CA602880A - Electrolytic etching of semiconductors - Google Patents

Electrolytic etching of semiconductors

Info

Publication number
CA602880A
CA602880A CA602880A CA602880DA CA602880A CA 602880 A CA602880 A CA 602880A CA 602880 A CA602880 A CA 602880A CA 602880D A CA602880D A CA 602880DA CA 602880 A CA602880 A CA 602880A
Authority
CA
Canada
Prior art keywords
semiconductors
electrolytic etching
electrolytic
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA602880A
Inventor
R. Topfer Alvin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Space Systems Loral LLC
Original Assignee
Philco Ford Corp
Publication date
Application granted granted Critical
Publication of CA602880A publication Critical patent/CA602880A/en
Expired legal-status Critical Current

Links

CA602880A Electrolytic etching of semiconductors Expired CA602880A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA602880T

Publications (1)

Publication Number Publication Date
CA602880A true CA602880A (en) 1960-08-02

Family

ID=35818676

Family Applications (1)

Application Number Title Priority Date Filing Date
CA602880A Expired CA602880A (en) Electrolytic etching of semiconductors

Country Status (1)

Country Link
CA (1) CA602880A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3485731A (en) * 1966-05-09 1969-12-23 Matsushita Electronics Corp Process for electrolytically etching indium arsenide
US3527682A (en) * 1967-04-24 1970-09-08 Philco Ford Corp Process for electrolytically etching indium antimonide
US3537962A (en) * 1968-09-03 1970-11-03 Comp Generale Electricite Method of selectively etching silicon

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3485731A (en) * 1966-05-09 1969-12-23 Matsushita Electronics Corp Process for electrolytically etching indium arsenide
US3527682A (en) * 1967-04-24 1970-09-08 Philco Ford Corp Process for electrolytically etching indium antimonide
US3537962A (en) * 1968-09-03 1970-11-03 Comp Generale Electricite Method of selectively etching silicon

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