CN101435696B - Device and method for measuring light sheet thickness - Google Patents
Device and method for measuring light sheet thickness Download PDFInfo
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- CN101435696B CN101435696B CN200810136545XA CN200810136545A CN101435696B CN 101435696 B CN101435696 B CN 101435696B CN 200810136545X A CN200810136545X A CN 200810136545XA CN 200810136545 A CN200810136545 A CN 200810136545A CN 101435696 B CN101435696 B CN 101435696B
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- pilot hole
- sheet gauge
- measurement mechanism
- gauge measurement
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Abstract
The invention relates to a measuring device for measuring thickness of a large-sized sheet and a measuring method thereof. The measuring device comprises an angle base, a thickness measuring platform and a measurer, wherein the thickness measuring platform is provided with a positioning device; the positioning device comprises a fixing base arranged on the thickness measuring platform and a locking base arranged below the fixing base and fixedly connected with the fixing base; the fixing base is provided with a positioning hole running through the fixing base, a support mechanism is arranged in the fixing hole, the support mechanism comprises three spherical support faces extending out of an upper opening of the fixing hole, and the top points of the three spherical support faces form a support plane; and the locking base is also provided with a center hollow pipeline capable of vacuumizing the fixing hole, and the center hollow pipeline is communicated with a vacuum pump. The device adopts a positioning mode of three-point positioning support, thereby easily ensuring the positioning accuracy of the sheet and having good repeated measurement accuracy.
Description
Technical field
The present invention relates to a kind of measurement mechanism that is applied to the online thickness measure of large-scale sheet, and the measuring method of this measurement mechanism.
Background technology
At present, for the measurement mechanism that sheet gauge is measured, its positioning element is generally an accurately machined positioning reference plane, is placed on this positioning reference plane thin plate to be measured and clamping.Though the positioning reference plane is accurately machined, but inevitably there is situation in uneven thickness owing to the surface tension problem, for example some local perk or depression, when thin plate is placed on the positioning reference plane, relative board perk is understood in some position of thin plate, causes the deviation of sheet gauge measuring accuracy thus; In addition, when thin plate was placed on the positioning reference plane each time, thin plate can turn an angle by the relative positioning reference plane, and then the relative board perk of the diverse location of thin plate meeting causes the duplicate measurements precision of thin plate low thus.
In order to remedy above-mentioned deficiency, the slip-stick artist adopts milscale to carry out thickness measure sometimes, yet milscale is because there is considerable restraint the operation area of itself measuring, so be difficult to the central area of large-scale sheet is measured bearing accuracy and the low problem of repetitive positioning accuracy in the time of fundamentally to solve the large-scale sheet measurement.
Summary of the invention
Purpose of the present invention is exactly measurer for thickness and the measuring method that the large-scale sheet of a kind of bearing accuracy and repetitive positioning accuracy raising is provided in order to overcome the deficiencies in the prior art.
For achieving the above object, the technical solution used in the present invention is: a kind of sheet gauge measurement mechanism, comprise the angle seat, be arranged on the thickness measuring platform on the seat of described angle, be arranged on the cushion block on the described thickness measuring platform, be arranged on the crossbeam on the described cushion block, described crossbeam is provided with measuring appliance, described thickness measuring platform is provided with locating device, it is characterized in that: described locating device comprises the holder that is arranged on the described thickness measuring platform, the tightening seat that is arranged on described holder below and fixedlys connected with described holder, offer the pilot hole of the thickness that runs through described holder on the described holder, be provided with supporting mechanism in the described pilot hole, described supporting mechanism comprises three spherical of stretching out the upper shed portion of described pilot hole, and the summit of three described spherical constitutes a supporting plane; Also be provided with on the described tightening seat and be used for center vacuum pipeline that described pilot hole is vacuumized, described center vacuum pipeline is communicated with vacuum pump.
Described pilot hole is the taper hole that diameter increases from top to bottom gradually.
Described supporting mechanism is three isodiametric fulcrum balls.
The side surface of described pilot hole is provided with set collar, three described fulcrum balls mutually against and all be resisted against the inner surface of described set collar.
Described locating device also comprise be opened in described pilot hole around the side vacuum line, described side vacuum line is many, and regular distribution is around described pilot hole, each described side vacuum line also is communicated with vacuum pump.
Many described side vacuum line is pressed the circumferencial direction regular distribution around described pilot hole.
Another technical matters to be solved by this invention provides a kind of and the corresponding sheet gauge measuring method of said apparatus, and it comprises the steps:
(a) standard gauge block is placed on the supporting plane, opens vacuum pump, pilot hole is vacuumized by the center vacuum pipeline;
(b) start measuring appliance, utilize above-mentioned standard gauge block that measuring appliance is made zero;
(c) take off above-mentioned standard gauge block, thin plate is positioned on the supporting plane;
(d) open vacuum pump, pilot hole is vacuumized by the center vacuum pipeline;
(e) start measuring appliance once more, read sheet gauge numerical value.
The summit of three spherical forms a supporting plane, three summits support thin plate, between thin plate and the supporting mechanism with original " the face contact " of " some contact " replacement, " some contact " guarantees bearing accuracy easily, can guarantee thin plate be placed on the locating device at every turn after relatively board keep the very high depth of parallelism, guarantee the precision of sheet gauge measurement; Thin plate is placed at every turn on the locating device relatively that board keeps the very high depth of parallelism, guarantees that each duplicate measurements precision of measuring is good.
Description of drawings
Fig. 1 is the stereographic map of measurer for thickness;
Fig. 2 is the enlarged drawing of measuring appliance among Fig. 1;
Fig. 3 looks cut-open view for the master of locating device among Fig. 1;
Fig. 4 is the vertical view of locating device shown in Figure 3;
Wherein, 1, the tightening seat, 2, holder, 3, fulcrum ball, 4, set collar, 5, locating device, 11, the center vacuum pipeline, 12, the side vacuum line,
21, pilot hole,
61, thickness measuring platform, 62, cushion block, 63, crossbeam, 64, the angle seat,
7, measuring appliance, 71, installation base plate, 72, the probe base plate, 73, probe installs card extender, 74, laser probe, 75, limited block, 76, guide rail, 77, cylinder, 78, cylinder block.
Embodiment
Referring to measurer for thickness shown in Figure 1, comprise angle seat 64, be arranged on thickness measuring platform 61 on the described angle seat 64, be arranged on cushion block 62 on the described thickness measuring platform 61, be arranged on crossbeam 63 on the described cushion block 62, be arranged on measuring appliance 7 on the described crossbeam 63, be arranged on the locating device 5 on the described thickness platform 61.
Referring to the described measuring appliance 7 of Fig. 2, it comprises the installation base plate 71 that is arranged on the crossbeam 63, be fixed on the guide rail 76 on the installation base plate 71, the probe that is arranged on the described guide rail 76 that can slide is installed card extender 73, be fixed on the laser probe 74 on the described probe installation card extender 73, also be provided with cylinder block 78 on the described installation base plate 71, be fixed with cylinder 77 on the described cylinder block 78, the piston rod of described cylinder 77 is installed card extender 73 with described probe and is connected, and cylinder 77 can drive probe and card extender 73 is installed is positioned on the correct position of guide rail 76 so that laser probe 74 is positioned at the correct position of this measurement mechanism along the guide rail 76 installation card extender 73 that slides and will pop one's head in thus.Also be fixed with the range of movement of limited block 75 on the described installation base plate 71 with the piston rod of restriction cylinder 77.
Referring to locating device shown in Figure 35, comprise holder 2, the tightening seat 1 that is arranged on described holder 2 belows and fixedlys connected by screw thread with described holder 2, offer the pilot hole 21 of the taper that the thickness that runs through described holder 2 and diameter increase to lower surface gradually from the upper surface of holder 2 on the described holder 2, be provided with three isodiametric fulcrum balls 3 in the described pilot hole 21, the diameter of described fulcrum ball 3 is greater than the degree of depth of described pilot hole 21, then three fulcrum balls 3 stretch out from the upper shed portion of pilot hole 21, and the summit of three fulcrum balls 3 formation one is used to support the supporting plane of thin plate.This locating device 5 has replaced existing planar support mode by supported at three point thus, and the bearing accuracy that plane positioning is compared in three-point fix is higher.
In Fig. 3, described pilot hole 21 is a bellmouth, but embodiments of the present invention are not limited to bellmouth, and for example the cross section is that the taper type pilot hole 21 of equilateral triangle also is fine.Among Fig. 3, the shape of described pilot hole 21 for increasing gradually from the downward surface diameter of the upper surface of holder 2, fulcrum ball 3 better can be limited in the pilot hole 21, can not deviate from because of the carrying of board, be preferred embodiment a kind of, if described pilot hole 21 is the straight hole structure, preferably the upper shed portion in the hole is provided for the spacing locating part of fulcrum ball 3.In the present embodiment, supporting mechanism is three isodiametric fulcrum balls 3, because fulcrum ball 3 is circular, be easy to obtain high rigidity, high precision, help reducing production costs, will be understood that, other supporting mechanism also can meet the demands, as long as this supporting mechanism has three spherical that stretch out in the upper shed portion of described pilot hole 21, the summit of described three spherical is contour, not conllinear, constitute a supporting plane, this spherical will satisfy hardness, accuracy requirement certainly.
The side surface of described pilot hole 21 is provided with the set collar 4 of taper, the size of the inner surface of set collar 4 make three described fulcrum balls 3 mutually against and three fulcrum balls 3 all be resisted against the inner surface of described set collar 4.Three fulcrum balls 3 are positioned in the set collar 4, prevent that it from rocking, improve the rigidity of locating device 5.
Also offer on the described tightening seat 1 and be used for center vacuum pipeline 11 that described pilot hole 21 is vacuumized, described center vacuum pipeline 11 is communicated with vacuum pump, and the air inlet of this center vacuum pipeline 11 is aimed at the center of the bottom surface of pilot hole 21.Also offer side vacuum line 12 around the described pilot hole 21, described side vacuum line 12 is many, and presses the circumferencial direction regular distribution around described pilot hole 21, and each described side vacuum line 12 also is communicated with vacuum pump.It is represented that the shape of side vacuum line 12, structure are not limited to accompanying drawing, and for example square arrangement also is fine.
One of the summit formation that guarantees three fulcrum balls 3 has enough high-precision supporting plane, and condition is: 1. the relative part in the bottom surface with described pilot hole 21 of the upper surface of tightening seat 1 parallels with the bottom surface of described pilot hole 21; 2. the surface that contacts with fulcrum ball 3 of tightening seat 1 is through cure process, and the flatness of this part surface with contact the depth of parallelism and will reach exclusive requirement; 3. cure process is passed through on the surface that contacts with fulcrum ball 3 of set collar 4, and wants finishing, makes Roughness Surface on Control below 1.6 microns; 4. described fulcrum ball 3 needs guarantee enough hardness and wearing quality through cure process, and preferred steel ball forms " some contact " in order to make between steel ball and the thin plate, and the size of steel ball should not be excessive, facts have proved that preferred diameter is smaller or equal to 3.2 millimeters.
The method of operating of aforesaid measurement mechanism is as follows:
(a) standard gauge block is placed on the supporting plane, opens vacuum pump, vacuumize, vacuumize by 12 pairs of standard gauge block belows of side vacuum line by 11 pairs of pilot holes 21 of center vacuum pipeline, thus that standard gauge block is firm " absorption " is on locating device 5;
(b) start laser probe 74, utilize standard gauge block that laser probe 74 is made zero;
(c) take off above-mentioned standard gauge block, thin plate is positioned on three formed supporting planes in summit of three described fulcrum balls 3;
(d) open vacuum pump, vacuumize, vacuumize by 12 pairs of thin plate belows of side vacuum line by 11 pairs of pilot holes 21 of center vacuum pipeline, thus that thin plate is firm " absorption " is on locating device 5;
(e) start laser probe 74 once more, read sheet gauge numerical value.
In the present invention, adopt laser probe 74 to carry out thickness measure with above-mentioned locating device 5 corresponding settings, mainly be thin plate accurately can be located because consider locating device 5, and thickness measurement with laser is a kind of contactless measurement, can not damage surface of the work, on this locating device 5 pinpoint bases, laser probe 74 can carry out thickness measure to thin plate accurately.
Claims (10)
1. sheet gauge measurement mechanism, comprise angle seat (64), be arranged on the thickness measuring platform (61) on the described angle seat (64), be arranged on the cushion block (62) on the described thickness measuring platform (61), be arranged on the crossbeam (63) on the described cushion block (62), described crossbeam (63) is provided with measuring appliance (7), described thickness measuring platform (61) is provided with locating device (5), it is characterized in that: described locating device (5) comprises the holder (2) that is arranged on the described thickness measuring platform (61), the tightening seat (1) that is arranged on described holder (2) below and fixedlys connected with described holder (2)
Offer the pilot hole (21) of the thickness that runs through described holder (2) on the described holder (2),
Described pilot hole is provided with supporting mechanism in (21), and described supporting mechanism comprises three spherical of stretching out the upper shed portion of described pilot hole (21), and the summit of three described spherical is contour, conllinear not, constitutes a supporting plane;
Also be provided with on the described tightening seat (1) and be used for center vacuum pipeline (11) that described pilot hole (21) is vacuumized, described center vacuum pipeline (11) is communicated with vacuum pump.
2. sheet gauge measurement mechanism according to claim 1 is characterized in that: the taper hole that described pilot hole (21) increases from top to bottom gradually for diameter.
3. according to claim 1 or 2 described sheet gauge measurement mechanisms, it is characterized in that: described supporting mechanism is three isodiametric fulcrum balls (3).
4. sheet gauge measurement mechanism according to claim 3 is characterized in that: described fulcrum ball (3) is a steel ball.
5. sheet gauge measurement mechanism according to claim 4 is characterized in that: the diameter of described fulcrum ball (3) is more than or equal to 0.5 millimeter and smaller or equal to 3.2 millimeters.
6. sheet gauge measurement mechanism according to claim 5, it is characterized in that: the side surface of described pilot hole (21) is provided with set collar (4), three described fulcrum balls (3) mutually against and all be resisted against the inner surface of described set collar (4).
7. according to claim 1 or 2 or 6 described sheet gauge measurement mechanisms, it is characterized in that: described locating device (5) also comprises the side vacuum line (12) on every side that is opened in described pilot hole (21), described side vacuum line (12) is many, and regular distribution is around described pilot hole (21), and each described side vacuum line (12) also is communicated with vacuum pump.
8. sheet gauge measurement mechanism according to claim 7 is characterized in that: many described side vacuum lines (12) are pressed the circumferencial direction regular distribution around described pilot hole (21).
9. sheet gauge measurement mechanism according to claim 1 is characterized in that: described measuring appliance (7) has laser probe (74).
10. the measuring method of a sheet gauge measurement mechanism as claimed in claim 1 comprises the steps:
(a) standard gauge block is placed on the supporting plane, opens vacuum pump, pilot hole (21) is vacuumized by center vacuum pipeline (11);
(b) start measuring appliance (7), utilize above-mentioned standard gauge block that measuring appliance (7) is made zero;
(c) take off above-mentioned standard gauge block, thin plate is positioned on the supporting plane;
(d) open vacuum pump, pilot hole (21) is vacuumized by center vacuum pipeline (11);
(e) start measuring appliance (7) once more, read sheet gauge numerical value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810136545XA CN101435696B (en) | 2008-12-08 | 2008-12-08 | Device and method for measuring light sheet thickness |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810136545XA CN101435696B (en) | 2008-12-08 | 2008-12-08 | Device and method for measuring light sheet thickness |
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| Publication Number | Publication Date |
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| CN101435696A CN101435696A (en) | 2009-05-20 |
| CN101435696B true CN101435696B (en) | 2010-06-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN200810136545XA Active CN101435696B (en) | 2008-12-08 | 2008-12-08 | Device and method for measuring light sheet thickness |
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Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102155906B (en) * | 2011-03-25 | 2012-10-31 | 微创医疗器械(上海)有限公司 | Multipoint linked device and method for measuring thickness of bio-prosthetic valve |
| JP2013137197A (en) * | 2011-12-27 | 2013-07-11 | Toshiba Corp | Laser type thickness measurement system and calibration method therefor |
| CN103217112A (en) * | 2012-01-19 | 2013-07-24 | 昆山思拓机器有限公司 | Single-point thickness measurement method of SMT screen plate |
| CN103217133A (en) * | 2012-01-19 | 2013-07-24 | 昆山思拓机器有限公司 | Stand-column type manual thickness measuring equipment for surface mounted technology (SMT) stencil |
| CN103389045A (en) * | 2013-08-09 | 2013-11-13 | 昆山允可精密工业技术有限公司 | Contact type measuring unit for thickness of manual single measure head veneer board |
| CN103389044A (en) * | 2013-08-09 | 2013-11-13 | 昆山允可精密工业技术有限公司 | Manual single-measure-head contact-type measuring method for veneer board thickness |
| CN104330009B (en) * | 2014-10-17 | 2017-06-27 | 中国航空工业集团公司洛阳电光设备研究所 | Part height dimension measurement method and measurement frock |
| CN104482868B (en) * | 2014-12-30 | 2017-07-25 | 苏州逸美德科技有限公司 | A kind of glass key bore edges thickness high-precision full-automatic detection machine |
| CN106247939B (en) * | 2016-08-31 | 2017-05-31 | 马翼 | Intelligent cubing |
| CN108645352A (en) * | 2018-06-29 | 2018-10-12 | 苏州富强科技有限公司 | A kind of support smelting tool |
| CN112113527B (en) * | 2020-09-23 | 2021-07-13 | 复旦大学 | Device and method for accurately measuring thickness of weak-rigidity thin part |
Citations (3)
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| CN2349537Y (en) * | 1998-12-29 | 1999-11-17 | 西安交通大学 | Laser on line pachometer |
| CN1800776A (en) * | 2004-12-30 | 2006-07-12 | 中南大学 | Laser thick measuring device with micron precision |
| US7206076B2 (en) * | 2003-11-04 | 2007-04-17 | Lumetrics, Inc. | Thickness measurement of moving webs and seal integrity system using dual interferometer |
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2008
- 2008-12-08 CN CN200810136545XA patent/CN101435696B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2349537Y (en) * | 1998-12-29 | 1999-11-17 | 西安交通大学 | Laser on line pachometer |
| US7206076B2 (en) * | 2003-11-04 | 2007-04-17 | Lumetrics, Inc. | Thickness measurement of moving webs and seal integrity system using dual interferometer |
| CN1800776A (en) * | 2004-12-30 | 2006-07-12 | 中南大学 | Laser thick measuring device with micron precision |
Non-Patent Citations (3)
| Title |
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| JP特开2003-44826A 2003.02.14 |
| JP特开2004-108961A 2004.04.08 |
| JP特开2006-308378A 2006.11.09 |
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| CN101435696A (en) | 2009-05-20 |
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Effective date of registration: 20100507 Address after: 215347, Kunshan, Jiangsu Province, 1666 South Gate Road, Tsinghua Science and Technology Park, innovation building, first floor Applicant after: Kunshan Theta Micro Co., Ltd. Address before: 215347, Kunshan, Jiangsu Province, 1666 South Gate Road, Tsinghua Science and Technology Park, innovation building, first floor Applicant before: Kunshan Situo Machinery System Co., Ltd. |