CN103197422A - Wavelength tunable coherent laser combined beam system based on double gratings - Google Patents

Wavelength tunable coherent laser combined beam system based on double gratings Download PDF

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Publication number
CN103197422A
CN103197422A CN2013100662110A CN201310066211A CN103197422A CN 103197422 A CN103197422 A CN 103197422A CN 2013100662110 A CN2013100662110 A CN 2013100662110A CN 201310066211 A CN201310066211 A CN 201310066211A CN 103197422 A CN103197422 A CN 103197422A
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grating
lens
laser array
light
diode laser
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CN2013100662110A
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吴昊
佟存柱
彭航宇
张俊
汪丽杰
田思聪
王立军
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Abstract

The utility model discloses a wavelength tunable coherent laser beam system based on double gratings and belongs to the field of laser combined beams. The system comprises a semiconductor laser array, a first lens, a dammam grating, a second lens, a diaphragm, a third lens, a blazed grating and a grating rotary device. The second lens, the diaphragm and the third lens form a space filter. The blazed grating is fixed on the grating rotary device. A group of parallel laser beams emitted by the semiconductor laser array converge to reach the dammam grating, and the dammam grating combines the laser beams. The space filter filters zero order light in the combined laser beams, and the filtered zero order light is used as first grade incident light to form a Littrow structure with the blazed grating. First grade direction reflection light is fed back to the dammam grating along an original light path. The beams are divided after reaching the damman grating, are injected into various light-emitting units of the semiconductor laser array and jointly lock the wavelength and phase positions so as to realize coherent combined beams. The wavelength tunable coherent laser beam system combines a plurality of laser beams into a beam of high-power laser, and has the advantages of being high in reliability and good in laser beam quality, working in a single wavelength mode, and the like.

Description

A kind of tunable wave length laser coherence based on double grating closes beam system
Technical field
The present invention relates to swash the combiner technical field, relate in particular to a kind of tunable wave length laser coherence based on double grating and close beam system.
Background technology
The mean flow rate that improves LASER Light Source is an important goal of laser technology field, realizes that the important means that mean flow rate improves improves laser output power exactly.Because the efficiency of laser instrument improves laser output power and will produce a large amount of heat, the various thermal effect that the heat that is multiplied causes have limited beam quality again, have reduced mean flow rate.Another important means improves beam quality exactly, thereby after adaptive optics produces, the technology of many raising beam qualities, obtaining many application aspect the beam quality as self-adapting resonance chamber, light beam purification, phase conjugation with to the adaptive equalization of atmospheric effect etc. improving, but along with the further increase of output power, these single aperture adaptive optical techniques also are being subjected to the challenge of heat.Thereby heat radiation and high-power this a pair of contradiction have become the biggest obstacle that improves traditional structure laser instrument mean flow rate.
Since semiconductor laser is born, along with the material growing technology, improving constantly of device architecture optimal design and technological level, advantages such as high-power semiconductor laser is little, in light weight with its efficient height, volume, the life-span long, the running reliable, electric pump Pu have obtained using widely in every field.But because the restriction of physical mechanisms such as the beam divergence angle is big, fire damage, the mean flow rate of single laser instrument is still limited.For realizing higher brightness output, must in the good beam quality of maintenance, improve laser output power.
Traditional sharp combiner technology is that polarization closes bundle, it is to utilize polarizing prism that the orthogonal two-beam in polarization direction is synthesized, its advantage is simple in structure, realize easily, but its synthetic number of beams is limited, be difficult in and further improve laser energy under the prerequisite that guarantees high light beam quality, and the light beam after synthetic loses the linear polarization characteristic, it is synthetic further to carry out light beam.Another kind of technological approaches is that spectrum closes the bundle technology, namely utilize the chromatic dispersion feedback of grating to make each unit laser instrument be locked in the sharp state of penetrating of the vertical film of list of different wave length, the light beam of realizing multi-wavelength simultaneously is synthetic, its advantage is good beam quality, close bundle efficient height, but the spectrum of synthetic light beam is multi-wavelength, and the gain spectral of the dispersion power of grating and semiconductor laser has limited the quantity of unit laser instrument jointly.
It is a kind of relatively more novel method that laser coherence closes bundle, and namely laser instrument adopts multi-module structure, utilizes adaptive optical technique, and the phase place of controlling each unit Laser Output Beam reaches phase-locked output, realizes the relevant synthetic of light beam.Relevant meaning of closing bundle is: on the one hand, when keeping beam quality, improved the power of output beam, realized the raising of brightness, realized long-distance transmissions; On the other hand, modular structure has been disperseed thermal effect, has overcome the major influence factors that high heat causes the high power laser mean flow rate to descend.Thereby, for the high-power semiconductor laser architecture, can solve high power and two difficult problems of heat dissipation capacity based on relevant synthetic novel architecture, become the important directions of superlaser technical development.
Summary of the invention
The synthetic number of beams of closing bundle for the polarization that solves the prior art existence is few, and emergent light loses the linear polarization characteristic, and spectrum closes technical matterss such as beam system multi-wavelength work, the invention provides a kind of tunable wave length laser coherence based on double grating and closes beam system.
The technical scheme that technical solution problem of the present invention is taked is as follows:
A kind of tunable wave length laser coherence based on double grating closes beam system and comprises: diode laser array, first lens, Darman raster, second lens, diaphragm, the 3rd lens, blazed grating and grating rotating device; Second lens, diaphragm and the 3rd lens are formed spatial filter, and blazed grating is fixed on the grating rotating device; One group of collimated laser beam that diode laser array sends converges to Darman raster through first lens, Darman raster is synthetic to light beam, the 0 rank light that spatial filter will synthesize in the light beam leaches, and as 1 grade of incident light and blazed grating composition Littrow structure, 1 grade of direction reflected light feeds back to Darman raster along original optical path, behind Damman raster splitting beam, be injected in each luminescence unit of diode laser array, wavelength and phase place are locked jointly, realize the relevant bundle that closes.
Above-mentioned diode laser array is the F-P diode laser array, and each luminescence unit is equidistantly arranged; Swash penetrate light linear polarization along the extension direction, perhaps perpendicular to the extension direction and add that half-wave plate revolves the polarization direction and turn 90 degrees; The rear facet of diode laser array is coated with high-reflecting film, and front facet is coated with anti-reflection film, the bonding one dimension collimation microlens of light emitting end surface array.
Above-mentioned diode laser array can adopt the multi-channel semiconductor laser structure of other band collimation, for example is made of many single tube semiconductor lasers.
Above-mentioned Darman raster is the one dimension periodic structure, the luminescence unit number of splitting ratio and diode laser array coupling, and be beam splitting angle design such as constant power.
The one-level blaze wavelength of above-mentioned blazed grating and the excitation wavelength of diode laser array are complementary, and perhaps in the gain spectral scope of diode laser array, could form resonance like this in exocoel.
Above-mentioned grating rotating device comprises piezoelectric ceramics rotating basis and control circuit, control circuit links to each other with the piezoelectric ceramics rotating basis, it is used for providing power supply to the piezoelectric ceramics rotating basis, and by trim voltage the collaborative blazed grating of piezoelectric ceramics rotating basis is rotated together, thereby realize the fine setting of the beam angle of incident blazed grating.
The invention has the beneficial effects as follows: this system works has the function of tunable wave length simultaneously at single wavelength; Close bundle efficient height, good beam quality; Can increase and decrease the quantity of closing the bundle laser cell in actual applications as required, configuration has dirigibility.
Description of drawings
Fig. 1 is the structural representation that the tunable wave length laser coherence that the present invention is based on double grating closes beam system.
Fig. 2 is the light path synoptic diagram of the Darman raster among the present invention.
Fig. 3 is the planar structure synoptic diagram of the grating rotating device among the present invention.
Embodiment
Below in conjunction with drawings and Examples the present invention is described in further details.
As shown in Figure 1 to Figure 3, the tunable wave length laser coherence that the present invention is based on double grating closes beam system and comprises: diode laser array 1, first lens 2, Darman raster 3, second lens 4, diaphragm 5, the 3rd lens 6, blazed grating 7 and grating rotating device 8; Second lens 4, diaphragm 5 and the 3rd lens 6 are formed spatial filter, and blazed grating 7 is fixed on the grating rotating device 8; One group of collimated laser beam that diode laser array 1 sends converges to Darman raster 3 through first lens 2,3 pairs of light beams of Darman raster are synthetic, the 0 rank light that spatial filter will synthesize in the light beam leaches, and as 1 grade of incident light and blazed grating 7 composition Littrow structures, 1 grade of direction reflected light feeds back to Darman raster 3 along original optical path, after Darman raster 3 beam splitting, be injected in each luminescence unit of diode laser array 1, wavelength and phase place are locked jointly, realize the relevant bundle that closes; 0 grade of direction of blazed grating 7 is system's emergent light direction.Can realize the function of system works tunable wave length by the angle of fine setting blazed grating 7.
Embodiment:
It is as follows that the tunable wave length laser coherence that the present invention is based on double grating closes beam system specific implementation process:
(1) each luminescence unit of diode laser array 1 is the F-P semiconductor laser, and with equidistant linear array.Coherent light beam is synthetic to need the polarization direction of each light beam identical, so the line polarisation polarization direction of diode laser array 1 emission light beam all should be along the extension direction, perhaps perpendicular to the extension direction and add that half-wave plate revolves the polarization direction and turn 90 degrees, in order to when Darman raster 3 is assembled, still keep identical polarization direction (TE polarization).The rear facet of diode laser array 1 is coated with high-reflecting film, and front facet is coated with anti-reflection film.At the bonding one dimension collimation microlens of light emitting end surface array, each lenticule center overlaps with each luminescence unit center of diode laser array 1 respectively, and the outgoing beam with diode laser array 1 each luminescence unit collimates respectively.
(2) first lens 2 are focused at one group of parallel beam of diode laser array 1 emission on the Darman raster 3.
(3) Darman raster 3 is placed on the back focal plane of first lens 2, to synthesize one road light beam (i.e. 0 rank light) by the convergent beam of first lens 2, be the multichannel light beam with the feedback light beam splitting simultaneously, be injected into each luminescence unit of diode laser array 1 respectively through original optical path, while wavelength locking and phase place, reach relevant purpose of closing bundle, this moment, the optical power beam major part of closing of Darman raster 3 was distributed in 0 rank light direction, and the light of other high-order directions all is suppressed.Darman raster 3 is the one dimension periodic structure, the luminescence unit number of splitting ratio and diode laser array 1 is complementary, and be beam splitting angle design such as constant power, can determine splitting angle interval delta θ by calculating, i.e. the focal length of Δ θ=diode laser array 1 luminescence unit spacing/first lens 2; The beam splitting efficient of Darman raster 3 is generally 70%~85%.
(4) second lens 4, diaphragm 5 and saturating the 3rd mirror 6 are formed a spatial filter, and its effect is to filter high-order light from Darman raster 3 outgoing beams, only allows zeroth order light to pass through, and feed back to the relevant bundle that closes of semiconductor laser array 1 influence to avoid high-order light.Wherein second lens 4 are imaged on the diaphragm 5 light beam; Diaphragm 5 is slit diaphragms, the zeroth order light image point in the middle of the slit centrally aligned, and slit width only allows zeroth order light to pass through just; The 3rd lens 6 make the zeroth order light image point by diaphragm 5 be converted to the bigger light beam in aperture and incide blazed grating 7.When debuging diaphragm 5 is placed on the back focal plane of second lens 4, is placed on simultaneously on the front focal plane of the 3rd lens 6.
(5) blazed grating 7 is formed the Littrow structure with miscellaneous part, make 0 rank light by spatial filter with blazing angle incident, 1 grade of blaze wavelength is the operation wavelength of system, the reflected light of 1 grade of direction feeds back to Darman raster 3 along original optical path, after Darman raster 3 beam splitting, be injected in each luminescence unit of diode laser array 1, wavelength and phase place are locked jointly, thereby the relevant bundle that closes of realization, this moment, each luminescence unit of diode laser array 1 all was operated in the same wave appearance with the sharp state of penetrating of the vertical film of list of polarization state and phase differential locking.Blazed grating 7 is fixed on the grating rotating device 8, grating rotating device 8 comprises piezoelectric ceramics rotating basis and control circuit two parts, control circuit applies appropriate voltage to piezoelectric ceramics, and by trim voltage the collaborative blazed grating 7 of rotating basis is rotated together, thereby realize the fine setting of beam incident angle degree, the feedback wavelength also can change thereupon, can realize the function of system works tunable wave length like this; Can determine the corresponding relation of control circuit voltage and operation wavelength by system calibration, be convenient to inquiry in actual applications.1 grade of blaze wavelength of blazed grating 7 and the excitation wavelength of diode laser array 1 are complementary, and perhaps in the gain spectral scope of semiconductor laser, could form resonance like this in exocoel.0 grade of direction of blazed grating 7 is system's emergent light direction, and suitable output coupling scheme can be adopted according to practical application in the rear end, as optical fiber coupling etc.
(6) diode laser array 1 needs constant-current supply that pure drive current is provided, and the fluctuating of electric current can cause the system works instability, so should adopt high-precision constant current source.
(7) working temperature of diode laser array 1 is bigger to the system works stability influence, in order accurately to control its temperature, can adopt the secondary radiating mode, first order heat radiation adopts thermoelectric refrigerating unit (TEC), thermistor and temperature control circuit to form, and second level heat radiation is made up of water-cooling base plate and water cooling unit.Wherein the heat sink bottom surface of the copper of diode laser array 1 is bonded in the cold junction of thermoelectric refrigerating unit, temperature control circuit provides the working current of thermoelectric refrigerating unit, thermistor be bonded in the copper of diode laser array 1 heat sink on, be used for producing temperature detection signal and offer temperature control circuit, temperature control circuit is this temperature detection signal generation negative-feedback signal of comparing with setting value, thereby the working current dynamic adjustments of thermoelectric refrigerating unit realized the thermostatic control of noise spectra of semiconductor lasers linear array 1.The hot junction of thermoelectric refrigerating unit is bonded on the water-cooling base plate, and water-cooling base plate is connected with the water cooling unit water pipe, flows to realize hot-side heat dissipation to thermoelectric refrigerating unit by recirculated water.
(8) in the practical application, can adjust synthetic number of beams as required, namely increase and decrease the luminescence unit quantity of diode laser array 1, and adopt the Darman raster 3 of splitting ratio and its coupling.

Claims (6)

1. the tunable wave length laser coherence based on double grating closes beam system, it is characterized in that this system comprises diode laser array (1), first lens (2), Darman raster (3), second lens (4), diaphragm (5), the 3rd lens (6), blazed grating (7) and grating rotating device (8); Second lens (4), diaphragm (5) and the 3rd lens (6) are formed spatial filter, and blazed grating (7) is fixed on the grating rotating device (8); One group of collimated laser beam that diode laser array (1) sends converges to Darman raster (3) through first lens (2), Darman raster (3) is synthetic to light beam, the 0 rank light that spatial filter will synthesize in the light beam leaches, and as 1 grade of incident light and blazed grating (7) composition Littrow structure, 1 grade of direction reflected light feeds back to Darman raster (3) along original optical path, after Darman raster (3) beam splitting, be injected in each luminescence unit of diode laser array (1), wavelength and phase place are locked jointly, realize the relevant bundle that closes.
2. a kind of tunable wave length laser coherence based on double grating according to claim 1 closes beam system, and it is characterized in that: described diode laser array (1) is the F-P diode laser array, and each luminescence unit is equidistantly arranged; Swash penetrate light linear polarization along the extension direction, perhaps perpendicular to the extension direction and add that half-wave plate revolves the polarization direction and turn 90 degrees; The rear facet of diode laser array (1) is coated with high-reflecting film, and front facet is coated with anti-reflection film, the bonding one dimension collimation microlens of light emitting end surface array.
3. a kind of tunable wave length laser coherence based on double grating according to claim 1 closes beam system, and it is characterized in that: described diode laser array (1) is made of many single tube semiconductor lasers.
4. a kind of tunable wave length laser coherence based on double grating according to claim 1 closes beam system, it is characterized in that: described Darman raster (3) is the one dimension periodic structure, the luminescence unit number of splitting ratio and diode laser array (1) coupling, and be beam splitting angle design such as constant power.
5. a kind of tunable wave length laser coherence based on double grating according to claim 1 closes beam system, it is characterized in that: the excitation wavelength of the one-level blaze wavelength of described blazed grating (7) and diode laser array (1) is complementary, perhaps in the gain spectral scope of diode laser array (1).
6. a kind of tunable wave length laser coherence based on double grating according to claim 1 closes beam system, it is characterized in that: described grating rotating device (8) comprises piezoelectric ceramics rotating basis and control circuit, control circuit links to each other with the piezoelectric ceramics rotating basis, it is used for providing power supply to the piezoelectric ceramics rotating basis, and make the piezoelectric ceramics rotating basis work in coordination with blazed grating (7) by trim voltage to rotate together, thereby realize the fine setting of the beam angle of incident blazed grating (7).
CN2013100662110A 2013-03-01 2013-03-01 Wavelength tunable coherent laser combined beam system based on double gratings Pending CN103197422A (en)

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Cited By (9)

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CN104332821A (en) * 2014-11-18 2015-02-04 中国工程物理研究院应用电子学研究所 Diode laser spectrum synthesizer based on double-grating external cavity feedback
CN106684702A (en) * 2017-02-26 2017-05-17 中国科学院上海光学精密机械研究所 Apparatus for realizing semiconductor laser spectrum beam combination by utilizing double gratings
CN107728314A (en) * 2017-08-17 2018-02-23 中国科学院光电技术研究所 A kind of method of the array beams deflection based on rotation double balzed grating
CN109470455A (en) * 2018-12-27 2019-03-15 西华大学 A kind of dielectric gratings detection device
CN110632761A (en) * 2019-09-09 2019-12-31 山东师范大学 Partial coherent beam splitter, working method and optical device
CN111194528A (en) * 2017-10-05 2020-05-22 华为技术有限公司 Wavelength monitoring and/or control device, laser system comprising said device and method of operating said device
CN113054525A (en) * 2021-03-15 2021-06-29 中国工程物理研究院流体物理研究所 Infrared laser coherent synthesis device and synthesis method
CN114384707A (en) * 2022-03-24 2022-04-22 广东利元亨智能装备股份有限公司 Laser beam combining method and device, electronic equipment and computer readable storage medium
US20220373857A1 (en) * 2021-05-18 2022-11-24 Applied Materials Israel Ltd. Method for illuminating a substrate using a single acoutso optical device

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Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104332821A (en) * 2014-11-18 2015-02-04 中国工程物理研究院应用电子学研究所 Diode laser spectrum synthesizer based on double-grating external cavity feedback
CN106684702B (en) * 2017-02-26 2019-08-13 中国科学院上海光学精密机械研究所 It is a kind of to realize that lasing spectrum of semiconductor lasers closes the device of beam using double grating
CN106684702A (en) * 2017-02-26 2017-05-17 中国科学院上海光学精密机械研究所 Apparatus for realizing semiconductor laser spectrum beam combination by utilizing double gratings
CN107728314A (en) * 2017-08-17 2018-02-23 中国科学院光电技术研究所 A kind of method of the array beams deflection based on rotation double balzed grating
CN111194528B (en) * 2017-10-05 2021-10-26 华为技术有限公司 Wavelength monitoring and/or control device, laser system comprising said device and method of operating said device
CN111194528A (en) * 2017-10-05 2020-05-22 华为技术有限公司 Wavelength monitoring and/or control device, laser system comprising said device and method of operating said device
CN109470455B (en) * 2018-12-27 2021-02-09 西华大学 Dielectric film grating detection device
CN109470455A (en) * 2018-12-27 2019-03-15 西华大学 A kind of dielectric gratings detection device
CN110632761A (en) * 2019-09-09 2019-12-31 山东师范大学 Partial coherent beam splitter, working method and optical device
CN113054525A (en) * 2021-03-15 2021-06-29 中国工程物理研究院流体物理研究所 Infrared laser coherent synthesis device and synthesis method
CN113054525B (en) * 2021-03-15 2022-04-01 中国工程物理研究院流体物理研究所 Infrared laser coherent synthesis device and synthesis method
US20220373857A1 (en) * 2021-05-18 2022-11-24 Applied Materials Israel Ltd. Method for illuminating a substrate using a single acoutso optical device
CN114384707A (en) * 2022-03-24 2022-04-22 广东利元亨智能装备股份有限公司 Laser beam combining method and device, electronic equipment and computer readable storage medium

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Application publication date: 20130710