CN102670241A - Active biological characteristic sensor and electronic equipment using same - Google Patents

Active biological characteristic sensor and electronic equipment using same Download PDF

Info

Publication number
CN102670241A
CN102670241A CN2011100645953A CN201110064595A CN102670241A CN 102670241 A CN102670241 A CN 102670241A CN 2011100645953 A CN2011100645953 A CN 2011100645953A CN 201110064595 A CN201110064595 A CN 201110064595A CN 102670241 A CN102670241 A CN 102670241A
Authority
CN
China
Prior art keywords
electrode
biological characteristic
characteristic sensor
active biological
vibration wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN2011100645953A
Other languages
Chinese (zh)
Other versions
CN102670241B (en
Inventor
周正三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
J Metrics Technology Co Ltd
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to CN201110064595.3A priority Critical patent/CN102670241B/en
Publication of CN102670241A publication Critical patent/CN102670241A/en
Application granted granted Critical
Publication of CN102670241B publication Critical patent/CN102670241B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Abstract

The invention discloses an active biological characteristic sensor. The active biological characteristic sensor comprises a first carrier, a fixed first electrode, a suspension second electrode, a supporting structure and a driving signal generator. The first electrode is arranged on the first carrier. The second electrode faces the first electrode. The supporting structure separates the first electrode from the second electrode so that the first electrode and the second electrode form an accommodating space. The driving signal generator outputs a driving signal to the first electrode or the second electrode so that the second electrode generates a first vibration wave. The first vibration wave is interfered by a biological characteristic and changes into a second vibration wave. The invention also discloses electronic equipment using the active biological characteristic sensor. The active biological characteristic sensor and the electronic equipment using the same are low in power consumption, small in size, can effectively sense surface and hypodermic biological characteristics, and are not greatly influenced by distance.

Description

Active biological characteristic sensor and use its electronic installation
Technical field
The present invention relates to a kind of active (active) biological characteristic sensor and use its electronic installation, and particularly have and relate to a kind of electronic installation that utilizes active vibration wave to come the sensor of detection of biological characteristic and use it.
Background technology
The method of traditional biological characteristic sensor (being the fingerprint sensor for example) sensing has several kinds; For example optical sensing principle; Its shortcoming is that effectively sensing is done finger and dirty, and needs an illumination optical and imaging system, and not only consumed power is high and bulky.Modal in addition is exactly the semiconductor chip that utilizes electric capacitance measurement, and its advantage is that power consumption is little and volume is little, but shortcoming is can't the wet finger of sensing.The mode of utilizing pressure-sensing is arranged in addition, be characterized in to provide the structure of an easy compressive deformation, but the power of this sensor of finger presses must be enough.If the power of this sensor of finger contact is pressed into this sensor, the sensing result that then can't obtain inadequately or not.Above in addition technology all can't the sensing subcutaneous tissue, as the collection of more bio informations.A kind of in addition method is to utilize the technology of infrared ray sensing veins beneath the skin, can solve above-mentioned measurement shortcoming, but complicated optical system makes its volume, and power consumption and price all are difficult for popularization and application.
For solving above all problems, the present invention will provide an active biological characteristic sensor, reach low-power consumption, volume is little, not only can detect the biological characteristic on surface, and for example fingerprint more possibly detect subcutaneous biological characteristic, for example information such as blood vessel.
Summary of the invention
Therefore, an object of the present invention is to provide a kind of low-power consumption, volume little, and effectively sensitive surface and subcutaneous biological characteristic and active biological characteristic sensor that does not receive apart from significantly influence and the electronic installation that uses it.
For reaching above-mentioned purpose, the present invention provides a kind of active biological characteristic sensor to comprise one first carrier, fixing first electrode, suspension second electrode, a supporting construction and a driving signal generator.First electrode is arranged at first carrier.Second electrode is arranged in the face of first electrode.Supporting construction separates first electrode and second electrode, so that first electrode and second electrode form an accommodation space.Signal generator output one drives signal to the first electrode or second electrode, so that second electrode produces first vibration wave.First vibration wave receives a biological feature interference and is transformed into second vibration wave.
In addition, the present invention also provides a kind of electronic installation that uses aforementioned active biological characteristic sensor.
Through above-mentioned active biological characteristic sensor of the present invention, can reach the initiatively function of sensing, for the fingerprint of pushing the not enough finger of power goodish sensing effect can be arranged still.It should be noted that because the characteristic of active sensing so can increase a dormancy and wake control module up, makes first vibration wave of active detecting need not continue to send.Perhaps, also can increase the electric capacity of a sensing function, with the function of integration active with passive detection with sensing first electrode and second electrode.
The active biological characteristic sensor of the embodiment of the invention and use its electronic installation, low in energy consumption, volume is little, and effectively sensitive surface and subcutaneous biological characteristic and not significantly influenced by distance.
Description of drawings
Accompanying drawing described herein is used to provide further understanding of the present invention, constitutes the application's a part, does not constitute qualification of the present invention.In the accompanying drawings:
Figure 1A shows the sketch map according to the active biological characteristic sensor of first embodiment of the invention.
Figure 1B shows a kind of combination of second electrode and wall.
Fig. 1 C shows the another kind of combination of second electrode and wall.
Fig. 1 D shows the combination of second carrier and second electrode.
Fig. 2 shows a kind of pattern of the relative motion state of first electrode and second electrode.
Fig. 3 shows the embodiment according to each sensing unit framework of biological characteristic sensor of the present invention.
Fig. 4 and Fig. 5 show the application according to biological characteristic sensor of the present invention.
Drawing reference numeral:
C1: electric capacity
C2: electric capacity
F: finger/biological characteristic
FV: stricture of vagina paddy
FR: stricture of vagina peak
OP: operational amplifier
S1: drive signal
S2: sensing signal
W1: first vibration wave
W2: second vibration wave
1: the biological characteristic sensor
2: notebook computer
3: cursor of mouse
4: mobile phone
5: sensing unit
10: the first carriers
20: the first electrodes
22: display module
23: processing module
30: driving signal generator
40: the second electrodes
41: the second intermediate layer of material
42: display module
43: processing module
45: the three intermediate layer of material
50: supporting construction/wall
51: the three intermediate layer of material
55: accommodation space
60: read circuit
70: the second carriers
The specific embodiment
For letting the foregoing of the present invention can be more obviously understandable, hereinafter is special lifts a preferred embodiment, and cooperates appended graphicly, elaborates as follows.
Figure 1A shows the sketch map according to the active biological characteristic sensor of first embodiment of the invention.Shown in Figure 1A, the active biological characteristic sensor 1 of present embodiment comprises one first carrier 10, fixing first electrode 20, suspend second electrode 40, a supporting construction (or claiming wall) 50 and one driving signal generator 30.
First electrode 20 is arranged at first carrier 10.First carrier 10 can have quite a few kinds of frameworks; For example in the present embodiment, particularly has the semiconductor substrate that integrated circuit is integrated, for example silicon substrate; Add the circuit structure that is made in its inner transistor unit and top thereof, also can constitute first carrier 10 of the present invention.Certain first carrier 10 also can be for example insulant, for example glass, pottery or polymeric substrate or the like.First electrode can be last one metal conductor layer in the integrated circuit fabrication process for example; The also perhaps conductor layer of extra interpolation, second electrode 40 be arranged in the face of first electrode, 20, the second electrodes 40 can be the whole plain conductor material that is; For example be the silicon of low resistance, through with SiO 2Utilize joining technique and the relevant formed membrane structure of etching that grinds between the wall 50, both form the interface with HYDROGEN BOND INTENSITY through low temperature juncture (low temperature fusion bonding) in the present embodiment.Certainly before forming the low temperature joint, can comprise that more the water cleaning reaches the for example oxide layer (HF dip) of low concentration hydrofluoric acid to remove second electrode surface, in order to reach surface active, more can comprise surface plasma (plasma) processing, for example be exposed to oxygen (O 2) and nitrogen (N 2) electricity slurry environment under, and in order to let the surface that engages that good flatness is arranged, more can utilize chemical mechanical milling method (CMP) will surface to be joined to polish and throw and put down.
If be provided with transistor and component in first carrier 10, the annealing temperature (anneal temperature) that is provided after then just can only be lower than 500 ℃ environment down the covalent bond of the high key knotting strength of formation between the wall 50 and second electrode 40.
Yet; The wall 50 and second electrode 40 are except above-mentioned direct juncture; Also can be provided with one first intermediate layer of material 51 by each wall 50, and one second intermediate layer of material 41 is set for 40 times, engage the mode of first intermediate layer of material 51 again through second intermediate layer of material 41 at second electrode; Second electrode 40 is fixedly arranged on the wall 50, shown in Figure 1B.Wherein, First intermediate layer of material 51 or second intermediate layer of material 41 can be respectively aluminum and germanium or silicon and gold; For example aluminum and germanium can form eutectic at about 420 ℃ and engage (eutectic bonding); And these two kinds of materials are compatible with the CMOS manufacturing process, are more suitable for being applied in present embodiment and have the design that integrated circuit is integrated.In addition; One the 3rd intermediate layer of material 45 also can only be set between the wall 50 and second electrode 40 to engage; Shown in Fig. 1 C, 45 of this 3rd intermediate layer of material can be glass frit (glass frit), macromolecule gummed layer and other jointing materials or the like.
In another embodiment; Wall 50 is to be made up of metal for example, particularly is made up of gold (Au), or is made up of composite metal structures (the for example composite construction of nickel and gold); Second electrode 40 can also be arranged on one second carrier 70, shown in Fig. 1 D.The combination of second carrier 70 and second electrode 40 for example is a flexible circuit board, and it is reached by formed second electrode 40 of metallic circuit such as 70 of the polymer material layers of pi (polyimide) form.Metallic circuit and polymer material layer can be single or multiple lifts, and the structure and the material that relate to flexible circuit board are known technology, do not give unnecessary details at this.And the joint of flexible circuit board and golden projection is a known technology, does not give unnecessary details at this.
Because this similar is in the combinative structure of first carrier 10 and first electrode 20, so no longer detail and show in this.
Wall 50 separates first electrode 20 and second electrode 40, so that first electrode 20 and second electrode 40 form an accommodation space 55.In the present embodiment, wall 50 connects first carrier 10 and second electrode 40, and is arranged between first carrier 10 and second electrode 40.
Driving signal generator 30 outputs one drive signal (being drive voltage signal for example) S1 to the first electrode 20 or second electrode 40; Because the relation of electrostatic force, second electrode 40 that belongs to suspension structure can be attracted to change the distance of itself and first electrode 20 by first electrode 20.If drive with a certain CF; Then second electrode 40 is understood the vibration that therefore produce a CF; Thereby export the first vibration wave W1 to external world, the vibration wave frequency can in response to and change, even operate in supersonic frequency; The resonant frequency of second electrode 40 that more can be through will belonging to suspension structure is designed to identical with the frequency that drives signal S1, can reach like this and economize most power consumption and peak response.The first vibration wave W1 is disturbed by a biological characteristic F or because the change of phase place or because the change of amplitude, and is transformed into the second vibration wave W2.In first embodiment, driving signal generator 30 is electrically connected to second electrode 40, and output drive signal S1 to the second electrode 40, so that second electrode 40 produces the first vibration wave W1.The first vibration wave W1 is disturbed by biological characteristic F and is transformed into the second vibration wave W2.
In the present invention, biological characteristic is skin surface or its subcutaneous biological characteristic, for example epidermis fingerprint, corium lines or veins beneath the skin lines or the like.And can detect subcutaneous specific biological characteristic in order to reach; Blood vessel lines for example; Possibly operate in specific frequency; To avoid the interference of skin surface, common supersonic frequency can reach this function, and therefore active structure of the present invention also can be used for the sensing of non-contact type and contact-type.In the present embodiment, be that fingerprint (comprising stricture of vagina peak FR and stricture of vagina paddy FV) with finger F is used as biological characteristic explanation.
It should be noted that first electrode 20, second electrode 40 and read circuit 60 and constitute sensing unit 5.In addition; First electrode 20 of each sensing unit 5 of active biological characteristic sensor 1 more can be electrically connected to one and read circuit 60; And read each and the signal between first electrode 20 and second electrode 40 is changed and obtain a sensing signal S2; Sensing signal S2 is a range information for example corresponding to the customizing messages of biological characteristic F and biological characteristic sensor 1.If sensing unit 5 does not receive the stricture of vagina peak and disturbs, then read signal that circuit 60 reads through first electrode 20 should be said be phase place and the amplitude signal identical with the first vibration wave W1; If instead be interfered; Read then that signal that circuit 60 reads through first electrode 20 then has phase place or oscillation amplitude change obtains sensing signal S2; Because the stricture of vagina peak FR of fingerprint is different with the distance of second electrode with stricture of vagina paddy FV; So can produce different interference to the first vibration wave W1, thereby make second vibration wave W2 difference to some extent, thereby obtain the different information of stricture of vagina peak FR with the distance between the stricture of vagina paddy FV.
Biological characteristic sensor 1 can become the framework of two-dimensional array or one-dimensional array according to Application Design; So biological characteristic sensor 1 can more comprise (N-1) individual sensing unit 5; Just biological characteristic sensor 1 comprises N sensing unit 5 altogether; N sensing unit 5 lines up an array, and wherein N is the positive integer more than or equal to 2.
It should be noted that signal generator also can be electrically connected to first electrode, and control circuit can be electrically connected to second electrode.Fig. 2 shows a kind of pattern of the relative motion state of first electrode and second electrode.As shown in Figure 2, first electrode, 20 relative fixed for example operate under the resonance mode, then second electrode 40 can up-down vibration to produce the first vibration wave W1.
Fig. 3 shows that each the sensing unit according to biological characteristic sensor of the present invention comprises an embodiment of circuit framework.As shown in Figure 3, capacitor C 1 is represented the electric capacity between first electrode 20 and second electrode 40, and capacitor C 2 is a reference capacitance.In the present embodiment, read circuit 60 and comprise an operational amplifier OP, through the connected mode of operational amplifier OP; First electrode 20 is connected in the negative input end of OP, and the positive input terminal of OP then is electrically connected to an earthing potential or a fixed voltage, because the characteristic of OP; Its two input is regarded as isoelectric level; Therefore first electrode 20 also is regarded as earthing potential, and therefore when input one drove signal S1 in second electrode 40, second electrode 40 that the electrostatic force that both meetings produce because of voltage difference will suspend was inhaled toward first electrode 20; Thereby make distance between the two become near, thereby make capacitance C1 become big.Through the conversion of OP and reference capacitance C2, can obtain the S2 signal of a correspondence at the outfan of OP.Therefore, if the S1 of input changes the fixed cycle, it also will be the output with the S1 same phase that its S2 of sensing unit that then is not interfered exports, and both amplitude relations are S2=S1*C1/C2.If sensing unit is disturbed, for example hands fingerprint peaks contact, then the C1 value will be disturbed and make the S2 of output change.
Fig. 4 and Fig. 5 show the application according to biological characteristic sensor of the present invention.As shown in Figure 4, biological characteristic sensor 1 can be used in notebook computer 2, for example as finger print input device, perhaps utilizes finger to move moving and relevant keypress function with mouse beacon cursor 3.As shown in Figure 5, biological characteristic sensor 1 can be used in running gear, and for example phone 4, is same as aforesaid function to reach, and the software and the hardware associative operation of control mobile phone 4.Wherein, Biological characteristic sensor 1 as indicator device utilizes the direction that can replace the traditional mechanical operating means to choose and push and choose; Left click, right click, twin shaft scrolling more can be provided, amplify, dwindle, switch, double-click (Double click), and long by presetting functions such as application program above entering after the scheduled time.Certainly except the application of above-mentioned notebook computer 2 and mobile phone 4, biological characteristic sensor 1 of the present invention more can be used in any electronic installation that needs finger print input device or directivity device.Therefore, the present invention more provides a kind of electronic equipment with aforementioned biological characteristic sensor 1, to control the operation of this electronic equipment.
Therefore, electronic installation 2/4 of the present invention comprises a sensing apparatus (biological characteristic sensor) 1, one display module 22/42 and a processing module 23/43.As shown in Figure 4; Sensing apparatus 1 is installed in the notebook computer 2; Processing module 23 (can be central processing unit, CPU) again according to having object (like object 5, being finger at this) variation of the mobile multi-point deformetion that causes on sensing apparatus 1 that surface pattern distributes; Come controlling application program (like moving or man-computer interface of cursor 3), and the control display module 22 corresponding pictures (like the picture of man-computer interface) that show application program.As shown in Figure 5, sensing apparatus 1 is installed in the mobile phone 4, and operates the display module 42 of mobile phone 4 with above-mentioned mode.What is more, should use example, and sensing apparatus 1 can not only be used as the control that cursor 3 moves or the switching of screen-picture or the like function, also pressure-sensing can be provided, even be used as and replace mechanical button and use.In addition, sensing apparatus also can read enough finger lines information and use as biological identification, even the other biological information below the finger skin is to use as medical treatment or biological identification.
Therefore, the present invention more provides a kind of electronic installation, and it comprises aforesaid active biological characteristic sensor 1, a processing module 23/43 and a display module 22/42.Processing module 23/43 is electrically connected to active biological characteristic sensor 1; And reception sensing signal S2; And handle and differentiate the meaning of sensing signal S2 at least one application-specific, an application program is controlled in the variation of for example on active biological characteristic sensor 1, moving the multi-point deformetion that causes according to biological characteristic F.The meaning of at least one application-specific comprises biological characteristic identification or cursor of mouse moves.Display module 22/42 is electrically connected to processing module 23, and shows a picture of corresponding application program.
Through above-mentioned active biological characteristic sensor of the present invention, can reach the initiatively function of sensing, for the fingerprint of pushing the not enough finger of power goodish sensing effect can be arranged still.It should be noted that because the characteristic of active sensing so can increase a dormancy and wake control module up, makes first vibration wave of active detecting need not continue to send.Perhaps, also can increase the electric capacity of a sensing function, with the function of integration active with passive detection with sensing first electrode and second electrode.
The only convenient explanation of the specific embodiment that in the detailed description of preferred embodiment, is proposed technology contents of the present invention; But not with narrow sense of the present invention be limited to the foregoing description; In the situation that does not exceed spirit of the present invention and claim scope; The many variations of being done is implemented, and all belongs to scope of the present invention.

Claims (12)

1. an active biological characteristic sensor is characterized in that, comprises at least:
One first carrier;
One fixing first electrode is arranged at said first carrier;
One suspension, second electrode is arranged in the face of said first electrode;
One supporting construction separates said fixing first electrode and said suspension second electrode, so that said fixing first electrode and said suspension second electrode form an accommodation space; And
One driving signal generator, output one drives signal to said first electrode or said second electrode, so that said suspension second electrode produces first vibration wave, said first vibration wave receives a biological feature interference and is transformed into second vibration wave.
2. active biological characteristic sensor as claimed in claim 1 is characterized in that, more comprises:
One reads circuit, is electrically connected to said first electrode or said second electrode, receives said second vibration wave and obtains a sensing signal, and said sensing signal is corresponding to the customizing messages of said biological characteristic and said biological characteristic sensor.
3. active biological characteristic sensor as claimed in claim 2 is characterized in that, the said circuit that reads reads the signal variation between said first electrode and said second electrode and obtains said sensing signal.
4. active biological characteristic sensor as claimed in claim 3; It is characterized in that; The said circuit that reads comprises an operational amplifier, and said first electrode is connected in a negative input end of said operational amplifier, and a positive input terminal of said operational amplifier is electrically connected to an earthing potential; One outfan of said operational amplifier is electrically connected to the said negative input end of said operational amplifier through a reference capacitance, and the said outfan of said operational amplifier is exported said sensing signal.
5. active biological characteristic sensor as claimed in claim 2 is characterized in that said customizing messages is corresponding to the amplitude variations or the phase change of said sensing signal.
6. active biological characteristic sensor as claimed in claim 2 is characterized in that, the said circuit that reads is exported said driving signal and obtained said sensing signal with the mode of timesharing.
7. active biological characteristic sensor as claimed in claim 1 is characterized in that, more comprises:
One first intermediate layer of material is arranged on the said supporting construction;
One second intermediate layer of material is arranged under said second electrode, and said second intermediate layer of material engages said first intermediate layer of material.
8. active biological characteristic sensor as claimed in claim 1 is characterized in that, is provided with a component in said first carrier.
9. active biological characteristic sensor as claimed in claim 8 is characterized in that, said supporting construction and said second electrode are formed with covalent bond.
10. active biological characteristic sensor as claimed in claim 2; It is characterized in that; Said first electrode, said second electrode and the said circuit that reads constitute sensing unit; And said biological characteristic sensor more comprises N-1 sensing unit, and said N sensing unit lines up an array, and wherein N is the positive integer more than or equal to 2.
11. an electronic installation is characterized in that, comprises at least:
One active biological characteristic sensor comprises at least:
One first carrier;
One fixing first electrode is arranged at said first carrier;
One suspension, second electrode is arranged in the face of said first electrode;
One supporting construction separates said fixing first electrode and said suspension second electrode, so that
Said fixing first electrode and said suspension second electrode form an accommodation space;
One driving signal generator, output one drives signal to said first electrode or said second electrode, so that said suspension second electrode produces first vibration wave, said first vibration wave receives a biological feature interference and is transformed into second vibration wave; And
One reads circuit, is electrically connected to said first electrode or said second electrode, and receives said second vibration wave and obtain a sensing signal, and said sensing signal is corresponding to the customizing messages of said biological characteristic and said biological characteristic sensor;
One processing module is electrically connected to said active biological characteristic sensor, and receives said sensing signal, and handles and differentiate the meaning of said sensing signal at least one application-specific; And
One display module is electrically connected to said processing module, and shows a picture of corresponding said application program.
12. electronic installation as claimed in claim 11 is characterized in that, the meaning of said at least one application-specific comprises biological characteristic identification or cursor of mouse moves.
CN201110064595.3A 2011-03-17 2011-03-17 Active biological characteristic sensor and electronic equipment using same Expired - Fee Related CN102670241B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201110064595.3A CN102670241B (en) 2011-03-17 2011-03-17 Active biological characteristic sensor and electronic equipment using same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201110064595.3A CN102670241B (en) 2011-03-17 2011-03-17 Active biological characteristic sensor and electronic equipment using same

Publications (2)

Publication Number Publication Date
CN102670241A true CN102670241A (en) 2012-09-19
CN102670241B CN102670241B (en) 2014-12-10

Family

ID=46803267

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201110064595.3A Expired - Fee Related CN102670241B (en) 2011-03-17 2011-03-17 Active biological characteristic sensor and electronic equipment using same

Country Status (1)

Country Link
CN (1) CN102670241B (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104063644A (en) * 2014-06-25 2014-09-24 深圳市中兴移动通信有限公司 Fingerprint identifying method, terminal and server
CN105844273A (en) * 2014-12-17 2016-08-10 义隆电子股份有限公司 Fingerprint Sensing Device
CN106257485A (en) * 2015-06-22 2016-12-28 李美燕 Integrated vibration wave emission sensing element and sensing array, electronic device and manufacturing method
TWI581192B (en) * 2014-12-08 2017-05-01 麥克思股份有限公司 Fingerprint identification unit and device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1388360A (en) * 2001-05-25 2003-01-01 周正三 Capacitance-type micro pressure-sensing element and its making process and signal reading method
US20030067249A1 (en) * 2001-10-05 2003-04-10 Lockwood Geoffrey R. Ultrasound transducer array
CN1619816A (en) * 2003-11-18 2005-05-25 三星电子株式会社 Fingerprint sensor and fabrication method thereof
CN101727569A (en) * 2008-10-29 2010-06-09 神盾股份有限公司 Planar semiconductor fingerprint sensing device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1388360A (en) * 2001-05-25 2003-01-01 周正三 Capacitance-type micro pressure-sensing element and its making process and signal reading method
US20030067249A1 (en) * 2001-10-05 2003-04-10 Lockwood Geoffrey R. Ultrasound transducer array
CN1619816A (en) * 2003-11-18 2005-05-25 三星电子株式会社 Fingerprint sensor and fabrication method thereof
CN101727569A (en) * 2008-10-29 2010-06-09 神盾股份有限公司 Planar semiconductor fingerprint sensing device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104063644A (en) * 2014-06-25 2014-09-24 深圳市中兴移动通信有限公司 Fingerprint identifying method, terminal and server
CN104063644B (en) * 2014-06-25 2016-03-02 深圳市中兴移动通信有限公司 The method of fingerprint recognition, terminal and server
TWI581192B (en) * 2014-12-08 2017-05-01 麥克思股份有限公司 Fingerprint identification unit and device
CN105844273A (en) * 2014-12-17 2016-08-10 义隆电子股份有限公司 Fingerprint Sensing Device
CN106257485A (en) * 2015-06-22 2016-12-28 李美燕 Integrated vibration wave emission sensing element and sensing array, electronic device and manufacturing method
CN106257485B (en) * 2015-06-22 2020-01-10 李美燕 Integrated vibration wave emission sensing element and sensing array, electronic device and manufacturing method

Also Published As

Publication number Publication date
CN102670241B (en) 2014-12-10

Similar Documents

Publication Publication Date Title
US20230077484A1 (en) Touch sensor detector system and method
US9990533B2 (en) Self-capacitive fingerprint sensor with active amplified pixels
EP3066545B1 (en) Piezoelectric force sensing array
KR101623809B1 (en) Press detection function-equipped touch panel
EP3049902B1 (en) Capacitive touch sensor system and method
EP2656183B1 (en) Active stylus for use with touch-sensitive interfaces and corresponding method
WO2016112781A1 (en) Electronic device and capacitive sensing system thereof, and detection method for capacitive sensing system
CN108883435A (en) The drive scheme read for ultrasonic transducer pixel
CN103729615A (en) Biosensor module, biosensor assembly, method of manufacturing the same, and electronic device using the same
WO2015066599A2 (en) Piezoelectric force sensing array
CN102670241B (en) Active biological characteristic sensor and electronic equipment using same
US20210055832A1 (en) Touch panel pressure detection
CN101615091A (en) Touch display screen
US20190187767A1 (en) Electronic device, method for operating the same, and wireless controllable electronic assembly
US11314361B2 (en) Touch apparatus and touch detection method thereof
CN106325582A (en) Touch assembly with pressure detection and driving method of touch assembly
US8493367B2 (en) Inputting device for handwriting system
TWI431537B (en) Active bio-features sensing device and electronic apparatus using the same
US20150378501A1 (en) Touch communications connection establishing method and touch panel device
CN105700757A (en) fingerprint sensing device and finger touch detection method thereof
CN113343800A (en) Fingerprint touch identification module, fingerprint touch identification method and electronic equipment
US20180189539A1 (en) Touch screen and electronic device having the same
CN206489541U (en) Touch-screen and electronic installation with fingerprint identification function
TW201117071A (en) PVDF piezoelectric thin touch panel and control method thereof
US20180188848A1 (en) Touch screen and electronic device having the same

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
ASS Succession or assignment of patent right

Owner name: MAOCHENG TECHNOLOGY CO., LTD.

Free format text: FORMER OWNER: ZHOU ZHENGSAN

Effective date: 20141225

C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20141225

Address after: Taipei City, Taiwan, China

Patentee after: J-METRICS TECHNOLOGY CO.,LTD.

Address before: Hsinchu City, Taiwan, China

Patentee before: Zhou Zhengsan

CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20141210