CN102194666A - Electric control system of corrosion converting machine - Google Patents
Electric control system of corrosion converting machine Download PDFInfo
- Publication number
- CN102194666A CN102194666A CN 201110084591 CN201110084591A CN102194666A CN 102194666 A CN102194666 A CN 102194666A CN 201110084591 CN201110084591 CN 201110084591 CN 201110084591 A CN201110084591 A CN 201110084591A CN 102194666 A CN102194666 A CN 102194666A
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- Prior art keywords
- liquid level
- water
- premium
- currency
- level sensor
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- 230000007797 corrosion Effects 0.000 title claims abstract description 25
- 238000005260 corrosion Methods 0.000 title claims abstract description 25
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 150
- 239000007788 liquid Substances 0.000 claims abstract description 78
- 238000000034 method Methods 0.000 claims abstract description 26
- 238000005406 washing Methods 0.000 claims abstract description 16
- 239000000126 substance Substances 0.000 claims description 20
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 13
- 229910052710 silicon Inorganic materials 0.000 claims description 13
- 239000010703 silicon Substances 0.000 claims description 13
- 238000005429 filling process Methods 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000003860 storage Methods 0.000 abstract description 3
- 238000006243 chemical reaction Methods 0.000 abstract description 2
- 230000001131 transforming effect Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000007812 deficiency Effects 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000010835 comparative analysis Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000013024 troubleshooting Methods 0.000 description 1
- 239000003643 water by type Substances 0.000 description 1
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Abstract
The invention relates to an electric control system of a corrosion converting machine. The system is characterized in that four analogue quantity input ends of a PLC (programmable logical controller) are connected with a liquid level sensor X01, a liquid level sensor X02, a liquid level sensor X03 and a water outlet flowmeter X00 respectively; and two output end relays of the PLC control a water inlet valve Y60 and a water outlet valve Y61 respectively. As multiple liquid level sensors are set to measure the water quantity data of a pure water temporary storage tank and the program and process flow of the PLC are improved to increase the stored water quantity of the pure water temporary storage tank, the water filling process does not take the effective work time, a corrosion converting machine does not have a water filling wait state and can continuously perform the corrosion conversion and washing flow without interruption, the water filling time is minimized, the production efficiency of equipment is improved, and the water consumption and power consumption of a single corrosion converting sheet are reduced.
Description
Technical field
The present invention relates to the rotten machine of waferization, particularly the rotten dynamo-electric control of a kind ofization system.
Background technology
Changing rotten machine is the equipment of wafer manufacture processing, present domestic use be from the rotten machine of Japanese importization, overall performance is good, but find in actual use, still there is deficiency in its electric-control system, through serious analysis and research, there is irrational place in the electric-control system of finding it in program control in the technological process.
The flow process that existing machine carries out after the chemical corrosion is that silicon chip is washed, and needs 150 liters of waters when washing.The water yield of pure water holding tank of changing rotten machine is by electric control system controls, electric-control system comprises PLC and transducer, measure the pure water liquid level by a liquid level sensor, liquid level sensor connects PLC, PLC obtains the moisture storage capacity of pure water holding tank according to the liquid level data by conversion, and is controlled the inlet valve and the flowing water Valve of pure water holding tank by PLC.
Before the rotten machine of change began a rotten flow process of change, the PLC of electric-control system at first measured liquid level by the liquid level sensor of pure water holding tank, judges whether there are 150 premium on currency in the pure water holding tank; If last once change rotten flow process after, if not enough 150 liters of the water yield is controlled the inlet valve of opening the pure water holding tank by PLC output relay, the pure water holding tank is full of 150 premium on currency needs 11 minutes; When the pure water holding tank had 150 premium on currency, inlet valve was closed, and machine carries out chemical corrosion; After chemical corrosion finishes, control the flowing water Valve of opening the pure water holding tank, discharge 150 premium on currency, silicon chip is washed by PLC output relay; Chemical corrosion and washing time spent are 5 minutes altogether.A rotten flow process time spent of complete change is: 5 minutes (changing rotten and the washing time)+11 minutes (flooding time)=16 minute; After operating personnel take out silicon chip, when changing rotten flow process, need to give again pure water holding tank water-filling next time, in 11 fens clock times of water-filling, change rotten machine and be in wait state; Do not make full use of the effective time, this shows, there is irrational place in existing electric-control system in program control and technological process.
Summary of the invention
Purpose of the present invention is exactly the deficiency that exists in program control and technological process at the rotten dynamo-electric control of existingization system, provide a kind of new change rotten dynamo-electric control systems technology scheme, in structure, program control and technological process, improve, in the time of rotten machineization corruption of making and washing process, also can control inlet valve continues to open, so that increase the water amount of pure water holding tank, make the water filling process of pure water holding tank no longer take the effective time, changing rotten machine needn't have independent wait water inlet state; The rotten machine of making can be changed corruption and washing process continuously.
The present invention realizes by such technical scheme: the rotten dynamo-electric control of a kind ofization system comprises PLC and liquid level sensor, it is characterized in that, four digital quantity inputs of PLC connect liquid level sensor X01, liquid level sensor X02, liquid level sensor X03 and a water flow meter X00 respectively, control inlet valve Y60 and flowing water Valve Y61 respectively by two output relays of PLC; Change rotten machine pure water holding tank outer wall and be provided with the water pipe that is communicated with in the pure water holding tank, liquid level sensor X03, liquid level sensor X02 and liquid level sensor X01 are installed on the water pipe from top to bottom successively, inlet valve Y60 is installed on the water inlet pipe of pure water holding tank, and water flow meter X00 and flowing water Valve Y61 are installed on the outlet pipe of pure water holding tank;
Liquid level sensor X01 is used to measure the lower limit liquid level of 150 premium on currency amount correspondences;
Liquid level sensor X02 is used to measure the upper limit liquid level of 400 premium on currency amount correspondences;
Liquid level sensor X03 is used to measure the overload alarm liquid level of 450 premium on currency amount correspondences;
According to liquid level sensor X02 sampled data, PLC judges whether there are 400 premium on currency in the pure water holding tank, and by PLC output relay control inlet valve switch, if less than 400 premium on currency in the pure water holding tank, inlet valve Y60 opens; If fill 400 premium on currency in the pure water holding tank, then inlet valve Y60 closes;
Liquid level sensor X03 is the effect of liquid level being played overload alarm, damage situation about losing efficacy when liquid level sensor X02 occurring, liquid level reached 400 liters and located this moment, still do not close water intaking valve Y60, when liquid level continues to rise to 450 liters when locating, liquid level sensor X03 notice PLC emergency cut-off penstock Y60 is in case water flows out the pure water holding tank, and send warning message, do troubleshooting by the engineering staff;
According to liquid level sensor X01 sampled data, PLC judges whether there are 150 premium on currency in the pure water holding tank, if 150 premium on currency are arranged, and output order then, the rotten machine of permissionization carries out the chemical corrosion flow process; If there are not 150 premium on currency, then continue to wait for water inlet to 150 premium on currency the more rotten machine of output permissionization carry out the instruction of chemical corrosion flow process;
According to the flow signal of water flow meter X00, PLC judges the water yield of penstock Y61, and when reaching 150 premium on currency as if water outlet, then flowing water Valve Y61 closes.
Change the electric-control method of rotten dynamo-electric control system, it is characterized in that, comprise following order step:
When (a) rotten flow process was changed in one of beginning, PLC judged whether there are 400 premium on currency in the pure water holding tank at first according to the liquid level sensor X02 that is used to measure 400 premium on currency amounts in the pure water holding tank;
(b) if 400 premium on currency are arranged, then inlet valve Y60 closes, and directly carries out chemical corrosion;
(c) if there are not 400 premium on currency, then open inlet valve Y60, water inlet detects liquid level sensor X01 simultaneously, judges whether there are 150 premium on currency in the pure water holding tank;
(d) if there are 150 premium on currency, then directly carry out chemical corrosion;
(e), then continue to wait for water inlet if there are not 150 premium on currency;
(f) in chemical corrosion and the water-washing process, inlet valve Y60 allows to be in open mode;
(g) after chemical corrosion finishes, open the flowing water Valve Y61 of pure water holding tank, according to the flow signal of water flow meter X00, PLC judges the water yield of penstock Y61, and when reaching 150 premium on currency as if water yield, then flowing water Valve Y61 closes;
(h) silicon chip of operator after can the taking-up corruption loaded onto new silicon chip, changes rotten machine and begins the rotten flow process of the next oneization.
The water yield data of pure water holding tanks are measured by a plurality of liquid level sensors are set by the rotten dynamo-electric control of of the present inventionization system, and improve the PLC program and the rotten machineization of making of technological process is rotten and control inlet valve washing process the time and can open in the same old way, increase the water amount of pure water holding tank, make water filling process no longer take the effective time, change rotten machine and no longer include upward water state of wait, changing rotten machine can be continuous, change corruption and washing process incessantly, the rotten machine of making of the present invention carries out a change corruption and the used time of washing process has only 5 minutes, used up 11 minutes clock times of water inlet have been saved, be far smaller than 16 minutes before transforming, reduce to greatest extent and go up the water time, improve efficiency of equipment, the water consumption and the power consumption of the rotten sheet monolithic of reductionization, calculating according to theoretical production capacity, its output can increase by 220%, and the water consumption of every silicon chip is 61% of present water consumption, and the power consumption of every silicon chip is 31% of present water consumption.
Description of drawings
The rotten dynamo-electric control PLC of the system circuit diagram of being of Fig. 1;
Fig. 2 is an electric-control system PLC program flow diagram;
Fig. 3 is a pure water holding tank schematic diagram.
Embodiment
For a more clear understanding of the present invention, describe the present invention in conjunction with the accompanying drawings and embodiments in detail:
As Fig. 1, Fig. 2 and shown in Figure 3, change rotten dynamo-electric control system and comprise PLC and liquid level sensor, four digital quantity inputs of PLC connect liquid level sensor X01, liquid level sensor X02, liquid level sensor X03 and a water flow meter X00 respectively, control inlet valve Y60 and flowing water Valve Y61 respectively by two output relays of PLC; Change rotten machine pure water holding tank 1 outer wall and be provided with the water pipe 2 that is communicated with in the pure water holding tank 1, liquid level sensor X03, liquid level sensor X02 and liquid level sensor X01 are installed on the water pipe 2 from top to bottom successively, inlet valve Y60 is installed on the water inlet pipe 3 of pure water holding tank 1, and water flow meter X00 and flowing water Valve Y61 are installed on the outlet pipe 4 of pure water holding tank 1;
Change rotten machine pure water holding tank 1 the inlet valve switch whether, only and be used in the pure water holding tank 1 the corresponding liquid level of the 400 premium on currency amounts of measuring liquid level sensor X02, be used to measure 450 premium on currency amounts correspondence liquid level liquid level sensor X03 relevant;
As long as pure water holding tank 1 water level do not reach 400 liters of corresponding liquid levels, PLC is through gathering liquid level sensor X02 signal and judge, and then control inlet valve Y60 opens; When liquid level sensor X02 breaks down; liquid level sensor X03 then plays a protective effect; when pure water holding tank 1 water level does not reach 450 liters of corresponding liquid levels; PLC is through gathering liquid level sensor X03 signal and judging; and then in time turn off inlet valve Y60, in order to avoid water overflows from pure water holding tank 1.
Change rotten machine and begin one when changing rotten flow process, PLC at first detects and measures the pairing liquid level sensor X02 of 400 premium on currency amounts in the pure water holding tank 1, judges whether have 400 premium on currency in the pure water holding tank 1, as if 400 premium on currency are arranged, then directly carries out chemical corrosion; If there are not 400 premium on currency, then open inlet valve Y60, meanwhile PLC detects liquid level sensor X01, judges whether there are 150 premium on currency in the pure water holding tank 1, if 150 premium on currency are arranged, then directly carries out chemical corrosion; If there are not 150 premium on currency, then continue to wait for water inlet.
When machine carried out chemical corrosion and washing, inlet valve Y60 can continue to open, because whether only relevant with spacing liquid level sensor X03 with liquid level sensor X02 the Y60 switch is.
After chemical corrosion finished, the flowing water Valve Y61 of pure water holding tank 1 was opened in the control of PLC output relay, and by the water flow flowmeter sensor signal was passed to PLC; When water yield reached 150 premium on currency, flowing water Valve Y61 closed.The silicon chip of operator after can the taking-up corruption loaded onto new silicon chip, changes rotten machine and begins the rotten flow process of the next oneization.
A rotten flow process of change in the past changing rotten machine is: 5 minutes (changing rotten and the washing time)+11 minutes (flooding time)=16 minute (total).
As known from the above, in the flow process of changing rotten machine, real change corruption and washing time have only 5 minutes, and flooding time but consumed 11 minutes.Water consumption is big, the theoretical pure water amount of machine be every month 1200 tons.Task of the present invention is exactly to reduce to greatest extent to go up the water time, improves efficiency of equipment, the water consumption and the power consumption of the rotten sheet monolithic of reductionization.
Use technical scheme of the present invention, a rotten flow process of change changing rotten machine is: change corruption and washing time and have only 5 minutes, saving flooding time consumed 11 minutes, make water filling process no longer take the effective time, change rotten machine and no longer include upward water state of wait, change rotten machine and can change corruption and washing process continuously, incessantly.
Comparative analysis before and after the rotten machine of listing is transformed in the present embodiment is as follows:
Change rotten machine and transform the output contrast of front and back, transforming the back theoretical yield increases by 220%.Change the water consumption contrast before and after transforming of rotten machine, the water consumption of transforming the every silicon chip in back is present 61%, reduces by 39%, minimizing be the consumption of going up overflow water in the water time.Change the power consumption contrast before and after transforming of rotten machine, the power consumption of transforming the every silicon chip in back is present 31%.Reduce by 69%, minimizing be: go up the consumption that acid solution heats required electric energy in the water time period.
According to the above description, can realize the solution of the present invention in conjunction with art technology.
Claims (2)
1. change rotten dynamo-electric control system for one kind, comprise PLC and liquid level sensor, it is characterized in that, four digital quantity inputs of PLC connect liquid level sensor X01, liquid level sensor X02, liquid level sensor X03 and a water flow meter X00 respectively, control inlet valve Y60 and flowing water Valve Y61 respectively by two output relays of PLC; Pure water holding tank (1) outer wall is provided with the water pipe (2) that is communicated with in the pure water holding tank (1), liquid level sensor X03, liquid level sensor X02 and liquid level sensor X01 from top to bottom are installed on the water pipe (2) successively, inlet valve Y60 is installed on the water inlet pipe (3) of pure water holding tank (1), and water flow meter X00 and flowing water Valve Y61 are installed on the outlet pipe (4) of pure water holding tank (1); Liquid level sensor X01 is used to measure the lower limit liquid level of 150 premium on currency amount correspondences; Liquid level sensor X02 is used to measure the upper limit liquid level of 400 premium on currency amount correspondences; Liquid level sensor X03 is used to measure the overload alarm liquid level of 450 premium on currency amount correspondences; According to liquid level sensor X02 sampled data, PLC judges in the pure water holding tank (1) whether have 400 premium on currency, and by PLC output relay control inlet valve switch, if interior less than 400 premium on currency of pure water holding tank (1), inlet valve Y60 opens; If fill 400 premium on currency in the pure water holding tank (1), then inlet valve Y60 closes; According to liquid level sensor X03 sampled data, PLC judges whether the interior liquid level of pure water holding tank (1) transfinites, if liquid level sensor X02 damages situation about losing efficacy, liquid level reaches 400 liters and locates, still do not close water intaking valve Y60, when liquid level continues to rise to 450 liters when locating, liquid level sensor X03 notice PLC emergency cut-off penstock Y60, and send warning message; According to liquid level sensor X01 sampled data, PLC judges in the pure water holding tank (1) whether have 150 premium on currency, if 150 premium on currency are arranged, and output order then, the rotten machine of permissionization carries out the chemical corrosion flow process; If there are not 150 premium on currency, then continue to wait for water inlet to 150 premium on currency the more rotten machine of output permissionization carry out the instruction of chemical corrosion flow process; According to the flow signal of water flow meter X00, PLC judges the water yield of penstock Y61, and when reaching 150 premium on currency as if water outlet, then flowing water Valve Y61 closes.
2. the electric-control method of the rotten dynamo-electric control of as claimed in claim 1ization system is characterized in that, comprises following order step:
When (a) rotten flow process was changed in one of beginning, PLC judged whether there are 400 premium on currency in the pure water holding tank at first according to the liquid level sensor X02 that is used to measure 400 premium on currency amounts in the pure water holding tank;
(b) if 400 premium on currency are arranged, then inlet valve Y60 closes, and directly carries out chemical corrosion;
(c) if there are not 400 premium on currency, then open inlet valve Y60, water inlet detects liquid level sensor X01 simultaneously, judges whether there are 150 premium on currency in the pure water holding tank;
(d) if there are 150 premium on currency, then directly carry out chemical corrosion;
(e), then continue to wait for water inlet if there are not 150 premium on currency;
(f) in chemical corrosion and the water-washing process, inlet valve Y60 allows to be in open mode;
(g) after chemical corrosion finishes, open the flowing water Valve Y61 of pure water holding tank, according to the flow signal of water flow meter X00, PLC judges the water yield of penstock Y61, and when reaching 150 premium on currency as if water yield, then flowing water Valve Y61 closes;
(h) silicon chip of operator after can the taking-up corruption loaded onto new silicon chip, changes rotten machine and begins the rotten flow process of the next oneization.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110084591 CN102194666B (en) | 2011-04-06 | 2011-04-06 | Electric control system of corrosion converting machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110084591 CN102194666B (en) | 2011-04-06 | 2011-04-06 | Electric control system of corrosion converting machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102194666A true CN102194666A (en) | 2011-09-21 |
| CN102194666B CN102194666B (en) | 2012-08-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201110084591 Active CN102194666B (en) | 2011-04-06 | 2011-04-06 | Electric control system of corrosion converting machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103021937A (en) * | 2013-01-09 | 2013-04-03 | 江苏物联网研究发展中心 | Device and method for overburden electroplating copper layer on chemical corrosion TSV (through silicon via) surface |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0486098A1 (en) * | 1990-11-14 | 1992-05-20 | Ateliers Mecaniques De Fontvieille Le Thales | Device for detecting a liquid level and syphon device therefor |
| US5607080A (en) * | 1994-12-30 | 1997-03-04 | C.A.P. Inc. | Chemical measuring system |
| CN1499179A (en) * | 2002-11-05 | 2004-05-26 | 矽统科技股份有限公司 | Chemical treating tank with indicator for liquid level in outer trough |
| CN1963455A (en) * | 2006-11-02 | 2007-05-16 | 中国海洋大学 | Automatic wetting and drying cycle apparatus for corrosion test sample |
-
2011
- 2011-04-06 CN CN 201110084591 patent/CN102194666B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0486098A1 (en) * | 1990-11-14 | 1992-05-20 | Ateliers Mecaniques De Fontvieille Le Thales | Device for detecting a liquid level and syphon device therefor |
| US5607080A (en) * | 1994-12-30 | 1997-03-04 | C.A.P. Inc. | Chemical measuring system |
| CN1499179A (en) * | 2002-11-05 | 2004-05-26 | 矽统科技股份有限公司 | Chemical treating tank with indicator for liquid level in outer trough |
| CN1963455A (en) * | 2006-11-02 | 2007-05-16 | 中国海洋大学 | Automatic wetting and drying cycle apparatus for corrosion test sample |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103021937A (en) * | 2013-01-09 | 2013-04-03 | 江苏物联网研究发展中心 | Device and method for overburden electroplating copper layer on chemical corrosion TSV (through silicon via) surface |
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| Publication number | Publication date |
|---|---|
| CN102194666B (en) | 2012-08-22 |
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Effective date of registration: 20190103 Address after: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Area (outside the ring) Hai Tai Road 12 Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Address before: 300384 Tianjin Nankai District Huayuan Industrial Park (outside the ring) 12 East Hai Tai Road Patentee before: TIANJIN HUANOU SEMICONDUCTOR MATERIAL TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20191216 Address after: 214200 Dongfen Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Co-patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Patentee after: Zhonghuan leading semiconductor materials Co.,Ltd. Address before: 300384 in Tianjin Binhai high tech Zone Huayuan Industrial Zone (outer ring) Haitai Road No. 12 Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |
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Address after: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd. Guo jiahuodiqu after: Zhong Guo Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Address before: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee before: Zhonghuan leading semiconductor materials Co.,Ltd. Guo jiahuodiqu before: Zhong Guo Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |
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