CN101308806B - Lift pin module of fpd manufacturing machine - Google Patents
Lift pin module of fpd manufacturing machine Download PDFInfo
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- CN101308806B CN101308806B CN2008100857048A CN200810085704A CN101308806B CN 101308806 B CN101308806 B CN 101308806B CN 2008100857048 A CN2008100857048 A CN 2008100857048A CN 200810085704 A CN200810085704 A CN 200810085704A CN 101308806 B CN101308806 B CN 101308806B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
Abstract
The invention provides a lift pin module of flat panel display manufacturing equipment, applied in a base plate process deice including: a lower electrode, on which a base plate is mounted; and a lift pin module of the base plate supported and mounted on the lower electrode, characterized in that the lift pin module comprises an upper lift pin which moves up and down by running through the lift pin hole formed on the lower electrode so as to support the base plate; a lower lift pin coupled with lower end of the upper lift pin, having a holding tank formed on upper end of the lower lift pin; and a pin coupler, of which the upper end is formed with a hole and lower end has an insertion protrusion inserting into the holding tank. The insertion protrusion is capable of moving front and rear in the holding tank.
Description
The application is the dividing an application of No. 200610079818.2 patent application that is called " the picker module of flat panel display manufacturing apparatus " in the name that on May 9th, 2006 submitted to State Intellectual Property Office.
Technical field
The invention relates to the picker module of flat panel display manufacturing apparatus, when substrate was admitted to or sends, above-mentioned picker module rose to the height of sending into or send aforesaid substrate.
Background technology
General flat panel display manufacturing apparatus is to be used for the substrate of flat-panel monitor is sent into inside, utilizes processing such as enforcement etching such as plasma.Here said flat-panel monitor (Flat Panel Display) refers to LCD (Liquid Crystal Display), plasma display panel (Plasma Display Panel), Organic Light Emitting Diode (OrganicLight Emitting Diodes) etc., in these flat panel display manufacturing apparatus, vacuum treatment generally is made up of three vacuum chambers such as load sealed cabin (Load lock), conveying cabin and processing cabins with equipment.
Wherein, above-mentioned load sealed cabin is to form under wheel stream translation atmospheric pressure state and vacuum state, and its effect is, receives untreated substrate from the outside, perhaps sends the substrate of having handled to the outside.There is a conveying robot in above-mentioned conveying cabin, carrying substrate between each cabin, and its effect is, and the substrate that needs are handled is delivered to from the load sealed cabin and is handled the cabin, and perhaps the substrate that will handle is delivered to the load sealed cabin from handling the cabin.The effect in above-mentioned processing cabin is, utilizes plasma or heat energy under vacuum state, forms film or carry out etching on substrate.
Original flat panel display manufacturing apparatus as shown in Figure 1, its inside is made up of following components: when keeping vacuum state and atmospheric pressure state in turn, contact with the outside, carry out the cabin 10 of PROCESS FOR TREATMENT in inside; Be positioned at the upper electrode 12 on 10 tops, above-mentioned cabin; Isolate with above-mentioned upper electrode 12, be positioned at the lower electrode 14 of bottom and bearing substrate S.
The lowermost end of above-mentioned upper electrode 12 has a fountain head (Shower head), and process gas is sprayed onto on the substrate S.
The insulation board (not shown) that above-mentioned lower electrode 14 is positioned at outer wall and top edge surrounds, thereby protects this lower electrode 14 to avoid the influence of plasma, utilize then several bolts respectively fixedly top edge and side and below.
Specified portions assembly platoon device of air (not shown) in above-mentioned cabin 10 has been used for process gas that substrate S handles and accessory substance thereof etc. to remove.Certainly, be in vacuum state for making 10 inside, cabin, sometimes this exhaust apparatus is used to discharge cabin 10 gas inside.
Wherein, as shown in Figure 2, in order to support the substrate S edge of the above-mentioned lower electrode 14 of packing into, assembled the several pickers (Lift pin:20) that form certain intervals at the edge of above-mentioned lower electrode 14, this picker can be by passing several pinhole for pattern drawings 16 that lower electrode 14 forms towards thickness direction.The effect of this picker 20 is, rises and descends by pinhole for pattern drawing 16, and S lifts with substrate, the substrate S that perhaps will send into 10 inside, the cabin lower electrode 14 of packing into.
In other words, the effect of above-mentioned picker 20 is, when substrate S was handled upside down device the cabin is sent in 10 outsides from the cabin, S lifted to certain altitude with this substrate, treat that Handling device withdraws from cabin 10 after, S is put on the lower electrode 14 with this substrate.
At this moment, several above-mentioned pickers 20 are arranged on the lower electrode 14, but these several pickers 20 should rise simultaneously or descend.So, having assembled the molding needle plate 30 that combines with several pickers 20 in the outside bottom side of above-mentioned lower electrode 14, this molding needle plate 30 rises by other drive units (not shown), that is to say that several pickers 20 rise simultaneously by this drive unit.
Then, above-mentioned several pickers 20 pass cabin 10 lower walls, extend to the bottom side in this cabin 10, and are fixed on the molding needle plate 30 of each picker 20 bottom, are positioned at the outside of 10 bottom sides, cabin.
These pickers 20 are such liftings: drive unit applies unlifting pressure to molding needle plate 30, impels picker 20 liftings that are fixed on this molding needle plate 30.
Wherein, from above-mentioned picker 20 towards the cabin the exposed part in 10 bottom sides, that is to say, exposed picker 20 between the bottom surface in above-mentioned cabin 10 and molding needle plate 30, (Bellows:32) surrounds by bellows.
The effect of these bellows 32 is that contraction when several pickers 20 rise relaxes when this picker 20 descends, to keep the vacuum state of 10 inside, cabin.
; if above-mentioned picker 20 is when the pinhole for pattern drawing 16 inner liftings that are positioned at lower electrode 14; diameter according to this pinhole for pattern drawing 16 causes following variety of issue: if the diameter of above-mentioned pinhole for pattern drawing 16 is big; the temperature of above-mentioned picker 20 positions and the temperature difference and the voltage difference of lower electrode 14 peripheral temperature will take place, and impel the stain (Mura) that produces a kind of brightness irregularities with above-mentioned pinhole for pattern drawing 16 corresponding substrate S bottom surfaces.On the contrary, if the diameter of above-mentioned pinhole for pattern drawing 16 is little, so, rub between the picker 20 by pinhole for pattern drawing 16 liftings and this pinhole for pattern drawing 16, thereby produce particle (Particle).The picker 20 of location on above-mentioned molding needle plate 30, if be applicable to and should be equipped with several pickers by large-area substrates S, and its center will aim at pinhole for pattern drawing 16 respectively, so the assembling difficulty is very high.
In addition, if be furnished with electrostatic chuck (ESC: not shown) on the above-mentioned lower electrode 14 according to electrostatic force absorption substrate S, so, can only form trickle gap between the pinhole for pattern drawing 16 of above-mentioned lower electrode 14 and the substrate S, because these gaps have been arranged, in process treatment process, process gas infiltrates the paradoxical discharge phenomenon when causing treatment substrate S by this pinhole for pattern drawing 16.
Summary of the invention
The picker module that the purpose of this invention is to provide a kind of flat panel display manufacturing apparatus, this picker module makes picker be close to lower electrode according to elasticity, infiltrates to prevent process gas.
Description of drawings
To the description of execution mode, simultaneously with reference to accompanying drawing, these and/or others of the present invention and advantage will become obviously and be more readily understood by hereinafter, wherein:
Fig. 1 is the end view of the picker of flat panel display manufacturing apparatus.
Fig. 2 is the enlarged drawing of enlarged drawing 1 " A " part.
Fig. 3 is the end view that possesses the flat panel display manufacturing apparatus of picker module in the first embodiment of the present invention.
Fig. 4 is the exploded perspective view of above-mentioned picker module.
Fig. 5 a and Fig. 5 b are enlarged drawing 3 " B " parts, illustrate the part amplification sectional view of the operating state of above-mentioned picker module.
The schematic configuration of picker module in Fig. 6 a～7b diagram second embodiment of the present invention.
Fig. 8 illustrates the structure of third embodiment of the present invention middle plateform display manufacturing equipment.
Fig. 9 illustrates the structure of picker module in the third embodiment of the present invention.
Figure 10 illustrates the state that picker module in the third embodiment of the present invention is inserted into the hole of threading a needle.
Figure 11 illustrates the different shape of picker upper end in the third embodiment of the present invention.
Figure 12 illustrates the modification structure of picker module in the third embodiment of the present invention.
Figure 13 is the allocation plan of picker in the third embodiment of the present invention.
Figure 14 is the exploded perspective view of picker module in the fourth embodiment of the present invention.
Figure 15 is the end view that the picker module is positioned at lower electrode in the fifth embodiment of the present invention.
Figure 16 is the oblique view of picker module in the fifth embodiment of the present invention.
Figure 17 is the oblique view of the modification of picker module in the fifth embodiment of the present invention.
Figure 18 is the sectional view of picker module in the sixth embodiment of the present invention.
Figure 19 is the part oblique view of the picker module among Figure 18.
Figure 20 a is the skeleton diagram of the operating state of picker module in the diagram sixth embodiment of the present invention.
Figure 20 b is the skeleton diagram of the operating state of picker module in the diagram sixth embodiment of the present invention.
Figure 21 is the sectional view of picker modular structure in the seventh embodiment of the present invention.
Embodiment
Below, the accompanying drawing in conjunction with the picker module of flat panel display manufacturing apparatus of the present invention describes embodiment.
" embodiment 1 "
At first, as shown in Figure 3,, assembled several picker modules at the edge of lower electrode 114, and this picker module runs through and mistake towards thickness direction with certain intervals in order to support the substrate S edge of the lower electrode 114 of packing into.The effect of this picker module is that by lower electrode 114 risings and decline, S lifts with substrate, or is put on the lower electrode 114.
Above-mentioned picker module is most, and molding needle plate 130 is arranged at the bottom, so that each picker module rises simultaneously and descends.When picker rises, utilize other drive units (not shown) to drive, when picker descends, molding needle plate 130 wait that descends in advance, the molding needle plate is that the weight by this picker module itself descends.
At this moment, above-mentioned picker module is made up of top picker 120, bottom picker 124, elastomeric element 128 as shown in Figure 4.
Above-mentioned top picker 120 is cylindric, have appropriate diameter, its underpart is outstanding to have formed the coupling protrusion 122a of diameter less than girth, and its peripheral lower end has formed spiral helicine coupling slot 122b, whole loading plate 122c is arranged at top, and this loading plate is cross.
The equal diameters of the diameter of above-mentioned bottom picker 124 and above-mentioned top picker 120, vertical operation, its upper end forms helical form coupling slot 126a, center upper portion has formed the coupling aperture 126b with suitable height, so that under the state of the coupling protrusion 122a that inserts above-mentioned top picker 120, move up and down.
Simultaneously, the coupling aperture 126b of the bottom picker 124 of the coupling protrusion 122a of above-mentioned top picker 120 and this coupling protrusion of insertion 122a has guide effect, and above-mentioned bottom picker 124 is not broken away from when rising or descend mutually.
Here bellows (Bellows:132) have been equipped with again, bellows have surrounded in above-mentioned upper and lower part picker 120,124, from bottom picker 124 towards the cabin the exposed part in 110 bottom sides, that is to say the bottom picker 124 that between the bottom surface in above-mentioned cabin 110 and molding needle plate 130, exposes.
Above-mentioned elastomeric element 128 is a kind of compression springs, and its upper end is fixed on the coupling slot 122b of top picker 120, and the lower end is fixed on the coupling slot 126a of bottom picker 124.In other words, connect by above-mentioned elastomeric element 128 and fixing upper and lower part picker 120,124.
The suitable length of above-mentioned coupling slot 122b, 126a can be fixed the upper and lower end of a part of elastomeric element 128, and with the shape of the top and bottom of elastomeric element 128 in correspondence with each other.
Simultaneously, can directly form the pinhole for pattern drawing 116b that contains above-mentioned upper and lower part picker 120,124 respectively at the edge of above-mentioned lower electrode 114, add man-hour for convenience's sake, form the coupling aperture 114a of insert respectively at lower electrode 114, so that it has the diameter greater than the loading plate 122c area of top picker 120, afterwards insert 116 is inserted among the coupling aperture 114a, thereby can vertically form pinhole for pattern drawing 116b in the central authorities of this insert 116.
In other words, though it is not shown in the accompanying drawing, but, if directly on above-mentioned lower electrode 114, form pinhole for pattern drawing 116b, so, on the pinhole for pattern drawing 116b top of lower electrode 114, should form the corresponding groove 116a of cross loading plate 122c with top picker 120, at this moment, should form cross groove 116a at the pinhole for pattern drawing 116b of above-mentioned lower electrode 114, so the difficulty of processing height.
On the contrary, form the coupling aperture 114a of insert on the position of each the upper and lower part picker 120,124 in above-mentioned lower electrode 114 respectively, the upper and lower part picker is inserted on this coupling aperture 114a fixes, if at this time be inserted with the insert 116 of groove 116a, convenient like this processing.Form the pinhole for pattern drawing 116b that runs through central part on this insert, cross groove 116a is arranged at its top.
In addition, though not shown in the accompanying drawing, the part of bearing substrate S has formed deielectric-coating in lower electrode 114, can adsorb substrate S with electrostatic force, and this deielectric-coating is shaped by jet film.That is to say that above-mentioned lower electrode 114 usefulness aluminiums are made, its surface is coated with (Coating) one deck jet film.
So the operating state of the picker module of flat panel display manufacturing apparatus of the present invention shown in Fig. 5 a and Fig. 5 b, by the Handling device (not shown) of outside, under suitable height, is sent substrate S into 110 inside, cabin.
Then, the upper and lower part picker 120,124 of above-mentioned picker module, coupling protrusion 122a at above-mentioned top picker 120 is inserted under the state of bottom picker 124 coupling aperture 126b at the beginning, this top picker 120 and bottom picker 124 be according to the elasticity of elastomeric element 128, waits under the state that top picker 120 and bottom picker 124 engage one another.Under this state, promote molding needle plate 130 by drive unit, like this, upper and lower part picker 120,124 rises by the pinhole for pattern drawing 116b of insert 116, and bellows 132 shrink thereupon.
Next, above-mentioned upper and lower part picker 120,124 rises, and contacts with the substrate S bottom surface of sending into cabin 110, obtain surface support from each position after, Handling device will withdraw from cabin 110.Wherein, aforesaid substrate is on the loading plate 122c of top picker 120, sends into cabin 110 at appropriate heights.
Then, the upper and lower part picker 120,124 that supports aforesaid substrate S descends, and above-mentioned loading plate 122c is close to the groove 116a of insert 116, bearing substrate under substrate S bottom surface and lower electrode 114 state of contact.
Afterwards, allow the molding needle plate 130 of fixing several bottoms picker 124, descend by weight itself, like this, the upper and lower part picker 120,124 that connects by elastomeric element 128 also descends thereupon, and the loading plate 122c of supporting substrate S then arrives the groove 116a of insert 116.
At this moment, by drive unit above-mentioned molding needle plate 130 is reduced to assigned address, like this, the bottom picker 124 that is fixed on the molding needle plate 130 also descends thereupon, pass through the top picker 120 that elastomeric element 128 is fixed simultaneously, also be subjected to the flexibility decrease of this elastomeric element 128.Like this, loading plate 122c is close to the groove 116a of insert 116, that is to say, under the effect of the flexible adhesion that is equivalent to elastomeric element 128, loading plate 122c exerts pressure to pinhole for pattern drawing 116b, thereby sticks together tightly.
Next, utilize process gas that aforesaid substrate S implementing process is handled, and pinhole for pattern drawing 116b stop process gas to flow into by loading plate 122c, to prevent the generation of paradoxical discharge.And, in the upper and lower part picker 120,124, the loading plate 122c of top picker 120 is close to the insert 116 groove 116a on the lower electrode 114, so, the temperature difference and voltage difference can not take place, stain can not occur on the substrate S yet yet on top picker 120 and lower electrode 114.
Treat that the molding needle plate 130 of fixing picker 124 bottoms, above-mentioned bottom rises to suitable height, alleviates the elasticity of the elastomeric element 128 that is applied to upper and lower part picker 120,124 after the PROCESS FOR TREATMENT end of aforesaid substrate S.
Afterwards, by above-mentioned drive unit, molding needle plate 130 is promoted to the position of sending substrate S after, outside Handling device is sent the outside with substrate S, the function of above-mentioned molding needle plate is, allows 120,124 liftings simultaneously of several upper and lower parts picker.
" embodiment 2 "
With reference to Fig. 6 a, the picker module of second embodiment of the present invention middle plateform display manufacturing equipment is made up of shell 220, picker 219, lifter pin 217, compression spring 225, spring guide 240.Wherein, picker 219: liftable, be positioned at above-mentioned shell 220 inside, it is inner or rise that the upper end is positioned at lower electrode, protrude in lower electrode above.Lifter pin 217: the lifter pin coupling unit 218 that top formation and above-mentioned picker 219 bottoms coincide.Compression spring 225: the upper inner face that connects the top and shell 220 of lifter pin coupling unit 218.Spring guide 240: guiding compression spring 225 between the both sides of the medial surface of shell 220 and lifter pin coupling unit 218.
Shown in Fig. 6 c, the outer cylinder of shell 220 is rounded, and central authorities are cylindrical that perforation is arranged.Its top has formed trapezoidal inboard protuberance 220a with dog screw 232 fixed support plate 230 on the inner cylinder of bottom, the lifter pin coupling unit 218 of lifter pin 217 is blocked by above-mentioned inboard protuberance 220a, prevents that it from coming off in the outside of shell.Above-mentioned support plate 230 is formed by the plate-like fuselage of annular with from the atubular extension portion that inner cylinder is extended downwards.At this moment, fuselage cover above-mentioned shell above, extension is inserted in the perforation.Shown in Fig. 6 a and Fig. 6 b, compression spring 225 is inserted after the perforation of shells, utilize the fuselage of the above-mentioned support plate 230 of above-mentioned screw and shell 220 above.When above-mentioned support plate 230 was fixed on shell 220, compression spring 225 was under compressive state, between above-mentioned lifter pin coupling unit 218 and above-mentioned support plate, so that picker 219 descends.At this moment, form the gap between the inboard of the outside of support plate 230 extensions and shell 220 perforation, assembling compression spring 225 and spring guide 240 in this gap.And above-mentioned shell 220 can adopt the good polyimide resin class material of electrical insulation capability, and perhaps aluminium also can assemble the spring guide that adopts polyimide resin class material to make on the madial wall.The effect of spring guide 240 is when compression spring 225 expands and shrinks, to prevent the spring distortion.At this moment, though the lower end of compression spring 225 be close to lifter pin 217 lifter pin coupling unit 218 above, also can be, and be close to above-mentioned supporting part at the downside of picker 219 formation supporting part.
When picker 219 rose by external driver device, compression spring 225 can further shrink, and when above-mentioned picker 219 descended, compression spring 225 expanded, and the needle plate of molding simultaneously descends, and allows picker 219 get back to original position.
Fig. 7 a and Fig. 7 b are the sectional views of the modification of picker module in the present embodiment.
With reference to Fig. 7 a, on the inboard protuberance 220a of the bottom of the lifter pin coupling unit 218 of picker module and shell between, can also assemble bolster 234.The effect of bolster 234 is, when compression spring 225 expanded, the contact-making surface that prevents shell 220 and lifter pin coupling unit 218 was impacted and produces cut.Sort buffer spare 234 can adopt materials such as rubber, sponge.In addition, shown in Fig. 7 b, we can be used as above-mentioned bolster with buffer spring 236.At this moment, the spring constant of buffer spring 236 should be limited to the upper end that does not influence picker 219 and insert the scope of electrostatic chuck inside.
" embodiment 3 "
The picker module 320 of present embodiment is made up of picker 322, fixed block 324, pin drive unit 326.
It at first is picker 322.As shown in Figure 8, be positioned on the lower electrode 314, be responsible for the lifting of substrate S.In the present embodiment, the cross section of this picker 322 upper end 322b is the adipose gland shape.Here said adipose gland is meant, as the shape of finger branch.This adipose gland can be 2 adipose glands, 3 adipose glands, 4 various forms such as adipose gland as shown in figure 11.2 adipose glands are meant that shown in Figure 11 a 2 branches are arranged, and this moment, best form was the parallel straight line of each branch.3 adipose glands are meant that shown in Figure 11 b 3 branches are arranged, and at this time, each branch is preferably formed as hexagonal angle, with the wide part of supporting substrate.At last, 4 adipose glands are meant that shown in Figure 11 c 4 branches are arranged, and at this time, each branch preferably is cross, with shape at an angle of 90, thus the wide part of supporting substrate equably.
Simultaneously, the pars intermedia of the picker 322 of present embodiment and bottom 322a, in order to have sufficient load capacity, preferably cylindrical.
Next is a fixed block 324.As shown in Figure 8, fixed block is inserted and secured on the top in the hole 316 of threading a needle, and has both allowed the upper end 322b of above-mentioned picker run through wherein, is close to the hole 316 of threading a needle again, infiltrates by the hole 316 of threading a needle to prevent process gas.In the present embodiment, formed on the fixed block 324 and the corresponding pore 324a of the shape of above-mentioned picker 322 upper end 322b.So the upper end 322b of above-mentioned picker will pass this fixed block 324 supporting substrate S.At this moment, the thickness of this fixed block 324 preferably approaches, so easily processing.In addition, the pore 324a shape of this fixed block 324, preferably corresponding with the upper end 322b shape of above-mentioned picker, area is also almost equal in the upper end of picker 322 322b area, so that when the upper end of above-mentioned picker 322 322b passes this pore 324a, the upper end 322b of picker 322 can be tightly card this fixed block 324.
In the present embodiment, the material of fixed block 324 is preferably identical with the material of above-mentioned lower electrode 314.Generally speaking, why producing stain on the position that picker 322 is arranged, is that the temperature difference and the voltage difference between lower electrode 314 and the picker 322 causes.If the material of fixed block 324 is identical with the material of lower electrode 314, and contact, so, do not produce the voltage difference and the temperature difference between lower electrode 314 and the picker, so can not produce stain on the substrate S with lower electrode 314.
In addition, the hole 316 of threading a needle that on the lower electrode 314 of present embodiment, forms, as shown in figure 10, it is trapezoidal that its cross section preferably is.That is to say, accept the above-mentioned internal diameter difference of threading a needle between hole 316 and the remainder of said fixing piece 324, so, with the position of positioning and fixing piece 324 naturally.Till the part that fixed block 324 inserts, the above-mentioned hole 316 of threading a needle forms large diameter, and the internal diameter of above-mentioned 316 bottoms, hole of threading a needle is identical with the diameter of picker 322.And fixed block 324 is greater than the lower diameter in hole 316 of threading a needle, and moves down in order to avoid be inserted in the fixed block 324 on picker 322 tops.
And walk downward more in this top of threading a needle hole 316, and diameter diminishes gradually, and we can also insert said fixing piece 324 in the hole 316 of threading a needle tightly.The advantage of this method is not need other fixtures, in the hole 316 of just fixed block 324 insertions can being threaded a needle.
Moreover be exactly pin drive unit 326, it combines with the bottom 322a of above-mentioned picker 322, and above-mentioned picker 322 is moved up and down.Possess several pickers 322 in the flat panel display manufacturing apparatus, move up and down in same speed and period.Therefore, preferably several pickers 322 are fixed on after the plate 326, drive this plate 326 up and down, make several pickers 322 have identical speed and work period.So this pin drive unit 326 preferably is made up of needle plate and drive motors.
At this moment, above-mentioned picker 322 as shown in figure 12, upper end 322a can separate composition with bottom 322b.Upper end 322a is parts of forming picker top, and its cross section is the adipose gland shape.And, the top contact substrate of this upper end 322a, thereby supporting substrate.At this time, the cross sectional shape of upper end 322a can become 2 adipose glands, 3 adipose glands, 4 different shapes such as adipose gland.
And bottom 322b combines with the bottom of above-mentioned upper end 322a, drives above-mentioned upper end 322a up and down, plays the intermediation that connects above-mentioned pin drive unit.This bottom 322b is preferably cylindrical.
Below, we illustrate the flat panel display manufacturing apparatus of assembling picker module in the foregoing description 3.In the present embodiment, evenly formed the hole of threading a needle on the whole lower electrode of flat panel display manufacturing apparatus, picker runs through each hole of threading a needle to be arranged.In recent years, adopt the length and the width of the size of substrate of flat panel display manufacturing apparatus processing to reach respectively more than the 2m, more and more be difficult to carry out a supporting substrate edge on one side, Yi Bian make the method for substrate elevating.Therefore, the flat panel display manufacturing apparatus of present embodiment has formed the hole of threading a needle as shown in figure 13 comprehensively on lower electrode 314, so that lower electrode supporting substrate edge not only, and middle section that also can supporting substrate.And, assembled above-mentioned picker and fixed block on this hole of threading a needle.
At this moment, picker has assembled in the central authorities of lower electrode, and the cross sectional shape of this picker upper end is 4 adipose glands or 3 adipose glands, and the edge of above-mentioned lower electrode, preferably fit on end cross-sectional shape is the picker of 2 adipose glands.Central authorities' 4 adipose glands of assembling of lower electrode or the picker of 3 adipose glands, with the wide part of supporting substrate, and in the marginal portion of substrate, a picker needs the substrate supported area narrow, so assemble the picker of 2 adipose glands, so more helps processing.And, 2 adipose glands of 2 adipose gland pickers, preferably parallel with the limit of lower electrode, wounded substrate so neither, also supporting substrate stably.
" embodiment 4 "
The several picker modules 420 of assembling in the present embodiment, and the bottom assembled molding needle plate 440, so that promote simultaneously or decline picker module 420.
Above-mentioned picker module 420 as shown in figure 14, by upper and lower flange 422b, 422a, bellows 424, first and second picker 426a, 426b, pin coupler 430, pin coupler fixture 432 is formed.
Above-mentioned upper and lower flange 422b, 422a are disk or square plate shape, and lower flange 422a is by being bolted to molding needle plate 440, and upper flange 422b is by being bolted to the lower wall that forms the cabin 410 of vertical line with this lower flange 422a.
Wherein, above-mentioned upper flange 422b has an Oring-seal in order to keep the air-tightness of cabin 410 and lower wall on the contact-making surface of its upper flange 422b and cabin 410 lower walls.
And, between above-mentioned upper and lower flange 422b, 422a, fixed the top and bottom of bellows 424 respectively, to keep the air-tightness between this upper and lower flange 422b, 422a, also be furnished with rubber components etc., so that according to position contraction or lax.
The above-mentioned first picker 426a connects or forces towards the vertical direction spiral by several parts to insert, and links into an integrated entity.And the lowermost end of the above-mentioned first picker 426a bottom by the method that spiral connects or forces to insert, is fixed on the central upper portion of lower flange 422a.In addition, it is trapezoidal that top is, and diameter becomes greatly gradually, and oval accommodating groove 428 is arranged at this trapezoidal top.And trapezoidal outer cylinder forms external screw thread.
Above-mentioned pin coupler 430 is trapezoidal, and there is the protrusion of insertion 430a the lower end, and diameter is less than upper end diameter.Above-mentioned insertion protrusion 430a ovalize is less than the accommodating groove 428 of the first picker 426a, so that be inserted in this accommodating groove 428.
Wherein, above-mentioned accommodating groove 428 and the insertion protrusion 430a that is inserted into the pin coupler 430 of this accommodating groove 428, being separated by is equivalent to the suitable distance of " l ", and this gap is about 1mm.Therefore, insert the pin coupler 430 of above-mentioned accommodating groove 428, the horizontal direction in the scope about 1mm towards about the front and back moves.
Above-mentioned pin coupler fixture 432, the cylindrical lower part inner cylinder of its underpart opening forms internal thread, so that the external screw thread of the outer cylinder by being positioned at the above-mentioned first picker 426a is fixed, form perforation in center upper portion, so that the second picker 426b inserts.
Wherein, above-mentioned pin coupler fixture 432 is fixed on the top of the second picker 426b, comes off in case insert the pin coupler 430 of the accommodating groove 428 of the second picker 426b.
The above-mentioned second picker 426b is a kind of vertical pin, and the center upper portion of above-mentioned pin coupler 430 is porose, and above-mentioned second picker inserts this hole, and its lowermost end is inserted into the central authorities of pin coupler 430, fixes by the mode that spiral connects or pressure is inserted.
" embodiment 5 "
The picker 520 of present embodiment inserts pin shell 522 after thickness direction formation certain intervals runs through the patchhole 514a that forms earlier as shown in figure 15, and lower electrode 514 is inserted in the above-mentioned pin shell 522.
Above-mentioned picker 520 is vertical aciculiform shape, lifting under the state of insertion pin shell 522 central parts, and above-mentioned pin shell is inserted among the patchhole 514a of above-mentioned lower electrode 514.
Above-mentioned pin shell 522 forms a passage in the space that above-mentioned lower electrode 514 contacts with substrate S, so that helium and air flow into this attaching space, its central authorities are porose, the external diameter of the internal diameter in this hole and above-mentioned picker 520 is corresponding, and (internal diameter is a size, so can not be used as parts, its outer cylinder lower end forms the extension 522a of flange-like, and the top two ends of above-mentioned extension 522a possess a pair of interval protrusion 522c that is as the criterion relative with central point.
Above-mentioned pin shell 522 as shown in figure 16, above above-mentioned extension 522a, groove 522b is radial from the upper end of outer cylinder, its quantity is 8 in the present embodiment, but its quantity can increase and decrease in the practical operation.
The effect of above-mentioned interval protrusion 522c is, allow the bottom surface of pin shell 522 and above-mentioned lower electrode 514 isolate, treat after the space between gas inflow lower electrode 514 and the pin shell 522, along the groove 522b of above-mentioned pin shell 522, be fed to the attaching space of substrate S and lower electrode 514.
Finally, under the attaching space pressure of aforesaid substrate S and lower electrode 514 and situation that substrate S external pressure equates, this substrate S rises, so substrate S is loading and unloading easily under situation without any damage.
Especially above-mentioned groove 522b, though not shown in the accompanying drawing, can be radial in the inner cylinder of pin shell 522.
Therefore, picker module by present embodiment, substrate is discharged in the process of (dechucking), the impaired phenomenon of substrate S in order to prevent because with the pressure differential of the contact site of the lower electrode 514 of carrying aforesaid substrate S, the pin shell 522 that connects above-mentioned picker 520 outsides, form radial groove 522b, and above-mentioned extension 522a forms protrusion 522c at interval, produce under the state in gap at lower electrode 514, gas or air are by above-mentioned groove 522b, enter between substrate S and lower electrode 514, therefore, the bottom surface of substrate S and the pressure between the lower electrode equate with pressure above acting on substrate S.
In other words, under the space pressure between aforesaid substrate S and the lower electrode 514 and state that the external pressure of substrate S equates, substrate S is risen, so the loading and unloading of this substrate S are easy to.
In addition, the modification of the picker module of present embodiment as shown in figure 17, by picker 520 ' and pin shell 522 ' form, above-mentioned pin shell 522 ' on form a passage so that helium and air flow into the attaching space of above-mentioned lower electrode 514 and substrate S.
In other words, above-mentioned pin shell 522 ' the center porose, the internal diameter in this hole be equivalent to above-mentioned picker 520 ' external diameter, and the outer cylinder lower end forms the extension 522a ' of flange-like, flexure type groove 522b ' from the outer cylinder upper end to above-mentioned extension 522a periphery is radial, quantity in the present embodiment is 8, but its quantity can increase and decrease in the practical operation.
Finally, even above-mentioned pin shell 522 ' extension 522a ' above be close to the bottom surface of lower electrode 514, because the groove 522b ' above the periphery upper end of above-mentioned extension 522a ' is connected to has been arranged, between substrate S and lower electrode 514, has been able to supply gas and air.
" embodiment 6 "
As Figure 18 or shown in Figure 19, inside is made up of vacuum chamber 600 and electrode part 610.Wherein, vacuum chamber 600: under high vacuum state, substrate is carried out PROCESS FOR TREATMENT.Electrode part 610: be positioned at the downside of above-mentioned vacuum chamber 600, above bearing substrate S.At this moment, assembling electrostatic chuck (not shown) in the above-mentioned electrode part 610.
In addition, different with original technology, needle plate 622,632 is made up of central plate 632 and edge plate 622.Wherein, central plate 632: with picker 630 combinations that promote substrate S center.Edge plate 622: with picker 620 combinations that promote substrate S edge.Above-mentioned needle plate connects drive unit 626,636 by cylinder shaft 624,634, the above-mentioned picker 620,630 of independent lift, and wherein, above-mentioned cylinder shaft 624,634 makes up with above-mentioned central plate and edge plate 622,632 separately.
At this moment, the controller 640 of above-mentioned drive unit 626,636 is realized being electrically connected, utilize above-mentioned controller 640, promote above-mentioned central plate 632 and edge plate 622 every a period of time, and assemble closed circuit (not shown) on the above-mentioned drive unit, after promptly promoting above-mentioned edge plate 622 earlier, promote above-mentioned central plate 632 again, and above-mentioned closed circuit allows preferably the rising or falling speed of central plate 632 be higher than the rising or falling speed of edge plate 622.Because above-mentioned edge plate 622 promotes prior to central plate 632, so, when substrate S culminates, make aforesaid substrate keep balance.
Below, in conjunction with Figure 20 a or Figure 20 b, the substrate method for improving of present embodiment is described.
With reference to Figure 20 a or Figure 20 b, treat that plasma finishes after the PROCESS FOR TREATMENT, according to controller 640 signals that are electrically connected with above-mentioned drive unit 636, promote edge plate 622 earlier, substrate is discharged so, thereby the edge part of aforesaid substrate promotes, meanwhile, above-mentioned controller starts drive unit 626, promotes above-mentioned central plate 622.Because above-mentioned edge plate 622 promotes prior to central plate 632, so, can keep balance when culminating for above-mentioned central plate 632 and edge plate 622, allow above-mentioned controller 640 control hoisting velocities.
" embodiment 7 "
The downside that each picker 724 of present embodiment all extends to cabin 710 is exposed, the plate 730 while liftings of fix by the bottom surface of this exposed picker 724, in order to surround exposed position, assemble inboard bellows (Bellows:732), these bellows surround under the state of above-mentioned picker 724 from two ends, are separately fixed on electrode part 714 and the plate 730.
And bellows 732 have also been assembled in the outside of above-mentioned inboard bellows 732, under the state that these outside bellows 732 are fixed at two ends, between cabin 710 lower walls and plate 730.
In other words, the effect of above-mentioned inboard bellows 732 is under the state that surrounds picker 724, to keep the bubble-tight while of space between pinhole for pattern drawing and the plate 730, the realization intercommunication.And the effect of outside bellows 732 is under the state that surrounds inboard bellows 732, to keep the space air-tightness between cabin 710 lower walls and the plate 730.
Then, the inside of above-mentioned each pinhole for pattern drawing is connected to plate 730 by inboard bellows 732.Form perforation on this plate 730, and assemble the pumping line 744 that each perforation can both intercommunication, the tail end of this pumping line 744 has assembled high-vacuum pump 740.On front end-pumping line 744 lines of this high-vacuum pump 740 high vacuum surge tank 742 is arranged, and assembled controlled valve 746 on front end-pumping line 744 lines of above-mentioned high vacuum surge tank 742.
Therefore costing an arm and a leg of above-mentioned high-vacuum pump 740, can replace with the vacuum pump of less expensive, and this high-vacuum pump is positioned at the tail end of pumping line 744, and in running order all the time, so that above-mentioned high vacuum surge tank 742 inner sustain high vacuum states.
Above-mentioned high vacuum surge tank 742, by pumping line 744, allow each pinhole for pattern drawing realize being communicated with, and be positioned on above-mentioned pumping line 744 lines, open controlled valve 746 when having only process gas to flow into cabin 710, on this pinhole for pattern drawing, keep high vacuum state thus by pinhole for pattern drawing.
In other words, above-mentioned high-vacuum pump 740 is in running order all the time, so high vacuum surge tank 742 inside that are adjacent also keep high vacuum state.Then, when process gas flows into 710 inside, cabin, by the 746 open high vacuum surge tanks 742 of the controlled valve on pumping line 744 lines.Like this, in each pinhole for pattern drawing inside, high vacuum surge tank 742 can be kept high vacuum state, and process gas can not infiltrate the pinhole for pattern drawing inside that is in high vacuum state.
Therefore, the picker of present embodiment, for in the process of treatment substrate S, prevent that the process gas that flows into upper electrode (not shown) from infiltrating in the pinhole for pattern drawing of electrode part 714, and in this pinhole for pattern drawing, produce paradoxical discharge, thereby cause the phenomenon of arcization (Arcing), be equipped with pumping line 744 on the picker, so that each pinhole for pattern drawing and inner intercommunication.Then, each pumping line 744 is communicated with a pumping line 744, and the tail end of this pumping line 744 has high-vacuum pump 740 and high vacuum surge tank 742.And the front end of high vacuum surge tank 742 is equipped with controlled valve 746.
In other words, above-mentioned each pinhole for pattern drawing all connects pumping line 744, and by high vacuum surge tank 742 inside that in running order all the time high-vacuum pump 740 is realized intercommunication, will continue to keep high vacuum state.Therefore, when substrate S is carried out PROCESS FOR TREATMENT, when process gas flows into cabin 710 by upper electrode, open controlled valve 746, because the high vacuum surge tank of the being opened 742 inner high vacuum states that keep are so pinhole for pattern drawing inside also forms high vacuum, process gas can not infiltrate in the pinhole for pattern drawing, thereby prevents the phenomenon of paradoxical discharge.
Then, after above-mentioned PROCESS FOR TREATMENT finished, process gas stopped to flow into, and just closes the controlled valve 746 that is positioned at pumping line 744 line ends, under the operating state that keeps high-vacuum pump 740, again the high vacuum surge tank 742 inner high vacuum states that keep.
The picker module of flat panel display manufacturing apparatus of the present invention has the effect that prevents the paradoxical discharge phenomenon.In the picker of several upper and lower parts, the cross loading plate is installed on the picker of top, be connected with the top of lower electrode with this.At this top picker and bottom picker elastomeric element is installed, during mobile downwards bottom picker, the top picker also moves down simultaneously, and above-mentioned pinhole for pattern drawing is subjected to the loading plate effect, closely be connected with elastomeric element with plumbness, thereby prevent the infiltration of process gas.
On the pinhole for pattern drawing of the insertion parts on the above-mentioned lower electrode, loading plate is installed, the upper and lower part picker is connected with lower electrode, just shift so do not produce the temperature difference and voltage difference, have the effect that can prevent the substrate stain (Mura) that causes because of the temperature difference and voltage difference.
And the molding needle plate among the present invention and enclosure be equipped with elastomeric element and buffer spring, has the effect that suppresses the particle generation that contact repeatedly of molding needle plate and shell cause.
The present invention also has the following advantages: though the contact area of picker upper end is little, but the wide part of supporting substrate, thus in the lifting process of substrate, avoid substrate impaired; The fixed block that use is convenient to process stops picker and the space between the hole of threading a needle, thereby prevents that process gas or refrigerating gas from infiltrating into the hole of threading a needle.
And at picker of the present invention in PROCESS FOR TREATMENT, have with lower electrode the temperature difference and voltage difference do not take place, thereby do not produce stain, but the advantage of the central part of supporting substrate.
The picker module of flat panel display manufacturing apparatus of the present invention also has the effect that prevents the substrate breakage.When release substrate, to the attaching space supply gas or the air of substrate and lower electrode, make under the state identical of aforesaid substrate bottom with the pressure on substrate top, the rising substrate, thus prevent to cause the substrate breakage because of pressure differential.
The present invention utilizes several drive units, makes under the different situation of the picker lifting time of edge part and central part and promotes substrate, thereby prevent that the centre from producing local depression, and promote substrate under stable state, has the effect that prevents the substrate breakage.
In the present invention, finish, prevent that all the time process gas from infiltrating into pinhole for pattern drawing, thereby play the effect of arcization (Arcing) phenomenon that prevents paradoxical discharge and cause up to PROCESS FOR TREATMENT.
Claims (4)
1. substrate board treatment comprises:
Lower electrode, substrate is placed on it; And
Support places the picker module of the described substrate on the described lower electrode, and wherein said picker module comprises:
The top picker, it passes the pinhole for pattern drawing that is formed on the described lower electrode and moves up and down to support described substrate;
The bottom picker is coupled with the lower end of described top picker, and has the holding tank of the upper end that is formed at described bottom picker; And
The pin coupler, described pin coupler upper end forms porose, wherein, insert in the described hole of described pin coupler the lower end of described top picker, and described pin coupler also has the insertion protrusion, and this insertion protrusion is positioned at the lower end of this pin coupler and inserts described holding tank
Wherein, described insertion protrusion makes described insertion protrusion to move by along continuous straight runs in described holding tank less than described holding tank.
2. device according to claim 1, wherein said holding tank and described insertion protrusion ovalize.
3. device according to claim 1 and 2, wherein said picker module also comprises pin coupler fixture, the upper end of described fixture and described bottom picker is coupled, and prevent that described insertion protrusion and described holding tank are separated, described pin coupler fixture has perforation, and this perforation is inserted in the lower end of described top picker.
4. device according to claim 1 and 2, also comprise chamber, described lower electrode is installed in this chamber, wherein said picker module also comprises a plate that is positioned at described chamber lower wall below, the lower wall of described plate and described chamber is spaced apart, a upper flange that is connected to described chamber lower wall, a lower flange that is connected to picker lower end, described bottom and described plate, and bellows that connect described upper flange and lower flange.
Applications Claiming Priority (14)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2005-0038557 | 2005-05-09 | ||
| KR1020050038557A KR100596328B1 (en) | 2005-05-09 | 2005-05-09 | Lift pin module of fpd manufacturing machine |
| KR10-2005-0038552 | 2005-05-09 | ||
| KR1020050038552A KR100566324B1 (en) | 2005-05-09 | 2005-05-09 | Lift pin module of fpd manufacturing machine |
| KR10-2005-0052001 | 2005-06-16 | ||
| KR1020050052001A KR100648402B1 (en) | 2005-06-16 | 2005-06-16 | Apparatus for processing substrate with plasma |
| KR10-2005-0066580 | 2005-07-22 | ||
| KR1020050066580A KR101235623B1 (en) | 2005-07-22 | 2005-07-22 | Lift Pin Assembly and Plasma Processingg Apparatus |
| KR10-2005-0067318 | 2005-07-25 | ||
| KR1020050067318A KR100553102B1 (en) | 2005-07-25 | 2005-07-25 | Lift pin module and apparatus for manufacturing fpd that use thereof |
| KR1020050131712A KR100920384B1 (en) | 2005-12-28 | 2005-12-28 | Lift pin module of fpd manufacturing machine |
| KR10-2005-0131712 | 2005-12-28 | ||
| KR1020050134676A KR100943433B1 (en) | 2005-12-30 | 2005-12-30 | Method Thereof Lifting and Glass Lifting Modules |
| KR10-2005-0134676 | 2005-12-30 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006100798182A Division CN100511634C (en) | 2005-05-09 | 2006-05-09 | Lift pin module of FPD manufacturing machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101308806A CN101308806A (en) | 2008-11-19 |
| CN101308806B true CN101308806B (en) | 2011-02-02 |
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ID=37180121
Family Applications (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006100798182A Expired - Fee Related CN100511634C (en) | 2005-05-09 | 2006-05-09 | Lift pin module of FPD manufacturing machine |
| CN2008100857118A Expired - Fee Related CN101261791B (en) | 2005-05-09 | 2006-05-09 | Lift pin module of FPD manufacturing machine |
| CN2008100857048A Active CN101308806B (en) | 2005-05-09 | 2006-05-09 | Lift pin module of fpd manufacturing machine |
| CN200810085709A Expired - Fee Related CN100592492C (en) | 2005-05-09 | 2006-05-09 | Lift pin module of FPD manufacturing machine |
Family Applications Before (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006100798182A Expired - Fee Related CN100511634C (en) | 2005-05-09 | 2006-05-09 | Lift pin module of FPD manufacturing machine |
| CN2008100857118A Expired - Fee Related CN101261791B (en) | 2005-05-09 | 2006-05-09 | Lift pin module of FPD manufacturing machine |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200810085709A Expired - Fee Related CN100592492C (en) | 2005-05-09 | 2006-05-09 | Lift pin module of FPD manufacturing machine |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR100566324B1 (en) |
| CN (4) | CN100511634C (en) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100850240B1 (en) | 2007-09-06 | 2008-08-04 | 주식회사 에이디피엔지니어링 | Apparatus for joining of substrate |
| KR100899175B1 (en) | 2007-09-06 | 2009-05-26 | 주식회사 에이디피엔지니어링 | Apparatus for joining of substrate |
| KR100850239B1 (en) * | 2007-09-06 | 2008-08-04 | 주식회사 에이디피엔지니어링 | Apparatus for joining of substrate |
| KR101312501B1 (en) * | 2011-03-02 | 2013-10-01 | 엘아이지에이디피 주식회사 | Lift pin module and apparatus for manufacturing of FPD including the same |
| KR101447888B1 (en) | 2012-12-21 | 2014-10-08 | 주식회사 테스 | Substrate treating apparatus |
| CN103903947B (en) * | 2012-12-26 | 2016-05-11 | 中微半导体设备(上海)有限公司 | A kind of plasma processor and operation method thereof |
| JP2014184998A (en) * | 2013-03-22 | 2014-10-02 | Dainippon Screen Mfg Co Ltd | Method and device for transfer of plate-like conveyed object, and pattern forming apparatus |
| CN104658957B (en) * | 2013-11-18 | 2018-03-06 | 北京北方华创微电子装备有限公司 | Ejector pin mechanism and plasma processing device |
| KR101738986B1 (en) * | 2015-12-07 | 2017-05-24 | 주식회사 디엠에스 | Substrate Processing Apparatus including Lift pin assembly |
| CN105947676B (en) * | 2016-06-29 | 2018-01-30 | 武汉华星光电技术有限公司 | Interchangeable adsorbent equipment |
| CN108010838B (en) * | 2016-10-27 | 2020-09-04 | 中微半导体设备(上海)股份有限公司 | Plasma processing apparatus and method for measuring temperature of silicon wafer |
| CN106582915A (en) * | 2016-12-31 | 2017-04-26 | 合肥优亿科机电科技有限公司 | Automatic electrode probing device of super clean bench |
| SG11202009058SA (en) * | 2018-07-30 | 2020-10-29 | Ulvac Techno Ltd | Substrate lifting apparatus and substrate transferring method |
| KR20210076345A (en) | 2019-12-16 | 2021-06-24 | 삼성전자주식회사 | Lift pin module |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6120609A (en) * | 1996-10-25 | 2000-09-19 | Applied Materials, Inc. | Self-aligning lift mechanism |
-
2005
- 2005-05-09 KR KR1020050038552A patent/KR100566324B1/en active Pre-grant Review Request
-
2006
- 2006-05-09 CN CNB2006100798182A patent/CN100511634C/en not_active Expired - Fee Related
- 2006-05-09 CN CN2008100857118A patent/CN101261791B/en not_active Expired - Fee Related
- 2006-05-09 CN CN2008100857048A patent/CN101308806B/en active Active
- 2006-05-09 CN CN200810085709A patent/CN100592492C/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6120609A (en) * | 1996-10-25 | 2000-09-19 | Applied Materials, Inc. | Self-aligning lift mechanism |
Non-Patent Citations (1)
| Title |
|---|
| JP特开2004-343032A 2004.12.02 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101261791B (en) | 2011-01-19 |
| CN101308806A (en) | 2008-11-19 |
| KR100566324B1 (en) | 2006-03-31 |
| CN100592492C (en) | 2010-02-24 |
| CN100511634C (en) | 2009-07-08 |
| CN101261791A (en) | 2008-09-10 |
| CN1877806A (en) | 2006-12-13 |
| CN101261953A (en) | 2008-09-10 |
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