CA2474886A1 - Multi-mode interference optical waveguide device - Google Patents
Multi-mode interference optical waveguide device Download PDFInfo
- Publication number
- CA2474886A1 CA2474886A1 CA002474886A CA2474886A CA2474886A1 CA 2474886 A1 CA2474886 A1 CA 2474886A1 CA 002474886 A CA002474886 A CA 002474886A CA 2474886 A CA2474886 A CA 2474886A CA 2474886 A1 CA2474886 A1 CA 2474886A1
- Authority
- CA
- Canada
- Prior art keywords
- hollow core
- splitter
- optical amplifier
- mode
- waveguides
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
- G02B6/2808—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using a mixing element which evenly distributes an input signal over a number of outputs
- G02B6/2813—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using a mixing element which evenly distributes an input signal over a number of outputs based on multimode interference effect, i.e. self-imaging
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12176—Etching
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
- Lasers (AREA)
- Optical Communication System (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
A mufti-mode interference (MMI) device (90), comprising a hollow core multi-mode waveguide optically (32) coupled to at least one hollow core input waveguide (30; 34; 36), is described in which the internal surfaces of the hollow core waveguides carry a reflective coating (92). The coating may be a low refractive index material at the wavelength of operation, such as a metal, or a multiple layer dielectric stack. Resonators (150) and optical amplifiers (110) using such (MMI) devices are also described.
Claims (27)
1 A multi-mode interference (MMI) device comprising a hollow core multi-mode waveguide region optically coupled to at least one hollow core input waveguide, wherein the internal surfaces of said hollow core waveguides carry a reflective coating.
2 A device as claimed in claim 1 wherein the reflective coating comprises at least one layer of material having a refractive index less than that of the waveguide core within the operating wavelength band.
3 A device as claimed in claim 2 wherein at least one of the at least one layers of material carried on the internal surface of the hollow core waveguides is a metal.
4 A device as claimed in claim 3 wherein the metal is any one of gold, silver or copper.
A device as claimed in any preceding claim wherein the reflective coating comprises one or more layers of dielectric material.
6 A device as claimed in any preceding claim for operation with radiation between 1.4µm and 1.6µm in wavelength.
7 A device as claimed in any one of the preceding claims wherein the at least one hollow core input waveguide is a fundamental mode waveguide.
8 A device as claimed in any one of claims 1 to 6 wherein the at least one hollow core input waveguide is a multi-mode waveguide.
9 A device as claimed in any preceding claim wherein the hollow core multi-mode waveguide region has a substantially rectangular cross-section.
A device according to claim 9 wherein the dimensions of the hollow core multi-mode waveguide region are selected to provide re-imaging of the optical input field carried by said at least one hollow core input waveguide.
11. A device as claimed in any one of claims 9 to 10 wherein opposite surfaces forming the rectangular internal cross-section of the hollow core multi-mode waveguide region have substantially equal effective refractive indices and adjacent surfaces forming the rectangular internal cross-section hollow core multi-mode waveguide region have different effective refractive indices.
12. A device as claimed in any of claims 1 to 8 wherein the hollow core multi-mode waveguide region has a substantially circular cross-section and the diameter and length of the hollow core multi-mode waveguide region are selected to provide re-imaging of the optical input field carried by said at least one hollow core input waveguide.
13. A device as claimed in any preceding claim wherein the hollow waveguides of the MMI device are formed in semiconductor material.
14. A device as claimed in claim 13 wherein the semiconductor material comprises Silicon.
15. A device as claimed in any of claims 13-14 wherein the hollow core waveguides are formed using semiconductor micro-fabrication techniques.
16 A device according to claim 15 wherein the semiconductor micro-fabrication technique is Deep Reactive Ion Etching (DRIE).
17. An device as claimed in any one of claims 1 to 12 wherein the hollow core waveguides are formed in a layer of plastic or polymer.
18. An device as claimed in any one of claims 1 to 12 wherein the hollow core waveguides are formed from glass.
19. A device as claimed in any preceding claim wherein the hollow core waveguides comprises gas.
20. A device as claimed in claim 19 wherein the gas is air.
21. A device as claimed in claim 19 wherein the gas is an optical gain medium.
22. A device as claimed in any one of claims 1 to 18 wherein the hollow core comprises liquid.
23 An optical amplifier comprising a 1-to-N way beam splitter, a multiple element optical amplifier, and a beam recombines connected in optical series, the optical amplifier acting on at least one of the outputs of the 1-to-N way beam splitter, wherein at least one of the 1-to-N way beam splitter and beam recombines comprise a hollow core multi-mode interference device as claimed in any of claims 1-22.
24 An optical amplifier as claimed in claim 23 wherein the 1-to-N beam sputter and the beam recombines both comprise hollow core mufti-mode interference devices as claimed in any of claims 1-22.
25 An optical amplifier as claimed in claim 23 wherein the 1-to-N beam splitter comprises a solid core MMI splitter device.
26 An optical amplifier as claimed in any one of claims 23 to 25 and further comprising phase offset means to adjust the relative phases of the amplified beams prior to beam recombination in the beam recombiner.
27 A resonator comprising;
a partial reflector, a splitter/recombiner means, a multi-element optical amplifier, and a reflector, the partial reflector, splitter/recombiner means, multi-element optical amplifier and reflector being arranged such that the splitter/recombiner means splits a single beam into N beams where N is greater than or equal to 2, each of the N beams are amplified by the multi-element optical amplifier, reflected by the reflector and redirected to pass back through the multi-element amplifier, the N beams then being recombined by the splitter/recombiner means to form a single beam, a portion of that single beam exiting the resonator through the partial reflector, wherein the splitter/recombiner means is a hollow core multi-mode interference device as claimed in any of claims 1-22.
a partial reflector, a splitter/recombiner means, a multi-element optical amplifier, and a reflector, the partial reflector, splitter/recombiner means, multi-element optical amplifier and reflector being arranged such that the splitter/recombiner means splits a single beam into N beams where N is greater than or equal to 2, each of the N beams are amplified by the multi-element optical amplifier, reflected by the reflector and redirected to pass back through the multi-element amplifier, the N beams then being recombined by the splitter/recombiner means to form a single beam, a portion of that single beam exiting the resonator through the partial reflector, wherein the splitter/recombiner means is a hollow core multi-mode interference device as claimed in any of claims 1-22.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0201950.3 | 2002-01-29 | ||
GBGB0201950.3A GB0201950D0 (en) | 2002-01-29 | 2002-01-29 | Multimode interference optical waveguide device |
PCT/GB2003/000370 WO2003065088A2 (en) | 2002-01-29 | 2003-01-29 | Multi-mode interfrence optical waveguide device |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2474886A1 true CA2474886A1 (en) | 2003-08-07 |
CA2474886C CA2474886C (en) | 2011-10-04 |
Family
ID=9929913
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA2474886A Expired - Fee Related CA2474886C (en) | 2002-01-29 | 2003-01-29 | Multi-mode interference optical waveguide device |
Country Status (13)
Country | Link |
---|---|
US (1) | US7072542B2 (en) |
EP (1) | EP1472560B1 (en) |
JP (1) | JP2005516252A (en) |
KR (1) | KR20040077903A (en) |
CN (2) | CN100362380C (en) |
AT (1) | ATE370433T1 (en) |
AU (1) | AU2003208387A1 (en) |
CA (1) | CA2474886C (en) |
DE (1) | DE60315599T2 (en) |
ES (1) | ES2288210T3 (en) |
GB (1) | GB0201950D0 (en) |
HK (2) | HK1080948A1 (en) |
WO (1) | WO2003065088A2 (en) |
Families Citing this family (39)
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GB0225595D0 (en) * | 2002-11-02 | 2002-12-11 | Qinetiq Ltd | Optical device |
WO2005025748A1 (en) * | 2003-09-17 | 2005-03-24 | Nanocomms Patents Limited | Microstructure devices and their production |
GB0327661D0 (en) * | 2003-11-28 | 2003-12-31 | Qinetiq Ltd | Optical Amplifier |
JP4582289B2 (en) * | 2003-12-26 | 2010-11-17 | 日本電気株式会社 | Semiconductor laser |
WO2006025064A2 (en) * | 2004-09-02 | 2006-03-09 | Ramot At Tel-Aviv University Ltd. | Embedded channels, embedded waveguides and methods of manufacturing and using the same |
IL166810A0 (en) * | 2005-02-10 | 2006-01-15 | Univ Ramot | All-optical devices and methods for data processing |
SE528653C2 (en) * | 2005-05-30 | 2007-01-09 | Phoxtal Comm Ab | Integrated chip |
US7239777B1 (en) * | 2006-03-09 | 2007-07-03 | Lockheed Martin Coherent Technologies, Inc. | Method and apparatus to coherently combine high-power beams in self-imaging waveguides |
JP5250768B2 (en) * | 2007-08-24 | 2013-07-31 | 国立大学法人九州大学 | Semiconductor laser and semiconductor laser device |
JP2011520153A (en) * | 2008-05-09 | 2011-07-14 | ヒューレット−パッカード デベロップメント カンパニー エル.ピー. | Method for manufacturing hollow waveguide with large core |
DE102008044818A1 (en) | 2008-08-28 | 2010-03-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Multimode interference coupler and method for its structural design |
US8965156B2 (en) | 2010-08-12 | 2015-02-24 | Octrolix Bv | Beam combiner |
US8855447B2 (en) | 2010-08-12 | 2014-10-07 | Octrolix Bv | Scanning laser projector |
KR101416437B1 (en) * | 2010-11-03 | 2014-07-10 | 한국전자통신연구원 | Wavelength tunable external cavity laser generating device |
US9379515B1 (en) * | 2011-02-10 | 2016-06-28 | Mellanox Technologies Silicon Photonics Inc. | Laser combining light signals from multiple laser cavities |
EP2557440A1 (en) * | 2011-08-12 | 2013-02-13 | Octrolix BV | Beam combiner |
WO2014012141A1 (en) * | 2012-07-17 | 2014-01-23 | The University Of Sydney | Measurement system for radiation dose |
US9269662B2 (en) * | 2012-10-17 | 2016-02-23 | Cree, Inc. | Using stress reduction barrier sub-layers in a semiconductor die |
US8922787B2 (en) * | 2013-01-07 | 2014-12-30 | Si-Ware Systems | Spatial splitting-based optical MEMS interferometers |
JP2014219509A (en) * | 2013-05-07 | 2014-11-20 | 住友電気工業株式会社 | Coherent mixer, 2×2 multimode interferometer |
GB2522410A (en) | 2014-01-20 | 2015-07-29 | Rockley Photonics Ltd | Tunable SOI laser |
GB2522252B (en) | 2014-01-20 | 2016-04-20 | Rockley Photonics Ltd | Tunable SOI laser |
EP2908449A1 (en) * | 2014-02-18 | 2015-08-19 | Alcatel Lucent | Device for transmitting and/or modulating optical signals with passive phase shifters |
CN106291815A (en) * | 2014-02-21 | 2017-01-04 | 杭州天野通信设备有限公司 | A kind of one point of No. 16 optical branching device of integrated-type and preparation method thereof |
CN104503023B (en) * | 2014-12-23 | 2018-09-11 | 中国科学院半导体研究所 | External modulation type based on multimode interference structure lacks mould optical communication transmission chip |
US9841556B2 (en) | 2015-05-29 | 2017-12-12 | Corning Incorporated | Non-circular multicore fiber and method of manufacture |
US9835812B2 (en) | 2015-08-04 | 2017-12-05 | Corning Incorporated | Multi-optical fiber aggregate |
GB2547467A (en) | 2016-02-19 | 2017-08-23 | Rockley Photonics Ltd | Tunable laser |
US11699892B2 (en) | 2016-02-19 | 2023-07-11 | Rockley Photonics Limited | Discrete wavelength tunable laser |
US10551714B2 (en) * | 2017-05-17 | 2020-02-04 | Finisar Sweden Ab | Optical device |
US10811848B2 (en) | 2017-06-14 | 2020-10-20 | Rockley Photonics Limited | Broadband arbitrary wavelength multichannel laser source |
CN107611775B (en) * | 2017-09-28 | 2019-12-24 | 中国科学院长春光学精密机械与物理研究所 | Semiconductor laser and manufacturing method thereof |
CN108196340B (en) * | 2018-01-10 | 2019-11-12 | 南京邮电大学 | A kind of three dimensional pattern conversion beam splitter based on multiple-mode interfence coupling |
CN108288818B (en) * | 2018-02-05 | 2023-08-01 | 浙江大学 | Tunable semiconductor laser based on half-wave coupling partial reflector |
CN109391471B (en) * | 2018-10-15 | 2021-07-06 | 中国科学技术大学 | Hybrid waveguide integrated interferometer and quantum key distribution system |
CN110823111A (en) * | 2019-12-10 | 2020-02-21 | 大连理工大学 | Iron-plated film single-mode-multi-mode-single-mode optical fiber sensor for monitoring corrosion of steel bars |
CN111289017B (en) * | 2020-05-13 | 2020-08-04 | 西湖大学 | Optical waveguide multimode imaging-based touch sensor, system and interference detection method |
US11378749B2 (en) * | 2020-11-12 | 2022-07-05 | Globalfoundries U.S. Inc. | Optical power splitters with a multiple-level arrangement |
CN113900177B (en) * | 2021-09-30 | 2023-08-11 | 烽火通信科技股份有限公司 | Optical beam combiner and preparation method thereof |
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-
2002
- 2002-01-29 GB GBGB0201950.3A patent/GB0201950D0/en not_active Ceased
-
2003
- 2003-01-29 AU AU2003208387A patent/AU2003208387A1/en not_active Abandoned
- 2003-01-29 JP JP2003564625A patent/JP2005516252A/en active Pending
- 2003-01-29 US US10/502,910 patent/US7072542B2/en not_active Expired - Fee Related
- 2003-01-29 CA CA2474886A patent/CA2474886C/en not_active Expired - Fee Related
- 2003-01-29 DE DE60315599T patent/DE60315599T2/en not_active Expired - Lifetime
- 2003-01-29 WO PCT/GB2003/000370 patent/WO2003065088A2/en active IP Right Grant
- 2003-01-29 AT AT03706675T patent/ATE370433T1/en not_active IP Right Cessation
- 2003-01-29 CN CNB038074036A patent/CN100362380C/en not_active Expired - Fee Related
- 2003-01-29 EP EP03706675A patent/EP1472560B1/en not_active Expired - Lifetime
- 2003-01-29 ES ES03706675T patent/ES2288210T3/en not_active Expired - Lifetime
- 2003-01-29 KR KR10-2004-7011701A patent/KR20040077903A/en not_active Application Discontinuation
- 2003-01-29 CN CNB2007100857560A patent/CN100533190C/en not_active Expired - Fee Related
-
2006
- 2006-01-17 HK HK06100754A patent/HK1080948A1/en not_active IP Right Cessation
- 2006-01-17 HK HK08100759.3A patent/HK1107845A1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
DE60315599T2 (en) | 2007-11-29 |
GB0201950D0 (en) | 2002-03-13 |
WO2003065088A3 (en) | 2004-03-25 |
CN100362380C (en) | 2008-01-16 |
ES2288210T3 (en) | 2008-01-01 |
KR20040077903A (en) | 2004-09-07 |
US20050053322A1 (en) | 2005-03-10 |
HK1107845A1 (en) | 2008-04-18 |
DE60315599D1 (en) | 2007-09-27 |
CN101025459A (en) | 2007-08-29 |
HK1080948A1 (en) | 2006-05-04 |
WO2003065088A2 (en) | 2003-08-07 |
CN100533190C (en) | 2009-08-26 |
CA2474886C (en) | 2011-10-04 |
ATE370433T1 (en) | 2007-09-15 |
EP1472560A2 (en) | 2004-11-03 |
AU2003208387A1 (en) | 2003-09-02 |
EP1472560B1 (en) | 2007-08-15 |
CN1643420A (en) | 2005-07-20 |
US7072542B2 (en) | 2006-07-04 |
JP2005516252A (en) | 2005-06-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request | ||
MKLA | Lapsed |
Effective date: 20190129 |