CN103671013B

CN103671013B - Use opposed type moving-coil linear compressor and the manufacture method of short coil axial charging

Info

Publication number: CN103671013B
Application number: CN201310591007.0A
Authority: CN
Inventors: 党海政
Original assignee: Shanghai Institute of Technical Physics of CAS
Current assignee: Shanghai Institute of Technical Physics of CAS
Priority date: 2013-11-21
Filing date: 2013-11-21
Publication date: 2016-08-24
Anticipated expiration: 2033-11-21
Also published as: CN103671013A

Abstract

The invention discloses a kind of opposed type moving-coil linear compressor using short coil axial charging and manufacture method, overall structure uses opposed type to offset the two-part mechanical vibration in left and right；Left part and right part are in addition to shared support, and by respective cylinder liner, permanent magnet, upper yoke, lower yoke, current-carrying coil, coil rack, piston, upper plate spring groups, lower plate spring groups, upper tabletting structure, lower sheeting structure, upper support structure, lower support structure, displacement transducer iron core, displacement transducer coil, displacement transducer supports, casing forms；Permanent magnet axial charging, current-carrying coil uses short coil；Upper yoke, piston and the current-carrying coil of left part and right part is both needed to the range sum of the axial width the meeting upper yoke axial height more than respective current-carrying coil and respective piston.Present configuration is compact, it is low to vibrate, electric efficiency is high, life expectancy is long, and the development to highly reliable, long-life, high efficiency linear compressor is significant.

Description

Use opposed type moving-coil linear compressor and the manufacture method of short coil axial charging

Technical field

The present invention relates to linear compressor, particularly to a kind of opposed type moving-coil using short coil axial charging Linear compressor and manufacture method thereof.

Background technology

Linear compressor is the one of reciprocating-piston compressor.Traditional reciprocating-piston compressor belongs to mostly In rotary compressor, electric rotating machine is i.e. used to drive, realized by the machine driving of toggle etc. Move back and forth.The technology of rotary compressor is the most ripe, but its energy transmission link is many, vibration and noise is big, Complete machine controls complexity, energy conversion efficiency is on the low side, the side force particularly applied piston because of construction features, It is one of main source producing idle work and mechanical wear, thus greatly limit its working life.Straight line Compressor utilizes linear electric motors to drive piston to do reciprocating linear motion in the cylinder, and it is right to completely eliminate in theory The radial forces of piston, thus eliminate the mechanical wear between piston and cylinder wall and consequent Idle work, working life and energy conversion efficiency are all greatly improved, so in needs long-life and high efficiency work The special dimensions such as the Aeronautics and Astronautics of work, military affairs have very important application.

The core component of linear compressor is linear electric motors.Linear electric motors mainly divide according to moving component therein It is three classes: moving-iron type, moving-coil type and moving-magnetic type.Moving-iron type linear motor does not use permanent magnet, thus price Less expensive, but performance is relatively unstable, controls more difficult, and its application gradually decreases；Moving-coil type and dynamic magnetic Formula linear electric motors all include three class core components: permanent magnet, yoke and current-carrying coil, be to carry during according to motion Streamline circle or permanent magnet motion and divide into moving-coil type and moving-magnetic type.Wherein, moving-coil type linear compressor because of Feature in its structure achieves being completely eliminated of radial force, and does not produces on current-carrying coil when open circuit Axial force and moment of torsion, thus there is high efficiency, low noise and highly reliable outstanding advantages, thus become nearly 30 Space regenerating type low-temperature refrigerator (such as pulse tube refrigerating machine and sterlin refrigerator) in international coverage over Nian First-selected power source.As a example by U.S.'s western developed country as representative, the boat launched between nearly 20 years In it pulse tube refrigerating machine and sterlin refrigerator, the overwhelming majority have employed moving-coil type linear compressor.

At present, be applied in the world space industry need to ensure the long-life, highly reliable, efficiency operation dynamic Ring type linear compressor mainly uses Oxford type and opposed type version.So-called Oxford type, it is gained the name and comes from Two key technology clearance seals of Regius professor and flat spring support, and these two technology are oil-free The critical support lubricated and can operate the long-life；So-called opposed type version, refers to adopt in agent structure Cancel out each other the mechanical vibration self produced by the motion of two complete equities and supporting construction, this technology It it is the reliable guarantee realizing the low vibration of linear compressor.

As it was previously stated, dynamic coil linear motor includes three class core components: permanent magnet, yoke and current-carrying coil. During work, current-carrying coil is in the air gap that permanent magnet and yoke are collectively forming, magnetic field force induced effect, becomes reciprocal Linear motion.Length according to current-carrying coil and the magnetizing direction of permanent magnet, can be by moving-coil type straight-line electric Machine is divided into four kinds, and Fig. 1 gives the schematic diagram of these four form, and wherein (1) is long loop axial charging Form, (2) are short coil axial charging form, and (3) are long-coil radial magnetization form, and (4) are short-term Circle radial magnetizing form, wherein 63 is permanent magnet, and 64 is upper yoke, and 65 is lower yoke, and 66 is current-carrying conductor Circle, through hole centered by 67.

Moving-coil type linear compressor, according to the kind of its linear electric motors used, is also accordingly divided into four kinds of shapes Formula, it may be assumed that use the moving-coil type linear compressor of long loop axial charging, use the dynamic of short coil axial charging Ring type linear compressor, the moving-coil type linear compressor of employing long-coil radial magnetization, employing short coil are radially The moving-coil type linear compressor magnetized.Which in above-mentioned four kinds of forms no matter moving-coil type linear compressor use Kind, if to guarantee that it can steady operation, it is necessary to follow following basic principle: (1) or be whole In piston stroke, be always ensured that stabilizing magnetic field be in current-carrying coil within (corresponding to long loop form)；(2) In whole piston stroke, be always ensured that current-carrying coil within being in stable magnetic field (corresponding to short Coil form).The moving-coil type linear compressor of these four form development at home at present is the most at the early-stage.

Summary of the invention

The present invention proposes a kind of opposed type moving-coil linear compressor using short coil axial charging and manufacturer thereof Method.

That is invented uses the opposed type moving-coil linear compressor of short coil axial charging by sharing support 0, left part Yoke 3 on cylinder liner 1, left part permanent magnet 2, left part, left part lower yoke 4, left part current-carrying coil 5, On left part coil rack 6, left part piston 7, left part under plate spring groups 8, left part on plate spring groups 9, left part Tabletting structure 10, left part lower sheeting structure 11, left part upper support structure 12, left part lower support structure 13, Left part displacement transducer iron core 14, left part displacement transducer coil 15, left part displacement transducer support 16, Yoke under yoke 3 ', right part on left part casing 17 and right part cylinder liner 1 ', right part permanent magnet 2 ', right part Plate spring groups 8 ' on ferrum 4 ', right part current-carrying coil 5 ', right part coil rack 6 ', right part piston 7 ', right part, Knot is supported on plate spring groups 9 ', right part on tabletting structure 10 ', right part lower sheeting structure 11 ', right part under right part Structure 12 ', right part lower support structure 13 ', right part displacement transducer iron core 14 ', right part displacement transducer coil 15 ', right part displacement transducer support 16 ', right part casing 17 ' collectively constitute, it is characterised in that overall structure Use the mechanical vibration that opposed type produces with counteracting left and right two parts, i.e. with vertical center line 40 as axis of symmetry, The all parts of left part and structure are arranged and are arranged enantiomorph each other with right part corresponding component and structure；Horizontal axis 50 Indication is shown as axial direction；Share support 0 by left part cylinder 41, right part cylinder 41 ' and shared venthole 42 compositions；Left part cylinder liner 1 interference fit is embedded in the inside of left part cylinder 41, right part cylinder liner 1 ' interference fit is embedded in the inside of right part cylinder 41 '；Left part permanent magnet 2 is cylinder-like structure, center It is machined with the left part magnet inner via hole 43 of a diameter of d vertically；On left part, yoke 3 is cylinder-like structure, its External diameter is equal with the external diameter of left part permanent magnet 2, and center is machined with the left part upper yoke of a diameter of d vertically Ferrum inner via hole 44；Left part lower yoke 4 is U-shape structure, and the internal diameter of U-shaped body is more than left part permanent magnet 2 External diameter, the center bottom U-shaped body is machined with the left part lower yoke inner via hole of a diameter of d vertically 45；Left part permanent magnet 2 magnetizes vertically to saturated, afterwards on left part yoke 3 and left part lower yoke 4 by a left side Portion's permanent magnet 2 is fully wrapped around wherein, and on left part, yoke left side 18 flushes with left part lower yoke left side 19, On left part, yoke right side 20 is close together with left part permanent magnet left side 21, left part permanent magnet right side 22 are close together with left part lower yoke left side 23；On left part permanent magnet 2, left part under yoke 3, left part Yoke 4 is collectively forming the ring-type air gap of left part 46, and left part current-carrying coil 5 is concentrically inserted the ring-type air gap of left part In 46, on right part permanent magnet 2 ', right part, yoke 3 ', right part lower yoke 4 ' are collectively forming the ring-type air gap of right part 46 ', it is interior that right part current-carrying coil 5 ' is concentrically inserted right part ring-type air gap 46 '；Left part current-carrying coil 5 and right part The axial height of current-carrying coil 5 ' is h；Range when left part piston 7 works with right part piston 7 ' is equal For s；On left part, yoke 3 is δ with the axial width of yoke 3 ' on right part, and meets relation: δ ＞ s+h, To ensure in whole piston stroke, within guaranteeing that current-carrying coil is in stable magnetic field all the time；Upper left supports Right side 24 is supported on left part lower yoke left side 19, and the two is fastened by screw, and left part supports Upper annular plane 25 is processed in the left side of structure 12；Lower-left supports right end face 47 is supported on the left of shared support On face 48, the two welds together；Lower-left supports left front side 26 and is supported in left part lower yoke right side On 27, the two is fastened by screw, and the lower left side of left part lower support structure 13 is processed into lower ring-shaped flat Face 28；On left part, plate spring groups 8 is formed by stacking by some single piece plate spring thin slices, forms upper left group in outer rim Outer rim 29, in group inner edge, formation upper left, inner edge 30, is machined with a left side of a diameter of d vertically in centre Upper group of spring body centre bore 31, wherein upper left group outer rim 29 be positioned over left part upper support structure 12 upper annular put down On face 25, and fastened by screw；Under left part, plate spring groups 9 is by some single piece plate spring thin slice superpositions Form, form lower-left group outer rim 32 in outer rim, in group inner edge, formation lower-left, inner edge 33, on edge, centre Axially being machined with the lower-left group spring body centre bore 34 of a diameter of d, wherein lower-left group outer rim 32 is positioned over left part On the lower ring plain 28 of lower support structure 13, and fastened by screw；Left part piston 7 is lived by left part Chock plug 35, left part piston middle transition platform 36 and left part piston rod 37 form, at left part piston rod 37 End be machined with long 1～3mm left bar thread segment 49, the external diameter of left part piston head 35 is than left part gas Internal diameter little 10～30 μm of cylinder 41, ensures that the diameter of left part piston rod 37 is less than d simultaneously；Left part piston Bar 37 sequentially passes through lower-left group spring body centre bore 34, left part lower yoke inner via hole 45, left part magnet inner via hole 43, yoke inner via hole 44, upper left group spring body centre bore 31 on left part；On left part, tabletting structure 10 is by upper left Group inner edge 30 and left part coil rack 6 tighten together with left part piston rod 37, left part lower sheeting structure Group inner edge, lower-left 33 is tightened together by 11 with left part piston middle transition platform 36, thus ensures left part current-carrying Coil 5, left part coil rack 6 and plate spring groups 9 under plate spring groups 8, left part on left part piston 7, left part It is connected as the entirety that can simultaneously move；Left part displacement transducer iron core 14 is internal to be machined with and left bar spiral shell The left iron core thread segment 51 that stricture of vagina section 49 matches, left bar thread segment 49 screws in left iron core thread segment 51 also Fastening；Arrange outside left part displacement transducer iron core 14 and be fastened on one with left part displacement transducer support 16 The left part displacement transducer coil 15 risen, left part displacement transducer supports 16 and then is supported on left part support On structure 12 and tighten together therewith；Left part casing 17 is by left part casing outer face 61 and lower-left Support outer face 52 to be welded and fixed, thus form left part airtight cavity, by left part cylinder liner 1, left part forever Yoke 3, left part lower yoke 4, left part current-carrying coil 5, left part coil rack 6, a left side on magnet 2, left part Tabletting structure 10, left part on plate spring groups 9, left part under plate spring groups 8, left part on portion's piston 7, left part Lower sheeting structure 11, left part upper support structure 12, left part lower support structure 13, left part displacement transducer ferrum Core 14, left part displacement transducer coil 15, left part displacement transducer support 16, left part casing 17 are all covered In wherein；The all parts of right part and structure are arranged and are left part corresponding component and structure is arranged about vertical center line The enantiomorph of 40, right part casing 17 ' is welded with support outer face, bottom right 52 ' by right part casing outer face 61 ' Fixing, form right part airtight cavity, by yoke 3 ' on right part cylinder liner 1 ', right part permanent magnet 2 ', right part, Right part lower yoke 4 ', right part current-carrying coil 5 ', right part coil rack 6 ', right part piston 7 ', right part upper plate bullet Tabletting structure 10 ', right part lower sheeting structure 11 ', right part on plate spring groups 9 ', right part under spring group 8 ', right part Upper support structure 12 ', right part lower support structure 13 ', right part displacement transducer iron core 14 ', right part displacement pass Sensor coil 15 ', right part displacement transducer support 16 ', right part casing 17 ' all cover in wherein, thus shape Become a kind of opposed type moving-coil linear compressor using short coil axial charging.

Below in conjunction with the accompanying drawings to the opposed type moving-coil linear compressor using short coil axial charging invented Manufacture method be described as follows:

The plan cross-section of the Fig. 2 opposed type moving-coil linear compressor using short coil axial charging by being invented Figure；The all parts of the left part of enantiomorph and right part corresponding component each other with vertical center line 40 as axis of symmetry The part that same batch produces need to be used so that the difference between individuality minimizes；

Fig. 3 is the three-dimensional cutaway view sharing support 0；Share support 0 and use mechanical strength height, thermal expansion system The titanium alloy material that number is little makes, and uses five-axis machine tool to process left part cylinder 41 and right part cylinder 41 ' simultaneously, Ensure that left part cylinder 41 and right part cylinder 41 ' are symmetrical about vertical center line 40, and ensure left part cylinder 41 It is better than 1.0 μm with the axiality of right part cylinder 41 ', ensures that the endoporus circularity of above-mentioned two cylinders is superior to simultaneously 0.5μm；After left part cylinder 41 and right part cylinder 41 ' completion of processing, same five-axis machine tool is used to process Share venthole 42, it is ensured that share venthole 42 and left part cylinder 41 and the perpendicularity of right part cylinder 41 ' It is superior to 2.0 μm；

Fig. 4 is that the three-dimensional cutaway view of left part cylinder liner 1 is (for the parts of left and right enantiomorph each other, accompanying drawing In typically only provide the detailed maps of left part, and left part and right part parts are together described by manufacturer's rule, Lower same)；Left part cylinder liner 1 and right part cylinder liner 1 ' all use the hardness die steel material more than 58 to make It is processed into cylindrical shape, it is ensured that left part cylinder liner 1 and right part cylinder liner 1 ' by the method for low-speed WEDM External diameter respectively bigger than the internal diameter of left part cylinder 41 and right part cylinder 41 ' 0.5～1.0mm, then used The mode coordinating and expanding with heat and contract with cold that is full of is inlaid into left part cylinder 41 respectively and right part cylinder 41 ' is interior, specifically inlays Method is as follows: shared support 0 entirety as shown in Figure 3 is positioned over the constant temperature that internal temperature is 160 DEG C and adds Uniform heating 4～6 hours in hot tank, before shared support 0 takes out heated at constant temperature case 5～10 minutes, will Left part cylinder liner 1 and right part cylinder liner 1 ' are positioned in liquid nitrogen immersion simultaneously, at shared support 0 from perseverance While temperature adds hot tank taking-up, left part cylinder liner 1 and right part cylinder liner 1 ' are taken out, so from liquid nitrogen Rear use mechanical external force left part cylinder liner 1 and right part cylinder liner 1 ' are pushed respectively left part cylinder 41 and Right part cylinder 41 ' is internal, thus ensure the outer wall of left part cylinder liner 1 and right part cylinder liner 1 ' respectively with The inwall of left part cylinder 41 and right part cylinder 41 ' is combined closely；Then use jig grinder to left part cylinder bush The endoporus of set 1 and right part cylinder liner 1 ' carries out fine gtinding, it is ensured that its endoporus circularity is superior to 0.5 μm；

Fig. 5 is the section plan of left part piston 7；Left part piston 7 and right part piston 7 ' all use machinery strong The titanium alloy material that degree is high, thermal coefficient of expansion is little makes, and processes blank initially with Digit Control Machine Tool, then Jig grinder is used to carry out fine gtinding, it is ensured that the circularity of left part piston head 35 and right part piston head 35 ' is the most excellent In 0.5 μm, and ensure left part piston rod 37 and right part piston rod 37 ' vertically beat less than 3.0 μm, And the perpendicularity of left part piston rod 37 and left part piston head 35 is better than 1.0 μm, right part piston rod 37 ' with The perpendicularity of right part piston head 35 ' is better than 1.0 μm；At left part piston rod 37 and the end of right part piston rod 37 ' End uses precise numerical control machine to process left bar thread segment 49 and right bar thread segment 49 ' respectively；Left part piston 7 And the range during work of right part piston 7 ' is both designed as s, position limiting structure ensure that stroke accuracy is better than 2.0 μm；

Fig. 6 is plate spring groups 8 and the combination schematic diagram of tabletting structure 10 on left part on left part, and Fig. 7 is left part Lower plate spring groups 9 and the combination schematic diagram of left part lower sheeting structure 11；Tabletting structure 10, left part on left part In lower sheeting structure 11 and right part, tabletting structure 10 ', right part lower sheeting structure 11 ' are by mechanical strength relatively The metal material high, remanent magnetism is relatively low uses Digit Control Machine Tool processing and fabricating to form, and machining accuracy is superior to 9.0 μm； Flat spring under plate spring groups 8 ', right part on plate spring groups 9 and right part under plate spring groups 8, left part on left part Group 9 ' is formed by some plate sheet flat spring superpositions, and the thickness of single sheet of thin sheet flat spring and quantity are by specifically should Determining by required elastic stiffness, material is beryllium-bronze or rustless steel, uses the method for photoetching accurately to process Going out internal molded line, internal molded line can be spiral type, it is also possible to be straight-arm shape, and molded line requires smooth, without hair Thorn, without knuckle, and be performed for more than 10 by leaf spring vibration rig⁸The inspection of fatigue that individual circulation is above；

Internal molded line be the schematic diagram of spiral single sheet of thin sheet flat spring as shown in Figure 8, with light on thin slice Lithography etches spiral type molded line 38, thus self-assembling formation spiral type leaf spring arm 39, outside reserves single piece plate Spring outer rim 53, and some screw holes 54 fixing for screw are uniformly etched thereon with photoetching process, Single piece plate spring inner edge 55 is reserved in inner side；

Internal molded line is the schematic diagram of the single sheet of thin sheet flat spring of straight-arm shape as it is shown in figure 9, with light on thin slice Lithography etches straight-arm template spring arm 56 and movement arm 57, and outside reserves single piece plate spring outer rim 58, And some screw holes 59 fixing for screw are uniformly etched thereon with photoetching process, reserve monolithic in inner side Flat spring inner edge 60；

Figure 10 and Figure 11 is respectively left part upper support structure 12 and the plan cross-section of left part lower support structure 13 Figure；Left part upper support structure 12 and left part lower support structure 13 is higher by mechanical strength, remanent magnetism is relatively low Metal material uses Digit Control Machine Tool processing and fabricating to form, and machining accuracy is superior to 5.0 μm；Knot is supported on left part The left side of structure 12 uses precise numerical control machine to be processed into upper annular plane 25；Upper left supports right end face 24 supports On left part lower yoke left side 19, the two is fastened by screw；Lower-left supports right end face 47 is supported in Sharing on support left surface 48, the two is welded together by electron beam welding technology, and lower-left supports a left side Leading flank 26 is supported on left part lower yoke right side 27, and the two is fastened by screw, supports under left part The lower left side of structure 13 uses precise numerical control machine to process lower ring plain 28, left part lower support structure The side, upper left of 13 uses precise numerical control machine to process support outer face, lower-left 52；

Figure 12 is the section plan of right part lower support structure 13 '；Right part lower support structure 13 ' is strong by machinery Spending the metal material higher, remanent magnetism is relatively low uses Digit Control Machine Tool processing and fabricating to form, and machining accuracy is better than 5.0 μm, its upper right side uses precise numerical control machine to process support outer face, lower-left 52 '；

Figure 13 is the section plan of left part displacement transducer iron core 14；Left part displacement transducer iron core 14 And right part displacement transducer iron core 14 ' is made by pure iron material, inside is machined with and left bar thread segment respectively 49 and the left iron core thread segment 51 that matches of right bar thread segment 49 ' and right iron core thread segment 51 ', left bar screw thread Section 49 and right bar thread segment 49 ' screw in left iron core thread segment 51 respectively and right iron core thread segment 51 ' is interior and fasten；

Left part coil rack 6, right part coil rack 6 ', left part displacement transducer support 16, left part displacement pass Sensor supports 16 ' metal materials higher by mechanical strength, that remanent magnetism is relatively low and uses Digit Control Machine Tool processing and fabricating Forming, machining accuracy is superior to 9.0 μm；Left part displacement transducer coil 15 and right part displacement transducer line Circle 15 ' is formed by enamel covered wire coiling on corresponding skeleton；

Figure 14 is the section plan of left part permanent magnet 2；Left part permanent magnet 2 and right part permanent magnet 2 ' are all adopted The rare earth permanent-magnetic material higher with magnetic energy product makes, and uses the mode machine-shaping of Laser Processing；Left part permanent magnetism Body 2 and right part permanent magnet 2 ' all use pulsed magnetizer to magnetize vertically to saturated；

Figure 15 is the section plan of yoke 3 on left part；On left part, on yoke 3 and right part, yoke 3 ' is all adopted With the higher pure iron material of permeability, precise numerical control machine is used to process, yoke 3 and right part on left part The axial width of upper yoke 3 ' is δ, and machining accuracy is superior to 2.0 μm；

Figure 16 is the section plan of left part lower yoke 4；Left part lower yoke 4 and right part lower yoke 4 ' are all adopted With the higher pure iron material of permeability, precise numerical control machine is used to process；

Figure 17 is the schematic diagram of left part current-carrying coil 5；Left part current-carrying coil 5 and right part current-carrying coil 5 ' are all Using enamel covered wire coiling on a solid support to form, the diameter of enamel covered wire and thickness are by the electricity needing offer Machine power determines；Left part current-carrying coil 5 is h, by machine during making with the axial height of right part current-carrying coil 5 ' Bed precision and technique for coiling ensure that the precision of h is better than 2.0 μm；

Figure 18 is yoke 3 on left part permanent magnet 2, left part, left part lower yoke 4 and left part current-carrying coil 5 Combined planar sectional view；On left part yoke 3 and left part lower yoke 4 by fully wrapped around for left part permanent magnet 2 its In, it being collectively forming the ring-type air gap of left part 46, left part current-carrying coil 5 is concentrically inserted the ring-type air gap of left part 46 In；On right part yoke 3 ' and right part lower yoke 4 ' by fully wrapped around for right part permanent magnet 2 ' wherein, be collectively forming the right side The ring-type air gap 46 ' in portion, it is interior that right part current-carrying coil 5 ' is concentrically inserted right part ring-type air gap 46 '；Yoke on left part 3, on left part current-carrying coil 5, left part piston 7 and right part, yoke 3 ' is lived with right part current-carrying coil 5 ', right part Plug 7 ' is both needed to when making ensure to meet: δ ＞ s+h, to ensure in whole piston stroke, guarantees all the time Within current-carrying coil is in stable magnetic field；

Figure 19 and Figure 20 is respectively left part casing 17 and the section plan of right part casing 17 '；Left part casing 17 and right part casing 17 ' used precision by the metal material that mechanical strength height, compact structure, remanent magnetism are relatively low Digit Control Machine Tool processing and fabricating shapes；Left part casing outer face 61 and support outer face, lower-left 52 use electron beam Technology welds together, airtight cavity on the left of formation；Right part casing outer face 61 ' and support outer face, bottom right 52 ' use electron beam technologies to weld together, and form right part airtight cavity, complete close to above-mentioned two welding Closing cavity and be all filled with the inspection of high-purity helium, compressive resistance is both needed to higher than 5.0MPa, and helium leak rates is both needed to low In 3.0 × 10^-8Pa·m³/s。

It is an advantage of the current invention that: in the way of short coil and axial charging, achieve moving-coil linear compressor Stable, reliable and continuously run, have compact conformation, vibrate low, electric efficiency is high, life expectancy length Outstanding advantages, the development to highly reliable, long-life, high efficiency linear compressor is significant.

Accompanying drawing explanation

Fig. 1 is the schematic diagram of four kinds of forms of dynamic coil linear motor, and wherein (1) is long loop axial charging shape Formula, (2) are short coil axial charging form, and (3) are long-coil radial magnetization form, and (4) are short coil Radial magnetizing form.Wherein 63 is permanent magnet, and 64 is upper yoke, and 65 is lower yoke, and 66 is current-carrying coil, Through hole centered by 67；

The plan cross-section of the Fig. 2 opposed type moving-coil linear compressor using short coil axial charging by being invented Figure, wherein: 0 for share support, 1 be left part cylinder liner, 2 for left part permanent magnet, 3 be left part upper yoke Ferrum, 4 be left part lower yoke, 5 for left part current-carrying coil, 6 for left part coil rack, 7 for left part piston, 8 it is plate spring groups on left part, 9 is plate spring groups under left part, 10 is tabletting structure on left part, 11 is left part Lower sheeting structure, 12 be left part upper support structure, 13 for left part lower support structure, 14 for left part displacement biography Sensor iron core, 15 be left part displacement transducer coil, 16 be that left part displacement transducer supports, 17 for left part Casing；1 ' be right part cylinder liner, 2 ' be right part permanent magnet, 3 ' be yoke on right part, 4 ' be right part lower yoke, 5 ' be right part current-carrying coil, 6 ' be right part coil rack, 7 ' be right part piston, 8 ' be plate spring groups on right part, 9 ' it is plate spring groups under right part, 10 ' is tabletting structure on right part, 11 ' is right part lower sheeting structure, 12 ' is right Portion's upper support structure, 13 ' be right part lower support structure, 14 ' be right part displacement transducer iron core, 15 ' be right part Displacement transducer coil, 16 ' it is that right part displacement transducer supports, 17 ' is right part casing；

Fig. 3 is the three-dimensional cutaway view sharing support 0, and wherein 41 is left part cylinder, and 41 ' is right part cylinder, 42 For shared venthole, 48 for sharing support left surface；

Fig. 4 is the three-dimensional cutaway view of left part cylinder liner 1；

Fig. 5 is the section plan of left part piston 7, and wherein 35 is left part piston head, and 36 is in left part piston Between transition bench, 37 is left part piston rod, and 49 is left bar thread segment；

Fig. 6 is plate spring groups 8 and the combination schematic diagram of tabletting structure 10 on left part on left part, and wherein 29 are Upper left group outer rim, 30 is group inner edge, upper left, upper left group spring body centre bore 31；

Fig. 7 is plate spring groups 9 and the combination schematic diagram of left part lower sheeting structure 11 under left part, and wherein 32 are Lower-left group outer rim, 33 is group inner edge, lower-left, and 34 is lower-left group spring body centre bore；

Fig. 8 be internal molded line be the schematic diagram of spiral single sheet of thin sheet flat spring, wherein 38 is spiral type type Line, 39 is spiral type leaf spring arm, and 53 is single piece plate spring outer rim, and 54 is screw hole, and 55 is single piece plate bullet Spring inner edge；

Fig. 9 be internal molded line be the schematic diagram of the single sheet of thin sheet flat spring of straight-arm shape, wherein 56 is straight-arm template Spring arm, 57 is movement arm, and 58 is single piece plate spring outer rim, and 59 is screw hole, and 60 is single piece plate spring Inner edge；

Figure 10 is the section plan of left part upper support structure 12, and wherein 24 is upper left supports right end face, 25 For upper annular plane；

Figure 11 is the section plan of left part lower support structure 13, wherein 26 supports left front side for lower-left, 28 is lower ring plain, and 47 is lower-left supports right end face, and 52 is support outer face, lower-left；

Figure 12 is the section plan of right part lower support structure 13 ', and wherein 52 ' is support outer face, bottom right；

Figure 13 is the section plan of left part displacement transducer iron core 14, and wherein 51 is left iron core thread segment；

Figure 14 is the section plan of left part permanent magnet 2, and wherein 21 is left part permanent magnet left side；22 are Left part permanent magnet right side；43 is left part magnet inner via hole；

Figure 15 is the section plan of yoke 3 on left part, and wherein 18 is yoke left side on left part；20 are Yoke right side on left part；44 is yoke inner via hole on left part；

Figure 16 is the section plan of left part lower yoke 4, and wherein 19 is left part lower yoke left side；23 are Left part lower yoke left side, 27 is left part lower yoke right side；45 is left part lower yoke inner via hole；

Figure 17 is the schematic diagram of left part current-carrying coil 5；

Figure 18 is yoke 3 on left part permanent magnet 2, left part, left part lower yoke 4 and left part current-carrying coil 5 Combined planar sectional view, wherein 46 is the ring-type air gap of left part；

Figure 19 is the section plan of left part casing 17, and wherein 61 is left part casing outer face, and 62 is left part Casing body；

Figure 20 is the section plan of right part casing 17 ', and wherein 61 ' is right part casing outer face, and 62 ' is right part Casing body.

Detailed description of the invention

Below in conjunction with the accompanying drawings and the detailed description of the invention of the present invention is described in further detail by embodiment:

That is invented uses the opposed type moving-coil linear compressor of short coil axial charging by sharing support 0, left part Yoke 3 on cylinder liner 1, left part permanent magnet 2, left part, left part lower yoke 4, left part current-carrying coil 5, On left part coil rack 6, left part piston 7, left part under plate spring groups 8, left part on plate spring groups 9, left part Tabletting structure 10, left part lower sheeting structure 11, left part upper support structure 12, left part lower support structure 13, Left part displacement transducer iron core 14, left part displacement transducer coil 15, left part displacement transducer support 16, Yoke under yoke 3 ', right part on left part casing 17 and right part cylinder liner 1 ', right part permanent magnet 2 ', right part Plate spring groups 8 ' on ferrum 4 ', right part current-carrying coil 5 ', right part coil rack 6 ', right part piston 7 ', right part, Knot is supported on plate spring groups 9 ', right part on tabletting structure 10 ', right part lower sheeting structure 11 ', right part under right part Structure 12 ', right part lower support structure 13 ', right part displacement transducer iron core 14 ', right part displacement transducer coil 15 ', right part displacement transducer support 16 ', right part casing 17 ' collectively constitute, it is characterised in that overall structure Use the mechanical vibration that opposed type produces with counteracting left and right two parts, i.e. with vertical center line 40 as axis of symmetry, The all parts of left part and structure are arranged and are arranged enantiomorph each other with right part corresponding component and structure；Horizontal axis 50 Indication is shown as axial direction；Share support 0 by left part cylinder 41, right part cylinder 41 ' and shared venthole 42 compositions；Left part cylinder liner 1 interference fit is embedded in the inside of left part cylinder 41, right part cylinder liner 1 ' interference fit is embedded in the inside of right part cylinder 41 '；Left part permanent magnet 2 is cylinder-like structure, center It is machined with the left part magnet inner via hole 43 of a diameter of d vertically；On left part, yoke 3 is cylinder-like structure, its External diameter is equal with the external diameter of left part permanent magnet 2, and center is machined with the left part upper yoke of a diameter of d vertically Ferrum inner via hole 44；Left part lower yoke 4 is U-shape structure, and the internal diameter of U-shaped body is more than left part permanent magnet 2 External diameter, the center bottom U-shaped body is machined with the left part lower yoke inner via hole of a diameter of d vertically 45；Left part permanent magnet 2 magnetizes vertically to saturated, afterwards on left part yoke 3 and left part lower yoke 4 by a left side Portion's permanent magnet 2 is fully wrapped around wherein, and on left part, yoke left side 18 flushes with left part lower yoke left side 19, On left part, yoke right side 20 is close together with left part permanent magnet left side 21, left part permanent magnet right side 22 are close together with left part lower yoke left side 23；On left part permanent magnet 2, left part under yoke 3, left part Yoke 4 is collectively forming the ring-type air gap of left part 46, and left part current-carrying coil 5 is concentrically inserted the ring-type air gap of left part In 46, on right part permanent magnet 2 ', right part, yoke 3 ', right part lower yoke 4 ' are collectively forming the ring-type air gap of right part 46 ', it is interior that right part current-carrying coil 5 ' is concentrically inserted right part ring-type air gap 46 '；Left part current-carrying coil 5 and right part The axial height of current-carrying coil 5 ' is h；Range when left part piston 7 works with right part piston 7 ' is equal For s；On left part, yoke 3 is δ with the axial width of yoke 3 ' on right part, and meets relation: δ ＞ s+h, To ensure in whole piston stroke, within guaranteeing that current-carrying coil is in stable magnetic field all the time；Upper left supports Right side 24 is supported on left part lower yoke left side 19, and the two is fastened by screw, and left part supports Upper annular plane 25 is processed in the left side of structure 12；Lower-left supports right end face 47 is supported on the left of shared support On face 48, the two welds together；Lower-left supports left front side 26 and is supported in left part lower yoke right side On 27, the two is fastened by screw, and the lower left side of left part lower support structure 13 is processed into lower ring-shaped flat Face 28；On left part, plate spring groups 8 is formed by stacking by some single piece plate spring thin slices, forms upper left group in outer rim Outer rim 29, in group inner edge, formation upper left, inner edge 30, is machined with a left side of a diameter of d vertically in centre Upper group of spring body centre bore 31, wherein upper left group outer rim 29 be positioned over left part upper support structure 12 upper annular put down On face 25, and fastened by screw；Under left part, plate spring groups 9 is by some single piece plate spring thin slice superpositions Form, form lower-left group outer rim 32 in outer rim, in group inner edge, formation lower-left, inner edge 33, on edge, centre Axially being machined with the lower-left group spring body centre bore 34 of a diameter of d, wherein lower-left group outer rim 32 is positioned over left part On the lower ring plain 28 of lower support structure 13, and fastened by screw；Left part piston 7 is lived by left part Chock plug 35, left part piston middle transition platform 36 and left part piston rod 37 form, at left part piston rod 37 End be machined with the left bar thread segment 49 of long 2mm, the external diameter of left part piston head 35 is than left part cylinder Little 20 μm of internal diameter of 41, ensure that the diameter of left part piston rod 37 is less than d simultaneously；Left part piston rod 37 depends on The secondary lower-left group spring body centre bore 34, left part lower yoke inner via hole 45, left part magnet inner via hole 43, left of running through Yoke inner via hole 44, upper left group spring body centre bore 31 in portion；On left part, tabletting structure 10 is by group inner edge, upper left 30 and left part coil rack 6 tighten together with left part piston rod 37, left part lower sheeting structure 11 is by a left side Lower group of inner edge 33 tightens together with left part piston middle transition platform 36, thus ensure left part current-carrying coil 5, Left part coil rack 6 is connected as with plate spring groups 9 under plate spring groups 8, left part on left part piston 7, left part One entirety that can simultaneously move；Left part displacement transducer iron core 14 is internal to be machined with and left bar thread segment 49 The left iron core thread segment 51 matched, in left bar thread segment 49 screws in left iron core thread segment 51 and fasten；? Arrange outside left part displacement transducer iron core 14 and support 16 left parts tightened together with left part displacement transducer Displacement transducer coil 15, left part displacement transducer supports 16 and then is supported in left part upper support structure 12 On and tighten together therewith；Left part casing 17 is by left part casing outer face 61 and support outer end, lower-left Face 52 is welded and fixed, thus forms left part airtight cavity, by left part cylinder liner 1, left part permanent magnet 2, Yoke 3 on left part, left part lower yoke 4, left part current-carrying coil 5, left part coil rack 6, left part piston 7, Tabletting structure 10, left part lower sheeting structure on plate spring groups 9, left part under plate spring groups 8, left part on left part 11, left part upper support structure 12, left part lower support structure 13, left part displacement transducer iron core 14, left part Displacement transducer coil 15, left part displacement transducer support 16, left part casing 17 all cover in wherein；Right The all parts in portion and structure are arranged and are left part corresponding component and structure arranges the mirror image about vertical center line 40 Body, right part casing 17 ' is welded and fixed with support outer face, bottom right 52 ' by right part casing outer face 61 ', shape Become right part airtight cavity, by under yoke 3 ', right part on right part cylinder liner 1 ', right part permanent magnet 2 ', right part Plate spring groups 8 ' on yoke 4 ', right part current-carrying coil 5 ', right part coil rack 6 ', right part piston 7 ', right part, Knot is supported on plate spring groups 9 ', right part on tabletting structure 10 ', right part lower sheeting structure 11 ', right part under right part Structure 12 ', right part lower support structure 13 ', right part displacement transducer iron core 14 ', right part displacement transducer coil 15 ', right part displacement transducer support 16 ', right part casing 17 ' all cover in wherein, thus form a kind of employing The opposed type moving-coil linear compressor of short coil axial charging.

The manufacture method of the opposed type moving-coil linear compressor using short coil axial charging invented can be pressed Following method is implemented:

Fig. 4 is that the three-dimensional cutaway view of left part cylinder liner 1 is (for the parts of left and right enantiomorph each other, accompanying drawing In typically only provide the detailed maps of left part, and left part and right part parts are together described by manufacturer's rule, Lower same)；Left part cylinder liner 1 and right part cylinder liner 1 ' all use the hardness die steel material more than 58 to make It is processed into cylindrical shape, it is ensured that left part cylinder liner 1 and right part cylinder liner 1 ' by the method for low-speed WEDM External diameter 0.8mm bigger than the internal diameter of left part cylinder 41 and right part cylinder 41 ' respectively, then use interference join The mode closed and expand with heat and contract with cold is inlaid into left part cylinder 41 respectively and right part cylinder 41 ' is interior, concrete method for embedding As follows: shared support 0 entirety as shown in Figure 3 is positioned over the heated at constant temperature case that internal temperature is 160 DEG C Interior uniformly heating 5 hours, take out heated at constant temperature case first 7 minutes at shared support 0, by left part cylinder liner 1 and right part cylinder liner 1 ' be positioned in liquid nitrogen immersion simultaneously, shared support 0 from heated at constant temperature case take out While, left part cylinder liner 1 and right part cylinder liner 1 ' are taken out from liquid nitrogen, then uses outside machinery Left part cylinder liner 1 and right part cylinder liner 1 ' are pushed left part cylinder 41 and right part cylinder 41 ' by power respectively Inside, thus ensure the outer wall of left part cylinder liner 1 and right part cylinder liner 1 ' respectively with left part cylinder 41 And the inwall of right part cylinder 41 ' combines closely；Then use jig grinder to left part cylinder liner 1 and right part The endoporus of cylinder liner 1 ' carries out fine gtinding, it is ensured that its endoporus circularity is superior to 0.5 μm；

Figure 14 is the section plan of left part permanent magnet 2；Left part permanent magnet 2 and right part permanent magnet 2 ' are all adopted The rare earth permanent-magnetic material higher with magnetic energy product makes, and uses the mode machine-shaping of Laser Processing, left part permanent magnetism Body 2 and right part permanent magnet 2 ' all use pulsed magnetizer to magnetize vertically to saturated；

Figure 18 is yoke 3 on left part permanent magnet 2, left part, left part lower yoke 4 and left part current-carrying coil 5 Combined planar sectional view；On left part yoke 3 and left part lower yoke 4 by fully wrapped around for left part permanent magnet 2 its In, it being collectively forming the ring-type air gap of left part 46, left part current-carrying coil 5 is concentrically inserted the ring-type air gap of left part 46 In；On right part yoke 3 ' and right part lower yoke 4 ' by fully wrapped around for right part permanent magnet 2 ' wherein, be collectively forming the right side The ring-type air gap 46 ' in portion, it is interior that right part current-carrying coil 5 ' is concentrically inserted right part ring-type air gap 46 '；Yoke on left part 3, on left part current-carrying coil 5, left part piston 7 and right part, yoke 3 ' is lived with right part current-carrying coil 5 ', right part Plug 7 ' is both needed to meet relation when making: δ ＞ s+h, to ensure in whole piston stroke, guarantees all the time Within current-carrying coil is in stable magnetic field；

Claims

1. use an opposed type moving-coil linear compressor for short coil axial charging, by shared support (0), Yoke (3), left part lower yoke (4), a left side on left part cylinder liner (1), left part permanent magnet (2), left part Plate spring groups (8) on portion's current-carrying coil (5), left part coil rack (6), left part piston (7), left part, Under left part on plate spring groups (9), left part on tabletting structure (10), left part lower sheeting structure (11), left part Supporting construction (12), left part lower support structure (13), left part displacement transducer iron core (14), left part position Displacement sensor coil (15), left part displacement transducer support (16), left part casing (17) and right part gas On cylinder liner (1 '), right part permanent magnet (2 '), right part, yoke (3 '), right part lower yoke (4 '), right part carry Plate spring groups (8 '), the right side on streamline circle (5 '), right part coil rack (6 '), right part piston (7 '), right part On subordinate's plate spring groups (9 '), right part on tabletting structure (10 '), right part lower sheeting structure (11 '), right part Supporting construction (12 '), right part lower support structure (13 '), right part displacement transducer iron core (14 '), right part position Displacement sensor coil (15 '), right part displacement transducer support (16 ') and right part casing (17 ') composition, its Being characterised by, overall structure uses the mechanical vibration that opposed type produces with counteracting left and right two parts, i.e. with vertically Centrage (40) is axis of symmetry, and all parts of left part and structure are arranged and arranged with right part corresponding component and structure Enantiomorph each other；Horizontal axis (50) indication is shown as axial direction；Share support (0) by left part cylinder (41), right part cylinder (41 ') and shared venthole (42) composition；Left part cylinder liner (1) interference Coordinating the inside being embedded in left part cylinder (41), right part cylinder liner (1 ') interference fit is embedded in right part The inside of cylinder (41 ')；Left part permanent magnet (2) is cylinder-like structure, and center is machined with vertically Left part magnet inner via hole (43) of a diameter of d；On left part, yoke (3) is cylinder-like structure, its external diameter with The external diameter of left part permanent magnet (2) is equal, and center is machined with yoke on the left part of a diameter of d vertically Inner via hole (44)；Left part lower yoke (4) is U-shape structure, and the internal diameter of U-shaped body is more than left part permanent magnet (2) External diameter, the center bottom U-shaped body is machined with the left part lower yoke inner via hole of a diameter of d vertically (45)；Left part permanent magnet (2) magnetizes vertically to saturated, afterwards on left part under yoke (3) and left part Yoke (4) by fully wrapped around wherein for left part permanent magnet (2), yoke left side (18) and left part on left part Lower yoke left side (19) flushes, yoke right side (20) and left part permanent magnet left side (21) on left part Being close together, left part permanent magnet right side (22) is close together with left part lower yoke left side (23)； On left part permanent magnet (2), left part, yoke (3), left part lower yoke (4) are collectively forming the ring-type air gap of left part (46), left part current-carrying coil (5) is concentrically inserted in the ring-type air gap of left part (46), right part permanent magnet (2 '), On right part, yoke (3 '), right part lower yoke (4 ') are collectively forming the ring-type air gap of right part (46 '), right part current-carrying Coil (5 ') is concentrically inserted in the ring-type air gap of right part (46 ')；Left part current-carrying coil (5) carries with right part The axial height of streamline circle (5 ') is h；When left part piston (7) and right part piston (7 ') work Big stroke is s；On left part, yoke (3) is δ with the axial width of yoke (3 ') on right part, and full Foot relation: δ ＞ s+h, to ensure in whole piston stroke, guarantees that current-carrying coil is in stable all the time Within magnetic field；Upper left supports right end face (24) is supported on left part lower yoke left side (19), the two Being fastened by screw, upper annular plane (25) is processed in the left side of left part upper support structure (12)；Lower-left Supports right end face (47) is supported on shared support left surface (48), and the two welds together；Lower-left Supporting left front side (26) to be supported on left part lower yoke right side (27), the two is fastened by screw, The lower left side of left part lower support structure (13) is processed into lower ring plain (28)；Plate spring groups on left part (8) it is formed by stacking by some single piece plate spring thin slices, forms upper left group outer rim (29) in outer rim, in inner edge Form group inner edge, upper left (30), be machined with the group spring body center, upper left of a diameter of d in centre vertically Hole (31), wherein upper left group outer rim (29) is positioned over the upper annular plane of left part upper support structure (12) (25) on, and fastened by screw；Under left part, plate spring groups 9 is by some single piece plate spring thin slice superpositions Form, form lower-left group outer rim (32) in outer rim, in group inner edge, formation lower-left, inner edge (33), at central part Position is machined with lower-left group spring body centre bore (34) of a diameter of d, wherein lower-left group outer rim (32) vertically It is positioned on the lower ring plain (28) of left part lower support structure (13), and is fastened by screw；Left Portion's piston (7) is by left part piston head (35), left part piston middle transition platform (36) and left part piston rod (37) composition, the end at left part piston rod (37) is machined with the left bar thread segment (49) of long 1～3mm, The external diameter of left part piston head (35), than internal diameter little 10～30 μm of left part cylinder (41), ensures simultaneously The diameter of left part piston rod (37) is less than d；Left part piston rod (37) sequentially passes through group spring body center, lower-left Lead in yoke on hole (34), left part lower yoke inner via hole (45), left part magnet inner via hole (43), left part Hole (44), upper left group spring body centre bore (31)；On left part, tabletting structure (10) is by group inner edge, upper left (30) And left part coil rack (6) tightens together with left part piston rod (37), left part lower sheeting structure (11) Group inner edge, lower-left (33) is tightened together with left part piston middle transition platform (36), thus ensures left part Plate spring groups (8) on current-carrying coil (5), left part coil rack (6) and left part piston (7), left part, Under left part, plate spring groups (9) is connected as the entirety that can simultaneously move；Left part displacement transducer iron core (14) Inside is machined with the left iron core thread segment (51) matched with left bar thread segment (49), left bar thread segment (49) Screw-in left iron core thread segment (51) is interior and fastens；Outside left part displacement transducer iron core (14) arrange with Left part displacement transducer supports left part displacement transducer coil (15) that (16) tighten together, left part position Displacement sensor supports (16) and then is supported on left part upper support structure (12) and tightens together therewith； Left part casing (17) is welded and fixed with support outer face, lower-left (52) by left part casing outer face (61), Thus form left part airtight cavity, by yoke on left part cylinder liner (1), left part permanent magnet (2), left part (3), left part lower yoke (4), left part current-carrying coil (5), left part coil rack (6), left part piston (7), On left part under plate spring groups (8), left part on plate spring groups (9), left part under tabletting structure (10), left part Tabletting structure (11), left part upper support structure (12), left part lower support structure (13), left part displacement pass Sensor iron core (14), left part displacement transducer coil (15), left part displacement transducer support (16), a left side Portion's casing (17) all covers in wherein；The all parts of right part and structure arrange it is left part corresponding component and structure Arranging the enantiomorph about vertical center line (40), right part casing (17 ') passes through right part casing outer face (61 ') Be welded and fixed with support outer face, bottom right (52 '), formed right part airtight cavity, by right part cylinder liner (1 '), Yoke (3 ') on right part permanent magnet (2 '), right part, right part lower yoke (4 '), right part current-carrying coil (5 '), Plate spring groups under plate spring groups (8 '), right part on right part coil rack (6 '), right part piston (7 '), right part Tabletting structure (10 ') on (9 '), right part, right part lower sheeting structure (11 '), right part upper support structure (12 '), Right part lower support structure (13 '), right part displacement transducer iron core (14 '), right part displacement transducer coil (15 '), Right part displacement transducer supports (16 '), right part casing (17 ') all covers in wherein, thus forms one and adopt With the opposed type moving-coil linear compressor of short coil axial charging.

2. the opposed type moving-coil linear compressor of an employing short coil axial charging as claimed in claim 1 Manufacture method, it is characterised in that with the left part of vertical center line (40) enantiomorph each other as axis of symmetry All parts and right part corresponding component need to use part that same batch produces so that the difference between individuality is minimum Change；Sharing support (0) uses the titanium alloy material that mechanical strength is high, thermal coefficient of expansion is little to make, and uses Five-axis machine tool processes left part cylinder (41) and right part cylinder (41 ') simultaneously, it is ensured that left part cylinder (41) Symmetrical about vertical center line (40) with right part cylinder (41 '), and ensure left part cylinder (41) and right part The axiality of cylinder (41 ') is better than 1.0 μm, ensures that the endoporus circularity of above-mentioned two cylinders is superior to 0.5 simultaneously μm；After left part cylinder (41) and right part cylinder (41 ') completion of processing, same five-axis machine tool is used to add Work goes out shared venthole (42), it is ensured that share venthole (42) and left part cylinder (41) and right part gas The perpendicularity of cylinder (41 ') is superior to 2.0 μm；Left part cylinder liner (1) and right part cylinder liner (1 ') All use the hardness die steel material more than 58 to use the method for low-speed WEDM to be processed into cylindrical shape, protect The external diameter of card left part cylinder liner (1) and right part cylinder liner (1 ') is respectively than left part cylinder (41) and the right side The internal diameter big 0.5～1.0mm in portion's cylinder (41 '), then uses interference fit and the mode expanded with heat and contract with cold to divide Not being inlaid in left part cylinder (41) and right part cylinder (41 '), concrete method for embedding is: share support (0) Entirety uniformly heats 4～6 hours, at shared support in being positioned over the heated at constant temperature case that internal temperature is 160 DEG C (0) take out before heated at constant temperature case 5～10 minutes, by left part cylinder liner (1) and right part cylinder liner (1 ') It is positioned in liquid nitrogen immersion, at shared support (0) while heated at constant temperature case takes out, by left part simultaneously Cylinder liner (1) and right part cylinder liner (1 ') take out from liquid nitrogen, then use mechanical external force by left part Cylinder liner (1) and right part cylinder liner (1 ') push left part cylinder (41) and right part cylinder (41 ') respectively Inside, thus ensure the outer wall of left part cylinder liner (1) and right part cylinder liner (1 ') respectively with left part gas The inwall of cylinder (41) and right part cylinder (41 ') is combined closely；Then use jig grinder to left part cylinder bush The endoporus of set (1) and right part cylinder liner (1 ') carries out fine gtinding, it is ensured that its endoporus circularity is superior to 0.5μm；Left part piston (7) and right part piston (7 ') all use mechanical strength height, thermal coefficient of expansion little Titanium alloy material makes, and processes blank initially with Digit Control Machine Tool, then uses jig grinder to carry out finely Grind, it is ensured that the circularity of left part piston head (35) and right part piston head (35 ') is superior to 0.5 μm, and Ensure left part piston rod (37) and right part piston rod (37 ') beating less than 3.0 μm vertically, and Left part piston rod (37) is better than 1.0 μm, right part piston rod (37 ') with the perpendicularity of left part piston head (35) It is better than 1.0 μm with the perpendicularity of right part piston head (35 ')；At left part piston rod (37) and right part piston The end of bar (37 ') uses precise numerical control machine to process left bar thread segment (49) and right bar thread segment respectively (49′)；Range when left part piston (7) and right part piston (7 ') work is both designed as s, by limiting Bit architecture ensures that stroke accuracy is better than 2.0 μm；Tabletting structure (10), left part lower sheeting structure (11) on left part And tabletting structure (10 ') on right part, right part lower sheeting structure (11 ') are higher by mechanical strength, remanent magnetism Relatively low metal material uses Digit Control Machine Tool processing and fabricating to form, and machining accuracy is superior to 9.0 μm；On left part Plate spring groups (8 '), right part lower plate bullet on plate spring groups (9) and right part under plate spring groups (8), left part Spring group (9 ') is formed by some plate sheet flat spring superpositions, the thickness of single sheet of thin sheet flat spring and quantity by Elastic stiffness required for concrete application determines, material is beryllium-bronze or rustless steel, uses the method essence of photoetching Really processing internal molded line, internal molded line is spiral type or straight-arm shape, molded line require smooth, impulse-free robustness, Without knuckle, and it is performed for more than 10 by leaf spring vibration rig⁸The inspection of fatigue that individual circulation is above；Inner Line is that the manufacture method of spiral single sheet of thin sheet flat spring is for etch spiral type with photoetching process on thin slice Molded line (38), thus self-assembling formation spiral type leaf spring arm (39), outside reserves single piece plate spring outer rim (53), And some screw holes (54) fixing for screw are uniformly etched thereon with photoetching process, reserve in inner side Single piece plate spring inner edge (55)；Internal molded line is that the manufacture method of the single sheet of thin sheet flat spring of straight-arm shape is: Etching straight-arm template spring arm (56) and movement arm (57) with photoetching process on thin slice, outside reserves Single piece plate spring outer rim (58), and some spiral shells fixing for screw are uniformly etched thereon with photoetching process Nail (59), reserves single piece plate spring inner edge (60) in inner side；Left part upper support structure (12) and left part The metal material that lower support structure (13) is higher by mechanical strength, remanent magnetism is relatively low uses Digit Control Machine Tool processing Being made, machining accuracy is superior to 5.0 μm；The left side of left part upper support structure (12) uses accurate number Control machine tooling becomes upper annular plane (25)；It is left that upper left supports right end face (24) is supported in left part lower yoke On end face (19), the two is fastened by screw；Lower-left supports right end face (47) is supported in shared support On left surface (48), the two is welded together by electron beam welding technology, and lower-left supports left front side (26) being supported on left part lower yoke right side (27), the two is fastened by screw, supports under left part The lower left side of structure (13) uses precise numerical control machine to process lower ring plain (28), lower of left part The side, upper left of support structure (13) uses precise numerical control machine to process support outer face, lower-left (52)；Right The metal material that subordinate's supporting construction (13 ') is higher by mechanical strength, remanent magnetism is relatively low uses Digit Control Machine Tool processing Being made, machining accuracy is better than 5.0 μm, and its upper right side uses precise numerical control machine to process bottom right and props up Support outer face (52 ')；Left part displacement transducer iron core (14) and right part displacement transducer iron core (14 ') are equal Being made by pure iron material, inside is machined with and left bar thread segment (49) and right bar thread segment (49 ') phase respectively The left iron core thread segment (51) coordinated and right iron core thread segment (51 '), left bar thread segment (49) and right bar In thread segment (49 ') screws in left iron core thread segment (51) and right iron core thread segment (51 ') respectively and fasten； Left part coil rack (6), right part coil rack (6 '), left part displacement transducer support (16), left part position Displacement sensor supports the metal material that (16 ') are higher by mechanical strength, remanent magnetism is relatively low and uses Digit Control Machine Tool to add Work is made, and machining accuracy is superior to 9.0 μm；Left part displacement transducer coil (15) and right part displacement Cell winding (15 ') is formed by enamel covered wire coiling on corresponding skeleton；Left part permanent magnet (2) and Right part permanent magnet (2 ') all uses the rare earth permanent-magnetic material that magnetic energy product is higher to make, and uses the side of Laser Processing Formula machine-shaping, left part permanent magnet (2) and right part permanent magnet (2 ') all use pulsed magnetizer to fill vertically Magnetic is to saturated；On left part, on yoke (3) and right part, yoke (3 ') all uses the pure iron material that permeability is higher, Use precise numerical control machine processes, the axial width of yoke (3 ') on yoke (3) and right part on left part Being δ, machining accuracy is superior to 2.0 μm；Left part lower yoke (4) and right part lower yoke (4 ') are all adopted With the higher pure iron material of permeability, precise numerical control machine is used to process；Left part current-carrying coil (5) And right part current-carrying coil (5 ') all uses enamel covered wire coiling on a solid support to form, enamel covered wire straight Footpath and thickness are by needing the motor force provided to determine；Left part current-carrying coil (5) and right part current-carrying coil (5 ') Axial height be h, ensured that the precision of h is better than 2.0 μm by machine tool accuracy and technique for coiling during making； On left part, yoke (3) and left part lower yoke (4) are by fully wrapped around wherein, jointly for left part permanent magnet (2) Forming the ring-type air gap of left part (46), left part current-carrying coil (5) is concentrically inserted the ring-type air gap of left part (46) In；On right part yoke (3 ') and right part lower yoke (4 ') by fully wrapped around for right part permanent magnet (2 ') wherein, Being collectively forming the ring-type air gap of right part (46 '), right part current-carrying coil (5 ') is concentrically inserted the ring-type air gap of right part In (46 ')；On left part on yoke (3), left part current-carrying coil (5), left part piston (7) and right part Yoke (3 ') and right part current-carrying coil (5 '), right part piston (7 ') are both needed to when making ensure to meet each The axial width of upper yoke is more than the axial height of respective current-carrying coil and the range sum of respective piston, That is: δ ＞ s+h, to ensure in whole piston stroke, guarantees that current-carrying coil is in stable magnetic all the time Within Chang；Left part casing (17) and right part casing (17 ') are by mechanical strength height, compact structure, remanent magnetism Relatively low metal material uses precise numerical control machine processing and fabricating to shape；Left part casing outer face (61) is with left Lower support outer face (52) uses electron beam technology to weld together, airtight cavity on the left of formation, right part machine Shell outer face (61 ') and support outer face, bottom right (52 ') use electron beam technology to weld together, and are formed Left side airtight cavity, right part casing outer face (61 ') uses electron beam with support outer face, bottom right (52 ') Technology welds together, and forms right part airtight cavity, above-mentioned two is welded complete airtight cavity and is all filled with High-purity helium is checked, and compressive resistance is both needed to higher than 5.0MPa, and helium leak rates is both needed to be less than 3.0×10^-8Pa·m³/s。