CN102279438B - Optical-fiber evanescent field sensing optical fiber with novel micro-nano structure - Google Patents
Optical-fiber evanescent field sensing optical fiber with novel micro-nano structure Download PDFInfo
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Abstract
The invention relates to an optical-fiber evanescent field sensing optical fiber with a novel micro-nano structure. The optical-fiber evanescent field sensing optical fiber comprises an optical-fiber evanescent field sensing optical fiber with a cladding retained and an optical-fiber evanescent field sensing optical fiber with a cladding replaced, wherein in the optical-fiber evanescent field sensing optical fiber with the cladding retained, a micro-nano hole is formed in the cladding of the optical fiber; the size characteristic, the distribution pattern and a distance between the bottom of the hole and the fiber core interface of the micro-nano hole are controlled; and a sensed substance is filled in the micro-nano hole and subjected to refractive index modulation. In the optical-fiber evanescent field sensing optical fiber with the novel micro-nano structure and the cladding replaced, the cladding of an optical fiber section to be treated is removed and a medium layer is filled; the refractive index of the optical-fiber evanescent field sensing optical fiber is controlled; a micro-nano hole is formed in the optical-fiber evanescent field sensing optical fiber; the sensed substance is filled in the micro-nano hole; and the refractive index of the sensed substance is modulated. By the method for retaining the cladding of the sensing optical fiber and forming the micro-nano hole in the cladding as well as substituting the medium layer for the cladding and forming the micro-nano hole in the medium layer, the optical-fiber evanescent field sensing optical fiber with the novel micro-nano structure is manufactured; therefore, the energy of an evanescent field in a high-order pattern can be participated in the reaction to the maximum extent, the sensitivity of a sensor is improved, and the development of miniaturization and integration of the optical fiber evanescent field sensors is facilitated.
Description
Technical field
The invention belongs to the optical fiber biochemical sensor technical field, relate to the making for the optical fiber biochemical sensor in the fields such as medical treatment detection, environmental monitoring and biochemical anti-terrorism, be specifically related to a kind of fiber evanescent field sensor fibre that keeps the novel micro nanometer structure of covering and covering replacement.
Background technology
The fiber evanescent field sensor is the Fibre Optical Sensor of a kind of new function type of putting forward the eighties in last century, it utilizes sensor fibre the evanescent field energy that excites and the measured matter that is in the energy scope to interact, and causes that the absorption of transmitting energy in the optical fiber realizes the sensing effect.The evanescent field energy that participates in reaction is more, and the sensitivity of corresponding light fiber sensor is just higher.Its core component is the fiber evanescent field sensor fibre.In traditional sensor fibre, usually the covering of optical fiber is removed, made the evanescent field energy generation interaction of measured matter and optical fiber finish the sensing process.What of the evanescent field energy that sensor fibre excites play the effect of decision to the height of transducer sensitivity, and the quality of sensor performance is had vital impact.
By exciting the optical waveguide of higher order mode, impel the interaction of more evanescent field energy participation and measured matter, but the sensitivity of Effective Raise sensor.Be to obtain the optical waveguide of higher order mode, many scholars are by being made into sensor fibre the structure such as taper, combination taper, U-shaped or by the measures such as angular modulation to incident light sensor being improved.Such as document [B.D.Gupta, H.Dodeja, A.K.Tomar, Fibre-optic evanescent field absorption sensor based on a U-shaped probe (based on the U-shaped fiber evanescent field sensor of energy absorption), 1996, Optical and Quantum Electronics 28:1629-1639 and Anna Grazia Mignani, Riccardo Falciai, Leonardo Ciaccheri, Evanescent wave absorption spectroscopy by means of bi-tapered multimode optical fibers (based on the multimode double-tapered fiber evanescent field detection instrument of energy absorption), 1998,52 (4): 546-551 and Yihui Wu, Xiaohong Deng, Feng Li, Xuye Zhuang, Less-mode optic fiber evanescent wave absorbing sensor:Parameter design for high sensitivity liquid detection (detecting the parameter designing of less fundamental mode optical fibre evanescent field sensor based on the high sensitivity solution of energy absorption), 2007, Sensors and Actuators B 122:127-133] etc. described.Although can encourage preferably the optical waveguide of the higher order mode in the sensor fibre by sensor fibre being made the shapes such as taper, combination taper, U-shaped, but exist modal loss when propagating in sensor fibre because of light, reduced the signal to noise ratio (S/N ratio) of sensor, evanescent field energy in the high-order optical waveguide that they excite at most also only has in the optical fiber 30% of transmission gross energy, exist equally the low problem of sensing energy, limited in one's ability to the raising of transducer sensitivity.The method of carrying out the higher order mode optical waveduide excitation by the angle of modulating the incident light has increased the complicacy of sensing system, is unfavorable for miniaturization, the integrated development of sensor.
Photonic crystal fiber is because its special physical characteristics, especially exist a large amount of luminous energy in the hollow section of Hollow-Core Photonic Crystal Fibers (hollow-core photonic bandgap fiber), for the development of high sensitivity optical fiber evanescent field sensor provides carrier.By measured matter being filled in photonic crystal fiber hollow, can obtain novel fiber evanescent field sensor, but technological process is very complicated, the design and analysis workload of sensor is large, detection time is long, and be difficult to have limited the sensitivity of sensor on the hollow wall that sensitive membrane or feature with the measured matter reaction be modified at optical fiber, restricted the application and development of such sensor.Such as document Jian Sun, Chi-Chiu Chan, Yi-Fan Zhang, Analysis of hollow-core photonic bandgap fibers for evanescent wave biosensing (being applied to the hollow photon crystal band gap fiber analysis of evanescent field bio-sensing), Journal of Biomedical Optics, 2008,13 (5): 054048 and Y.Y.Huang, Y.Xu, and A.Yariv, Fabrication of functional microstructured optical fibers through a selective-filling technique (utilizing selective filling to make the process of micro-nano structure active optical fiber), Appl.Phys.Lett., 2004,85:5182-5184 is described.
Summary of the invention
The evanescent field energy that excites for sensor fibre in the technical solution background is low, the problem of complex manufacturing technology, the purpose of this invention is to provide a kind of novel micro nanometer structured optical fiber evanescent field sensor fibre.
For realizing described purpose, the technical scheme that the invention provides the fiber evanescent field sensor fibre of novel micro nanometer structure is: the fiber evanescent field sensor fibre of the micro-nano structure that the fiber evanescent field sensor fibre of the micro-nano structure of reservation fibre cladding and covering are replaced; The fiber evanescent field sensor fibre of the novel micro nanometer structure of described reservation fibre cladding comprises: the fibre cladding that keeps pending fiber segment at optical fiber, be provided with radially micro-nano hole at fibre cladding, micro-nano hole axially is set with pitch-row along pending fiber segment, interface setting apart from fiber core at the bottom of the hole of each micro-nano hole has a segment distance, fills measured matter in the micro-nano hole and carries out index modulation; The feature of the fiber evanescent field sensor fibre of the novel micro nanometer structure that described covering is replaced comprises: the part of the fibre cladding of the pending fiber segment of removal optical fiber forms residual covering, between residual covering and the fiber core interface segment distance is arranged, cover one deck at residual covering and replace dielectric layer, be provided with radially micro-nano hole micro-nano hole and axially be set with pitch-row along pending fiber segment replacing dielectric layer; Fill measured matter in the micro-nano hole and carry out index modulation.
Preferred embodiment, described distance are between-10 λ～10 λ, and λ is the long wavelength of light source, and negative sign represents that micro-nano hole gos deep in the fiber core.
Preferred embodiment, described axial hole is apart between 0.001 λ～1000 λ.
Preferred embodiment, the size of described micro-nano hole is at 0.001 λ～1000 λ.
Preferred embodiment, the refractive index of measured matter is controlled at 0.5n
2～2n
1Between, n
1Be the refractive index of fiber core, n
2Refractive index for fibre cladding.
Preferred embodiment, the thickness of described residual covering between-0.4d～d, d be the optical fiber external diameter according to selecting the difference of optical fiber model to change, negative sign represents that fiber core also is removed part.
Preferred embodiment, the refractive index of described replacement dielectric layer are replaced the thickness of dielectric layer between 1nm～2d between 1.3～2.0, d is that the optical fiber external diameter is determined according to used optical fiber model.
Beneficial effect of the present invention: in the fiber evanescent field sensor fibre of novel micro nanometer structure of the present invention, by processing radially micro-nano pore structure at the sensor fibre of the sensor fibre that keeps fibre cladding and covering replacement, do not need to remove fibre cladding, fiber strength is high, then make the strong shock resistance of sensor, be more suitable under complicated harsh physical environment, using.By the size of control micro-nano hole, circumferentially at the bottom of layout, shaft orientation layout and the hole with the distance at fiber core interface, and the filling measured matter carries out the coupling modulation of refractive index in micro-nano hole, the energy of the higher order mode optical waveguide in the sensor fibre is induced in the micro-nano hole of optical fiber surface and forms evanescent field, more effective participation sensing, the sensitivity that improves sensor.This sensor fibre manufacture craft is simple, and cost is low, for further developing of fiber evanescent field sensor provides a brand-new approach.
Description of drawings
The making synoptic diagram of the fiber evanescent field sensor fibre of novel micro nanometer structure of the present invention such as Fig. 1 a.
Fig. 1 b is the fine synoptic diagram of the used experimental optical of the present invention.
Fig. 2 a to Fig. 2 b is the schematic cross-section of modifying processing section optical fiber.
Fig. 3 a to Fig. 3 c is that micro-nano hole is at the synoptic diagram of optical fiber axial arranging.
Fig. 4 is the diagrammatic cross-section of fiber evanescent field sensor fibre that keeps the novel micro nanometer structure of fibre cladding.
Fig. 5 a to Fig. 5 c is the machining sketch chart of the fiber evanescent field sensor fibre of covering replacement.
Fig. 6 a to Fig. 6 b is the mode electric field cloud atlas of the fiber evanescent field sensor fibre of the novel micro nanometer structure that keeps of fibre cladding.
Fig. 7 a to Fig. 7 b is the mode electric field cloud atlas of the fiber evanescent field sensor fibre of the covering novel micro nanometer structure of replacing.
Embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
Such as Fig. 1 a the making synoptic diagram of the fiber evanescent field sensor fibre of novel micro nanometer structure of the present invention is shown, Fig. 1 b illustrates the used experimental optical fibre 1 of the present invention and comprises pending fiber segment 2 and do not need fiber segment 3 to be processed; The fiber evanescent field sensor fibre of novel micro nanometer structure of the present invention comprises that the fiber evanescent field sensor fibre of two kinds of micro-nano structures is: the fiber evanescent field sensor fibre 23 of the micro-nano structure that the fiber evanescent field sensor fibre 16 of the micro-nano structure of reservation fibre cladding and covering are replaced; That pending fiber segment 2 at an experimental optical fibre 1 keeps covering and the processing of micro-nano pore structure is set thereon; The fiber evanescent field sensor fibre 23 of the novel micro nanometer structure that covering is replaced is to carry out the processing that dielectric layer is replaced covering and micro-nano pore structure is set thereon in the pending fiber segment 2 of an experimental optical fibre 1.
1. the fiber evanescent field sensor fibre 16 of the novel micro nanometer structure of described reservation fibre cladding comprises: the fibre cladding 7 that keeps pending fiber segment 2 at optical fiber 1, be provided with radially micro-nano hole 8 at fibre cladding 7, micro-nano hole 8 axially is set with pitch-row 15 along pending fiber segment 2,10 interface settings apart from fiber core 6 have a segment distance 11 at the bottom of the hole of each micro-nano hole 8, and micro-nano hole 8 interior filling measured matters 9 carry out index modulation;
The technical scheme of the fiber evanescent field sensor fibre 16 of the novel micro nanometer structure of reservation fibre cladding 7 is as follows: Fig. 2 a illustrates a plurality of micro-nano holes 8 and circumferentially evenly arranges 4 at optical fiber 1, Fig. 2 b illustrates a plurality of micro-nano holes 8 and arranges 5 in that optical fiber 1 is circumferentially non-homogeneous, wherein also illustrates at the bottom of fiber core 6, covering 7, micro-nano hole 8, measured matter 9 and the hole 10.
Get a segment length at the experimental optical fibre 1 of 0.2～100m, its kind can be that single-mode fiber, the multimode optical fiber that communication is used also can be plastic optical fiber or other special fibers, and experimental optical fibre 1 is divided into pending fiber segment 2 and does not need fiber segment 3 to be processed.At first the pending fiber segment 2 of an experimental optical fibre 1 is processed, described processing is the modification processing that the pending fiber segment 2 on experimental optical fibre 1 is beaten micro-nano hole 8, and the length of pending fiber segment 2 is between 5cm～100cm.At first pending fiber segment 2 is beaten micro-nano hole 8,10 distances 11 apart from fiber core 6 are controlled between-10 λ～10 λ at the bottom of the hole, λ is the long wavelength of incident light source, negative sign represents that micro-nano hole 8 can be deep in the fiber core 6, the kind of experimental optical fibre 1 determines, and the degree of depth of micro-nano hole 8 can be determined after 10 concrete numerical value was determined at the bottom of the hole.The shape of micro-nano hole 8 can be cylindrical, square or other regular polygons or irregularly shapedly all can.
The refractive index of fiber core 6 is n
1, the refractive index of fibre cladding 7 is n
2During detection, allotment is filled in the refractive index n of the measured matter 9 in the micro-nano hole 8
9, make n
9Be controlled at 0.5n
2～2n
1Between.Special optical fiber structure in conjunction with the accuracy controlling to measured matter 9 refractive indexes of micro-nano hole 8 interior fillings, has just formed the fiber evanescent field sensor fibre 16 that keeps the novel micro nanometer structure of fibre cladding 7.
2. the technical scheme of the fiber evanescent field sensor fibre 23 of the novel micro nanometer structure of replacement fibre cladding 7 is as follows: the feature of the fiber evanescent field sensor fibre 23 of the novel micro nanometer structure that described covering is replaced comprises: the part of the fibre cladding 7 of the pending fiber segment 2 of removal optical fiber 1 forms residual covering 20, between residual covering 20 and fiber core 6 interfaces segment distance 19 is arranged, cover one deck at residual covering 20 and replace dielectric layer 21, be provided with radially micro-nano hole 8 replacing dielectric layer 21, micro-nano hole 8 axially is set with pitch-row 15 along pending fiber segment 2; Micro-nano hole 8 interior filling measured matters 9 carry out index modulation.
The fibre cladding 7 of pending fiber segment 2 in the optical fiber 1 is removed.If selecting the material of fibre cladding 7 is doping silicon dioxides, then the method for multiplex hydrofluorite (HF) wet etching is removed fibre cladding 7, HF is when radial erosion silicon dioxide, in the axial direction silicon dioxide also there is corrosive attack, has a tapering transition layer 17 existence so remove fibre cladding 7 places.When the fibre cladding 7 of selecting is other materials, for example during plastics, generally remove fibre cladding 7 with the method for cutting, then do not have tapering transition layer 17.Residual covering 20 apart from interface distance 19 range of control of fiber core 6 at-0.4d-～d, d optical fiber external diameter is according to selecting the difference of optical fiber model to change, negative sign represents that fiber core layer 6 also is removed a part, then in the removal of pending fiber segment 2 part of fibre cladding 7 cover and replace dielectric layer 21, the thickness 22 of replacing dielectric layer is controlled between 1nm～2d, and d is that the optical fiber external diameter is determined according to used optical fiber model.The size of replacing the refractive index n of dielectric layer 21 is controlled between 1.3～2.0.
Then replacing 21 dozens of micro-nano holes 8 of dielectric layer, the number of micro-nano hole on the circumference of pending fiber segment 2, and micro-nano hole 8 is at the circumference of pending fiber segment 2 and axial distribution form, axial hole apart from 15, at the bottom of the hole 10 apart from the distance 11 at fiber core 6 interfaces and the shape of micro-nano hole 8 etc. and keep fibre cladding 7 novel micro nanometer structured optical fiber evanescent field sensor fibre 16 require identical.The length of optical fiber 1, the length requirement of pending pending fiber segment 2 also with the fiber evanescent field sensor fibre 16 of the novel micro nanometer structure that keeps fibre cladding 7 require identical.
The refractive index of allotment measured matter 9, and fill it in the micro-nano hole 8.The refractive index of measured matter 9 is controlled between 1.1～2.0.The special optical fiber structure of the present invention has just formed the novel micro nanometer structured optical fiber evanescent field sensor fibre 23 of replacing fibre cladding 7 in conjunction with the accuracy controlling to the refractive index of measured matter 9.
The fiber evanescent field sensor fibre of novel micro nanometer structure itself is the combination of a device and detection method, and the present invention requires the refractive index that is filled in the measured matter in the micro-nano hole 8 is controlled.After processing the special micro-nano structure that meets the demands at sensor fibre, the refractive index of modulation optical fiber sandwich layer 6, fibre cladding 7, replacement dielectric layer 21 and measured matter 9 makes it mutual coupling, just the energy of high-order optical waveguide in the described sensor fibre can be induced in the micro-nano hole 8 on optical fiber 1 surface and carry out sensing, reach the invention requirement.
1, the novel micro nanometer structured optical fiber evanescent field sensor fibre of covering reservation
Get the optical fiber 1 of a segment length 35cm, fiber core 6 diameters 18 μ m, fibre cladding 7 diameters 80 μ m, the length of pending fiber segment 2 is 10cm, lambda1-wavelength 1.554 μ m.10 is 1 μ m apart from the fibre core interface distance at the bottom of the hole, the refractive index 1.4378 of fibre cladding 7, the refractive index of fiber core layer 6 are 1.4459, and the refractive index of micro-nano hole 8 interior measured matters 9 is 1.4475, the aperture of micro-nano hole 8 is 5 μ m, and 4 micro-nano holes 8 are evenly distributed on the circumference of pending fiber segment 2.Get certain interface of breaking micro-nano hole 8 optical fiber, analyze the wherein characteristic of light spread modes, can get effective modulus and mainly participate in sensings in micro-nano hole 8 interior distributions less than the energy of 1.4443 higher order mode optical waveguide, and effectively modulus greater than the energy of 1.4443 low step mode optical waveguide mainly in fiber core 6 interior propagation, play the effect of communication.Fig. 6 a is that effective modulus is the electric field component cloud atlas of 1.444297 higher order mode optical waveguide, and about 86.2% energy participates in sensing in micro-nano hole.Fig. 6 b is that effective modulus is the electric field component cloud atlas of 1.444887 low step mode optical waveguide, and about 97.5% energy constraint is propagated in fibre core.
2, the novel micro nanometer structured optical fiber evanescent field sensor fibre of covering replacement
Get the experimental optical fibre 1 of another segment length 35cm, fiber core 6 diameters 18 μ m, the refractive index of fiber core 6 is 1.445, the diameter of fibre cladding 7 is 80 μ m, and the refractive index of fibre cladding 7 is 1.4378, pending fiber segment 2 length 10cm, the thickness of removing fibre cladding 7 rear residual coverings is 1 μ m, filling the refractive index of replacing dielectric layer is 1.4358, filling thickness 30 μ m, lambda1-wavelength 1.554 μ m.4 micro-nano holes 8 are evenly distributed on the circumference of optical fiber 1, aperture 5 μ m, and 10 distances apart from the interface of fiber core 5 are 1 μ m at the bottom of the hole, the refractive index of micro-nano hole 8 interior measured matters 9 is 1.447.Get certain interface of the pending fiber segment 2 of beating micro-nano hole, analyze the wherein characteristic of communication mode, can get effective modulus mainly distributes in micro-nano hole less than the energy of 1.44362 higher order mode optical waveguide and participates in sensing, and effectively modulus mainly 6 is propagated in fiber core greater than the energy of 1.44362 low step mode optical waveguide, plays the effect of communication.Fig. 7 a is that effective modulus is the electric field component cloud atlas of 1.443615 higher order mode optical waveguide, and about 88.1% energy participates in sensing in micro-nano hole.Fig. 7 b is that effective modulus is the electric field component cloud atlas of 1.44401 low step mode optical waveguide, and about 96.4% energy constraint is in fiber core 6 interior propagation.
The above; only be the embodiment among the present invention, but protection scope of the present invention is not limited to this, anyly is familiar with the people of this technology in the disclosed technical scope of the present invention; conversion or the replacement expected can be understood, all of the present invention comprising within the scope should be encompassed in.
Claims (7)
1. the fiber evanescent field sensor fibre of a micro-nano structure is characterized in that comprising: the fiber evanescent field sensor fibre (23) of the micro-nano structure that the fiber evanescent field sensor fibre (16) of the micro-nano structure of reservation fibre cladding and covering are replaced;
The fiber evanescent field sensor fibre (16) of the micro-nano structure of described reservation fibre cladding comprises: the fibre cladding (7) that keeps pending fiber segment (2) at optical fiber (1), be provided with radially micro-nano hole (8) at fibre cladding (7), micro-nano hole (8) axially is set with pitch-row (15) along pending fiber segment (2), (10) have a segment distance (11) apart from the interface setting of fiber core (6) at the bottom of the hole of each micro-nano hole (8), fill measured matter (9) in the micro-nano hole (8) and carry out index modulation;
The feature of the fiber evanescent field sensor fibre (23) of the micro-nano structure that described covering is replaced comprises: the part of the fibre cladding (7) of the pending fiber segment (2) of removal optical fiber (1) forms residual covering (20), between residual covering (20) and fiber core (6) interface segment distance (19) is arranged, cover one deck at residual covering (20) and replace dielectric layer (21), be provided with radially micro-nano hole (8) replacing dielectric layer (21), micro-nano hole (8) axially is set with pitch-row (15) along pending fiber segment (2); Fill measured matter (9) in the micro-nano hole (8) and carry out index modulation.
2. the fiber evanescent field sensor fibre of micro-nano structure as claimed in claim 1, it is characterized in that, distance (11) in the fiber evanescent field sensor fibre (16) of the micro-nano structure of described reservation fibre cladding is between-10 λ～10 λ, λ is the long wavelength of light source, and negative sign represents that micro-nano hole gos deep in the fiber core (6).
3. the fiber evanescent field sensor fibre of micro-nano structure as claimed in claim 1 is characterized in that, between 0.001 λ～1000 λ, λ is the long wavelength of light source apart from (15) for described axial hole.
4. the fiber evanescent field sensor fibre of micro-nano structure as claimed in claim 1 is characterized in that, the diameter of described micro-nano hole (8) is at 0.001 λ～1000 λ, and λ is the long wavelength of light source.
5. the fiber evanescent field sensor fibre of micro-nano structure as claimed in claim 1 is characterized in that, the refractive index of measured matter (9) is controlled at 0.5n
2～2n
1Between, n
1Be the refractive index of fiber core (6), n
2Refractive index for fibre cladding (7).
6. the fiber evanescent field sensor fibre of micro-nano structure as claimed in claim 1, it is characterized in that, the thickness (19) of described residual covering (20) is between-0.4d～d, and d is the optical fiber external diameter, and negative sign represents that fiber core (6) also is removed part.
7. the fiber evanescent field sensor fibre of micro-nano structure as claimed in claim 1 is characterized in that, the refractive index of described replacement dielectric layer (21) is replaced the thickness of dielectric layer between 1nm～2d between 1.3～2.0, and d is the optical fiber external diameter.
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| TWI667853B (en) * | 2017-12-26 | 2019-08-01 | 國家中山科學研究院 | High power fiber laser beam |
| CN111061004B (en) * | 2019-12-29 | 2021-03-19 | 中国科学院西安光学精密机械研究所 | Cladding structure of optical fiber |
| CN112779153A (en) * | 2020-12-30 | 2021-05-11 | 中国科学院长春光学精密机械与物理研究所 | Gene sequencing chip and system |
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| US5324933A (en) * | 1993-06-21 | 1994-06-28 | General Electric Company | High accuracy and high sensitivity environmental fiber optic sensor with corrugations |
| CN1795406A (en) * | 2003-04-24 | 2006-06-28 | Meso光子学有限公司 | An optical waveguide structure |
| GB2447966A (en) * | 2007-03-29 | 2008-10-01 | Fiberlogix Ltd | Optical fibre chemical sensor |
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| US5324933A (en) * | 1993-06-21 | 1994-06-28 | General Electric Company | High accuracy and high sensitivity environmental fiber optic sensor with corrugations |
| CN1795406A (en) * | 2003-04-24 | 2006-06-28 | Meso光子学有限公司 | An optical waveguide structure |
| GB2447966A (en) * | 2007-03-29 | 2008-10-01 | Fiberlogix Ltd | Optical fibre chemical sensor |
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