CN100590318C - 具有第一级涡轮风扇和第二级涡轮分子泵的超高速率真空泵系统 - Google Patents
具有第一级涡轮风扇和第二级涡轮分子泵的超高速率真空泵系统 Download PDFInfo
- Publication number
- CN100590318C CN100590318C CN200410098791A CN200410098791A CN100590318C CN 100590318 C CN100590318 C CN 100590318C CN 200410098791 A CN200410098791 A CN 200410098791A CN 200410098791 A CN200410098791 A CN 200410098791A CN 100590318 C CN100590318 C CN 100590318C
- Authority
- CN
- China
- Prior art keywords
- turbofan
- fluid
- rotating shaft
- pump
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
Abstract
Description
Claims (20)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/737,570 | 2003-12-16 | ||
US10/737,570 US7021888B2 (en) | 2003-12-16 | 2003-12-16 | Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1641226A CN1641226A (zh) | 2005-07-20 |
CN100590318C true CN100590318C (zh) | 2010-02-17 |
Family
ID=34523150
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200410098791A Expired - Fee Related CN100590318C (zh) | 2003-12-16 | 2004-12-16 | 具有第一级涡轮风扇和第二级涡轮分子泵的超高速率真空泵系统 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7021888B2 (zh) |
EP (1) | EP1544473A2 (zh) |
JP (1) | JP2005180438A (zh) |
CN (1) | CN100590318C (zh) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0418771D0 (en) * | 2004-08-20 | 2004-09-22 | Boc Group Plc | Evacuation of a load lock enclosure |
CN100376802C (zh) * | 2005-08-08 | 2008-03-26 | 沈阳市耐蚀合金泵厂 | 高速透平真空泵 |
GB0724837D0 (en) * | 2007-12-20 | 2008-01-30 | Edwards Ltd | vacuum pump |
JP4776719B2 (ja) * | 2009-08-31 | 2011-09-21 | 株式会社東芝 | 磁気記録媒体の製造方法 |
CN102465890A (zh) * | 2010-11-04 | 2012-05-23 | 致扬科技股份有限公司 | 改良的涡轮分子泵的定子结构及其制造方法 |
GB201314841D0 (en) | 2013-08-20 | 2013-10-02 | Thermo Fisher Scient Bremen | Multiple port vacuum pump system |
CN104532192B (zh) * | 2014-12-19 | 2018-01-30 | 深圳市华星光电技术有限公司 | 蒸镀装置 |
CN104760685A (zh) * | 2015-01-23 | 2015-07-08 | 王升宏 | 喷气式螺旋桨 |
CN105134620B (zh) * | 2015-09-01 | 2017-11-10 | 易先杰 | 涡扇干式真空泵 |
WO2018174013A1 (ja) * | 2017-03-23 | 2018-09-27 | エドワーズ株式会社 | 真空ポンプとこれに用いられるブレード部品およびロータならびに固定のブレード |
US11460034B2 (en) * | 2018-11-15 | 2022-10-04 | Flowserve Management Company | Apparatus and method for evacuating very large volumes |
GB201903261D0 (en) * | 2019-03-11 | 2019-04-24 | Rolls Royce Plc | Efficient gas turbine engine installation and operation |
US11492020B2 (en) | 2020-05-05 | 2022-11-08 | Flowserve Management Company | Method of intelligently managing pressure within an evacuated transportation system |
CN112253509A (zh) * | 2020-10-29 | 2021-01-22 | 程小俊 | 一种机械式抽风机 |
CN112483433B (zh) * | 2020-11-11 | 2022-07-05 | 上海裕达实业有限公司 | 一种内置真空传感器的便携式仪器分子泵 |
CN114898653A (zh) * | 2022-07-13 | 2022-08-12 | 深圳市泉天下智能装备科技有限公司 | 真空泵机构模型演示装置 |
Family Cites Families (49)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2040452A (en) * | 1934-03-23 | 1936-05-12 | Troller Theodor | Fan construction |
US2171972A (en) * | 1935-09-05 | 1939-09-05 | Dominion Oxygen Company Ltd | Pressure vessel and method of making same |
US2341044A (en) * | 1941-07-28 | 1944-02-08 | Pittsburgh Des Moines Company | Intersecting spherical pressure tank |
US3305121A (en) * | 1963-08-01 | 1967-02-21 | Allis Chalmers Mfg Co | Clamping device for high pressure vessels |
GB1074922A (en) * | 1965-01-09 | 1967-07-05 | Tungsten Carbide Developments | Improvements in or relating to coal-or other mineral-cutter picks with hard metal tips |
US3339831A (en) * | 1965-10-11 | 1967-09-05 | Lau Blower Co | Blower |
US3536418A (en) * | 1969-02-13 | 1970-10-27 | Onezime P Breaux | Cryogenic turbo-molecular vacuum pump |
US3793145A (en) * | 1971-05-25 | 1974-02-19 | Pittsburgh Des Moines Steel | Nuclear containment vessel and method of making same |
US5015432A (en) * | 1973-10-24 | 1991-05-14 | Koloc Paul M | Method and apparatus for generating and utilizing a compound plasma configuration |
US4219325A (en) * | 1978-07-10 | 1980-08-26 | Robinson Industries, Inc. | Axial flow reversible fan for a heat treating furnace |
US4343409A (en) * | 1979-10-22 | 1982-08-10 | Ford Motor Company | Large high temperature plastic vacuum reservoir |
US4687044A (en) * | 1985-05-03 | 1987-08-18 | Tam Ceramics, Inc. | Injection method and apparatus |
JPH0784871B2 (ja) * | 1986-06-12 | 1995-09-13 | 株式会社日立製作所 | 真空排気装置 |
US5012158A (en) * | 1986-07-25 | 1991-04-30 | National Research Institute For Metals | Plasma CVD apparatus |
US4763005A (en) * | 1986-08-06 | 1988-08-09 | Schumer Steven E | Rotating field electron beam apparatus and method |
US4964056A (en) * | 1987-03-25 | 1990-10-16 | Hitachi, Ltd. | Automatic design system of logic circuit |
JPH01277698A (ja) * | 1988-04-30 | 1989-11-08 | Nippon Ferrofluidics Kk | 複合型真空ポンプ |
US5108792A (en) * | 1990-03-09 | 1992-04-28 | Applied Materials, Inc. | Double-dome reactor for semiconductor processing |
US5050616A (en) * | 1990-03-14 | 1991-09-24 | The United States Of America As Represented By The Secretary Of The Department Of Health And Human Services | Universal collector for submandibular-sublingual saliva |
US5121852A (en) * | 1990-05-23 | 1992-06-16 | Essef Corporation | Dynamic pressure relief seal for pressure vessels |
US5085887A (en) * | 1990-09-07 | 1992-02-04 | Applied Materials, Inc. | Wafer reactor vessel window with pressure-thermal compensation |
JPH04326943A (ja) * | 1991-04-25 | 1992-11-16 | Hitachi Ltd | 真空排気システム及び排気方法 |
JPH05195957A (ja) * | 1992-01-23 | 1993-08-06 | Matsushita Electric Ind Co Ltd | 真空ポンプ |
JPH05209589A (ja) * | 1992-01-31 | 1993-08-20 | Matsushita Electric Ind Co Ltd | 流体回転装置 |
JPH05272478A (ja) * | 1992-01-31 | 1993-10-19 | Matsushita Electric Ind Co Ltd | 真空ポンプ |
JP3365643B2 (ja) * | 1992-07-06 | 2003-01-14 | 株式会社神戸製鋼所 | イオン注入装置 |
US5261793A (en) * | 1992-08-05 | 1993-11-16 | The United States Of America As Represented By The Secretary Of The Department Of Health And Human Services | Miniature mechanical vacuum pump |
US6225744B1 (en) * | 1992-11-04 | 2001-05-01 | Novellus Systems, Inc. | Plasma process apparatus for integrated circuit fabrication having dome-shaped induction coil |
US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
US5865896A (en) * | 1993-08-27 | 1999-02-02 | Applied Materials, Inc. | High density plasma CVD reactor with combined inductive and capacitive coupling |
JPH0783189A (ja) * | 1993-09-17 | 1995-03-28 | Hitachi Ltd | ターボ真空ポンプ |
US5513499A (en) * | 1994-04-08 | 1996-05-07 | Ebara Technologies Incorporated | Method and apparatus for cryopump regeneration using turbomolecular pump |
DE19500823A1 (de) * | 1995-01-13 | 1996-07-18 | Sgi Prozess Technik Gmbh | Vakuum-Pumpstand |
US6270617B1 (en) * | 1995-02-15 | 2001-08-07 | Applied Materials, Inc. | RF plasma reactor with hybrid conductor and multi-radius dome ceiling |
US6093252A (en) | 1995-08-03 | 2000-07-25 | Asm America, Inc. | Process chamber with inner support |
US6121569A (en) * | 1996-11-01 | 2000-09-19 | Miley; George H. | Plasma jet source using an inertial electrostatic confinement discharge plasma |
SE508445C2 (sv) * | 1997-01-28 | 1998-10-05 | Magnetal Ab | Vakuumpump av höghastighetstyp |
US6332752B2 (en) * | 1997-06-27 | 2001-12-25 | Ebara Corporation | Turbo-molecular pump |
DE29717079U1 (de) * | 1997-09-24 | 1997-11-06 | Leybold Vakuum Gmbh | Compoundpumpe |
JP3079367B2 (ja) * | 1997-10-03 | 2000-08-21 | セイコー精機株式会社 | ターボ分子ポンプ |
US6041735A (en) * | 1998-03-02 | 2000-03-28 | Ball Semiconductor, Inc. | Inductively coupled plasma powder vaporization for fabricating integrated circuits |
IT1302694B1 (it) * | 1998-10-19 | 2000-09-29 | Getters Spa | Dispositivo di schermatura mobile in funzione della temperatura trapompa getter e pompa turbomolecolare collegate in linea. |
US6245149B1 (en) * | 1999-07-01 | 2001-06-12 | Applied Materials, Inc. | Inert barrier for high purity epitaxial deposition systems |
DE19930952A1 (de) * | 1999-07-05 | 2001-01-11 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
US6383330B1 (en) * | 1999-09-10 | 2002-05-07 | Asm America, Inc. | Quartz wafer processing chamber |
FR2804476B1 (fr) * | 2000-01-31 | 2002-04-12 | Cit Alcatel | Systeme amortisseur et centreur de roulement pour pompe a vide sur palier magnetique |
CN1982724A (zh) * | 2000-06-15 | 2007-06-20 | 格林海克风机股份有限公司 | 在线离心式鼓风机 |
JP2002138987A (ja) * | 2000-10-31 | 2002-05-17 | Seiko Instruments Inc | 真空ポンプ |
FR2822200B1 (fr) * | 2001-03-19 | 2003-09-26 | Cit Alcatel | Systeme de pompage pour gaz a faible conductivite thermique |
-
2003
- 2003-12-16 US US10/737,570 patent/US7021888B2/en not_active Expired - Fee Related
-
2004
- 2004-12-13 EP EP04029460A patent/EP1544473A2/en not_active Withdrawn
- 2004-12-15 JP JP2004362856A patent/JP2005180438A/ja active Pending
- 2004-12-16 CN CN200410098791A patent/CN100590318C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1544473A2 (en) | 2005-06-22 |
US7021888B2 (en) | 2006-04-04 |
US20050129509A1 (en) | 2005-06-16 |
JP2005180438A (ja) | 2005-07-07 |
CN1641226A (zh) | 2005-07-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN100590318C (zh) | 具有第一级涡轮风扇和第二级涡轮分子泵的超高速率真空泵系统 | |
CN102062109B (zh) | 真空泵 | |
JP5378432B2 (ja) | ポンピング装置 | |
KR101237972B1 (ko) | 압축 장치 | |
JPH11230085A (ja) | 真空ポンプの改良 | |
EP2386763B1 (en) | Multistage compressor with balancing pistons | |
EP2855940A1 (en) | Compressor thrust bearing surge protection | |
CN1707102A (zh) | 轻气体真空泵送系统 | |
JP2003129990A (ja) | 真空ポンプ | |
JPH02102385A (ja) | 排気装置 | |
EP3565955B1 (en) | Reverse cycle machine provided with a turbine | |
CN108368854B (zh) | 用于储存动能的装置 | |
CN100429405C (zh) | 真空泵 | |
CN101392751B (zh) | 大抽速型高真空干式真空泵 | |
CN103225623A (zh) | 单壳体对称式径向剖分多级离心泵 | |
JP2021116814A (ja) | 分子真空ポンプ及び分子真空ポンプの排気速度に影響を及ぼす方法 | |
EP1108145A1 (en) | Self-propelled vacuum pump | |
JP3856576B2 (ja) | 核融合炉の排気装置 | |
JP3095338B2 (ja) | ターボ分子ポンプ | |
CN201292944Y (zh) | 一种大抽速型高真空干式真空泵 | |
RU2697244C1 (ru) | Безлопастной радиальный центробежный компрессор | |
JP2897424B2 (ja) | 真空ポンプ | |
CN117404312A (zh) | 一种磁悬浮分子泵 | |
Duval | Will tomorrow’s high‐vacuum pumps be universal or highly specialized? | |
CN114623089A (zh) | 分子泵 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: FERMI RESEARCH UNITED CO., LTD. Free format text: FORMER OWNER: UNIV RES ASS INC. Effective date: 20070316 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20070316 Address after: Illinois Applicant after: Univ Res Ass Inc. Address before: Washington, USA Applicant before: Univ Res Ass Inc. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100217 Termination date: 20101216 |