CA2598717A1 - Method and system for coating sections of internal surfaces - Google Patents

Method and system for coating sections of internal surfaces Download PDF

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Publication number
CA2598717A1
CA2598717A1 CA002598717A CA2598717A CA2598717A1 CA 2598717 A1 CA2598717 A1 CA 2598717A1 CA 002598717 A CA002598717 A CA 002598717A CA 2598717 A CA2598717 A CA 2598717A CA 2598717 A1 CA2598717 A1 CA 2598717A1
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CA
Canada
Prior art keywords
workpiece
conductive
electrode
members
opening
Prior art date
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Granted
Application number
CA002598717A
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French (fr)
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CA2598717C (en
Inventor
Andrew William Tudhope
William John Boardman
Raul Donate Mercado
Frederick Contreras
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Sub One Technology Inc
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Individual
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Publication of CA2598717C publication Critical patent/CA2598717C/en
Expired - Fee Related legal-status Critical Current
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L58/00—Protection of pipes or pipe fittings against corrosion or incrustation
    • F16L58/02—Protection of pipes or pipe fittings against corrosion or incrustation by means of internal or external coatings
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using dc or ac discharges
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L55/00—Devices or appurtenances for use in, or in connection with, pipes or pipe systems
    • F16L55/16—Devices for covering leaks in pipes or hoses, e.g. hose-menders
    • F16L55/162—Devices for covering leaks in pipes or hoses, e.g. hose-menders from inside the pipe
    • F16L55/1645—Devices for covering leaks in pipes or hoses, e.g. hose-menders from inside the pipe a sealing material being introduced inside the pipe by means of a tool moving in the pipe
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L58/00—Protection of pipes or pipe fittings against corrosion or incrustation
    • F16L58/02—Protection of pipes or pipe fittings against corrosion or incrustation by means of internal or external coatings
    • F16L58/04—Coatings characterised by the materials used
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L58/00—Protection of pipes or pipe fittings against corrosion or incrustation
    • F16L58/02—Protection of pipes or pipe fittings against corrosion or incrustation by means of internal or external coatings
    • F16L58/04—Coatings characterised by the materials used
    • F16L58/10—Coatings characterised by the materials used by rubber or plastics
    • F16L58/1009—Coatings characterised by the materials used by rubber or plastics the coating being placed inside the pipe
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L58/00—Protection of pipes or pipe fittings against corrosion or incrustation
    • F16L58/18—Protection of pipes or pipe fittings against corrosion or incrustation specially adapted for pipe fittings

Abstract

A method and system for coating the internal surfaces of a localized area or section of a workpiece (10) is presented. Conductive structures (12 and 14) are inserted into one or more openings of a workpiece to define the section to be coated. In some embodiments, a bias voltage (32) is connected to a workpiece section, which functions as a cathode. A gas source (18) and vacuum source (22) are coupled to each conductive structure through a flow control system (48 and 50). The flow control system enables a first opening to function as a gas inlet and a second opening to function as a vacuum exhaust.
Only the section encompassed by the conductive structures is coated. When the coating process is completed, a means for varying the conductive structures along the length is utilized to move onto the next section to be coated.

Claims (24)

1. A method of modifying internal surfaces of a localized area of a workpiece comprising:
creating an interior environment within said workpiece supportive of said modifying of said internal surfaces, including reducing pressure within said workpiece, inserting a first conductive structure into said opening of said workpiece and inserting a second conductive structure into a second opening of said workpiece, said first and second conductive structures being physically and electrically isolated from said workpiece by a sealing means;
positioning a gas-release structure into an opening of said workpiece, said gas-release structure being coupled to a gas source and being variable in position along a length of said workpiece; and introducing gas-contained surface modifying material into said workpiece via said gas-release structure.
2. The method of claim 1 further comprising heating said workpiece to enhance conditions for modifying said internal surfaces upon exposure to said gas-contained surface modifying material.
3. (cancelled)
4. The method of claim 1 further comprising connecting a biasing system to said first and second conductive structures to provide electrical conditions consistent with modifying said internal surfaces by means of a plasma within said interior environment.
5. The method of claim 4 wherein connecting said biasing system includes providing a DC bias voltage.
6. The method of claim 4 wherein connecting said biasing system includes providing an AC bias voltage.
7. The method of claim 1 further comprising varying the positions of said first and second conductive structures along a length of said workpiece, said varying being consistent with repositioning of said gas-release structure along said length of said workpiece.
8. The method of claim 1 wherein positioning said gas-release structure includes providing a conductive workpiece.
9. The method of claim 8 further comprising connecting a biasing system such that said conductive workpiece functions as a cathode and said first and second conductive structures function as anodes, said biasing system providing a DC voltage bias, said DC voltage bias establishing ion bombard-ment energy sufficient to modify said internal surfaces of said conductive workpiece.
10. The method of claim 9 wherein connecting said biasing system includes providing a negative pulsed DC bias voltage to said conductive workpiece.
11. The method of claim 1 further comprising inserting electrode structures into said opening and into a second opening of said conductive workpiece, said electrode structures including a first electrode electrically isolated from a second electrode.
12. The method of claim 11 further comprising utilizing said biasing system to provide a DC bias voltage to said first electrode, so as to establish ion bombardment energy sufficient to modify said internal surfaces of said conductive workpiece, said connecting said biasing system further including biasing said second electrode of said electrode structures to provide an AC
voltage bias sufficient to support a plasma within said interior environment of said conductive workpiece.
13. The method of claim 12 further comprising regulating said interior environment related to an interior diameter of said conductive workpiece so as to maintain a condition in which said plasma intensity within said interior is adjustable via variations of said biasing system, wherein said condition establishes a hollow cathode effect.
14. A system for uniformly coating the internal surfaces of a section of a conductive workpiece comprising:
first and second members configured for insertion into said workpiece to define a localized interior section of said workpiece therebetween;
electrode structures inserted into a first opening and a second opening of said conductive workpiece, said electrode structures including a first electrode electrically isolated from a second electrode;
a gas source cooperative with said first and second members for flowing a gas containing a coating material into said localized interior section of said workpiece;
a vacuum source cooperative with said first and second members for evacuating said gas from said localized interior section; and a means for varying the position of said first and second members along a length of said workpiece.
15. The system of claim 14 wherein a biasing system is connected to said first and said second members, said first and second members having a sealing means for physically and electrically isolating said conductive workpiece from said first and second members.
16. The system of claim 15 wherein said biasing system applies a DC bias voltage to said first and second members.
17. The system of claim 15 wherein said biasing system applies an AC bias voltage.
18. The system of claim 15 wherein said biasing system is connected such that said conductive workpiece functions as a cathode and said first and second members function as anodes, said biasing system applying a DC
voltage bias, said DC voltage bias establishing ion bombardment energy sufficient to coat said internal surfaces within said localized interior section.
19. The system of claim 18 wherein said DC voltage bias includes a negative pulsed DC bias voltage.
20. (cancelled)
21. The system of claim 14 further comprising a biasing system connected to said first electrode to apply a DC bias voltage, said biasing system being connected to said second electrode to apply an AC bias voltage sufficient to support a plasma within said localized interior section.
22. The system of claim 21 wherein regulation of said localized interior section is related to an interior diameter of said conductive workpiece so as to maintain a condition in which said plasma intensity within said localized interior section is adjustable via variations of said biasing system, wherein said condition establishes a hollow cathode effect.
23. The system of claim 15 wherein said biasing system is connected such that a spacing between said conductive workpiece and said first and second members may be varied.
24. A system for uniformly coating the internal surfaces of a section of a conductive workpiece comprising:
first and second members configured for insertion into said workpiece to define a localized interior section of said workpiece therebetween;
electrode structures inserted into a first opening and a second opening of said conductive workpiece, said electrode structures including a first electrode electrically isolated from a second electrode;
a gas source cooperative with said first and second members for flowing a gas containing a coating material into said localized interior section of said workpiece;
a vacuum source cooperative with said first and second members for evacuating said gas from said localized interior section;
a means for varying the position of said first and second members along a length of said workpiece; and a flow control system configured to implement a flow cycling that involves at least two modes, including a first mode wherein said first member functions as an exhaust for said vacuum source and said second member functions as an input for said gas source, said modes further including a second mode wherein said first member functions as an input for said gas source and said second member functions as an exhaust for said vacuum source.

STATEMENT UNDER ARTICLE 19 (1) Claims 1 has been amended to incorporate the subject matter of original claim 3. The claimed method of modifying internal surfaces of a localized area of a workpiece is now described as including creating an internal environment within the workpiece so as to be supportive of the modifying, including (1) reducing pressure within the workpiece, (2) inserting a first conductive structure into one opening of the workpiece, and (3) inserting a second conductive structure into a second opening of the workpiece. The first and second conductive structures are physically and electrically isolated from the workpiece.
Dependent claims 4, 7 and 8 have been amended to eliminate dependency upon cancelled claim 3.

Independent claim 14 has been amended to describe the system as including first and second members configured for insertion into the workpiece to define a localized interior section of the workpiece and as including electrode structures inserted into a first opening and a second opening of the workpiece, with the electrode structures including a first electrode electrically isolated from a second electrode.

Claim 24 has also been amended to include the description of the first and second members and the first and second electrodes of the electrode structures that are inserted into the openings of the conductive workpiece. The description of the electrode structures was contained in original claim 20. Claim 20 has been cancelled and claim 21 has been amended to change its dependency. The fundamental difference between independent system claim 14 and independent system claim 24 is that claim 24 includes description of a flow control system configured to implement a flow cycling that involves at least two modes.

The amendments to the claims patentably distinguish the invention from prior art approaches to modifying internal surfaces of a workpiece.
CA2598717A 2005-03-07 2006-03-06 Method and system for coating sections of internal surfaces Expired - Fee Related CA2598717C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/074,906 US7608151B2 (en) 2005-03-07 2005-03-07 Method and system for coating sections of internal surfaces
US11/074,906 2005-03-07
PCT/US2006/007978 WO2006096659A2 (en) 2005-03-07 2006-03-06 Method and system for coating sections of internal surfaces

Publications (2)

Publication Number Publication Date
CA2598717A1 true CA2598717A1 (en) 2006-09-14
CA2598717C CA2598717C (en) 2010-07-27

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Family Applications (1)

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CA2598717A Expired - Fee Related CA2598717C (en) 2005-03-07 2006-03-06 Method and system for coating sections of internal surfaces

Country Status (7)

Country Link
US (1) US7608151B2 (en)
EP (1) EP1856304A2 (en)
JP (1) JP2008532255A (en)
CN (1) CN101133183B (en)
CA (1) CA2598717C (en)
HK (1) HK1110907A1 (en)
WO (1) WO2006096659A2 (en)

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WO2006096659B1 (en) 2007-04-19
WO2006096659A2 (en) 2006-09-14
CN101133183B (en) 2010-09-29
HK1110907A1 (en) 2008-07-25
CA2598717C (en) 2010-07-27
EP1856304A2 (en) 2007-11-21
US7608151B2 (en) 2009-10-27
JP2008532255A (en) 2008-08-14

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