CA2567048A1 - Coated article with ion treated underlayer and corresponding method - Google Patents

Coated article with ion treated underlayer and corresponding method Download PDF

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Publication number
CA2567048A1
CA2567048A1 CA002567048A CA2567048A CA2567048A1 CA 2567048 A1 CA2567048 A1 CA 2567048A1 CA 002567048 A CA002567048 A CA 002567048A CA 2567048 A CA2567048 A CA 2567048A CA 2567048 A1 CA2567048 A1 CA 2567048A1
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CA
Canada
Prior art keywords
layer
silicon nitride
coated article
ion beam
treating
Prior art date
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Granted
Application number
CA002567048A
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French (fr)
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CA2567048C (en
Inventor
Vijayen Veerasamy
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Guardian Glass LLC
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Individual
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Publication of CA2567048A1 publication Critical patent/CA2567048A1/en
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0055—Other surface treatment of glass not in the form of fibres or filaments by irradiation by ion implantation
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C03C17/366—Low-emissivity or solar control coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/78—Coatings specially designed to be durable, e.g. scratch-resistant
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/32—After-treatment
    • C03C2218/326—Nitriding
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31—Surface property or characteristic of web, sheet or block
    • Y10T428/315—Surface modified glass [e.g., tempered, strengthened, etc.]

Abstract

A coated article is provided that may be used as a vehicle windshield, insulating glass (IG) window unit, or the like. Ion beam treatment is performed on a layer(s) of the coating. For example, a silicon nitride layer of a low-E coating may be ion beam treated. It has been found that ion beam treatment, for example, of a silicon nitride underlayer is advantageous in that sodium migration from the glass substrate toward the IR reflecting layer(s) can be reduced during heat treatment.

Claims (58)

1. A method of making a coated article, the method comprising:
providing a glass substrate;

forming a layer comprising silicon nitride on the substrate;

ion beam treating the layer comprising silicon nitride in a manner so as to cause at least part of the layer comprising silicon nitride to comprise nitrogen-doped Si3N4; and forming an infrared (IR) reflecting layer comprising silver on the substrate over at least the ion beam treated layer comprising silicon nitride.
2. The method of claim 1, wherein said ion beam treating causes the layer comprising silicon nitride to realize an average hardness of at least 20 GPa.
3. The method of claim 1, wherein said ion beam treating causes the layer comprising silicon nitride to realize an average hardness of at least 22 GPa.
4. The method of claim 1, wherein said ion beam treating causes the layer comprising silicon nitride to realize an average hardness of at least 24 GPa.
5. The method of claim 1, further comprising forming at least one layer comprising zinc oxide between the layer comprising silicon nitride and the IR
reflecting layer.
6. The method of claim 1, further comprising sputtering another layer on the substrate so as to be located between the glass substrate and the layer comprising silicon nitride.
7. The method of claim 1, further comprising forming at least a layer comprising NiCr on the substrate over at least the IR reflecting layer.
8. The method of claim 1, wherein said ion beam treating includes ion beam treating at least part of the layer comprising silicon nitride with at least nitrogen ions.
9. The method of claim 1, wherein said ion beam treating comprises directing an ion beam comprising nitrogen ions at the layer comprising silicon nitride at the same time that the layer comprising silicon nitride is being grown by sputtering at least one target comprising silicon.
10. The method of claim 1, wherein said ion beam treating is performed in a manner so that the layer comprising silicon nitride has compressive stress.
11. The method of claim 1, wherein said ion beam treating causes the layer comprising silicon nitride to include Si3N4 doped with at least 2% nitrogen.
12. The method of claim 1, wherein the layer comprising silicon nitride following said ion beam treating has compressive stress of from 50 MPa to 2 GPa.
13. The method of claim 1, further comprising heat treating the coated article in a manner sufficient for at least one of tempering and heat bending, so that following said heat treating the coated article has a visible transmission of at least 70% and a sheet resistance (R s) of no greater than 5.5 ohms/square.
14. The method of claim 1, further comprising heat treating the coated article in a manner sufficient for at least one of tempering and heat bending, so that following said heat treating the coated article has a visible transmission of at least 75% and a sheet resistance (R s) of no greater than 2.5 ohms/square.
15. The method of claim 1, wherein prior to any optional heat treating, the coated article in monolithic form has a visible transmission of at least 70%
and a sheet resistance (R s) of no greater than 6.0 ohms/square.
16. The method of claim 1, further comprising forming a layer comprising zinc oxide on the glass substrate over at least the IR reflecting layer, thereafter forming an overcoat layer comprising silicon nitride on the glass substrate, and ion beam treating the overcoat layer comprising silicon nitride.
17. The method of claim 1, wherein the layer comprising silicon nitride further comprises from about 1-10% aluminum, and wherein said ion beam treating comprises ion beam treating the layer comprising silicon nitride after the layer comprising silicon nitride has been formed by only sputtering.
18. he method of claim 1, wherein said ion beam treating causes at least part of the layer comprising silicon nitride to include Si3N4 doped with from about 0.5 to 20% nitrogen.
19. The method of claim 1, wherein said ion beam treating causes the layer comprising silicon nitride to include Si3N4 doped with from about 2 to 10%
nitrogen.
20. A window comprising the coated article made according to the method of claim 1.
21. The method of claim 1, wherein the ion beam treated layer comprising silicon nitride is in direct contact with the glass substrate.
22. A method of making a coated article, the method comprising:
providing a glass substrate;

forming a layer comprising silicon nitride on the substrate;

ion beam treating the layer comprising silicon nitride in a manner so as to cause the layer comprising silicon nitride to have an average hardness of at least 20 GPa; and forming an infrared (IR) reflecting layer on the glass substrate over at least the ion beam treated layer comprising silicon nitride.
23. The method of claim 22, wherein the layer comprising silicon nitride is in direct contact with the glass substrate.
24. The method of claim 22, wherein said ion beam treating causes the layer comprising silicon nitride to realize an average hardness of at least 24 GPa.
25. The method of claim 22, wherein said ion beam treating causes the layer comprising silicon nitride to realize compressive stress.
26. The method of claim 22, further comprising forming at least one layer comprising zinc oxide between the layer comprising silicon nitride and the IR
reflecting layer.
27. The method of claim 22, further comprising sputtering another layer on the substrate so as to be located between the glass substrate and the layer comprising silicon nitride.
28. The method of claim 22, wherein said ion beam treating includes ion beam treating at least part of the layer comprising silicon nitride with at least nitrogen ions.
29. The method of claim 22, wherein said ion beam treating comprises directing an ion beam comprising nitrogen ions at the layer comprising silicon nitride at the same time that the layer comprising silicon nitride is being grown by sputtering at least one target comprising silicon.
30. The method of claim 22, wherein said ion beam treating is at least partially performed after the layer comprising silicon nitride has been sputter-deposited.
31. The method of claim 22, wherein the layer comprising silicon nitride following said ion beam treating has compressive stress of from 50 MPa to 2 GPa.
32. The method of claim 22, further comprising heat treating the coated article in a manner sufficient for at least one of tempering and heat bending, so that following said heat treating the coated article has a visible transmission of at least 70% and a sheet resistance (R s) of no greater than 5.5 ohms/square.
33. The method of claim 22, further comprising heat treating the coated article in a manner sufficient for at least one of tempering and heat bending, so that following said heat treating the coated article has a visible transmission of at least 75% and a sheet resistance (R s) of no greater than 2.5 ohms/square.
34. The method of claim 22, wherein prior to any optional heat treating, the coated article in monolithic form has a visible transmission of at least 70% and a sheet resistance (R s) of no greater than 6.0 ohms/square.
35. The method of claim 22, wherein the IR reflecting layer comprises silver, and where the method further comprises forming a layer comprising zinc oxide on the glass substrate over at least the IR reflecting layer, and thereafter forming an overcoat layer on the glass substrate.
36. The method of claim 22, wherein the layer comprising silicon nitride further comprises from about 1-10% aluminum, and wherein said ion beam treating comprise ion beam treating the layer comprising silicon nitride after the layer comprising silicon nitride has been formed by only sputtering.
37. A window comprising the coated article made according to the method of claim 22.
38. The method of claim 22, further comprising forming an overcoat layer comprising silicon nitride on the substrate over at least the IR reflecting layer, and ion beam treating the overcoat layer comprising silicon nitride.
39. The method of claim 38, wherein the overcoat layer comprising silicon nitride is ion beam treated with at least nitrogen ions.
40. A coated article including a glass substrate which supports a coating thereon, the coating comprising at least the following layers:

a layer comprising silicon nitride supported by the glass substrate;

an IR reflecting layer located on and supported by the substrate, the IR
reflecting layer being located over at least the layer comprising silicon nitride; and wherein the layer comprising silicon nitride comprises nitrogen-doped Si3N4.
41. The coated article of claim 40, wherein the layer comprising nitrogen-doped Si3N4 is doped with at least 2% nitrogen.
42. The coated article of claim 40, wherein the coated article has a visible transmission of at least about 70% and a sheet resistance of less than or equal to about 6 ohms/square.
43. The coated article of claim 40, wherein the layer comprising silicon nitride is located in direct contact with the glass substrate.
44. The coated article of claim 40, further comprising an overcoat layer comprising silicon nitride located on the substrate over at least the IR
reflecting layer, wherein the overcoat layer comprising silicon nitride has compressive stress.
45. The coated article of claim 40, wherein the IR reflecting layer comprises silver.
46. The coated article of claim 40, further comprising a layer comprising zinc oxide, wherein the IR reflecting layer is located over and contacts the layer comprising zinc oxide.
47. The coated article of claim 40, wherein the layer comprising silicon nitride has compressive stress and is ion beam treated.
48. The coated article of claim 40, wherein the coating comprises first and second layers comprising silver with at least one dielectric layer provided therebetween.
49. The coated article of claim 40, wherein the coated article is heat treated, has a visible transmission of at least 70% and a sheet resistance (R
s) of no greater than 5.5 ohms/square.
50. The coated article of claim 40, further comprising an oxidation graded layer comprising NiCr contacting the IR reflecting layer.
51. The coated article of claim 40, wherein the layer comprising silicon nitride further includes at least one of aluminum and oxygen.
52. The coated article of claim 40, wherein the coated article is a window.
53. The coated article of claim 40, wherein the layer comprising silicon nitride has an average hardness of at least 20 GPa.
54. The coated article of claim 40, wherein the layer comprising silicon nitride has an average hardness of at least 24 GPa.
55. A coated article including a glass substrate which supports a coating thereon, the coating comprising at least the following layers:

a layer comprising silicon nitride which has an average hardness of at least GPa;

an IR reflecting layer located on the substrate over at least the layer comprising silicon nitride; and wherein the coated article has a visible transmission of at least about 70%
and a sheet resistance of less than or equal to about 6 ohms/square.
56. The coated article of claim 55, wherein the layer comprising silicon nitride has an average hardness of at least 24 GPa.
57. The coated article of claim 55, wherein the coated article is thermally tempered.
58. The coated article of claim 55, wherein the layer comprising silicon nitride comprises nitrogen-doped Si3N4.
CA2567048A 2004-06-25 2005-06-22 Coated article with ion treated underlayer and corresponding method Expired - Fee Related CA2567048C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/875,497 US7550067B2 (en) 2004-06-25 2004-06-25 Coated article with ion treated underlayer and corresponding method
US10/875,497 2004-06-25
PCT/US2005/022198 WO2006012185A1 (en) 2004-06-25 2005-06-22 Coated article with ion treated underlayer and corresponding method

Publications (2)

Publication Number Publication Date
CA2567048A1 true CA2567048A1 (en) 2006-02-02
CA2567048C CA2567048C (en) 2010-12-07

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ID=34981127

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CA2567048A Expired - Fee Related CA2567048C (en) 2004-06-25 2005-06-22 Coated article with ion treated underlayer and corresponding method

Country Status (8)

Country Link
US (2) US7550067B2 (en)
EP (1) EP1758829B1 (en)
AT (1) ATE465137T1 (en)
CA (1) CA2567048C (en)
DE (1) DE602005020784D1 (en)
ES (1) ES2344851T3 (en)
PL (1) PL1758829T3 (en)
WO (1) WO2006012185A1 (en)

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CA2567048C (en) 2010-12-07
WO2006012185A1 (en) 2006-02-02
ES2344851T3 (en) 2010-09-08
PL1758829T3 (en) 2010-09-30
ATE465137T1 (en) 2010-05-15
US20050287309A1 (en) 2005-12-29
US7550067B2 (en) 2009-06-23
EP1758829A1 (en) 2007-03-07
US20090226714A1 (en) 2009-09-10
DE602005020784D1 (en) 2010-06-02
EP1758829B1 (en) 2010-04-21
US8147972B2 (en) 2012-04-03

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