CA2467714C - Low-e coating with high visible transmission - Google Patents

Abstract

Coated articles are provided with an anti-reflection system (s) which enables high visible transmission and/or low visible reflection. Neutral color is also achievable in certain example embodiments. In certain example embodiments, the anti-reflection system(s) is used in conjunction with a double silver (Ag) layer stack which provides low sheet resistance and/or emissivity.

Description

'I'I'I'I.,E OF TI-iF,INVENTIC)N

LOW-E COATING WITH HIGH VTS1R1.1=: TRANSMISSION
RP.I,ATED r1PPLtC'ATIC)N

1Q0011 'I'his application is relatzd U.S. Patcnl No. 6,576,349.
Bi\C'KGROLJh[) AND SU1vtiMARY OF THE iNVh.N'1'1ON
100021 U.S. Patent No. 6,576,349 (liscloses coateii arricles having the following layer stack, as shown in Fignire 1 he-rein, li=oni lhe glass substra(e c>utwarclly:

Tablc 1: Lxairiple Materials:Thie:I:nesses l.a.yer r'referred Kanbe (;~) More Preferred (r~) Fxaniple (A) S ubstr.rl.e (1-10 ntni ) TiO, 0-400 ~ 5()-250 A 10() A
Si,N00-400 A 50-2 50 A 170 NiCrO, 5-100 A I 0-50 A 18 A
Ag 5Q-25() A )i()-12i) A 105 t~
NiCr(J55-100 .~ 11)-50 A 1 GA

SnC)7 0-SO0 ~ 500-850 A 650 A
tii,N.; 0-mA 50-250 X 170 A
NiC:rG5~-100 A ]0-5(7 A 1 Ag 510-250 A 80-120A 1{)5 n Ni(:r(.), 5-100 A rU-50 /~ I
SnO- 0-51)0rA 1O(? 3(?(1 15(1 A
SiaN4 , 0_5{}0 A 1O0-,(l(1 A 5 U !\

1O(3031 tn other cmbodirncnts of09r794,224. the bottom littmiitm oxide }ay4r inay he removect or replaced with a ciiicon nitride layer.

100041 While t.he aRxesaid cottlod articlcs dcscribe.d in U.S. Patent No.
6,576349 provieie guod color, an(i got)d ultrav iolet (i_f V) ancUor infrarect (I R) rctlection, incrca5ecl vi.vible transmission and!or rerlncerj vicihte reflection ta/oufd sometimc:s be dcsirahle.

100051 Noiitrnl color is also desirable l<rr coated articles in certain applications, Many conventional methods of maki ng color of a coated article more neutral rosult io decrcascd visible transmi;sinn and/or increased visible r-el7ection.
Ncretofore, it has been (li}licrilt to increase visible transrnission and reduce visibie reflection, while at tlte ,ame tirne proc-iciin.g or maintaining rather neutral color and satisfactory solar control or thermal characteristics. Whether a color is "neutral" or not ia su1jata.ive, and is a liinction of persortal t<astc. Hovvevcr, generally s(x;ttkino.
color tnoving toward a ncutrZa ct'>lor tar~et {c.t~., a-0, b* 0, or sonlc otber neuiral color tartsct such as transrniss)vc a*=-2 and transrnissiti-e b*=-3.4) is ricsireci, alihough such targets do not have to he ntet in af) embociime.nts of this invention.

[0006J In vic,w of tlie above, it is arr ohjecl crf cerl,tin embodiments of this invcntiou to provida a solar corttrolling coated article (i.e., an article indudinr at Icast orie and preferttbly two or more }aycrs such as Ag and'or Att for rellecling I1Z and"'or l; V) l.tavine increased visibte transmis,ion and/or raducecl visible reflectance. In c.ertrtin example non-ditniting emhociiinerits of tbis invcntion, it is an object tu cornbine strch high visible trantintission and;'or t-etittccd visible re[1e.etion witlt ncutral color of the coatc.d articie. rllternatively, the usc of ati improved anti-reflection laycr(s) s}'stent(s) tnav enable coatings to have or uliliie morc robust contact fayc.r(s) (e.g., thickar for better durability) and; or thicker ,ilver (Ag) layer(s) (i.e., improved thertnal pcrlrnmance) while maintaining similar fransmission characlcristies if increased transmission is not a most desired fealure (c.~=.. if dnrabilitv is a rnost desired lealure).

E00071 Aouthcr object of this inve.rition is to litl lill one or more ol'the ahovc-listed objects andlor nce.cl.s.

2 BKIFT DESCRIPTION OF THE llRAWINCiS

J41008J I'IGURE. I is a cross sectional view of a coated article accordint; to an etnbodinsenl ofthis invcrttion, as disclosctl iri U.S. Yatent No. 6,576,349.

100091 FIC;I iRF. 2 is a cross scction<al view of a coatcd article according lo an eniborlirncnt of this invcntion.

100101 FIGURI: 3 is a cross sCction<}l viCw ofa coatcd article ,iccording to anolher t;tnboditne=nt of lhis inventinn.

JOOl11 FIGUR(' 4 is a cross sectional view ol'tr coated article rlccordind lo another etnbodintent oFthis iiiveution.

j00121 FIC}i)R F: 5 is a c.ross sectional view of a coated article according to another emboditncnt of lhis invention.

100131 Ui(iURF: 6 is a cross scctional view ofa coalcd article according fo anoiher embolinient of this invention.

1011141 1'I(iURE 7 is a cross sectional view of a c-oated article according to anothcr embodiment of thi; invention.

[001SJ FIGURE K is a cross sectional view of a coated atlicic uccording to another enibodintent of this invention_ 100161 PI(3[ iRF: 9 is a cross sectional view ol'a coatcd article accorchng to anotiiea- etnbodirnent ot' this invention.

[(t037J 1'ICiURE 10 is a cros~ s~:ctional view ot'a coated articlc accordim.;
to another etnbodimeni of this itivention.

JOoIsl Fl(i[.iltl_{ I I is a cross sectional view cr1'a coated zrtic-lc accortling to anothcr embodiment oPthis irrventiun.

~OOl9J I16 1112F. 12 is a cross sectional view of a coated article acwrdt.nk to ;~nother emlioiliment of this invention.

1t1(1201 1- I(iURf: 13 is a cross sectional viev.~ ofa coated article accordittg to another cmbodinieni of this invcntion.

100211 FIGI;RF 14 is a cross suct'iottal >>ie4v ctf;t coo-rfcd artich.
according ltt anotherembotlinientofthis invetitioti.

100221 NIGURE 13- is a cross sectional view of a coaled article according to another e.tnhodiment of tltis inventiort.

100231 FIGURE 16 is a cross sectional vie~c- ofa coated article accordinb to another crnboditiient o1'this invcrrtion.

r00241 FIGURr 17 is a cro-s sectional vievv of tt coated arlicte ac:cordinl;
to another ctnbot']iment of this inverttion.

Di-:'TAii.Fn DF.SC'RII3IION OF I:XAM PLL T:MBODI1vtP-NTS OF 'l I lE
INVE:''FION
100251 T3te instant invention relatis to coated arlicles which may be used in applications inciuding but not.limited to in5ulatina glass (1(-;) window units, tnonolilhic windows, skyligltt windows, atrtdror any otltcr type of window, Coated articles according ti> this invention incSude an inlproved anti-retlection laycr(s) systetn for reducinc visible reflectance iFndlor increasina visib]o transmission in cottled articlcs that hrovitie solar control (e.g., I.R and;or U V retlection) fitnclionality.
Surprisingly. in ccr=tain example embodiments it has bccn found that certain anti-reilection layer(ti) systems ofthe instartt invention can both: (a) improve visiblc transmission arnllor re(ittc:e visible reflcclancc, while at t}te same time (b) achiev-irtb ati acceotatblc ncutrttl color ol'the resulting coaled Ln-ticte. 100261 Pig. 2 is a cross sectional view of a coated ar'ticle accordin,t'' to an embodinicnt ot this invention. 'I1tc- coated articlc Of F ig_ ?, likc all othcr coated artic.les herein, mny he used in any of tlue aforesttid applications (e,g., aErchitcctttral windows, ctc.). lhe coated article of Fi~. 2 inc-ludcs tioun the blasa 5ubstrato outwardly (tll indices of refraction "n" at tl nrn):

~l~ss(n 1.71i tilaniuni oxidc(c.(;._ 'CiO,) (n-2.t to2.7, pref~rttbtyn 2.4 w2.(i5) niclcel chron~iinrt-u.~idc (NiCrO,.) silvCr (AL) nickcl-chromium-o3ick (NiC'rO,) titanium oxi(le TiO,) (n ?. ! to 2.7, pre(erably n-2A to ?.65) tin ozide (e.g., SnO2) (n_1.8 to 2.2, preferably n-2.0) nickel-chroniiunt-oxide (NiCrO,) sik=cr 0g) nickel-cht-orniuni-oxide (~iCrO,~) titaniam oxidc (c.,,., TiO2) (11=2.1 to 2.7, prefcrably n 2.4 Io 2.05) tiu oxide. (a.b., Sn0-,) (n=1.8 to 2.2, profci-ahly n-2.0) silicin oxide SiO2) (n=1.4 to 1.7, prcfcrahly rr-1.45) air (n-1.1)) 100271 As shown in hig_ 2, the confact layers (i.e., NiC'.rO,, layors) surround anci contact the IR rellecting iyg layers. Thc NiC'rO, layers herein arc called "contact"
letyers because thcy cach contact an 11Z rellecling layer (i.e.. an Ag layer).
-1 he Ni('rO, contact laycrs tn-oviclc the inosl immediatc chemical protection for tho Ag layer, and also serve as adhesion and/or nucleation layers. Thc conlact layers nlay or may not be oxiciation graded as descrihcd U.S. Patent No. 6,576,349, in different embodiments of this invention. Moreover, instead of NiCrO,Y, one er tnore of the cocitact layers may bc ol'or ittcludc other niaterial(s) includinrt but not itiniited to NiC'r, Ni('rN,, Ni('rO,NY, 7n(.),A1i0~, TiO,, "/.nAIOõ Ni, Cr, C:rN,,, AiO"
Nbt)õ any cotnbination thcrcol'. ,lnci/tx the like. Moreover, in any ernbodirnenl hercin, ntaterials such as (itaniutn oxicle ortiiubitttn oXide couEd cven servc as to1) contact laycrs (i.e..
above Ag tay'crls)), in addition to dielec[rics hcrcin. F.xample thicknesses of the conlact laycrs, and othcr layers tierein, are discusseci above in thc l3ackoround and Summttry se.ction of tilis application. The above ah;ilie~ tc, con(acl layers in thc Fig.
1-17 e.mboclimen{s.

1002131 Inslcad ot :~~-r, other metallic lIt rcllcctin<,, tiiateri<ils Au, A,-, alloy,, Au afi~~ys, ctc.) inay ho uscd Por one or mc,Ee: oilhe Ilt refiectir,g layers (this applies to 1hc; Fi1;. i -]7 emhodiments). I he thicknetis o1'the nnetrallic t\e, laycrs (1R

retlccttng layers) is choserr in order to achieve (he de.sired thcrnral lierfirrnrance (see exrurtpie tltick.nes> rtinge; above). For mntpic, (he ,1g layer nlav he fi-oni about 50-250 A thick, in orcle'r to achie~-e sheet resistance f RS) ('hefore andfor aPtcr heat treatment) of less than or equal to 10.0 ohms-square, mor-e prePer.rbly le,s rhan or equal to 8.0 ohm;:'squarc, even mtrre preferably icss than or equal to 5.0 ohmsisyuare, and most prcl'crabiy less than or equai to 4.0 ohms;sduare. In a similar manner, tiae Ag hryer(s) thicknetis(cs) are chc7<cn so that thc c-oatinl; (or etsated articlc;} has a normal emissivity (E,,) of no 2,reatcr than 0.05, rnure prelerably no ~,r,rc=atur than 0.06, ancf most prclerah(y no grcater (hatt 0.05 (before and/or after heat treatment). The alorctiaict cmis~iviry and shect resi.stance chauacterislics apply to the Fig.

ernhoclinzents.

[00291 1'he I R reflecUng anci contact layers of the Fig. 2 coatinE
(and the Fiu,.

3-17 coatings) arc discussed in U.ti, Patent No. 6,576,349, and are not disctissod herein ior reascros of,irnplicity. See the thicknesses!matcrials described in U.S.
Patetit No. 6,576,349 in this rcaard. The locus iicrcin lies vvitlt the prUvision of dielectric layers which M c uti[izcd in order to: (a) increase visib(e transmission, (0) ciecrease visible reflection glass side), and!'or (c) provide neutral color.
With respect to the Fig. ? emhodirnent in particular, it will be shown below that the dielectric layern u~ed thcrein (eomparcd to in lig. 1) result in asigriificant increase in visible transmision conibine(i with a d.ec:rcasc in visible i-ctlectauc.e (glass aircL'or film sicle). '1'his is benelicial.

11)031)1 lt can be seen that the Fig, 2 embodimcnt of this invention differs tl=om I in that (a) the lwttom silicorr nitride layer trom Fig. I has been rernovcd_ (b) a titaniun oxide (ayer has been added in the tiiiddlo portion M, (c) the ririddle sihcorr nitride layer liuin Fig, I has been rernovcd, (d) titaniutn vxide and silicon oxide layers have been added uo the top portion T oPttre coating in Fil;. 2, and (e) the tol~ silicon nitride layer livin Fit;. I has been removcd. By using siiicon oxide (i.c., stoichiometrir. SiO,, or alternatively a non-suoichiuntctric torm) over thc top tin oxide ILiyci-, and by utilizint, the ti(sini1nn osid,~ (i.e.. stoichiometric'1'iO,, or ~'rlternm(ively a non-stnichiometric ti>t~m snclt as 'Fi(.)? ;o-} r)) layers a, illustratcd, the cvatint_,, (lavcr systern) can be charac.terizet'1 by the top dielectric portion'1' havin,gan eftective iiudex of ref'ractiotl n Icss than that of n'tiddle dielectric portion M, which in turn has an ei7ec:tivc inclcx of refi-actiort n less than that of tttc hottam diclcctric tx3rt.ion B (sce hio. 2). 1n olher words, nt'n,ti ~nt~, rvhcre ni is 11te elti;ctivc intlex ofrefractioti oClhc top (iiLlectric portion "1', n?,.t is the effec:live index of reti=actiim of the middle (lielectric portion M, and nis i5 the effectivc in(lex of reli-action of the lluttorn tliclecfric porlioit B(tlie "cftective" index may be calculated as a weighled average (if Ihn pot-tion, or by any olhar suitable techniqtte; mctho(t). As ~hvwn in Fig. 2, each of tlre top, middle an(i bottorn dieleclric portions T, M and B, respcctively, can inclttdo a pluralily of differentdielectric lavets, althousih in alternative e+nbodiments any or a11 ofthese purtiana nced ouly inetude a single diclectric laycr.

100311 By gradually decrzasing the respeetive et'lective indices of refi'action "n" froni the innennust or bottom dieiec.tric portion B, to the middle dielectric portion IVI.. and on lo the top dielectric portion T toward tlie air, the anti-relleclion systetn of Fig. 2 enableti increased visible transmission and.k,ir reduced visible re.llection to be ac-hieved. Sutprisinbly, as wilt be shown below in the Examples of Ihis enilx-dirnerit, the anti-retlecticm :tiystenr also cnahles tairly ncutral color ot'the coated ai-ticle.
Llur-euver, in cCt7aln exatnple emllodnlierits of this 3nvCzltaon, n t=-- 2Ø
f h(; stlrcotl oxide layers herein may he fiorn about 10-700 A ihick in ceitaitt example ernhtui,ime-nts of this inv-cntion, more preferably front 20-600 A thick, and mo9t preferahly tium 50-500 A thick. Upper lin oxide layers hereitl (i.e-, in tup portion T
above Ãhe lop IR rettecting layer) m;:ty be fronl about 1(1-700 A thick in certain exa-nplc emho(linients of this invention, niot-c preterably ti-om 20-600 A
thick, and most p,re('erahiy frotn 40-400 A thick. Upper tit.tanium oxide layers herein (i.o., in fop portion T ahove the, tiil-i IR rt,7leclini., laycr) niay he Prom about 10-500 A thick in certain exaniple enthodimenls of this invention, inorc preferabfy from 40-3U0 A tliick.
I~lidille tilanium oridc laycrs hc:rein (i.c., in tniddlc portion M be.lween 1he fR
rellect.ing layers) niay' be fr'om about 10-900 A thiek in certain exarnple emhoditnrnts of ttiis invcnlion, niore preferahly hrotu 50-700 A thic-k. 13ottonl titatnittnt oxide layers llercin (i.e., in ho(toni portion B hclow the lower Ilt reflecting layer) may ht:e thicktlessc-s as discusscd irt U.S. Patent No. 6,576,349.

10032J As with all etnbudinzents herein, itlc illustrated layers are preferably depositeclltonrtecl .-ia sntttteritl;l (see the Examples in U.S. Patcnt No.
6.576,349), althou~il other tlcposition tccllniques may certainly he used in alternative embodiments of this invention.

EXA1V1P1.14(S) OF FIG. 2 F.Iv1SODI1vTEN-1' (0b331 The Tahlos below illustrate LxarnPle 1 ofllle Fig. 2 ombodiment, which are to bo compared to a. C.otnparati.ve Example(s) (C:L=) similar to Fig. I of the irlstant application. lhuti, fhe CF relates to a coating tllat is similar to that illustratod in U.S. Patent No. 6,576, 349. For tlie si.lrlttlation ctiamples herein, the lollovving indices of refraction were assutncd at 550 nm: for glass, n-1.5 t; Air Si.;N.l, a-2_0; for SiO,N, n 1.72; 1orSi0), n-1.45; for SnU-, n 2.0: lor Nh,O;, n=2.33: for SiZrl'7,, n-2.32; and for'CiUz. n-2.57 (note: appruxim;itely stoiclliomctric titculium oxicfe was assunlcd in all sinlulations ]lorcin). TJte lhicknesscs for c<lch of the laycrs in t1T e First Table ho(ow are in angstroms (A). The Second fablo bclow sets fixth thc optical characterisiic.ti (e.tt., visible transniis,ion, cc lor, etc. for the I::aniple(s) and C[? based upon heinb annealecl antl in n.tonolithic fixm. All glass substrates were the=
J:unc with respect to thickness ancl cnlor_ ',T'.he lolall die3cc.tric harl.nieter simply adds up the total tllicktless oP all dietectric laycrs in the coating (i.e:, does not include Ag or Ni(-:rO,, layers).

100341 It is noted that the examplcs ancl comparative example; (CEs) herein ntiliretl nlore oxided NICa'O,; layers than did the uxarnplo5 in I.J.S. Patent No.
6,576,349 application (this explains why the comparative ex8lllpleS I10rcin, in nlonolithic rton-hCat-trealed fnrm, have higher vitiihle transmission than monolithic non-llr,ttt treated products in t!.ti. Patent No. 6,570,349}. Elowever, this clistinction is not relevani because ali, Ni(:rOx l,lyers hcrcin %ve;re: a~.,wrted to have tht~ sanle aniourtt of oxidation, so that the comparisons llereirl hetween tlie C'E-5 and the f:xvllples are consistcrlt. It is also nc,ted thal iite incfices ictr all Ag and NiC'rf)ti 1ay01_s M-e sl.,swnccl to he the same (ilr all such layer,; in the Fxannples and the (; Ls herein.
T'or optical llerfornlttnce visibie transmissiun), each of thc paranl4te-rs in the 1ahtes hclow is witil re-pect to 111. C, 2 de,?rce ohserver. No ex;lmple herc.in tia-cls considered heat trcated.

FTRtiI"1'ABI.I=.: I.AYFR STRI:I'Tl.n2F: - Ihickne::ses (b'iL:. 2 embadirnent) C F.= Lx. 1 CrL7SS

TIC), 125A 285A
165A 4.1 NiC'r(.) tRil ixA
AL 9;iA 98A
NiC'r0, 16A I6r\
ii0, 0A ti 1 Sit SnCh 672A 7A
Si.jNa 165A 0A
Ni<'rC?118A IStk Ag 98A z)xA
N i C:rC), l 61l L 6tA
'1102 OA 2 i0rl tinC), 227xi 45A

i;N4 Si()xNy UA (}A_ 5i(), 0.'1 35o A

'I'otal diel: 1606A i 5fi3 A SECOND TABLE: Ol'TlC'AI. I'F.RF'ORNIANC1:: 4Fig.
2 enthodinwnt; trtonoiitltic) 7, a*. b*i rtz~ia,,; ki;;i t" b*t; K Ir. h i Fx. f: 79.? %i~ 0.7 U.i 4.~7~'0 4.6 - 1.<) i 3 11 q CE: 75.5",i0 -2.1 0.2 5.9 ~0 9.2 -10.6 5.2'lo -1.E) (()O35( It can be secn fronti the 1'ahles above regardin, (he Fig. 2 cnlbaditvent of'this irtvention, that the anti-rellectirm system of the instant ittvention enahles not onfy better- visible tratismission characteristics (i.e., increased h-,tnsrnissii>n 'f,;,'X,, Ill.
C. 2 deg.), but also recittccd rellectiott (e.g_, lower glass side relleciion and/or fitni si(ie retlectiott). Moreover, fitirly neutral trattstnissit'e color is also proti'idr.t!.
Snrnrisingly, ii ean be seen that the Fig. 2 etnbodimettt provides tnorc nc.Yttral color inansmissive a* arid glass si(le reflective) than cloes the Ci-:. In p.3rticulttr, 1?xample 1(see Fii:. 2) had belter visiblo transm.ission (hi~,hcr T,,;;) artd better ~zlttss and%or iilm sidc roflcction (lotiver R. artdlor Rr), and more noutral transmissive a*, r lass side t-el7ective a*, b* eolor than the Comparative Example ('CF.).

100361 Ficut'e 3 is a cross sectional view ofa coated articfc according to another embodiment of this inventiot). 7'he Fig. 3 cinbodimznt ditfers fiom ttie Fi,. 2 enibtxiitnent in that the ti31i dieieetric por(ion l' inclndes only a siiicon nilride layer (stoichiotneiric Si,~l.~, or alternative a non-stoicliiometric type of silicon nitridc, such as but not litnite(i to a 5i-tich typc). The Fig. 3 etnhodinicnt differs li-ont 1'ie. 1(i.e., frotn lhe Ch:) in that. (a) the hottom silicon nitt'ide layer ti=om Tig. I has ltccn retnoved, (b) a titaniuni trNitle lay'erltas been added in the ntiddle taortion M. (c) thc niiddle silicon nitricle laycr front 1 has beeti removed, nnd (d) tlic top Gn ox'rc)c layer }i-nar Fie_ 1 has been removed. As with all othcr znibeuliments hercin which use titanitnn trsicie, unlesti otherivise stated, the titartium oxide may be staichiometric Ti0=~, or altentativelY n non-ytoichiometric I'onn sucti as Likewisc, as tvith all other e.mbtdimertts tacrein which ttse-siliccan nitridC, rtnEess othenWisc stated the silicon nil.ridc may be toichiontctric'(Si;\~) or nnn-stoic:hiotnetric Si-vich). l'he coaletl article of Fi-;. 3 inchtdes linm thC tgiass stthstr.rte ouiwardly (tt11 indiees n ttt 556 nm):
glass (n-1.5 1) titaniunt oxide Tib,) (n .2.1 to 2,7~ preict'at7lv n2.-1 to 2.6-5) nickel-chromittnl-oxitie (NiC'rO,) siivcr (Ag) nickel-chrornitnn-oxide (Ni<:rO,;) tit.anium oxicie (e.g., Ti02) (n 7.1 to 2. 7, prclc;rably n=-2.4 to -2.(i5) tin oxide (e.,)., SnO:,1 (n =I.,i to 2.2. prcfcrably n-2.0) nickcl-chrnntinm-o~ide (NiCt-O,) silvcr (Ac,) nickel-chrontiutn-oxide (NiCrC7x) silicon nitride Si3N,) (n -1.8 to'.t), preiler;ibly n-2.0) air (n-1.0) 100371 liy using the silicon nitride ovcr [he top contact layer in the tol) diclectric portion'f', an<i the higher index titaniurn oxitle in tlte middlc iM and bottom F3 hortion (diluted with thc tin oxide in ittc rni(idle porlion M), the laver system can be characterized by thc top clic.fcctric portiom 't'having an effective i.ntiex of refractiott n less than that of rniddle dielectric portion M, which in lurn has an effective index ol' refraction n ictis l:han that ol'the bot.iom dieleclrie portion B. In othCr words.
ni =:n,j<nrt, tuherc nJ is fhe elTcctive index, of refraction of the top (liefectric portion T
of the sificon nitride laver in this etnbodinient), rit', is the clfective index of refraction of the middlC dielectric portion M()_e;., oftlte tin oxide and titaniuwn oxidc layers in this einhodiiitetit), and nt; is the effective indt:a ofrefraction oft.he bottont dielecfric portion B(i.c., of tltc titanimn oxi(le Ikiyer in titis embodinaent)_ Fach ofthe top, midtlle and bottotn dielcctric portiotts 1.', M lnil f3, resptctivcfy, can include a plurality oCdit7crcnt dielcctric layers, althott~.h in altemative ontbotliments any or all of tli..sc portions need oniy inclu<fe a sittble dieleclric layer (e.g.
portions B and'1 in this Mg. 3 etnbodimcrtl). By grrtduttlly decreasing tlte respective efft;ctive indices of' rcti=;tction n" irom the innennost or botfotn diefcctric portion B, to thc middle dicic:ctric portiott M. and ott to the t<tp diclc~ctria portion T toward the air, tfie anli-rctlection sy~;tern of Fi-. 3 enables incrcascd visible trartsrnis5ion to bc achieved. 1'he term "e1'1'ective" means the overall effective intlex n in ta par[ic.ular portion B, T or M.
r"jardleti, u1 hoxv many dielectt'ic lay'ers arc provided therein. Tlte anti-retlection systen] may ztlso cnabic fairly nt=uital color of the coated articie in c.ertain cxample cmbodiments. Thc silicon nitride Inycr in ptrrtion F mtty he ti=om ahont 10-90t) A

ll thick in certain example emboditnents ul'thi.s invention, more preferably from h thick, and most preter-ahly Irorn 5(1-50(1 i1 thick.

EXAMPI.t?(S) OF FiG. ; F.Ahl](71)1Ml?.NT

[0f1381 lhe Tables beloNNillustrat'c l.lsample I ol'the f~ig. 3 embodimcnt, compared to a Comparative E.rantpfe(s) (Cl:) similar to F'if'. t t>f the instant ,rpplication. Thus, tlre C:R relatcs to a coatin,, rhtit is sitttilar to that illtastrrilec) in U.S
Patent No. 6,57G,349. "1'lre thid<nesses For each rifthe ltiyers in the 1"irst'1'abIc below-are in angsirums (A). The SCcond Tablc belmwsets ihrth the optical characteristics visible (r<rnsniissiur1, oular, etc.) tirr Ex:mtplr: I and the CL.' based tirpon being annealed and in rnonolithic tiorrn.

F1RS'lI'A13[,F: ] AYFR 5'1:KUC'fC:RIi - tlricknesses (Iig. 3 embodiment) t'l? I~x. I

C;lass TiO2 125A 276A
Si3N.r 165A 0A
NiCrOr ls ~ lsA
Ag gKr~ 98,~
Ni('rO~ 1(A 16A I i0, 0h 496A

5n0, 672ik 112n Si,N1i(iSA f)A
Ni('r()t lhA IFit Ag 9SA 9N, A
Ni('rO, 16i\ ! (A
lO~ U:1 (1A

1, Sn(}, ?27A OA

Si;;V:t 252.X 420A
SiO,N,. OA 0"k SiO, O;k brt Tolal diel: 1606A 1304 A

SF,C'i)hD T<aBi.E: C)PTI.C.t1L I'LRl'ORM,1NC1= (Fig. 3 emboclimenl.
monolit:hic) Tviz a*t b*t b*. Rlilm sxtc(t) <i*f It*iFx. 1: 78.5 'O -0.8 -0.4 4.5'Xt 3.4 3.3". lo ~. 3 2.3 C');: 75.5"0 -2.1 0.2 5.9% 9,2 -10.6 5.2% 3.2 -1.0 l01139] It can be secu from the Tabte-s ahovc regarcling the Fig. 3 embodiment aflhis invcntion., that tlie antt-reflectlott sy'steln ofthc instaltt invention enables not ottiy better visihle trat7smission charactcristics (i.c , incre.ised visible transmission T,i{
%), hut also reduced rellection (c_-., lower glass side t-etlection andior film si(le visiblc l-cflection), Jn pat'ticular, F?xa(nple I(scc Fi~-, 3) had betti:r vkibla transinic;ion (higher T,.;,) and heiter ;lass and!or tilrn side reilection (lower R, and;or Rr) than the Comhar,itivc Eatttnple (C'.f? -- see Fig. I)_ Surprism1,,Iy, ttte t?xtintple 1 of this er.tbadinteut also had ulore neutral cu[or titan tiie (:1-, with respcct to trartstnissiv'~e P, anci particularly with respoct to glass side reflective a*, b*.

100401 1=i-urC 4 is a cross scctional view ot a cc>atcil article accordintT tn another embodiment ofthis invention.'-Che I'it!. 4 embodiment dif'fers livm tlle Fiti. 2 embodiment in that an ad.ditional silicon nitride layer has hcen added in the bottotn clielectric pottion 13be.tween tlte luwer eontact l;aycr:uid thc titaninm oside iayer. The terni "bctwecu" a, used hcrein to stxite: thal a layc,t'(s) i4 "hcmccn"
laye.rs x attd y does not mean thal the (ayer(s) cotitacts layer x vr laye' }% it mcreEy meatis that the laycr(s) is betcreen the layers x and y regardless of whcther t,ther 1,-iycr(,) arc also between layers x and y. Th;; coated article of Fig. 4 includes lrom Ihc t-lass snhstrate outwardly (n1i in(fices n A S50 tim):

~fa,s (n -15 1) titanium oxittc (e.g., 7'iO,) (n-2.1 to 2-7, preferably m=2.4 to 2.65) silicnn nitri(ie (e.~~., SivN,r) (n =1.8 to 2.0, prr['Qrahlv n~-2.t)}
nicl<i:l-chrumicnn-okidc (Ni(:r0,.) silver (At,) nickel-chromium-oxicle (NiC'r(),) titanium oxide (e.g.jin>) (n 2.1 to 2.7, prefcrabiy n==2.4 to 2.65) tin oxidc (e.g., SnC7_) (n=1.f to 2.2, prefcrahly n--?.0) nickct-chromiurn-oxidc (tiiCrO,) silvcr ( 1~-,) nickel-chromium-uxide (NiCrUr) til;rnium aYicfc }(11-2.1 to 2.7, prePexahiy n-2.4 io 2.65) tin oxide (ti.,4., SnO,) (ta-1.8 to 2.2, preferably n-2.0) silicon oxide SiO~2) (n-- 1.4 to 1.7, pre.ferably n-1.45) air (n-1-0) (pllAl 1 By trsing the tilican oxide, tin oxide, titanium oxide and silicon nitricie dielectric laycrs as shown in ihis embocliment, the leyer sy;icrn can be characterizca by 1ha loh dielectric portion't' having w=t el'lective in(te.x of refraction n less th~m that of middle dic[cctric pnrtion M, which in turn has an effective irrdex of retiaction n Ic55 than that of'thc bottom dicle.ctric portivn B. In olher words, n> whei=e ntis thw ctlective index of rcfraction of the top dielectric portion T, n..,.~
is the effective index c>f r41ir3ctiun of the n>idcile die[ectric portioti .Iv1, and ntS is the ef'fective index of refiactiutt of the bottom diclecU:ic portion B. N.ach ot'thc 1etp. middle and bottom dielectrit; portions 'C, M and 13, i=espcctively, eati inciude a plur<tlity of (iitlerent diclectric lavers, .rlthou~h in alternative ernhodinaents any or all of these portions need only include a single die[cctric layer. C3y gradna[ly decreasing the respective effective inclico,v of rcfractitm "n" frotri the innermost or bottom dicicctric poti.ic>n L3, to the midille dieiectr-ic portion Ni, anci on to the top dieleciric portion -t-ioward the air, the ;iriti-r-ellection systcrn oi'this embodintent cnahles inc.rc:a.,er1 v'isih(c h'ansntission to 1>e.

achieved. 5tnrprising}v. the anti-relllectiom systcm iuay also enable lairly neutral color ofthe coated article in cettaine.xatnple etnbodimctits.

EX:Ah4PI.r?(S) O1-' FI(G. d 1=,MBODIMt?NI

100421 'I'he Tables balow illustt:aic Examples 1-4 ofthc Fi,r. 4 embodiment, cnmpared to a Cotnharative f:xtttnpJt{,s) (CE) siniitar to Fig. i oi'the instattt application. Thus, (iie C'L; relates to a coatini-, that is siinitar to that illustratect in U.S.
Patent No. 6,570,349. The thickne:;ses for eacii ol'the layers in thc First 'l'abte below are in angstroms (A). The Second Table below sets thrth the optictti characteristics (e.e., visible transrni;aion; color, clc.) for Esantples 1-4 and thc C:F.
b~iscd upon being annealed and in monolitliic tiorm.

r1P.S'TI'AF3I.F:: LAYER STRUC TURli thicknesses (Fig. 4 embodinicnt.) CE G,x. I l.;x. ? Ly. 3 L~. -1 Glass TiC)2 125A l2>.1 2694 230 rt 125 A
Si;N' 165A 1)~l:'L -~=4A 60.4 198A
Ni("rOti 18A 18A IBA 18 A 18 A
Ag 98.A 98A 98 A 98 A 98 A
NiC'r0 I 6A 16A 16 A 1 bA l6 A 1'i(?> 0A 481A 219 .'-1 120 A 120 A

S110, 672A I 13!-', 710 A 83 1 7 A 782 A
S i~N ~ 16 5:~1 ~~k O l~ 0,~ 0A
NiC'r(ix 18A 18A 1 S,'; I~i A
i1g ')8A 9Sfl 98 rk 98 A 48 ~
N i('r(9, 1(iA 161~ 16 A I li .~ I G t~
'I'i0, 0.A 210Ft 181 A 190A l9(l A
I~

SnO, 22 7;1 34A 32 A .32 A I O;'1 Si;N. 252 ~ 0.4 0A 0A o A
Si().:.\',, f)r'i, oA 0 A 0A 0 A
SiC)2 0A 404A 3:4 il 373 435 A
Tot:al diel: 1606A 1566A 1799 A 1842 A 1860 A
SECOND TABLE: OPTICAI. PERFORMANCT (Pig. 4 enibo(lintent; nionolithic) I'l*t t~~'t Rel,tv,+id.iul 'r*=,. h* R1ilnt.iclrrij a*i' b*
F;x. 1: 78.13,o -1 S-0.1 -9.1 -7.1 3.9% 3.8 -2.4 F..x.2: 78.2% -1.7 0.9 4.5 IX, 7.6 -11.9 4.1%, 0.6 -3.5 LA.3: 78.14,0 -1.6 0.0 =4.5'% 5.1 -9.4 4.0% 2.3 -3.0 FI:x.4: 77.8% -2.1 I.w 4.5';4t 921 -12_4 ',.9% 3.9 -2.4 CT: 75.5 io -2.1 0.21 5.9 i'o 9.2 -10.6 i.2 ,o 3.2 -i.0 100431 It can be sccn from the Tables above regarding [lie Pig. 4 embodiment of this invention, that thc onti-reilection svstem of the instant invention enables not oitly better visible transmission characteristics (i.e.. increased visible trantimission "1',.i, but also reiluced rr;l7ection (e.g., lower Anss side retlcction arrrl/or tilm si(lx;
visihle rellection). In particular, Examples 1-4 (sce Fig. 4) had hetter visiblc transmission jhigher "f,.,,) and better glass anrL'or lihn side retlection (lower R, andlor Itt) than the Comparative E'xatnple (CL_, sce FiL-. 1). 1-airJy neutral color was rtlso achieved in lhe Lxan7ple(s).

100=44] Figw-c 5 is a eross seettoual view of a coa(ed articie accurding to afflothcr e-ntbodinient of this invention_ Tite Fio,. 5 trnlxrditt;enl cliffers frrrnt tl3e Fih, 3 e-tnlloditncnt in that an additional silicon nrtrirlc layer ht>..~ bee.n a<Ided in Ihe bottorn dielectric twrtion B belwccn tlte luwer curdaci luye.r ~tncl ihe titanirmi oxide Inyer, aurl a nilic.on oxide layer has been added over the silic.on nh:ridclaver in thc top dieleetric portion T. The coated artit:ic of [-i~ti ) incltulcs lirom ihe blass stibstratc: outwardly (all indices n tit i50 nr,i):
I ti oiasti (n 1.51) titanium oxi(ie i0:') (n- 2. 1 tu :2."7, prc~fer;ibly n2.4 lo 2.65) silicon nitri(lc Si,Na) (n=1.8 to 2.0, prcl'erabiy n=2.O) nickest-chron3ittm-oxirlo (Ni('rO,) silver (Ag) nicka]-chrornium-oxid.e (NiC'r0,) titaiuunt oxide (e.t., TiO) (n=2.1 to 2.7, prcfcrably n-2.4 to 2.6]) tin oxide (e.g.. SnOn) (n-1.8 to 2.2, preferab[y 11 2.0) nickcl-chrorniun-i-oxi(le tNi(-rOr) silver (Ag) nickcl-chromiunz-oxide (NiCrO,) silicon nitride Si~Ni) (n=I.R to %.(l, prcfcrably n-2.0) silicon oxide (c.g., SiU2) (n- 1.4 to I.?, preferahly n-1.45) air (m=1.0) 100451 By usinc the ailicon oxide, lin oxide, titaniutn oxicle and silicon nitride diefectt=ic layers as nhov,m in this emboditnent, the iayer sycteni can be characteri?ed by the top dielectric portion T having an eflective index of refraction n less than that of middle dietectric portion M, which in tttrrt has an ellective index of reli=actian n Icss than or equal to llrxl of' [lie bottom dicicclric hurtion B, ln other words.
n WherG mt. is the efFective index of rcfraction ofthc top dielectric portion l, n\i is the effective index ofref'raction ofthc m iddle clirtectric portion M, and nli is the effcctive ittdex ofrelraction of the boitont diclcctric portion B. F?ach of thc top, middi:: and bottotn dielectric portions T, Nl and B, rr.spe.ctivoly, can include a plurality of different dielectric laycrs, although in alternative enihudiments any or all of these potlions need only inclnde a sin 1e dieleciric Inyer. 13y gr:at3uxlly dccrcasine the respective el'l:cctive indices of rcti-action "n" [i-orn the innermotit r>r buttoni dielect.ric portion B, to the tniddle dielectric portion M, and on to the top dielectric portion 'f toward the air. the anti-reflecticm .sy,5tcm olthis enthodintcnt en,lbles I;

incrcase.d visible transmission to be achieved. Surpri5in-,ly, lhe anti-retlectit7n systr.tlt ntay al.su enable Cttirly- ncutral color of Ihc coated article in ccrtain example cm bod i ine3lts.

EXAMPLE(S) OF FIG. 5 F?0 t30MIJVILiN1-[00461 fhe Cable~ be.lmv illust-rate Exarnplc I of lhe Fio. 5 cmbodiment, compared to ct Comp,arat.ive r;xanthle(s) (CE) Sinilar to Fil*. i of the instant appiication. Thc Cy". rclates to a coating ttiat is sirnilar to that illustrated in L.S. Patent No. 6,576,349. '1'he thicknesses for cach ot the Ixyers in thc hirst fnble below Lire in ant;stronls (A). 1'he Second Fable below sels forth the optical characteristics (e.l;., visible. [rammission, color, etc.) 1-or p:xample I and (he CE based upon bcinL, annealed and in monolithic ihrm.

r~'Ila1' VAE3LE: LAYER ST12UfI'L:I.Z.L - thicknesses {Pig. 5 ctnhn(timcnt) C1: tix.

GIass TiC)1125 :1 I?5A
SiZNa I(,iA 196A
Ni('rQti 18,k 18A
Ag ()R~k 9's A
Nif'rO, L(iA 16 .\
Tio, oA 4-,'$A
SnC), 672A 91i1 N iC'rO, iSA 18A
A~ <)81 94A
Ni(:rO, IG~1 IG~1 I"iC, C7A U:1 SnO, 227n Oik I~

SltN, 252A i13A

SIO,'vy (1_~ O.n SI()2 QA 147.4 Total drel: 1606A 1426 A

SI?CONI) "fABLE: OPTICAL PERFORN7ANC:E (Fig. 5 embodiment; inrinolithic) T,ie a*, h", IZpI:~~.tisidcr_) fl',. V_ Rlilmsideii) =3*i 1)*i Cx. l: -1.5 0.0 5.0% i:{.5 -6.7 3.iS io 3.4 -2.5 CE: 7?.5"5r -21.1 0.2 5.(.)% 9.2 -10.6 5.2% 3.2 -1.0 [00471 It can be seen front thc Tables above regarding the Irig. i embodiment of thi, invention, tJrat the anti-rctle.etion system oFthe instattt invontion enahles not only be.tter visiLile (rdn~,mission charac;terisiics (i.e., increased visible transmission I iir), but also rcduced retlection (e.g., lower glass side reJlci;lion andlor filni side visihlo rcltection). ln particular, Ã'xarnple I(se-e Fig. 5) had better visible tra)rsnn issiun (hi ~hur 1',;,) and hcttcr ~Tlass and?or tilni side reflection (lo~ve-r R. andr'or R) than the Comparative I:xarop(c {(:E see Iri-. 1). Surprisin,ly, kxarnple 1 also had more nent.ral lransmissil-e and glass si.de reflective color than thc Cl_?.

100481 hibure 6 is a cross seetional view of a coated article according tc) arrothcr enibodirrient of this invention. The hig. 6 embodiment diffNr, lrom the ennbodimcnt iri thrn tht upper tin oxide layer in the portion T has heen r-emoved t'rorn tlre Fig. 2 embodiment and an additional siticon nitr:ide layerhrrs been added in the bottom dieleclric portion t3 between the lower contact layer and the titaniurro oxide-layer. 7he cualed arliclc: ol Fi~. 6 includcs frorrr the glass substrate out%vardly (all indices n at 550 nztl);

glass (rr 1 -~ 1) titaniuni oxicle hiO;,.) (11-2. I to 2.7, prcterahlv 11 2.=I to 2_65) siiicon nitridc (e.s~.. Si;N.r) (n--1.1i to .7._07 prolcrahly n_2.0) nickcl chromium oxide(NiCrUj silv~r (A ) nickei chronriunruxide(Ni(7(,),) titaruum oxide (e.g., IiO_) (n ?.I to Z_?, pref'erahly n=2.4 to ?. 65) tin oxide Snn=) (n- i.R tti preferably n-2.tl) nickel-cltromium-oside (1\i(;rO,) silyer (Ag) niclcel-chromium-oxide (NiC'ro,) titanium (ixide -I'iQi) (n 2.1 to 2.7, preferahly n=2.4 to 2.65) silicon axide (e.g.. SiO,) (n1.4 to 1.7, preferably- n-l.4i) air (n==-1.0) 100491 By nsin" the silicon oxicle, tin oxide, titanium oxide and silicon alitride clieleciric laycrs as shovvn in this embodiment, the layer sysleni can bc characterized by the top dielectric hortiort T havino an effective index of reli-action n Ic:ss than that of midclle dielac'ric portion M. wltich in turn has an ctfcctive index oi'refrac.tion n less than or eqttaI to that ol'tlie hott.otn diclectric portion li_ In other.h'ords, where mr ix thc c17ecli=de iuclex ofrefraction of the top dielectric portion 'I', n,~., is the effective incle:x of relraction of the rn iddlc dielectric poi-tiozz M, and nn is the elfectivc index o1 rc.li-actioti of the bottom dielectric portion B. I4ach of the top, middle- and bottom dielectric portions'I, M aitd B. respectiti=i;ly, can include a phrrality oldi!'ferent dtelectric ]aycrs, altllou-h in alternative embodiments any or all oftheae portion5 nccd oniv ineludc; a sin21le dielectric layer. By gradnoliy dccreasin2.
tlte respective e("fective inclicos of refi-<tction "n" 1'roni the ittnertno5t or hottom dielectric horion B, to the rnicldle diclectric portion Ivl, and on to thc top diclectrie portion f tovti=ard the a.ir, Ihe anti-reflection Svstetn oftfiis e.niboiliment enables incrcased visihlc trau~ntistiiun to be achievi;d. SttrprisinLN, the anti-rctlcc(ion wstem may also enablc fairl}neuEral color of the coatcd article in cerl.ain exainple emhoiitncnls.

ExAMPLI;(s) ol: FI<i. 6 I_;M13ODIMRNI' ~tt 11)OSUJ T1ic '1aE>lcs below illustrate FNamplc I of the Fi-. 6 ombocli,ti.ent, compare.d to a Connparative Ex.imple(s) (('i,) sirnilar to Fi(,, I o'Lthe instant applic>ition. The Ch relates to a coatinr that is similar lo that illustratcd in U.S. t'atent No. 6.576,349. fhc thicknesscs lor each ol tLz layers in the pirst Table be-low arr in angstronas (A). fhe Second't'able below -sets Forth (he op(ical characteristic; (c.g..
visible transmission, color, etc.) For Exaniple I and the ( T ha,sed upon being '1nneali--d and in nionolitlric fornn.

T(RS!' 1ABLE: LAYER STRUCTURI? thickn:.sses (1=ig. 6 embodiment) C1? Ex.I

Glass li(}r 125,~ 1.25A
tii;N_i 165A 201A
N iCrox lsA 18R
.~~ (m.A () HA
N iC'r( ), 16A 16.A
1'iO, ok 477r-'\
SnQ2 672t'l 71 A
5ia\K, t65A oA
Ni('rC)t 10, 1 S?l Aw 98_k 9sA

NiCrO116A t (i/k TiC)2 ok 19~X
SnO; 227A oA
Si;N. 2-~ ?A OA
SiO,i1', oA Oh Sit?, t)A ~09,1 Total tlicl: I 606A 1578 A

ST;CQtiL) TAI3LE: C)PT1C:11: PI;RhORMANCG (I'ig. 6 cnuhodirnent; monolifiltie) T,I; it*1 Mr Itei,;, t c, a*r= }'*Ã Rr,w:,w a*r h*f Ex. I- -11. -0.3 4.9",o 4.7 --?.(i i.4 io 2.0 -4.7 CE: 75.5'iu -11 0.2 51% 9.7 -10.(i 5?% 3.2 -1.0 IDUSE J ll can he seen frnin the "1'ah12s above regardin_; the t~i~~. 6 cmbudin~erit oE fhis invention, that the anti-ri;flection svstcm of the inslant invention cnables not only better visible transmissioSi c-haraeterisiics (i.e., increased 4isible transnaission'T";, '.'io), bul tdso reduced rellcciion (e.g., low'er glass sidc rcflection and:
or fi{m side visible reflect.ion). In particnlar, F.xmmple I (see Fid. 6) had bettea-visible Iransmission (higher T,;t) and hett.tir glass and.'or film sidc reilc.c.tinn ( lomer R, and%or k;) than the Cumparnlive. Example (Cli see Fg. 1). Surprisingly, Example I
also had more ni;uiral transmissive and glass side reilective color than lltc CF..

1110521 Fignre 7 is a cross sectional view t>f a co~Etetl at ticle ticcording to another embodiment of ihis invention. The Fie. 7 embodiment diftcrs Irom the 2 e.mbodimet3t in tUt the upper titaniutn oxidc layer fi-om fhc Fig 2 cmbodin.lent in portion T has been rCmoved, and an addition;d silicon nitride layer has heen added in I:i,,. 7 in Ilicroltom dieleclric porYion 13he1.wcon Ihe Iowcrc+>nlac.r hrycrand the tilanimm oxide hryer. Tha eoaled article of Fiti. 7 includes ti'oin the oas;
sttbslratc outwardly (all indices ii at 5ti0 nm):

t;ias; (0 = 111) ti.tanium oxide (c.o., I iU2) (rr'_. I to 2.7, prcfcrably n--2.4 in 2_65) silicOn nitride (e.g,, Si1N.4) (n 1.8 to 2.0, I>re[eraljly n 2.0) niCkel-Chroiniuni-oxide (Ni('rOr) silvu= (Ag) nica:e[-cbr~~iniurn-oxi<l (NiC'ro:;) 7) tilanitim oxide (c.(;., TiO=) (n '.t to 2.7. pi-ef'erab(v n-?.4 t(i 265) tiu ozide SnO') (n 1.8 to 2.2, preferahly n2.1{) nickel chromium oxide (Ni{,rO,) silvor (A~r) nickol-chrotnitim-oxide (Ni('rO,) tin oxidc le.~.. Sn0)) (n~1.8 to 2.2, prcle.rrihly n--2.0) silicon oxide (e.g.. Si()2) (11-1.4 to 1.7. preferably n=).45) air (n-E.O) [00531 Hy usinc lhe silicon oxide, tin oxide, titaniutn oxide and silicon nitride dielectric iaycrs as shown in this embodiment, the laycr syste3n can he characterized by thc top dielectric portion T having an eftcctivc index of rcfrac:lion n Itss than that ofinictdlc dielectric portion'uf, rvltieh in ftirn has an eftecti\.c indzx ofreti-action n Icss than Or equal to thal: of the bottont dielcetric portion B. In ottier workls, n r<~nv~ 1111, ~wherc n r is the effcctive indc x of refraction of the lop dielcetric portion T, nNi is thz effeclive index ofrcfraction of thc nliddle dieiectric portion M, an(i nj~ is the effectivc indcN ofrcl'raction ofthc bottoin dielect.ric portion B. Cach oi the tol), middle ancl bottom dielectric portions'1', M and B, respectively, can include a plurtility of diffcrent dielectric layers, although in altcrnative ernb(_+diinents any or all of these portions need only include a singlc diclectric laycr. f3y gradually decreasing the respective effective indices ofrefraction "n" f-roni the innerrnost or lottorn.
dielectric pot-tiori 13, to the middle dielectric portion R7, and on to the top dielectric portion T toNvard the air, the anli-reflection system ofthis entbodiineut enahlcs inorea.scd visihle tran:mi-,sion to b, achieved. Surprisingly, the antia-eticction System inay also cnablc liairly neutral cofor iif the coated article in certain cxmil.ple embodiments.

EXAMPI.f-;(S) C)F F1G. 7 E,',1,1BODC14ll:NV

[0054) '1'he Tables belw~illuslrale L?zarnplc I of thc Yig. 7 e3nbodimenl, coinharcd to a Comp"Iz-aiive. l;xample(s) (CE) ~itniiartn I ol'the in,lant application. 'Ciie ('}; rel1,lic5 lo a co~itinr~ that is siimiiar to that illtistratorl in U.S. Patent No. 6,576,349. 'I'lie thickne~ses li>r each of ttie lavcrs in ihw.Fi.rst 'Tablc nclcnv are in engstrorns (A). #he Second Lahls f~elo~~ scts fi~rth the op[ical c3iaracteristics (e..h., ,=isible transinission, color, etc.) tor Lxaniple 1 an(I the CE based upon beint; tinncalcd and in nzonolithic fornt.

PiRS"11:A13L.L'; MYFR S'fRt1('I(1RE -thicknesse, (}ig. 7 em.hodinent}
Ct, Ex.I

(.;las's TiC7, 125A 125i~
Si,NI1 I I 65r'1 220A
Ni{'it), 18A l;tA
Ag 98A 9'A
NiCcO116A 16A
Tio, I)A 171 A
SnO2 672it 690A
Si;N~ 165A oA
Ni(:.rOx 18.%l 1 RA
A; 9;Sik rm A
NiCr(), 16A 16A
'I'io, O,a OA
4nC)??irl ZOZ~
Si,Ny 252:1 011 SiO,Nti, (l,\ (!r'1 SiO2 OA -z??A
'Iotal riiol: 1 fi(36,,~ 1735 A

SFCONU TAE31.1 ,: 0I'I[(':1L 1'1:It.hOR~fANI I: (Fig. 7 embudirncnt;
rnrnoti(hic) Ex. I: 77.7"b -2.1 1.5 4.5 ..', 10.0 -1 1.7 3.7"u 3.0 2.7 CE: 75.D /b -2.I 0.2 5.9';o 9.2 -I 0.fi 5.23.2. -1 _0 10()551 It can be sec:n li-orrr the 'I ahles above rezzarding the Pig. 7 ctttbodimenl of t.his invention, LhEit thC anti-reflection systcn: ofthc insl<rnt inveaition enablr; not only better visihfe tt.ansmiscion charactcri;tics (i.e., increased visible tran5tnissiou btrt also rctluccd reflection (e.g., lower gJa.ss side re.(lection 2nrl/or tilm side visible reflection). ln particular, Examlilc 1(se-e Fig. 7) had better visible transtnission (hiolte-r'1',.;') and belter gl,tss and.tor tilm si(lt:
retlect5im ()nvver RK andlor ItI-) Ihan tlie Comparative L'xample (('P.- see Pig. 1). Surpri5ingly, I?xamplc I also had fairly neutt'al coior_ [04SGf Figure 8 is a cross sectional view of a coated article according to another cmbocfimc~nt of this invention. The Hg. 8 enibi,diment dif'fcrs ltotn tlie hig. 4 emhodln7ent in thill Ihe upUcr (i%e(ectric portion in the Fig. 8 einUodiment includes ,i silicini oxynitride layer. 1'ta ,~; siiicon o><ynilride layer is boncticial in. fhat its index o(' refraction n(a1. 550 nni) can be varicd from 1.45 to 2.0, more hreterabiyli'oni 1.6 to 1.9, and rnostprelec-tbly from 1.65 to 1_85, in dilterent eml7odimentsol'this irtvention.. In this and all other silicon oxynitri(le inc.lu5ive enlhodiments her=ein, the silicoti oxyttitridc layer may have a constartt (rn- approxirnately con3t<tnt, i.e., consta.nt plusitninus about 5%) index of reliaction it throughout its entit-e thickness in ccrtain embodiments of this inventiott, but altcrnativirly may be oxidatinn andiOr nitride graded so as to have an indc.x. af tclracLion n which varies through the thickness oi'thc layer (e.g.. tlte incicx n may gt'adttally decreasc (hrotn*h the thickness oftlte silicon axynitride layer movin-, tocvtard the air). ['hc coated article ofPig. S
incauiles Irom thc gJa,s substrZte butwardly (aIl incliccs ri at 550 nmY

glass (tr 1.5 1) litstnium ctixide (e.t., 1'iO~) ('n-2.1 to 2.7. prefe.rabIy n-2.4 to 2.65) siliccm nitride Si:N t} (i.r.._1ri 2.0, rret'erabiy n-.2 O) nickel.-cstromium-oxidc (NiCr(.),.) srlver (A-) nickel-chronlitml-oxide (NiCtO,) litanium oxide (a.g, TiU,) (n-2. I ta 2.7, prelcrably n=72_4 to 2.65) tirt oxicle SnQ,) (n 1. 3 to 2.2, {~rof~rabfy n=2.0) nickcl-chromitrm-oxiile (NiCrO,;}

s)fver (A,-,) nickcl-chromituzt-o:ride (:~~iC;t~)r) silicon oxynitride (e_g., tii(~y~Jy) (n=1. 15-2.0, prelerahly <~ir (n 1.0) 100i71 By usin" tltc- siiicou oxynitridc, tin ozide, litnniurn oxide ancl silicon nitride diele-clric Isyers as shown in this zmhodiment, lhe lavcrsystem can be charnctcrizecl by the top dielectric portion F having an et't'cctivc index ofrel'raction 11 (e.:?., n 1.72 at 550 rirn, as an example ot'an incEcx n of sificon uxyn3tricle) less than that ol'middle diclcctric portion Nt, whieh in turn has an oCleclivc indcx of refraction n le.ss tharr or equal to that of the bottom dielectric portion 13. In other words, uE =n~~ nii, where nIis the et'tcctive index of refiaction of ihe top dielectric portion T, n~t is the etfective indeNof refrac:tion of tho uliddle clieLeclric portion M, arui njl is the tl:fectivo index oÃ'reliaction of the bottoni diclcc=lric portion B. EaUh of the lop.
middle anc.l botlom dielech-ic poriions 7', h4 and B, respectively, can ineiurle a plurality of clifterent cliclectric layers, althoubh in alterriative enlboditnents any or all ot'ihese portion, nce(i oaly inciudz r) single diolectric lnycr_ By -radually decreasing Ilie respzctive cffeetive indices of rc fraction "rz" trorn the innemlost or bottom dielectric portion B. to the middle dielectric poriion h'(, atxl on to the top dielectric portion T tovvard th~ air- (not includinS, Ihe ng oi- contact Irtycrs). Ihe anti-rellection svstem ofthi5 emhodimcnt enahies inercased ~~isihle lcinstnission to b2 :~chieved.
5urprisingly~, the anti-ref]cclion system may also cuablc fairly neutral color ot tlle coated article in ccrtain example embodimonts. };XA;~1l'LE(S) 91' t'L(i. ~
L~1J3OllL?~-1P.vT

1110S81 7hc lable;s below illttstrate L;x,m-tple 1 ot thc Fi~. h ernhodinaenl, i:cimp,u- 1 1.0 u Comparative F-tamlale(s) ((T) siniilar to H2. 1 0l th;:
inStant apptication. I'he CE relates to a cotitin- Ihat is similar to that iIltisiratcd in U.S. Patent Nn. 6,576,349. The thicknesscs for e;uh oJ the lavcts in the First habte below arc in angstr<mi; (A). The Second hable bclow sels lcirth Ihe optical charac-leristics (e.g., visible n-ansniission, color, etc.) for Examl3le I and the C1: based tipon bcing amiealeil and in nionolithic iorm.

L"i R5"IFAL3L,G: L.AYER S'lP_UCl'UfZE - thicknesses (Fig. R cmhocliinent) C7? L;{.l Glass l iO: 125A 125:1 Si;N4 165A 173,4 Ni('r0, 1HA I8A
r11; ()8A 98A

1 Gt1 16l1 Ti{), ClA 1=74A
Sno, 672A (bS-A
'i; Nq lG5ia OA
Ni('ro, 18 A 18r\
At, y~A )SA
Ni<'rOt 16,A IGrZ
TiO5oA 0~
Sn()(IA
Si,,Vt 2ti7:~ 11:1 SiO,N,: (tA ~(1;A

SiC)2 oA oh "f'otal diel: I6O6A 10U A

5EfõOND TABl-F.: OPTICAL PLRVORPN4ANCE (Fig. 8 embodiment; tnonnlithic-) Tel. a~i b*r R,lss.idc!õ1 a*c b*g ht5lmshclr,l) 3*r 11 1 F.x. 1: 70.8'N -1.6 (}.I 4.S"JO 3,1 '(),5 3,4' / 1.7 -7.S
CF;: 75.5'.'4i '.1 0.2 5.99.2 -10.6 5.211ii~ 3.2 -Ln 1(10591 It can hc se-en frout the Tables ab()vc rcgarding thc F'ig. 8 ctnbodiment oE'this invenrion, Uuat the .utti-rctlcction system ot tlie inslant invcntion en.dbles not only bctter visibie frtan~mi=ss.ion characteristics (i.c., increased visible transrnistiion Tv,, ;%), but also rcducc(i relJeclion lower e,la5s side reilecticrn and-or tifm side visible re11ecii0n). ln hartic:ul;r, P,xoniple i(see big_ R) h,id bettor vi5ible transntission (hieher'1',,,;) and heltet- glass andior film side rellecdon (]owcr R~ andior Ri) than the Comparalive Fxample (CF: ,ee Fig_ 1). Surprisingly. I:xarnpli;
falso had more neutral glass side rcilective color thait tlie CL.

10060J 1~ iattrc 9 is a cros.s sectional viclv of a coated articfe according to another entbodirnent of t.his invcntion_ 177z }~ig. 9 cmbodintent diflers Crom I~il. I in iha.l (a) the bottonl titanitun oxida and silicon nitride layers in bottom portion B of Fig. I have been removed and replaced ~vith a I:ryer of iir including silicon r.irconium nitride (Si%rN), (.b) the silicon aiitt-idc: lay'er in the middfe portion ivl of Fig. I has heen removzd, (c) a fayvr of or includittg silicon zirconium nitridc lias been added to Ibc micldf:: diefeclric portion :ti( in l~iz. 9, and (ti) tlie top silicon nifrirfe layer in lop porlion T in Fig. I has bccn rcpf;eccd willi tt layer ofoT includin;_ silicon oxide in Fw.
9. 11 is noted thot the si(icon zircon=tint uitride inclusive layers may be s<oichi.onictric or non-~,toicitioniclric in diflcrcnt cnlbodirnenls t>Itliis invention.
Vlore.ovt:r, one or rnore or the silicon zircoaimn nitride (,SilrN) layers may liG oxidod, and/or may be rcplaced with layer(s) comprising niobium oxidc Nh,O5 or any olber sttitablc form). tt i-s 11so jtotcd tliait any of'the tin uxidc laycr5 in porlion(al T
and;<~r 1t1 coiilcl be replaccd with silicon nitriclc stoichinmctric or non-stoichiometr[c). I'hc ?~

coated at-ticle of Fi-. 9 include5 from the ~~lass substratc oi1twardlv (all inilices n at S j0 nm):

elass (n 1.5 1) silicon ~irconium nitride (5i%rN,~) (n-2.2-2.4j, preldablY n-2_32) rrickel-ehrorni'un7-o;~ide (,AiC~rO ) silh'er (Ag) nickel-chr=omium-oxide (Ni(:'rO ) siiicon =r.it-conium ni(ridc (SiZ(-N,) (n-=.2-2.45, preferahly 11-2.32) tin oxide (e.g., SnO~) (n-=1.8 to 2.2, prefcrably n2.U) rticke.l-chrornitrm-oxicfe (i~iCrC),) silver (AL-) nickel-chr-omium-oxide (NiCrU,) silicon zirconium nitridc (SiZrN,,) (n-2.2-2.45, preferably n 2.32) tin oaidu (e.g., tinl)_) (n 1.8 to 2.2, preferably n-Z.U) silicori oxicle SiU,} (n-14 to i.7,j~refer<r}Il~~ n-1.45) air (.11 --1.0) l(}Qbl l 13y nsing the silicon zirconium nitride., silicon oxide, and tin oxide dielectric lavrrs as shown irt this ertihodirnent. tlie layer system catt be charae-terized by the top dielcctt-ic portion ".f h<rving au cflcctive index of rcfraclion n less than that oFmiddle dietectric portion M, which in rum h~ts an efleciive indc'."
of'relr;rction n lc5~ than that of the bottom dielecrrtc portion B. Ltt other words, n-t=:n\t==-ntt, where mv is t.he cflbctive inclex ot'reti-action of the top dicleett-ie portion T, is ttte c-!leclive ndex ol, rcfractirtn ofthe rnicicile diClectric portion ivS, and nn is l:he elltctivt index of refraction of the boltorn dielectric portion B. Each of tlte lrtp, ntitidlc and bottom die3eci.ric purlions 1', N1 and [.I, respectivcly, can inelude a plurality ufditicrcnt ciielectric laye.rs. although in alternative cnthotlirnenis any orall ofthcsc portion; nc;ed only ittc[ude a single dielcctric layer. Civ cradua[iy decrcasi,~w, the respective effc-ctiac in<lices of refraclion "tt" ti-om the inncrnlost or boiturn dielec.tric portion i3, ro fhe : ~) mid<ilc diciectric purtion '\4, and on lo lhe top tlietectric por[ion T
ttnvarti ttie. air, the anti-rct7ection systetn of this embodiment enables increased visible transrrtission to be achieved. Surprisittoiy, the anti-relleelion sy'stetn may also cnttble fairly ncutr~~l color of the coated artic(e in certain example entbodiments.

CXAA-JY1.l~~(S) OF F1C?. 9 F=.A1ROi)1M1/A1 (0062] The 'I'ablcs below illustratc Lxample I of thc Fi2. 9 embodirnent, compared to a C'omparaUivc Lxample(s) (( G) similar tu Pig_ I ot'tlte instant application. I'lte CE relates 1o a coating that ic similar to tl rt ilittstrated in U.S. fatent No. 6,S76,349. 71ie thicknesses for cach of the layers in the First'1'able below are irl angstronis (A). The Second 7'able below aeta forth the optical characteristics (e.gõ
visibie Iransrnistiion, color, ctc.) for Lxamhle I amd the C'E based upon bein, armealed and in moziolitliic form.

FFltS1lAF3I,F; 1.AYFR SF7.tl.JCTIJRl? thicknesses (hi~ . 9 cmboditt~ent) Ch Lx t Glass SiLrNY oA 352A
TiOl 125A 0A
Si.;N:t I5ti%l oA
N iC:r(), IBA 18A

NiCrO, I GA 1 h: i SI%.r\,; U:~ 23 2A

SttO, 672A 680A
Si;Na 165A 0:4 NiCr( I s.n I hit :t~ 98A ~)t A

NiC.'rO, l 6A I (iA

SiZrN, oA 12511 SnC)2 227A 1 43A
Si,,Na 252A Q_k SiC),N,. UA UA
5i(_), OA 327A
I-otal diel: 1606A 1859 ik SEC:ONll T7\BLT'.: OPT1CAL PliRpORNIAN-CT, (Fig. 9 ernErodiment; arirnolithic) l's a><i I/.. I: 77.4 ,4, -2.8 3.1 4.4%, 7.8 -11.5 3.3 -2.7 l":F,: 75.5014 -2.1 0.2 5.9 n 9.2 -10.6 52 io 3.2 -1.0 [00631 lt c tn be seen {ionl the Tahles ahuve regarding the Fi~. 9 embodiment pCthis invention, tlrat the anti-rcfloction system of the instant invetrtiott cnables not only bettervisible transmission chttracteristics (i.e., increa,ed vi.siblc transmission C;;, but also reducctl reflection (c.g., lower glass side relle-clion and;or lilin sitie visible retloction). In h:irlicitlar, F;xarnple I(sec Fig. 9) had heltorvisit>Ic transmission (1u71ier 1',;,,) and he-tter glass andlor tilrn sidc rellection (lower R~audlor Rr) than the Coulparative Lxa.mple (CE - see FiZ. 1). Swprisingly. Exarnple I
also had fairk, ttcutral color.

100641 FiYure 10 iS a cros; scc.tiona) vicw Of a coatcd arlicle aceorciin- to another cntbodiment of tttis invention. The Eig. IO emhodinicnt ditfers Pi-ont the Fig.') errrbodirnenl in that the npper silicort oxide- and Si7rN in.clusive laycrs in the top dieicctric portion '[' have becrt removed. Tt is noted that the sil icon zirconian-i nitride inclnsive layers rnay be stoichiomclric or ncm-stoicl:riomerric in dillcrcnl emhodCrare;nts of lhis invcntion. 1'V1or-eover, one ur More 0fthC silicon zireonitrm nitrrdc (SiZrN) layers may be oxidrd, antfror rnrty ik rchlaccd witfr layer(s) comprising niobium oxide Nh~Ch or any other suitable form). Ihc co~~fcd article of lrig. 10 includta fi'oni Iiie 2Ittss substrate otttwarcily (all indiccs ri at 55(1 nm):

alac~5 (n--t.5ll silicon i.iconiurn nitri(le (Sif..rN,) (n 2.2-2.45, ptelcrrhly n-2.;?) nicke]-chroniiunruxicle (Ni('rC)x) silver (A g) nickel-cliromiurn-oxidc (iViC'r(l,) silicon xirconitrnt nitride (SiZrN,) (n--2.2-245, preferably n-2.32) tin oxidc (c.~r., SnCy,) (n=1.8 to 2-2, preferably n 2.0) nickel-chrontietm-oxiile (Nit'rt).) siiv cr- (Af,) nickel-chronrium-oxidc (NiCrO,) Iin oxi(le (e.g., SnU2) (ri 1.8 tu 2.2, pre4erabiy n=-2.U) air (n=t.(1) [00651 By using ihe silicon zirconium nitride, silicon oxide, arrd tin oxide dielectric layers as sltmvn in this embodiment, Ilxe layer systern can he characterized by the top dielectric portion (' haviug aa ef'fective index of rePraction n less than that of middle dicleetric porlion ,'Vl, which irr turn has an elleclive indcx of rei'raclirm n less than thlt of the biritom rlicaeclric porliun B. In ofher tivords, trt<:nWhere n is the effcctive index of refraction of the top dielcclric portion T, n\t is the cflective index nf reliactiou of the rniridle diclectrfc portion M, and nr; is the ef'tective index of refraction of llte bottom dielectric portion B. i~.ach of the top, middlc and bottom diclcctric portions T, NI and B. respcctiv ely, can ittc(ttde a plurality of ditlcrcnt die-lectric layers, alth0u~1h in alternative emhodinicnts any or ali ofthcsa portions necd only inctur3c; a siuole clielectrie leiyer. 13y grarlunlly decrzasing, the respective e17cctive indiceti of refraction "n" from the inrtertnost or 1>oltont dielectric portion B. tii rhe middle diclectric hortio~ M. and on to the top dielectric portion '1towarcl the air-, the anti-rellection systcm ol,tlri, ctnbcrdiment enable5 incrcased ~,isible transnlissitirt to 1ie 3chieved. 'S"urprisingly. the anii-refIectiirn sysicm may also cnable fairly neutraf cc,lor oi thc coalcrl article in c;et-tain e.Nampfe orttbo(limentti.

I?Xi11411'I.N.(S) OF F'((;_ 1 Q 1~;~.113C)I)IMp:NT

140661 The t'ablcs below illustrate I;xantple 1of the Fig. 10 cmbotlintent.
conzparcd tu a('otitparativc Example(s) (C'F) similar to Pig_ I oftlte instant application. The t'.13 relates to a coatittg that is siinilar to that illustrated in Patent No. 6,576,349. The thicknesses lor cacli ol'the layers in the First Table below are in angstroms (A). '1 he Second ~l~ahle belo~+ ,eas Inrth thc nprical citaractcrist.ics (e.g., visible transmission, colot, etc.) for Faample I atid the CE based upo11 bein;~ annealed and in inonolithic finai.

FI[Z5'IfABI,F: ],AYER SfRIJCTI_!RL: thicknesses (1''ig. 10 embodiment) CE I~x.l Glass tiiGrh'x o ~ ;GOA
Ti.O2 125A OA
tii;N
1.A UA

4 NiCrO, l t~ l R.k Ag 9R,k ~)8A
NiC'rO, 1(i;~ I6A
SiZrN, oA 240A
SnEh 672,1 (167A
Si1N.4 I65A 0!1 NiCrO, ] RA I ',k Ag 9RA i)8:5.

NiC'.i-(?, 1(iit I(A
tii7.rNt tl<\ oA
Sn(}, ?2 7A i99A
tii:;Na 2-~ ?A 0!\
Si(),N4 DA oA

SlO: OA t)A =
Totitl diel: 1 GO(iA 1666 A

SLCO>VfD TABi,Ii: nP"11CAL P)=;RFORtiANC~s (Fic. 10 cmbodimcnt: rnonolithic) Pv;, al"r h*i b*,, ~nlin.,id::(q a*j V1Fx. 1: 77.3 io -2.9 ").8 4 59.2 -12.6 4.11,") 32 -2.9 C'1:: 75.>~o -2. E 0.2 ~.9'%u 9.2 -] 0.6 5.21%, .i_2 - I.t) 100671 It can be seen li-cnir the 7ables above re!:,arding Ehe Fig. ] 0 embod.inlent oflbis inventiun, that Ihe anti-reflec!.ion system c,ftlte instant invention enables not only better visible lrmnsinission characteristics (i.e., incrrased visiblc;
tiansmission l'l ;, %), btit also reduced retlection lower gl.css si(Ie reflcc.lion and%irr lilm sic7c visiblc rctlection). In particular, Example 1(sec Fi-L,. 10) had better visible transmission (higher 1,;,) and better glztss andior film side retlection (lower R. andlor Rr) than the C'ornl rtitive Fxsmple (CE- sec Fig. I).
Surprisingly. FAample 1 also lza(i Ifairly neutral transniissive color.

100681 Fi!re I 1 is ;i cross sectional view ol'a t:-oated article according Io tulothcr embotlitnCrtt uf thi5 im; enlion. The fig. 11 crnbotliiitent ~iif4~rs fioni li3c FiL'.
embodiment in thnt the upper and nriddle tin oxide layers I'rom Fi;.t. 10 ar<replaced Witl; respectivc Iayers of or including silicon nitriile (stoichionactric or non-stoichionietric). It is noted that the si]icon z.irconittm nitricle inclusive lovers may b,:
stoichiometrie or nnn-stoicliiometric in clift-zrent emboxliments ofthis inveniion.
N'Toreover, one or more oCtlae 5ilicon zirconiuni niU:ide (SilrN) layets may be oxided, andror n3.tv be replaced w'ith l;iyer(s) cornprisirl,niobitn oxide (e.oõ
v!))Os ot any other suitable form ). lErc coated article of Fi,, 1 1 inclueies trom the -lass substrate outtvardly (all itrctices n at 55(} nrn):

gfass (n- ).il) silicon rirconium nitride (SiZrN,) (n=2.2-2Ø5, prelersbly n-2.32) nickel -chronium-oxidc (NiCrO,) silver (Ag) nickel-chroiniuni-oxidc silicon ;circonitnn nitricle (5i'/,rNY) (n-2.2-2.45, prefer~ibly n-2.32) silicun niiricle. (e.g., Si;N4) (n= 1.8 to 2.0, hreferably n=10) nickel-c-hroniium-oxide (NiCrO,) silver (Ag) nickol-chronriurn-o~:idc (Ni('rO.x) silicon nitricie- Si3Na) (n=1..8 to 2Ø preferably n=2.0) air (n-1 _(}) 1O(169] By r.rsin,~ the silicon zir-coniutn nifricle and silicon nitride tiiclcctric layers as shown in this emboclinienl, the layer syslem can he characterized by the top diclectric portion h 17aving an c$ectice index of rcli-action n less than that of nticldle dic;lc-ctric portion Nl, which in lurn has an oftecf.ive inclex of rcfraction tt less Lha.n that of Ihe bottom dielectric portion R. In other words, n-i ==n;,n<nr,, whcre mii5 the el'leetive in(iex otrcFraction ottlre top dieleeti-ic portion t'. n,, is t(le effective inelex of rcfraction of'1he midcfi(c diclectric portion ivl, and nrs is the 4ffective indcx of refiracpon of the bottom tfielectric portion R. Each of the 1op, middle and bottom ilie{ectric portiony T, 'v1 and B. respectively, can. incittdc a piuralitY r>f tliffercrrt dielectric lay>crs, ,01hotrgh in alternative eiubudirnents any or all of the5c purtions uecd only include Li ,inkle dielectric layer. l3Y Rraclnally decrcasin the respective etle.ctivo indices of rcl'taclion "n" from the innennost or hottorn diclectric portion R, to tbc niicldle diefcctr-ic porfion N'I, and on to th:: top (1icloctric portion T
towarcl the air, thc anti-ruflcction system of ihis embrxlifnent enahlcs increased visible.
lrartstnissirrn to be achirie-d. Surprisingly, the anti-relleclion sys1ci73 may also enable f;iirly ttetltral color af ihe coated article in certain exatuple embodirnonC~

FXf11V1PL.L:1S1 OF F1G. I I h.MF3OL)iNll;N7 E00701 The'rables belor,v"
iliuslrate 1?samplc I crfthc Fig. 11 ettihodinient, comparcd to a C"omparative Examhie(s) (C'I?) similar to rig. I ol'thc instant application_ 21hc E14. relates to a coatitrg tlutt is similar to thal.
illustrated in U.S. Palent No. 6,576, ~49. The thicknesses for each of the layers in the First 1 ube below arc in angstroms (A). 'Ihe Second Table below scts ftn-tli the optical char<rctcristics (e.g., visiblc iransmission, color, etc.) for I:xamplc I und tha CT base.tl uprnr bcinft annealed and in monolithic furni-TIRSf 'I'ABLL: LAYER STltUCTURF.- thickrtesses (Fig. t l otnbo(timent) CE Lsx. I

Glass Si/,rN, 0A 33 60A
'1'iO, 125.,k Ofk SiON4 y 165A oA

NiCrO, 18A ISA
Ag 9nil 9t(A
NiCrU, 1 fiA I6r'l tiiZrNI, U;l Sn0, G72A Oa Si&: 1fi5A 68=1i1 Ni(.'rO, ttiA 18A

Ab 9,sA 9,M
NiC.'r05 16!~ IGA
SiZrN, oik oit tin(}, 227A l.)A
si;N, Z>?a 404,4 Sin,Nv A oA
Sio, M oA
Total diel: 1606n 1677A

SECY)Nl) I'Alil.f-;: OP"riCAL ~PECt1:O1ZiVIAN(~l? (Pit,r. 1 I cmbodiinent;
monolithic) I,-i; a1 b*j RgI:ss,ja,> a '~r h*
f Ex.l: 77.3'%: --2.6 3.4 4.59.0 -12.3 4.139 -2.7 CE_ 75.5'%n -2.1 0.2 5.9% 9.2 -10.6 5 2'.'11) 3.2 -1.0 [0171 1 It can be scen from the Tables above regarding thc Fig. 1 I cmhodiment of this invention, that thc anti-retlection systcm o[ tlie instant invcntion enables not only be.ttcr visible fz-<tnsmission characteristics (i.e., increa,ed vi;ible transmission C',,,., bnt also rcdueed ref]cotion (e.g., lowcr glass ~ide reflection andior lilna side visible rellec.tion). In partictilar, Example 1(see Fi,,. 11) had hettcr visihlc transmission (higher T,-õ) and better giass ancUur tilm side reflcction (lower R, and/or IZI-) than the Comparativc Example (CP,- see Hg. I)- Surfrisinglv, I also had lairfy neutral color, 1110721 12 is a cross sectional view of a coatcd article accordin-, to anofihercmbodimcnt ol'tl.is invention. Cl-te hie. 13 cntb~~dimcnt dtllcrs fron~ F~i . 1 in that (a) the bottom titanium oxide and silicon nilridc l~~ycrs in bottom portion F3 oh Fig. 1 ltal~e l.~eett rouoved and replacc;d w-ith a l,tyer of or including niohium oxide (stoichiornetric or soine non-stoicltioinetic form). (b) thz~ silicon nitride layer in the midtile portion M of ku. I has been rcmovcd, (c) a 1ayer of or iucludlng -)7 niobir.un oxide (stoichionic(ric Nb205, or sonie non-sloichionietic forni) has been added to the niiddie dic(c-ctric portion N~[ in ('ig. 12, and (d) the top silicon nilride la yer in lop portion I in Fig. 1 has been replaced with a layer of ot iraclnding silicon oxiilc (stoichionaetric or non-stoicliioroctrie) in Q l?. The coated article of Hl;- 12 includes frooi tlie ~la;; substrate outwardly (ali indices n at 550 nm):

g1<,ss (n 1 .~ I i niohium oxide (c.b., Nb20;) (w-2.25-2.5, preterahly n=2.33) nickcl-chrornitnn-oxiile (Ni('r{3,) silver (A y) nickel-chromiunroxide (Ni('r()õ) mobnnn oxide (c.g., Nb?O_) (n=-2.25-2.5. preleralily n-2.3 3) tin oxitir, (e.!t, SnOr) (r) I.S to 22, pretorahly n-2.(1) nickcl-chrominrn-oxide (Ni(*'rO,) silver (Ag) nickel-chroniium-oxide (Ni('rOX) niobiutn oxide (e.g., Nb7O;) (n- 2.25-2.5, prettrably n- 2.33) tin oxide (e-:,,., SnO~) (n-1.5 to 2.2. prefcrably n=2.0) silicon oxide (c.s;,, Si(J,) (rl- 1.4 to 1.7, prelerably n==1-45) air (n1.01 11)073] By r+;ing tlic niobium oYide, silicon oxidc, and tin oxidc diclcctric layers as shoim in this embodinlent, the- layer systeni can he characterizerl by the top dielcctric pnrtion T having an effcctivc index of refr,tetion n les; &in that of middlc.
ilieleCtric pWim M. which in turn has nn effective indcs oC1-eiiaeti0n n 1c~~s thari rhai cl tho 6o(tonl dielectric porlion 13. In other Words. n3~-n~9'~nii, 1~3Zere n-1 i,ti thc eAtective- in<lex oC reCraction of the top clicfeclric pnrtion '1, nm is the ellcctive index ol' refractiun orthe midrHe tlielectric portion itii, arld ng iti thc efl'ectiar index of ;5 refraction of the hottom dielrctri.c portion B. Each ot'thc top, middle and bottc}m dielcctric portiot.is F. 1%4 and B. respectively, can include a p(urality of dil lerent dieieutric laycrs, altf7ouo.h in aitcrnative embodirnents any or all ot t}wse portions rreed onlyincEtnie a sitl-le riieicetric layer. 135- -raduallv decreasin; the respective effective indices of rcfraction "n From the innermoa or bottom diclmric portion 13, lo the middle dielectric portion M, and on to the top dielectric pottion T toward the air, the 'tnti-retlcctiort system oFthis cinl!odiment enables increased visible Iransmission to be achicved. Surprisingly, thc anli-r:;llection ;ystem may :also enable IairlY
neulral color of the coated articic in certain example crnhod.ime.nts.

L'XrAfv1P1,F,(S) OF PC(;. 12 h'.MBC?[JIMENT

100741 The Tables bclovr illustrate Example I of Ilie Fig. 12 emhodiment, ccnnpared to a Comparative ExOmp1e;(s) ((;F.) siniilar to hig. I of the instant appiicafioii. Thc C'1/ relates to a coating that is similar to thal.
illustrated in U.S. Pate.nt No. 6,576,349. 'I'hc thicknesses 1or cach ol' ihe layers in Phc 1-ii-st'I'ablc below are in anf;stro.nis (A). Tiic Second Table below sets forth the op:ical characteristics (e.g., visible transmission, color, etc.) for l:xample I tnld the f':F based uprin being annealed and irt rnonolithic. furm.

l1RS"1' "1'AF3C,1;: LAYt?R STRUCTURh: thieknesses (hi". 12 embodinient) ('F Ex. I

Glrtss x, h<C),. 0A 34 2.1 1 iq, 125A OA

N 1 G-5A (1A
hiC:r(-), 1~A Is,~
~g A 98 A
NiC'rOr 16A I6;k Nb,Oy (1A 640,,~

SnO2 G72A 96A

Si;Na I65A A
NiC'rt)h 14A 1x:i Ae 9xA ')s .1 Ni('r()C 16A 16A
N'b,0Y 0A 222A
5n02 227A 37A

S7;N3 252!\ ()A

S E 0,rIN, 0A O 1 St07 UA 372A
TOtal dlCl: 1606A 170r) A

S1?(.'OND TABLE: OP tfCAl, PERFORMANCE (Fig. 12 cutbottinient: monolitbic) T,s, a "r h , b*r, Rr,~~,.~;d=~r> a*r h4't kx 1: 7$.5"/n -1.3 -0.3 16 .-% U -R.(i 4.05i 17 -2,4 CL: 75.5%> -2.1 O.2 5.9% 9.2 I n.6 5.2% 32 -1.0 100751 It can be scen tiroan the Tablcs ahcwc rcp;irding die- My 12 embndiment ot tiis invention. that the anli-retlection system of the intitant invcntion enablcs not onlcbetlcr visible Irnismission chnractcristics (i.c., incrcased visiblo transmission %,), but alsu reduc;.d reflection (a.g., loo=er glnss side reflectiu.u anrl%in- lilm sidc visible rellection}. In particrilar, tixantplc t(see Fig. 12) ha.dbelter visible irsnsinission (lugher t;;) ancf better glass and%or lilirt side retlection (lower Rõ andior 1Q than Ihe Cutnparative hxample (,CE see Fi~,. 1). Surprisingly, Example I
also had more netrmal transtnissive and glnss tidc rellectivo cobr than the C'1:'.

100761 Mgure 13 is a cror,a ,ecttonal vicw ofa co,zted articlo accorrling to anothcr Lniboduncnt of this inventimn. 'lhc hg. 13 zmbochntcnt dii7brs i'rotn itie FQ.
12 enbocliment in that the top silicon oride and uiohiuin oxide layers in top dielc.cti=ic portion -C of Fi2. 12 liave been removed. The co:iled article ol Fig. 13 incltieles #i-om the -lass substrate ouiwardly (all indices n at 550 nirn).

~lass (t--1.51 niobium oxide (e.g., Nhj);) (1-22i-2.3, preferably rt- 2.3>) nickel-chrcrniunroxitlc (1riCr(}~) silver (!\ r) nickel-clirotniurn-ntide (NiCrf).,}

niobium oxide (e.g.. Nh2Os) (n--2.2,-2.5, preterably n 2-33) lin oxidc (c.g.. SnO2) (n-1-8 to 2.2, prelerably r) -2.0) nickcl-chromiwri-c?xicle (Ni('r(-),) silver (Ag) nickel-chromiutn-oxidc (Ni('r(,)r) tin oxide SnO7) (n-1.8 t(i 2.2, prelcrabIy n-2.U) air (n- 1.1)) (00771 By using the niobittm oxide and tin oxicle dielectric layers as shown in ihis e.mbodime-nt, tlie layer system can be charactcriicd by thtt top diclectric portion "C
havinb an etfeetivz index ctf'refraetion n less tllan that of middle cliclectric portion M.
whicb in turn has an cl"fective index of refraction n letis than that ofthe bottom diclccti-ic portaotl B. In othca- words, nwhcrc n,is the cffeclive index of refraction oi'the top dielectric portion T, n,\., is the elTeclive indcx of iefniction of the iniddle dielectric portion M. and nt; is the eficctive index of refractiwt of thc hottorn dieiectrie portion B. Each of the top, middle and hottnm diclectric portions 'I, M attd B. respectively, can ittcltide a plnrality of'differcnt diclectt-ic layers, although in alternative cmhodin-tents any or all oCthese hortions need onlv includc a single dielectric layer. By uradunll~~ deeicasfng the respective effeclive indiccs of reii-acticxa "rt" Iz-oni the innermost or bottotn dielectric pi>rtion R, to lhc middle dielectric portion M, and on to the top dielectric 1?ortion ltoward the air, the anti-reflectiun svstem itf tiii4 embodiment enables increased vfsible transmiti~ion iv bc achieved.
5urpri.~in~ly;

the anti-re,tlu;tion system may also enahlc (airly neutral color of the coated artic-le. in certain cxample embodiments.

1:?C.~Mi'l.i?(S) 01' 1'lG. l_; 1;.VIF3()I)1VII?NT

104781 "f he'f abies below illustrate Example I ol the l, i,,_ 13 embodintcnt.
comparcd to a Compar'Uive Rxantple(s) (CE) similar to Fig. I (if the instant app)ication. fhe CE relate:s to a coating that is ;inli:at'to that.
illustrated in tl.S. Palent No. 6,576,349. The thicknesses for cach oi'the laycr5 in the First Fzible below are in an'strons (A). l'he Seconci Table heluw sets Fort6 the optical char,tcieristics (c_g_, visiblc transmission, color, etc.) #or f:xample I and tfre. CT b~ised tipoti bzing iinnealed and in monoltthic torm.

YIKS'I' TARI.F;: LAYER STRUC'TURE thickneses (F~i ~. t~ embodimcnt}
C. C 1-,x. I

C;lass Nb,(},. OA 3 47.,~
"TiO! 12ti& 0A
SijN~ 165 A OA
NiCrOr ISA 15A
Ak >SA 9;iA
Ni('rO116A 16,$

Sn0, 672A L)0A
Si;A=a 16)A OA
iViC'rOs ISA 11 A

!\o L?~;'1 ()LtiA
ti \i(:rO, 1A 16A

4?

Nh,C), oA UA

Sno~ 227A =12R.A
Si~N4 2 52A (l.~l SiO,N, 0i1 f)A
SiO: f) A ()A
1'ot'rl diel: 1606A 1504 A

S[iCUND -1't1LI1.F,: C)P't ICaL., PI~RfU1.ZV7ANC.'r; (Fig. Li Grrrbodirnent;
n2onolidlie) T\i; a*; h*; xglas"id (u) .1*p h*,. )Ziiliilsid, i;l a"f 1J"1' 1=.x.1: 78.4% - l.i 0.1 4.6% 9_0 -9.9 4.114, 3.2 -2.6 C'1:~: 7.5.53a -2.1 0.2 5.9~'% 9.2 -10.6 }.2"/0 3.2 -1.0 100797 It can he seen Crom the ".I';-ibles above regarding the Pi~~.- 13 embodinlent of titis invention, tliat the anti-reFlection systern of the instant inventinn embles not orily better visible Cransmi,siun cltaracteristics (i.c.., incrc.asee3 visible transmission 'l ,=,s %), but also reduceti rellection (e.g., lower glass side retleciion andlor lilm side visible rctlcction), In pzarticular, Example L(sec Fig. 13) had better visible trartsrnissiun (hi~her'i'v,ti) and hetter glass .rndit>r fiim sick- rellectinn (lower 42, and;or Rr) than the C'omparative l:xample (Cl's -- scc Fi11. 1). Surpi-isingly, lixample I also had niore netttral transmissive and glass side reflective color than the CE.

i{IOsQJ fig re 14 is a cross sectional view of a coated artiele according to another embotliment of tlii; invcntinn.'1'he Fig. 14 embodiment ditfers from the Fib.
13 ern6odiment in that the lop tin oxide layer of Fig. 13 has been replaced with a silicon nitride inc.lusive layer in Fi,-,. 1,4. The coatetl article of f'it.
14 includes from the glass stibslratc outwardly (all indices n at 550 ntn):

~lass (n- 1.51) niobiurn oxiile (c.t;-. Nhl,O;) (n 2.?5-2-5, preFerablV rr-2.33) nickel-ciuorrrfutn-o~idc (tiiCr(.),) silver ('1g?

1;

nickcl-chron-tium-oridc (Ni(.:r(.),) niobium oxidc Nh,()<) (n ?.Z5 ?.i, prcfurarly n 2.3 i) tin oxide (c.e.. SnC~~} (n- 1.4 to 2_2, preferably n2.0) nickel-chromiuni-otcide (NiC'rC) ) silvcr (Ait) nickei-chromiurn-crxidc (Ni('.rC),) silicori nih-idc (e.g., SiiN.y) (n1.8 to 2.O preferahly 71-2.(1}
air (u=1 , 0) (()081 j By nsing tltc ttiobiurn oxide, silicon nitricle, and tin oxidc dielectric layer5 as sliown in this emhotlimcnt, lhe laycr s>>stem can be cltaractcrized by tlie top diclcc-tric portion T havine an etiectivc index of reii'action n tcs5 than that of middle dielectric portion M, which in ttrrrl hat an effeetive indax o(refrttctiott n le5s than that ofthe hottoni. diciectric portion 13. In other words, nr-= n,ti<nri, wtiere trlis the et]eclivc index of retiaction of the top diclectric portion T, n t is the c;fiective index of retiuction of ttic middle dik:lc-c-uic portion M, ancl n is the effectivi;
index of r-ct'raction of ttre hotlont dielectric hortion B. Hach of thc top, middle and bottour diclectt-ic portions T, MLnid B, reshec:tively, can include rzplurality oFtlifFerent dieiectric layers, aiUwurh in alicrnative ernbodinicnts any or all of Phese portions need only inclnde a~'ingle diclcctric layer- By gradually decreasing the respcetivic ef'lective indices oi relrziclion n" tioni the innermost or hottom diele-ctric portion B, to the niiddlc dielectric portion M, and o3i to the top dielcctric portion T toward the air, the anti-retlection vyslcrn oFthi~ crnbo(iiiricnt enahlca incr~,)sec1 visibie tran;tnission to bc achieved. SurprisinLly, thc anti-rcflection system may also enablc tairly nentral color oCthc. coated articlo in certain exnmplc embodiments.

FXAM1'f,Ti(S) OF TIG. 14 L;Mi3t.)I>Ih41=NT

[00821 lhc I ahles helow illrrstrate F.xample I of the Fiti. 14 embodiment, compared to a('oraparativer f-:xanip)e(s) (CI:j similar to Fil. I ol'tlte instant aphlication. '1'he CF: rclatcs to a co,rting, that is similm to thw1 illustrated in l'.S. Patent No_ 6,576,349. "fhe tltic:kncsses tbr- cach of thc layers in the l-irst "1trble Lelow are in angstrurns (A). The Second Table beloU- sets tur~h the optical eharac(eristies (e.g., vi.sible transnlissiou, color, clc.) for Fxanrhle I and t9ic. (T based upot, beim, annealed and in monplitltic 1om).

hIRSI1'AF3LN:: LAYER STRUCTURE thickrnesses (FT. 14 cmihoclimeiat) CI l;.r. I

GI'<1ss Nh,t7y 0A 344A
f'i(h 1.25t1 oA
Si;Na 165A 0A
NiC'rC),, I 8A I4,1 Ag 98A 98A
NiCr(7c 16t1 16A
Ni b,O, qA 64IA
5nn, 672h. 89i-k Si;lva 165A 0A
Ni('rOr IS12 I$,4 A- 9~A 9ltA
Ni('rO, I(iA I(iA.
Nb O,. (A UA
SnOj T) 7A 0A
Si;\; 252i1 =I2,~A
SiO,N,OEk OA

si(), ().k 0A

Tntal (licl: IGa6A I502 A

S1:CON1) 1'AF3LF: OYt1Cri1. PF.P:FC)RMr1NCL IFiE:. I4cnihorliment; monolithic) ~
Ivi~ a~'l b*I 1Z~las_;.ilic(~J fl ) R~lim<idc(11 il*f h*I

!'.x. 1: 78.3':'u -1.4 0.C) =t.Ci'Yo 8.7 -9, i 4.1 % 3.4 -2.5 C.L. 75.5'%u -2.1 0.2 5.9"f1 9.2 -10_6 c~.l~ll 1.2 -I.0 100831 It crln be seen from the'1'ables abovc reLardin~~ the Fir. 14 eml?oditncnt of this iuventivrr, thLrt thc anti-rellcctiou system of tire inslant invenlion enables not only better visible transrnission characteristics (i.e., inereased visible Iransmission "I',;, '%I), but also reduCed reilection (e.g., lower blass side rcflccliun andior tilrn tii(Ie visible rellec.tion}. In particular, Example 1(sec; Fig_ 14) hird lktter visible transmission (higher'1'_) and hetter glass nmd%or tihn side rellectiorr (lower R, and;or Rr) than the C.omparalive Example (('L; --sec l:i.;. I). Surprisingly, Example I also had mor-e neutral transinissive and glass sidc rcflcclivc color tltln the Cl:.

100841 Fil4ure 15 is a. cross sectional vieNv irt a coaled article according lo arrother embodituent of this invention. Tiie Fig. 15 cmbodirnent dil'tcrs Iruni the Pig.
12 ernbodirnent in that tlie two upper nickel chrolnc oxide contacfi layurs have been reruovccl Ironi the FS-. 12 ctni?oditnenl. The coatcrl articlc of Fig. 15 includes Innii the glass substrate outwardly (all indices n at 55{) nrn). glass (n- 1.5 t }

ni0bitrtut osidC ivh;0 jn2.2i-2.5, prvferably n=72."ii) nickel-chromiurn-uXide (Ni(1-Or) silvcr (Ilg) niobiom oxi(le Nb,O;) (n- 2.2;-2.~, pr-eFer-alAy n==233) tin oxide (e_~., SnO,) (n I.h w 22, prclerahly n-2.(1) }
nickcl-chromiunt-oxide (Ni('rQ4 =1f) silver (:1u) niulliuni oxicte (e.g., Nb;p;} (n 2.25-2.5, preferablti- 1)=2.33) tin oxide (e.~~.., SnO-) (n--I -ti tr~ 2.2, prrl'erat~ly- n:~.0) silicon oxicle (e,g., SiC).>) (rr 1.4 to 1.7, prctdrahly n-1.45) vir ( n-1.0) 100$51 13V usinEz. the niobium oxide, silicun oxide, and. tin o.ride dielectr=ic layers as shown in tlris cnihoditnent, the layer system can be characterized by the top dieieclric portion 1having an effective index of re.fraetion ii less than th,rl ol'niiddle dieiectric pot.lion M, which in turn has an cfl~c.tivu indcx o!'refi'action n less than (hat ofthe bottom dielectric portion B. In other words, nr<n,;tvtt3, vwhcre nt is the efl:ective index of rclraction of the tol) dielectric portion T. nNh is the efiect.ive inclex of rcfraction oftlte ntiddle dielectric portion M, ttnd i.ttt is thc e1'Jc=ctivc irtdcx of t'efraction ot'the boticnn dielectric pot'tion 13. I-:ach oFthe top, tniddle anci hottonl dielectric porlions'1', M and 13, rzsttactively, can inetudc a plur,tlity of different dielectric layers, although in altcrnative embodiments any or all oE'tliwc portions need only incluclc a singEc dielectric layer. By gradually decreasing the rc:Pcctive effectivc:
ittdices of rtffaction "n" 1'rom the innenitost or bottom diclectric portion 13, to lhe niiddle dielcctric porti:on M. and on to tttc top dielectric portion l toward the air, the anti-retlection systcnt of this embodiment cna.bles incraased visible transmissitm to be aehieved. Surprisinwly, the anti-r-cflection svstem m:ay also atable fairly neutral color oCthc- coated article in certain example enntxxliments.

1; X AMI'L-E(S) OF FIG. 15 F.M130DIN1EN't' 1110861 The T.~blc; below illustrate Example I of thc Fig. 15 embodiment, cornpmred to a('oniparative Examplee(s) ((T) sirnilar to Fib. I ot'thc instant application. '17tc CF reJatcs to a coating th;tl i.s similar to that illutitrated in U.S. 1'atcnt No. 6,576, ~49. Tbe thicknesses for cach ol thc layers in the First Tablo below are in angstroms (A). Thc Sccontf l'abfc below sets f<)rlh (hc c>pticatl characteristics visible hransmission, color, v1c..) for Example I and thc (.'l.=, hased unon bcing annealed and in monolithic form.

I;

FIRS1 I_1BL,L: I.AYF,R STR1;C:'l'L1RG thir.kne-s,e, (Fi . 1-5 .:mbodiment) Cl:

Glass Nb,O.; oA 337A
f'i(}, t25A OA
Si;N,i 165A OA
Ni( "rO, 1 K,4 13,4 Ag 90% 9'-A
Ni("'xOx 16.A 0/l Nb O~ Ork --)frlA
SnO~ 672A 169A
SiiN:I I65A UA
NiCrOr I8l\ 1$Jk Ag 9KA 98A
NiCrO, 16A OQ
Nh,O,0,4 209A
Sno, 227A 50A
Si1Na 2j2A OA
SiO.xN,. 0A oA
Sif, t}A 379:1 'lbial dic,l: 1606A 17U5 A

S1'.('UN1) T'nf31t'.: (jP'Z1CAL 1'FitFORMANC'1's (Fig. I~ emhodimcrit;
itiunolithic) I, a*= Wsi IZ~his;>id:l,~i 1~~.. l)*_ ~11Ludr~=(li ~l~l h~l I'.x.1: h2.1"=1,, -l.1 0.5 4.7"i, 4.0 -3.9 >S ;, Q -1.8 C'.1';: 755 'n -11 02 5920 9.2 -10.6 5.2 .:o 12 -].O
lIl{It17J lt can be sccn Rom the- Tables ahowe reprding rhe Fig. I ti ernhoditnent of thi:s itn ention, that 1.he anti-rc)lection sysle.rn of tlie instant invention errables not only bettcr visible irartsn-tission characteristics (i_c-, increased visible transmission T_ %), bttt also reduced retlection lower plass side re]'lecl.iun andlnr tilm side visible rellec[ion). In partictrltrr. T?xanaple I(sae 1=i,,.. 15) had heltcr visible transniission (hirlicr l,;s) and hetter glass ancl/or f7lrrt side re-tlection (lnwer- R~ and%or R;) than ihe Comparative [;xmmple (('F. see Fig. 1). Surprisingly, E"xanaple I
alsi, had tnore neutral color than the Cli.

1{f11R81 Figure 16 is a cros; sectional vieNv of a coated article according to anotlrer emburliment of this invcntiun. The 1'ig. 16 embodiment (fi fiers fi-or3t the. Fig.
15 embodiment in tlrat tftc upper silicon rixicic and tin oridc layers in top diclcctric pnrtion T have bcen replaced %Ath a layer oFor including silicoti nxynitride.
1'hc coatcd article of Fib. 16 includo tium the Wass snbstrare nutwarclly (alf iudiccs n at 550 nni):

glass(n-1.5t}
niobiuni oxide (ey., Nb2O;) (n=2.25-2.5, preferably 11-2.33) nickcl-chromitrrn-oxitle (NiCrO.;) ilver (Ag) niobiurn o.xirlc (e.g.. Nh2Oti) (n 2.25-2.5, prelerahly n=2.5 3) tin oxidc 5nO2) (n=-I.S tn 2.2, prcfcrahly n-2-0) nickel-cnromiXnn-oxidc (\i('rO ) S'i IVer (Ag) niobium oxide (e.e-, NhX).) (n-2.2Q2.V pre.Rrahly n-233) silicon uxyuitndc (e.~.. SiO;Ny) (1) 1.45-2.0, preFcrably tr 1.6-1.9) air (n=1_t)) 10()891 By using the niobium oxidc, siiicou oxyttitridc, and tin oxide die-]ectric layers as shown in this ctnhodirnent, the layer system can be char3clerized by tlrc top dielectric portioat T having arr effectivc index ol' rel-raclion n Iea than that of rrliddle dielectric portion M, which in tut-n has att effective indr+.r oE'rufruction rr les-s than that uf the bottoni diclcctric ponion B. In otticr words, nt -nht<=nY, where nT is thc effettive index of refractiotr of the. top dielectric pnrtion T, nht is the ettzctive index of refraction of the middle dielectric portion hI, and nE is tfte eCfective index of rcfl-action ol'the bottom dielectric portiort B. I?,tch o['the tcip, tnicidtc and bottom clielectric portions T, lut trnd 13, respectivcly, c:nl inclurle a plurality crt'dirfc.rent diolectric layers, rithorttrh in alternative ernborlirnents any ot- all of these portions nee.tl only include a single dielectric layer. By gradually decreasing the respective cffcctive indices of refraction "n" frorn the innenni>st or bottorn dielcctric portion B, to the nriddle dielectric porlion ivt, and on to the top die.lectric portion 'f toward the air, lbe lnti-rvllcction svstem ot'this ernbod.innent enabtr.s increl5cd visible transznission to be aciiie;ved. Surprisingly, the anti-reflection systeni may also enable fairiy ncutral color of the coated article in certain exaniple ennhodinicnt.c The silicon oxynitride layer is be-ncfieial in that its index ot rcfraction n (at 550 ttrn) can bevaricd frotn 1.45 to 2Ø
tnore przler.ably .li=oan 1.6 to 1.9, and most prelerrbly fronl 1.65 to 1.85, in dittcrcnt emtzodiments of this invention. In this ttnd all other silicon oxyniiride inclusive enrbodimcnts herein, the silicon oxynitride layet- may have a constant (or approxirns.tely constant, i.e., constant I?hts!tninus abotd 5%) index ofrctraclion n throuL-111out its cntirc thickness in certain embodirncnts of this inventi.on, but alternatively niay be oxidation andior nitridc p,radcd so as to Izave an index of retiaction n which varies tlnouf;li the thickness ol'the layer (e.g., the iudex n n=tay -radua(ly decrcasc through the thickness of'the silicon oxynitride layer rnoving toward the air).

f:X.<1t\=7Yt.}:(S) OF FIG. 16 lib1BOI)lA]I:''IT

101)9()) 'I'he Tables b(~lovv illustratc I-;xample I of the Fig. 16 eoibotliment, con-tpared to a Connparalive T..xxrnple(,) (Cl-.) similar to Fig. 1 of Ihe inslsnt applicatiurr. 'f'he ('E rekues to a co;ttinz that is sintiiar to that illustrateri in ().ti. I'atent No. 6,570,',49. 'i']te dsi.cknesscs tir etrch of'thr ];aycrs in Ilsc First Iablc below are in an ~stn~a3is {~}. 7 he, 5econd "Table below sets tb.rth lhe optical characteristies (e.n eisible (ransinivsion, c'olor, etc.) li)r Example I and the CE basetf upon bcing. :annetaled and iaa anonolil.hic fi)rm.

1'IRST TARI..L.' l.Al'1'kt S'I'RIJ('Ti}Rfi-thiclaaesses (hig. 16 rnalxidiment) CLs 1=x.1 Gl a ss 0N 3,42A
7'iQ, 125A OA
SijN.i 165A OA
Ni004 18A iSh s;i(:r{), 16A Or l Nb,(), 0A 4A
Sno, 67 2 A i 88a.
Si,Ni 165A 01l NiCrOy 18A I SA
,1g 9SA 98r~ ~IiCz(l 16A (}.A

Nb<0y. OfL 182A
SnO> 227A oA
S) ;N25?A OA
SiU,,Ny. oA i36A
SiO, oA 0:A
Tolal L1iel: 1.606A 1602 A

SFCONT) TABLE: OPIICqL PERFORMANCE (Fig. 16 embodinront; mOnOlltlUC) 1..,s i1Xi 1J~'r ~gl.3tiv.aiu:ll;1 a*F= RIilm.;idcUl }1*I' Rx. l: 82.04h -I.1 -0.7 4.6 ,=% 4.5 -=1=.6 i.c)% 1.5 -1.$
CE: 75.5"'(') -2.1 0.2 5.9 i~1 9.2 - t(1.6 5.20/) 3_2 -1.0 101)911 11 can be seen ii-om the Tables above regardinu the Fi-. 16 embodiment of this invcrition, that the anti-reflection syst.em of the i3~slant invcntion enables not onlv hetter visible transmission characteristics (i.e., increased visible transmis.ion T,;, 6u1 .-3lsu reduc~d retlecf,ion (c.g., lower glass side rcflection and,''or tilrn si(ie vi5ible relTection). In particular. Exaimple 1(scc Fi~~. 16) had better visible transmission (higher'1',;,) and better l;la,s andior film side reflection (lower R. and%or Ro than the Comparative Lxample (CF. - see Fis;. I). Surprisin0y, Fxample Inlso had more neutral color than the CL (especially glass side rzfleclive calor).

100921 Figure 17 is a ctuss sectinnal view ot a coated articlc according to another embo4iment ot tlais invctttion. Thc Fig. 17 embociiment differs ti-um the Fig.
14 embodimetrt in that an adcGtional niobi.um oxidc 1<iye.r has bcen added to the top dielectric portion 1', and the two top cantact laycrs wcre Ni(:;r (i.e. not ;,inniiicantly oxicfied). 7'hc coateYl al-ticla of F'i.-. 17 iticludes from thc; glass substr,Yte outwardly (aII
inriices n at 550 tun):

glass(n 1.51) niobiwn oxid~ \b?Os) (n=2.25-2.5, rrelerably n=2.33) nici<el-chrornium-c>xicte (Ni(:rO,) silvcl' (A) nickol-chromium (NiC:r) niobiun.t oxide (c.g.. Nh20;) hi ?.25-2.5, prOe:r;rbly r3-2.33) tin otido (e.g., Sn(3,) to 2.). prckrablv n- 2.0) nickel-chromium-~~xidc (Ni('rC7,) silvor (Ag)

5:~

nickei-chr-oiroittnt (NiC.'r) niobittn-r oxide (e-g-; Nh,C);) (tr-=??5-2.5, pre(irrtthly n==2. 3 '3) siiicon nitride (c.g._ Si;N;) (1=1.3 to ?_f), pre[erably n--'2.l)) air (tr 1.0) [00931 By usini the niobium oxide, silicon nitride, and tin oxidc dielectric layers 1s shown in this ctnhodirnent, the layer >ysteit cati l7e cltaractcriru.d by the top dielectric portion 't having an effective indox of refrac-tion n lc;;s than or equal to that of irniddlc iliclcctric portion M, which in ttu-u has an effective intlex ofrefractinn n less than or equal to that t>t thc bo(tom diclcctric portion R. In ot6cr wordti.
nj<= hj<=ni3, where nI is the zi7ective indoN of t-eti-actiou of t[te top dielectric portion T, n%, is the cff'ective index of refi-ac.tion of the middle dielectric portion it1, and nti i5 the cffcctive index of'rcfraction of the bol.tom dicloct.ric portion B. li<ich o!'!hc top, midclle and bottom dicJcctric portions T, M and 13, respecliveiy, can inclttde a plurality of(liflerent tliciectric laycrs, although in altcrnative embodiments any or all of'these portions nccd only include a :inglc tlir-lcctric layer. 13y bradually decrcasing the respective e;ffccti~;e indices ofret~action "n" lrom the innermost or bottom dielectric portion B. to Itte midelle (tieleetric portiort M, and on to the tol) (iielectric pt7rtion -f toward the air, the anti-rctlection systcm ofthis ctitbudirnentertabl.es int:ri:ascd visible ir:isinission to be achieved- Surprisingly, the an[i-rcflcc don sy.,teni ntay also enabl.e fairly nctttral color of Ihe coatcd article in certain exnmPle enibodinients. While ihc two upper contact la}'er; wcrc Ni('r (not signilicantty oxided) in this embocfiment, it will bc ri;cm~nic,~d by those sttillczl in the art that in othor cmbodirnents of thi.s invention these Ni('r crintact Iayers may be nitrided-I;XJ\MNI.);'(S) OF FI(i. 17 IiVfLiODt1OL'NTT

100941 Thc'1'ablcs below illu,l.r;ifv I'xainplc I ofthc hig, 17 cmhotiirneot, cumpared to a Comparative Example(s) (CF) similar to Fig. I of the instant application. 'i'he ('t? relates to a co<itin- that is sintilar to that illr trated in U.S. Paient No. 6,576,349. 'I'lic thickncsscs Por each of thc layvrs in Qfie First "l ahle bclow are in anhstrorns (A). '! he Second '[ ablc belcrw ;ett f'ortlt the optical charactcristic; (e-'c..

visihlc trtnsmission, color, ctc.) :or L:xample 1<rn(i the CE bised trpoir lieim anne.ale.ct arid iri monulithic t'urm.

F'IRST'T,'1I3LE: LAYER STRtJC"1'C.1'RP thicknesses (Fil;. 17 embodiment) CL= rx. 1 Glass NT:i,O,, M 346,a TiC)~ 125A oA
Si,~Ia 165A 0.k NiC.rC), ISf1 15A Ag 98A 98A

NiCr0, 16i\ oA
Ni('r Urk 3A
Nbt()õ 0A 652A
Sn()2 672zk 1!}SA
Si;N4 I65A oA
NiCrO, 18A 18A
Ar; 99A 94A NiCrOx I6A (1A

Ni{'r O A 3A
tib,O, O~l tiefl Sn(_), ?77_1 OA
Si;N.i 252,1 ;50n Sif?,N U%'\ Ork SiU, Ufk QA

'1'otal riiel: 1 fiOGA 1544 A

S17CON1) 1'A13LP_: C)1'1T{'.AL PI'sRFORMAN("P, ('Fi-. 17 entbodimcnt;
monolithic) b*, R~~~n,.ddc(~1 a~h*_ Rr'i... õ. t,~ii a*i b*iEx. 1: 77.3% -1.8 -0.8 4.7%
10.3 -10.7 4.4" 0 4.1 -2.8 CF..: 75.51~0 02 ~i .9% 0.2 - ID.G 5.2 u 3? -i.0 (0095) It can be seen from the Tables above reL4arrling the Fig. 17 crnbodiment of this inventiuri, that the an[i-reflcction system of thc instant invention enables not orily bcttCr vi,'rhle trrtnsarfstiiorr chrrractcnslics (i.e., incrcuscd visible tran,rnission T,,,, hnt also reduced refleclia) (o.g., lower glass side refIccl.ion rmdior (iln)side visible reflection). fn particular, Example 1(sec Fig. 17) hal bettcr visible transmission (hi thcr 7",;,,) atid better glass andior tiltn side reflection (lowcr 1t, an(L'or Ri) than the Comparative Ex.r.n)ple ((';:,- aec Fiu. 1). Fairly neutral transmissive color was also provided in Example I_ 100961 Accordingly, coatecl articles of'~:ertain example embodiments oflltis invenliun are characterii.ed by onc or more of the folluvving Paramcters:
C.har~qcteristic General Mnre Preferred Most. Prcferred T,i, (111. C 2 d g-): 7011/u -= 75 io =r=76_5",~

RbY (111. C, 2 dog_ ): = 1 I X, 91y, =5.0"r',, IZr ' (111, ; 2 c cg-): ~ io h; = 5Q ' b 48 õ~. . ~ r~

100971 While the i.nvention has been de"cribcil in c<mnection with what is presently considered to he the most practical and hrci'crred cmhodiment, it is to he understood that the invention is riot lo be limited to thc disclosed embodinicni, but on lhe contrary. is intcnrlcd to cover various moelilicatioos and aduivale-nE
arrant;ements iticlucicd within the spirit an(i ,cape of thc appeidzd claims. For exampic :tnd I.Vithout litnitalion. material~, citlre:r than tho,e dcscribed abovc may hc us~d in utlae,r embodiments ot Ihi, 'tnvention.wiihout departin+= trom the 5pirit oFt[3is inventiott.
For cxample and Without Eimitation, silicon oxide lay,e.rw may be at lcasl parti;illy tiitrided in certain cmhodimenls, and silicim nilri(lc lavers may I>c at le;ist ptirtia]ly o:xidcd in ce.rtain ambudimcnts.

7(

Claims (25)

1. A coated article including a coating supported by a glass substrate, the coating comprising:
top, middle and bottom dielectric coating portions having effective or average indices of refraction n~, n M and n~, respectively:
first and second infrared (IR) reflecting layers comprising silver (Ag), wherein the first IR reflecting layer comprising Ag is located between the bottom and middle dielectric coating portions, and the second IR reflecting layer comprising Ag is located between the middle and top dielectric coating portions, and wherein the top, middle and bottom dielectric coating portions do not include the IR reflecting layers and also do not include contact layers which contact the IR reflecting layers;
the bottom dielectric coating portion comprising a first dielectric layer comprising titanium oxide provided between the first IR reflecting layer and the glass substrate;
the middle dielectric coating portion comprising a second dielectric layer having an index of refraction 1.8 <= n <= 2.2 provided between the first and second IR
reflecting layers, wherein the second dielectric layer has an index of refraction n less than the index of refraction n of the first dielectric layer;
the top dielectric coating portion comprising a third dielectric layer comprising titanium oxide provided over the first and second IR reflecting layers and a fourth dielectric layer comprising silicon oxide provided over the third dielectric layer comprising titanium oxide;
wherein the coated article has a visible transmission of at least 70%; and wherein the average or effective indices of refraction n~, n M and n~ of the top, middle and bottom dielectric coating portions respectively have values so that n r < n M, < n B.

2. The coated article of claim 1, wherein the second dielectric layer comprises tin oxide.

3. The coated article of claim 1, the middle dielectric coating portion further comprising another dielectric layer comprising titanium oxide located between the first and second IR reflecting layers.

4. The coated article of claim 3, wherein the another dielectric layer comprising titanium oxide is located under the second dielectric layer.

5. The coated article of claim 3, the top dielectric coating portion further comprising another dielectric layer comprising tin oxide located between the third dielectric layer comprising titanium oxide and the fourth dielectric layer comprising silicon oxide.

6. The coated article of claim 1, wherein each of the first and second IR
reflecting layers comprising Ag is sandwiched between and contacts a pair of contact layers, and wherein at least one of the contact layers adjacent each IR reflecting layer comprises at least one of NiCr, an oxide of NiCr, and a nitride of NiCr.

7. The coated article of claim 3, the bottom dielectric coating portion further comprising another dielectric layer comprising silicon nitride located between the first dielectric layer comprising titanium oxide and the first IR reflecting layer comprising Ag.

8. The coated article of claim 1, wherein the first dielectric layer comprising titanium oxide includes TiO2, and wherein the silicon oxide comprises SiO2.

9. The coated article of claim 3, wherein the coated article is characterized by a visible transmission of at least 75%. a sheet resistance (R s) of no greater than 10 ohms/square, and a glass side visible reflectance <-9%.

10. The coated article of claim 3, wherein the coated article has a visible transmission of at least 76.5%.

11. An IG window unit comprising the coated article of claim 1.

12. A coated article including a coating supported by a glass substrate, the coating comprising:

top, middle and bottom dielectric coating portions having effective or average indices of refraction n n, n M, and n B, respectively;
first and second infrared (IR) reflecting layers each comprising at least one of silver (Ag) and gold (Au), wherein the first IR reflecting layer is located between the bottom and middle dielectric coating portions, and the second IR reflecting layer is located between the middle and top dielectric coating portions, and wherein the top middle and bottom dielectric coating portions do not include the IR reflecting layers and also do not include contact layers which contact the IR reflecting layers;
the bottom dielectric coating portion comprising a first dielectric layer comprising titanium oxide provided between the first IR reflecting layer and the glass substrate;
the middle dielectric coating portion comprising a second dielectric layer comprising titanium oxide provided between the first and second IR reflecting layers and a third dielectric laver having an index of refraction 1.8 < = n < = 2.2 provided between the first and second IR reflecting layers, wherein the third dielectric layer has an index of refraction n less than the index of refraction n of at least one of the first and second dielectric layers;
the top dielectric coating portion comprising a fourth dielectric layer comprising silicon oxide provided over the first and second IR reflecting layers;
wherein the coated article has a visible transmission of at least 70%; and wherein the average or effective indices of refraction n T, n M and n B of the top, middle and bottom dielectric coating portions respectively have values so that n T < n M
< n B.

13. The coated article of claim 12, wherein the third dielectric layer comprises tin oxide.

14. The coated article of claim 12, rhe top dielectric coating portion further comprising another dielectric layer comprising silicon nitride provided between the second IR
reflecting layer and the fourth dielectric layer comprising silicon oxide.

15. The coated article of claim 12, the top dielectric coating portion further comprising another dielectric layer comprising titanium oxide provided between the second IR
reflecting layer and the fourth dielectric layer comprising silicon oxide.

16. The coated article of claim 12, the top dielectric coating portion further comprising another dielectric layer comprising tin oxide provided between the second IR
reflecting layer and the fourth dielectric layer comprising silicon oxide.

17. The coated article of claim 12, the bottom dielectric coating portion further comprising another dielectric layer comprising silicon nitride located between the first dielectric layer comprising titanium oxide and the first IR reflecting layer.

18. The coated article of claim 12, wherein each of the first and second IR
reflecting layers comprises Ag and is sandwiched between and contacts a pair of contact layers, and wherein at least one of the contact layers adjacent each IR reflecting layer comprises at least one of NiCr, an oxide of NiCr, and a nitride of NiCr..

19. The coated article of claim 12, wherein the first and second dielectric layers comprising titanium oxide each include TiO2.

20. The coated article of claim 12, wherein the coated article is further characterized by a visible transmission of at least 75%, a sheet resistance (R9) of no greater than 10 ohms/square, and a glass side visible reflectance < = 9%.

21. The coated article of claim 20, wherein the coated article has a visible transmission of at least 76.5%.

22. A window comprising the coated article of claim 12.

23. A coated article including a coating supported by a glass substrate, the coating comprising:
top, middle and bottom dielectric coating portions having effective or average indices of refraction n T, n M and n B respectively;

first and second infrared (IR) reflecting layers each comprising at least one of silver (Ag) and gold (Au), wherein the first IR reflecting layer is located between the bottom and middle dielectric coating portions, and the second IR reflecting layer is located between the middle and top dielectric coating portions;
the bottom dielectric coating portion comprising a first dielectric layer comprising titanium oxide provided between the first IR reflecting layer and the glass substrate;
the middle dielectric coating portion comprising a second dielectric layer comprising titanium oxide provided between the first and second IR reflecting layers, and a third dielectric layer having an index of refraction 1.8 < = n < = 2.2 provided between the first and second IR reflecting layers, wherein the third dielectric layer has an index of refraction n less than the index of refraction n of at least one of the first and second dielectric layers;
the top dielectric coating portion comprising a forth dielectric layer comprising at least one of silicon nitride and silicon oxynitride provided over the first and second IR
reflecting layers;
wherein the coated article has a visible transmission of at least 70%; and wherein the average or effective indices of refraction n T, n M and n B of the top, middle and bottom dielectric coating portions respectively have values so that n T < n M
< n B.

24. The coated article of claim 23, wherein the fourth dielectric layer comprises silicon oxynitride.

25. The coated article of claim 24, wherein the fourth dielectric layer comprising silicon oxynitride is at least one of oxidation graded and nitrogen graded, so that an index of refraction n of the fourth dielectric layer comprising silicon oxynitride changes from a first value in a first portion of the fourth dielectric layer to a smaller second value in a second portion of the fourth dielectric layer, wherein the second portion of the fourth dielectric layer comprising silicon oxynitride with the smaller index of refraction n is further from the IR reflecting layers than is the first portion of the fourth dielectric layer.