CN101304841B - 一种刀具组件 - Google Patents

一种刀具组件 Download PDF

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CN101304841B
CN101304841B CN2006800422064A CN200680042206A CN101304841B CN 101304841 B CN101304841 B CN 101304841B CN 2006800422064 A CN2006800422064 A CN 2006800422064A CN 200680042206 A CN200680042206 A CN 200680042206A CN 101304841 B CN101304841 B CN 101304841B
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cutter head
workpiece
piezoelectric pile
actuator
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CN101304841A (zh
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戴尔·L·埃内斯
艾伦·B·坎贝尔
丹尼尔·S·沃茨
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3M Innovative Properties Co
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B27/00Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14Cutting tools of which the bits or tips or cutting inserts are of special material
    • B23B27/18Cutting tools of which the bits or tips or cutting inserts are of special material with cutting bits or tips or cutting inserts rigidly mounted, e.g. by brazing
    • B23B27/20Cutting tools of which the bits or tips or cutting inserts are of special material with cutting bits or tips or cutting inserts rigidly mounted, e.g. by brazing with diamond bits or cutting inserts
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/007Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
    • B23Q15/013Control or regulation of feed movement
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B29/00Holders for non-rotary cutting tools; Boring bars or boring heads; Accessories for tool holders
    • B23B29/04Tool holders for a single cutting tool
    • B23B29/12Special arrangements on tool holders
    • B23B29/125Vibratory toolholders
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/26Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/007Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/007Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
    • B23Q15/14Control or regulation of the orientation of the tool with respect to the work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B5/00Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/18Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/188Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by special applications and not provided for in the relevant subclasses, (e.g. making dies, filament winding)
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B2260/00Details of constructional elements
    • B23B2260/108Piezoelectric elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2230/00Special operations in a machine tool
    • B23Q2230/004Using a cutting tool reciprocating at high speeds, e.g. "fast tool"
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/41Servomotor, servo controller till figures
    • G05B2219/41344Piezo, electrostrictive linear drive
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T82/00Turning
    • Y10T82/10Process of turning
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T82/00Turning
    • Y10T82/14Axial pattern
    • Y10T82/148Pivoted tool rest
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T82/00Turning
    • Y10T82/16Severing or cut-off
    • Y10T82/16426Infeed means
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T82/00Turning
    • Y10T82/25Lathe
    • Y10T82/2502Lathe with program control
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T82/00Turning
    • Y10T82/25Lathe
    • Y10T82/2512Lathe having facing tool fed transverse to work
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T82/00Turning
    • Y10T82/25Lathe
    • Y10T82/2583Tool and work rest

Abstract

一种包括能够沿待切削工件横向运动的刀架和装有刀头的致动器的刀具组件。所述致动器对用于在所述工件上形成微结构的所述刀头在横向地沿着所述工件的Z方向上的运动提供可变控制,同时使所述刀头在垂直于所述工件的X方向的位置保持基本恒定。

Description

一种刀具组件
有关专利申请的参考
本专利申请涉及以下专利申请:Alan Campbell、Dale Ehnes和Daniel Wertz所提交的、名称为“Cutting Tool Having Variable andIndependent Movement in an X-Direction and a Z-Direction Intoand Laterally Along a Work Piece for Making Microstructures”(在朝向工件的X方向和横向地沿着工件的Z方向上变速独立运动的加工微结构的刀具)的美国专利申请;Alan Campbell、Dale Ehnes和Danie1Wertz所提交的、名称为“Cutting Tool Having Variable Movement atTwo Simultaneously Independent Speeds in an X-Direction Into aWork Piece for Making Microstructures”(在朝向工件的X方向上以两个并存独立速度变速运动的加工微结构的刀具)的美国专利申请;以及Dale Ehnes、Alan Campbell和Daniel Wertz所提交的、名称为“Cutting Tool Having Variable Rotation About a Y-DirectionTransversely Across a Work Piece for Making Microstructures”(围绕横过工件的Y方向变速旋转的加工微结构的刀具)的美国专利申请,上述申请均于2005年11月15日提交。 
技术领域
本发明涉及用于制造微复制结构的微复制工具的金刚石加工。 
背景技术
加工技术可用于制造诸如微复制工具之类的各种各样的工件。微复制工具通常用于挤出工艺、注塑成型工艺、压花工艺、浇注工艺等,从而形成微复制结构。微复制结构可能包含光学膜、研磨膜、粘合剂膜、具有自配合外形的机械紧固件、或具有尺寸相对较小(例如小于约1000微米的尺寸)的微复制特征的任何模制或挤出部件。 
也可以采用其它不同的方法制成该微结构。例如,可通过浇铸和固化工艺将母模工具的结构从母模工具转移到由聚合材料制成的带材或织物之类的其它介质上,以形成生产工具;然后使用这一生产工具制造微复制结构。可使用诸如电铸之类的其它方法复制该母模工具。制造导光薄膜的另一备选方法是直接切削或加工透明材料,以形成适当的结构。 
其它技术包括化学蚀刻、喷丸处理或其它随机表面改性技术。然而,这些技术通常不能形成获得合适的光漫射特性所需的轮廓清晰的精确的微结构和特征宽度,而使用本发明方法的刀具可以获得这种合适的光漫射特性。具体地讲,由于化学蚀刻、喷丸处理和其它随机表面改性技术固有的不精确性和不可重复性,所以这些方法不能生产高精度的重复结构。 
发明内容
第一刀具组件包括刀架和构造为连接到刀架上并且与控制器电通信的致动器。连接到致动器上的刀头可相对于待切削的工件运动。所述致动器对刀头在横向地沿着所述工件的Z方向上的运动提供可变控制,同时使刀头在朝向所述工件的X方向上的位置保持基本不变,以便有选择地切削工件。 
第二刀具组件包括能够横向地沿待切削工件运动的刀架和构造为连接到刀架上并且与控制器电通信的致动器,所述致动器包括压电堆。连接到压电堆上的刀头可相对于待切削的工件运动。所述致动器对刀头在横向地沿着所述工件的Z方向上的运动提供可变控制,同时使刀头在朝向所述工件的X方向上的位置保持基本不变,以便有选择地切削工件,从而在工件中加工微结构。 
附图说明
附图被并入本说明书并且构成其整体组成部分,并且结合具体实施方式阐明本发明的优点和原理。在附图中: 
图1为在工件中制成微结构的刀具系统的示意图; 
图2为示出用于刀具的坐标系的示意图; 
图3为用于刀具中的示例性PZT堆的示意图; 
图4A为用于刀具中的快速Z致动器的俯视图; 
图4B为快速Z致动器的后视图; 
图4C为快速Z致动器的前视图; 
图4D和4E为快速Z致动器的侧视图; 
图4F为快速Z致动器的透视图; 
图5A为与快速Z致动器一起使用的刀头的侧视图; 
图5B为刀头的俯视图; 
图5C为刀头的仰视图; 
图5D为刀头的前视图; 
图6为概念性示出可使用包括快速Z致动器的刀具系统制成的微结构的示意图。 
具体实施方式
刀具系统
在已公布的PCT专利申请WO00/48037中描述了常规金刚石车削技术。在这些方法中使用的用于制成光学薄膜或其它薄膜的装置可包括快速伺服刀架。如WO00/48037中公开的,快速伺服刀架(FTS)为被称为PZT堆的固态压电(PZT)装置,它快速调整连接到所述PZT堆上的刀具的位置。如下面详细描述的,FTS使刀具可以在坐标系内的多个方向上做高精确度的高速运动。 
图1为在工件中制造微结构的刀具系统10的示意图。微结构可包括位于制品表面上的、凹入制品表面的或从制品表面凸起的任何类型、形状以及尺寸的结构。例如,使用本说明书描述的致动器和系统制造的微结构可具有1000微米节距、100微米节距、1微米节距、或甚至约200纳米的亚光学波长(nm)节距。提供这些尺寸仅出于示例性目的,使用本说明书描述的致动器和系统制成的微结构可以具有使用该系统可加工的范围内的任何尺寸。 
利用计算机12控制系统10。计算机12包括例如下列元件:存储一个或多个应用程序16的存储器14;提供非易失性信息存储的第二存储器18;接收信息或命令的输入装置20;运行存储在存储器16或第二存储器 18中、或来自另一个来源的应用程序的处理器22;输出视频信息显示的显示装置24;以及以用于音频信息的扬声器或用于信息硬拷贝的打印机之类的其它形式输出信息的输出装置26。 
利用刀头44对工件54执行切削加工。在工件54通过诸如计算机12控制的电动机之类的驱动器和编码器56转动的同时,致动器38控制刀头44的运动。在此实例中,示出的工件54为诸如硬铜辊之类的辊形式的;然而,工件也可以是平面形式的和利用其它加工材料。例如,作为另外一种选择,工件可由铝、镍、钢或塑料(例如,丙烯酸树脂)制成。例如,使用的具体材料可以取决于所需的具体应用,例如使用已加工的工件制成各种薄膜。致动器38和下文描述的致动器可由例如不锈钢或其它材料制成。 
致动器38可拆卸地连接到刀架36上,刀架又被安装在轨道32上。刀架36和致动器38构造成在轨道32上可沿箭头40和42所示的X方向和Z方向的两个方向运动。计算机12经由一个或多个放大器30与刀架36和致动器38电连接。当用作控制器时,在加工工件54时,计算机12控制刀架36沿轨道32的运动并通过致动器38控制刀头44的运动。如果致动器包括多个PZT堆,那么它可以使用分开的放大器独立控制每个PZT堆,所述PZT堆用于独立地控制连接在PZT堆上的刀头的运动。如下面详细说明的,计算机12可利用函数发生器28向致动器38提供波形,以便在工件54中加工各种微结构。 
通过不同部件的协调运动完成工件54的加工。具体地讲,在计算机12的控制下,该系统可以通过刀架36的运动协调并控制致动器38的运动,同时协调并控制工件在C方向的运动以及刀头44在X方向、Y方向和Z方向中的一个或多个方向上的运动,这些坐标将在下面说明。所述系统通常使刀架36在Z方向做匀速运动,但也可以使刀架36做变速运动。通常刀架36和刀头44的运动均与工件54在C方向的运动(如线条53表示的旋转运动)同步。可以利用例如在计算机12的软件、硬件或其组合中执行的数字控制技术或数字控制器(NC)控制所有这些运动。 
工件54加工完以后可用于制成在多种用途中使用的具有相应微结构的薄膜。这些薄膜的实例包括光学薄膜、摩擦控制薄膜以及微型紧固件或其 它机械微结构化部件。通常使用涂层工艺制成所述薄膜,在涂层工艺中,将粘稠状态的材料涂布在工件上,使其至少部分固化,然后移除。固化材料构成的薄膜将具有与工件中的结构基本上相反的结构。例如,工件中的凹进部产生所得薄膜中的凸起部。 
通过管线48和50利用冷却液46控制刀架36和致动器38的温度。温度控制单元52可以使冷却液在流经刀架36和致动器38循环时保持基本恒定的温度。温度控制单元52可以是提供流体温度控制的任何装置。冷却液可以是油产品,例如低粘度油。温度控制单元52和冷却液贮箱46可包括使流体流过刀架36和致动器38循环的泵,并且通常还包括从流体散热的冷却系统,从而使流体基本上保持恒温。使流体循环并提供流体温度控制的冷却系统和泵系统在本领域是已知的。在某些实施例中,为了使工件中要加工的材料的表面温度保持基本恒定,也可以将冷却液施加于工件54。 
图2为示出用于诸如系统10之类的刀具的坐标系示意图。该坐标系示出刀头62相对于工件64的运动。刀头62可以与刀头44相对应,并且通常被连接到刀头座60上,所述刀头座连接到致动器上。在这一示例性实施例中,坐标系包括X方向66、Y方向68和Z方向70。X方向66指沿基本上垂直于工件64的方向的运动。Y方向68指沿横过工件64的方向的运动,例如沿基本上平行于工件64的旋转平面的方向的运动。Z方向70指在横向地沿着工件64的方向上的运动,例如在基本上垂直于工件64的旋转平面的方向上的运动。也如图1所示,工件的旋转方向被称为C方向。如果工件不是辊形式,而是平面形式的,那么Y方向和Z方向就指在沿基本上垂直于X方向的方向横过工件的互相垂直的方向上的运动。 
系统10可用于高精度的高速加工。这一类型的加工必须考虑诸如部件的协调速度和工件材料之类的多种参数。例如,通常必须与工件材料的热稳定性和特性一起考虑给定体积的待加工金属的比能。在下列参考文献中描述了有关加工的切削参数:Machining Data Handbook,Library ofCongress Catalog Card No.66-60051,Second Edition(1972);Edward Trent and Paul Wright,Metal Cutting,Fourth Edition,Butterworth-Heinemann,ISBN 0-7506-7069-X(2000);Zhang Jin-Hua,Theory and Technique of Precision Cutting,Pergamon Press, ISBN 0-08-035891-8(1991)以及M.K.Krueger等人,New Technologyin Metalworking Fluids and Grinding Wheels Achieves TenfoldImprovement in Grinding Performance,Coolant/Lubricants forMetal Cutting and Grinding Conference,Chicago,Illinois,U.S.A.,June 7,2000。 
PZT堆
图3为用于刀具的示例性PZT堆72的图。PZT堆用于使与其相连的刀头运动和根据PZT效应运行,这在本领域是已知的。根据PZT效应,施加到某类材料的电场将使其沿一个轴线伸展,并沿另一轴线收缩。PZT堆通常包括包封在壳体84内、并且安装在基板86上的多个材料74、76和78。在这一示例性实施例中,材料是具有PZT效应的陶瓷材料。仅出于示例性目的而示出三个盘状物74、76和78,例如可以根据具体实施例的需要使用任何数目的盘状物或其它材料、以及任何类别的形状的材料。柱88粘附在盘状物上,并从壳体84中伸出。例如可以利用任何PZT材料制造所述盘状物,诸如混合的、压制的和烧结的钛酸钡、锆酸铅或钛酸铅材料以及以所列材料为基体的材料。其中一种PZT材料可得自KineticCeramics,Inc.26240 Industrial Blvd.,Hayward,CA 94545,U.S.A)。例如,也可以利用磁致伸缩材料制造所述盘状物。 
如线条80和82所示的盘状物74、76和78的电连接为这些盘状物提供电场,以使柱88运动。由于PZT效应以及根据施加的电场类型,可以使柱88进行精确和微小的运动,例如几微米以内的运动。另外,装有柱88的PZT堆72的端部可紧靠一个或多个贝氏垫圈安装,所述垫圈可以为PZT堆预加负荷。贝氏垫圈具有一定的柔韧性,以允许柱88及与柱88连接的刀头运动。位于下述致动器中的每个PZT堆也可以结合有用于预加负荷的贝氏垫圈,或者作为另外一种选择,结合有紧靠每个PZT堆安装的用于为PZT堆预加负荷的任何装置。 
快速Z致动器
图4A-4F为示例性快速Z致动器90的视图。术语“快速Z致动器”指使刀头在大致Z方向上运动以加工工件的任何类型的致动器或其它装置。图4A为快速Z致动器90的俯视图。图4B为快速Z致动器90的后视图。 图4C为快速Z致动器90的前视图。图4D和4E为快速Z致动器90的侧视图。图4F为快速Z致动器90的透视图。为了清楚起见,在图4B-4F中移除了快速Z致动器90的一些细节。 
如图4A-4F所示,快速Z致动器90包括主体92,所述主体包括安装部分91。例如,使用紧固件将PZT堆98固定在安装部分91和板100之间。刀头102连接到板100上,从而PZT堆98横向连接,使得启动PZT堆98可以引起刀头102在如箭头106所示的Z方向上运动。PZT堆98可以使用如图3所示的示例性PZT堆72。板100可以采用例如用于为PZT堆98预加负荷的一个或多个贝氏垫圈。 
主体92还包括用于例如通过螺栓将主体安装到刀架36上的两对孔94和96,从而在计算机12的控制下加工工件54。电连接104将信号传递给PZT堆98以对其进行控制。如图4A所示,例如可以如上所述通过使冷却液穿过孔99进入口93、95和97中的至少一个,并从口93、95和97中的(未用作入口的)至少一个流出的方法控制主体92的温度。传输冷却液流经主体92的孔99可以包括任何具体形状或构造,并且也可以包括任何数量的入口和出口。 
图5A-5D为更详细示出刀头102的视图。图5A为刀头102的侧视图。图5B为刀头102的俯视图。图5C为刀头102的仰视图。图5D为刀头102的前视图。如图5A-5D所示,刀头102包括部分108,该部分具有用于将其安装到板100上的孔110。刀头102还包括保持切削部分114的前端楔形部分112。可以采用例如下列一种或多种材料制成部分108:烧结的碳化物、氮化硅、碳化硅、钢或钛。优选将刚性和轻质材料用于部分108。例如,切削部分114可以采用金刚石块制成,可以使用诸如粘合剂、硬钎焊、软钎焊或其它方式将所述切削部分114固定在部分108上。 
图6为概念性示出可使用包括快速Z致动器的刀具系统制成的微结构的示意图。如图6所示,制品120包含顶面122和底面124。顶面122包含如线条126所示的微结构,并且可以按照如下方法制成那些微结构,即:使用上述致动器加工工件,然后使用所述工件采用涂层技术制成薄膜或制品。在一些实施例中,在制造微结构时,致动器98可以20-30kHz运行,但也可采用其它频率。 
尽管已结合示例性实施例描述本发明,但应当理解,对本领域的技术人员来说,本发明的多个修改形式都是显而易见的,本专利申请旨在涵盖它们的任何修改或变化。例如,在不脱离本发明范围的情况下,刀架、致动器和刀头可以使用各种类型的材料和构造。本发明应当仅受限于权利要求书及其等同物。 

Claims (9)

1.一种刀具组件,包括:
刀架;以及
用于加工工件的快速Z致动器,其被构造为连接到所述刀架上并与控制器电通信,所述快速Z致动器包括:
主体,其具有后侧、前侧、以及位于前侧的安装部分;
压电堆,其固定在所述安装部分上并受到预加负荷,从而所述压电堆与所述主体的前侧大致平行地延伸;以及
刀头,其与所述压电堆连接,所述刀头包括与所述压电堆大致垂直地延伸的切削部分,其中,
所述压电堆使所述刀头沿着与待加工的工件的表面大致平行的Z方向移动。
2.根据权利要求1所述的刀具组件,其中所述刀头包括用于将所述刀头安装到所述压电堆上的孔。
3.根据权利要求1所述的刀具组件,其中所述刀头包括用于保持所述切削部分的前端楔形部分。
4.根据权利要求1所述的刀具组件,还包括板,所述板安装在所述压电堆与所述刀头之间并且用于对所述压电堆预加负荷。
5.根据权利要求1所述的刀具组件,其中所述压电堆由如下材料之一制成:钛酸钡、锆酸铅、钛酸铅、或磁致伸缩材料。
6.根据权利要求1所述的刀具组件,其中所述主体包括孔,所述孔具有用于接纳冷却液的口。
7.根据权利要求4所述的刀具组件,其中所述板包括贝氏垫圈。
8.根据权利要求1所述的刀具组件,其中,所述主体由不锈钢制成。
9.一种刀具组件,其包括:
刀架,其安装在轨道上以与待切削工件的表面大致平行地移动,所述工件是安装成做旋转运动的大致圆柱形的工件,并且所述工件与使所述工件旋转的驱动器连接;以及致动器,所述致动器被构造为连接到所述刀架上,并且与控制器电通信,所述致动器包括:
主体,其具有后侧、前侧、以及位于前侧的安装部分;
压电堆,其固定在所述安装部分上并受到预加负荷,从而所述压电堆与所述主体的前侧大致平行地延伸;以及
刀头,其与所述压电堆连接,所述刀头包括与所述压电堆大致垂直地延伸的切削部分,其中,
所述压电堆使所述刀头沿着与待加工的工件的表面大致平行的Z方向移动。
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CN101304841A (zh) 2008-11-12
JP2009515724A (ja) 2009-04-16
EP1948394A4 (en) 2011-06-15
US20080016995A1 (en) 2008-01-24
US7395742B2 (en) 2008-07-08
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WO2007059063A8 (en) 2008-05-29
WO2007059063A1 (en) 2007-05-24
TW200728193A (en) 2007-08-01
US7350442B2 (en) 2008-04-01
US20070107567A1 (en) 2007-05-17
TWI436940B (zh) 2014-05-11
KR20080090395A (ko) 2008-10-08

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