CA896191A - Optical mask with integral spacers and method of making - Google Patents

Optical mask with integral spacers and method of making

Info

Publication number
CA896191A
CA896191A CA896191A CA896191DA CA896191A CA 896191 A CA896191 A CA 896191A CA 896191 A CA896191 A CA 896191A CA 896191D A CA896191D A CA 896191DA CA 896191 A CA896191 A CA 896191A
Authority
CA
Canada
Prior art keywords
making
optical mask
integral spacers
spacers
integral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA896191A
Inventor
M. Moreau Wayne
R. Rottmann Hans
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Publication date
Application granted granted Critical
Publication of CA896191A publication Critical patent/CA896191A/en
Expired legal-status Critical Current

Links

Claims
CA896191A Optical mask with integral spacers and method of making Expired CA896191A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA896191T

Publications (1)

Publication Number Publication Date
CA896191A true CA896191A (en) 1972-03-21

Family

ID=36402157

Family Applications (1)

Application Number Title Priority Date Filing Date
CA896191A Expired CA896191A (en) Optical mask with integral spacers and method of making

Country Status (1)

Country Link
CA (1) CA896191A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5079113A (en) * 1988-09-29 1992-01-07 Sharp Kabushiki Kaisha Photo-mask
US5260150A (en) * 1987-09-30 1993-11-09 Sharp Kabushiki Kaisha Photo-mask with light shielding film buried in substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5260150A (en) * 1987-09-30 1993-11-09 Sharp Kabushiki Kaisha Photo-mask with light shielding film buried in substrate
US5079113A (en) * 1988-09-29 1992-01-07 Sharp Kabushiki Kaisha Photo-mask

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