CA2803899A1 - Methods and apparatus for spatial light modulation - Google Patents

Methods and apparatus for spatial light modulation Download PDF

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Publication number
CA2803899A1
CA2803899A1 CA2803899A CA2803899A CA2803899A1 CA 2803899 A1 CA2803899 A1 CA 2803899A1 CA 2803899 A CA2803899 A CA 2803899A CA 2803899 A CA2803899 A CA 2803899A CA 2803899 A1 CA2803899 A1 CA 2803899A1
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Prior art keywords
light
shutter
reflective
optical cavity
array
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CA2803899A
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French (fr)
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CA2803899C (en
Inventor
Nesbitt W. Hagood
Roger Barton
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Pixtronix Inc
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Pixtronix Inc
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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0011Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
    • G02B6/0033Means for improving the coupling-out of light from the light guide
    • G02B6/0035Means for improving the coupling-out of light from the light guide provided on the surface of the light guide or in the bulk of it
    • G02B6/004Scattering dots or dot-like elements, e.g. microbeads, scattering particles, nanoparticles
    • G02B6/0043Scattering dots or dot-like elements, e.g. microbeads, scattering particles, nanoparticles provided on the surface of the light guide
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0011Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
    • G02B6/0033Means for improving the coupling-out of light from the light guide
    • G02B6/0035Means for improving the coupling-out of light from the light guide provided on the surface of the light guide or in the bulk of it
    • G02B6/0045Means for improving the coupling-out of light from the light guide provided on the surface of the light guide or in the bulk of it by shaping at least a portion of the light guide
    • G02B6/0046Tapered light guide, e.g. wedge-shaped light guide
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0011Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
    • G02B6/0075Arrangements of multiple light guides
    • G02B6/0078Side-by-side arrangements, e.g. for large area displays
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0011Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
    • G02B6/0033Means for improving the coupling-out of light from the light guide
    • G02B6/0058Means for improving the coupling-out of light from the light guide varying in density, size, shape or depth along the light guide
    • G02B6/0061Means for improving the coupling-out of light from the light guide varying in density, size, shape or depth along the light guide to provide homogeneous light output intensity

Abstract

Improved apparatus and methods for spatial light modulation are disclosed which utilize optical cavities having both front and rear reflective surfaces.

Light-transmissive regions are formed in the front reflective surface for spatially modulating light.

Description

METHODS AND APPARATUS FOR SPATIAL LIGHT MODULATION
This application is a divisional application of co-pending application Serial No. 2,598,825 filed on February 23, 2006.

Field of the Invention In general, the invention relates to the field of spatial light modulation, in particular, the invention relates to displays having improved backlights.
Background of the Invention Displays built from mechanical light modulators are an attractive alternative to displays based on liquid crystal technology. Mechanical light modulators are fast enough to display video content with good viewing angles and with a wide range of color and grey scale. Mechanical light modulators have been successful in projection display applications. Backlit displays using mechanical light modulators have not yet demonstrated sufficiently attractive combinations of brightness and low power. When operated in transmissive mode many mechanical light modulators, with aperture ratios in the range of 10 and 20%, are only capable of delivering 10 to 20% of available light from the backlight to the viewer for the production of an image. Combining the mechanical apertures with color filters reduces the optical efficiency to about 5%, i.e., no better than the efficiencies available in current color liquid crystal displays. There is a need for a low-powered display having increased luminous efficiency.
Summary of the Invention The devices and methods described herein provide for mechanical light modulators having improved luminous efficiency, making mechanical actuators attractive for use in portable and large area displays. In some cases, the transmittance or optical efficiency of mechanical modulators coupled to backlights can be improved to the 40 to 60% level, or 10 times more efficient than what is typical in a liquid crystal display. In addition, the devices and methods described herein can be incorporated into small-size, high resolution displays, regardless of the light modulation mechanism, to improve the brightness of the displays and to reduce the power requirements in a display application.

The light modulators described herein make possible portable video displays that can be both bright and low power. The light modulators can be switched fast enough to provide color images using time sequential color techniques, instead of relying on color filters. The displays can be built using as few as three functional layers to form both a mechanical shutter assembly and the electrical connections necessary for array addressing.
In one aspect, the invention relates to a spatial light modulator which includes a first reflective surface and a second reflective surface. The first reflective surface defines a number of light-transmissive regions, such as apertures, filters, or liquid crystal components. The second reflective surface at least partially faces the first reflective surface and reflects light towards the light-transmissive regions defined by the first reflective surface. The reflective surfaces may be mirrors, dielectric mirrors, or thin functional films. In one embodiment the first reflective surface is parallel or substantially parallel to the second reflective surface. In another embodiment, the reflective surfaces are at least partially transverse to one another.
The space between the first and second reflective surfaces defines the area of a substantially transparent optical cavity.

In one embodiment, the spatial light modulator includes an array of light modulators for selectively obstructing the light-transmissive regions.
Obstructing may include, without limitation, partially or completely blocking, reflecting, deflecting, absorbing, or otherwise preventing light from reaching an intended viewer of the spatial light modulator. In one embodiment, the array of light modulators includes the first reflective surface. One feature of the light modulating elements in the array of light modulators is that they are individually controllable.
In one embodiment, the light modulating elements may be MEMS-based shutter assemblies, and optionally may be bistable or deformable shutters. The shutter assemblies include shutters that, in one implementation, are coated with a first film to absorb light striking the shutter from one direction and coated with a second film to reflect light striking the shutter from another direction. In one embodiment, the shutters move in a plane such that in one position the shutters substantially obstruct passage of light through corresponding light-transmissive regions, and in a second position, they allow light to pass through the light-transmissive regions. In another embodiment, the shutters move at least partially out of a plane defined by the array of shutter assemblies in which they are included. While substantially in the plane, the shutters obstruct passage of light through corresponding light-transmissive regions. While substantially out of the plane, the shutters allow light to pass through the light-transmissive regions. In another embodiment, the array of light modulators includes a plurality of liquid crystal cells.

In another embodiment, the spatial light modulator includes a light guide for distributing light throughout the light cavity. The reflective surfaces may be disposed directly on the front and rear surfaces of the light guide.
Alternatively, the front reflective surface may be disposed on a separate substrate on which the array of light modulators is disposed. Similarly, the second reflective surface may be coupled directly to the rear side of the light guide, or it may be attached to a third surface.

The substrate on which the array of light modulators is formed may be transparent or opaque. For opaque substrates, apertures are etched through the substrate to form light-transmissive regions. The substrate may be directly coupled to the light guide, or it may be separated from the light guide with one or more spacers or supports. In still a further embodiment, the spatial light modulator includes a diffuser or brightness enhancing film. The spatial light modulator may also include a light source, such as a light emitting diode.

In another aspect, the invention relates to a method of forming an image. The method includes introducing light into a reflective optical cavity. The reflective cavity includes a plurality of light-transmissive regions through which light can escape the reflective optical cavity. The method further includes forming an image by allowing the introduced light to escape the reflective optical cavity through at least one of the light-transmissive regions. In one embodiment, the escape of light is regulated by an array of light modulators that either obstruct light passing through the light-transmissive regions, or allow it to pass. In another embodiment, the method includes forming a color image by alternately illuminating a plurality of different colored light sources. In a further embodiment, the method includes reflecting at least a portion of ambient light striking unobstructed light-transmissive regions.
In still another aspect, the invention relates to a method of manufacturing a spatial light modulator comprising forming a substantially transparent cavity having first and second opposing sides into which light can be introduced. The method also includes coupling a first reflective surface to the first side of the transparent cavity such that the first reflective surface faces the interior of the transparent cavity. A
plurality of light-transmissive regions are formed in the first reflective surface. In addition, the method includes coupling a second reflective surface to the second side of the transparent cavity such that the second reflective surface faces the interior transparent cavity.

In another aspect, the invention relates to a method of forming an image by receiving ambient light and positioning shutters formed on at least one substrate to selectively reflect the received ambient light to form the image.

It is an object of this invention to provide apparatus and methods for displays that utilize an array of light concentrators for concentrating light onto or through a surface of mechanical light modulators to increase the contrast ratio and brightness of the display.

In one aspect, the invention relates to a display for displaying an image to a viewer. The display includes an array of light modulators and an array of reflective light funnels disposed between the array of light modulators and the viewer.
The array of reflective light funnels concentrates light on respective ones of the light modulators in the array of light modulators. In one embodiment, the array of light modulators selectively reflects light towards the viewer to display the image.
In another embodiment, the array of light modulators selectively modulates light towards the viewer to display the image.

In another aspect, the invention relates to a method of manufacturing a display by forming an array of reflective or transmissive light modulators. The method also includes forming an array of reflective light funnels by forming an array of depressions in a sheet of a substantially transparent material. Each depression has a top, a bottom, and a wall. Forming the array of reflective light funnels also includes depositing a reflective film on the walls of the depressions and forming optical openings at the bottom of the depressions such that the optical openings have a diameter which is smaller than the diameter of the top of the depression.
Alternately the array of reflective light funnels can be formed by forming an array of funnel shaped objects in a transparent material and coating the outside of the walls of the funnel shaped objects with a reflective film.

Brief Description of the Figures The system and methods may be better understood from the following illustrative description with reference to the following drawings in which:

Figure 1 A is an isometric conceptual view of an array of light modulators, according to an illustrative embodiment of the invention;

Figure 1 B is a cross-sectional view of a shutter assembly included in the array of light modulators of Figure 1 A, according to an illustrative embodiment of the invention;

Figure 1 C is an isometric view of the shutter layer of the shutter assembly of Figure 1 B, according to an illustrative embodiment of the invention;

Figure 1 D is a top view of the various functional layers of a light modulation array, such as the light modulation array of Figure IA;

Figure 2 is a cross-sectional view of an optical cavity for use in a spatial light modulator, according to an illustrative embodiment of the invention;

Figures 3A-3D are cross-sectional views of alternative shutter assembly designs, according to illustrative embodiments of the invention;

Figure 4 is a cross-sectional view of a shutter assembly having a first coated shutter, according to an illustrative embodiment of the invention;

Figure 5 is a cross-sectional view of a shutter assembly having a second coated shutter, according to an illustrative embodiment of the invention;

Figure 6 is a cross-sectional view of a shutter assembly having an elastic actuator for use in the light modulation array, according to an illustrative embodiment of the invention;

Figure 7 is a cross-sectional view of a shutter assembly having a deforming shutter for use in the light modulation array, according to an illustrative embodiment of the invention;

Figures 8A-8B are cross-sectional views of the shutter assemblies built on opaque substrates for use in the light modulation array, according to an illustrative embodiment of the invention;

Figure 9 is a cross-sectional view of a liquid crystal-based spatial light modulator, according to an illustrative embodiment of the invention;

Figure 10 is a cross-sectional view of a first shutter-based spatial light modulator, according to an illustrative embodiment of the invention;

Figure 11 is a cross-sectional view of a second shutter-based spatial light modulator, according to the illustrative embodiment of the invention;

Figures 12A-12D are cross-sectional views of third, fourth, fifth, and sixth illustrative shutter-based spatial light modulators, according to an embodiments of the invention;

Figure 13 is a cross-sectional view of a seventh shutter-based spatial light modulator, according to an illustrative embodiment of the invention;

Figures 14A and 14B are cross-sectional views of two additional spatial light modulators, according to an illustrative embodiment of the invention;

Figure 15 is a cross-sectional view of an additional shutter assembly, according to an illustrative embodiment of the invention;

Figure 16 is a cross-sectional view of still a further spatial light modulator, according to an illustrative embodiment of the invention;

Figure 17 is an illustrative transfiective shutter assembly, according to an embodiment of the invention;

Figure 18 is a second illustrative transflective shutter assembly, according to an embodiment of the invention;

Figure 19 is a cross-sectional view of a front reflective shutter assembly, according to an illustrative embodiment of the invention; and Figure 20 is an isometric view of a larger scale display formed from an array of light modulation arrays, according to an illustrative embodiment of the invention;
Figure 21 A is a schematic diagram of an active control matrix 2100 suitable for inclusion in the display apparatus 100 for addressing an array of pixels;

Figure 21 B Figure an isometric view of a portion of the array of pixels including the control matrix of Figure 21 A.

Figure 22 is a conceptual isometric view of a display apparatus, according to an illustrative embodiment of the invention;

Figure 23 is a partial cross-sectional view of an individual shutter and pixel assembly of the display apparatus of Figure 22, according to an illustrative embodiment of the invention;

Figures 24A and 24B are top views of a shutter layer of the display apparatus of Figures 22 and 23, at various states of actuation, according to an illustrative embodiment of the invention;

Figure 25 is an isometric view, similar to that of Figure 22, of the shutter layer of the display apparatus of Figures 22-24B, showing a conceptual tiling diagram for arranging the shutter assemblies in the display apparatus, according to an illustrative embodiment of the invention;

Figures 26A-26D are partial cross-sectional views of the concentrator array layer of the display apparatus of Figures 22-25, at various stages of fabrication, according to an illustrative embodiment of the invention;

Figures 27A-27C are partial cross-sectional views of the concentrator array layer of the display apparatus of Figures 22-25, at various stages of fabrication, according to another illustrative embodiment of the invention;

Figure 28 is a partial isometric cross-sectional view, of an individual shutter and pixel assembly of the display apparatus of Figures 22-27C, according to an illustrative embodiment of the invention;

Figure 29 is a partial isometric cross-sectional view of an individual shutter and pixel assembly of the display apparatus of Figures 22-28 implemented as a transflective-type display, according to an illustrative embodiment of the invention;
and Figure 30 is a partial isometric cross-sectional view, of an individual shutter and pixel assembly of the display apparatus of Figures 22-28 implemented as a transmissive-type display, according to an illustrative embodiment of the invention.
Description Of Certain Illustrative Embodiments To provide an overall understanding of the invention, certain illustrative embodiments will now be described, including apparatus and methods for spatially modulating light. However, it will be understood by one of ordinary skill in the art that the systems and methods described herein may be adapted and modified as is appropriate for the application being addressed and that the systems and methods described herein may be employed in other suitable applications, and that such other additions and modifications will not depart from the scope hereof.

Figure IA is an isometric conceptual view of an array 100 of light modulators (also referred to as a "light modulation array 100"), according to an illustrative embodiment of the invention. The light modulation array 100 includes a plurality of shutter assemblies 102a-102d (generally "shutter assemblies 102") arranged in rows and columns. In general, a shutter assembly 102 has two states, open and closed (although partial openings can be employed to impart grey scale).
Shutter assemblies 102a and 102d are in the open state, allowing light to pass.

Shutter assemblies 102b and 102c are in the closed state, obstructing the passage of light. By selectively setting the states of the shutter assemblies 102a-102d, the light modulation array 100 can be utilized to form an image 104 for a projection or backlit display, illuminated by lamp 105. In the light modulation array 100, each shutter assembly corresponds to a pixel 106 in the image 104. In alternative implementations, a light modulation array includes three color-specific shutter assemblies for each pixel. By selectively opening one or more of the color-specific shutter assemblies corresponding to the pixel, the shutter assembly can generate a color pixel in the image.

The state of each shutter assembly 102 can be controlled using a passive matrix addressing scheme. Each shutter assembly 102 is controlled by a column electrode 108 and two row electrodes 11Oa (a "row open electrode") and 1 l Ob (a "row close electrode"). In the light modulation array 100, all shutter assemblies 102 in a given column share a single column electrode 108. All shutter assemblies in a row share a common row open electrode 1 IOa and a common row close electrode 11 Ob. An active matrix addressing scheme is also possible. Active matrix addressing (in which pixel and switching voltages are controlled by means of a thin film transistor array) is useful in situations in which the applied voltage must be maintained in a stable fashion throughout the period of a video frame. An implementation with active matrix addressing can be constructed with only one row electrode per pixel.

In the passive matrix addressing scheme, to change the state of a shutter assembly 102 from a closed state to an open state, i.e., to open the shutter assembly 102, the light modulation array 100 applies a potential to the column electrode 108 corresponding to the column of the light modulation array 100 in which the shutter assembly 102 is located and applies a second potential, in some cases having an opposite polarity, to the row open electrode 11 Oa corresponding to the row in the light modulation array 100 in which the shutter assembly 102 is located. To change the state of a shutter assembly 102 from an open state to a closed state, i.e., to close the shutter assembly 102, the light modulation array 100 applies a potential to the column electrode 108 corresponding to the column of the light modulation array in which the shutter assembly 102 is located and applies a second potential, in some cases having an opposite polarity, to the row close electrode 1 l Ob corresponding to the row in the light modulation array 100 in which the shutter assembly 102 is located. In one implementation, a shutter assembly changes state in response to the difference in potential applied to the column electrode and one of the row electrodes 11Oa or 1 l Ob exceeding a predetermined switching threshold.

To form an image, in one implementation, light modulation array 100 sets the state of each shutter assembly 102 one row at a time in sequential order.
For a given row, the light modulation array 100 first closes each shutter assembly 102 in the row by applying a potential to the corresponding row close electrode 11 Ob and a pulse o f potential to all of the column electrodes 108. Then, the light modulation array 100 opens the shutter assemblies 102 through which light is to pass by applying a potential to the row open electrode 11Oa and applying a potential to the column electrodes 108 for the columns which include shutter assemblies in the row which are to be opened. In one alternative mode of operation, instead of closing each row of shutter assemblies 102 sequentially, after all rows in the light modulation array 100 are set to the proper position to form an image 104, the light modulation array 100 globally resets all shutter assemblies 102 at the same time by applying a potentials to all row close electrodes 11 Ob and all column electrodes 108 concurrently. In another alternative mode of operation, the light modulation array 100 forgoes resetting the shutter assemblies 102 and only alters the states of shutter assemblies 102 that need to change state to display a subsequent image 104.

In addition to the column electrode 108 and the row electrodes 1 IOa and 1 lOb, each shutter assembly includes a shutter 112 and an aperture 114. To illuminate a pixel 106 in the image 104, the shutter is positioned such that it allows light to pass, without any significant obstruction, through, the aperture 114 towards a viewer. To keep a pixel unlit, the shutter 112 is positioned such that it obstructs the passage of light through the aperture 114. The aperture 114 is defined by an area etched through a reflective material in each shutter assembly, such as the column electrode 108. The aperture 114 may be filled with a dielectric material.

Figure 1 B is a cross sectional diagram (see line A-A' below in Figure 1 D) of one of the shutter assemblies 102 of Figure 1 A, illustrating additional features of the shutter assemblies 102. Referring to Figures IA and 113, the shutter assembly 102 is built on a substrate 116 which is shared with other shutter assemblies 102 of the light modulation array 100. The substrate 116 may support as many as 4,000,000 shutter assemblies, arranged in up to about 2000 rows and up to about 2000 columns.
As described above, the shutter assembly 102 includes a column electrode 108, a row open electrode 11 Oa, a row close electrode l i Ob, a shutter 112, and an aperture 114. The column electrode 108 is formed from a substantially continuous layer of reflective metal, the column metal layer 118, deposited on the substrate 116.
The column metal layer 118 serves as the column electrode 108 for a column of shutter assemblies 102 in the light modulation array 100. The continuity of the column metal layer 118 is broken to electrically isolate one column electrode from the column electrodes 108 of shutter assemblies 102 in other columns of the light modulation array 100. As mentioned above, each shutter assembly 102 includes an aperture 114 etched through the column metal layer 118 to form a light-transmissive region.

The shutter assembly includes a row metal layer 120, separated from the column metal layer 118 by one or more intervening layers of dielectric material or metal. The row metal layer 120 forms the two row electrodes 11 Oa and 11 Ob shared by a row of shutter assemblies 102 in light modulation array 100. The row metal layer 120 also serves to reflect light passing through gaps in the column metal layer 118 other than over the apertures 114. The column metal layer and the row metal layer are between about 0.1 and about 2 microns thick. In alternative implementations, such as depicted in Figure 1 D (described below), the row metal layer 120 can be located below the column metal layer 118 in the shutter assembly 102.

The shutter 102 assembly includes a third functional layer, referred to as the shutter layer 122, which includes the shutter 112. The shutter layer 122 can be formed from metal or a semiconductor. Metal or semiconductor vias 124 electrically connect the column metal layer 118 and the row electrodes 1 IOa and 1 l Ob of the row metal layer 120 to features on the shutter layer 122. The shutter layer 122 is separated from the row metal layer 120 by a lubricant, vacuum or air, providing the shutter 112 freedom of movement.

Figure 1 C is a isometric view of a shutter layer 122, according to an illustrative embodiment of the invention. Referring to both Figures 1 B and 1 C, the shutter layer 122, in addition to the shutter 112, includes four shutter anchors 126, two row anchors 128a and 128b, and two actuators 130a and 130b, each consisting of two opposing compliant beams. The shutter 112 includes an obstructing portion 132 and, optionally, as depicted in Figure 1C, a shutter aperture 134. In the open state, the shutter 112 is either clear of the aperture 114, or the shutter aperture 134 is positioned over the aperture 134, thereby allowing light to pass through the shutter assembly 102. In the closed state, the obstructing portion 132 is positioned over the aperture, obstructing the passage of light through the shutter assembly 102.
In alternative implementations, a shutter assembly 102 can include additional apertures 114 and the shutter 112 can include multiple shutter apertures 134. For instance, a shutter 112 can be designed with a series of narrow slotted shutter apertures wherein the total area of the shutter apertures 134 is equivalent to the area of the single shutter aperture 134 depicted in Figure 1C. In such implementations, the movement required of the shutter to move between open and closed states can be significantly reduced.

Each actuator 130a and 130b is formed from two opposing compliant beams.
A first pair of compliant beams, shutter actuator beams 135, physically and electrically connects each end of the shutter 112 to the shutter anchors 126, located in each corner of the shutter assembly 102. The shutter anchors 126, in turn, are electrically connected to the column metal layer 118. The second pair of compliant beams, row actuator beams 136a and 136b extends from each row anchor 128a and 128b. The row anchor 128a is electrically connected by a via to the row open electrode 11 Oa. The row anchor 128b is electrically connected by a via to the row close electrode 11 Ob. The shutter actuator beams 135 and the row actuator beams 136a and 136b (collectively the "actuator beams 135 and 136") are formed from a deposited metal, such as Au, Cr or Ni, or a deposited semiconductor, such as polycrystalline silicon, or amorphous silicon, or from single crystal silicon if formed on top of a buried oxide (also known as silicon on insulator). The actuator beams 135 and 136are patterned to dimensions of about I to about 20 microns in width, such that the actuator beams 135 and 136 are compliant.

Figure 1D is a top-view of the various functional layers of a light modulation array 100', according to an illustrative embodiment of the invention. The light modulation array 100' includes twelve shutter assemblies 102'a-102'l, in various stages of completion. Shutter assemblies 102'a and 102'b include just the column metal layer 118' of the light modulation array 100'. Shutter assemblies 102'c-102'f include just the row metal layer 120' (i.e., the row open electrode and the row-close electrode) of the light modulation array 100'. Shutter assemblies 102'g and 102'h include the column metal layer 118' and the row metal layer 120'. In contrast to the shutter assembly 102 in Figure 1 B, the column metal layer 118' is deposited on top of the row metal layer 120'. Shutter assemblies 102'i-1 depict all three functional layers of the shutter assemblies 102', the row metal layer 120', the column metal layer 118', and a shutter metal layer 122'. The shutter assemblies 102'i and 102'k are closed, indicated by the column metal layer 118' being visible through the shutter aperture 134'included in the shutter assemblies 102'i and 102'k. The shutter assemblies 102'j and 102'1 are in the open position, indicated by the aperture 114' in the column metal layer 118' being visible in the shutter aperture 134'.

In other alternate implementations, a shutter assembly can include multiple apertures and corresponding shutters and actuators (for example, between, 1 and 10) per pixel. In changing the state of this shutter assembly, the number of actuators activated can depend on the switching voltage that is applied or on the particular combination of row and column electrodes that are chosen for receipt of a switching voltage. Implementations are also possible in which partial openings of an aperture is made possible in an analog fashion by providing a switching voltages partway between a minimum and a maximum switching voltage. These alternative implementations provide an improved means of generating a grey scale.

With respect to actuation of shutter assemblies 102, in response to applying a potential to the column electrode 108 of the shutter assembly 102, the shutter anchors 126, the shutter 112 and the shutter actuator beams 135 become likewise energized with the applied potential. In energizing one of the row electrodes i i Oa or 110b, the corresponding row anchor 128a or 128b and the corresponding row actuator beam 136a or 136b also becomes energized. If the resulting potential difference between a row actuator beam 136a or 136b and its opposing shutter actuator beam 135 exceeds a predetermined switching threshold, the row actuator beam 136a or 136b attracts its opposing shutter actuator beam 135, thereby changing the state of the shutter assembly 102.

As the actuator beams 135 and 136 are pulled together, they bend or change shape. Each pair of actuator beams 135 and 136 (i.e., a row actuator beam 134a or 134b and its opposing shutter actuator beam 135) can have one of two alternate and stable forms of curvature, either drawn together with parallel shapes or curvature, or held apart in a stable fashion with opposite signs to their of curvature.
Thus, each pair is mechanically bi-stable. Each pair of actuator beams 135 and 136 is stable in two positions, one with the shutter 112 in an "open" position, and a second with the shutter 112 in a "closed" position. Once the actuator beams 135 and 136 reach one of the stable positions, no power and no applied voltage need be applied to the column electrode 108 or either row electrode 110a or 110b to keep the shutter 112 in that stable position. Voltage above a predetermined threshold needs to be applied to move the shutter 112 out of the stable position.
While both the open and closed positions of the shutter assembly 102 are energetically stable, one stable position may have a lower energy state than the other stable position. In one implementation, the shutter assemblies 102 are designed such that the closed position has a lower energy state than the open position. A
low energy reset pulse can therefore be applied to any or all pixels in order to return the entire array to its lowest stress state, corresponding also to an all-black image.

The light modulation array 100 and its component shutter assemblies 102 are formed using standard micromachining techniques known in the art, including lithography; etching techniques, such as wet chemical, dry, and photoresist removal; thermal oxidation of silicon; electroplating and electroless plating;
diffusion processes, such as boron, phosphorus, arsenic, and antimony diffusion; ion implantation; film deposition, such as evaporation (filament, electron beam, flash, and shadowing and step coverage), sputtering, chemical vapor deposition (CVD), epitaxy (vapor phase, liquid phase, and molecular beam), electroplating, screen printing, and lamination. See generally Jaeger, Introduction to Microelectronic Fabrication (Addison-Wesley Publishing Co., Reading Mass. 1988); Runyan, et al., Semiconductor Integrated Circuit Processing Technology (Addison-Wesley Publishing Co., Reading Mass. 1990); Proceedings of the IEEE Micro Electro Mechanical Systems Conference 1987-1998; Rai-Choudhury, ed., Handbook of Microlithography, Micromachining & Microfabrication (SPIE Optical Engineering Press, Bellingham, Wash. 1997).

More specifically, multiple layers of material (typically alternating between metals and dielectrics) are deposited on top of a substrate forming a stack.
After one or more layers of material are added to the stack, patterns are applied to a top most layer of the stack marking material either to be removed from, or to remain on, the stack. Various etching techniques, including wet and/or dry etches, are then applied to the patterned stack to remove unwanted material. The etch process may remove material from one or more layers of the stack based on the chemistry of the etch, the layers in the stack, and the amount of time the etch is applied. The manufacturing process may include multiple iterations of layering, patterning, and etching.

The process also includes a release step. To provide freedom for parts to move in the resulting device, sacrificial material is interdisposed in the stack proximate to material that will form moving parts in the completed device. An etch removes much of the sacrificial material, thereby freeing the parts to move.

After release the surfaces of the moving shutter are insulated so that charge does not transfer between moving parts upon contact. This can be accomplished by thermal oxidation and/or by conformal chemical vapor deposition of an insulator such as A12O3, Cr2O3, Ti02, Hf02, V205, Nb2O5, Ta205, SiO2, or Si3N4 or by depositing similar materials using techniques such as atomic layer deposition.
The insulated surfaces are chemically passivated to prevent problems such as stiction between surfaces in contact by chemical conversion processes such as fluoridation or hydrogenation of the insulated surfaces.

Figure 2 is a cross-section of an optical cavity 200 for use in a spatial light modulator, according to an illustrative embodiment of the invention. The optical cavity 200 includes a front reflective surface 202 and a rear reflective surface 204.

The front reflective surface 202 includes an array of light-transmissive regions 206 through which light 208 can escape the optical cavity 200. Light 208 enters the optical cavity 200 from one or more light sources 210. The light 206 reflects between the front and rear reflective surfaces 202 and 204 until it reflects through one of the light-transmissive regions 206. Additional reflective surfaces may be added along the sides of the optical cavity 200.

The front and rear reflective surfaces 202 and 204, in one implementation, are formed by depositing a metal or semiconductor onto either a glass or plastic substrate. In other implementations, the reflective surfaces 202 and 204 are formed by depositing metal or semiconductor on top of a dielectric film that is deposited as one of a series of thin films built-up on a substrate. The reflective surfaces 202 and 204 have reflectivities above about 50%. For example, the reflective surfaces and 204 may have reflectivities of 70%, 85%, 96%, or higher.

Smoother substrates and finer grained metals yield higher reflectivities.
Smooth surfaces may be obtained by polishing a glass substrate or by molding plastic into smooth-walled forms. Alternatively, glass or plastic can be cast such that a smooth surface is formed by the settling of a liquid / air interface.
Fine grained metal films without inclusions can be formed by a number of vapor deposition techniques including sputtering, evaporation, ion plating, laser ablation, or chemical vapor deposition. Metals that are effective for this reflective application include, without limitation, Al, Cr, Au, Ag, Cu, Ni, Ta, Ti, Nd, Nb, Si, Mo and/or alloys thereof.

Alternatively, the reflective surface can be formed by interposing a dielectric material of low refractive index between a light guide in the optical cavity 200 and any of a series of thin films deposited on top of it. The change in refractive index between the light guide and the thin film leads to a condition of total internal reflection within the light guide, whereby incident light of sufficiently low incidence angle can be reflected with nearly 100% efficiency.

In the alternative, the reflective surfaces 202 or 204 can be formed from a mirror, such as a dielectric mirror. A dielectric mirror is fabricated as a stack of dielectric thin films which alternate between materials of high and low refractive index. A portion of the incident light is reflected from each interface where the refractive index changes. By controlling the thickness of the dielectric layers to some fixed fraction or multiple of the wavelength and by adding reflections from multiple parallel interfaces, it is possible to produce a net reflective surface having a reflectivity exceeding 98%. Some dielectric mirrors have reflectivities greater than 99.8%. Dielectric mirrors can be custom-designed to accept a pre-specified range of wavelengths in the visible range and to accept a pre-specified range of incident angles. Reflectivities in excess of 99% under these conditions are possible as long as the fabricator is able to control the smoothness in the dielectric film stacks. The stacks can include between about 20 and about 500 films.

In another alternative, the first and second reflective surfaces 202 or 204 are included in the optical cavity 200 as separate components. A thin sheet of polished stainless steel or aluminum can suffice for this purpose. Also, it is possible to produce a reflective metal surface or a dielectric mirror on the surface of a continuous sheet or roll of plastic. The sheet of reflective plastic can then be attached or adhered to other components in the optical cavity 200.

The light-transmissive regions 206 are arranged in an array to form pixels from which an image is formed. In the illustrative embodiment, the light-transmissive regions 206 are spaced between about 100 and about 350 microns apart. The light transmissive regions are oblong or rectangular in shape, wherein the greater dimension is between about 50 and about 300 microns while the narrower dimension is between 2 and 100 microns, though other shapes and sizes may be suitable. For projection displays the pitch can be as small as 20 microns, with aperture widths as small as 5 microns. The ratio between the area of the front reflective surface 202 taken up by light-transmissive regions 206 and the total area of the front reflective surface 202 is referred to herein as the transmissiveness ratio.
Illustrative implementations of the optical cavity 200 have transmissiveness ratios of between about 5% and about 50%. Normally, spatial light modulators having such low transmissiveness ratios would emit insufficient light to form a usable image. To ensure greater light 208 emission from the optical cavity 200, the front and rear reflective surfaces 202 and 204 reflect the light 208 back and forth a number of times until the reflected light 208 passes through a light-transmissive region 206, or until the light 208 loses its energy from the reflections. Higher reflectivity surfaces result in more light 208 escaping from the optical cavity 200 to form an image.
Table 1, below, lists the percentage of light 208 introduced into the optical cavity 200 that escapes through the light-transmissive regions 206 (in terms of efficiency) for several transmissiveness ratio/reflectivity pairings.

Transmissiveness Ratio Refiectivit Efficiency 0.97 59%
8% 0.93 40%
0.88 30%
0.97 71%
14% 0.93 55%
0.88 43%
0.97 79%
20% 0.93 65%
0.88 53%

When the optical cavity 200 is used to form the basis of a transmissive display, one or more light sources 210 introduce light into the optical cavity 200.
The light source(s) 210 may be of any suitable type, including, for example, any of the types disclosed in U.S. Pat. Nos. 4,897,771 and 5,005,108, the entire disclosures of which are incorporated herein by reference. In particular, the light source(s) 210 may be an arc lamp, an incandescent bulb which also may be colored, filtered or painted, a lens end bulb, a line light, a halogen lamp, a light emitting diode (LED), a chip from an LED, a neon bulb, a fluorescent tube, a fiber optic light pipe transmitting from a remote source, a laser or laser diode, or any other suitable light source. Additionally, the light sources may be a multiple colored LED, or a combination of multiple colored radiation sources 210 in order to provide a desired colored or white light output distribution. For example, a plurality of colored lights such as LEDs of different colors (red, blue, green) or a single LED with multiple colored chips may be employed to create white light or any other colored light output distribution by varying the intensities of each individual colored light. A
reflector may be positioned proximate to the light source 210 to reflect light emitted away from the optical cavity 200 towards the optical cavity 200. In one implementation, three light sources 210, one red light source 210, one green light source 210, and one blue light source 210, sequentially introduce light 208 into the optical cavity 200, alternating at frequencies in the range of 20 to 600 Hz. A
rate in excess of 100 Hz is generally faster than what the human eye can detect, thus providing a color image.

Figure 3A is a linear cross-sectional view of a shutter assembly 300 in an open position. The shutter assembly 300 is formed on transparent substrate 302 having a thickness of from about .3 mm to about 2 mm. The substrate 302 can be, for example, made of a glass or a plastic. Suitable glasses include borosilicate glasses, or other glasses that can withstand processing temperatures up to or exceeding 400 degrees Centigrade. Suitable plastics for the substrate 302 include, for example, polyethyleneterephthalate (PET), or polytetrafluoroethylene (PETF), or other substantially transparent plastics that can withstand processing temperatures in excess of 200 C. Other candidate substrate materials include quartz and sapphire, which are understood to withstand processing temperatures in excess of 800 C.

The lowest layer, referred to as the "column metal layer" 304, of the shutter assembly 300 serves as the front reflective surface 202 of the optical cavity of Figure 2. During the process of manufacturing the shutter assembly 300, an aperture 306 is etched through the column metal layer 304 to form a light-transmissive region, such as the light transmissive regions 206 of Figure 2. The aperture 306 can be generally circular, elliptical, polygonal, serpentine, or irregular in shape. The aperture occupies about 5% to about 25%of the area dedicated to the particular shutter assembly 300 in the light modulation array. Other than at the aperture 306, the column metal layer 304 is substantially unbroken. The aperture 306 is filled with a dielectric material 307. Example dielectrics suitable for inclusion in the shutter assembly 300 include SiO2, Si3N4, and A1203.

The next layer is composed mostly of a dielectric material 307, separating the column metal layer 304 from the row electrodes 308a and 308b disposed a layer above. The dielectric layers 316 may be between 0.3 and 10 microns thick. The top layer of the shutter assembly 300 includes a shutter anchor 312, two row anchors 313, two actuators, and a shutter 310. The beams of the actuators are not shown as the cross section of the shutter assembly 300 is taken at a position in which the row actuator beams meet the row anchors 313 and the shutter actuator beams meet the shutter 310 (see, for example, line B-B' on Figure 1 D). The top layer is supported above the lower layers by the anchors 312 so that the shutter 310 is free to move.

In alternative implementations, the row electrodes 308a and 308b are located at a lower layer in the shutter assembly 300 than the column metal layer 304.
In another implementation the shutter 310 and actuators can be located at a layer below either of the column metal layer 304 or the row electrodes 308a and 308b.

As described in relation to Figure 1 B, the actuators included in the shutter assembly may be designed to be mechanically bi-stable. Alternatively, the actuators can be designed to have only one stable position. That is, absent the application of some form of actuation force, such actuators return to a predetermined position, either open or closed. In such implementations, the shutter assembly 300 includes a single row electrode 308, which, when energized, causes the actuator to push or pull the shutter 310 out of its stable position.

Figure 3B is a cross-sectional view of a second alternative shutter assembly 300' in an open position according to an illustrative embodiment of the invention.
The second shutter assembly 300' includes a substrate 302', a column metal layer 304', an aperture 306', row electrodes 308a' and 308b', a shutter 310', two actuators, a shutter anchor 312', and two row anchors 313'. The beams of the actuators are not shown as the cross section of the shutter assembly 300' is taken at a position in which the row actuator beams meet the row anchors 313' and the shutter actuator beams meet the shutter 310'. (See, for example, line B-B' on Figure 1D).

In the shutter assembly 300', additional gaps are etched into the column metal layer 304'. The gaps electrically separate different portions of the column metal layer 304' such that different voltages can be applied to each portion.
For instance, in order to reduce parasitic capacitances that can arise between the column metal layer 304' and the row electrodes 308a' and 308b' resulting from their overlap, a voltage can be selectively applied to the sections 314 of the column metal layer 304' that immediately underlies the row electrodes 308a' and 308b' and the anchor 312'.

Figure 3C is a cross-sectional view of another third alternative shutter assembly 300" according to an illustrative embodiment of the invention. The shutter assembly 300" includes a substrate 302", a column metal layer 304", an aperture 306", row electrodes 308a" and 308b", a shutter 310", two actuators, a shutter anchor 312", and two row anchors 313". The beams of the actuators are not shown as the cross section of the shutter assembly 300" is taken at a position in which the row actuator beams meet the row anchors 313" and the shutter actuator beams meet the shutter 310". (See, for example, line B-B' on Figure ID). The shutter assembly 300" includes a reflective film 316 deposited on the substrate 302". The reflective film 316 serves as a front reflective surface for an optical cavity incorporating the shutter assembly 300". With the exception of an aperture 306" formed in the reflective film 316 to provide a light transmissive region, the reflective film 316 is substantially unbroken. A dielectric layer 318 separates the reflective film 316 from the column metal layer 304". At least one additional dielectric layer 318 separates the column metal layer 304" from the two row electrodes 308a" and 308b". During the process of the manufacturing of the third alternative shutter assembly 300", the column metal layer 304" is etched to remove metal located below the row electrodes 308a" and 308b" to reduce potential capacitances that can form between the row electrodes 308a" and 308b" and the column metal layer 304". Gaps 320 formed in the column metal layer 304" are filled in with a dielectric.

Figure 3D is a cross-sectional view of a further alternative shutter assembly 300"' in a closed position according to an illustrative embodiment of the invention.
The fourth alternative shutter assembly 300"' includes a substrate 302"', a column metal layer 304"', an aperture 306"', row electrodes 308a"' and 308b"', a shutter 310"', two actuators, a shutter anchors 312"', and two row anchors 313"'. The beams of the actuators are not shown as the cross section of the shutter assembly 300"' is taken at a position in which the row actuator beams meet the row anchors 313"' and the shutter actuator beams meet the shutter 310"'. (See, for example, line B-B' on Figure 1 D). In contrast to the previously depicted shutter assemblies 102, 300, 300', and 300", much of the dielectric material used in building the fourth alternative shutter assembly 300"' is removed by one or more etching steps.

The space previously occupied by the dielectric material can be filled with a lubricant to reduce friction and prevent stiction between the moving parts of the shutter assembly 300"'. The lubricant fluid is engineered with viscosities preferably below about 10 centipoise and with relative dielectric constant preferably above about 2.0, and dielectric breakdown strengths above about 104 V/cm. Such mechanical and electrical properties are effective at reducing the voltage necessary for moving the shutter between open and closed positions.. In one implementation, the lubricant preferably has a low refractive index, preferably less than about 1.5. In another implementation the lubricant has a refractive index that matches that of the substrate 302. Suitable lubricants include, without limitation, de-ionized water, methanol, ethanol, silicone oils, fluorinated silicone oils, dimethylsiloxane, polydimethylsiloxane, hexamethyldisiloxane, and diethylbenzene.

Figure 4 is a cross sectional view of a shutter assembly 400 with a coated shutter 402, according to an illustrative embodiment of the invention. The shutter assembly 400 is depicted as having the general structure of the shutter assembly 300 of Figure 3A. However, the shutter assembly 400 can take the form of any of the shutter assemblies 102, 300, 300', 300", or 300' described above or any other shutter assembly described below.

A reflective film 404 coats the bottom of the shutter 402 to reflect light 406 back through the shutter assembly 400 when the shutter 402 is in the closed position.
Suitable reflective films 404 include, without limitation, smooth depositions of Al, Cr, or Ni. The deposition of such a film 404, if the film 404 is greater than about 0.2 microns thick, provides a reflectivity for the shutter of 95% or higher.
Alternatively, amorphous or polycrystalline Si, when deposited onto a smooth dielectric surface, can provide reflectivity high enough to be useful in this application The top of the shutter 402 is coated with a light absorbing film 408 to reduce reflection of ambient light 410 striking the top of the shutter assembly 400.
The light absorbing film 408 can be formed from the deposition and/or anodization of a number of metals, such as Cr, Ni, or Au or Si in a manner that creates a rough or porous surface. Alternatively, the light absorbing film 408 can include an acrylic or vinyl resin which includes light absorbing pigments. In alternative implementations of the shutter assembly 400, the absorbing film 408 is applied to the entire, or substantially the entire top surface of the shutter assembly 400.

Figure 5 is a cross sectional view of a shutter assembly 500 with a second coated shutter 502, according to an illustrative embodiment of the invention.
The shutter assembly 500 is depicted as having the general structure of the first alternative shutter assembly 300 of Figure 3A. However, the shutter assembly can take the form of any of the shutter assemblies describes above 102, 300, 300', 300", and 300"' or any other shutter assembly described below. In the shutter assembly 500, both the top and the bottom of the shutter 502 are coated with a light absorbing film 504 such as a light absorbing film 408. The light absorbing film 504 on the bottom of the shutter 502 absorbs light impacting the shutter 502 in a closed position. For an optical cavity, such as optical cavity 200 of Figure 2, including the shutter assembly 500, the intensity of light exiting the optical cavity is independent of the image being formed. That is, light intensity is independent of the fraction of shutters that may be in the open or the closed position.

Figure 6 is cross-sectional view of an elastically actuated shutter assembly 600 for use in a light modulation array, such as light modulation array 102, according to an illustrative embodiment of the invention. The elastically actuated shutter assembly 600 includes a metal column layer 602, a single row electrode 604, an elastic element 606, and a shutter 608. The elastic element 606 provides a restoring force which keeps the shutter 608 in an open position, away from a corresponding aperture 610 in the column metal layer 602. In the open position, light 612 can pass through the aperture 610. Provision of a switching voltage to the single row electrode 604 counters the force of the elastic element 606, thereby putting the shutter 608 into a closed position over the aperture 610. In the closed position, the shutter 608 blocks light 612 from exiting through the aperture 610. In an alternative implementation, the shutter assembly 600 may include a latch to lock the shutter 608 into a closed position such that after the shutter 608 closes, the row electrode 604 can be de-energized without the shutter 608 opening. To open the shutter 608, the latch is released. In still another implementation of the shutter assembly 600, the elastic actuator tends to keep the shutter 608 in a closed position.
Applying a voltage to the row electrode 604 moves the shutter 608 into an open position.

Figure 7 is a cross-sectional view of a shutter assembly 700 with a deformable shutter 701 for use in a light modulation array, according to an illustrative embodiment of the invention. The shutter assembly 700 includes a column metal layer 702, and one row electrode 704 formed on a substrate 708.
The deforming shutter 701, instead of translating from one side of the shutter assembly 700 to the other side of the shutter assembly 700 to open and close, deforms in response to the energizing of the row electrode 704. The deforming shutter 701 is formed such that the deforming shutter 701 retains residual stress, resulting in the deforming shutter 701 tending to curl up out of the plane of the light modulation array in which it is included. By imposing a switching voltage between the row electrode 704 and the column metal layer 702, the deforming shutter 701 is attracted towards the substrate 708, thereby covering an aperture 710 formed in the column metal layer 702. Deformable or hinge type actuators have been described in the art, for instance in U.S. Patent Nos. 4,564,836 and 6,731,492.

Figure 8A is a cross-sectional view of a shutter assembly 800 with an opaque substrate 802, such as silicon, for use in a light modulation array, according to an illustrative embodiment of the invention. The opaque substrate 802 has a thickness in the range of about 200 microns to about 1 mm. Though the shutter assembly 800 resembles the shutter assembly 300 of Figure 3A, the shutter assembly 800 can take substantially the same form of any of the shutter assemblies 300, 300', 300", 300"', 400, 500, 600, or 700 described in Figures 3-7. An aperture 804 is etched through the entirety of the opaque substrate 802. In one implementation, the aperture 804 is formed using an anisotropic dry etch such as in a CFC13 gas with plasma or ion assist. The shutter assembly 800 may also include a reflective coating 810 deposited on the side of the opaque substrate 802 opposite the column metal layer.

Figure 8B is a cross-sectional view of a second shutter assembly 800' with an opaque substrate 802' for use in a light modulation array, according to an illustrative embodiment of the invention. In comparison to the shutter assembly 800 in Figure 8A, the underside of the opaque substrate 800' is etched away forming cavities 806 beneath the apertures 804' of the shutter assembly 800'. The cavities 806 allow light from a larger range of angles to escape through the aperture 804'.
The larger range provides for a brighter image and a larger viewing angle.

The shutter assemblies described in Figures 1 and 3-8 depend on electrostatic forces for actuation. A number of alternative actuator forcing mechanisms can be designed into shutter assemblies, including without limitation the use of electromagnetic actuators, thermoelastic actuators, piezoelectric actuators, and electrostiction actuators. Other shutter motions which can be used to controllably obstruct an aperture include without limitation sliding, rotating, bending, pivoting, hinging, or flapping; all motions which are either within the plane of the reflective surface or transverse to that plane.

Figure 9 is a cross-sectional view of a liquid crystal-based spatial light modulator 900. The liquid crystal-based spatial light modulator 900 includes an array 901 of liquid crystal cells 902. The liquid crystal cells 902 include pairs of opposing transparent electrodes 904 on either side of a layer of liquid crystal molecules 906. On one side of the liquid crystal array 901, the liquid crystal-based spatial light modulator 900 includes a polarizer 908. On the opposite side of the array 901, the liquid crystal-based spatial light modulator 900 includes an analyzer 910. Thus, without intervention, light passing through the polarizer 908 would be filtered blocked by the analyzer 910. When a voltage is imposed between the transparent electrodes 904, the liquid crystal molecules 906 between the electrodes 904 align themselves with the resultant electric field reorienting the light passing through the polarizer 908 such that it can pass through the analyzer 910. The polarizer 908 is positioned on top of a front reflective surface 911, which defines a plurality of light-transmission regions 913. The array 901 is attached to an optical cavity, such as optical cavity 200 and includes a cover plate 912. Cover plates are described in further detail in relation to Figure 11.

Each liquid crystal cell 902 may have a corresponding red, green, or blue color specific filter. Alternatively, color differentiation can be provided by multiple lamps operating in sequence as described above in relation to Figure 2.

Most liquid crystal displays (LCDs) are designed with resolutions of 80 to 110 dots per inch, wherein pixel widths are in the range of 250 to 330 microns. For such an LCD display, even with active matrix or thin-film transistor (TFT) addressing or switching, the transmissiveness ratio of the liquid-crystal display is in the range of 75 to 90%. For high-resolution applications (e.g. for document displays or projection displays) in which the desired image resolution is 300 to 500 dots per inch, however, and where pixels are only 50 microns in diameter, the overhead required for TFT addressing can limit the available transmissiveness ratio to about 30 or 50%. Such high-resolution displays, therefore, typically suffer from a lower luminous efficiency than their lower-resolution counterparts due to a loss of aperture ratio. By constructing the liquid crystal display using an optical cavity as described above, greater luminous efficiency can be achieved even in high-definition LCD displays.

Figure 10 is a cross sectional view of a first shutter-based spatial light modulator 1000 according to an illustrative embodiment of the invention. The shutter-based spatial light modulator 1000 includes a light modulation array 1002, an optical cavity 1004, and a light source 1006. The light modulation array can include any of the shutter assemblies 300, 300', 300", 300"', 400, 500, 600, 700, 800, or 800' described above in Figures 3-8. The optical cavity 1004, in the first shutter-based spatial light modulator 1000, is formed from a light guide having front and rear surfaces. A front reflective surface 1010 is deposited directly on the front surface of the light guide 1008 and a second reflective surface 1012 is deposited directly on the rear surface of the light guide 1008.

The light guide 1008 can be formed from glass or a transparent plastic such as polycarbonate or polyethylene. The light guide 1008 is about 300 microns to about 2 mm thick. The light guide 1008 distributes light 1014 introduced into the optical cavity 1004 substantially uniformly across the surface of the front reflective surface 1010. The light guide 1008 achieves such distribution by means of a set of total internal reflections as well as by the judicial placement of light scattering elements 1016. The light scattering elements 1016 can be formed in or on the rear side of the light guide 1018 to aid in redirecting light 1014 out of the light guide 1008 and through light-transmissive regions 1019 formed in the front reflective surface 1010.

Figure I I is a cross sectional view of a second shutter-based spatial light modulator 1100, according to the illustrative embodiment of the invention. As with the first shutter-based spatial light modulator 1000 in Figure 10, the second shutter-based spatial light modulator 1100 includes a light modulation array 1102, an optical cavity 1104, and a light source 1106. In addition, the second spatial light modulator includes a cover plate 1108.

The cover plate 1108 serves several functions, including protecting the light modulation array 1102 from mechanical and environmental damage. The cover plate 1108 is a thin transparent plastic, such as polycarbonate, or a glass sheet. The cover plate can be coated and patterned with a light absorbing material, also referred to as a black matrix 1110. The black matrix can be deposited onto the cover plate as a thick film acrylic or vinyl resin that contains light absorbing pigments.

The black matrix 1110 absorbs substantially all incident ambient light 1112 --ambient light is light that originates from outside the spatial light modulator 1100, from the vicinity of the viewer -- except in patterned light-transmissive regions 1114 positioned substantially proximate to light-transmissive regions 1116 formed in the optical cavity 1104. The black matrix 1 110 thereby increases the contrast of an image formed by the spatial light modulator 1100. The black matrix 1110 can also function to absorb light escaping the optical cavity 1104 that may be emitted, in a leaky or time-continuous fashion.

In one implementation, color filters, for example, in the form of acrylic or vinyl resins are deposited on the cover plate 1108. The filters may be deposited in a fashion similar to that used to form the black matrix 1110, but instead, the filters are patterned over the open apertures light transmissive regions 1116 of the optical cavity 1104. The resins can be doped alternately with red, green, or blue pigments.

The spacing between the light modulation array 1102 and the cover plate 1108 is less than 100 microns, and may be as little as 10 microns or less. The light modulation array 1102 and the cover plate 1108 preferably do not touch, except, in some cases, at predetermined points, as this may interfere with the operation of the light modulation array 1102. The spacing can be maintained by means of lithographically defined spacers or posts, 2 to 20 microns tall, which are placed in between the individual right modulators in the light modulators array 1102, or the spacing can be maintained by a sheet metal spacer inserted around the edges of the combined device.

Figure 12A is a cross sectional view of a third shutter-based spatial light modulator 1200, according to an illustrative embodiment of the invention. The third shutter-based spatial light modulator 1200 includes an optical cavity 1202, a light source 1204, and a light modulation array 1206. In addition, the third shutter-based spatial light modulator 1204 includes a cover plate 1207, such as the cover plate 1108 described in relation to Figure 11.

The optical cavity 1202, in the third shutter-based spatial light modulator 1200, includes a light guide 1208 and the rear-facing portion of the light modulation array 1206. The light modulation array 1206 is formed on its own substrate 1210.
Both the light guide 1208 and the substrate 1210 each have front and rear sides. The light modulation array 1206 is formed on the front side of the substrate 1210.
A
front-facing, rear-reflective surface 1212, in the form of a second metal layer, is deposited on the rear side of the light guide 1208 to form the second reflective surface of the optical cavity 1202. Alternatively, the optical cavity 1202 includes a third surface located behind and substantially facing the rear side of the light guide 1208. In such implementations, the front-facing, rear-reflective surface 1212 is deposited on the third surface facing the front of the spatial light modulator 1200, instead of directly on the rear side of the light guide 1208. The light guide includes a plurality of light scattering elements 1209, such as the light scattering elements 1016 described in relation to Figure 10. As in Figure 10, the light scattering elements are distributed in a predetermined pattern on the rear-facing side of the light guide 1208 to create a more uniform distribution of light throughout the optical cavity.

In one implementation, the light guide 1208 and the substrate 1210 are held in intimate contact with one another. They are preferably formed of materials having similar refractive indices so that reflections are avoided at their interface. In another implementation small standoffs or spacer materials keep the light guide 1208 and the substrate 1210 a predetermined distance apart, thereby optically de-coupling the light guide 1208 and substrate 1210 from each other. The spacing apart of the light guide 1208 and the substrate 1210 results in an air gap 1213 forming between the light guide 1208 and the substrate 1210. The air gap promotes total internal reflections within the light guide 1208 at its front-facing surface, thereby facilitating the distribution of light 1214 within the light guide before one of the light scattering elements 1209 causes the light 1214 to be directed toward the light modulator array 1206 shutter assembly. Alternatively, the gap between the light guide 1208 and the substrate 1210 can be filled by a vacuum, one or more selected gasses, or a liquid.

Figure 12B is a cross sectional view of a fourth shutter-based spatial light modulator 1200', according to an illustrative embodiment of the invention. As with the spatial light modulator 1200 of Figure 12A, the fourth spatial light modulator 1200' includes an optical cavity 1202', a light source 1204', a light modulation array 1206', and a cover plate 1207', such as the cover plate 1108 described in relation to Figure 11. The optical cavity 1202' includes a rear-facing reflective surface in the light modulation array 1206', a light guide 1208', and a front-facing rear-reflective surface 1212'. As with the third spatial light modulator 1200, the light modulation array 1206' of the fourth spatial light modulator 1200' is formed on a substrate 1210', which is separate from the light guide 1208'.

In the fourth spatial light modulator 1200', the light guide 1208' and the substrate 1210' are separated by a light diffuser 1218 and a brightness enhancing film 1220. The diffuser 1218 helps to randomize the optical angles of scattered light 1214' to improve uniformity and reduce the formation of ghost images from the light source 1204 or the light modulation array 1206. In one implementation, the brightness enhancement film 1220 includes an array of optical prisms that are molded into a thin plastic sheet, and which act to funnel light into a narrow cone of illumination. The brightness enhancing film 1220 re-directs light leaving the light guide 1208' through light-transmissive regions 1222 at an oblique angle towards the viewer, thus resulting in an apparent increases in brightness along the optical axis for the same input power.

Figure 12C is a cross sectional view of a fifth shutter-based spatial light modulator 1200", according to an illustrative embodiment of the invention. As with the spatial light modulator 1200 of Figure 12A, the fifth spatial light modulator 1200" includes an optical cavity 1202", a light source 1204", a light modulation array 1206", and a cover plate 1207", such as the cover plate 1108 described in relation to Figure 11. The optical cavity 1202" includes a rear-facing reflective surface in the light modulation array 1206", a light guide 1208", and a front-facing rear-reflective surface 1212". As with the third spatial light modulator 1200, the light modulation array 1206" of the fifth spatial light modulator 1200" is formed on a substrate 1210", which is separate from the light guide 1208".

In the fifth spatial light modulator 1200", the light guide 1208" and the substrate 1210" are separated by a microlens array 1224. The microlens array re-directs light 1214" leaving the light guide 1208" through light-transmissive regions 1222' at an oblique angle towards the viewer, thus resulting in an apparent increases in brightness for the same input power.

In addition, since the light modulation array 1206" in the fifth shutter-based spatial light modulator 1200" is formed on its own substrate 1210", separate from the light guide 1208", the light guide 1208" can be constructed of a moldable plastic, without the transition temperature of the plastic limiting the manufacturing processes available for constructing the light modulation array 1210". Thus, the light guide 1208" can be molded to substantially encapsulate the light source 1204"
used to introduce light 1214" into the optical cavity 1202". The encapsulation of the light source 1204" into the light guide 1208" provides improved coupling of light 1214" into the light guide 1208". Similarly, scattering elements 1209"
can be incorporated directly in the mold for the light guide 1208".

Figure 12D is a cross-sectional view of a sixth illustrative embodiment of a shutter-based light modulation array 1200"'. As with the spatial light modulator 1200 of Figure 12A, the sixth spatial light modulator 1200"' includes an optical cavity 1202"', a light source 1204"', a light modulation array 1206"', and a cover plate 1207"', such as the cover plate 1108 described in relation to Figure 11.
The optical cavity 1202"' includes a rear-facing reflective surface in the light modulation array 1206"', a light guide 1208"', a front-facing rear-reflective surface 1212"', a diffuser 1218"', and a brightness enhancing film 1220"'.

The space between the light modulation array 1206"' and the cover plate 1207"' is filled with a lubricant 1224, such as the lubricant described in relation to Figure 3D. . The cover plate 1207"' is attached to the shutter assembly 1206 with an epoxy 1225. The epoxy should have a curing temperature preferably below about 200 C, it should have a coefficient of thermal expansion preferably below about 50 ppm per degree C and should be moisture resistant. An exemplary epoxy is EPO-TEK B9021-1, sold by Epoxy Technology, Inc. The epoxy also serves to seal in the lubricant 1224.

A sheet metal or molded plastic assembly bracket 1226 holds the cover plate 1207"', the light modulation array 1206"', and the optical cavity 1202"' together around the edges. The assembly bracket 1226 is fastened with screws or indent tabs to add rigidity to the combined device. In some implementations, the light source 1204"' is molded in place by an epoxy potting compound.

Figure 13 is a cross-sectional view of a seventh shutter-based spatial light modulator 1300 according to an illustrative embodiment of the invention. The seventh shutter-based spatial light modulator 1300 includes a substrate 1302 on which a light modulation array 1304 is formed, and a light guide 1306. The light modulation array 1304 includes a front reflective surface for the optical cavity 1310 of the spatial light modulator 1300. A reflective material is deposited or adhered to the rear side of the light guide to serve as a rear reflective surface 1308.
The rear side of the light guide 1306 is angled or shaped with respect to the front side of the light guide 1308 to promote uniform distribution of light in the light modulation array 1304. The rear reflective surface 1308, however, is still partially facing the front reflective surface.

Figure 14A is a cross-sectional view of another spatial light modulator 1400, according to an illustrative embodiment of the invention. The spatial light modulator 1400 includes a substrate 1402 on which a light modulation array 1404 is formed. The light modulation array includes a reflective surface serving as a front reflective surface 1405 of an optical cavity. The spatial light modulation 1400 also includes a rear reflective surface 1406 substantially facing the rear side of the light modulation array 1404. A light source 1408 is positioned within the space formed between the substrate 1402 on which the light modulation array 1404 is formed and the rear reflective surface 1406. The space may also be filled with a substantially transparent plastic into which the light source 1408 is embedded.

Figure 14B is a cross-sectional view of another spatial light modulator 1400', similar to the spatial light modulator 1400 of Figure 14A. The spatial light modulator 1400' includes a substrate 1402' on which a light modulation array 1404' is formed. The light modulation array 1404' includes a reflective surface serving as a front reflective surface 1405 of an optical cavity. The spatil light modulation 1400' also includes a rear reflective surface 1406'. The rear reflective surface 1406' is corrugated, textured, or shaped to promote light distribution in the optical cavity formed by the reflective surfaces (i.e., the rear reflective surface 1406' and a reflective surface incorporated into the light modulation array 1404' of the spatial light modulator 1400'.

Figure 15 is a cross-sectional view of another shutter assembly 1500 for use in a light modulation array, according to an illustrative embodiment of the invention.
The shutter assembly 1500 includes a metal column layer 1502, two row electrodes 1504a and 1504b, a shutter 1506, built on a substrate 1509. The shutter assembly 1500 also includes one or more light scattering elements 1508. As with other implementations of the shutter assemblies described above, an aperture 1510 is etched through the column metal layer 1502. The light scattering elements 1510 can include any change in the shape or geometry of the substrate 1509, such as by roughening, coating, or treating the surface of the substrate 1509. For example, the light scattering elements can include patterned remnants of the column metal having dimensions of about 1 to about 5 microns. The light scattering elements 1508 aid in extracting light 1512 trapped in the substrate 1508 due to total internal reflection. When such trapped light 1512 strikes one of the scattering elements 1508, the angle of the light's 1512 path changes. If the angle of the light's path becomes sufficiently acute, it passes out of the substrate 1509. If the shutter 1506 is in the open position, the scattered light 1512 can exit the aperture 1510, and proceed to a viewer as part of an image.

Figure 16 is a cross sectional view of yet another spatial light modulator 1600 according to an illustrative embodiment of the invention. The spatial light modulator 1600 includes a light modulation array 1602 formed on the rear surface of a substrate 1604, facing the interior of an optical cavity 1606. The individual light modulation elements1608, such as the shutter assemblies 300, 300', 300", 300"', 400, 500, 600, 700, 800, and 800' described in Figures 3-8 or the liquid-crystal cells 902 described in Figure 9, making up the light modulation array 1602 are modified to reverse the sides of the light modulation elements 1608 that reflect or absorb light as compared to what is described with reference to Figures 4 and 5..

The optical cavity 1606 includes both a front reflective surface 1610, a rear reflective surface 1612, and a light guide 1614. Light is introduced into the optical cavity by a light source 1613. The front reflective surface 1610 is disposed on front-facing surface of the light guide 1614, providing a substantially continuous layer of high reflectivity and also defining light transmissive region 1616. The front reflective surface 1610 is separated from the light modulation array 1602 by a transparent gap 1618. The gap 1618 is preferably narrower than width of the light transmissive regions 1616, less than, for example, about 100 microns. The gap may be as narrow as about 10 microns wide, or even narrower.
In one implementation, the gap 1618 is filled with a lubricant 1620, such as the lubricant described in relation to Figure 3D. The lubricant 1620 may have a refractive index that substantially matches that of the light guide 1614 to facilitate the extraction of light from the light guide 1614.

The spatial light modulator 1600 can optionally forego a cover plate, since the shutter assembly is protected by the environment by the substrate 1604. If a cover plate is omitted, a black matrix, such as the black matrix 1110 of Figure 11, can be applied to the front-facing surface of the substrate 1604.
Figure 17 is a cross-sectional view of a transflective shutter assembly 1700, according to an illustrative embodiment of the invention, which can be incorporated into the spatial light modulators 1000, 1100, 1200, 1300, 1400, and 1500 described in Figures 10-15. The transflective shutter assembly 1700 forms images from both light 1701 emitted by a light source positioned behind the shutter assembly 1700 and from ambient light 1703. The transflective shutter assembly 1700 includes a metal column layer 1702, two row electrodes 1704a and 1704b, and a shutter 1706. The transflective shutter assembly 1700 includes an aperture 1708 etched through the column metal layer 1702. Portions of the column metal layer 1702, having dimensions of from about 1 to about 5 microns, are left on the surface of the aperture 1708 to serve as transflection elements 1710. A light absorbing film 1712 covers the top surface of the shutter 1706.

While the shutter is in the closed position, the light absorbing film 1712 absorbs ambient light 1703 impinging on the top surface of the shutter 1706.
While the shutter 1706 is in the open position as depicted in Figure 17, the transflective shutter assembly 1700 contributes to the formation of an image both by allowing light 1701 to pass through the transfiective shutter assembly originating from the dedicated light source and from reflected ambient light 1703. The small size of the transflective elements 1710 results in a somewhat random pattern of ambient light 1703 reflection.

The transflective shutter assembly 1700 is covered with a cover plate 1714, which includes a black matrix 1716. The black matrix absorbs light, thereby substantially preventing ambient light 1703 from reflecting back to a viewer unless the ambient light 1703 reflects off of an uncovered aperture 1708.

Figure 18 is a cross-sectional view of a second transflective shutter assembly 1800 according to an illustrative embodiment of the invention, which can be incorporated into the spatial light modulators 1000, 1100, 1200, 1300, 1400, and 1500 described in Figures 10-15. The transflective shutter assembly 1800 includes a metal column layer 1802, two row electrodes 1804a and 1804b, and a shutter 1806.
The transflective shutter assembly 1800 includes an aperture 1808 etched through the column metal layer 1702. At least one portion of the column metal layer 1802, having dimensions of from about 5 to about 20 microns, remains on the surface of the aperture 1808 to serve as a transflection element 1810. A light absorbing film 1812 covers the top surface of the shutter 1806. While the shutter is in the closed position, the light absorbing film 1812 absorbs ambient light 1803 impinging on the top surface of the shutter 1806. While the shutter 1806 is in the open position, the transflective element 1810 reflects a portion of ambient light 1803 striking the aperture 1808 back towards a viewer. The larger dimensions of the transflective element 1810 in comparison to the transflective elements 1710 yield a a more specular mode of reflection, such that ambient light originating from behind the viewer is substantially reflected directly back to the viewer.

The transflective shutter assembly 1800 is covered with a cover plate 1814, which includes a black matrix 1816. The black matrix absorbs light, thereby substantially preventing ambient light 1803 from reflecting back to a viewer unless the ambient light 1803 reflects off of an uncovered aperture 1808.

Referring to both Figures 17 and 18, even with the transflective elements 1710 and 1810 positioned in the apertures 1708 and 1808, some portion of the ambient light 1703 and 1803 passes through the apertures 1708 and 1808 of the corresponding transflective shutter assemblies 1700 and 1800. When the transflective shutter assemblies 1700 and 1800 are incorporated into spatial light modulators having optical cavities and light sources, as described above, the ambient light1703 and 1803 passing through the apertures 1708 and 1808 enters the optical cavity and is recycled along with the light introduced by the light source. In alternative transflective shutter assemblies, the apertures in the column metal are at least partially filled with a semi-reflective-semitransmissive material.

Figure 19 is a cross sectional view of a front reflective shutter assembly according to an illustrative embodiment of the invention. The front reflective shutter assembly 1900 can be used in a reflective light modulation array. The front reflective shutter assembly 1900 reflects ambient light 1902 towards a viewer.
Thus, use of arrays of the front reflective shutter assembly 1900 in spatial light modulators obviates the need for a dedicated light source in viewing environments having high amounts of ambient light 1902. The front reflective shutter assembly 1900 can take substantially the same form of the shutter assemblies 300, 300', 300", 300"', 400, 500, 600, 700, 800 or 800' of Figures 3-8. However, instead of the column metal layer of the shutter assemblies 300, 400, 500, 600, 700, or 800 including an aperture to allow passage of light, the column metal layer includes a reflective surface beneath the position of a closed shutter 1904. The front-most layer of the reflective shutter assembly 1900, including at least the front surface of the shutter 1904, is coated in a light absorbing film 1908. Thus, when the shutter 1904 is closed, light 1902 impinging on the reflective shutter assembly 1900 is absorbed. When the shutter 1904 is open, at least a fraction of the light 1902 impinging on the reflective shutter assembly 1900 reflects off the exposed column metal layer 1910 back towards a viewer. Alternately the column metal layer can be covered with an absorbing film while the front surface of shutter 1908 can be covered in a reflective film. In this fashion light is reflected back to the viewer only when the shutter is closed.

As with the other shutter assemblies and light modulators described above, the reflective shutter assembly 1900 can be covered with a coverplate 1910 having a black matrix 1912 applied thereto. The black matrix 1912 covers portions of the cover plate 1910 not opposing the open position of the shutter.

Figure 20 is an isometric view of a spatial light modulator 2000 including multiple light modulation arrays 2002, according to an illustrative embodiment of the invention. The size of several of the light modulation arrays 2002 described above is limited, somewhat, by the semiconductor manufacturing techniques used to construct them. However, light guides 2004 and reflective films 2006 can be formed on a significantly larger scale. A spatial light modulator which includes multiple, adjacently disposed light modulation arrays 2002, arranged over one or more light guides 2004, can generate a larger image, thereby circumventing these limitations.

As described above, the shutter assemblies in the above-disclosed shutter assemblies can be controlled by an active matrix. Figure 21A is a conceptual diagram of an active control matrix 2100 suitable for inclusion in the display apparatus 100 for addressing an array of pixels 2140 (the "array 2140"). Each pixel 2101 includes an elastic shutter assembly 2102, such as the shutter assembly 122 of Figure 1 C, controlled by an actuator 2103. Each pixel also includes an aperture layer 2150 that includes aperture holes 2154. Other electrical and mechanical configurations of shutter assemblies and the circuits that control them can be employed without departing from the scope of the invention.

The control matrix 2100 is fabricated as a diffused or thin-film-deposited electrical circuit on the surface of a substrate 2104 on which the shutter assemblies 2102 are formed. The control matrix 2100 includes a scan-line interconnect for each row of pixels 2101 in the control matrix 2100 and a data-interconnect for each column of pixels 2101 in the control matrix 2100. Each scan-line interconnect 2106 electrically connects a write-enabling voltage source 2107 to the pixels 2101 in a corresponding row of pixels 2101. Each data interconnect 2108 electrically connects a data voltage source, ("Vd source") 2109 to the pixels 2101 in a corresponding column of pixels 2101. In control matrix 2100, the data voltage Vd provides the majority of the energy necessary for actuation of the shutter assemblies 2102. Thus, the data voltage source 2109 also serves as an actuation voltage source.

Figure 21 B is an isometric view of a portion of the array of pixels 2140 including the control matrix 2100. Referring to Figures 21A and 21B, for each pixel 2101 or for each shutter assembly in the array of pixels 2140, the control matrix 2100 includes a transistor 2110 and a capacitor 2112. The gate of each transistor 2110 is electrically connected to the scan-line interconnect 2106 of the row in the array 2140 in which the pixel 2101 is located. The source of each transistor 2110 is electrically connected to its corresponding data interconnect 2108. The actuators 2103 of each shutter assembly include two electrodes. The drain of each transistor 2110 is electrically connected in parallel to one electrode of the corresponding capacitor 2112 and to the one of the electrodes of the corresponding actuator 2103.
The other electrode of the capacitor 2112 and the other electrode of the actuator 2103 in shutter assembly 2102 are connected to a common or ground potential.

In operation, to form an image, the control matrix 2100 write-enables each row in the array 2140 in sequence by applying VWe to each scan-line interconnect 2106 in turn. For a write-enabled row, the application of VWe to the gates of the transistors 2110 of the pixels 2101 in the row allows the flow of current through the data interconnects 2108 through the transistors to apply a potential to the actuator 2103 of the shutter assembly 2102. While the row is write-enabled, data voltages Vd are selectively applied to the data interconnects 2108. In implementations providing analog gray scale, the data voltage applied to each data interconnect 2108 is varied in relation to the desired brightness of the pixel 2101 located at the intersection of the write-enabled scan-line interconnect 2106 and the data interconnect 2108.
In implementations providing digital control schemes, the data voltage is selected to be either a relatively low magnitude voltage (i.e., a voltage near ground) or to meet or exceed Vat (the actuation threshold voltage). In response to the application of Vat to a data interconnect 2108, the actuator 2103 in the corresponding shutter assembly 2102 actuates, opening the shutter in that shutter assembly 2102. The voltage applied to the data interconnect 2108 remains stored in the capacitor 2112 of the pixel 2101 even after the control matrix 2100 ceases to apply VWe to a row. It is not necessary, therefore, to wait and hold the voltage Vwe on a row for times long enough for the shutter assembly 2102 to actuate; such actuation can proceed after the write-enabling voltage has been removed from the row. The voltage in the capacitors 2112 in a row remain substantially stored until an entire video frame is written, and in some implementations until new data is written to the row.

In various implementations, shutter assemblies together with their corresponding actuators, can be made bi-stable. That is, the shutters in the shutter assembly can exist in at least two equilibrium positions (e.g. open or closed) with little or no power required to hold them in either position. More particularly, the shutter assemblies can be mechanically bi-stable. Once the shutter of such a shutter assembly is set in position, no electrical energy or holding voltage is required to maintain that position. The mechanical stresses on the physical elements of the shutter assembly can hold the shutter in place.
Shutter assemblies, together with their corresponding actuators, can also be made electrically bi-stable. In an electrically bi-stable shutter assembly, there exists a range of voltages below the actuation voltage of the shutter assembly, which if applied to a closed actuator (with the shutter being either open or closed), holds the actuator closed and the shutter in position, even if an opposing force is exerted on the shutter. The opposing force may be exerted by a spring, or the opposing force may be exerted by an opposing actuator, such as an "open" or "closed"
actuator.

The pixels 2101 of the array 2140 are formed on a substrate 2104. The array includes an aperture layer 2150, disposed on the substrate, which includes a set of aperture holes 2154 for each pixel 2101 in the array 2140. The aperture holes are aligned with the shutter assemblies 2102 in each pixel.

The array 2140 can be fabricated in the following sequence of steps. First the aperture layer 2150 is deposited and patterned onto a transparent substrate 2104.
Next, the control matrix, including an array of thin film switches or transistors 2110, is fabricated on top of the aperture layer 2150 along with capacitors 2112 and interconnects, such as scan-line interconnect 2106 or data interconnect 2108.
The processes employed to fabricate the transistors 2110 and capacitors 2112 can be typical of those known in the art for manufacturing active matrix arrays for use in liquid crystal displays. In the final step, a micro-electro-mechanical (or MEMS) shutter assembly is formed on top of the array of thin film switches.

In one simple implementation, the aperture layer 2150 is electrically isolated by an intervening dielectric layer from the control matrix. The aperture layer can consist of thin film materials that are process compatible with the active matrix to be fabricated above it, but need not electrically connect to that active matrix. The aperture holes 2154 can be generally circular, elliptical, polygonal, serpentine, or irregular in shape.

In another implementation, the aperture layer 2150 is electrically connected to the control matrix. This connection can be made by means of a via etched through an intervening dielectric layer, such that interconnects in the control matrix make electrical contact to the aperture layer. If the aperture layer 2150 includes conducting materials, it can then act as a ground plane or a common interconnect for the control matrix.

In other implementations of the display, a separate aperture layer does not need to be fabricated as a first step in the sequence. The aperture holes may be fabricated instead using the same thin film materials and with the same processing steps used in the fabrication of active matrices or passive matrices directly onto glass substrates, as typically known in the art. Only the mask designs or pixel layouts need to be changed to accommodate the formation of aperture holes.

In another implementation, the aperture layer is fabricated as a last step in the processing sequence. The aperture layer is rigidly attached to the substrate but generally suspended above the shutter assembly, leaving room below for the free translational motion of the shutter assembly.

Figures 22-30 relate to additional MEMS-based display apparatuses. In particular, the MEMS-based shutter assemblies of Figures 22-30 include optical light concentrators. Figure 22 is an isometric conceptual view of a reflective display apparatus A10 including an array A100 of light modulators (also referred to as a "light modulation array A100"), an array A150 of light concentrators (also referred to as a "light concentration array A150"), according to an illustrative embodiment of the invention. The display apparatus A10 can alternatively be formed as a transflective or transmissive display. Such embodiments are described further in relation to Figures 29 and 30. Light modulation array A100 includes a plurality of shutter assemblies A102a-102u (generally "shutter assemblies A102") arranged in rows and columns (although segmented displays without rows and columns can also be employed without departing from the spirit and scope of the invention). In general, a shutter assembly A102 has two states, open and closed (although partial openings can be employed to impart grey scale, for example, as will be described in greater detail below). Each shutter assembly A102 includes a shutter Al 12 for selectively covering a corresponding exposable surface Al 14. Shutter assemblies A l 02a-c, A l 02e-m, and A 102p-u are in the open state, exposing their corresponding exposable surfaces A114 to light which has passed through the light concentration array A150. Shutter assemblies A102d, A102n, and A102o are in the closed state, obstructing light from impacting their corresponding exposable surfaces A 114 passing through light concentration array A150. In general, apparatus Al0 selectively sets the states of shutter assemblies A 102 to reflect light beams originating from an ambient light source A 107, on the same side of the array as the viewer, back towards surface A103 for forming image A104 (see, also, Figure 7, for example). Alternatively, instead of being ambient to the apparatus A10, light source A107 could be provided as an integrated front light.

In one embodiment of the invention, each shutter assembly A 102 of light modulation array A 100 may correspond to an image pixel A106 in image A104. As described above, each shutter assembly A102 includes a shutter Al 12 and an exposable surface Al 14. In one implementation, the surface of the shutter Al facing the light source A 107 is reflective, and the exposable surface A 114 is light-absorbing. To illuminate a pixel, the shutter A112 is at least partially closed to reflect light towards the surface A 103. In an alternative implementation the surface of the shutter A 112 facing the light source A 107 absorbs light and the exposable surface A114 reflects light. In this implementation, a pixel A106 is brightest when the shutter A112 is fully open and darkest when the shutter A112 is fully closed.

In alternative implementations, display apparatus A10 may employ multiple shutter assemblies A102 for each image pixel A106. For example, the display apparatus may include three or four color-specific shutter assemblies A102 per image pixel A106. By selectively opening one or more of the color-specific shutter assemblies A102 corresponding to a particular image pixel A 106, the display apparatus can generate a color image pixel A106 in image A104. In another example, display apparatus A10 may include shutter assemblies A102 that may provide for multiple partially open or closed states per image pixel A106 to provide grey scale in image A104.

Exposable surface A 114 may be formed in various ways from films, depositions, or any other suitable materials, or combinations or lack thereof which either reflect or absorb light, depending on the desired implementation of the shutter assembly A102. Similarly, each shutter Al 12 may be provided with a surface that reflects light therefrom or absorbs light therein, such that in conjunction with its associated exposable surface A114, light is appropriately reflected or absorbed, towards the viewer by assembly A102, as desired. Such materials are described further in relation to Figure 23. In still other implementations, display apparatus Al0 may include other forms of light modulators, such as micromirrors, filters, polarizers, liquid crystal modulation cells, interferometric devices, and other suitable devices, instead of shutter assemblies A102 to modulate light to form an image.

Light concentration array A150 includes an array of optical elements for concentrating light onto respective light modulators in the array of light modulators A 100 to increase the fraction of ambient light impacting on either the shutter A 112 or exposable surface Al 14 depending on the position of the shutter A112.
Various types of optical elements may be provided in light concentration array A150, including reflective light funnels, high numerical aperture lenses, and other nonimaging optical devices, for example. In the illustrative embodiment shown in Figure 22, light concentration array A150 includes an array of reflective light funnels A152. Each funnel A152 is associated with a respective shutter assembly A102 for concentrating light emitted from ambient light source A 107, onto a particular region of the shutter assembly A 102 corresponding to the funnel A
152.
Each reflective funnel A152 preferably includes a first optical opening A156 directed towards the surface A103, a second optical opening A154 directed towards its associated shutter assembly A 102, and a wall A158 connecting the first optical opening A156 to the second optical opening A154.

The first optical opening A156 is preferably sized to match the size of an associated pixel A106, and the second optical opening A154 is preferably sized to match or to be slightly smaller than the size of the exposable surface A114 of its associated shutter assembly A102. Wall A158 is preferably highly reflective and the first optical opening A156 is preferably larger than the second optical opening A154 such that, to the greatest extent possible, beams of ambient light originating from ambient light source A107 may enter funnel A152 at first optical opening A156 from a wide range of angles and be reflected through second optical opening A

onto a concentrated region of shutter assembly Al 02. This increases the fraction of available image forming light which gets modulated by each shutter assembly A102, thereby improving the contrast ratio of display apparatus A10. Moreover, funneling and concentrating an increased fraction of ambient light A107 onto a reflective element or elements of shutter assembly A 102, display apparatus A 10 is able to provide an increased brightness and luminous efficiency while eliminating the need for a backlight and additional power.

Wall A 158 may be straight, curved, CPC (Compound Parabolic Collector)-shaped or any suitable combination thereof that provides for an optically efficient concentration of ambient light A107 and which also yields a high fill factor.
Wall A158 may be conical or may include multiple sides, depending on the size and shape of the funnel's optical openings. Optical openings A154 and A156 may be of various shapes and sizes without departing from the spirit and scope of the invention. Optical openings A156 could be hexagonal while optical openings could be circular, for example. Wall A158 may be provided with a reflective interior surface or with a transparent interior surface and an exterior reflective coating (as described in more detail below with respect to Figures 26A-27C).
Figure 23 is a cross-sectional diagram of one of the combined shutter-funnel assemblies of Figure 22, illustrating additional features of the display apparatus A 10.
With reference to Figures 22 and 23, display apparatus A10 may also include a cover sheet A109 and a filter array layer A111 between the viewer and light concentration array A150. Cover sheet A109 serves several functions, including protecting the light modulation array A 100 from mechanical and environmental damage. Cover sheet A109 may be a thin transparent plastic, such as polycarbonate, or a glass sheet, for example. In certain embodiments, the cover sheet can be coated and patterned with a light absorbing material, also referred to as a black matrix A 120. The black matrix A120 can be deposited onto the cover sheet A109 as a thick film acrylic or vinyl resin that contains light absorbing pigments. Black matrix A120 may absorb certain incident ambient light, thereby increasing the contrast of the image A104 formed by apparatus AlO. The black matrix A120 can also function to absorb light escaping in a leaky or time-continuous fashion. Top surface A103 of cover sheet A109 may display image A104 to the viewer.

In one implementation, filter array Al 11, which may be deposited on cover sheet A 109, may include color filters, for example, in the form of acrylic or vinyl resins, or thin film dielectrics. The filters may be deposited in a fashion similar to that used to form black matrix A 120, but instead, the filters are patterned over the first optical openings Al 56 or the second optical openings Al 54 of cones Al 52 of light concentration array A150 to provide appropriate color filters for color-specific shutter assemblies A102. For example, display apparatus A10 may include multiple groupings of three or more color-specific shutter assemblies A102 (e.g., a red shutter assembly, a green shutter assembly, and a blue shutter assembly; a red assembly, a green shutter assembly, and a blue shutter assembly, and a white shutter assembly; a cyan shutter assembly, a magenta shutter assembly, and a yellow shutter assembly, etc. - although any other numerical and/or color combination of shutter assemblies for forming an image pixel may be provided without departing from the spirit and scope of the invention), such that each of the sub-pixels associated with the color-specific shutter assemblies A102 of a grouping may form an image pixel A106.

There could be more than three color subpixesl to make up one full image pixel. By selectively opening one or more of the color-specific shutter assemblies A102 in a grouping corresponding to a particular pixel, display apparatus A10 can generate an image pixel A106 of various colors for image A104.

These color filters can be made in several ways. For example, materials with selective absorptivity can be patterned onto the surface of the display using well known photolithographic techniques, similar to the steps used in fabricating the shutters and passive matrix or active matrix components of the control matrix.
Materials with dispersed metals and metal oxides or more generally specific absorptive materials can be photosensitive and defined like a photoresist.
Alternatively, such absorptive centers can be applied in a thin film form and subsequently patterned with well known photolithography and etch processes.
Furthermore, thin films based on interference properties of the thin film layers can be patterned on the substrate for forming interference filters over the representative red, blue, and green pixels, for example. Color filter materials can also be formed from organic dyes dispersed in a resin, such as polyvinyl acrylate.

The height, thickness, shape, and diameters of the optical openings of funnels A152 can vary according to the materials employed and the application.
When the height of wall Al 58 of funnel Al 52 is small compared to the difference in size between optical openings A154 and A156, the slope of wall A158 is relatively shallow (i.e., wall A158 is substantially parallel to surface A103), and funnel A152 generally acts like a retro-reflector by reflecting most of ambient light A107 back towards the viewer without first concentrating the light onto the reflective region or regions of shutter assembly A102. On the other hand, when the height of wall of funnel A152 is large compared to the difference in size between optical openings A154 and A156, the slope of wall A158 is relatively steep (i.e., wall A158 is substantially perpendicular to surface A 103), resulting in a significant loss of light intensity due to multiple reflections of beams of ambient light A107 off of wall A158. Ina preferred embodiment, the diameter of first optical opening A156 can range from between 75 and 225 microns, and is preferably 150 microns; the diameter of second optical opening A 154 can range from between 25 and 75 microns, and is preferably 50 microns; and the height of cone A152 can range from between 100 and 300 microns, and is preferably 200 microns, for example, yielding slopes ranging from about 3.5 to 4.

In addition, a lens array may be provided with lenses A157 for focusing incoming ambient light into a respective funnel A 152, and thereby onto the associated shutter assembly A102, thereby reducing both the number of reflections off of wall A158 and the chance of retro-reflection paths (note that no lenses are shown in Figure 22 for the sake of clarity of the drawing). Lens A157 positioned at first optical opening A156 of funnel A152 may help direct and concentrate oblique incident light rays originating from ambient light source A107 into funnel A152 and thus onto the reflective region or regions of shutter assembly A102.
Color filters of array Al 11 may be fixed to the bottom side of lenses A157, for example, as shown in Figure 23. As shown in Figure 26, the lens and optical funnel structures can be formed as one in a single molding process.

Color filtering can also be done at other locations in display apparatus A10.
In addition to within the cover sheet A 109, color filter array A 111 may be applied at the second optical opening A154 of each reflective light funnel A152, for example.
This embodiment may be especially preferable in the implementation where funnels A152 are filled with a hard transparent optical material (as described below in more detail with respect to Figures 26A-27C). Filter array Al 11 may alternatively be applied proximal to the reflective region or regions of shutter assembly A102.
Generally, filters A111 of the filter array may be placed anywhere in the light path of a given pixel between surface A 103 and the reflective surface of the shutter assembly A102.

Reflective wall A158 has a reflectivity above about 50%. For example, reflective wall A158 may have a reflectivity of 70%, 85%,A92%, 96%, or higher.
Smoother substrates and finer grained metals yield higher reflectivities.
Smooth surfaces may be obtained by molding plastic into smooth-walled forms. Fine grained metal films without inclusions can be formed by a number of vapor deposition techniques including sputtering, evaporation, ion plating, laser ablation, or chemical vapor deposition. Metals that are effective for this reflective application include, without limitation, Al, Cr, Au, Ag, Cu, Ni, Ta, Ti, Nd, Nb, Rh, Si, Mo, and/or any alloys or combinations thereof.

Alternatively, reflective wall A158 can be formed from a mirror, such as a dielectric mirror. A dielectric mirror is fabricated as a stack of dielectric thin films which alternate between materials of high and low refractive index. A portion of the incident light is reflected from each interface where the refractive index changes.
By controlling the thickness of the dielectric layers to some fixed fraction or multiple of the wavelength and by adding reflections from multiple parallel interfaces, it is possible to produce a net reflective surface having a reflectivity exceeding 98%. Some dielectric mirrors have reflectivities greater than 99.8%.
Dielectric mirrors can be custom-designed to accept a pre-specified range of wavelengths in the visible range and to accept a pre-specified range of incident angles. Reflectivities in excess of 99% under these conditions are possible as long as the fabricator is able to control the smoothness in the dielectric film stacks. The stacks can include between about 20 and about 500 films, for example.

The state of each shutter assembly A102 can be controlled using a passive matrix addressing scheme. Each shutter assembly A102 may be controlled by a column electrode A 108 and two row electrodes A l l Oa (a "row open electrode") and All 0b (a "row close electrode"). In light modulation array A 100, all shutter assemblies A102 in a given column may share a single column electrode A108.
All shutter assemblies in a row may share a common row open electrode Al lOa and a common row close electrode Al IOb.

An active matrix addressing scheme, similar to that described above in relation to Figures 21A and 21B is also possible. Active matrix addressing (in which pixel and switching voltages are controlled by means of a thin film transistor array or an array of metal insulator metal ("MIM") diodes) is useful in situations in which the applied voltage must be maintained in a stable fashion throughout the period of a video frame. An implementation with active matrix addressing can be constructed with only one row electrode per shutter assembly row.

Referring to Figures 22 and 23, shutter assembly A 102 is built on a glass, silicon, or plastic polymer substrate Al 16, which is shared with other shutter assemblies A102 of light modulation array A100. Substrate A116 may support as many as 4,000,000 shutter assemblies, arranged in up to about 2,000 rows and up to about 2,000 columns. A plurality of substrates may be arranged in an array for signage applications, for example.

Light modulation array A 100 and its component shutter assemblies A 102 are formed using standard micromachining techniques known in the art, including lithography; etching techniques, such as wet chemical, dry, and photoresist removal;
thermal oxidation of silicon; electroplating and electroless plating;
diffusion processes, such as boron, phosphorus, arsenic, and antimony diffusion; ion implantation; film deposition, such as evaporation (filament, electron beam, flash, and shadowing and step coverage), sputtering, chemical vapor deposition ("CVD"), epitaxy (vapor phase, liquid phase, and molecular beam), electroplating, screen printing, and lamination. See generally, Jaeger, Introduction to Microelectronic Fabrication (Addison-Wesley Publishing Co., Reading Mass., 1988); Runyan, et al., Semiconductor Integrated Circuit Processing Technology (Addison-Wesley Publishing Co., Reading Mass., 1990); Proceedings of the IEEE Micro Electro Mechanical Systems Conference, 1987-1998; and Rai-Choudhury, ed., Handbook of Microlithography, Micromachining & Microfabrication (SPIE Optical Engineering Press, Bellingham, Wash., 1997).

More specifically, multiple layers of material (typically alternating between metals and dielectrics) may be deposited on top of a substrate forming a stack. After one or more layers of material are added to the stack, patterns may be applied to a top most layer of the stack marking material either to be removed from, or to remain on, the stack. Various etching techniques, including wet and/or dry etches, may then be applied to the patterned stack to remove unwanted material. The etch process may remove material from one or more layers of the stack based on the chemistry of the etch, the layers in the stack, and the amount of time the etch is applied.
The manufacturing process may include multiple iterations of layering, patterning, and etching.

The process may also include a release step. To provide freedom for parts to move in the resulting device, sacrificial material may be interdisposed in the stack proximate to material that will form moving parts in the completed device. An etch or other fugitive phase process removes much of the sacrificial material, thereby freeing the parts to move.

After release, the surfaces of the moving shutter may be insulated so that charge does not transfer between moving parts upon contact. This can be accomplished by thermal oxidation and/or by conformal chemical vapor deposition of an insulator such as A1203, Cr2O3, TiO2, HfO2, V205, Nb205, Ta2O5, SiO2, or Si3N4, or by depositing similar materials using techniques such as atomic layer deposition. The insulated surfaces may be chemically passivated to prevent problems such as friction between surfaces in contact by chemical conversion processes such as fluoridation or hydrogenation of the insulated surfaces.

Dual compliant electrode actuators make up one suitable class of actuators for driving shutters A112 in shutter assemblies A102. It is to be noted that many other various types of actuators, including non-dual compliant electrode actuators, may be utilized for driving shutters A112 in shutter assemblies A102 without departing from the spirit and scope of the invention. A dual compliant beam electrode actuator, in general, is formed from two or more at least partially compliant beams. At least two of the beams serve as electrodes (also referred to herein as "beam electrodes"). In response to applying a voltage across the beam electrodes, the beam electrodes are attracted to one another from the resultant electrostatic forces. Both beams in a dual compliant beam electrode are, at least in part, compliant. That is, at least some portion of each of the beams can flex and or bend to aid in the beams being brought together. In some implementations the compliance is achieved by the inclusion of corrugated flexures or pin joints.
Some portion of the beams may be substantially rigid or fixed in place. Preferably, at least the majority of the length of the beams are compliant.

Dual compliant electrode actuators have advantages over other actuators known in the art. Electrostatic comb drives are well suited for actuating over relatively long distances, but can generate only relatively weak forces.
Parallel plate or parallel beam actuators can generate relatively large forces but require small gaps between the parallel plates or beams and therefore only actuate over relatively small distances. R. Legtenberg et. al. (Journal of Microelectromechanical Systems v.
6, p.
257, 1997) demonstrated how the use of curved electrode actuators can generate relatively large forces and result in relatively large displacements. The voltages required to initiate actuation in Legtenberg, however, are still substantial.
As shown herein such voltages can be reduced by allowing for the movement or flexure of both electrodes.

In a dual compliant beam electrode actuator-based shutter assembly, a shutter is coupled to at least one beam of a dual compliant beam electrode actuator.
As one of the beams in the actuator is pulled towards the other, the pulled beam moves the shutter, too. In doing so, the shutter is moved from a first position to a second position. In one of the positions, the shutter interacts with light in an optical path by, for example, and without limitation, blocking, reflecting, absorbing, filtering, polarizing, diffracting, or otherwise altering a property or path of the light. The shutter may be coated with a reflective or light absorbing film to improve its interferential properties The exposable surface A114 interacts with the light in the optical path by, for example, and without limitation, blocking, reflecting, absorbing, filtering, polarizing, diffracting, or otherwise altering a property or path of the light, in a fashion that is complimentarty to that of the optical effect provided by the shutter. For example, if one is absorbing the other is reflective or if one polarizes in one orientation the other surface polarizes in a perpendicular orientation..

Figures 24A and 24B are plane views of a shutter assembly Al 02, in fully open and closed states, respectively, according to an illustrative embodiment of the invention. The shutter assembly Al 02 utilizes a dual compliant beam electrode actuators for actuation. Referring to Figures 23, 24A, and 24B, shutter assembly A102 modulates light to form an image by controllably moving a shutter A112, which includes two half-obstructing shutter portions Al 12a and Al 12b, in and out of an optical path of light between the viewer and exposable surface A114.
Shutter portions A112a and A112b, when closed, substantially obstruct light from impacting the exposable surface 114. In one embodiment, instead of the shutter portions Al 12a and Al 12b being of about equal size, one shutter portion Al 12a or A112b is larger than that of the other shutter portion A112a or A112b, and they can be actuated independently. Thus by selectively opening zero, one, or both shutter portions A112a and A 112, the shutter assembly A 102 can provide for 4 levels of gray scale (e.g., off, one-third one, two-thirds on, and fully on).

Shutters Al 12a and Al 12b are each formed from a solid, substantially planar, body Shutters Al 12a and Al 12b can take virtually any shape, either regular or irregular, such that in a closed position shutters Al 12a and Al 12b sufficiently obstruct the optical path to exposable surface Al 14. In addition, shutters Al 12a and A112b must have a width consistent with the width of the exposable surface, such that, in the open position (as depicted in Figure 24A), sufficient light can be absorbed or reflected by exposable surface Al 14 to darken or illuminate a pixel, respectively.

As shown in Figures 24A and 24B, each of shutters Al 12a and Al 12b (shutter A112) couples to an end of each of two load beams A208. A load anchor A2 10, at the opposite end of each load beam A208 physically connects the load beam A208 to substrate A122 and electrically connects the load beam A208 to driver circuitry formed on the substrate. Together, the load beams A208 and load anchors A210 serve as a mechanical support for supporting the shutter A112 over the exposable surface Al 14, formed on the substrate.

The shutter assembly A 102 includes a pair of drive beams A212 and a pair of drive beams A214, one of each located along either side of each load beam A210.
Together, the drive beams A212 and A214 and the load beams A210 form an actuator. Drive beams A212 serve as shutter open electrodes and the other drive beams A214 serve as shutter close electrodes. Drive anchors A216 and A218 located at the ends of the drive beams A212 and A214 closest to the shutter physically and electrically connect each drive beam A212 and A214 to circuitry formed or the substrate A122. In this embodiment, the other ends and most of the lengths of the drive beams A212 and A214 remain unanchored or free to move.

The load beams A208 and the drive beams A212 and A214 are compliant.
That is, they have sufficient flexibility and resiliency such that they can be bent out of their unstressed ("rest") position or shape to at least some useful degree, without any significant fatigue or fracture. As the load beams A208 and the drive beams A212 and A214 are anchored only at one end, the majority of the lengths of the beams A208, A212, and A214 is free to move, bend, flex, or deform in response to an applied force. Corrugations (e.g., corrugations A208a on beams A208) may be provided to overcome axial stress due to foreshortening of the flexure and to provide higher deflections at a given voltage, for example.

Display apparatus AlO actuates shutter assembly A102 (i.e., changes the state of the shutter assembly A 102) by applying an electric potential, from a controllable voltage source, to drive beams A212 or A214 via their corresponding drive anchors A216 or A218, with the load beams A208 being electrically coupled to ground or some different potential, resulting in a voltage across the beams A208, A212, and A214. The controllable voltage source, such as a passive or active matrix array driver, is electrically coupled to load beams A208 via a passive or active matrix as described above. The display apparatus A10 may additionally or alternatively apply a potential to the load beams A208 via the load anchors A210 of the shutter assembly A 102 to increase the voltage. An electrical potential difference between the drive beams A212 or A214 and the load beams A208, regardless of sign or ground potential, will generate an electrostatic force between the beams which results in shutter movement transverse in the plane of motion.

The tiling or pixel arrangements for shutter assemblies need not be limited to the constraints of a square array. Dense tiling can also be achieved using rectangular, rhombohedral, or hexagonal arrays of pixels, for example, all of which find applications in video and color imaging displays.

Figure 25 demonstrates a preferred method of tiling shutter assemblies into an array of pixels to maximize the aperture ratios in dense arrays and minimize the drive voltages. Figure 25 depicts a tiling A400 of dual compliant zipper electrode actuator-based shutter assemblies A102 that are tiled on the substrate A122 to form image pixels A106 from three generally rectangular shutter assemblies A102.
The three shutter assemblies A102 of each pixel A106 may be independently or collectively controlled.

Preferably shutter assemblies A102 are packed close together with as little dead area therebetween as possible to provide an increased fill factor. As shown in Figure 25, portions of shutter assemblies A102 can be interleaved with the gaps between portions of neighboring shutter assemblies A102. The interleaved arrangement of tiling A400 can be mapped onto a square arrangement of rows and columns, if desired. As shown, a repeating sequence of columns A420a, A420b, and A420c may each be associated with sub-pixels having a specifically colored filter Al 11 (e.g., red, green, and blue, respectively). Also, two interleaved rows of shutter assemblies A102 are included in a single row electrode A430. The interleaving can be utilized to provide for hexagonal packing of the pixels A106.

In other alternate implementations, the display apparatus A102 can include multiple (for example, between 1 and 10) with corresponding exposable surfaces Al 14 and corresponding shutters Al12 per image pixel A106. In changing the state of such an image pixel A 106, the number of actuators activated can depend on the switching voltage that is applied or on the particular combination of row and column electrodes that are chosen for receipt of a switching voltage. Implementations are also possible in which partial openings of an aperture are made possible in an analog fashion by providing switching voltages partway between a minimum and a maximum switching voltage. These alternative implementations provide an improved means of generating a spatial grey scale, for example.

Funnels A152 of light concentration array A150 may be micro-molded, embossed, or investment casted from a very large family of polymers like acrylics, imides, and acetates, for example, as well as plastics, glass, or UV curing epoxies.
Micro-molding may include subtractive techniques, such as photolithography, and etching or embossing techniques in which the inverse pattern is made in a hard material and subsequently aligned with and pressed into a soft material on the surface that can subsequently be cured or hardened. Alternatively, funnels may be fabricated, for example, out of photo-imageable material, such as Novalac or PMMA or Polyimide amongst many polymers that can be cross-linked, or whose cross-links can be broken, with the aid of light. See, for example, "Plastic vs. Glass Optics: Factors to Consider (part of SPIE 'Precision Plastic Optics' short course note)," of November 17, 1998, by Alex Ning, Ph.d.; "Micro Investment Molding:
Method for Creating Injection Molded Hollow Parts," Proceedings of IMECE2005, of November 5-11, 2005, by Julian M. Lippmann et al.; and "In-Plane, Hollow Microneedles Via Polymer Investment Molding, of 2005, by Julian M. Lippmann et al.

In one embodiment, referring to Figures 26A-26D, an array Al 50 of funnels A152 may be formed first by molding solid cones Al 52 and optional lens structures A157 out of polycarbonate, polymethylmethacrylate, silicone based polymers ("PDMS"), or polyimide, or any other suitable material, for example (see, e.g., Figure 26A). Then a reflective layer may be coated onto the external and bottom surface of each cone A152 (see, e.g., Figure 26B), preferably from the underside of array A150, for forming reflective wall A158. Next, the reflective layer coated on the bottom of cones A152 is polished off to provide for second optical opening A154 of each cone (see, e.g., Figure 26C). Optionally, polycarbonate, polymethylmethacrylate, silicone based polymers ("PDMS"), or polyimide, or any other suitable material, for example, may be provided as a backfill A155 between cones A152 such that they are formed into a single filled sheet (see, e.g., Figure 26D). In the embodiment where cones A152, lenses A157, and cover sheet Al 09 are all formed in one layer, filter arrays A 111 may be provided at second optical opening A154 of each cone A152, for example.

Alternatively, in another embodiment, referring to Figures 27A-27C, an array of depressions, in the form of hollow funnels A152 can be formed, for example, in a sheet A153 of photo-imageable material A155, such as Novalac or PMMA or Polyimide amongst many polymers, for example (see, e.g., Figure 27A).
Then a reflective material may be coated onto the inside of each depression to form reflective wall A158 (see, e.g., Figure 27B). Next, the bottom of the sheet may be polished off to form an optical opening, the second optical opening A154, at the bottom of the hollow funnels A152 (see, e.g., Figure 27C). Finally, and optionally, polycarbonate, polymethylmethacrylate, silicone based polymers ("PDMS"), or polyimide, or any other suitable material, for example, may be provided as a backfill Al 59 within cones Al52 such that they are formed into a single filled sheet (see, e.g., the region surround by dotted lines in Figure 27C). In an alternative implementation of this method, the depressions are punched through the entirety of the sheet A153, preventing reflective material from collecting at the tip of the hollow funnels A 152, thereby obviating the need to remove any material to form the second optical opening A154.

Figure 28 is a partial isometric cross-sectional diagram, of one of the combined shutter, funnel, and pixel assemblies of Figure 22, illustrating additional features of the display apparatus A 10 when the apparatus is implemented as a reflective-type display apparatus A1010, according to an illustrative embodiment of the invention. Reflective display apparatus A1010 can be used with a reflective light modulation array including an array of reflective shutter assemblies A
1102.
Reflective shutter assembly Al 102 reflects ambient light (e.g., typical ambient light beam A702) originating from ambient light source A107 towards a viewer through filter array layer A111 and cover sheet A109 (note that portions of layer Al 11 and sheet A 109, including lens A157 are not shown in Figure 28 for the sake of simplicity of the drawing).

Reflective shutter assembly A1102 can take substantially the same form as shutter assembly A102 of Figures 22-25. The front-most layer of reflective shutter assembly A 1102 facing the viewer, including at least the front surface of shutters Al 112a and Al 112b, is coated in a light absorbing film A1152. Thus, when shutter A1112 is closed, light A702 concentrated by funnel A152 on reflective shutter assembly Al 102 is absorbed by film Al 152. When shutter Al 112 is at least partially open (as depicted in Figure 28), at least a fraction of the light concentrated on reflective shutter assembly Al 102 reflects off an exposed reflective surface A1015 (i.e., exposable surface Al 114) of layer Al 118 back towards the viewer through funnel A152 as specular beams A703. Reflective surface A1015 has a reflectivity above about 50%. For example, reflective surface A1015 may have a reflectivity of 70%, 85%, 92%, 96%, or higher. Smoother substrates and finer grained metals yield higher reflectivities. Smooth surfaces may be obtained by molding plastic into smooth-walled forms. Fine grained metal films without inclusions can be formed by a number of vapor deposition techniques including sputtering, evaporation, ion plating, laser ablation, or chemical vapor deposition.
Metals that are effective for this reflective application include, without limitation, Al, Cr, Au, Ag, Cu, Ni, Ta, Ti, Nd, Nb, Rh, Si, Mo, and/or any alloys or combinations thereof.

Alternatively, reflective surface A1015 can be formed from a mirror, such as a dielectric mirror. A dielectric mirror is fabricated as a stack of dielectric thin films which alternate between materials of high and low refractive index. A portion of the incident light is reflected from each interface where the refractive index changes.
By controlling the thickness of the dielectric layers to some fixed fraction or multiple of the wavelength and by adding reflections from multiple parallel interfaces, it is possible to produce a net reflective surface having a reflectivity exceeding 98%. Some dielectric mirrors have reflectivities greater than 99.8%.
Dielectric mirrors can be custom-designed to accept a pre-specified range of wavelengths in the visible range and to accept a pre-specified range of incident angles. Reflectivities in excess of 99% under these conditions are possible as long as the fabricator is able to control the smoothness in the dielectric film stacks. The stacks can include between about 20 and about 500 films, for example.
Alternately layer Al 118 can be covered with an absorptive film while the front surface of shutter A 1112 can be covered in a reflective film. In this fashion, light is reflected back to the viewer through funnel A152 only when shutter Al 112 is at least partially closed.

Reflective surface A1015 may be roughened in order to provide diffusiveness thereon for combating glare. This roughening can be done by any one of several processes, including mechanical, chemical, or deposition processes.
Roughening the reflective surface causes reflected light to be scattered at various angles into funnel A152, and thus at various angles towards the viewer as diffuse beams A703', thereby creating wider viewing angles and increasing the ratio of diffuse (Lambertian) to specular reflections.

The absorbing film Al 152 can be formed, for example from a metal film.
Most metal films absorb a certain fraction of light and reflect the rest. Some metal alloys which are effective at absorbing light, include, without limitation, MoCr, MoW, MoTi, MoTa, TiW, and TiCr. Metal films formed from the above alloys or simple metals, such as Ni and Cr with rough surfaces can also be effective at absorbing light. Such films can be produced by sputter deposition in high gas pressures (sputtering atmospheres in excess of 20 mtorr). Rough metal films can also be formed by the liquid spray or plasma spray application of a dispersion of metal particles, following by a thermal sintering step. A dielectric layer such as a dielectric layer A404 is then added to prevent spalling or flaking of the metal particles.

Semiconductor materials, such as amorphous or polycrystalline Si, Ge, CdTe, InGaAs, colloidal graphite (carbon) and alloys such as SiGe are also effective at absorbing light. These materials can be deposited in films having thicknesses in excess of 500 nm to prevent any transmission of light through the thin film.
Metal oxides or nitrides can also be effective at absorbing light, including without limitation CuO, NiO, Cr203, AgO, SnO, ZnO, TiO, Ta205, Mo03, CrN, TiN, or TaN. The absorption of these oxides or nitrides improves if the oxides are prepared or deposited in non-stoichiometric fashion - often by sputtering or evaporation -especially if the deposition process results in a deficit of oxygen in the lattice. As with semiconductors, the metal oxides should be deposited to thicknesses in excess of 500 nm to prevent transmission of light through the film.

A class of materials, called cermets, is also effective at absorbing light.
Cermets are typically composites of small metal particles suspended in an oxide or nitride matrix. Examples include Cr particles in a Cr203 matrix or Cr particles in an Si02 matrix. Other metal particles suspended in the matrix can be Ni, Ti, Au, Ag, Mo, Nb, and carbon. Other matrix materials include Ti02, Ta205, A1203, and Si3N4.

It is possible to create multi-layer absorbing structures using destructive interference of light between suitable thin film materials. A typical implementation would involve a partially reflecting layer of an oxide or nitride along with a metal of suitable reflectivity. The oxide can be a metal oxide e.g. Cr02, Ti02, A1203 or Si02 or a nitride like Si3N4 and the metal can be suitable metals such as Cr, Mo, Al, Ta, Ti. In one implementation, for absorption of light entering from the substrate a thin layer, ranging from 10- 500 nm of metal oxide is deposited first on the surface of substrate A402 followed by a 10-500 nm thick metal layer. In another implementation, for absorption of light entering from the direction opposite of the substrate, the metal layer is deposited first followed by deposition of the metal oxide. In both cases the absorptivity of bi-layer stack can be optimized if the thickness of the oxide layer is chosen to be substantially equal to one quarter of 0.55 microns divided by the refractive index of the oxide layer.

In another implementation, a metal layer is deposited on a substrate followed by a suitable oxide layer of calculated thickness. Then, a thin layer of metal is deposited on top of the oxide such that the thin metal is only partially reflecting (thicknesses less than .02 microns). Partial reflection from the metal layer will destructively interfere with the reflection from substrate metal layer and thereby produce a black matrix effect. Absorption will be maximized if the thickness of the oxide layer is chosen to be substantially equal to one quarter of 0.55 microns divided by the refractive index of the oxide layer.

Figure 29 is a partial isometric cross-sectional diagram, of a portion A20 10 of a transflective display, according to an illustration embodiment of the invention.
Transflective display apparatus A2010 is similar to reflective display apparatus A10, but transfiective display apparatus forms images from a combination of reflected ambient light and transmitted light, emitted from an integral back light A105.
Transflective display apparatus A2010 can be used with a transflective light modulation array including an array of transflective shutter assemblies A2102 to modulate both light (e.g., typical backlight beam A801) emitted by backlight and from ambient light (e.g., typical ambient light beam A802) originating from ambient light source A107 towards a viewer through filter array layer Al 11 and cover sheet A 109 to form an image (note that portions of layer A 111 and sheet A 109, including lens A157 are not shown in Figure 29 for the sake of simplicity of the drawing).

Transflective shutter assembly A2102 can take substantially the same form as shutter assembly A102 of Figures 22-25. However, layer A2118 of assembly A2102 includes a reflective surface A2015 and one or more transmissive apertures A2018 etched through reflective surface A2015 beneath the position of closed shutter A2112 to collectively form exposable surface A2114. At least one portion of reflective surface A2015, having dimensions of from about 2 to about 20 microns, remains beneath the position of closed shutter A2112. The front-most layer of transflective shutter assembly A2102 facing the viewer, including at least the front surface of shutters A2112a and A2112b, is coated in a light absorbing film A2152.
Thus, when shutter A2112 is closed, ambient light A802 concentrated by funnel A 152 onto transflective shutter assembly A2102 is absorbed by film A2152.
Likewise, when shutter assembly A2112 is closed the trasnmissino of light through the trasnmissive aperture A2018 in exposable surface A2114 is blocked. When shutter A2112 is at least partially open (as depicted in Figure 29), transflective shutter assembly A2102 contributes to the formation of an image both by allowing at least a fraction of backlight-emitted-light A801 to transmit through transmissive apertures A2018 in exposable surface A2114 towards the viewer through funnel A152 and by allowing at least a fraction of the ambient light A802 concentrated onto transflective shutter assembly A2102 to reflect off of the exposed reflective surface or surfaces A2015 of exposable surface A2114 back towards the viewer through funnel A152. The larger the dimensions of the exposed reflective surface or surfaces A2015 of exposable surface A2114 in comparison to the transmissive apertures A2018 become, a more specular mode of reflection is yielded, such that ambient light originating from ambient light source A107 is substantially reflected directly back to the viewer. However, as described above with respect to surface A1015, reflective surface or surfaces A2015 may be roughened in order to provide diffusiveness thereon for combating glare and widening viewing angles of the display A2010.

Even with funnels A152 designed to concentrate ambient light A802 onto one or more of exposed reflective surfaces A2015 that are positioned among transmissive apertures A2018 on exposable surface A2114, some portion of ambient light A802 may pass through apertures A2018 of transflective shutter assembly A2102. When transflective shutter assembly A2102 is incorporated into spatial light modulators having optical cavities and light sources, the ambient light A802 passing through apertures A2018 enters an optical cavity and is recycled along with the light A801 introduced by backlight A105. In alternative transflective shutter assemblies, the transmissive apertures in the exposable surface are at least partially filled with a semi-reflective-semitransmissive material or alternately the entire exposable area A2114 con be formed of a semitransmissive semi-reflective material to achieve the same net effect as if portions of the areas are defined as reflective and transmissive.

Figure 30 is a partial isometric cross-sectional diagram of a portion of transmissive display apparatus A3010, according to an illustrative embodiment of the invention. As with display apparatus AlO and A2010, transmissive display apparatus A3010 includes an array of shutter assemblies A3102, and an array of light concentrators. In contrast to the previously described display apparatus AIO
and A2010, in display apparatus A3010, the array of light modulators is positioned between the array of light concentrators and a viewer. Transmissive shutter assemblies A3102 modulate light (e.g., typical backlight beam A901) emitted by a backlight A105 towards a viewer. Note that color filter layer AI I I and cover sheet A109 are not shown in Figure 30 for the sake of simplicity of the drawing. The filters A 111 can be located within display apparatus A3010 anywhere between the backlight and the front of the display apparatus A3010.

Transmissive shutter assembly A3102 can take substantially the same form as shutter assembly A102 of Figures 22-25. However, layer A3118 of assembly A3102 includes a transmissive surface A3018 beneath the position of closed shutter A3112 to form exposable surface A3114. The front-most layer of transmissive shutter assembly A3102 facing the viewer, including at least the front surface of shutters A3112a and A3112b, is coated in a light absorbing film A3152. Thus, when shutter A3112 is closed, ambient light A902 is absorbed by film A3152 and is not reflected back towards the viewer. When shutter A3112 is at least partially open (as depicted in Figure 30), transmissive shutter assembly A3102 contributes to the formation of an image by allowing at least a fraction of backlight beams A901 to transmit through transmissive surface A3018 (i.e., exposable surface A3114) towards the viewer. An additional light blocking area can be applied around of the transmissive aperture A3114 so that stray light from the backlight cannot get through the light modulation layer un-modulated.

As shown, funnel A152 of light concentration array A150 is provided between shutter assembly A3 102 and backlight A 105 to concentrate backlight beams A901 entering first optical opening A156 and through second optical opening A154 onto the transmissive region (i.e., transmissive surface A3018 of exposable surface A3114) of transmissive shutter assembly A3102. Thus, use of arrays of transmissive shutter assembly A3 102 in display apparatus A3 010 with such a configuration of funnels A152 increases the fraction of image forming light (i.e., backlight beams A901) from backlight A105 that gets concentrated onto the modulating surface (i.e., exposable surface A3114) of the display apparatus.
The array of light funnels A152 may also serve as a front reflective layer for the backlight to provide for light recycling in the backlight, obviating the need for a separate reflective layer. The light entering the funnels at angles not conducive to making it to the surface A3114 will be reflected back out of the light funnels into the backlight for recycling until such time as it reaches an angle conducive to exit.

It should be noted that, although apparatus and methods for displays utilizing light concentration arrays of the invention have been described as utilizing an array of reflective light funnels (e.g., funnels A152), the invention also relates to apparatus and methods for displays that utilize light concentration arrays of other types of optical elements (i.e., not funnels) for concentrating available image forming light onto an array of light modulators to maximize the contrast ratio of the display. This may be accomplished, for example, with the previously described display apparatus embodiments by replacing each reflective light funnel A152 with a high numerical f-number aperture lens. For example, a high aperture lens, similar to lens A 157 shown in Figure 23, could be utilized without cones A152 in an array A150, according to an alternative embodiment of the invention. Also, while many implementations described herein disclose the utilization of both lens A157 and light funnels A152, the lens are optional in many implementations.

Those skilled in the art will know or be able to ascertain using no more than routine experimentation, many equivalents to the embodiments and practices described herein. Accordingly, it will be understood that the invention is not to be limited to the embodiments disclosed herein, but is to be understood from the following claims, which are to be interpreted as broadly as allowed under the law.

The invention may be embodied in other specific forms without departing from the essential characteristics thereof. The forgoing embodiments are therefore to be considered in all respects illustrative, rather than limiting of the invention.

Claims (30)

1. A method of forming an image, comprising:
introducing light into a reflective optical cavity including a plurality of light-transmissive regions through which light can escape the reflective optical cavity;
allowing the introduced light to escape the reflective optical cavity through at least one of the light-transmissive regions;
providing a plurality of light modulators, each having at least first and second states, wherein, in the first state, a light modulator obstructs a corresponding light-transmissive region thereby preventing light introduced into the reflective optical cavity from illuminating an image pixel that corresponds to the light-transmissive region, and in the second state, the light modulator allows light escaping the reflective optical cavity through the corresponding light-transmissive region to illuminate the image pixel corresponding to the light-transmissive region; and forming an image by selectively controlling the states of the plurality of light modulators.
2. The method of claim 1, comprising distributing the introduced light substantially evenly throughout the reflective cavity.
3. The method of claim 1, wherein introducing the light comprises alternately illuminating a plurality of different colored light sources.
4. The method of claim 1, wherein the selectively controlling the state of a light modulator comprises altering a voltage applied to a light modulator.
5. The method of claim 4, wherein the light modulator comprises a MEMS-based shutter assembly.
6. The method of claim 4, wherein the light modulator comprises a liquid crystal component.
7. The method of claim 1, comprising selectively reflecting ambient light impinging on the corresponding ones of the light-transmissive regions through which the introduced light is allowed to escape.
8. The method of claim 1, wherein at least one light-transmissive region comprises an aperture.
9. The method of claim 8, wherein the reflective optical cavity comprises a first reflective surface and a second reflective surface at least partially facing the first reflective surface, and wherein the aperture is formed into the surface of the first reflective surface.
10. The method of claim 1, wherein at least one light-transmissive region comprises a filter.
11. The method of claim 1, wherein at least one light-transmissive region comprises a liquid crystal component.
12. The method of claim 1, wherein the reflective optical cavity comprises a first reflective surface including the plurality of light-transmissive regions and a second reflective surface at least partially facing the first reflective surface.
13. The method of claim 1, comprising introducing the introduced light into a light guide substantially contained within the reflective cavity.
14. The method of claim 1, wherein the light modulator comprises a MEMS-based light modulator.
15. The method of claim 1, wherein in the first state, the light modulator obstructs the corresponding light transmissive region by at least partially filtering light escaping the reflective optical cavity through the corresponding light-transmissive region.
16. The method of claim 1, wherein in the first state, the light modulator obstructs the corresponding light transmissive region by at least partially blocking light escaping the reflective optical cavity through the corresponding light-transmissive region.
17. The method of claim 1, wherein in the first state, the light modulator obstructs the corresponding light transmissive region by at least partially deflecting light escaping the reflective optical cavity through the corresponding light-transmissive region.
18. A method of forming an image, comprising:
introducing light into a reflective optical cavity including a first reflective surface in which a plurality of apertures corresponding to respective display pixels in multiple rows and columns of the image are formed and a second reflective surface at least partially facing the first reflective surface; and forming an image by allowing the introduced light to escape the reflective optical cavity through at least one of the apertures to illuminate respective corresponding display pixels.
19. The method of claim 18, wherein the first reflective surfaces comprises a mirror.
20. The method of claim 18, wherein the first reflective surfaces comprises a metallic layer.
21. The method of claim 18, wherein the first reflective surfaces comprises a dielectric layer.
22. The method of claim 18, comprising providing a plurality of light modulators corresponding to respective display pixels.
23. The method of claim 22, wherein forming an image comprises selectively controlling states of the plurality of light modulators.
24. The method of claim 22, wherein the light modulators have at least a first and second state, wherein, in the first state, a light modulator obstructs a corresponding aperture thereby preventing light introduced into the reflective optical cavity from illuminating an image pixel that corresponds to the aperture, and in the second state, the light modulator allows light escaping the reflective optical cavity through the corresponding aperture to illuminate the image pixel corresponding to the aperture.
25. The method of claim 22, wherein the light modulators comprise MEMS-based light modulators.
26. The method of claim 22, wherein the light modulators comprise a liquid crystal component.
27. The method of claim 22, wherein the light modulators are separated from the first reflective surface by a gap, which is less than or equal to about 100 µm wide.
28. The method of claim 18, wherein light escaping the reflective optical cavity passes through a filter.
29. The method of claim 18, comprising introducing the introduced light into a light guide substantially contained within the reflective cavity.
30. The method of claim 18, wherein introducing the light comprises alternately illuminating a plurality of different colored light sources.
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Families Citing this family (167)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7417782B2 (en) * 2005-02-23 2008-08-26 Pixtronix, Incorporated Methods and apparatus for spatial light modulation
US7826126B2 (en) * 2003-11-01 2010-11-02 Silicon Quest Kabushiki-Kaisha Gamma correction for adjustable light source
US7882701B2 (en) 2005-01-18 2011-02-08 Massachusetts Institute Of Technology Microfabricated mechanical frequency multiplier
US8223178B2 (en) * 2005-02-04 2012-07-17 Konica Minolta Holdings, Inc. Method for driving light-emitting panel
US9229222B2 (en) 2005-02-23 2016-01-05 Pixtronix, Inc. Alignment methods in fluid-filled MEMS displays
US8310442B2 (en) 2005-02-23 2012-11-13 Pixtronix, Inc. Circuits for controlling display apparatus
US20080158635A1 (en) * 2005-02-23 2008-07-03 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US7742016B2 (en) 2005-02-23 2010-06-22 Pixtronix, Incorporated Display methods and apparatus
US8519945B2 (en) 2006-01-06 2013-08-27 Pixtronix, Inc. Circuits for controlling display apparatus
US8159428B2 (en) 2005-02-23 2012-04-17 Pixtronix, Inc. Display methods and apparatus
US7746529B2 (en) 2005-02-23 2010-06-29 Pixtronix, Inc. MEMS display apparatus
US20060209012A1 (en) * 2005-02-23 2006-09-21 Pixtronix, Incorporated Devices having MEMS displays
US7304786B2 (en) * 2005-02-23 2007-12-04 Pixtronix, Inc. Methods and apparatus for bi-stable actuation of displays
US20070205969A1 (en) 2005-02-23 2007-09-06 Pixtronix, Incorporated Direct-view MEMS display devices and methods for generating images thereon
US7755582B2 (en) 2005-02-23 2010-07-13 Pixtronix, Incorporated Display methods and apparatus
US7999994B2 (en) * 2005-02-23 2011-08-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US9158106B2 (en) 2005-02-23 2015-10-13 Pixtronix, Inc. Display methods and apparatus
US9082353B2 (en) 2010-01-05 2015-07-14 Pixtronix, Inc. Circuits for controlling display apparatus
US8482496B2 (en) 2006-01-06 2013-07-09 Pixtronix, Inc. Circuits for controlling MEMS display apparatus on a transparent substrate
US9261694B2 (en) 2005-02-23 2016-02-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
WO2007016511A2 (en) * 2005-08-02 2007-02-08 Uni-Pixel Displays, Inc. Mechanism to mitigate color breakup artifacts in field sequential color display systems
EP2402934A3 (en) 2005-12-19 2012-10-17 Pixtronix Inc. A direct-view display
CA2634091A1 (en) 2005-12-19 2007-07-05 Pixtronix, Inc. Direct-view mems display devices and methods for generating images thereon
US8526096B2 (en) 2006-02-23 2013-09-03 Pixtronix, Inc. Mechanical light modulators with stressed beams
US7876489B2 (en) 2006-06-05 2011-01-25 Pixtronix, Inc. Display apparatus with optical cavities
US7576815B2 (en) * 2006-07-10 2009-08-18 Intel Corporation Method and apparatus of liquid-crystal-on-silicon assembly
EP2080045A1 (en) 2006-10-20 2009-07-22 Pixtronix Inc. Light guides and backlight systems incorporating light redirectors at varying densities
JP2013061658A (en) * 2007-01-19 2013-04-04 Pixtronix Inc Mems display apparatus
US9176318B2 (en) 2007-05-18 2015-11-03 Pixtronix, Inc. Methods for manufacturing fluid-filled MEMS displays
US7852546B2 (en) 2007-10-19 2010-12-14 Pixtronix, Inc. Spacers for maintaining display apparatus alignment
EP2074464A2 (en) * 2007-01-19 2009-07-01 Pixtronix Inc. Mems display apparatus
JP4743132B2 (en) * 2007-02-15 2011-08-10 ティアック株式会社 Electronic device having a plurality of function keys
US7876340B2 (en) * 2007-04-03 2011-01-25 Texas Instruments Incorporated Pulse width modulation algorithm
US7928999B2 (en) * 2007-04-03 2011-04-19 Texas Instruments Incorporated Pulse width modulation algorithm
US7956878B2 (en) * 2007-04-03 2011-06-07 Texas Instruments Incorporated Pulse width modulation algorithm
WO2009032342A1 (en) * 2007-09-06 2009-03-12 Olympus Corporation Gamma correction for adjustable light source
US8941631B2 (en) 2007-11-16 2015-01-27 Qualcomm Mems Technologies, Inc. Simultaneous light collection and illumination on an active display
WO2009065069A1 (en) * 2007-11-16 2009-05-22 Qualcomm Mems Technologies, Inc. Thin film planar sonar concentrator/ collector and diffusor used with an active display
US8177406B2 (en) * 2007-12-19 2012-05-15 Edward Pakhchyan Display including waveguide, micro-prisms and micro-mirrors
US8248560B2 (en) 2008-04-18 2012-08-21 Pixtronix, Inc. Light guides and backlight systems incorporating prismatic structures and light redirectors
GB2459888B (en) * 2008-05-09 2011-06-08 Design Led Products Ltd Capacitive sensing apparatus
US7920317B2 (en) 2008-08-04 2011-04-05 Pixtronix, Inc. Display with controlled formation of bubbles
US8169679B2 (en) * 2008-10-27 2012-05-01 Pixtronix, Inc. MEMS anchors
US9970632B2 (en) * 2008-10-28 2018-05-15 Raymond A. Noeth Energy efficient illumination apparatus and method for illuminating surfaces
WO2010054244A2 (en) * 2008-11-07 2010-05-14 Cavendish Kinetics, Inc. Method of using a plurality of smaller mems devices to replace a larger mems device
KR101573508B1 (en) 2008-11-10 2015-12-01 삼성전자 주식회사 Micro shutter device and method of manufacturing the same
CN102472860B (en) * 2009-07-09 2016-02-03 皇家飞利浦电子股份有限公司 Free form lighting module
EP2284594B1 (en) * 2009-08-13 2013-11-27 Edward Pakhchyan Display including waveguide, micro-prisms and micro-mechanical light modulators
US8313226B2 (en) 2010-05-28 2012-11-20 Edward Pakhchyan Display including waveguide, micro-prisms and micro-shutters
US7995261B2 (en) * 2009-09-03 2011-08-09 Edward Pakhchyan Electromechanical display and backlight
KR20110032467A (en) * 2009-09-23 2011-03-30 삼성전자주식회사 Display device
GB2474298A (en) * 2009-10-12 2011-04-13 Iti Scotland Ltd Light Guide Device
JP2013519121A (en) 2010-02-02 2013-05-23 ピクストロニックス・インコーポレーテッド Method for manufacturing a cold sealed fluid filled display device
BR112012019383A2 (en) 2010-02-02 2017-09-12 Pixtronix Inc CIRCUITS TO CONTROL DISPLAY APPARATUS
US20110205756A1 (en) * 2010-02-19 2011-08-25 Pixtronix, Inc. Light guides and backlight systems incorporating prismatic structures and light redirectors
EP2545544A1 (en) * 2010-03-11 2013-01-16 Pixtronix, Inc. Reflective and transflective operation modes for a display device
GB2478987A (en) 2010-03-26 2011-09-28 Iti Scotland Ltd Encapsulation of an LED array forming a light concentrator for use with edge-lit light-guided back lights
KR101682931B1 (en) * 2010-03-26 2016-12-07 삼성디스플레이 주식회사 Mems shutter and display apparatus having the same
MX2012012034A (en) 2010-04-16 2013-05-30 Flex Lighting Ii Llc Front illumination device comprising a film-based lightguide.
WO2011130715A2 (en) 2010-04-16 2011-10-20 Flex Lighting Ii, Llc Illumination device comprising a film-based lightguide
WO2011142455A1 (en) * 2010-05-14 2011-11-17 日本電気株式会社 Display element, display, and projecting display device
WO2011142456A1 (en) * 2010-05-14 2011-11-17 日本電気株式会社 Display element, display, and projection display device
EP2581641B1 (en) * 2010-06-08 2017-08-23 Opto Design, Inc. Planar light source device and illumination apparatus
US8545305B2 (en) * 2010-06-28 2013-10-01 Wms Gaming Inc. Devices, systems, and methods for dynamically simulating a component of a wagering game
US8654435B2 (en) * 2010-10-06 2014-02-18 Fusao Ishii Microwindow device
US8582209B1 (en) * 2010-11-03 2013-11-12 Google Inc. Curved near-to-eye display
KR20170077261A (en) * 2010-12-20 2017-07-05 스냅트랙, 인코포레이티드 Systems and methods for mems light modulator arrays with reduced acoustic emission
US8953120B2 (en) * 2011-01-07 2015-02-10 Semiconductor Energy Laboratory Co., Ltd. Display device
KR20120102387A (en) * 2011-03-08 2012-09-18 삼성전자주식회사 Display apparatus and fabrication method of the same
KR20120106263A (en) * 2011-03-18 2012-09-26 삼성디스플레이 주식회사 Display substrate, display apparatus having the same and method of manufacturing the same
CN102236165B (en) * 2011-04-18 2013-07-31 上海丽恒光微电子科技有限公司 Display device with micro-electro mechanical system (MEMS) light valve and forming method thereof
JP2012237882A (en) * 2011-05-12 2012-12-06 Japan Display East Co Ltd Display device
JP5883575B2 (en) 2011-05-16 2016-03-15 ピクストロニクス,インコーポレイテッド Display device and control method thereof
JP2012242453A (en) 2011-05-16 2012-12-10 Japan Display East Co Ltd Display device
KR20120129256A (en) 2011-05-19 2012-11-28 삼성디스플레이 주식회사 Display substrate, method of manufacturing the same and display panel having the display substrate
JP5856758B2 (en) 2011-05-23 2016-02-10 ピクストロニクス,インコーポレイテッド Display device and manufacturing method thereof
KR101832957B1 (en) * 2011-05-31 2018-02-28 엘지전자 주식회사 Micro shutter display device
JP5731284B2 (en) 2011-06-02 2015-06-10 ピクストロニクス,インコーポレイテッド Display device and manufacturing method thereof
JP5727303B2 (en) 2011-06-03 2015-06-03 ピクストロニクス,インコーポレイテッド Display device
JP5762842B2 (en) * 2011-06-21 2015-08-12 ピクストロニクス,インコーポレイテッド Display device and manufacturing method of display device
US9140900B2 (en) 2011-07-20 2015-09-22 Pixtronix, Inc. Displays having self-aligned apertures and methods of making the same
US9134529B2 (en) 2011-07-21 2015-09-15 Pixronix, Inc. Display device with tapered light reflecting layer and manufacturing method for same
JP5786518B2 (en) 2011-07-26 2015-09-30 セイコーエプソン株式会社 Wavelength variable interference filter, optical filter module, and optical analyzer
JP5752519B2 (en) * 2011-08-11 2015-07-22 ピクストロニクス,インコーポレイテッド Display device
WO2013027400A1 (en) 2011-08-25 2013-02-28 株式会社ニコン Method for manufacturing spatial light modulation element, spatial light modulation element, spatial light modulator and exposure apparatus
KR101941169B1 (en) * 2011-09-16 2019-01-23 삼성전자주식회사 Micro optical switch device, Image display apparatus comprising micro optical switch device and Methed of manufacturing micro optical switch device
KR20130033800A (en) 2011-09-27 2013-04-04 삼성디스플레이 주식회사 Display apparatus
KR20130072847A (en) 2011-12-22 2013-07-02 삼성디스플레이 주식회사 Display apparatus and fabrication method of the same
US9128289B2 (en) 2012-12-28 2015-09-08 Pixtronix, Inc. Display apparatus incorporating high-aspect ratio electrical interconnects
US9354748B2 (en) 2012-02-13 2016-05-31 Microsoft Technology Licensing, Llc Optical stylus interaction
US9870066B2 (en) 2012-03-02 2018-01-16 Microsoft Technology Licensing, Llc Method of manufacturing an input device
US9158383B2 (en) 2012-03-02 2015-10-13 Microsoft Technology Licensing, Llc Force concentrator
US9298236B2 (en) 2012-03-02 2016-03-29 Microsoft Technology Licensing, Llc Multi-stage power adapter configured to provide a first power level upon initial connection of the power adapter to the host device and a second power level thereafter upon notification from the host device to the power adapter
US8873227B2 (en) 2012-03-02 2014-10-28 Microsoft Corporation Flexible hinge support layer
US9075566B2 (en) 2012-03-02 2015-07-07 Microsoft Technoogy Licensing, LLC Flexible hinge spine
KR20130105770A (en) 2012-03-15 2013-09-26 삼성디스플레이 주식회사 Display apparatus including the same, and method of driving the display apparatus
US20130300590A1 (en) 2012-05-14 2013-11-14 Paul Henry Dietz Audio Feedback
US9063333B2 (en) * 2012-06-01 2015-06-23 Pixtronix, Inc. Microelectromechanical device and method of manufacturing
KR101941165B1 (en) 2012-06-07 2019-04-12 삼성전자주식회사 Micro optical switch device, Image display apparatus comprising micro optical switch device and Methed of manufacturing micro optical switch device
US8922533B2 (en) * 2012-06-28 2014-12-30 Htc Corporation Micro-electro-mechanical display module and display method
FR2993087B1 (en) * 2012-07-06 2014-06-27 Wysips DEVICE FOR ENHANCING THE QUALITY OF AN IMAGE COVERED WITH A SEMI-TRANSPARENT PHOTOVOLTAIC FILM
ITTO20120691A1 (en) * 2012-08-01 2014-02-02 Milano Politecnico IMPACT SENSOR WITH BISTABLE MECHANISM AND METHOD FOR DETECTING IMPACTS
US9047830B2 (en) * 2012-08-09 2015-06-02 Pixtronix, Inc. Circuits for controlling display apparatus
KR20160028526A (en) 2012-08-10 2016-03-11 돌비 레버러토리즈 라이쎈싱 코오포레이션 A light source, a method for illuminating a diaplay panel in a display system, an apparatus and a computer-readable storage medium thereof
US8964379B2 (en) 2012-08-20 2015-02-24 Microsoft Corporation Switchable magnetic lock
CA2872816C (en) 2012-09-26 2015-08-04 Ledtech International Inc. Multilayer optical interference filter
US8786767B2 (en) 2012-11-02 2014-07-22 Microsoft Corporation Rapid synchronized lighting and shuttering
KR101941167B1 (en) * 2012-11-13 2019-01-22 삼성전자주식회사 Micro optical switch device, Image display apparatus comprising micro optical switch device and Method of manufacturing micro optical switch device
CN103852885B (en) * 2012-12-06 2016-12-28 联想(北京)有限公司 A kind of display device and electronic equipment
US9223128B2 (en) * 2012-12-18 2015-12-29 Pixtronix, Inc. Display apparatus with densely packed electromechanical systems display elements
US9122047B2 (en) 2012-12-31 2015-09-01 Pixtronix, Inc. Preventing glass particle injection during the oil fill process
US9170421B2 (en) 2013-02-05 2015-10-27 Pixtronix, Inc. Display apparatus incorporating multi-level shutters
US9129561B2 (en) * 2013-03-07 2015-09-08 International Business Machines Corporation Systems and methods for displaying images
US9176317B2 (en) 2013-03-13 2015-11-03 Pixtronix, Inc. Display apparatus incorporating dual-level shutters
US9134530B2 (en) 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus incorporating dual-level shutters
US9134552B2 (en) 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus with narrow gap electrostatic actuators
US9195051B2 (en) 2013-03-15 2015-11-24 Pixtronix, Inc. Multi-state shutter assembly for use in an electronic display
CN104058363B (en) * 2013-03-22 2016-01-20 上海丽恒光微电子科技有限公司 Based on the display unit and forming method thereof of MEMS transmissive light valve
WO2015002016A1 (en) 2013-07-01 2015-01-08 シャープ株式会社 Display device
JP2015025968A (en) * 2013-07-26 2015-02-05 ソニー株式会社 Presentation medium and display device
US9454265B2 (en) * 2013-09-23 2016-09-27 Qualcomm Incorporated Integration of a light collection light-guide with a field sequential color display
US9967546B2 (en) 2013-10-29 2018-05-08 Vefxi Corporation Method and apparatus for converting 2D-images and videos to 3D for consumer, commercial and professional applications
US20150116458A1 (en) 2013-10-30 2015-04-30 Barkatech Consulting, LLC Method and apparatus for generating enhanced 3d-effects for real-time and offline appplications
JP6353249B2 (en) * 2014-03-20 2018-07-04 北陸電気工業株式会社 Display element and display device
US10120420B2 (en) 2014-03-21 2018-11-06 Microsoft Technology Licensing, Llc Lockable display and techniques enabling use of lockable displays
US9897796B2 (en) 2014-04-18 2018-02-20 Snaptrack, Inc. Encapsulated spacers for electromechanical systems display apparatus
JP2015230989A (en) * 2014-06-05 2015-12-21 株式会社リコー Imaging module and imaging device
WO2015191418A1 (en) * 2014-06-10 2015-12-17 Corning Incorporated Patterned glass light guide and display device comprising the same
US10158847B2 (en) 2014-06-19 2018-12-18 Vefxi Corporation Real—time stereo 3D and autostereoscopic 3D video and image editing
US10324733B2 (en) 2014-07-30 2019-06-18 Microsoft Technology Licensing, Llc Shutdown notifications
US20160048015A1 (en) * 2014-08-13 2016-02-18 Pixtronix, Inc. Displays having reduced optical sensitivity to aperture alignment at stepper field boundary
US9576398B1 (en) * 2014-08-14 2017-02-21 Amazon Technologies, Inc. Pixelated light shutter mechanisms for improving contrast between computer-generated images and an ambient visible environment
US10754146B2 (en) * 2014-09-11 2020-08-25 Sharp Kabushiki Kaisha Display device and manufacturing method therefor
GB2531552B (en) * 2014-10-21 2017-12-27 Polatis Ltd Crosstalk reduction technique for multi-channel driver circuits
US9606349B2 (en) * 2015-01-05 2017-03-28 Edward Pakhchyan MEMS display
CN104678552B (en) * 2015-03-17 2017-08-11 京东方科技集团股份有限公司 A kind of display base plate, display device and display methods
CN104914624A (en) * 2015-06-19 2015-09-16 京东方科技集团股份有限公司 Light guide structure, backlight module and display device
JP2017015766A (en) * 2015-06-26 2017-01-19 富士フイルム株式会社 Image display device
EP3317712B1 (en) 2015-07-03 2020-04-29 Essilor International Methods and systems for augmented reality
US10070118B2 (en) 2015-09-17 2018-09-04 Lumii, Inc. Multi-view displays and associated systems and methods
US10043456B1 (en) * 2015-12-29 2018-08-07 Amazon Technologies, Inc. Controller and methods for adjusting performance properties of an electrowetting display device
FR3046850B1 (en) * 2016-01-15 2018-01-26 Universite De Strasbourg IMPROVED OPTICAL GUIDE AND OPTICAL SYSTEM COMPRISING SUCH AN OPTICAL GUIDE
EP3193195B1 (en) * 2016-01-18 2018-07-25 SICK Engineering GmbH Optical sensor
WO2017164419A1 (en) 2016-03-25 2017-09-28 シャープ株式会社 Display panel, display apparatus, and method for manufacturing display panel
KR101702107B1 (en) * 2016-04-15 2017-02-03 삼성디스플레이 주식회사 Display device using mems element and manufacturing method thereof
JP2018028656A (en) 2016-06-27 2018-02-22 ヴァイアヴィ・ソリューションズ・インコーポレイテッドViavi Solutions Inc. Magnetic article
JP6837930B2 (en) 2016-06-27 2021-03-03 ヴァイアヴィ・ソリューションズ・インコーポレイテッドViavi Solutions Inc. High chromaticity flakes
US10928579B2 (en) 2016-06-27 2021-02-23 Viavi Solutions Inc. Optical devices
WO2018003633A1 (en) 2016-06-28 2018-01-04 シャープ株式会社 Active matrix substrate, optical shutter substrate, display device, and method for manufacturing active matrix substrate
JP6953116B2 (en) * 2016-07-04 2021-10-27 エドワード・パクチャン MEMS display
WO2018020331A1 (en) * 2016-07-29 2018-02-01 Semiconductor Energy Laboratory Co., Ltd. Display device, input/output device, and semiconductor device
TW201837559A (en) * 2017-02-21 2018-10-16 美商康寧公司 Devices comprising integrated backlight unit and display panel
US11007772B2 (en) 2017-08-09 2021-05-18 Fathom Optics Inc. Manufacturing light field prints
CN108196362B (en) * 2018-01-03 2020-06-12 京东方科技集团股份有限公司 Pixel structure, pixel driving method, array substrate and display device
JP2019200328A (en) * 2018-05-17 2019-11-21 セイコーエプソン株式会社 projector
US10927592B2 (en) 2018-07-06 2021-02-23 Guardian Glass, LLC Electric potentially-driven shade with surface-modified polymer, and/or method of making the same
EP3591461B1 (en) 2018-07-06 2022-01-26 Samsung Electronics Co., Ltd. Display apparatus
US10914114B2 (en) * 2018-07-06 2021-02-09 Guardian Glass, LLC Electric potentially-driven shade including shutter supporting surface-modified conductive coating, and/or method of making the same
US10871027B2 (en) 2018-07-06 2020-12-22 Guardian Glass, LLC Electric potentially-driven shade with CIGS solar cell, and/or method of making the same
US10858884B2 (en) 2018-07-06 2020-12-08 Guardian Glass, LLC Electric potentially-driven shade with improved coil strength, and/or method of making the same
CN109031839B (en) * 2018-09-04 2021-03-09 京东方科技集团股份有限公司 Panel, driving method, manufacturing method, regulating device and regulating system
US10935717B2 (en) * 2018-11-05 2021-03-02 Sharp Kabushiki Kaisha Lighting device and liquid crystal display device
US10867538B1 (en) * 2019-03-05 2020-12-15 Facebook Technologies, Llc Systems and methods for transferring an image to an array of emissive sub pixels
CN109882798B (en) * 2019-04-02 2024-03-12 华域视觉科技(上海)有限公司 Transmission type MEMS chip, split transmission type chip, lighting system and automobile
KR102285312B1 (en) * 2019-08-29 2021-08-03 이화여자대학교 산학협력단 Reflective color pixels based on lossy metal
GB2597923A (en) * 2020-07-31 2022-02-16 Continental Automotive Gmbh A backlight unit for a vehicle component
TWI825915B (en) * 2022-08-11 2023-12-11 達運精密工業股份有限公司 Front light module and multi-layer structure applied to full lamination

Family Cites Families (455)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4074253A (en) * 1975-11-19 1978-02-14 Kenneth E. Macklin Novel bistable light modulators and display element and arrays therefrom
US4067043A (en) * 1976-01-21 1978-01-03 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Optical conversion method
CH633902A5 (en) * 1980-03-11 1982-12-31 Centre Electron Horloger LIGHT MODULATION DEVICE.
CH641315B (en) * 1981-07-02 Centre Electron Horloger MINIATURE SHUTTER DISPLAY DEVICE.
US4559535A (en) 1982-07-12 1985-12-17 Sigmatron Nova, Inc. System for displaying information with multiple shades of a color on a thin-film EL matrix display panel
US4582396A (en) * 1983-05-09 1986-04-15 Tektronix, Inc. Field sequential color display system using optical retardation
JPS6079331A (en) 1983-10-07 1985-05-07 Citizen Watch Co Ltd Manufacture of color liquid crystal display device
US5096279A (en) * 1984-08-31 1992-03-17 Texas Instruments Incorporated Spatial light modulator and method
US5061049A (en) 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method
US4744640A (en) 1985-08-29 1988-05-17 Motorola Inc. PLZT multi-shutter color electrode pattern
US4728936A (en) 1986-04-11 1988-03-01 Adt, Inc. Control and display system
US5835255A (en) 1986-04-23 1998-11-10 Etalon, Inc. Visible spectrum modulator arrays
GB8610129D0 (en) * 1986-04-25 1986-05-29 Secr Defence Electro-optical device
GB8728433D0 (en) * 1987-12-04 1988-01-13 Emi Plc Thorn Display device
US4991941A (en) * 1988-06-13 1991-02-12 Kaiser Aerospace & Electronics Corporation Method and apparatus for multi-color display
US5042900A (en) 1988-09-12 1991-08-27 Lumitex, Inc. Connector assemblies for optical fiber light cables
US4958911A (en) 1988-10-19 1990-09-25 Jonand, Inc. Liquid crystal display module having housing of C-shaped cross section
EP0366847A3 (en) 1988-11-02 1991-01-09 Sportsoft Systems, Inc. Graphics display using biomorphs
DE3842900C1 (en) 1988-12-16 1990-05-10 Krone Ag, 1000 Berlin, De
US5005108A (en) 1989-02-10 1991-04-02 Lumitex, Inc. Thin panel illuminator
CH682523A5 (en) * 1990-04-20 1993-09-30 Suisse Electronique Microtech A modulation matrix addressed light.
DE69113150T2 (en) * 1990-06-29 1996-04-04 Texas Instruments Inc Deformable mirror device with updated grid.
US5142405A (en) 1990-06-29 1992-08-25 Texas Instruments Incorporated Bistable dmd addressing circuit and method
US5990990A (en) 1990-08-03 1999-11-23 Crabtree; Allen F. Three-dimensional display techniques, device, systems and method of presenting data in a volumetric format
US5319491A (en) 1990-08-10 1994-06-07 Continental Typographics, Inc. Optical display
US5062689A (en) 1990-08-21 1991-11-05 Koehler Dale R Electrostatically actuatable light modulating device
US5050946A (en) 1990-09-27 1991-09-24 Compaq Computer Corporation Faceted light pipe
US5202950A (en) * 1990-09-27 1993-04-13 Compaq Computer Corporation Backlighting system with faceted light pipes
US5128787A (en) 1990-12-07 1992-07-07 At&T Bell Laboratories Lcd display with multifaceted back reflector
EP0495273B1 (en) 1991-01-16 1996-09-11 Lumitex Inc. Thin panel illuminator
US5233459A (en) 1991-03-06 1993-08-03 Massachusetts Institute Of Technology Electric display device
CA2063744C (en) 1991-04-01 2002-10-08 Paul M. Urbanus Digital micromirror device architecture and timing for use in a pulse-width modulated display system
US5136751A (en) 1991-04-30 1992-08-11 Master Manufacturing Co. Wheel assembly
US5579035A (en) 1991-07-05 1996-11-26 Technomarket, L.P. Liquid crystal display module
JP2762778B2 (en) * 1991-07-10 1998-06-04 日本電気株式会社 Liquid crystal display
US5233385A (en) 1991-12-18 1993-08-03 Texas Instruments Incorporated White light enhanced color field sequential projection
JPH05188337A (en) 1992-01-09 1993-07-30 Minolta Camera Co Ltd Optical shutter array
US5198730A (en) * 1992-01-29 1993-03-30 Vancil Bernard K Color display tube
JPH0579530U (en) 1992-03-24 1993-10-29 日本ビクター株式会社 Display system optics
US5655832A (en) 1992-04-16 1997-08-12 Tir Technologies, Inc. Multiple wavelength light processor
US5231559A (en) 1992-05-22 1993-07-27 Kalt Charles G Full color light modulating capacitor
DK69492D0 (en) 1992-05-26 1992-05-26 Purup Prepress As DEVICE FOR EXPOSURE OF A MEDIUM, DEVICE FOR POINT EXPOSURE OF A MEDIA, AND A DEVICE FOR HOLDING A MEDIA
US5568964A (en) 1992-07-10 1996-10-29 Lumitex, Inc. Fiber optic light emitting panel assemblies and methods of making such panel assemblies
US5359345A (en) 1992-08-05 1994-10-25 Cree Research, Inc. Shuttered and cycled light emitting diode display and method of producing the same
US5724062A (en) * 1992-08-05 1998-03-03 Cree Research, Inc. High resolution, high brightness light emitting diode display and method and producing the same
US5493439A (en) * 1992-09-29 1996-02-20 Engle; Craig D. Enhanced surface deformation light modulator
US5339179A (en) 1992-10-01 1994-08-16 International Business Machines Corp. Edge-lit transflective non-emissive display with angled interface means on both sides of light conducting panel
US6008781A (en) 1992-10-22 1999-12-28 Board Of Regents Of The University Of Washington Virtual retinal display
US5467104A (en) 1992-10-22 1995-11-14 Board Of Regents Of The University Of Washington Virtual retinal display
US5596339A (en) * 1992-10-22 1997-01-21 University Of Washington Virtual retinal display with fiber optic point source
GB2272555A (en) 1992-11-11 1994-05-18 Sharp Kk Stereoscopic display using a light modulator
JP3284217B2 (en) * 1992-12-25 2002-05-20 東ソー株式会社 Liquid crystal display
CA2113213C (en) 1993-01-11 2004-04-27 Kevin L. Kornher Pixel control circuitry for spatial light modulator
US5528262A (en) 1993-01-21 1996-06-18 Fakespace, Inc. Method for line field-sequential color video display
JP2555922B2 (en) * 1993-02-26 1996-11-20 日本電気株式会社 Electrostatically driven micro shutters and shutter arrays
US6674562B1 (en) * 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US5461411A (en) 1993-03-29 1995-10-24 Texas Instruments Incorporated Process and architecture for digital micromirror printer
US5477086A (en) 1993-04-30 1995-12-19 Lsi Logic Corporation Shaped, self-aligning micro-bump structures
GB2278480A (en) 1993-05-25 1994-11-30 Sharp Kk Optical apparatus
US5884872A (en) * 1993-05-26 1999-03-23 The United States Of America As Represented By The Secretary Of The Navy Oscillating flap lift enhancement device
JP3439766B2 (en) * 1993-07-02 2003-08-25 マサチューセッツ・インスティチュート・オブ・テクノロジー Spatial light modulator
US5510824A (en) 1993-07-26 1996-04-23 Texas Instruments, Inc. Spatial light modulator array
FR2709854B1 (en) 1993-09-07 1995-10-06 Sextant Avionique Visualization device with optimized colors.
US5564959A (en) 1993-09-08 1996-10-15 Silicon Video Corporation Use of charged-particle tracks in fabricating gated electron-emitting devices
US5559389A (en) 1993-09-08 1996-09-24 Silicon Video Corporation Electron-emitting devices having variously constituted electron-emissive elements, including cones or pedestals
US5440197A (en) 1993-10-05 1995-08-08 Tir Technologies, Inc. Backlighting apparatus for uniformly illuminating a display panel
US5526051A (en) 1993-10-27 1996-06-11 Texas Instruments Incorporated Digital television system
US5452024A (en) 1993-11-01 1995-09-19 Texas Instruments Incorporated DMD display system
US5894686A (en) * 1993-11-04 1999-04-20 Lumitex, Inc. Light distribution/information display systems
US5396350A (en) * 1993-11-05 1995-03-07 Alliedsignal Inc. Backlighting apparatus employing an array of microprisms
US5517347A (en) 1993-12-01 1996-05-14 Texas Instruments Incorporated Direct view deformable mirror device
JPH07212639A (en) * 1994-01-25 1995-08-11 Sony Corp Electronic shutter device for television cameras
US5504389A (en) 1994-03-08 1996-04-02 Planar Systems, Inc. Black electrode TFEL display
JP3102259B2 (en) * 1994-04-21 2000-10-23 株式会社村田製作所 High voltage connector
US20010003487A1 (en) * 1996-11-05 2001-06-14 Mark W. Miles Visible spectrum modulator arrays
US7460291B2 (en) 1994-05-05 2008-12-02 Idc, Llc Separable modulator
US7123216B1 (en) * 1994-05-05 2006-10-17 Idc, Llc Photonic MEMS and structures
US6040937A (en) * 1994-05-05 2000-03-21 Etalon, Inc. Interferometric modulation
US6710908B2 (en) * 1994-05-05 2004-03-23 Iridigm Display Corporation Controlling micro-electro-mechanical cavities
US6680792B2 (en) * 1994-05-05 2004-01-20 Iridigm Display Corporation Interferometric modulation of radiation
US7550794B2 (en) * 2002-09-20 2009-06-23 Idc, Llc Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
US5497172A (en) * 1994-06-13 1996-03-05 Texas Instruments Incorporated Pulse width modulation for spatial light modulator with split reset addressing
JP3184069B2 (en) 1994-09-02 2001-07-09 シャープ株式会社 Image display device
EP0952466A3 (en) * 1994-10-18 2000-05-03 Mitsubishi Rayon Co., Ltd. Lens sheet
FR2726135B1 (en) 1994-10-25 1997-01-17 Suisse Electronique Microtech SWITCHING DEVICE
US5543958A (en) * 1994-12-21 1996-08-06 Motorola Integrated electro-optic package for reflective spatial light modulators
US5808800A (en) * 1994-12-22 1998-09-15 Displaytech, Inc. Optics arrangements including light source arrangements for an active matrix liquid crystal image generator
JP3533759B2 (en) * 1995-06-08 2004-05-31 凸版印刷株式会社 Color liquid crystal display using hologram
US6046840A (en) * 1995-06-19 2000-04-04 Reflectivity, Inc. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US5835256A (en) 1995-06-19 1998-11-10 Reflectivity, Inc. Reflective spatial light modulator with encapsulated micro-mechanical elements
US6969635B2 (en) 2000-12-07 2005-11-29 Reflectivity, Inc. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
US7108414B2 (en) * 1995-06-27 2006-09-19 Solid State Opto Limited Light emitting panel assemblies
US6185356B1 (en) * 1995-06-27 2001-02-06 Lumitex, Inc. Protective cover for a lighting device
US5613751A (en) * 1995-06-27 1997-03-25 Lumitex, Inc. Light emitting panel assemblies
US5975711A (en) 1995-06-27 1999-11-02 Lumitex, Inc. Integrated display panel assemblies
US20040135273A1 (en) 1995-06-27 2004-07-15 Parker Jeffery R. Methods of making a pattern of optical element shapes on a roll for use in making optical elements on or in substrates
US6712481B2 (en) * 1995-06-27 2004-03-30 Solid State Opto Limited Light emitting panel assemblies
US5801792A (en) 1995-12-13 1998-09-01 Swz Engineering Ltd. High resolution, high intensity video projection cathode ray tube provided with a cooled reflective phosphor screen support
JP3799092B2 (en) * 1995-12-29 2006-07-19 アジレント・テクノロジーズ・インク Light modulation device and display device
US5771321A (en) 1996-01-04 1998-06-23 Massachusetts Institute Of Technology Micromechanical optical switch and flat panel display
US5895115A (en) * 1996-01-16 1999-04-20 Lumitex, Inc. Light emitting panel assemblies for use in automotive applications and the like
JPH09218360A (en) * 1996-02-08 1997-08-19 Ricoh Co Ltd Mechanical optical shutter
DE69733125T2 (en) * 1996-02-10 2006-03-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. BISTABLE MICRO DRIVE WITH COUPLED MEMBRANES
TW395121B (en) * 1996-02-26 2000-06-21 Seiko Epson Corp Personal wearing information display device and the display method using such device
US5745203A (en) 1996-03-28 1998-04-28 Motorola, Inc. Liquid crystal display device including multiple ambient light illumination modes with switchable holographic optical element
JP4433335B2 (en) 1996-04-17 2010-03-17 ディーコン アクティー ゼルスカブ Method and apparatus for controlling light
US5731802A (en) * 1996-04-22 1998-03-24 Silicon Light Machines Time-interleaved bit-plane, pulse-width-modulation digital display system
JPH09292576A (en) * 1996-04-25 1997-11-11 Casio Comput Co Ltd Optical control element and display device using the same
US5691695A (en) 1996-07-24 1997-11-25 United Technologies Automotive Systems, Inc. Vehicle information display on steering wheel surface
WO1998004950A1 (en) 1996-07-25 1998-02-05 Anvik Corporation Seamless, maskless lithography system using spatial light modulator
JP4050802B2 (en) 1996-08-02 2008-02-20 シチズン電子株式会社 Color display device
JP3442581B2 (en) 1996-08-06 2003-09-02 株式会社ヒューネット Driving method of nematic liquid crystal
US5884083A (en) * 1996-09-20 1999-03-16 Royce; Robert Computer system to compile non-incremental computer source code to execute within an incremental type computer system
US5854872A (en) 1996-10-08 1998-12-29 Clio Technologies, Inc. Divergent angle rotator system and method for collimating light beams
US6028656A (en) * 1996-10-09 2000-02-22 Cambridge Research & Instrumentation Inc. Optical polarization switch and method of using same
WO1998019201A1 (en) 1996-10-29 1998-05-07 Xeotron Corporation Optical device utilizing optical waveguides and mechanical light-switches
DE19730715C1 (en) 1996-11-12 1998-11-26 Fraunhofer Ges Forschung Method of manufacturing a micromechanical relay
US7471444B2 (en) 1996-12-19 2008-12-30 Idc, Llc Interferometric modulation of radiation
US5781331A (en) 1997-01-24 1998-07-14 Roxburgh Ltd. Optical microshutter array
JP3726441B2 (en) * 1997-03-18 2005-12-14 株式会社デンソー Radar equipment
JPH10282521A (en) * 1997-04-04 1998-10-23 Sony Corp Reflection type liquid crystal display device
JP2001521672A (en) * 1997-04-14 2001-11-06 ディーコン エー/エス Apparatus and method for illuminating a photosensitive medium
US5973727A (en) * 1997-05-13 1999-10-26 New Light Industries, Ltd. Video image viewing device and method
US5986628A (en) 1997-05-14 1999-11-16 Planar Systems, Inc. Field sequential color AMEL display
US5889625A (en) * 1997-05-21 1999-03-30 Raytheon Company Chromatic aberration correction for display systems
GB9713658D0 (en) 1997-06-28 1997-09-03 Travis Adrian R L View-sequential holographic display
US20050171408A1 (en) 1997-07-02 2005-08-04 Parker Jeffery R. Light delivery systems and applications thereof
JP3840746B2 (en) 1997-07-02 2006-11-01 ソニー株式会社 Image display device and image display method
US6591049B2 (en) * 1997-07-02 2003-07-08 Lumitex, Inc. Light delivery systems and applications thereof
US6852095B1 (en) * 1997-07-09 2005-02-08 Charles D. Ray Interbody device and method for treatment of osteoporotic vertebral collapse
JPH1132278A (en) * 1997-07-10 1999-02-02 Fuji Xerox Co Ltd Projecting device
US5867302A (en) * 1997-08-07 1999-02-02 Sandia Corporation Bistable microelectromechanical actuator
WO1999010775A1 (en) 1997-08-28 1999-03-04 Mems Optical Inc. System for controlling light including a micromachined foucault shutter array and a method of manufacturing the same
EP1027723B1 (en) * 1997-10-14 2009-06-17 Patterning Technologies Limited Method of forming an electric capacitor
JP3371200B2 (en) 1997-10-14 2003-01-27 富士通株式会社 Display control method of liquid crystal display device and liquid crystal display device
JP2001511265A (en) 1997-11-29 2001-08-07 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Display device with light guide
GB9727148D0 (en) 1997-12-22 1998-02-25 Fki Plc Improvemnts in and relating to electomagnetic actuators
JP4118389B2 (en) * 1997-12-29 2008-07-16 日本ライツ株式会社 Light guide plate and flat illumination device
JPH11202325A (en) * 1998-01-08 1999-07-30 Seiko Instruments Inc Reflection type liquid crystal display device and production therefor
US6473220B1 (en) 1998-01-22 2002-10-29 Trivium Technologies, Inc. Film having transmissive and reflective properties
CA2260679C (en) 1998-02-03 2009-04-21 Thomas H. Loga Fluid flow system, casing, and method
IL123579A0 (en) 1998-03-06 1998-10-30 Heines Amihai Apparatus for producing high contrast imagery
US6211521B1 (en) 1998-03-13 2001-04-03 Intel Corporation Infrared pixel sensor and infrared signal correction
US6195196B1 (en) * 1998-03-13 2001-02-27 Fuji Photo Film Co., Ltd. Array-type exposing device and flat type display incorporating light modulator and driving method thereof
JP3376308B2 (en) 1998-03-16 2003-02-10 株式会社東芝 Reflector and liquid crystal display
JPH11271744A (en) 1998-03-24 1999-10-08 Minolta Co Ltd Color liquid crystal display device
US6710920B1 (en) * 1998-03-27 2004-03-23 Sanyo Electric Co., Ltd Stereoscopic display
KR100703140B1 (en) 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 Interferometric modulation and its manufacturing method
JPH11296150A (en) * 1998-04-10 1999-10-29 Masaya Okita High-speed driving method for liquid crystal
US20020163482A1 (en) 1998-04-20 2002-11-07 Alan Sullivan Multi-planar volumetric display system including optical elements made from liquid crystal having polymer stabilized cholesteric textures
US6249269B1 (en) 1998-04-30 2001-06-19 Agilent Technologies, Inc. Analog pixel drive circuit for an electro-optical material-based display device
CA2294438A1 (en) 1998-04-30 1999-11-11 Hisashi Aoki Display device using ambient light and a lighting panel
US6329974B1 (en) 1998-04-30 2001-12-11 Agilent Technologies, Inc. Electro-optical material-based display device having analog pixel drivers
US20010040538A1 (en) 1999-05-13 2001-11-15 William A. Quanrud Display system with multiplexed pixels
JP3428446B2 (en) 1998-07-09 2003-07-22 富士通株式会社 Plasma display panel and method of manufacturing the same
JP2000057832A (en) * 1998-07-31 2000-02-25 Hitachi Ltd Lighting system and liquid crystal display device using same
GB2340281A (en) 1998-08-04 2000-02-16 Sharp Kk A reflective liquid crystal display device
US6710538B1 (en) 1998-08-26 2004-03-23 Micron Technology, Inc. Field emission display having reduced power requirements and method
US6249370B1 (en) 1998-09-18 2001-06-19 Ngk Insulators, Ltd. Display device
US6962419B2 (en) 1998-09-24 2005-11-08 Reflectivity, Inc Micromirror elements, package for the micromirror elements, and projection system therefor
US6523961B2 (en) * 2000-08-30 2003-02-25 Reflectivity, Inc. Projection system and mirror elements for improved contrast ratio in spatial light modulators
US6288829B1 (en) 1998-10-05 2001-09-11 Fuji Photo Film, Co., Ltd. Light modulation element, array-type light modulation element, and flat-panel display unit
JP2000111813A (en) * 1998-10-05 2000-04-21 Fuji Photo Film Co Ltd Optical modulation element and array type optical modulation element as well as plane display device
US6323834B1 (en) 1998-10-08 2001-11-27 International Business Machines Corporation Micromechanical displays and fabrication method
US6404942B1 (en) 1998-10-23 2002-06-11 Corning Incorporated Fluid-encapsulated MEMS optical switch
US6639572B1 (en) 1998-10-28 2003-10-28 Intel Corporation Paper white direct view display
US6034807A (en) * 1998-10-28 2000-03-07 Memsolutions, Inc. Bistable paper white direct view display
US6288824B1 (en) * 1998-11-03 2001-09-11 Alex Kastalsky Display device based on grating electromechanical shutter
US6201664B1 (en) * 1998-11-16 2001-03-13 International Business Machines Corporation Polymer bumps for trace and shock protection
US6300294B1 (en) 1998-11-16 2001-10-09 Texas Instruments Incorporated Lubricant delivery for micromechanical devices
US6154586A (en) 1998-12-24 2000-11-28 Jds Fitel Inc. Optical switch mechanism
US6498685B1 (en) 1999-01-11 2002-12-24 Kenneth C. Johnson Maskless, microlens EUV lithography system
JP2000214397A (en) * 1999-01-22 2000-08-04 Canon Inc Optical polarizer
US6266240B1 (en) 1999-02-04 2001-07-24 Palm, Inc. Encasement for a handheld computer
US6556261B1 (en) * 1999-02-15 2003-04-29 Rainbow Displays, Inc. Method for assembling a tiled, flat-panel microdisplay array having reflective microdisplay tiles and attaching thermally-conductive substrate
US6476886B2 (en) * 1999-02-15 2002-11-05 Rainbow Displays, Inc. Method for assembling a tiled, flat-panel microdisplay array
US6827456B2 (en) * 1999-02-23 2004-12-07 Solid State Opto Limited Transreflectors, transreflector systems and displays and methods of making transreflectors
US7364341B2 (en) 1999-02-23 2008-04-29 Solid State Opto Limited Light redirecting films including non-interlockable optical elements
US20050024849A1 (en) 1999-02-23 2005-02-03 Parker Jeffery R. Methods of cutting or forming cavities in a substrate for use in making optical films, components or wave guides
US6752505B2 (en) 1999-02-23 2004-06-22 Solid State Opto Limited Light redirecting films and film systems
US7167156B1 (en) 1999-02-26 2007-01-23 Micron Technology, Inc. Electrowetting display
US6633301B1 (en) 1999-05-17 2003-10-14 Displaytech, Inc. RGB illuminator with calibration via single detector servo
JP2000338523A (en) * 1999-05-25 2000-12-08 Nec Corp Liquid crystal display device
US6201633B1 (en) * 1999-06-07 2001-03-13 Xerox Corporation Micro-electromechanical based bistable color display sheets
US6507138B1 (en) * 1999-06-24 2003-01-14 Sandia Corporation Very compact, high-stability electrostatic actuator featuring contact-free self-limiting displacement
JP2001035222A (en) 1999-07-23 2001-02-09 Minebea Co Ltd Surface lighting system
US6248509B1 (en) 1999-07-27 2001-06-19 James E. Sanford Maskless photoresist exposure system using mems devices
US6322712B1 (en) 1999-09-01 2001-11-27 Micron Technology, Inc. Buffer layer in flat panel display
JP4198281B2 (en) 1999-09-13 2008-12-17 日本ライツ株式会社 Light guide plate and flat illumination device
CA2384328A1 (en) * 1999-09-20 2001-03-29 E.I. Du Pont De Nemours And Company Multidentate phosphite ligands, catalytic compositions containing such ligands and catalytic processes utilizing such catalytic compositions
KR20010050623A (en) 1999-10-04 2001-06-15 모리시타 요이찌 Display technique for high gradation degree
WO2003007049A1 (en) * 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US6583915B1 (en) 1999-10-08 2003-06-24 Lg. Philips Lcd Co., Ltd. Display device using a micro light modulator and fabricating method thereof
US7046905B1 (en) 1999-10-08 2006-05-16 3M Innovative Properties Company Blacklight with structured surfaces
CA2323189A1 (en) 1999-10-15 2001-04-15 Cristian A. Bolle Dual motion electrostatic actuator design for mems micro-relay
JP3618066B2 (en) 1999-10-25 2005-02-09 株式会社日立製作所 Liquid crystal display
US7071520B2 (en) 2000-08-23 2006-07-04 Reflectivity, Inc MEMS with flexible portions made of novel materials
US6690422B1 (en) * 1999-11-03 2004-02-10 Sharp Laboratories Of America, Inc. Method and system for field sequential color image capture using color filter array
US6535311B1 (en) * 1999-12-09 2003-03-18 Corning Incorporated Wavelength selective cross-connect switch using a MEMS shutter array
KR100679095B1 (en) 1999-12-10 2007-02-05 엘지.필립스 엘시디 주식회사 Transparent Type Display Device Using Micro Light Modulator
JP2001197271A (en) * 2000-01-14 2001-07-19 Brother Ind Ltd Multi-beam scanner
JP3884207B2 (en) * 2000-01-20 2007-02-21 インターナショナル・ビジネス・マシーンズ・コーポレーション Liquid crystal display
EP1118901A1 (en) * 2000-01-21 2001-07-25 Dicon A/S A rear-projecting device
US6407851B1 (en) * 2000-08-01 2002-06-18 Mohammed N. Islam Micromechanical optical switch
US6888678B2 (en) 2000-02-16 2005-05-03 Matsushita Electric Industrial Co., Ltd. Irregular-shape body, reflection sheet and reflection-type liquid crystal display element, and production method and production device therefor
EP1128201A1 (en) 2000-02-25 2001-08-29 C.S.E.M. Centre Suisse D'electronique Et De Microtechnique Sa Switching device, particularly for optical switching
JP4006918B2 (en) * 2000-02-28 2007-11-14 オムロン株式会社 Surface light source device and manufacturing method thereof
US6747784B2 (en) 2000-03-20 2004-06-08 Np Photonics, Inc. Compliant mechanism and method of forming same
US6593677B2 (en) 2000-03-24 2003-07-15 Onix Microsystems, Inc. Biased rotatable combdrive devices and methods
AU7289801A (en) 2000-04-11 2001-10-23 Sandia Corp Microelectromechanical apparatus for elevating and tilting a platform
US6388661B1 (en) 2000-05-03 2002-05-14 Reflectivity, Inc. Monochrome and color digital display systems and methods
JP4403633B2 (en) * 2000-05-10 2010-01-27 ソニー株式会社 Liquid crystal display device and manufacturing method thereof
US6578436B1 (en) 2000-05-16 2003-06-17 Fidelica Microsystems, Inc. Method and apparatus for pressure sensing
AU6501201A (en) 2000-06-01 2001-12-11 Science Applic Int Corp Systems and methods for monitoring health and delivering drugs transdermally
AU2001265426A1 (en) 2000-06-06 2001-12-17 Iolon, Inc. Damped micromechanical device and method for making same
JP2001356281A (en) * 2000-06-14 2001-12-26 Sharp Corp Display element and display device
US7555333B2 (en) 2000-06-19 2009-06-30 University Of Washington Integrated optical scanning image acquisition and display
TW594218B (en) 2000-07-03 2004-06-21 Alps Electric Co Ltd Reflector and reflective liquid crystal display device
KR100840827B1 (en) 2000-07-03 2008-06-23 소니 가부시끼 가이샤 Optical multilayer structure, optical switching device, and image display
US6677709B1 (en) * 2000-07-18 2004-01-13 General Electric Company Micro electromechanical system controlled organic led and pixel arrays and method of using and of manufacturing same
JP2002040336A (en) * 2000-07-21 2002-02-06 Fuji Photo Film Co Ltd Optical modulation element and exposure device and flat display device using the same
JP4542243B2 (en) * 2000-07-28 2010-09-08 エーユー オプトロニクス コーポレイション Liquid crystal cell, display device, and method of manufacturing liquid crystal cell
US6559827B1 (en) * 2000-08-16 2003-05-06 Gateway, Inc. Display assembly
US7057246B2 (en) * 2000-08-23 2006-06-06 Reflectivity, Inc Transition metal dielectric alloy materials for MEMS
US7167297B2 (en) 2000-08-30 2007-01-23 Reflectivity, Inc Micromirror array
US6733354B1 (en) * 2000-08-31 2004-05-11 Micron Technology, Inc. Spacers for field emission displays
US6738177B1 (en) 2000-09-05 2004-05-18 Siwave, Inc. Soft snap-down optical element using kinematic supports
US6531947B1 (en) * 2000-09-12 2003-03-11 3M Innovative Properties Company Direct acting vertical thermal actuator with controlled bending
US8157654B2 (en) 2000-11-28 2012-04-17 Nintendo Co., Ltd. Hand-held video game platform emulation
WO2002025167A1 (en) * 2000-09-25 2002-03-28 Mitsubishi Rayon Co., Ltd. Light source device
US6775048B1 (en) * 2000-10-31 2004-08-10 Microsoft Corporation Microelectrical mechanical structure (MEMS) optical modulator and optical display system
US6664779B2 (en) 2000-11-16 2003-12-16 Texas Instruments Incorporated Package with environmental control material carrier
US6762868B2 (en) 2000-11-16 2004-07-13 Texas Instruments Incorporated Electro-optical package with drop-in aperture
CA2429831A1 (en) * 2000-11-22 2002-05-30 Flixel Ltd. Microelectromechanical display devices
AU2002230520A1 (en) * 2000-11-29 2002-06-11 E-Ink Corporation Addressing circuitry for large electronic displays
US6992375B2 (en) * 2000-11-30 2006-01-31 Texas Instruments Incorporated Anchor for device package
US6906847B2 (en) 2000-12-07 2005-06-14 Reflectivity, Inc Spatial light modulators with light blocking/absorbing areas
US7307775B2 (en) * 2000-12-07 2007-12-11 Texas Instruments Incorporated Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
AU2002248215A1 (en) 2000-12-19 2002-07-24 Coventor, Incorporated Optical mems device and package having a light-transmissive opening or window
JP4446591B2 (en) 2000-12-20 2010-04-07 京セラ株式会社 Optical waveguide and optical circuit board
JP3649145B2 (en) 2000-12-28 2005-05-18 オムロン株式会社 REFLECTIVE DISPLAY DEVICE, ITS MANUFACTURING METHOD, AND DEVICE USING THE SAME
JP2002207182A (en) 2001-01-10 2002-07-26 Sony Corp Optical multilayered structure and method for manufacturing the same, optical switching element, and image display device
US6947195B2 (en) 2001-01-18 2005-09-20 Ricoh Company, Ltd. Optical modulator, optical modulator manufacturing method, light information processing apparatus including optical modulator, image formation apparatus including optical modulator, and image projection and display apparatus including optical modulator
WO2002057732A2 (en) * 2001-01-19 2002-07-25 Massachusetts Institute Of Technology Characterization of compliant structure force-displacement behaviour
US6911891B2 (en) * 2001-01-19 2005-06-28 Massachusetts Institute Of Technology Bistable actuation techniques, mechanisms, and applications
US20030058543A1 (en) * 2001-02-21 2003-03-27 Sheedy James B. Optically corrective lenses for a head-mounted computer display
US6746886B2 (en) 2001-03-19 2004-06-08 Texas Instruments Incorporated MEMS device with controlled gas space chemistry
JP4619565B2 (en) * 2001-03-29 2011-01-26 株式会社リコー Image forming apparatus
JP3912999B2 (en) 2001-04-20 2007-05-09 富士通株式会社 Display device
US6756317B2 (en) * 2001-04-23 2004-06-29 Memx, Inc. Method for making a microstructure by surface micromachining
US6965375B1 (en) 2001-04-27 2005-11-15 Palm, Inc. Compact integrated touch panel display for a handheld device
AU2002309629A1 (en) 2001-05-04 2002-11-18 L3 Optics, Inc. Method and apparatus for detecting and latching the position of a mems moving member
JP2002333619A (en) * 2001-05-07 2002-11-22 Nec Corp Liquid crystal display element and manufacturing method therefor
US6429625B1 (en) 2001-05-18 2002-08-06 Palm, Inc. Method and apparatus for indicating battery charge status
US6671078B2 (en) 2001-05-23 2003-12-30 Axsun Technologies, Inc. Electrostatic zipper actuator optical beam switching system and method of operation
WO2002099527A1 (en) 2001-06-05 2002-12-12 Koninklijke Philips Electronics N.V. Display device based on frustrated total internal reflection
US6764796B2 (en) 2001-06-27 2004-07-20 University Of South Florida Maskless photolithography using plasma displays
US6998219B2 (en) 2001-06-27 2006-02-14 University Of South Florida Maskless photolithography for etching and deposition
EP1271187A3 (en) 2001-06-28 2004-09-22 Alps Electric Co., Ltd. Reflector and reflective liquid crystal display
US6747797B2 (en) * 2001-07-05 2004-06-08 Oplink Communications, Inc. Loop optical circulator
US7535624B2 (en) * 2001-07-09 2009-05-19 E Ink Corporation Electro-optic display and materials for use therein
JP4945059B2 (en) * 2001-07-10 2012-06-06 クアルコム メムス テクノロジーズ インコーポレイテッド Photonic MEMS and structure
JP2003091002A (en) * 2001-07-12 2003-03-28 Alps Electric Co Ltd Liquid crystal display device
JP2003029720A (en) 2001-07-16 2003-01-31 Fujitsu Ltd Display device
JP3909812B2 (en) * 2001-07-19 2007-04-25 富士フイルム株式会社 Display element and exposure element
US7057251B2 (en) * 2001-07-20 2006-06-06 Reflectivity, Inc MEMS device made of transition metal-dielectric oxide materials
JP2003036713A (en) * 2001-07-25 2003-02-07 International Manufacturing & Engineering Services Co Ltd Surface light source device
EP1279994A3 (en) 2001-07-27 2003-10-01 Alps Electric Co., Ltd. Semitransparent reflective liquid-crystal display device
US6589625B1 (en) 2001-08-01 2003-07-08 Iridigm Display Corporation Hermetic seal and method to create the same
US7023606B2 (en) 2001-08-03 2006-04-04 Reflectivity, Inc Micromirror array for projection TV
US6980177B2 (en) 2001-08-03 2005-12-27 Waterstrike Incorporated Sequential inverse encoding apparatus and method for providing confidential viewing of a fundamental display image
US6576887B2 (en) * 2001-08-15 2003-06-10 3M Innovative Properties Company Light guide for use with backlit display
US6863219B1 (en) * 2001-08-17 2005-03-08 Alien Technology Corporation Apparatuses and methods for forming electronic assemblies
TW497138B (en) * 2001-08-28 2002-08-01 Winbond Electronics Corp Method for improving consistency of critical dimension
US20030048036A1 (en) * 2001-08-31 2003-03-13 Lemkin Mark Alan MEMS comb-finger actuator
JP4880838B2 (en) 2001-09-05 2012-02-22 株式会社東芝 Method and apparatus for assembling liquid crystal display device
US6731492B2 (en) 2001-09-07 2004-05-04 Mcnc Research And Development Institute Overdrive structures for flexible electrostatic switch
JP3928395B2 (en) 2001-09-21 2007-06-13 オムロン株式会社 Surface light source device
US6794793B2 (en) * 2001-09-27 2004-09-21 Memx, Inc. Microelectromechnical system for tilting a platform
EP1433019A1 (en) 2001-09-28 2004-06-30 Koninklijke Philips Electronics N.V. Apparatus having a flat display
US6701039B2 (en) * 2001-10-04 2004-03-02 Colibrys S.A. Switching device, in particular for optical applications
KR20030029251A (en) * 2001-10-05 2003-04-14 삼성전자주식회사 Liquid crystal display device
US7046221B1 (en) 2001-10-09 2006-05-16 Displaytech, Inc. Increasing brightness in field-sequential color displays
JP4032696B2 (en) 2001-10-23 2008-01-16 日本電気株式会社 Liquid crystal display
US6809851B1 (en) 2001-10-24 2004-10-26 Decicon, Inc. MEMS driver
KR100764592B1 (en) * 2001-10-30 2007-10-08 엘지.필립스 엘시디 주식회사 backlight for liquid crystal display devices
JP2006502421A (en) 2001-11-06 2006-01-19 キーオティ Image projection device
US6936968B2 (en) 2001-11-30 2005-08-30 Mule Lighting, Inc. Retrofit light emitting diode tube
JP2005512119A (en) * 2001-12-03 2005-04-28 フリクセル リミテッド Display device
DE60236538D1 (en) 2001-12-05 2010-07-08 Rambus Int Ltd TRANSFECTOR, TRANSFECTOR SYSTEMS AND INDICATORS UN
US7185542B2 (en) 2001-12-06 2007-03-06 Microfabrica Inc. Complex microdevices and apparatus and methods for fabricating such devices
JP2003177723A (en) 2001-12-11 2003-06-27 Seiko Epson Corp Method for driving electro-optical device, driving circuit therefor, electro-optical device, and electronic equipment
GB2383641A (en) 2001-12-21 2003-07-02 Nokia Corp Reflective displays
US6785436B2 (en) 2001-12-28 2004-08-31 Axiowave Networks, Inc. Method of and operating architectural enhancement for combining optical (photonic) and data packet-based electrical switch fabric networks with a common software control plane while providing increased utilization of such combined networks
JP2003196217A (en) * 2001-12-28 2003-07-11 Nec Corp Method for setting incoming rejection of annoying mail and its mail device
WO2003060920A1 (en) * 2002-01-11 2003-07-24 Reflectivity, Inc. Spatial light modulator with charge-pump pixel cell
JP4013562B2 (en) 2002-01-25 2007-11-28 豊田合成株式会社 Lighting device
US6794119B2 (en) 2002-02-12 2004-09-21 Iridigm Display Corporation Method for fabricating a structure for a microelectromechanical systems (MEMS) device
US6897164B2 (en) 2002-02-14 2005-05-24 3M Innovative Properties Company Aperture masks for circuit fabrication
WO2003071347A1 (en) 2002-02-19 2003-08-28 Koninklijke Philips Electronics N.V. Display device
KR20040089637A (en) 2002-02-19 2004-10-21 코닌클리케 필립스 일렉트로닉스 엔.브이. Display device
EP1478964B1 (en) 2002-02-20 2013-07-17 Koninklijke Philips Electronics N.V. Display apparatus
WO2003073405A2 (en) * 2002-02-26 2003-09-04 Uni-Pixel Displays, Inc. Enhancements to optical flat panel displays
US6574033B1 (en) 2002-02-27 2003-06-03 Iridigm Display Corporation Microelectromechanical systems device and method for fabricating same
JP2003262734A (en) * 2002-03-08 2003-09-19 Citizen Electronics Co Ltd Light guide plate
US7256927B2 (en) 2002-03-11 2007-08-14 Uni-Pixel Displays, Inc. Double-electret mems actuator
US7055975B2 (en) 2002-03-12 2006-06-06 Memx, Inc. Microelectromechanical system with non-collinear force compensation
US6831390B2 (en) * 2002-03-14 2004-12-14 Memx, Inc. Microelectromechanical system with stiff coupling
US6650806B2 (en) 2002-03-14 2003-11-18 Memx, Inc. Compliant push/pull connector microstructure
US6707176B1 (en) * 2002-03-14 2004-03-16 Memx, Inc. Non-linear actuator suspension for microelectromechanical systems
US20060152476A1 (en) 2002-03-20 2006-07-13 Gerardus Van Gorkom Method of driving a foil display screen and device having such a display screen
US7345824B2 (en) 2002-03-26 2008-03-18 Trivium Technologies, Inc. Light collimating device
CA2479301C (en) 2002-03-26 2011-03-29 Dicon A/S Micro light modulator arrangement
US7053519B2 (en) 2002-03-29 2006-05-30 Microsoft Corporation Electrostatic bimorph actuator
CA2481048A1 (en) 2002-04-09 2003-10-23 Dicon A/S Light modulating engine
WO2003094138A2 (en) 2002-05-06 2003-11-13 Uni-Pixel Displays, Inc. Field sequential color efficiency
US6879307B1 (en) 2002-05-15 2005-04-12 Ernest Stern Method and apparatus for reducing driver count and power consumption in micromechanical flat panel displays
JP3871615B2 (en) 2002-06-13 2007-01-24 富士通株式会社 Display device
US6741377B2 (en) * 2002-07-02 2004-05-25 Iridigm Display Corporation Device having a light-absorbing mask and a method for fabricating same
US20060007701A1 (en) * 2002-07-08 2006-01-12 Koninklijke Philips Electronics N.V. Foil display with two light guides
JP2004053839A (en) * 2002-07-18 2004-02-19 Murata Mfg Co Ltd Light switching device
US6811217B2 (en) * 2002-08-15 2004-11-02 Mattel, Inc. Rocker device
US6700173B1 (en) 2002-08-20 2004-03-02 Memx, Inc. Electrically isolated support for overlying MEM structure
WO2004019120A1 (en) 2002-08-21 2004-03-04 Nokia Corporation Switchable lens display
JP2004093760A (en) 2002-08-30 2004-03-25 Fujitsu Display Technologies Corp Method of manufacturing liquid crystal display
CN1701262A (en) 2002-09-20 2005-11-23 霍尼韦尔国际公司 High efficiency viewing screen
JP2004117833A (en) * 2002-09-26 2004-04-15 Seiko Epson Corp Optical attenuator, electronic equipment, and method for driving optical attenuator
CA2499944A1 (en) 2002-09-30 2004-04-15 Nanosys, Inc. Integrated displays using nanowire transistors
JP3774715B2 (en) 2002-10-21 2006-05-17 キヤノン株式会社 Projection display
US6666561B1 (en) * 2002-10-28 2003-12-23 Hewlett-Packard Development Company, L.P. Continuously variable analog micro-mirror device
US7474180B2 (en) 2002-11-01 2009-01-06 Georgia Tech Research Corp. Single substrate electromagnetic actuator
US6911964B2 (en) 2002-11-07 2005-06-28 Duke University Frame buffer pixel circuit for liquid crystal display
US6844959B2 (en) * 2002-11-26 2005-01-18 Reflectivity, Inc Spatial light modulators with light absorbing areas
US7405860B2 (en) 2002-11-26 2008-07-29 Texas Instruments Incorporated Spatial light modulators with light blocking/absorbing areas
JP4150250B2 (en) * 2002-12-02 2008-09-17 富士フイルム株式会社 Drawing head, drawing apparatus and drawing method
WO2004086098A2 (en) 2002-12-03 2004-10-07 Flixel Ltd. Display devices
JP2006510066A (en) 2002-12-16 2006-03-23 イー−インク コーポレイション Backplane for electro-optic display
US6857751B2 (en) * 2002-12-20 2005-02-22 Texas Instruments Incorporated Adaptive illumination modulator
JP2004212673A (en) * 2002-12-27 2004-07-29 Fuji Photo Film Co Ltd Planar display device and its driving method
JP2004212444A (en) 2002-12-27 2004-07-29 Internatl Business Mach Corp <Ibm> Method for manufacturing liquid crystal display device and device for bonding substrate
US20040136680A1 (en) 2003-01-09 2004-07-15 Teraop Ltd. Single layer MEMS based variable optical attenuator with transparent shutter
TWI234041B (en) * 2003-01-14 2005-06-11 Benq Corp Low power backlight module
WO2004066410A1 (en) 2003-01-17 2004-08-05 Diode Solutions, Inc. Display employing organic material
JP2004246324A (en) 2003-01-24 2004-09-02 Murata Mfg Co Ltd Electrostatic type actuator
CN100380167C (en) 2003-01-27 2008-04-09 利奎阿维斯塔股份有限公司 Display device
JP4493274B2 (en) 2003-01-29 2010-06-30 富士通株式会社 Display device and display method
US20040145580A1 (en) 2003-01-29 2004-07-29 Perlman Stephen G. Apparatus and method for reflective display of images on a card
US7180677B2 (en) 2003-01-31 2007-02-20 Fuji Photo Film Co., Ltd. Display device
US7042622B2 (en) 2003-10-30 2006-05-09 Reflectivity, Inc Micromirror and post arrangements on substrates
US7417782B2 (en) * 2005-02-23 2008-08-26 Pixtronix, Incorporated Methods and apparatus for spatial light modulation
JP4505189B2 (en) * 2003-03-24 2010-07-21 富士フイルム株式会社 Transmission type light modulation device and mounting method thereof
CN1768364A (en) 2003-04-02 2006-05-03 皇家飞利浦电子股份有限公司 Foil display
JP4396124B2 (en) * 2003-04-11 2010-01-13 セイコーエプソン株式会社 Display device, projector, and driving method thereof
US20040207768A1 (en) 2003-04-15 2004-10-21 Yin Liu Electron-beam controlled micromirror (ECM) projection display system
US7283105B2 (en) 2003-04-24 2007-10-16 Displaytech, Inc. Microdisplay and interface on single chip
JP4149305B2 (en) * 2003-04-25 2008-09-10 富士フイルム株式会社 Optical shutter and image display device using the same
US20070007889A1 (en) * 2003-05-22 2007-01-11 Koninklijke Philips Electronics N.V. Dynamic foil display having low resistivity electrodes
JP4338442B2 (en) * 2003-05-23 2009-10-07 富士フイルム株式会社 Manufacturing method of transmissive light modulation element
JP4039314B2 (en) 2003-05-29 2008-01-30 セイコーエプソン株式会社 Image reading apparatus having power saving mode
EP1489449A1 (en) * 2003-06-20 2004-12-22 ASML Netherlands B.V. Spatial light modulator
US7221495B2 (en) 2003-06-24 2007-05-22 Idc Llc Thin film precursor stack for MEMS manufacturing
US20050012197A1 (en) * 2003-07-15 2005-01-20 Smith Mark A. Fluidic MEMS device
JP2005043674A (en) * 2003-07-22 2005-02-17 Moritex Corp Comb type electrostatic actuator and optical controller using the same
JP2005043726A (en) * 2003-07-23 2005-02-17 Fuji Photo Film Co Ltd Display element and portable equipment using it
US7315294B2 (en) * 2003-08-25 2008-01-01 Texas Instruments Incorporated Deinterleaving transpose circuits in digital display systems
JP4131218B2 (en) 2003-09-17 2008-08-13 セイコーエプソン株式会社 Display panel and display device
JP4530632B2 (en) * 2003-09-19 2010-08-25 富士通株式会社 Liquid crystal display
TW200523503A (en) 2003-09-29 2005-07-16 Sony Corp Backlight, light guiding plate, method for manufacturing diffusion plate and light guiding plate, and liquid crystal display device
US20050073471A1 (en) 2003-10-03 2005-04-07 Uni-Pixel Displays, Inc. Z-axis redundant display/multilayer display
US7012726B1 (en) * 2003-11-03 2006-03-14 Idc, Llc MEMS devices with unreleased thin film components
CA2545257A1 (en) 2003-11-14 2005-06-16 Uni-Pixel Displays, Inc. Simple matrix addressing in a display
JP2005158665A (en) 2003-11-24 2005-06-16 Toyota Industries Corp Lighting system
US7123796B2 (en) * 2003-12-08 2006-10-17 University Of Cincinnati Light emissive display based on lightwave coupling
US7430355B2 (en) * 2003-12-08 2008-09-30 University Of Cincinnati Light emissive signage devices based on lightwave coupling
US7142346B2 (en) 2003-12-09 2006-11-28 Idc, Llc System and method for addressing a MEMS display
US7161728B2 (en) 2003-12-09 2007-01-09 Idc, Llc Area array modulation and lead reduction in interferometric modulators
KR100531796B1 (en) 2003-12-10 2005-12-02 엘지전자 주식회사 Optical shutter for plasma display panel and driving method therof
US7182463B2 (en) 2003-12-23 2007-02-27 3M Innovative Properties Company Pixel-shifting projection lens assembly to provide optical interlacing for increased addressability
DE10361915B4 (en) 2003-12-29 2009-03-05 Bausenwein, Bernhard, Dr. 2-channel stereo image display device with microelectromechanical systems
JP4267465B2 (en) 2004-01-07 2009-05-27 富士フイルム株式会社 REFLECTIVE COLOR DISPLAY ELEMENT, ITS MANUFACTURING METHOD, AND INFORMATION DISPLAY DEVICE PROVIDED WITH THE DISPLAY ELEMENT
US7532194B2 (en) 2004-02-03 2009-05-12 Idc, Llc Driver voltage adjuster
US7342705B2 (en) 2004-02-03 2008-03-11 Idc, Llc Spatial light modulator with integrated optical compensation structure
ITVA20040004A1 (en) * 2004-02-06 2004-05-06 St Microelectronics Srl OPEN RING VOLTAGE DRIVING METHOD AND CIRCUIT OF A DC MOTOR
JP2005221917A (en) * 2004-02-09 2005-08-18 Fuji Photo Film Co Ltd Electromechanical type optical shutter element and optical shutter array
US7119945B2 (en) 2004-03-03 2006-10-10 Idc, Llc Altering temporal response of microelectromechanical elements
US7706050B2 (en) * 2004-03-05 2010-04-27 Qualcomm Mems Technologies, Inc. Integrated modulator illumination
US7855824B2 (en) 2004-03-06 2010-12-21 Qualcomm Mems Technologies, Inc. Method and system for color optimization in a display
JP2005257981A (en) 2004-03-11 2005-09-22 Fuji Photo Film Co Ltd Method of driving optical modulation element array, optical modulation apparatus, and image forming apparatus
US20050244099A1 (en) 2004-03-24 2005-11-03 Pasch Nicholas F Cantilevered micro-electromechanical switch array
TWI244535B (en) 2004-03-24 2005-12-01 Yuan Lin A full color and flexible illuminating strap device
US20050225501A1 (en) 2004-03-30 2005-10-13 Balakrishnan Srinivasan Self-aligned microlens array for transmissive MEMS image arrray
US8267780B2 (en) 2004-03-31 2012-09-18 Nintendo Co., Ltd. Game console and memory card
US20050243023A1 (en) 2004-04-06 2005-11-03 Damoder Reddy Color filter integrated with sensor array for flat panel display
CN1981318A (en) 2004-04-12 2007-06-13 彩光公司 Low power circuits for active matrix emissive displays and methods of operating the same
US7158278B2 (en) 2004-04-12 2007-01-02 Alexander Kastalsky Display device based on bistable electrostatic shutter
JP2005317439A (en) 2004-04-30 2005-11-10 Seiko Epson Corp Display panel and display device
US7476327B2 (en) 2004-05-04 2009-01-13 Idc, Llc Method of manufacture for microelectromechanical devices
US7060895B2 (en) 2004-05-04 2006-06-13 Idc, Llc Modifying the electro-mechanical behavior of devices
US7164520B2 (en) 2004-05-12 2007-01-16 Idc, Llc Packaging for an interferometric modulator
US8025831B2 (en) 2004-05-24 2011-09-27 Agency For Science, Technology And Research Imprinting of supported and free-standing 3-D micro- or nano-structures
US7067355B2 (en) 2004-05-26 2006-06-27 Hewlett-Packard Development Company, L.P. Package having bond-sealed underbump
US7636795B2 (en) * 2004-06-30 2009-12-22 Intel Corporation Configurable feature selection mechanism
US7256922B2 (en) * 2004-07-02 2007-08-14 Idc, Llc Interferometric modulators with thin film transistors
CA2572952C (en) 2004-07-09 2012-12-04 The University Of Cincinnati Display capable electrowetting light valve
US20060028811A1 (en) * 2004-08-05 2006-02-09 Ross Charles A Jr Digital video recording flashlight
US20060033676A1 (en) * 2004-08-10 2006-02-16 Kenneth Faase Display device
US7453445B2 (en) 2004-08-13 2008-11-18 E Ink Corproation Methods for driving electro-optic displays
US7119944B2 (en) 2004-08-25 2006-10-10 Reflectivity, Inc. Micromirror device and method for making the same
US7215459B2 (en) 2004-08-25 2007-05-08 Reflectivity, Inc. Micromirror devices with in-plane deformable hinge
US6980349B1 (en) 2004-08-25 2005-12-27 Reflectivity, Inc Micromirrors with novel mirror plates
US7551159B2 (en) 2004-08-27 2009-06-23 Idc, Llc System and method of sensing actuation and release voltages of an interferometric modulator
US7889163B2 (en) * 2004-08-27 2011-02-15 Qualcomm Mems Technologies, Inc. Drive method for MEMS devices
US7515147B2 (en) * 2004-08-27 2009-04-07 Idc, Llc Staggered column drive circuit systems and methods
US7564874B2 (en) 2004-09-17 2009-07-21 Uni-Pixel Displays, Inc. Enhanced bandwidth data encoding method
US7184202B2 (en) * 2004-09-27 2007-02-27 Idc, Llc Method and system for packaging a MEMS device
US7525730B2 (en) 2004-09-27 2009-04-28 Idc, Llc Method and device for generating white in an interferometric modulator display
US7446927B2 (en) 2004-09-27 2008-11-04 Idc, Llc MEMS switch with set and latch electrodes
US8004504B2 (en) 2004-09-27 2011-08-23 Qualcomm Mems Technologies, Inc. Reduced capacitance display element
US20060132383A1 (en) 2004-09-27 2006-06-22 Idc, Llc System and method for illuminating interferometric modulator display
US7367705B2 (en) 2004-11-04 2008-05-06 Solid State Opto Limited Long curved wedges in an optical film
JP4546266B2 (en) * 2005-01-13 2010-09-15 シャープ株式会社 Sheet image display device
US7627330B2 (en) 2005-01-31 2009-12-01 Research In Motion Limited Mobile electronic device having a geographical position dependent light and method and system for achieving the same
US7304786B2 (en) 2005-02-23 2007-12-04 Pixtronix, Inc. Methods and apparatus for bi-stable actuation of displays
US7502159B2 (en) * 2005-02-23 2009-03-10 Pixtronix, Inc. Methods and apparatus for actuating displays
US7304785B2 (en) 2005-02-23 2007-12-04 Pixtronix, Inc. Display methods and apparatus
US7742016B2 (en) 2005-02-23 2010-06-22 Pixtronix, Incorporated Display methods and apparatus
US7616368B2 (en) 2005-02-23 2009-11-10 Pixtronix, Inc. Light concentrating reflective display methods and apparatus
US7755582B2 (en) 2005-02-23 2010-07-13 Pixtronix, Incorporated Display methods and apparatus
US8159428B2 (en) 2005-02-23 2012-04-17 Pixtronix, Inc. Display methods and apparatus
US9158106B2 (en) 2005-02-23 2015-10-13 Pixtronix, Inc. Display methods and apparatus
US7746529B2 (en) 2005-02-23 2010-06-29 Pixtronix, Inc. MEMS display apparatus
US8482496B2 (en) 2006-01-06 2013-07-09 Pixtronix, Inc. Circuits for controlling MEMS display apparatus on a transparent substrate
US20070205969A1 (en) 2005-02-23 2007-09-06 Pixtronix, Incorporated Direct-view MEMS display devices and methods for generating images thereon
BRPI0607880A2 (en) 2005-02-23 2009-10-20 Pixtronix Inc visualization apparatus and method of forming an image in a visualization apparatus
US8310442B2 (en) 2005-02-23 2012-11-13 Pixtronix, Inc. Circuits for controlling display apparatus
US7271945B2 (en) 2005-02-23 2007-09-18 Pixtronix, Inc. Methods and apparatus for actuating displays
US20080158635A1 (en) 2005-02-23 2008-07-03 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US9229222B2 (en) * 2005-02-23 2016-01-05 Pixtronix, Inc. Alignment methods in fluid-filled MEMS displays
US7675665B2 (en) 2005-02-23 2010-03-09 Pixtronix, Incorporated Methods and apparatus for actuating displays
US20060209012A1 (en) 2005-02-23 2006-09-21 Pixtronix, Incorporated Devices having MEMS displays
US7405852B2 (en) * 2005-02-23 2008-07-29 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US8519945B2 (en) 2006-01-06 2013-08-27 Pixtronix, Inc. Circuits for controlling display apparatus
US7349140B2 (en) 2005-05-31 2008-03-25 Miradia Inc. Triple alignment substrate method and structure for packaging devices
EP1734502A1 (en) 2005-06-13 2006-12-20 Sony Ericsson Mobile Communications AB Illumination in a portable communication device
US7826125B2 (en) * 2005-06-14 2010-11-02 California Institute Of Technology Light conductive controlled shape droplet display device
WO2007002452A2 (en) 2005-06-23 2007-01-04 E Ink Corporation Edge seals and processes for electro-optic displays
US7684660B2 (en) 2005-06-24 2010-03-23 Intel Corporation Methods and apparatus to mount a waveguide to a substrate
US20070052660A1 (en) * 2005-08-23 2007-03-08 Eastman Kodak Company Forming display color image
US8509582B2 (en) 2005-08-30 2013-08-13 Rambus Delaware Llc Reducing light leakage and improving contrast ratio performance in FTIR display devices
US7449759B2 (en) 2005-08-30 2008-11-11 Uni-Pixel Displays, Inc. Electromechanical dynamic force profile articulating mechanism
US7355779B2 (en) * 2005-09-02 2008-04-08 Idc, Llc Method and system for driving MEMS display elements
US7486854B2 (en) 2006-01-24 2009-02-03 Uni-Pixel Displays, Inc. Optical microstructures for light extraction and control
US7876489B2 (en) 2006-06-05 2011-01-25 Pixtronix, Inc. Display apparatus with optical cavities
EP2080045A1 (en) 2006-10-20 2009-07-22 Pixtronix Inc. Light guides and backlight systems incorporating light redirectors at varying densities
US9176318B2 (en) 2007-05-18 2015-11-03 Pixtronix, Inc. Methods for manufacturing fluid-filled MEMS displays

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