CN103559993A - Prepulse isolation inductor and capillary discharge soft X-ray laser device using same - Google Patents

Prepulse isolation inductor and capillary discharge soft X-ray laser device using same Download PDF

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CN103559993A
CN103559993A CN201310589661.8A CN201310589661A CN103559993A CN 103559993 A CN103559993 A CN 103559993A CN 201310589661 A CN201310589661 A CN 201310589661A CN 103559993 A CN103559993 A CN 103559993A
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nylon
branch sleeve
inductance
prepulsing
capillary
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CN103559993B (en
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赵永蓬
姜杉
崔怀愈
刘涛
丁宇洁
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Harbin Institute of Technology
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Harbin Institute of Technology
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Abstract

A prepulse isolation inductor and a capillary discharge soft X-ray laser device using the inductor relate to a prepulse power protection device and an X-ray laser device using the device. According to the invention, the problem that high-amplitude current pulse interfering signals produced by main pulse voltages of existing capillary discharge soft X-ray laser devices in prepulse circuits can destroy prepulse power supplies is solved; the prepulse isolation inductor comprises a wire-wound inductor, a nylon insulating sleeve, a coupling sleeve, a stainless steel flange, a first metal bar, an annular gas discharge switch, a nylon connecting sleeve, a second metal bar and a nylon stick; and the interference of a main pulse high voltage to a prepulse power supply is reduced by using the hinder action of the inductor to fast rise time, and the inductor is serially connected between a capillary and the prepulse power supply. The soft X-ray laser pulse device is obtained by using a capillary discharge Z pinch effect.

Description

Prepulsing is isolated inductance and is utilized the capillary discharging soft x-ray laser device of this inductance
Technical field
The present invention relates to a kind of prepulsing apparatus for protecting power supply and utilize the x-ray laser device of this device.
Background technology
Capillary discharging soft x-ray laser refers to and utilizes capillary discharging Z pinch effect to obtain soft x-ray laser pulse.First, the gas being filled with in capillary is carried out to the low voltage electric discharge of (being about tens kilovolts), the electric current that produces tens amperes flows through the gas in capillary.This electric current is ionized into the neutral gas in pipe the plasma being comprised of lower ionization valence state, and this electric current is called as prepulsing electric current, by prepulsing power generation.In pre-pulse voltages punctures capillary after gas tens microseconds, main pulse power generation main pulse voltage (being about hundreds of kilovolt) discharges to the plasma in capillary, and forming the current impulse that first amplitude is tens kilo-amperes, this electric current is called main pulse electric current.Because half period of this electric pulse is about 130ns, when flowing through preionization plasma, can produce skin effect, electric current only flows through on the surface of plasma column.Magnetic field interaction due to discharging current and self generation, produces the Lorentz force that points to axle center, and plasma column shrinks to axle center, and this is called as Z pinch effect.In this process, due to electronics and the effect such as ion collides mutually, Joule heating, plasma temperature raises, density increases.When plasma pinch arrives axle center, form the plasma column that diameter only has hundreds of micron, the high-temperature high-density condition of plasma makes the upper and lower energy level population reversion of laser simultaneously, and laser gain is greater than loss, finally forms soft x-ray laser pulse.
In Fig. 1, provided the schematic diagram of capillary discharging soft x-ray laser device.As can be seen from Figure 1, two power supplys of main pulse and prepulsing need to be connected with capillary load simultaneously, therefore when main pulse voltage arrives capillary end, main pulse voltage is added in capillary end simultaneously, and on the prepulsing circuit being connected with capillary end.Main pulse voltage produces the current impulse interference signal that amplitude is higher in prepulsing circuit, and imports prepulsing power supply by prepulsing cable, thereby prepulsing power generation is destroyed.
Summary of the invention
The present invention produces in order to solve the main pulse voltage of existing capillary discharging soft x-ray laser device the problem that current impulse interference signal that amplitude is higher is destroyed prepulsing power generation in prepulsing circuit, has proposed prepulsing isolation inductance and has utilized the capillary discharging soft x-ray laser device of this inductance.
Prepulsing of the present invention isolation inductance, this inductance comprises wire-wound inductance, nylon insulating sleeve, branch sleeve, steel flange, Metallic rod, annular gas discharge switch, nylon branch sleeve, No. two Metallic rod and nylon rod;
Wire-wound inductance is wrapped on nylon rod, nylon insulating sleeve is enclosed within the outside of wire-wound inductance, branch sleeve is enclosed within the outside of nylon insulating sleeve, the height of branch sleeve is less than the height of nylon insulating sleeve, and the upper and lower side of branch sleeve has outward extending edge, and described outward extending along the upper manhole that is evenly provided with, the lower end of branch sleeve is coaxially installed with steel flange, through hole on branch sleeve is corresponding with the through hole on steel flange, the bottom of nylon insulating sleeve is stuck on the shoulder in steel flange, one end connecting line of a Metallic rod is around one end of inductance, annular gas discharge switch is connected between a Metallic rod and No. two Metallic rod, and annular gas discharge switch and No. two Metallic rod are positioned at steel flange, lower end and the nylon branch sleeve of rust steel flange are bolted, there is outward extending edge the upper end of described nylon branch sleeve, the bottom of nylon branch sleeve is airtight, the other end of No. two Metallic rod is the bottom through nylon branch sleeve by nylon branch sleeve.
The capillary discharging soft x-ray laser device that utilizes above-mentioned prepulsing isolation inductance, this device comprises main pulse power supply, arc chamber, capillary, vacuum chamber, vacuum system, detector and prepulsing power supply; Main pulse power supply signal output connects the output of one end capillaceous and prepulsing power supply simultaneously, capillary is placed in arc chamber, arc chamber is tubular confined space, capillary is fixed on the axis of arc chamber tubular, and capillary and vacuum chamber, vacuum system is for vacuumizing vacuum chamber;
Prepulsing isolation inductance is connected between capillary and prepulsing power supply.
The present invention utilizes inductor element to have higher inhibition to the rise-time of current of very fast variation; in prepulsing outlet line, increased a kind of prepulsing isolation inductance; can effectively stop main pulse voltage in prepulsing current circuit, to produce unnecessary high amplitude current impulse; in order to discharge fast laser pulse, produce the dump energy in rear water capacitance simultaneously; in prepulsing inductance, increase annular gas switch, reached the object of protection prepulsing power supply.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of existing capillary discharging soft x-ray laser device;
In figure, A is that main pulse power supply, B are that arc chamber, C are that capillary, D are that vacuum chamber, E are that vacuum system, F are detector;
Fig. 2 is the structural representation of prepulsing isolation inductance of the present invention;
Fig. 3 is the structural representation of capillary discharging soft x-ray laser device of the present invention;
Fig. 4 is for installing the main pulse current waveform figure of main pulse isolation inductance front and back capillary discharging soft x-ray laser device;
In figure, solid line is for installing the main pulse current waveform before main pulse isolation inductance;
In figure, dotted line is for installing the main pulse current waveform after main pulse isolation inductance.
Embodiment
Embodiment one, in conjunction with Fig. 2, present embodiment is described, prepulsing isolation inductance described in present embodiment, this inductance comprises wire-wound inductance 1, nylon insulating sleeve 2, branch sleeve 3, steel flange 4, Metallic rod 5, annular gas discharge switch 6, nylon branch sleeve 7, No. two Metallic rod 8 and nylon rods;
Wire-wound inductance 1 is wrapped on nylon rod, nylon insulating sleeve 2 is enclosed within the outside of wire-wound inductance 1, branch sleeve 3 is enclosed within the outside of nylon insulating sleeve 2, the height of branch sleeve 3 is less than the height of nylon insulating sleeve 2, and the upper and lower side of branch sleeve 3 has outward extending edge, and described outward extending along the upper manhole that is evenly provided with, the lower end of branch sleeve 3 is coaxially installed with steel flange 4, through hole on branch sleeve 3 is corresponding with the through hole on steel flange 4, the bottom of nylon insulating sleeve 2 is stuck on the shoulder in steel flange 4, one end connecting line of a Metallic rod 5 is around one end of inductance 1, annular gas discharge switch 6 is connected between a Metallic rod 5 and No. two Metallic rod 8, and annular gas discharge switch 6 and No. two Metallic rod 8 are positioned at steel flange 4, lower end and the nylon branch sleeve 7 of rust steel flange 4 are bolted, there is outward extending edge the upper end of described nylon branch sleeve 7, the bottom of nylon branch sleeve 7 is airtight, the other end of No. two Metallic rod 8 is the bottom through nylon branch sleeve 7 by nylon branch sleeve 7.
Effect of the present invention is to utilize the inhibition of inductance to fast rising edge, reduces the interference of main pulse high pressure to prepulsing power supply, thereby increases the stability of prepulsing power supply.Use single core high voltage insulated cable to make wire-wound inductance.This isolation inductance has the inductance value of approximately 1 microhenry, and the induction reactance value of main pulse electric current is about to 24 Ω, and the induction reactance value of prepulsing electric current is about to 0.79 Ω, this inductance to the induction reactance value of main pulse electric current than high 2 orders of magnitude of prepulsing electric current.
Wire-wound inductance is with high voltage, and outer branch sleeve is earth potential, for guaranteeing the normal operation of isolation inductance, and need to be to carrying out High-Voltage Insulation design between isolation inductance and sleeve.Therefore between wire-wound inductance and branch sleeve, designed the High-Voltage Insulation sleeve of nylon material.
The present invention is for after reducing laser pulse and producing, the electromagnetic interference that main pulse electric current vibrates for a long time and produces, thus guarantee that main pulse power control system can work, and has increased annular gas switch in the design of prepulsing inductance.This gas switch, can, by by the main pulse electric current after wire-wound inductance, utilize the mode of arc discharge to import the earth.This discharge switch can be changed the inner side sparking electrode of different-diameter, thereby realizes different voltage insulation intensity, to adapt to the discharge test condition of different main pulse voltages.Main pulse voltage is generally hundreds of kilovolt, and pre-pulse voltages is only 20 kilovolts of left and right, therefore can be by different discharge switch spacing, and when main pulse electric energy is discharged, pre-pulse voltages can not make switch conduction.Discharge switch utilizes Metallic rod to be connected with prepulsing power end, makes pre-pulse voltages can pass through isolation inductance.
Embodiment two, present embodiment are further illustrating the prepulsing isolation inductance described in embodiment one, the lower surface on branch sleeve 3 outward extending edges, lower end is provided with toroidal cavity, this groove is positioned at the survey of manhole, air seal cushion rubber is installed in groove, and air seal cushion rubber is for sealing the connection of branch sleeve 3 and steel flange 4.
Embodiment three, present embodiment are further illustrating the prepulsing isolation inductance described in embodiment one, the lower end of steel flange 4 is provided with toroidal cavity, this groove is positioned at the inner side of bolt, air seal cushion rubber is installed in groove, and this air seal cushion rubber is for sealing the junction of steel flange 4 and nylon branch sleeve 7.
Embodiment four, present embodiment is further illustrating the prepulsing isolation inductance described in embodiment one, it also comprises rosette, this rosette is fixedly mounted in No. two Metallic rod 8, No. two Metallic rod 8 are passed the center of circle of rosette, upper surface laminating at the bottom of 7 of the lower surface of this rosette and nylon branch sleeves, and the lower surface of rosette is provided with donut connected in star, in toroidal cavity, be provided with air seal cushion rubber, this air seal cushion rubber for to No. two Metallic rod 8 with seal being connected of bottom of nylon branch sleeve 7.
Embodiment five, in conjunction with Fig. 3, present embodiment is described, present embodiment is to utilize the capillary discharging soft x-ray laser device of the prepulsing isolation inductance described in embodiment one, and this device comprises main pulse power supply a, arc chamber b, capillary c, vacuum chamber d, vacuum system e, detector f and prepulsing power supply g; Main pulse power supply a signal output part connects one end of capillary c and the output of prepulsing power supply g simultaneously, capillary c is placed in arc chamber b, arc chamber b is tubular confined space, capillary c is fixed on the axis of arc chamber b tubular, and capillary c is communicated with vacuum chamber d, vacuum system e is for vacuumizing vacuum chamber d;
Prepulsing isolation inductance h is connected between capillary c and prepulsing power supply g.
In Fig. 4, provided the main pulse current waveform that main pulse isolation inductance front and back are installed.As can be seen from Figure 4, when not using main pulse isolation inductance, main pulse electric current is RLC oscillating discharge waveform, and current attenuation is slower.Use after isolation inductance main pulse isolation inductance, can find out at first half period main pulse electric current and almost completely overlap with former main pulse electric current, this explanation is installed new isolation inductance and can the plasma compression process in capillary not exerted an influence.Can in the scope after 400ns, find out, use the electric current after main pulse isolation inductance to be RC discharge waveform, current amplitude is almost reduced to zero when 1000ns simultaneously, and oscillation amplitude and cycle diminish simultaneously.This illustrates that the annular gas switch newly adding in main pulse isolation inductance is in the conducting of 400ns left and right, and the residual electricity magnetic energy being stored in capillary and water capacitance is directly discharged by ground wire, has reduced the interference of dump energy to control system.Experimental result shows, installs after isolation inductance main pulse isolation inductance, and master synchronizer and prepulsing form normally associated working of circuit.The electromagnetic interference producing when main pulse power control circuit is difficult for being discharged after the new isolation of use inductance is destroyed, stability of a system enhancing.These results suggest that, we have designed and have made and can effectively isolate the isolation inductance of main pulse electric current, and completed debugging work on the basis of capillary discharging device.

Claims (5)

1. prepulsing is isolated inductance, it is characterized in that, this inductance comprises wire-wound inductance (1), nylon insulating sleeve (2), branch sleeve (3), steel flange (4), a Metallic rod (5), annular gas discharge switch (6), nylon branch sleeve (7), No. two Metallic rod (8) and nylon rod;
Wire-wound inductance (1) is wrapped on nylon rod, nylon insulating sleeve (2) is enclosed within the outside of wire-wound inductance (1), branch sleeve (3) is enclosed within the outside of nylon insulating sleeve (2), the height of branch sleeve (3) is less than the height of nylon insulating sleeve (2), and the upper and lower side of branch sleeve (3) has outward extending edge, and described outward extending along the upper manhole that is evenly provided with, the lower end of branch sleeve (3) is coaxially installed with steel flange (4), through hole on branch sleeve (3) is corresponding with the through hole on steel flange (4), the bottom of nylon insulating sleeve (2) is stuck on the shoulder in steel flange (4), one end connecting line of a Metallic rod (5) is around one end of inductance (1), annular gas discharge switch (6) is connected between a Metallic rod (5) and No. two Metallic rod (8), and annular gas discharge switch (6) and No. two Metallic rod (8) are positioned at steel flange (4), lower end and the nylon branch sleeve (7) of rust steel flange (4) are bolted, there is outward extending edge the upper end of described nylon branch sleeve (7), the bottom of nylon branch sleeve (7) is airtight, the other end of No. two Metallic rod (8) is the bottom through nylon branch sleeve (7) by nylon branch sleeve (7).
2. prepulsing according to claim 1 is isolated inductance, it is characterized in that, the lower surface on branch sleeve (3) outward extending edge, lower end is provided with toroidal cavity, this groove is positioned at the survey of manhole, air seal cushion rubber is installed in groove, and air seal cushion rubber is for sealing the connection of branch sleeve (3) and steel flange (4).
3. prepulsing according to claim 1 is isolated inductance, it is characterized in that, the lower end of steel flange (4) is provided with toroidal cavity, this groove is positioned at the inner side of bolt, air seal cushion rubber is installed in groove, and this air seal cushion rubber is for sealing the junction of steel flange (4) and nylon branch sleeve (7).
4. prepulsing according to claim 1 is isolated inductance, it is characterized in that, it also comprises rosette, this rosette is fixedly mounted in No. two Metallic rod (8), No. two Metallic rod (8) are through the center of circle of rosette, the upper surface laminating at the lower surface of this rosette and nylon branch sleeve (7) the cylinder end, and the lower surface of rosette is provided with donut connected in star, in toroidal cavity, be provided with air seal cushion rubber, this air seal cushion rubber is used for sealing No. two Metallic rod (8) and being connected of bottom of nylon branch sleeve (7).
5. the capillary discharging soft x-ray laser device that utilizes the prepulsing isolation inductance described in claim 1, this device comprises main pulse power supply (a), arc chamber (b), capillary (c), vacuum chamber (d), vacuum system (e), detector (f) and prepulsing power supply (g); Main pulse power supply (a) signal output part connects one end of capillary (c) and the output of prepulsing power supply (g) simultaneously, capillary (c) is placed in arc chamber (b), arc chamber (b) is tubular confined space, capillary (c) is fixed on the axis of arc chamber (b) tubular, and capillary (c) is communicated with vacuum chamber (d), vacuum system (e) is for vacuumizing vacuum chamber (d);
It is characterized in that, prepulsing isolation inductance (h) is connected between capillary (c) and prepulsing power supply (g).
CN201310589661.8A 2013-11-20 2013-11-20 Prepulsing is isolated inductance and is utilized the capillary discharging soft x-ray laser device of this inductance Active CN103559993B (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104619105A (en) * 2015-02-16 2015-05-13 哈尔滨工业大学 Extreme ultraviolet source discharge chamber for discharge detection of Xe medium capillaries
CN112911784A (en) * 2021-02-05 2021-06-04 北京大学 Focusing device of laser acceleration pulse proton beam

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4937832A (en) * 1989-06-30 1990-06-26 Rocca Jorge J Methods and apparatus for producing soft x-ray laser in a capillary discharge plasma
US5335238A (en) * 1992-08-10 1994-08-02 The University Of Iowa Research Foundation Apparatus and method for guiding an electric discharge with a magnetic field
US6026099A (en) * 1996-07-31 2000-02-15 Tetra Corporation Pulse forming x-ray laser
US6356618B1 (en) * 2000-06-13 2002-03-12 Euv Llc Extreme-UV electrical discharge source
US20060262825A1 (en) * 2005-05-23 2006-11-23 Rocca Jorge J Capillary discharge x-ray laser
CN101115345A (en) * 2007-07-31 2008-01-30 哈尔滨工业大学 Capillary discharging X-laser device using blumlein line and eliminating prepulse

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4937832A (en) * 1989-06-30 1990-06-26 Rocca Jorge J Methods and apparatus for producing soft x-ray laser in a capillary discharge plasma
US5335238A (en) * 1992-08-10 1994-08-02 The University Of Iowa Research Foundation Apparatus and method for guiding an electric discharge with a magnetic field
US6026099A (en) * 1996-07-31 2000-02-15 Tetra Corporation Pulse forming x-ray laser
US6356618B1 (en) * 2000-06-13 2002-03-12 Euv Llc Extreme-UV electrical discharge source
US20060262825A1 (en) * 2005-05-23 2006-11-23 Rocca Jorge J Capillary discharge x-ray laser
CN101115345A (en) * 2007-07-31 2008-01-30 哈尔滨工业大学 Capillary discharging X-laser device using blumlein line and eliminating prepulse

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104619105A (en) * 2015-02-16 2015-05-13 哈尔滨工业大学 Extreme ultraviolet source discharge chamber for discharge detection of Xe medium capillaries
CN112911784A (en) * 2021-02-05 2021-06-04 北京大学 Focusing device of laser acceleration pulse proton beam

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