CN103240524A - Time and focus dividing device and method based on scanning galvanometer - Google Patents
Time and focus dividing device and method based on scanning galvanometer Download PDFInfo
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- CN103240524A CN103240524A CN201310196224XA CN201310196224A CN103240524A CN 103240524 A CN103240524 A CN 103240524A CN 201310196224X A CN201310196224X A CN 201310196224XA CN 201310196224 A CN201310196224 A CN 201310196224A CN 103240524 A CN103240524 A CN 103240524A
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- reflective mirror
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- coke installation
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Abstract
The invention discloses a time and focus dividing device based on a scanning galvanometer. The device comprises a first high-reflectivity mirror, a second high-reflectivity mirror, the galvanometer, a focus dividing device, a light splitting cube and an adjustable lens group which are sequentially arranged, the focus dividing device includes a first focus dividing device and a second focus dividing device which are parallelly arranged, the first focus dividing device comprises a third high-reflectivity mirror, a first attenuator, a fourth high-reflectivity mirror and a lens group which are sequentially arranged, and the second focus dividing device comprises a fifth high-reflectivity mirror and a second attenuator which are sequentially arranged. By the aid of the galvanometer rather than a ridge light splitter for splitting light, two focuses with conveniently adjustable performances and positions are formed in a light path direction by matching the attenuators, the adjustable lens group and the light splitting cube, and automation control is more conveniently realized. The invention further discloses a method for dividing time and focuses by the device, and the two focuses with the conveniently adjustable performances and positions can be conveniently and simply formed in the light path direction.
Description
Technical field
The present invention relates to a kind of device and method that forms light beam, especially a kind of device and method that utilizes scanning galvanometer to carry out branch time-division Jiao.
Background technology
Laser processing technology be the characteristic of utilizing laser beam and matter interaction to material (comprising metal and nonmetal) cut, welding, surface treatment, punching, little processing and as light source, a special kind of skill of recognition object etc., it is laser processing technology that tradition is used maximum field.A complex art of multi-door subjects such as that laser technology relates to is light, mechanical, electrical, material and detection is seen laser processing technology traditionally.Comprise various processing technologys such as cutting, welding, surface treatment, punching, mark, line, microscopic carvings.
In order to adapt to the needs of various different purposes, in light path design, want the position of focusing and quality to control.For example, when having the laser application laser cutting of fine beam quality, can obtain good effect, yet, when a same laser instrument is used for laser weld, the but quality that can't obtain being equal to.Its reason, when the laser with fine beam quality was used for welding, focused spot diameter was very little, can locally produce obviously dark molten penetrating.Many welding application scenario requires to enlarge focal spot area.Bigger focal spot area can be improved the welding effect of bridge formation formula, and produces lower thermal gradient and wideer heat effect district.In the weld job of reality, adopt the bifocal technology just more and more, the bifocal technology can not only be remarkable the improves the reliability of bridge welding, and can improve welding quality significantly.
In the prior art, the bifocal technology mainly adopts following two kinds of technical schemes:
1. ridge divides burnt mirror method.The ridge speculum is combined with the parabolic focusing mirror that produces deflection, can form bifocus on the same plane perpendicular to optical path direction.By the speculum of different ridge orientations, can adjust the relative position between the bifocus.
2. bifocal path technique.By spectroscope light is divided into two bundles, two-way light by a series of optical component, is becoming focus perpendicular to the same planar shaped of optical path direction respectively respectively at last.
Divide burnt mirror method from ridge, bifocus is on perpendicular to the optical path direction plane, and independent each other, can not control the energy and size of each focus separately.On perpendicular to the optical path direction plane, corresponding change can not be made in the bifocal position from the bifocal path technique bifocus, and automaticity is low.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art part and a kind of brand-new branch time-division coke installation that utilizes scanning galvanometer is provided; Simultaneously, the present invention also provides and has adopted described device to carry out branch time-division Jiao's method.
For achieving the above object, the technical scheme that the present invention takes is: a kind of branch time-division coke installation based on scanning galvanometer comprises first high reflective mirror, second high reflective mirror, galvanometer, branch coke installation, light splitting cube and the adjustable lens group that set gradually; Coke installation comprised first fen coke installation and the second fen coke installation that is set up in parallel in described minute; Coke installation comprised the 3rd high reflective mirror, first attenuator, the 4th high reflective mirror and the set of lenses that sets gradually in described first minute; Coke installation comprised the 5th high reflective mirror and second attenuator that sets gradually in described second minute.
Branch time-division coke installation based on scanning galvanometer of the present invention utilizes the quick rotation characteristic of scanning galvanometer, and it is applied in the light path design, realizes that the timesharing on the optical path direction forms two controlled hot spots of independence.
Described light splitting cube is by good glued together the combining of pair of straight angle prism, and wavefront distortion is minimized.Be coated with the multilayer spectro-film that designs for application-specific specially on the inclined-plane of a prism.Four outer surfaces of prism are coated with the infrared film of V-type or broadband film, make surperficial reflection loss minimum in accurate wave-length coverage.
As the preferred embodiment of the branch time-division coke installation based on scanning galvanometer of the present invention, described second high reflective mirror arranges with first high reflective mirror is vertical.
As the preferred embodiment of the branch time-division coke installation based on scanning galvanometer of the present invention, described second high reflective mirror is vertical at the top of described first high reflective mirror, and described galvanometer and described second high reflective mirror are located at same horizontal plane.
Preferred embodiment as the branch time-division coke installation based on scanning galvanometer of the present invention, the 3rd high reflective mirror in described first minute coke installation is vertical at the top of described galvanometer, described first attenuator and the 4th high reflective mirror and described the 3rd high reflective mirror are located at same horizontal plane, and described set of lenses is vertical at the below of described the 4th high reflective mirror.
As the preferred embodiment of the branch time-division coke installation based on scanning galvanometer of the present invention, the 5th high reflective mirror of described second minute coke installation is vertical at the below of described galvanometer, and described second attenuator and described the 5th high reflective mirror are located at same horizontal plane.
Preferred embodiment as the branch time-division coke installation based on scanning galvanometer of the present invention, described light splitting cube is vertical at the below of set of lenses in described first minute coke installation, and second attenuator is located at same horizontal plane in described light splitting cube and the described second minute coke installation.
As the preferred embodiment of the branch time-division coke installation based on scanning galvanometer of the present invention, described adjustable lens group is vertical at the cubical below of described light splitting.
As the preferred embodiment of the branch time-division coke installation based on scanning galvanometer of the present invention, described device also comprises laser instrument, and described laser instrument is located at the front of described first high reflective mirror.
As the preferred embodiment of the branch time-division coke installation based on scanning galvanometer of the present invention, described laser instrument, first high reflective mirror, second high reflective mirror, galvanometer, branch coke installation, light splitting cube and adjustable lens group are installed on the optical table.
In addition, another object of the present invention is to provide a kind of employing to carry out branch time-division Jiao's method as mentioned above based on the branch time-division coke installation of scanning galvanometer, said method comprising the steps of:
(1) laser instrument is given off laser beam, described laser beam is successively by first high reflective mirror and second high reflective mirror;
(2) form two-way light through the light beam behind second high reflective mirror by the galvanometer timesharing, wherein first via light passes through the 3rd high reflective mirror, first attenuator, the 4th high reflective mirror and the set of lenses of first fen coke installation successively; The second road light passes through the 5th high reflective mirror and second attenuator of second fen coke installation successively;
(3) through the first via light transmission light splitting cube behind first fen coke installation, the focusing again through the adjustable lens group forms first focus then;
(4) through the second road light behind second fen coke installation through 90 ° of light splitting cube refractions, the focusing through the adjustable lens group forms second focus then.
Branch time-division coke installation based on scanning galvanometer of the present invention adopts galvanometer that light path is carried out the timesharing light splitting, utilizes the characteristics that galvanometer can swing in high frequency, realizes that the quick timesharing of light path is switched; Adopt attenuator to carry out energy control respectively to two-way light simultaneously, realize the independent control of the performance of two-way light; Adopt the light splitting cube that the two-way polishing is closed, guaranteed that bifocal is on same straight line, and all on optical path direction, rather than on the same plane perpendicular to light path, by adjusting the position of adjustable lens group, but not by the ridge spectroscope, thereby realization is to the automation control of the relative position of bifocal.Device of the present invention adopts galvanometer, but not the method for ridge spectroscope light splitting cooperates attenuator, adjustable lens group and light splitting cube, form the focus that two performances and position all can conveniently be adjusted at optical path direction, simultaneously conveniently carry out automation control.
Description of drawings
Fig. 1 is the structural representation of a kind of embodiment of the branch time-division coke installation based on scanning galvanometer of the present invention.
Among the figure, but 10 be first high reflective mirror, 12 be second high reflective mirror, 20 for galvanometer, 32 be second high reflective mirror, 34 be first attenuator, 36 be the 4th high reflective mirror, 38 for set of lenses, 42 be the 5th high reflective mirror, 44 be second attenuator, 50 for the light splitting cube, 60 for set of lenses, 62 be first focus, 64 be second focus, 70 for laser instrument, 72 for first via light, 74 be that the second road light, 80 is for optical table.
The specific embodiment
For the purpose, technical solutions and advantages of the present invention better are described, the invention will be further described below in conjunction with the drawings and specific embodiments.
A kind of embodiment of a kind of branch time-division coke installation based on scanning galvanometer of the present invention, as shown in Figure 1, described device comprises first high reflective mirror 10, second high reflective mirror 12, the galvanometer 20 that set gradually, divides coke installation, light splitting cube 50 and adjustable lens group 60; Coke installation comprised first fen coke installation and the second fen coke installation that is set up in parallel in described minute; Coke installation comprised the 3rd high reflective mirror 32, first attenuator 34, the 4th high reflective mirror 36 and the set of lenses 38 that sets gradually in described first minute; Coke installation comprised the 5th high reflective mirror 42 and second attenuator 44 that sets gradually in described second minute.
Described laser beam can pass through first high reflective mirror 10 and second high reflective mirror 12 successively, forms two-way light by galvanometer 20 timesharing then; Formed first via light 72 is the 3rd high reflective mirror 32, first attenuator 34, the 4th high reflective mirror 36 and the set of lenses 38 by described first minute coke installation successively; Formed the second road light 74 passes through the 5th high reflective mirror 42 and second attenuator 44 of described second minute coke installation successively; First via light 72 by first fen coke installation and second fen coke installation and 74 timesharing of the second road light are by light splitting cube 50 respectively, and described first via light 72 is directly through light splitting cube 50, and the focusing again of passing through adjustable lens group 60 forms first focus 62; Described the second road light 74 is through 90 ° of light splitting cube 50 refractions, and the focusing through adjustable lens group 60 forms second focus 64 then.Adopt 20 pairs of light paths of galvanometer to carry out the timesharing light splitting in the described device, utilize the characteristics that galvanometer 20 can swing in high frequency, the quick timesharing that realizes light path is switched, described first minute coke installation and second fen coke installation comprise first attenuator 34 and second attenuator 44 respectively simultaneously, described two attenuators (34,44) can carry out energy control to two-way light respectively, realize the independent control of the performance of two-beam.Then, adopt light splitting cube 50 that the two-way polishing is closed, guaranteed bifocal (62,64) on same straight line, and all at optical path direction, rather than on the same plane perpendicular to light path; By the position of adjustment adjustable lens group 60, but not by the ridge spectroscope, thereby realization is to the automation control of the relative position of bifocal (62,64).
Preferably, as shown in Figure 1, described second high reflective mirror 12 and the 10 vertical settings of first high reflective mirror.More preferably, as shown in Figure 1, described second high reflective mirror 12 is vertical at the top of described first high reflective mirror 10, and described galvanometer 20 is located at same horizontal plane with described second high reflective mirror 12.
Preferably, as shown in Figure 1, the 3rd high reflective mirror 32 in described first minute coke installation is vertical at the top of described galvanometer 20, described first attenuator 34 and the 4th high reflective mirror 36 are located at same horizontal plane with described the 3rd high reflective mirror 32, and described set of lenses 38 is vertical at the below of described the 4th high reflective mirror 36.
More preferably, as shown in Figure 1, the 5th high reflective mirror 42 of described second minute coke installation is vertical at the below of described galvanometer 20, and described second attenuator 44 is located at same horizontal plane with described the 5th high reflective mirror 42.
Preferably, as shown in Figure 1, described light splitting cube 50 is vertical at the below of set of lenses 38 in described first minute coke installation, and second attenuator 44 is located at same horizontal plane in described light splitting cube 50 and the described second minute coke installation.
Preferably, as shown in Figure 1, described adjustable lens group 60 is vertical at the below of described light splitting cube 50.
Preferably, as shown in Figure 1, described device also comprises laser instrument 70, and described laser instrument 70 is located at the front of described first high reflective mirror 10.
Preferably, described laser instrument 70, first high reflective mirror 10, second high reflective mirror 12, galvanometer 20, branch coke installation, light splitting cube 50 and adjustable lens group 60 are installed on the optical table 80.
In addition, present embodiment also provides a kind of employing to carry out branch time-division Jiao's method as mentioned above based on the branch time-division coke installation of scanning galvanometer, said method comprising the steps of:
(1) laser instrument 70 is given off laser beam, described laser beam is successively by first high reflective mirror 10 and second high reflective mirror 12;
(2) form two-way light (72,74) through 12 light beam behind second high reflective mirror by galvanometer 20 timesharing, wherein first via light 72 the 3rd high reflective mirror 32, first attenuator 34, the 4th high reflective mirror 36 and the set of lenses 38 by first fen coke installation successively; The second road light 74 passes through the 5th high reflective mirror 42 and second attenuator 44 of second fen coke installation successively;
(3) see through light splitting cube 50 through the first via light 72 behind first fen coke installation, the focusing again through adjustable lens group 60 forms first focus 62 then;
(4) through the second road light 74 behind second fen coke installation through 90 ° of light splitting cubes 50 refractions, the focusing through adjustable lens group 60 forms second focus 64 then.
Employing described above is carried out in branch time-division Jiao's the method based on the branch time-division coke installation of scanning galvanometer, laser instrument 70 is given off laser beam, described laser beam is successively by first high reflective mirror 10 and second high reflective mirror 12, reflex on the galvanometer 20 by the laser beam behind second high reflective mirror 12, utilize the characteristics that galvanometer 20 can swing in high frequency, the quick timesharing of described laser beam is switched in realization, and described galvanometer 20 is divided into two-way light with laser beam, i.e. first via light 72 and the second road light 74.Described first via light 72 is through galvanometer 20 radiation, pass through the 3rd high reflective mirror 32, first attenuator 34, the 4th high reflective mirror 36 and the set of lenses 38 of first fen coke installation successively, described first attenuator 34 can be controlled the energy density of first via light 72 light beams, and the position of described set of lenses 38 can be regulated; By the 5th high reflective mirror 42 and second attenuator 44 of second fen coke installation, described second attenuator 44 can be controlled the energy density of the second road light, 74 light beams to described the second road light 74 successively.Because described first via light 72 and the second road light 74 adopt first attenuator 34 and second attenuator 44 to carry out energy control respectively, therefore can realize the independent control to the performance of two-way light.Through first via light 72 and the second road light 74 behind first fen coke installation and the second fen coke installation, timesharing is by light splitting cube 50 respectively, and described first via light 72 directly sees through light splitting cube 50, forms first focus 62 through the focusing again of adjustable lens group 60; And described the second road light 74 reflects 90 ° through light splitting cube 50, and the focusing of process adjustable lens group 60 forms second focus 64.Adopt light splitting cube 50 that the two-way polishing is closed, can guarantee formed first focus 62 and second focus 64 on same straight line, and all on a light path, rather than on the same plane perpendicular to light path.The relative position of described first focus 52 and second focus 64 can be controlled by the position of adjusting adjustable lens group 60, compares with the ridge spectroscope that prior art adopts, and can realize the automation control to the relative position of bifocal.
Last institute should be noted that; above embodiment is only in order to illustrate technical scheme of the present invention but not limiting the scope of the invention; although with reference to preferred embodiment the present invention has been done detailed description; those of ordinary skill in the art is to be understood that; can make amendment or be equal to replacement technical scheme of the present invention, and not break away from essence and the scope of technical solution of the present invention.
Claims (10)
1. the branch time-division coke installation based on scanning galvanometer is characterized in that, comprises first high reflective mirror, second high reflective mirror, galvanometer, branch coke installation, light splitting cube and the adjustable lens group that set gradually;
Coke installation comprised first fen coke installation and the second fen coke installation that is set up in parallel in described minute;
Coke installation comprised the 3rd high reflective mirror, first attenuator, the 4th high reflective mirror and the set of lenses that sets gradually in described first minute;
Coke installation comprised the 5th high reflective mirror and second attenuator that sets gradually in described second minute.
2. the branch time-division coke installation based on scanning galvanometer as claimed in claim 1 is characterized in that described second high reflective mirror arranges with first high reflective mirror is vertical.
3. the branch time-division coke installation based on scanning galvanometer as claimed in claim 2 is characterized in that described second high reflective mirror is vertical at the top of described first high reflective mirror, and described galvanometer and described second high reflective mirror are located at same horizontal plane.
4. the branch time-division coke installation based on scanning galvanometer as claimed in claim 1, it is characterized in that, the 3rd high reflective mirror in described first minute coke installation is vertical at the top of described galvanometer, described first attenuator and the 4th high reflective mirror and described the 3rd high reflective mirror are located at same horizontal plane, and described set of lenses is vertical at the below of described the 4th high reflective mirror.
5. as claim 1 or 4 described branch time-division coke installations based on scanning galvanometer, it is characterized in that the 5th high reflective mirror of described second minute coke installation is vertical at the below of described galvanometer, described second attenuator and described the 5th high reflective mirror are located at same horizontal plane.
6. as claim 1 or 5 described branch time-division coke installations based on scanning galvanometer, it is characterized in that, described light splitting cube is vertical at the below of set of lenses in described first minute coke installation, and second attenuator is located at same horizontal plane in described light splitting cube and the described second minute coke installation.
7. the branch time-division coke installation based on scanning galvanometer as claimed in claim 6 is characterized in that described adjustable lens group is vertical at the cubical below of described light splitting.
8. the branch time-division coke installation based on scanning galvanometer as claimed in claim 1 is characterized in that described device also comprises laser instrument, and described laser instrument is located at the front of described first high reflective mirror.
9. as claim 1 or 8 described branch time-division coke installations based on scanning galvanometer, it is characterized in that described laser instrument, first high reflective mirror, second high reflective mirror, galvanometer, branch coke installation, light splitting cube and adjustable lens group are installed on the optical table.
10. an employing is as above arbitrary describedly carries out branch time-division Jiao's method based on the branch time-division coke installation of scanning galvanometer, it is characterized in that, may further comprise the steps:
(1) laser instrument is given off laser beam, described laser beam is successively by first high reflective mirror and second high reflective mirror;
(2) form two-way light through the light beam behind second high reflective mirror by the galvanometer timesharing, wherein first via light passes through the 3rd high reflective mirror, first attenuator, the 4th high reflective mirror and the set of lenses of first fen coke installation successively; The second road light passes through the 5th high reflective mirror and second attenuator of second fen coke installation successively;
(3) through the first via light transmission light splitting cube behind first fen coke installation, the focusing again through the adjustable lens group forms first focus then;
(4) through the second road light behind second fen coke installation through 90 ° of light splitting cube refractions, the focusing through the adjustable lens group forms second focus then.
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| CN201310196224.XA CN103240524B (en) | 2013-05-23 | 2013-05-23 | Time and focus dividing device and method based on scanning galvanometer |
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| CN201310196224.XA CN103240524B (en) | 2013-05-23 | 2013-05-23 | Time and focus dividing device and method based on scanning galvanometer |
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| CN105397282A (en) * | 2015-09-18 | 2016-03-16 | 广东工业大学 | Implanting method and device based on rapid moving laser focus of scanning galvanometer |
| CN106392308A (en) * | 2016-11-02 | 2017-02-15 | 莆田学院 | Femtosecond laser processing device |
| CN106392312A (en) * | 2016-11-02 | 2017-02-15 | 莆田学院 | Fiber laser machining device |
| CN106392306A (en) * | 2016-11-02 | 2017-02-15 | 莆田学院 | Optical fiber laser processing optical path system |
| CN106392315A (en) * | 2016-11-02 | 2017-02-15 | 莆田学院 | Femtosecond laser processing optical path device |
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| CN103240524B (en) | 2015-07-08 |
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