CN102072252A - Waist-type thrust gas static pressure restrictor with Archimedes spiral pressure-equalizing grooves - Google Patents

Waist-type thrust gas static pressure restrictor with Archimedes spiral pressure-equalizing grooves Download PDF

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Publication number
CN102072252A
CN102072252A CN2010106200291A CN201010620029A CN102072252A CN 102072252 A CN102072252 A CN 102072252A CN 2010106200291 A CN2010106200291 A CN 2010106200291A CN 201010620029 A CN201010620029 A CN 201010620029A CN 102072252 A CN102072252 A CN 102072252A
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China
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gas
flow controller
balancing slit
pressure
archimedes spiral
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CN102072252B (en
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李东升
张雯
陈爱军
禹静
尹健龙
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China Jiliang University
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China Jiliang University
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Abstract

The invention relates to a waist-type thrust gas static pressure restrictor with Archimedes spiral pressure-equalizing grooves. In the traditional restrictor, hyperstable and high-rigidity requirements of a system are difficult to meet at the same time. The waist-type thrust gas static pressure restrictor with the Archimedes spiral pressure-equalizing grooves has a waist shape integrally, wherein the upper surface is parallel with the lower surface; throttling orifices and N Archimedes spiral pressure-equalizing grooves are symmetrically formed on the upper surface along the longitudinal axis; each Archimedes spiral pressure-equalizing groove starts from the throttling orifices; the N Archimedes spiral pressure-equalizing grooves are distributed centrosymmetrically by taking the throttling orifices as centers; a guide groove is formed on the longitudinal axis of the upper surface; gas inlet holes running through the restrictor are formed on a pair of parallel side faces of the restrictor; the gas inlet holes are communicated with the throttling orifices; and gas entering from the gas inlet holes is ejected from the throttling orifices and then is spirally dispersed along the Archimedes spiral pressure-equalizing grooves, so that pressure intensity on the upper surface is distributed uniformly and a uniform and stable gas film is formed. The waist-type thrust gas static pressure restrictor with the Archimedes spiral pressure-equalizing grooves effectively reduces vibration of the gas film and improves rigidity and stability of a static pressure system.

Description

The waist type thrust gas-static flow controller that has the Archimedian screw balancing slit
Technical field
The present invention relates to the lubricated field of gas-static, especially relate to a kind of waist type thrust gas-static flow controller that has the Archimedian screw balancing slit.
Background technique
In ultraprecise processing and ultraprecise detection technique field, to compare with the bearing of other types, gas-static lubrication technology speed height, precision height, power is low, the life-span is long, is with a wide range of applications.But that the major defect of gas-static system is a bearing capacity is low, rigidity is little and poor stability, has become its key factor that further develops of restriction.
The rigidity that improves the gas-static system is one of the difficult point of aerostatic bearing research field and focus, belongs to advanced problems.Because gas itself has compressibility, the rigidity that improves gas lubrication is brought very big difficulty.Although there are a lot of scholars to do correlative study, this problem is not well solved as yet, and major obstacle shows the requirement of the overstable and high rigidity that is difficult to satisfy simultaneously system.In fact, rigidity and stability are a pair of contradiction in the gas-static system.Therefore, to rigidity and the stability study that the gas-static system carries out, be the key subjects that are related to gas-static development of technology and practicability.When the gas-static technology was studied, the research of flow controller miniflow field was key problem.Traditional flow controller adopts orifice restriction more, and bleed pressure can cause the flow velocity in throttle orifice outlet port too high, and the jet of formation is turbulization and little vortex in lubricated air film, becomes main vibration source.There is randomness in the direction that because of the nature of poromerics air-flow is flowed out from micropore when adopting porous matter Throttle Principle, also can produce local small turbulent flow.Below all be difficult to satisfy simultaneously the requirement of the overstable and high rigidity of system.
Summary of the invention
In order to overcome little, the problems such as rigidity is low, air film flow field instability of traditional gas-static thrust flow controller loaded area, the object of the present invention is to provide a kind of waist type thrust gas-static flow controller that has the Archimedian screw balancing slit.
For achieving the above object, the technical solution used in the present invention is:
This flow controller integral body is the waist type, its upper surface is parallel with lower surface, upper surface upper edge longitudinal axis symmetry has throttle orifice and N road Archimedian screw balancing slit, and per pass Archimedian screw balancing slit starts from throttle orifice, and N road Archimedian screw balancing slit is the center distribution that is centrosymmetric with the throttle orifice; Have guiding gutter on this upper surface longitudinal axis, wherein 1≤N≤12;
The flow controller pair of parallel has the inlet hole that runs through flow controller on the side; Described inlet hole is communicated with described throttle orifice; The gas that enters from inlet hole is scattered along Archimedian screw balancing slit spiral by throttle orifice ejaculation back, upper surface pressure is evenly distributed, and forms uniform and stable air film.
Described throttle orifice diameter is 0.05~0.2mm.
Described guiding gutter cross section is a rectangle, and width is 8~10mm, and the degree of depth is 0.05~0.2mm.
Described balancing slit cross section can be rectangle, and width is 0.05~0.2mm, and the degree of depth is 0.05~0.2mm or semicircle, and radius is 0.05~0.2mm.
The beneficial effect that the present invention has is: the present invention has increased loaded area to a certain extent owing to adopt the waist type, has also improved rigidity.Offer Archimedian screw balancing slit and guiding gutter on the working surface, both guaranteed that gas flow rate is unlikely too high, also can in time gas be imported atmosphere, prevented the instability that the air film turbulence causes, improved the randomness and the uncertainty of gas flow again.Adopt the binodal discharge orifice to carry out throttling simultaneously, can guarantee stable gas miniflow field, and then effectively reduce the rigidity and the stability of air film vibration, raising static-pressure system.Compare with traditional thrust flow controller, have bigger rigidity and advantages of higher stability by the formed static-pressure system air film of the present invention.
Description of drawings
Fig. 1 is a plan view of the present invention;
Fig. 2 is a worm's eye view of the present invention;
Fig. 3 is a plan view of the present invention;
Fig. 4 is a left view of the present invention;
Fig. 5 is an I place enlarged diagram among Fig. 1;
Fig. 6 is an II place enlarged diagram among Fig. 1;
Fig. 7 is an III place enlarged diagram among Fig. 3;
Among the figure: 1, flow controller; 2, throttle orifice; 3, guiding gutter; 4, balancing slit; 5, inlet hole; 6, auxiliary hole; 7, ball-and-socket; 8, dovetail groove.
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are described in further detail.
As Fig. 1, Fig. 3 and shown in Figure 5, the waist type thrust that has the Archimedian screw balancing slit is the waist type with gas-static flow controller 1 integral body, its upper surface is parallel with lower surface, upper surface is that working surface upper edge longitudinal axis symmetry has throttle orifice 2 and three road Archimedian screw balancing slits 4, and throttle orifice 2 can prevent the vibration of gas refluence causing air film.It is the center distribution that is centrosymmetric with throttle orifice 2 that per pass Archimedian screw balancing slit 4 starts from throttle orifice 2, three road Archimedian screw balancing slits 4.
Upper surface is to have guiding gutter 3 on the working surface longitudinal axis, and guiding gutter 3 is positioned at the neutral position of the throttle orifice line of centres, and this guiding gutter 3 can in time import atmosphere with gas, reduces the air film instability that the gas turbulence causes.
Adopt two throttle orifices 2 in the present embodiment, respectively have three road Archimedian screw balancing slits 4 around two throttle orifices 2, after having guaranteed that gas is penetrated by throttle orifice 2, scatter along Archimedian screw balancing slit 4 spirals, working surface pressure is evenly distributed, and between working surface, scatter equably and form air film, prevent that gas jet from producing air film turbulence and little whirlpool, reduces the little vibration of air film.Flow controller has the inlet hole 5 that runs through flow controller on the 1 pair of parallel side;
The gas that enters from inlet hole 5 is scattered along Archimedian screw balancing slit 4 spirals by throttle orifice 2 ejaculation backs, and making upper surface is that working surface pressure is evenly distributed, and forms uniform and stable air film.The gas that is penetrated by Archimedian screw balancing slit 4 outlet sections drains into ambient atmosphere via guiding gutter 3, can avoid the mutual interference of two bursts of air-flow phases and turbulization and little vibration.Whole process has not only reduced the gas flow rate in throttle orifice 2 outlet ports effectively, the gas turbulence and the little whirlpool that have prevented jet to produce, reduced the minute yardstick vibration of air film, and the multi-direction spiral supporting when having realized the gas outgoing, guarantee the stability of gas film lubrication, improved the bearing capacity and the rigidity of air film.
Because throttle orifice 2 apertures are less, and 0.05~0.2mm is only arranged, existing bore process only can guarantee drilling depth 0.2~0.3mm, so will consider to bore auxiliary hole in design.At first bore an auxiliary hole that the aperture is big slightly from the bottom to top in the present embodiment by the flow controller lower surface, this auxiliary hole is communicated with inlet hole, cross the section section by one section then and be communicated to the slightly little auxiliary hole in aperture, and the slightly little auxiliary hole in this aperture is identical with throttle orifice 2, so throttle orifice 2 also communicates with inlet hole 5.
Throttle orifice 2 diameters are 0.05~0.2mm, and guiding gutter 3 cross sections are rectangle, and width is 2~10mm, and the degree of depth is 0.05~0.2mm.Balancing slit 4 cross sections are rectangle, and width is 0.05~0.2mm, and the degree of depth is 0.05~0.2mm; Certainly balancing slit 4 cross sections also can be semicircle, and radius is 0.05~0.2mm.
Before the work, the auxiliary hole 6 of lower surface one side is shut, had gas to ooze out when preventing to ventilate from auxiliary hole 6.
The bulb of ball stud is partly headed in the ball-and-socket 7 of gas-static flow controller 1 bottom surface, conical support is embedded in the dovetail groove 8 again, guarantee the bottom surface of the medial axis of ball stud perpendicular to flow controller 1, thereby guaranteed that the gas-static flow controller is in the axial direction of working shaft, finishes the axial thrust function of gas-static flow controller.
During work, the gas that with pressure is 0.1~1Mpa is sent into the gas-static flow controller by inlet hole 5, gas is throttle orifice 2 injections of working surface by upper surface, between working surface, form uniform air film via Archimedian screw balancing slit 4, make the gas throttling device be suspended in its corresponding work face, reach the gas film lubrication effect, realize the air supporting campaign of working shaft.
Because this kind flow controller uses the throttling of Archimedian screw balancing slit, can improve the stability and the rigidity of gas flowfield, realize the low turbulence in air film flow field.

Claims (5)

1. the waist type thrust gas-static flow controller that has the Archimedian screw balancing slit, it is characterized in that: this flow controller (1) integral body is the waist type, its upper surface is parallel with lower surface, described upper surface upper edge longitudinal axis symmetry has throttle orifice (2) and N road Archimedian screw balancing slit (4), per pass Archimedian screw balancing slit (4) starts from throttle orifice (2), and N road Archimedian screw balancing slit (4) is the center distribution that is centrosymmetric with throttle orifice (2); Have guiding gutter (3) on this upper surface longitudinal axis, wherein 1≤N≤12;
Have the inlet hole (5) that runs through flow controller (1) on flow controller (1) the pair of parallel side; Described inlet hole (5) is communicated with described throttle orifice (2);
The gas that enters from inlet hole (5) is scattered along Archimedian screw balancing slit (4) spiral by throttle orifice (2) ejaculation back, upper surface pressure is evenly distributed, and forms uniform and stable air film.
2. the waist type thrust gas-static flow controller that has the Archimedian screw balancing slit according to claim 1, it is characterized in that: described throttle orifice (2) diameter is 0.05~0.2mm.
3. the waist type thrust gas-static flow controller that has the Archimedian screw balancing slit according to claim 1, it is characterized in that: described guiding gutter (3) cross section is a rectangle, and width is 2~10mm, and the degree of depth is 0.05~0.2mm.
4. the waist type thrust gas-static flow controller that has the Archimedian screw balancing slit according to claim 1, it is characterized in that: described balancing slit (4) cross section is a rectangle, and width is 0.05~0.2mm, and the degree of depth is 0.05~0.2mm.
5. the waist type thrust gas-static flow controller that has the Archimedian screw balancing slit according to claim 1 is characterized in that: described balancing slit (4) cross section is for semicircle, and radius is 0.05~0.2mm.
CN 201010620029 2010-12-30 2010-12-30 Waist-type thrust gas static pressure restrictor with Archimedes spiral pressure-equalizing grooves Expired - Fee Related CN102072252B (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103912583A (en) * 2014-04-09 2014-07-09 杭州宏量科技有限公司 Split type parallel microchannel spherical gas static pressure throttler
CN106979227A (en) * 2017-05-17 2017-07-25 西安工业大学 The monoblock type aerostatic bearing of porous integrated throttling
CN107387548A (en) * 2017-08-29 2017-11-24 山东大学 Archimedes' helicoid hydrodynamic sliding bearing and application
CN108916230A (en) * 2018-02-06 2018-11-30 西安交通大学 A kind of hydrostatic gas-lubricated bearing of spiral throttle
CN109139698A (en) * 2018-09-06 2019-01-04 西安交通大学 Expansible honeycomb type gas-static flow controller with Bezier balancing slit

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2049343A (en) * 1934-05-31 1936-07-28 Gen Electric Bearing and the like
US3545366A (en) * 1967-09-11 1970-12-08 Hans Bruhin Apparatus for storing wheels of cheeses
CH549736A (en) * 1973-06-21 1974-05-31 Sulzer Ag SELF-PRESSURE GENERATING AXIAL GAS FLOATING BEARING.
US6086456A (en) * 1997-11-05 2000-07-11 Aplex, Inc. Polishing method using a hydrostatic fluid bearing support having fluctuating fluid flow

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2049343A (en) * 1934-05-31 1936-07-28 Gen Electric Bearing and the like
US3545366A (en) * 1967-09-11 1970-12-08 Hans Bruhin Apparatus for storing wheels of cheeses
CH549736A (en) * 1973-06-21 1974-05-31 Sulzer Ag SELF-PRESSURE GENERATING AXIAL GAS FLOATING BEARING.
US6086456A (en) * 1997-11-05 2000-07-11 Aplex, Inc. Polishing method using a hydrostatic fluid bearing support having fluctuating fluid flow

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103912583A (en) * 2014-04-09 2014-07-09 杭州宏量科技有限公司 Split type parallel microchannel spherical gas static pressure throttler
CN106979227A (en) * 2017-05-17 2017-07-25 西安工业大学 The monoblock type aerostatic bearing of porous integrated throttling
CN107387548A (en) * 2017-08-29 2017-11-24 山东大学 Archimedes' helicoid hydrodynamic sliding bearing and application
CN107387548B (en) * 2017-08-29 2023-07-21 山东大学 Archimedes spiral dynamic pressure sliding bearing and application
CN108916230A (en) * 2018-02-06 2018-11-30 西安交通大学 A kind of hydrostatic gas-lubricated bearing of spiral throttle
CN109139698A (en) * 2018-09-06 2019-01-04 西安交通大学 Expansible honeycomb type gas-static flow controller with Bezier balancing slit

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