CN103257209A - Air flow uniformity detection device of diffusion furnace - Google Patents
Air flow uniformity detection device of diffusion furnace Download PDFInfo
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- CN103257209A CN103257209A CN2013101743863A CN201310174386A CN103257209A CN 103257209 A CN103257209 A CN 103257209A CN 2013101743863 A CN2013101743863 A CN 2013101743863A CN 201310174386 A CN201310174386 A CN 201310174386A CN 103257209 A CN103257209 A CN 103257209A
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Abstract
The invention relates to an air flow uniformity detection device of a diffusion furnace, which is used in a solar battery piece process. A furnace body of the diffusion furnace is internally filled with a silicon wafer; a furnace opening and a furnace tail are respectively arranged at the two ends in a length direction of the furnace body; the air flow uniformity detection device comprises a wind speed measurement instrument and a straight-line movement mechanism which is placed behind the furnace body and can do straight-line movement along the length direction of the furnace body; the measurement end of the wind speed measurement instrument penetrates into the furnace body from the furnace tail; the measurement end of the wind speed measurement instrument is located above the silicon wafer inside the furnace body; and the other end of the wind speed measurement instrument is connected with the straight-line movement mechanism through a connection piece. The air flow uniformity detection device disclosed by the invention can accurately measure the uniformity of the air flow in the furnace body; and the whole detection device is simple in structure and convenient to operate.
Description
Technical field
The present invention relates to the airflow homogeneity pick-up unit of the diffusion furnace that uses in the solar cell blade technolgy.
Background technology
Diffusion furnace is a kind of visual plant in the solar cell blade technolgy.Airflow homogeneity is one of the most key factor that influences diffusion in the diffusion furnace furnace chamber.At present, generally be to guarantee the stable of air-flow by the pressure in the control furnace chamber and flat-temperature zone in technological process, but be subjected to the air-flow situation that influences in the furnace chamber of factors such as silicon chip, SiC slurry, air intake opening and exhausr port position very complicated often, gas flow situation everywhere is all different, thereby causes having very big-difference with a collection of diffuse si sheet.Therefore, it is very necessary detecting airflow homogeneity.But the detection for airflow homogeneity at present also lacks corresponding pick-up unit.
Summary of the invention
The objective of the invention is to, at the deficiencies in the prior art, provide a kind of airflow homogeneity pick-up unit of diffusion furnace, can accurately measure the airflow homogeneity in the body of heater.
Technical scheme of the present invention is, a kind of airflow homogeneity pick-up unit of diffusion furnace, in the body of heater of diffusion furnace silicon chip is housed, the two ends of body of heater length direction are respectively fire door and stove tail, this airflow homogeneity pick-up unit comprises the measuring wind speed instrument and places the body of heater rear and make straight-line straight-line motion mechanism along the body of heater length direction, the measuring junction of measuring wind speed instrument penetrates in the body of heater and the measuring junction of measuring wind speed instrument places the top of silicon chip in the body of heater from the stove tail, and the other end of measuring wind speed instrument links to each other with straight-line motion mechanism by web member.
Described straight-line motion mechanism comprises that fixed part and fixed part top and relative fixed parts do the moving component of linear reciprocating motion, and described measuring wind speed instrument links to each other with moving component.
Described fixed part is provided with the bracing frame that supports the measuring wind speed instrument.
Described straight-line motion mechanism is linear electric motors, and fixed part is the elementary of linear electric motors, and moving component is the secondary of linear electric motors, the elementary and secondary winding around respectively of going up of linear electric motors, and between linear electric motors elementary and secondary, be provided with permanent magnet.
Described diffusion furnace also is provided with industrial computer, and described measuring wind speed instrument links to each other with industrial computer by signal wire with straight-line motion mechanism.
Described web member is clip.
During work, with measuring wind speed instrument preheated one-section time in furnace chamber, start straight-line motion mechanism then.Straight-line motion mechanism drives the measuring wind speed instrument and moves from fire door to the stove tail under the control of industrial computer, and whenever moves a certain distance and stay for some time, to detect gas flow rates, and detected data of industrial computer record measuring wind speed instrument simultaneously.All data that obtain by detection just can be estimated the homogeneity of air-flow in the furnace chamber.
There is following advantage in the present invention owing to adopted above technical scheme:
(1) airflow homogeneity pick-up unit of the present invention detect airflow homogeneity owing to only adopt straight-line motion mechanism to drive the measuring wind speed instrument, so whole detection device is simple in structure, and is easy to operate.
(2) airflow homogeneity pick-up unit of the present invention can count to improve accuracy of detection by increasing to detect according to accuracy requirement.
Diffusion furnace airflow homogeneity pick-up unit of the present invention also is applicable to solar battery sheet production PECVD(plasma enhanced chemical vapor deposition) equipment.
Description of drawings
Fig. 1 is the structural representation of an embodiment of the present invention.
Embodiment
As shown in Figure 1, a kind of airflow homogeneity pick-up unit of diffusion furnace, in the body of heater 6 of diffusion furnace silicon chip 7 is housed, the two ends of body of heater 6 length directions are respectively fire door 8 and stove tail 9, diffusion furnace also is provided with the airflow homogeneity pick-up unit of measuring airflow homogeneity in the body of heater 6, this airflow homogeneity pick-up unit comprises measuring wind speed instrument 4 and places body of heater 6 rears and make straight-line straight-line motion mechanism along body of heater 6 length directions, the length direction of body of heater 6 is the A among Fig. 1, the B direction, the measuring junction of measuring wind speed instrument 4 penetrates the top that body of heater 6 measuring junctions interior and measuring wind speed instrument 4 place silicon chip 7 from stove tail 9, and the other end of measuring wind speed instrument 4 links to each other with straight-line motion mechanism by web member.Diffusion furnace also is provided with industrial computer 1, and measuring wind speed instrument 4 links to each other with industrial computer 1 by signal wire with straight-line motion mechanism.
Straight-line motion mechanism comprises that fixed part 11 and fixed part 11 tops and relative fixed parts 11 do the moving component 10 of linear reciprocating motion, and described measuring wind speed instrument 4 links to each other with moving component 10; Fixed part 11 is provided with the bracing frame 5 that supports measuring wind speed instrument 4, and the bottom of bracing frame 5 is fixed on the fixed part 11 and places the below of measuring wind speed instrument 4, and measuring wind speed instrument 4 can slide at bracing frame 5.
Straight-line motion mechanism is linear electric motors, and fixed part 11 is the elementary of linear electric motors, and moving component 10 is the secondary of linear electric motors, the elementary and secondary winding around 13 respectively of going up of linear electric motors, and between linear electric motors elementary and secondary, be provided with permanent magnet 12.
Web member 2 is clip.
Claims (6)
1. the airflow homogeneity pick-up unit of a diffusion furnace, silicon chip (7) is housed in the body of heater of diffusion furnace (6), the two ends of body of heater (6) length direction are respectively fire door (8) and stove tail (9), it is characterized in that, this airflow homogeneity pick-up unit comprises measuring wind speed instrument (4) and places body of heater (6) rear and make straight-line straight-line motion mechanism along body of heater (6) length direction, the measuring junction of measuring wind speed instrument (4) penetrates the top that body of heater (6) measuring junction interior and measuring wind speed instrument (4) places the interior silicon chip of body of heater (6) (7) from stove tail (9), and the other end of measuring wind speed instrument (4) links to each other with straight-line motion mechanism by web member.
2. according to the airflow homogeneity pick-up unit of the described diffusion furnace of claim 1, it is characterized in that, described straight-line motion mechanism comprises that fixed part (11) and fixed part (11) top and relative fixed parts (11) do the moving component (10) of linear reciprocating motion, and described measuring wind speed instrument (4) links to each other with moving component (10).
3. according to the airflow homogeneity pick-up unit of the described diffusion furnace of claim 2, it is characterized in that described fixed part (11) is provided with the bracing frame (5) that supports measuring wind speed instrument (4).
4. according to the airflow homogeneity pick-up unit of the described diffusion furnace of claim 2, it is characterized in that, described straight-line motion mechanism is linear electric motors, fixed part (11) is the elementary of linear electric motors, moving component (10) is the secondary of linear electric motors, elementary and the secondary winding around (13) respectively of going up of linear electric motors, and between linear electric motors elementary and secondary, be provided with permanent magnet (12).
5. according to the airflow homogeneity pick-up unit of the described diffusion furnace of claim 1, it is characterized in that described diffusion furnace also is provided with industrial computer (1), described measuring wind speed instrument (4) links to each other with industrial computer (1) by signal wire with straight-line motion mechanism.
6. according to the airflow homogeneity pick-up unit of the described diffusion furnace of claim 1, it is characterized in that described web member (2) is clip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310174386.3A CN103257209B (en) | 2013-05-13 | 2013-05-13 | Air flow uniformity detection device of diffusion furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310174386.3A CN103257209B (en) | 2013-05-13 | 2013-05-13 | Air flow uniformity detection device of diffusion furnace |
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| CN103257209A true CN103257209A (en) | 2013-08-21 |
| CN103257209B CN103257209B (en) | 2015-07-01 |
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| CN201310174386.3A Active CN103257209B (en) | 2013-05-13 | 2013-05-13 | Air flow uniformity detection device of diffusion furnace |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105648202A (en) * | 2014-11-14 | 2016-06-08 | 宝山钢铁股份有限公司 | Intelligent adjusting method for air convection in induction furnace during online-moving heating of steel plate |
| CN112193341A (en) * | 2020-09-27 | 2021-01-08 | 安徽铜冠智能科技有限责任公司 | Mining crawler-type intelligent inspection robot system |
| CN113916716A (en) * | 2021-11-26 | 2022-01-11 | 河北中瓷电子科技股份有限公司 | Method for measuring atmosphere consistency in atmosphere sintering furnace |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105648202A (en) * | 2014-11-14 | 2016-06-08 | 宝山钢铁股份有限公司 | Intelligent adjusting method for air convection in induction furnace during online-moving heating of steel plate |
| CN105648202B (en) * | 2014-11-14 | 2018-01-30 | 宝山钢铁股份有限公司 | Steel plate moves heat induced furnace air convection current intelligent adjusting method online |
| CN112193341A (en) * | 2020-09-27 | 2021-01-08 | 安徽铜冠智能科技有限责任公司 | Mining crawler-type intelligent inspection robot system |
| CN113916716A (en) * | 2021-11-26 | 2022-01-11 | 河北中瓷电子科技股份有限公司 | Method for measuring atmosphere consistency in atmosphere sintering furnace |
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| CN103257209B (en) | 2015-07-01 |
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