surface are fabricated by a process including micromachining a substrate.
70. A method of reflecting rays of light, comprising:
providing a reflective surface; and providing an optical pathway for accessing the reflective surface including one or more cutouts for minimizing clipping of the incident and reflected light rays.
providing a reflective surface; and providing an optical pathway for accessing the reflective surface including one or more cutouts for minimizing clipping of the incident and reflected light rays.
71. The method of claim 70, wherein the optical pathway includes sidewalls that are rotated from the vertical direction at an angle ranging from about 15 to 45 degrees.
72. The method of claim 70, wherein the optical pathway and reflective surface are fabricated by a process including micro-machining a substrate.
73. A mirror assembly, comprising:
a support structure;
a pair of T-shaped hinges coupled to the support structure; and a mirrored plate coupled to the T-shaped hinges, the mirrored plate including:
one or more travel stops for limiting movement of the mirrored plate.
a support structure;
a pair of T-shaped hinges coupled to the support structure; and a mirrored plate coupled to the T-shaped hinges, the mirrored plate including:
one or more travel stops for limiting movement of the mirrored plate.
74. The mirror assembly of claim 73, wherein each T-shaped hinge includes:
a translational spring constant; and a rotational spring constant; wherein the translational spring constant is decoupled from the rotational spring constant.
a translational spring constant; and a rotational spring constant; wherein the translational spring constant is decoupled from the rotational spring constant.
75. The mirror assembly of claim 73, wherein the mirror support structure includes:
a top support member;
a bottom support member;
a right side support member; and a left side support member.
a top support member;
a bottom support member;
a right side support member; and a left side support member.
76. The mirror assembly of claim 73, wherein the mirror support structure includes an opening.
77. The mirror assembly of claim 76, wherein the opening includes a pair of oppositely positioned cut-outs.
78. The mirror assembly of claim 76, wherein the opening is complementary shaped with respect to the mirrored plate.
79. The mirror assembly of claim 78, wherein the spacing between the edges of the opening and the mirrored plate ranges from about 60 to 100 microns.
80. The mirror assembly of claim 73, wherein the pair of T-shaped hinges include:
a top T-shaped hinge; and a bottom T-shaped hinge positioned in opposing relation to the top T-shaped hinge.
a top T-shaped hinge; and a bottom T-shaped hinge positioned in opposing relation to the top T-shaped hinge.
81. The mirror assembly of claim 73, wherein the mirrored plate includes:
a plate member including a first side and a second side;
a reflective surface coupled to the first side of the plate member;
a cavity formed in the second side of the plate member; and a pair of travel stops coupled to the second side of the plate member.
a plate member including a first side and a second side;
a reflective surface coupled to the first side of the plate member;
a cavity formed in the second side of the plate member; and a pair of travel stops coupled to the second side of the plate member.
82. The mirror assembly of claim 81, wherein the cavity includes a V-shaped cross section.
83. The mirror assembly of claim 73, wherein the mirrored plate includes:
a plate member; and one or more travel stops extending from the plate member.
a plate member; and one or more travel stops extending from the plate member.
84. The mirror assembly of claim 83, wherein the travel stops are positioned in the plane of the plate member.
85. The mirror assembly of claim 84, wherein the travel stops have a length ranging from about 900 to 1100 microns.
86. The mirror assembly of claim 83, wherein the travel stops have a thickness ranging from about 250-350 microns.
87. The mirror assembly of claim 83, wherein the travel stops extend from the plane of the plate member.
88. The mirror assembly of claim 87, wherein the travel stops have a length ranging from about 200 to 250 microns.
89. The mirror assembly of claim 73, wherein the mirrored plate includes:
a plate member; and a plurality of travel stops extending from the plate member.
a plate member; and a plurality of travel stops extending from the plate member.
90. The mirror assembly of claim 89, wherein at least one of the travel stops in positioned in the plane of the plate member and at least one of the travel stops extends from the plane of the plate member.
91. The mirror assembly of claim 73, wherein each T-shaped hinge includes:
a first member; and a second member coupled to the first member.
a first member; and a second member coupled to the first member.
92. The mirror assembly of claim 91, wherein the first and second members are substantially orthogonal.
93. The mirror assembly of claim 91, wherein the length and diameter of the first member ranges from about 2200 to 2500 microns and 15 to 25 microns.
94. The mirror assembly of claim 91, wherein the length and diameter of the second member ranges from about 800 to 1000 microns and 8 to 15 microns.
95. The mirror assembly of claim 73, wherein each T-shaped hinge provides a torsional spring.
96. The mirror assembly of claim 95, wherein the spring constant ranges from about 2x1~-' to 1~x~~-8 Ibf/radian.
97. The mirror assembly of claim 73, wherein one or more of the T-shaped hinges include:
a first member; and a second member coupled to the first member;
wherein the second member is perpendicular to the first member.
a first member; and a second member coupled to the first member;
wherein the second member is perpendicular to the first member.
98. The mirror assembly of claim 73, wherein one or more of the T-shaped hinges include:
a first member; and a second member coupled to the first member;
wherein the second member is serpentine.
a first member; and a second member coupled to the first member;
wherein the second member is serpentine.
99. The mirror assembly of claim 73, wherein one or more of the T-shaped hinges include:
a first member; and a second member coupled to the first member; wherein the second member is offset from the center of the first member.
a first member; and a second member coupled to the first member; wherein the second member is offset from the center of the first member.
100. The mirror assembly of claim 73, wherein one or more of the T-shaped hinges include:
a first member; and a second member coupled to the first member; wherein the second member intersects the first member at an acute angle.
a first member; and a second member coupled to the first member; wherein the second member intersects the first member at an acute angle.
101. An apparatus, comprising:
a housing;
a mass; and one or more springs for coupling the mass to the housing, each spring including:
a rotational spring constant; and a translational spring constant;
wherein the rotational spring constant is decoupled from the translational spring constant.
a housing;
a mass; and one or more springs for coupling the mass to the housing, each spring including:
a rotational spring constant; and a translational spring constant;
wherein the rotational spring constant is decoupled from the translational spring constant.
102. The apparatus of claim 101, wherein the springs are fabricated by a process including micro-machining a substrate.
103. The apparatus of claim 101, wherein the housing, mass and springs are fabricated by a process including micro-machining a substrate.
104. The apparatus of claim 101, wherein each spring comprises a plurality of springs.
105. The apparatus of claim 101, wherein each spring is T-shaped.
106. The apparatus of claim 101, further including:
a top cap coupled to the top of the housing including a top cap cutout; and a bottom cap coupled to the bottom of the housing including a bottom cap cutout;
wherein the top and bottom cap cutouts limit movement of the mass when the mass is rotated away from its rest position.
a top cap coupled to the top of the housing including a top cap cutout; and a bottom cap coupled to the bottom of the housing including a bottom cap cutout;
wherein the top and bottom cap cutouts limit movement of the mass when the mass is rotated away from its rest position.
107. The apparatus of claim 106, wherein each cutout includes tapered side walls.
108. The apparatus of claim 107, wherein the tapered side walls are rotated from the vertical direction at an angle ranging from about 15 to 45 degrees.
109. A method of resiliently supporting a mass in a housing, comprising:
coupling the mass to the housing using one or more springs having translational spring constants and rotational spring constants; and decoupling the translational spring constants from the rotational spring constants.
coupling the mass to the housing using one or more springs having translational spring constants and rotational spring constants; and decoupling the translational spring constants from the rotational spring constants.
110. The method of claim 109, wherein the springs are fabricated by a process including micro-machining a substrate.
111. The method of claim 109, wherein the housing, mass and springs are fabricated by a process including micromachining a substrate.
112. The method of claim 109, wherein each spring comprises a plurality of springs.
113. The method of claim 109, wherein each spring is T-shaped.
114. The method of claim 109, further including:
limiting movement of the mass when it is rotated from a rest position.
limiting movement of the mass when it is rotated from a rest position.
115. The method of claim 114, wherein limiting movement of the mass when it is rotated from a rest position includes limiting translation of the mass when it is rotated from the rest position.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/352,835 | 1999-07-13 | ||
| US09/352,835 US6315423B1 (en) | 1999-07-13 | 1999-07-13 | Micro machined mirror |
| PCT/US2000/018998 WO2001004680A1 (en) | 1999-07-13 | 2000-07-13 | Micro-machined mirror device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2378736A1 true CA2378736A1 (en) | 2001-01-18 |
| CA2378736C CA2378736C (en) | 2010-03-23 |
Family
ID=23386711
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2378736A Expired - Lifetime CA2378736C (en) | 1999-07-13 | 2000-07-13 | Micro-machined mirror device |
Country Status (9)
| Country | Link |
|---|---|
| US (2) | US6315423B1 (en) |
| EP (1) | EP1200865B1 (en) |
| JP (1) | JP2003527621A (en) |
| AT (1) | ATE400831T1 (en) |
| AU (1) | AU6091100A (en) |
| CA (1) | CA2378736C (en) |
| DE (1) | DE60039432D1 (en) |
| NO (1) | NO326146B1 (en) |
| WO (1) | WO2001004680A1 (en) |
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- 1999-07-13 US US09/352,835 patent/US6315423B1/en not_active Expired - Lifetime
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- 2000-07-13 CA CA2378736A patent/CA2378736C/en not_active Expired - Lifetime
- 2000-07-13 DE DE60039432T patent/DE60039432D1/en not_active Expired - Lifetime
- 2000-07-13 EP EP00947273A patent/EP1200865B1/en not_active Expired - Lifetime
- 2000-07-13 JP JP2001510032A patent/JP2003527621A/en active Pending
- 2000-07-13 AT AT00947273T patent/ATE400831T1/en not_active IP Right Cessation
- 2000-07-13 AU AU60911/00A patent/AU6091100A/en not_active Abandoned
- 2000-07-13 WO PCT/US2000/018998 patent/WO2001004680A1/en active Application Filing
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2001
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2002
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| JP2003527621A (en) | 2003-09-16 |
| CA2378736C (en) | 2010-03-23 |
| NO20020140L (en) | 2002-03-12 |
| NO326146B1 (en) | 2008-10-06 |
| EP1200865A4 (en) | 2004-04-28 |
| EP1200865B1 (en) | 2008-07-09 |
| WO2001004680A1 (en) | 2001-01-18 |
| NO20020140D0 (en) | 2002-01-11 |
| EP1200865A1 (en) | 2002-05-02 |
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