CA980920A - Object handling fixture, system, and process - Google Patents

Object handling fixture, system, and process

Info

Publication number
CA980920A
CA980920A CA164,187A CA164187A CA980920A CA 980920 A CA980920 A CA 980920A CA 164187 A CA164187 A CA 164187A CA 980920 A CA980920 A CA 980920A
Authority
CA
Canada
Prior art keywords
object handling
handling fixture
fixture
handling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA164,187A
Other versions
CA164187S (en
Inventor
William J. Ryan (Sr.)
Nandor G. Thoma
Edward F. Schirmer
James H. Tolley
Donald L. Wilder
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of CA980920A publication Critical patent/CA980920A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T225/00—Severing by tearing or breaking
    • Y10T225/30—Breaking or tearing apparatus
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T225/00—Severing by tearing or breaking
    • Y10T225/30—Breaking or tearing apparatus
    • Y10T225/371—Movable breaking tool
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/51—Plural diverse manufacturing apparatus including means for metal shaping or assembling
    • Y10T29/5176—Plural diverse manufacturing apparatus including means for metal shaping or assembling including machining means
    • Y10T29/5177—Plural diverse manufacturing apparatus including means for metal shaping or assembling including machining means and work-holder for assembly
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/53—Means to assemble or disassemble
    • Y10T29/53039—Means to assemble or disassemble with control means energized in response to activator stimulated by condition sensor
    • Y10T29/53043—Means to assemble or disassemble with control means energized in response to activator stimulated by condition sensor including means to divert defective work part
CA164,187A 1972-03-31 1973-02-19 Object handling fixture, system, and process Expired CA980920A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00240018A US3811182A (en) 1972-03-31 1972-03-31 Object handling fixture, system, and process

Publications (1)

Publication Number Publication Date
CA980920A true CA980920A (en) 1975-12-30

Family

ID=22904758

Family Applications (1)

Application Number Title Priority Date Filing Date
CA164,187A Expired CA980920A (en) 1972-03-31 1973-02-19 Object handling fixture, system, and process

Country Status (5)

Country Link
US (1) US3811182A (en)
CA (1) CA980920A (en)
DE (2) DE2315402C2 (en)
FR (1) FR2178865B1 (en)
GB (1) GB1420863A (en)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3879839A (en) * 1973-06-04 1975-04-29 Ibm Method of manufacturing multi-function LSI wafers
US3918146A (en) * 1974-08-30 1975-11-11 Gen Motors Corp Magnetic semiconductor device bonding apparatus with vacuum-biased probes
US3896541A (en) * 1974-09-16 1975-07-29 Western Electric Co Method and apparatus for supporting substrates during bonding
US4046985A (en) * 1974-11-25 1977-09-06 International Business Machines Corporation Semiconductor wafer alignment apparatus
US4181249A (en) * 1977-08-26 1980-01-01 Hughes Aircraft Company Eutectic die attachment method for integrated circuits
DE3137301A1 (en) * 1981-09-18 1983-04-14 Presco Inc., Beverly Hills, Calif. Method and device for handling small parts in manufacture
US4646009A (en) * 1982-05-18 1987-02-24 Ade Corporation Contacts for conductivity-type sensors
JPS60100450A (en) * 1983-11-07 1985-06-04 Disco Abrasive Sys Ltd Semiconductor wafer mounting and cutting system
US4787143A (en) * 1985-12-04 1988-11-29 Tdk Corporation Method for detecting and correcting failure in mounting of electronic parts on substrate and apparatus therefor
DE3920035A1 (en) * 1988-07-04 1990-01-11 Kuttler Hans Juergen Apparatus for the isolation and transportation of workpieces
US5115545A (en) * 1989-03-28 1992-05-26 Matsushita Electric Industrial Co., Ltd. Apparatus for connecting semiconductor devices to wiring boards
JPH02303100A (en) * 1989-05-17 1990-12-17 Matsushita Electric Ind Co Ltd Mounting method for component
JPH0770824B2 (en) * 1991-03-04 1995-07-31 松下電器産業株式会社 Electronic component connection method
US5323013A (en) * 1992-03-31 1994-06-21 The United States Of America As Represented By The Secretary Of The Navy Method of rapid sample handling for laser processing
US5445559A (en) * 1993-06-24 1995-08-29 Texas Instruments Incorporated Wafer-like processing after sawing DMDs
US5840592A (en) * 1993-12-21 1998-11-24 The United States Of America As Represented By The Secretary Of The Navy Method of improving the spectral response and dark current characteristics of an image gathering detector
US5915370A (en) * 1996-03-13 1999-06-29 Micron Technology, Inc. Saw for segmenting a semiconductor wafer
US5874319A (en) * 1996-05-21 1999-02-23 Honeywell Inc. Vacuum die bond for known good die assembly
US5803797A (en) * 1996-11-26 1998-09-08 Micron Technology, Inc. Method and apparatus to hold intergrated circuit chips onto a chuck and to simultaneously remove multiple intergrated circuit chips from a cutting chuck
US5809987A (en) 1996-11-26 1998-09-22 Micron Technology,Inc. Apparatus for reducing damage to wafer cutting blades during wafer dicing
KR100236487B1 (en) 1997-10-22 2000-01-15 윤종용 Die bonding apparatus comprising die collet having split die contact parts for preventing electrostatic discharge
US6187654B1 (en) 1998-03-13 2001-02-13 Intercon Tools, Inc. Techniques for maintaining alignment of cut dies during substrate dicing
US6325059B1 (en) * 1998-09-18 2001-12-04 Intercon Tools, Inc. Techniques for dicing substrates during integrated circuit fabrication
JP4388640B2 (en) * 1999-09-10 2009-12-24 株式会社ディスコ CSP substrate holding member and CSP substrate table on which the CSP substrate holding member is placed
US6787382B1 (en) * 2001-08-30 2004-09-07 Micron Technology, Inc. Method and system for singulating semiconductor components
GB2399311B (en) * 2003-03-04 2005-06-15 Xsil Technology Ltd Laser machining using an active assist gas
GB2404280B (en) * 2003-07-03 2006-09-27 Xsil Technology Ltd Die bonding
US7220175B2 (en) * 2005-04-28 2007-05-22 Win Semiconductors Corp. Device for carrying thin wafers and method of carrying the thin wafers
FR2897503B1 (en) * 2006-02-16 2014-06-06 Valeo Sys Controle Moteur Sas METHOD FOR MANUFACTURING AN ELECTRONIC MODULE BY SEQUENTIALLY FIXING COMPONENTS AND CORRESPONDING PRODUCTION LINE
JP5882364B2 (en) 2011-02-18 2016-03-09 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ Method for wafer level singulation
DE102011115834A1 (en) * 2011-10-13 2013-04-18 Thyssenkrupp System Engineering Gmbh Method for adjusting holding unit for holding workpiece used in motor vehicle, involves adjusting position of support surface based on the comparison of actual position and desired position of support surface
US9842782B2 (en) * 2016-03-25 2017-12-12 Mikro Mesa Technology Co., Ltd. Intermediate structure for transfer, method for preparing micro-device for transfer, and method for processing array of semiconductor device
JP2019012773A (en) * 2017-06-30 2019-01-24 株式会社ディスコ Processing method of wafer

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1237942B (en) * 1962-07-19 1967-03-30 Siemens Ag Device for holding disc-shaped workpieces made of semiconductor material by suction
US3131476A (en) * 1963-03-21 1964-05-05 Philco Corp Production of semiconductor blanks
GB1153008A (en) * 1965-09-18 1969-05-21 Telefunken Patent Method of and apparatus for Measuring and Sorting the Individual Elements in a Semiconductor Wafer
US3448510A (en) * 1966-05-20 1969-06-10 Western Electric Co Methods and apparatus for separating articles initially in a compact array,and composite assemblies so formed
FR1064185A (en) * 1967-05-23 1954-05-11 Philips Nv Method of manufacturing an electrode system
US3583561A (en) * 1968-12-19 1971-06-08 Transistor Automation Corp Die sorting system
US3584741A (en) * 1969-06-30 1971-06-15 Ibm Batch sorting apparatus
US3720309A (en) * 1971-12-07 1973-03-13 Teledyne Inc Method and apparatus for sorting semiconductor dice

Also Published As

Publication number Publication date
GB1420863A (en) 1976-01-14
US3811182A (en) 1974-05-21
FR2178865B1 (en) 1976-05-21
DE2315402C2 (en) 1989-06-08
DE2315402A1 (en) 1973-10-04
FR2178865A1 (en) 1973-11-16

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