CA921370A - Apparatus for the epitaxial deposition of semiconductor material - Google Patents

Apparatus for the epitaxial deposition of semiconductor material

Info

Publication number
CA921370A
CA921370A CA082528A CA82528A CA921370A CA 921370 A CA921370 A CA 921370A CA 082528 A CA082528 A CA 082528A CA 82528 A CA82528 A CA 82528A CA 921370 A CA921370 A CA 921370A
Authority
CA
Canada
Prior art keywords
semiconductor material
epitaxial deposition
epitaxial
deposition
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA082528A
Inventor
Steggewentz Hermann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of CA921370A publication Critical patent/CA921370A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • E—FIXED CONSTRUCTIONS
    • E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
    • E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
    • E06B5/00—Doors, windows, or like closures for special purposes; Border constructions therefor
    • E06B5/02—Doors, windows, or like closures for special purposes; Border constructions therefor for out-buildings or cellars; Other simple closures not designed to be close-fitting
CA082528A 1969-05-16 1970-05-12 Apparatus for the epitaxial deposition of semiconductor material Expired CA921370A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691924997 DE1924997A1 (en) 1969-05-16 1969-05-16 Device for the epitaxial deposition of semiconductor material

Publications (1)

Publication Number Publication Date
CA921370A true CA921370A (en) 1973-02-20

Family

ID=5734348

Family Applications (1)

Application Number Title Priority Date Filing Date
CA082528A Expired CA921370A (en) 1969-05-16 1970-05-12 Apparatus for the epitaxial deposition of semiconductor material

Country Status (10)

Country Link
US (1) US3665139A (en)
JP (1) JPS5018471B1 (en)
AT (1) AT308829B (en)
CA (1) CA921370A (en)
CH (1) CH506187A (en)
DE (1) DE1924997A1 (en)
FR (1) FR2042688B1 (en)
GB (1) GB1298006A (en)
NL (1) NL7006856A (en)
SE (1) SE364191B (en)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5345095Y2 (en) * 1973-02-02 1978-10-28
US4499354A (en) * 1982-10-06 1985-02-12 General Instrument Corp. Susceptor for radiant absorption heater system
US4579080A (en) * 1983-12-09 1986-04-01 Applied Materials, Inc. Induction heated reactor system for chemical vapor deposition
US4577650A (en) * 1984-05-21 1986-03-25 Mcconnell Christopher F Vessel and system for treating wafers with fluids
US4740249A (en) * 1984-05-21 1988-04-26 Christopher F. McConnell Method of treating wafers with fluid
US4633893A (en) * 1984-05-21 1987-01-06 Cfm Technologies Limited Partnership Apparatus for treating semiconductor wafers
US4856544A (en) * 1984-05-21 1989-08-15 Cfm Technologies, Inc. Vessel and system for treating wafers with fluids
US4738272A (en) * 1984-05-21 1988-04-19 Mcconnell Christopher F Vessel and system for treating wafers with fluids
US4858557A (en) * 1984-07-19 1989-08-22 L.P.E. Spa Epitaxial reactors
JPS6169116A (en) * 1984-09-13 1986-04-09 Toshiba Ceramics Co Ltd Susceptor for continuous cvd coating on silicon wafer
EP0233184B1 (en) * 1985-06-24 1992-04-01 Cfm Technologies, Inc. Semiconductor wafer flow treatment
JPS62205619A (en) * 1986-03-06 1987-09-10 Dainippon Screen Mfg Co Ltd Method of heating semiconductor and susceptor used therein
US5438181A (en) * 1993-12-14 1995-08-01 Essex Specialty Products, Inc. Apparatus for heating substrate having electrically-conductive and non-electrically-conductive portions
US6067931A (en) * 1996-11-04 2000-05-30 General Electric Company Thermal processor for semiconductor wafers
US6136724A (en) * 1997-02-18 2000-10-24 Scp Global Technologies Multiple stage wet processing chamber
US6666924B1 (en) * 2000-03-28 2003-12-23 Asm America Reaction chamber with decreased wall deposition
ITMI20020306A1 (en) * 2002-02-15 2003-08-18 Lpe Spa RECEIVER EQUIPPED WITH REENTRANCES AND EPITAXIAL REACTOR THAT USES THE SAME

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3330251A (en) * 1955-11-02 1967-07-11 Siemens Ag Apparatus for producing highest-purity silicon for electric semiconductor devices

Also Published As

Publication number Publication date
AT308829B (en) 1973-07-25
US3665139A (en) 1972-05-23
NL7006856A (en) 1970-11-18
JPS5018471B1 (en) 1975-06-28
FR2042688A1 (en) 1971-02-12
DE1924997A1 (en) 1970-11-19
FR2042688B1 (en) 1975-01-10
CH506187A (en) 1971-04-15
SE364191B (en) 1974-02-18
GB1298006A (en) 1972-11-29

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