CN102539479B - Spacecraft in-cabin pollution load testing device - Google Patents
Spacecraft in-cabin pollution load testing device Download PDFInfo
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- CN102539479B CN102539479B CN201110425693.5A CN201110425693A CN102539479B CN 102539479 B CN102539479 B CN 102539479B CN 201110425693 A CN201110425693 A CN 201110425693A CN 102539479 B CN102539479 B CN 102539479B
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- sensing chip
- reference wafer
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Abstract
The invention discloses a spacecraft in-cabin pollution load testing device for a vacuum thermal test. The spacecraft in-cabin pollution load testing device consists of an in-cabin pollution load probe system and a testing system which is electrically communicated with the in-cabin pollution load probe system, wherein the probe system comprises a probe and a driver; the probe comprises a sensing wafer and a reference wafer which are fixedly arranged on a flange; a temperature sensor for measuring the two wafers are also arranged on the flange; a circuit structure is arranged in the driver; and the temperature sensor and an output driving circuit in the driver are respectively and electrically communicated with the testing system so as to transmit temperature and frequency data to the testing system. According to the spacecraft in-cabin pollution load testing device for the vacuum thermal test, which is disclosed by the invention, measurement range of 1*10-5g/cm2 of a pollution load is realized, the adaptive temperature of the probe reaches 60 DEG C, and the requirement for monitoring the pollution load of the vacuum thermal test of a spacecraft is met.
Description
Technical field
The invention belongs to the vacuum thermal test field of spacecraft, be specifically related to a kind of device that measures examination for the internal contamination of vacuum thermal test spacecraft module.
Background technology
The monitoring of spacecraft module internal contamination amount is that spacecraft pollutes one of key foundation of protecting.Pollutant in cabin can deposit or be deposited in spacecraft critical component near surface, cause critical component electric discharge, adhesion, short circuit, open circuit, can cause critical component Performance Decay and inefficacy.
Spacecraft indoor environment and extravehicular environment have very big difference, and in spacecraft module, environmental quality is that temperature is high, contaminant capacity is large, and through test analysis, in cabin, temperature can reach 60 ℃, and pollution deposit amount surpasses 10
-5g/cm
2; Spacecraft module external environment feature is that temperature is low, contaminant capacity is relatively less, and temperature is generally lower than-50 ℃ out of my cabin, and pollution deposit amount is generally 10
-7g/cm
2magnitude.
Beijing Satellite Environment Engineering Research Institute once adopted the outer contaminant capacity proving installation of spacecraft module to carry out spacecraft module internal contamination and measured examination, and test findings shows, the performance of test macro can not meet test request.Affect Cabin contamination amount Testing factors as follows:
A) the highest of contaminant capacity testing range is to 2 * 10
-6g/cm
2, can not meet 1 * 10
-5g/cm
2requirement;
B) contaminant capacity proving installation internal electron system works temperature range is up to 50 ℃, can not meet the requirement of 60 ℃.
Known in view of current research situation, provide a kind of spacecraft in-cabin pollution load testing device for vacuum thermal test extremely important and necessary.
Summary of the invention
The object of the present invention is to provide a kind of spacecraft in-cabin pollution load testing device for vacuum thermal test, having solved existing contaminant capacity test macro can not withstand high temperatures and the little problem of contaminant capacity range, thereby provides technical guarantee for spacecraft thermal vacuum test.
Spacecraft in-cabin pollution load testing device for vacuum thermal test of the present invention, by Cabin contamination amount probe system with the test macro of its telecommunication, form, wherein, probe system comprises probe and driver, probe comprises sensing chip and the reference wafer being fixedly installed on flange, on flange, be also provided with the temperature sensor of measuring two plates, in driver, be provided with circuit structure, in circuit structure, sensing chip high-gain driving circuit is electrically connected with the whole wave circuit of sensing chip, reference wafer high-gain driving circuit is electrically connected with the whole wave circuit of reference wafer, then both are parallel-connected in differential frequency circuit, differential frequency circuit is electrically connected on output driving circuit, sensing chip and reference wafer are electrically connected to sensing chip high-gain driving circuit and reference wafer high-gain driving circuit respectively, output driving circuit in temperature sensor and driver respectively with test macro telecommunication to send temperature and frequency data to test macro.
Further, the other heating radiator that is also provided with of driver.
Further, sensing chip and reference wafer electrode surface adopt chromium plating modification.
Spacecraft in-cabin pollution load testing device for vacuum thermal test of the present invention, has realized contaminant capacity measurement range and has reached 1 * 10
-5g/cm
2, probe adaptive temperature reaches 60 ℃, has met the needs of spacecraft thermal vacuum test contaminant capacity monitoring.
Accompanying drawing explanation
Fig. 1 is showing of the spacecraft in-cabin pollution load testing device for vacuum thermal test of the present invention
Intention.In figure: 1-probe, 2-driver, 3-test macro
Fig. 2 is the schematic diagram that the probe of the spacecraft in-cabin pollution load testing device for vacuum thermal test of the present invention forms.
In figure: 1.1-sensing chip, 1.2-temperature sensor, 1.3-reference wafer, 1.4-flange
Fig. 3 is the schematic diagram that the driver of the spacecraft in-cabin pollution load testing device for vacuum thermal test of the present invention forms.
In figure: 2.1-sensing chip high-gain driving circuit, 2.2-reference wafer high-gain driving circuit, the whole wave circuit of 2.3-sensing chip, the whole wave circuit of 2.4-reference wafer, 2.5-differential frequency circuit, 2.6-output driving circuit, 2.7-heating radiator.
Embodiment
Below in conjunction with accompanying drawing, the spacecraft in-cabin pollution load testing device for vacuum thermal test of the present invention is further described.
Fig. 1 is the composition schematic diagram of the spacecraft in-cabin pollution load testing device for vacuum thermal test of the present invention.Wherein proving installation of the present invention comprises probe 1, driver 2 and test macro 3.The designed proving installation of the present invention is characterized in driver and probe separation structure, and the independent temperature adaptability of driver and probe is provided.
Fig. 2 is that the probe of the spacecraft in-cabin pollution load testing device for vacuum thermal test of the present invention forms schematic diagram.Wherein the probe in device of the present invention comprises sensing chip, temperature sensor, reference wafer and flange.Sensing chip 1.1 and reference wafer 1.3 are fixed on flange 1.4, on flange 1.4, be also provided with the temperature sensor 1.2 of measuring two plates, one of its feature of probe that the present invention is designed is that sensing chip, reference wafer, temperature sensor contact with flange close thermal, makes sensing chip, reference wafer temperature stabilization in environment temperature.Two of its feature of probe that the present invention is designed is that sensing chip and reference wafer electrode surface adopt chromium plating modification, improves the stability of sensing chip hot environment.
Fig. 3 is that the driver of the spacecraft in-cabin pollution load testing device for vacuum thermal test of the present invention forms schematic diagram.Wherein driver of the present invention comprises circuit structure, in circuit structure, sensing chip high-gain driving circuit 2.1 is electrically connected with the whole wave circuit 2.3 of sensing chip, reference wafer high-gain driving circuit 2.2 is electrically connected with the whole wave circuit 2.4 of reference wafer, then both are parallel-connected in differential frequency circuit 2.5, differential frequency circuit 2.5 is electrically connected on output driving circuit 2.6, sensing chip 1.1 and reference wafer 1.3 are electrically connected to sensing chip high-gain driving circuit 2.1 and reference wafer high-gain driving circuit 2.2 respectively, output driving circuit 2.6 in temperature sensor 1.3 and driver 2 respectively with test macro 3 telecommunications to send temperature and frequency data to test macro 3.One of its feature of driver of the present invention's design is to adopt high-gain driving circuit, improves sensing chip and reference wafer driving force, expands and measures range to 1 * 10
-5g/cm
2.Two of the driver feature of the present invention's design is that all circuit contact with heating radiator close thermal, reduces the temperature rise that circuit part heating causes, and expands environmental adaptation temperature to 60 ℃.
Although above the specific embodiment of the present invention has been given to describe in detail and explanation; but what should indicate is; we can carry out various equivalences to above-mentioned embodiment according to conception of the present invention and change and revise; when its function producing does not exceed spiritual that instructions and accompanying drawing contain yet, all should be within protection scope of the present invention.
Claims (1)
1. the spacecraft in-cabin pollution load testing device for vacuum thermal test, by Cabin contamination amount probe system with the test macro of its telecommunication, form, wherein, probe system comprises probe and driver, probe comprises sensing chip and the reference wafer being fixedly installed on flange, on flange, be also provided with the temperature sensor of measuring two plates, in driver, be provided with circuit structure, in circuit structure, sensing chip high-gain driving circuit is electrically connected with the whole wave circuit of sensing chip, reference wafer high-gain driving circuit is electrically connected with the whole wave circuit of reference wafer, then both are parallel-connected in differential frequency circuit, differential frequency circuit is electrically connected on output driving circuit, sensing chip and reference wafer are electrically connected to sensing chip high-gain driving circuit and reference wafer high-gain driving circuit respectively, output driving circuit in temperature sensor and driver respectively with test macro telecommunication to send temperature and frequency data to test macro, sensing chip, reference wafer, temperature sensor contacts with flange close thermal, make sensing chip, reference wafer temperature stabilization is in environment temperature, sensing chip and reference wafer electrode surface adopt chromium plating modification, the other heating radiator that is also provided with of driver, and all circuit contact with heating radiator close thermal.
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---|---|---|---|
CN201110425693.5A CN102539479B (en) | 2011-12-19 | 2011-12-19 | Spacecraft in-cabin pollution load testing device |
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---|---|---|---|
CN201110425693.5A CN102539479B (en) | 2011-12-19 | 2011-12-19 | Spacecraft in-cabin pollution load testing device |
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CN102539479A CN102539479A (en) | 2012-07-04 |
CN102539479B true CN102539479B (en) | 2014-02-19 |
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Families Citing this family (2)
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---|---|---|---|---|
CN110824049A (en) * | 2019-11-14 | 2020-02-21 | 上海卫星装备研究所 | Pollution monitoring system and method for spacecraft vacuum thermal test |
CN114609678B (en) * | 2022-05-11 | 2022-08-19 | 兰州空间技术物理研究所 | In-situ detector for dust deposition quality caused by lifting of spacecraft on lunar surface |
Citations (3)
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JP2001242057A (en) * | 2000-02-28 | 2001-09-07 | Natl Inst Of Advanced Industrial Science & Technology Meti | Small simplified detection device for gas or floating file particle in atmosphere |
US6463787B1 (en) * | 1999-03-23 | 2002-10-15 | Atotech Deutschland Gmbh | Mounting for a quartz crystal |
CN201876398U (en) * | 2010-10-25 | 2011-06-22 | 北京卫星环境工程研究所 | Single-chip and double-counter-electrode quartz crystal microbalance probe device |
-
2011
- 2011-12-19 CN CN201110425693.5A patent/CN102539479B/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6463787B1 (en) * | 1999-03-23 | 2002-10-15 | Atotech Deutschland Gmbh | Mounting for a quartz crystal |
JP2001242057A (en) * | 2000-02-28 | 2001-09-07 | Natl Inst Of Advanced Industrial Science & Technology Meti | Small simplified detection device for gas or floating file particle in atmosphere |
CN201876398U (en) * | 2010-10-25 | 2011-06-22 | 北京卫星环境工程研究所 | Single-chip and double-counter-electrode quartz crystal microbalance probe device |
Non-Patent Citations (2)
Title |
---|
基于PQCM和FPGA的空间应用分子污染监测仪设计;王峰 等;《计算机测量与控制》;20091231;第17卷(第1期);145-148、161 * |
王峰 等.基于PQCM和FPGA的空间应用分子污染监测仪设计.《计算机测量与控制》.2009,第17卷(第1期),243-246. |
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