CN101410988A - 不合并情况下的沟槽加宽 - Google Patents
不合并情况下的沟槽加宽 Download PDFInfo
- Publication number
- CN101410988A CN101410988A CNA2007800108866A CN200780010886A CN101410988A CN 101410988 A CN101410988 A CN 101410988A CN A2007800108866 A CNA2007800108866 A CN A2007800108866A CN 200780010886 A CN200780010886 A CN 200780010886A CN 101410988 A CN101410988 A CN 101410988A
- Authority
- CN
- China
- Prior art keywords
- side wall
- wall surface
- groove
- barrier layer
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims abstract description 104
- 239000000758 substrate Substances 0.000 claims abstract description 57
- 238000000034 method Methods 0.000 claims abstract description 42
- 230000004888 barrier function Effects 0.000 claims description 39
- 239000003990 capacitor Substances 0.000 claims description 29
- 238000005530 etching Methods 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 11
- 230000003647 oxidation Effects 0.000 claims description 10
- 238000007254 oxidation reaction Methods 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 10
- 239000010703 silicon Substances 0.000 claims description 10
- 229910052732 germanium Inorganic materials 0.000 claims description 7
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 5
- 238000001039 wet etching Methods 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 10
- 230000000903 blocking effect Effects 0.000 abstract 3
- 239000010410 layer Substances 0.000 description 36
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 32
- 238000005229 chemical vapour deposition Methods 0.000 description 9
- 150000004767 nitrides Chemical class 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 238000001020 plasma etching Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 239000011241 protective layer Substances 0.000 description 6
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 229910010271 silicon carbide Inorganic materials 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 201000006549 dyspepsia Diseases 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/92—Capacitors with potential-jump barrier or surface barrier
- H01L29/94—Metal-insulator-semiconductors, e.g. MOS
- H01L29/945—Trench capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66083—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices
- H01L29/66181—Conductor-insulator-semiconductor capacitors, e.g. trench capacitors
Abstract
Description
Claims (30)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/420,527 US7375413B2 (en) | 2006-05-26 | 2006-05-26 | Trench widening without merging |
US11/420,527 | 2006-05-26 | ||
PCT/EP2007/054769 WO2007137946A2 (en) | 2006-05-26 | 2007-05-16 | Trench widening without merging |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101410988A true CN101410988A (zh) | 2009-04-15 |
CN101410988B CN101410988B (zh) | 2011-04-27 |
Family
ID=38325289
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007800108866A Expired - Fee Related CN101410988B (zh) | 2006-05-26 | 2007-05-16 | 不合并情况下的沟槽加宽 |
Country Status (6)
Country | Link |
---|---|
US (3) | US7375413B2 (zh) |
EP (1) | EP2022096A2 (zh) |
JP (1) | JP5328642B2 (zh) |
CN (1) | CN101410988B (zh) |
TW (1) | TW200818302A (zh) |
WO (1) | WO2007137946A2 (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102201371A (zh) * | 2010-03-26 | 2011-09-28 | 中芯国际集成电路制造(上海)有限公司 | 沟槽的制造方法 |
CN103296000A (zh) * | 2012-02-24 | 2013-09-11 | 英飞凌科技股份有限公司 | 沟槽电容器和形成该沟槽电容器的方法 |
CN105765714A (zh) * | 2013-09-11 | 2016-07-13 | 格罗方德半导体股份有限公司 | 用于提高beol介电性能的硅通孔结构和方法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7709320B2 (en) | 2006-06-28 | 2010-05-04 | International Business Machines Corporation | Method of fabricating trench capacitors and memory cells using trench capacitors |
US20140120687A1 (en) | 2012-10-31 | 2014-05-01 | International Business Machines Corporation | Self-Aligned Silicide Bottom Plate for EDRAM Applications by Self-Diffusing Metal in CVD/ALD Metal Process |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4797373A (en) * | 1984-10-31 | 1989-01-10 | Texas Instruments Incorporated | Method of making dRAM cell with trench capacitor |
JPS63166258A (ja) * | 1986-12-26 | 1988-07-09 | Toshiba Corp | 半導体記憶装置 |
US5059544A (en) * | 1988-07-14 | 1991-10-22 | International Business Machines Corp. | Method of forming bipolar transistor having self-aligned emitter-base using selective and non-selective epitaxy |
US5323053A (en) * | 1992-05-28 | 1994-06-21 | At&T Bell Laboratories | Semiconductor devices using epitaxial silicides on (111) surfaces etched in (100) silicon substrates |
US5656535A (en) | 1996-03-04 | 1997-08-12 | Siemens Aktiengesellschaft | Storage node process for deep trench-based DRAM |
US6087239A (en) * | 1996-11-22 | 2000-07-11 | Micron Technology, Inc. | Disposable spacer and method of forming and using same |
US5891807A (en) | 1997-09-25 | 1999-04-06 | Siemens Aktiengesellschaft | Formation of a bottle shaped trench |
US6018174A (en) | 1998-04-06 | 2000-01-25 | Siemens Aktiengesellschaft | Bottle-shaped trench capacitor with epi buried layer |
US6190988B1 (en) | 1998-05-28 | 2001-02-20 | International Business Machines Corporation | Method for a controlled bottle trench for a dram storage node |
US6232171B1 (en) | 1999-01-11 | 2001-05-15 | Promos Technology, Inc. | Technique of bottle-shaped deep trench formation |
US6403412B1 (en) | 1999-05-03 | 2002-06-11 | International Business Machines Corp. | Method for in-situ formation of bottle shaped trench by gas phase etching |
US6740555B1 (en) | 1999-09-29 | 2004-05-25 | Infineon Technologies Ag | Semiconductor structures and manufacturing methods |
JP3457236B2 (ja) | 1999-11-05 | 2003-10-14 | 茂徳科技股▲ふん▼有限公司 | 深いトレンチキャパシター蓄積電極の製造方法 |
DE10016340C1 (de) | 2000-03-31 | 2001-12-06 | Promos Technologies Inc | Verfahren zur Herstellung von flaschenförmigen Tiefgräben zur Verwendung in Halbleitervorrichtungen |
US6365485B1 (en) | 2000-04-19 | 2002-04-02 | Promos Tech., Inc, | DRAM technology of buried plate formation of bottle-shaped deep trench |
US6495411B1 (en) | 2000-07-13 | 2002-12-17 | Promos Technology Inc. | Technique to improve deep trench capacitance by increasing surface thereof |
JP3531613B2 (ja) * | 2001-02-06 | 2004-05-31 | 株式会社デンソー | トレンチゲート型半導体装置及びその製造方法 |
TWI291735B (en) | 2002-01-28 | 2007-12-21 | Nanya Technology Corp | Method for forming bottle-shaped trench in semiconductor substrate |
TWI291736B (en) | 2002-02-05 | 2007-12-21 | Nanya Technology Corp | Method for forming bottle-shaped trench in semiconductor substrate |
TW538497B (en) | 2002-05-16 | 2003-06-21 | Nanya Technology Corp | Method to form a bottle-shaped trench |
TW550741B (en) | 2002-08-20 | 2003-09-01 | Nanya Technology Corp | Method for forming a bottle trench |
TW554521B (en) | 2002-09-16 | 2003-09-21 | Nanya Technology Corp | Process for forming a bottle-shaped trench |
US6696344B1 (en) | 2003-03-10 | 2004-02-24 | Nanya Technology Corporation | Method for forming a bottle-shaped trench |
TW582087B (en) | 2003-04-09 | 2004-04-01 | Nanya Technology Corp | Method of forming bottle trench |
US6767786B1 (en) | 2003-04-14 | 2004-07-27 | Nanya Technology Corporation | Method for forming bottle trenches by liquid phase oxide deposition |
US7115934B2 (en) | 2004-03-26 | 2006-10-03 | International Business Machines Corporation | Method and structure for enhancing trench capacitance |
US7129129B2 (en) | 2004-03-29 | 2006-10-31 | International Business Machines Corporation | Vertical device with optimal trench shape |
-
2006
- 2006-05-26 US US11/420,527 patent/US7375413B2/en active Active
-
2007
- 2007-05-10 TW TW096116637A patent/TW200818302A/zh unknown
- 2007-05-16 EP EP07729217A patent/EP2022096A2/en not_active Withdrawn
- 2007-05-16 JP JP2009511475A patent/JP5328642B2/ja not_active Expired - Fee Related
- 2007-05-16 CN CN2007800108866A patent/CN101410988B/zh not_active Expired - Fee Related
- 2007-05-16 WO PCT/EP2007/054769 patent/WO2007137946A2/en active Application Filing
- 2007-12-17 US US11/957,615 patent/US7700434B2/en not_active Expired - Fee Related
-
2008
- 2008-04-15 US US12/103,000 patent/US7821098B2/en not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102201371A (zh) * | 2010-03-26 | 2011-09-28 | 中芯国际集成电路制造(上海)有限公司 | 沟槽的制造方法 |
CN103296000A (zh) * | 2012-02-24 | 2013-09-11 | 英飞凌科技股份有限公司 | 沟槽电容器和形成该沟槽电容器的方法 |
CN103296000B (zh) * | 2012-02-24 | 2016-11-23 | 英飞凌科技股份有限公司 | 沟槽电容器和形成该沟槽电容器的方法 |
US9508790B2 (en) | 2012-02-24 | 2016-11-29 | Infineon Technologies Ag | Trench capacitors and methods of forming the same |
CN105765714A (zh) * | 2013-09-11 | 2016-07-13 | 格罗方德半导体股份有限公司 | 用于提高beol介电性能的硅通孔结构和方法 |
Also Published As
Publication number | Publication date |
---|---|
US7821098B2 (en) | 2010-10-26 |
US20070273000A1 (en) | 2007-11-29 |
CN101410988B (zh) | 2011-04-27 |
TW200818302A (en) | 2008-04-16 |
JP2009538522A (ja) | 2009-11-05 |
US7700434B2 (en) | 2010-04-20 |
US20080132029A1 (en) | 2008-06-05 |
WO2007137946A2 (en) | 2007-12-06 |
JP5328642B2 (ja) | 2013-10-30 |
WO2007137946A3 (en) | 2008-03-13 |
US7375413B2 (en) | 2008-05-20 |
US20080191320A1 (en) | 2008-08-14 |
EP2022096A2 (en) | 2009-02-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9985131B2 (en) | Source/drain profile for FinFET | |
US9892912B2 (en) | Method of manufacturing stacked nanowire MOS transistor | |
US9917186B2 (en) | Semiconductor device with control structure including buried portions and method of manufacturing | |
US8841701B2 (en) | FinFET device having a channel defined in a diamond-like shape semiconductor structure | |
KR101850202B1 (ko) | Finfet 디바이스 및 그 제조 방법 | |
KR20170096987A (ko) | 반도체 디바이스 및 그 제조 방법 | |
KR20100022526A (ko) | 벌크 기판 상에 제조되는 분리된 트라이-게이트 트랜지스터 | |
CN101410988B (zh) | 不合并情况下的沟槽加宽 | |
CN107342322B (zh) | 半导体装置的鳍状结构以及鳍式场效晶体管装置 | |
US9520484B2 (en) | Method for forming semiconductor nanowire transistors | |
US8987093B2 (en) | Multigate finFETs with epitaxially-grown merged source/drains | |
CN111029406A (zh) | 一种半导体器件及其制备方法 | |
CN107464846A (zh) | 场效应晶体管和半导体结构 | |
US7129129B2 (en) | Vertical device with optimal trench shape | |
US11575045B2 (en) | Semiconductor device and manufacturing method thereof | |
CN109427907B (zh) | 半导体器件及其制造方法 | |
CN101180713A (zh) | 制造双极晶体管的方法 | |
CN104253079A (zh) | 浅沟槽隔离结构、包含其的晶体管及其制作方法 | |
CN113823688A (zh) | 半导体结构及其形成方法 | |
US9419076B1 (en) | Bipolar junction transistor | |
CN100505160C (zh) | 一种半导体结构及其制造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20171127 Address after: Grand Cayman, Cayman Islands Patentee after: GLOBALFOUNDRIES INC. Address before: American New York Patentee before: Core USA second LLC Effective date of registration: 20171127 Address after: American New York Patentee after: Core USA second LLC Address before: American New York Patentee before: International Business Machines Corp. |
|
TR01 | Transfer of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110427 Termination date: 20190516 |
|
CF01 | Termination of patent right due to non-payment of annual fee |