CN104979742A - Chemical oxygen-iodine laser optical resonant cavity adjusting and monitoring system and method - Google Patents
Chemical oxygen-iodine laser optical resonant cavity adjusting and monitoring system and method Download PDFInfo
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- CN104979742A CN104979742A CN201410143863.4A CN201410143863A CN104979742A CN 104979742 A CN104979742 A CN 104979742A CN 201410143863 A CN201410143863 A CN 201410143863A CN 104979742 A CN104979742 A CN 104979742A
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Abstract
The invention relates to a chemical oxygen-iodine laser optical resonant cavity adjusting and monitoring system and method. The chemical oxygen-iodine laser optical resonant cavity adjusting and monitoring system comprises a master control module, an algorithm module, a data acquisition module, a motor control module, a digital I/O module, a motor drive digital I/O module, a communication module, a display unit and a power supply module. The method comprises the following steps: the master control module collects and displays pressure data in a cavity of a pressure sensor in real time, and judges whether the collected cavity pressure data surpasses an allowable range of pressure in an optical cavity; the algorithm module sends an instruction to the digital I/O module to control a solenoid valve switch to realize pressure regulation according to the pressure data in the optical cavity; and the display unit sends a control signal to a motor control module for controlling motors in X direction and Y direction to adjust, and monitoring the operation states of the motors in real time. The system has the advantages of high real-time performance, high stability, simple operation and low development cost and the like, and is especially suitable for being applied to the optical resonant cavity of a chemical oxygen-iodine laser.
Description
Technical field
The present invention relates to a kind of Chemical oxygen-iodine laser optical resonator to regulate and supervisory control system and method, specifically, refer to a kind of for the adjustment of Chemical oxygen-iodine laser optical resonator lumen mirror mirror holder and the control system of optical resonator intrinsic parameter Monitoring and Controlling and method.
Background technology
Optical resonator is as the important component part of Chemical oxygen-iodine laser, and the adjustment of its chamber mirror and the change of chamber intrinsic parameter will directly affect the beam quality of laser bright dipping.Chamber mirror regulates by existing control system to be separated with Inspect and control two kinds of functions of optical cavity parameter, and chamber mirror regulates and is made up of motor, power supply and hand push button, can only regulate in this locality; The Inspect and control of optical cavity parameter is then completed by the supervisory control desk far away apart from laser positions.This systemic-function is disperseed, and real-time is more weak, complicated operation and poor anti jamming capability, is unfavorable for that the integrated system of Chemical oxygen-iodine laser realizes.
Summary of the invention
For overcoming the deficiencies in the prior art, the invention provides a kind of real-time, stability is high, simple to operate, development cost is low adjustment being applied to Chemical oxygen-iodine laser optical resonator and supervisory control system and method.
Technical solution of the present invention is as follows:
Chemical oxygen-iodine laser optical resonator regulates and supervisory control system, comprising: main control module, algoritic module, data acquisition module, motor control module, digital I/O module, motor drive digital I/O module, communication module, display unit and power module;
Described main control module is connected with algoritic module, digital I/O module, communication module respectively, algoritic module is connected with data acquisition module, motor control module, motor drives digital I/O model calling, and power module is connected with main control module, general purpose I/O module, data acquisition module, motor control module respectively; Described communication module is connected with display unit;
Main control module is used for the control command received by display unit to send to digital I/O module, and drives the motor operating state information of digital I/O module feedback to be shown in real time by display unit in the electromagnetically operated valve state of digital I/O module feedback, the pressure sensor information of data collecting module collected and motor;
Algoritic module is used for driving the motor operating state information of digital I/O module acquires to carry out computing to the pressure sensor information of data collecting module collected and motor and sending instruction to digital I/O module and motor control module;
Numeral I/O module is used for being connected with electromagnetically operated valve and the opening and closing of the instruction Controlling solenoid valve sent through main control module according to algoritic module;
Data acquisition module is used for acquisition cavity pressure sensor data;
Motor drives digital I/O module to be connected with motor control module, for being obtained motor operating state information by access motor control module and fed back to algoritic module.
Chemical oxygen-iodine laser optical resonator regulates and also comprises chamber mirror driving mechanism with supervisory control system, is made up of mirror holder and pull bar; Described mirror holder comprises the frame of hollow structure, the X-direction conditioning box of ring-type and Y-direction conditioning box, it is inner that chamber mirror is embedded in Y-direction conditioning box, X-direction conditioning box is arranged in Y-direction conditioning box by the first rotating shaft, and Y-direction conditioning box is arranged in frame by the second rotating shaft; On X-direction conditioning box, vertical minute surface direction is provided with the first pull bar, on conditioning box, vertical minute surface direction is provided with the second pull bar in the Y direction, first pull bar is connected with the first motor and the second motor-driven respectively with the second pull bar, and first, second motor drives first, second pull bar to move back and forth in the direction perpendicular to mirror body reflecting surface respectively.
Described first rotating shaft is vertical with the second rotating shaft and be positioned at same plane.
Described chamber mirror is convex lens or concave mirror.
A kind of Chemical oxygen-iodine laser optical resonator regulates and method for supervising, comprises the following steps:
1) main control module receives the cavity pressure data of the pressure sensor induction of data acquisition module Real-time Collection, delivers to display unit show in real time after low-pass filtering by communication module;
2) whether master control module judges cavity pressure data exceed optical cavity internal pressure allowed band; If do not exceed, perform step 3); If exceed, then reported to the police by display unit, selected the switch of electromagnetically operated valve according to the cavity pressure value shown by display unit, then perform step 3);
3) algoritic module Real-Time Monitoring motor operating state; The light spot shape exported according to optical resonator and luminance uniformity, regulated, until light spot shape and luminance uniformity reach setting requirement to the motor of the X-direction of motor control module control chamber mirror and Y-direction by display unit input instruction.
Described Real-Time Monitoring motor operating state comprises the following steps:
Motor drives the stroke limiting unit of digital I/O module to obtain the pull bar move distance of motor output end connection by the counter of motor control card in access motor control module, and judges whether this distance reaches setting threshold;
Then send signal to main control module as reached, main control module sends instruction makes motor out of service, and is reported to the police by display unit; If do not reach, then monitor motor driver output signal in motor control module; If motor driver operation irregularity, then send signal to main control module, it is out of service that main control module sends instruction control motor; Otherwise execution step 3).
Described chamber mirror is convex lens or concave mirror; Convex lens is for controlling light spot shape, and concave mirror is for controlling luminance uniformity.
The present invention's advantage compared with prior art:
1. the chamber mirror of Chemical oxygen-iodine laser optical resonator is regulated the Monitoring and Controlling two kinds of function i ntegration with optical cavity parameter by existing control system by the present invention, and this locality that can realize optical resonator and remote real-time operation.
2. the present invention simplifies operating process by the function software being installed on touch screen type host computer.
3. the stability of a system is high, development cost is low.The validity of this cover system by verification experimental verification.
Accompanying drawing explanation
Fig. 1 is the block diagram of system of the present invention;
Fig. 2 is core algorithm module flow chart of the present invention;
Fig. 3 is data acquisition module schematic diagram of the present invention;
Fig. 4 is chamber mirror driving mechanism front elevational schematic;
Fig. 5 is chamber mirror driving mechanism side-looking schematic diagram;
Fig. 6 is motor control module schematic diagram of the present invention;
Embodiment
Below in conjunction with drawings and Examples, the present invention is described in further detail.
The present invention utilizes Motorola PowerPC750GX processor to form main control module, by other functional module of master control module controls, design and produce Chemical oxygen-iodine laser optical resonator and regulate and supervisory control system, system is provided with touch screen type host computer, built-in function software, is convenient to user's operation.
As shown in Figure 1, the present invention mainly comprises: main control module, algoritic module, data acquisition module, motor control module, digital I/O module, motor drive digital I/O module, display unit, communication module and power module.
Main control module is connected with algoritic module, digital I/O module, communication module respectively.Algoritic module is connected with data acquisition module, motor control module, motor drives digital I/O model calling.Power module is connected with main control module, general purpose I/O module, data acquisition module, motor control module respectively.Numeral I/O module is connected with electromagnetically operated valve by I/O interface, realizes vacuumizing and the control of amplifying gas optical resonator.Data acquisition module is connected by the pressure sensor of analog signal interface with monitoring optical resonator parameter.Motor control module is connected with stepping motor, realizes the adjustment to optical resonator chamber mirror mirror holder by transmission mechanism.Motor drives digital I/O module to be connected with motor control module by I/O interface, realizes the monitoring to stepping motor running status.
Main control module is made up of Motorola PowerPC750GX processor, synchronous DRAM SDRAM, flash memory Flash ROM and clock circuit, synchronous DRAM is used as to store data, flash memory is used as to store start-up routine, and main control module has been used for Comprehensive Control, logic control, communication function.
As shown in Figure 3, data acquisition module is made up of A/D converter, programmable interval timer, high speed optoelectronic isolating chip and difference channel, programmable interval timer is used for the logical-sequential control of A/D converter, the analog signal that pressure sensor exports is after the isolation of high speed optoelectronic isolating chip, by difference channel, difference is carried out to analog signal, after A/D converter collection, send into main control module.
A/D converter is resolution 16, four-way is changed simultaneously, parallel data exports.
As shown in Figure 4, the structure of chamber mirror driving mechanism is as follows: mirror holder is made up of frame, X-direction conditioning box and Y-direction conditioning box, and it is inner that chamber mirror (concave mirror or convex lens) is embedded in Y-direction conditioning box.The first pull bar is provided with in X-direction conditioning box lower vertical minute surface (i.e. the plane of X, Y-direction conditioning box formation) direction, conditioning box upper vertical minute surface direction is provided with the second pull bar in the Y direction, first pull bar and the second pull bar are connected with the first stepping motor and the second stepping motor-driven respectively, and driving stepper motor pull bar moves back and forth in the direction perpendicular to mirror body reflecting surface.
As shown in Figure 5, motor control module is made up of 4 shaft step motor control cards, stepper motor driver and interface circuit, 4 shaft step motor control cards receive the instruction of core algorithm module, give the pulse of stepper motor driver certain frequency and number, stepper motor driver received pulse information and direction signal are also applied to stepping motor, and stepping motor realizes the adjustment of chamber mirror mirror holder by transmission mechanism.
As shown in Figure 6,4 spindle motor control cards choose PCI-1240U type, and stepper motor driver chooses NDC-06 type.
Numeral I/O module is made up of I/O expanding element, relay unit and interface circuit, I/O expanding element is made up of 74HC595 and TLP521-4 chip, realize the I/O expansion of control system, relay unit is connected with expanded circuit, the switch control rule to electromagnetically operated valve is realized by interface circuit, thus the control that realization is amplified gas to optical cavity and vacuumized.
Relay unit chooses PCLD-785 type.
Motor drives digital I/O module, be made up of stroke limiting unit and driving monitoring means, I/O priority is the highest, stroke limiting unit is by the counter of access stepping motor control card, judge stepping motor move distance, when reaching setting threshold, signal is sent to system, main control module sends instruction makes stepping motor out of service, drive monitoring means for monitoring stepper motor driver output signal, when stepper motor driver operation irregularity, send signal to system, main control module sends instruction makes stepping motor out of service.
Communication module comprises RS232 unit and CAN unit, and user can adopt any one communication modes in these two kinds that host computer and control system are set up and contact, and communication module makes main control module and host computer carry out exchanges data.Can arrange at the enterprising line parameter of the man-machine interface of touch screen type host computer according to the information exchanged, image shows, and can show force value curve and light spot shape that pressure sensor senses.Light spot shape is taken by the camera be connected with display unit, and camera is positioned at optical resonator inside, takes exit positions, and the hot spot taken is for the adjustment of optical resonator chamber mirror.
Power module is main control module, general purpose I/O module, data acquisition module and motor control module provides+12V ,+24V system power supply.
Display unit is touch screen type host computer, and it is equipped with man-machine interface, and for realizing the display of optical resonance cavity pressure and regulating (selecting the opening and closing of electromagnetically operated valve), and optical resonator chamber mirror regulates (angular adjustment of input concave mirror and convex lens).
As shown in Figure 2, algoritic module is made up of one piece of Motorola PowerPC750GX processor, and the data be mainly used in data acquisition module and motor drive digital I/O module to transmit gather and computing.Its function regulates Algorithm constitution primarily of pressure monitor algorithm and chamber mirror.
Pressure monitor algorithm: the cavity pressure of Real-time Collection pressure sensor becomes the number of delivering letters, and carries out digital filtering show in real time to deliver to display unit after the electrical interference of filtering city by low-pass filtering algorithm.Judge whether image data exceeds optical cavity internal pressure allowed band subsequently.If in allowed band, proceed the circulation of next algorithm; If go beyond the scope, then report to the police and enter pressure control algorithm.Press program start button starting pressure control algolithm.The switch of electromagnetically operated valve is selected by the cavity pressure value shown, and then the change of control chamber internal pressure, then continue to enter the circulation of next algorithm.
Chamber mirror regulates algorithm: press program start button and start chamber mirror adjustment algorithm, enter motor initialization step.Judge that motor runs button and whether presses, if so, then send corresponding direction and pulse signal.Stroke limiting unit, by the counter of access stepping motor control card, judges stepping motor move distance, and when reaching setting threshold, send signal to system, main control module sends instruction makes stepping motor out of service, and instruction of reporting to the police; If do not reach setting threshold, then enter and drive monitoring means monitoring stepper motor driver output signal.If during stepper motor driver operation irregularity, send signal to system, main control module sends instruction makes stepping motor out of service; Otherwise enter motor control algorithms.
Motor control algorithms is according to optical resonator output facula shape and brightness uniformity, after controlling convex lens and concave mirror respectively, the stepping motor of X-direction and Y-direction regulates: also shown on the display unit by camera collection image, again according to the light spot shape of display and the rotational angle of brightness uniformity input cavity mirror X-direction and Y-direction on the display unit, algoritic module controls corresponding motor motion according to this order by motor control module.Convex lens controls light spot shape, concave mirror controls brightness uniformity.Two stepping motors difference control chamber mirror X-directions after the mirror of each chamber and the rotation of Y-direction, until light spot shape is normal, brightness uniformity, namely light spot shape is complete, and edge clear (edge line is closed and complete), brightness is without graded.
Claims (7)
1. Chemical oxygen-iodine laser optical resonator regulates and supervisory control system, comprising: main control module, algoritic module, data acquisition module, motor control module, digital I/O module, motor drive digital I/O module, communication module, display unit and power module;
Described main control module is connected with algoritic module, digital I/O module, communication module respectively, algoritic module is connected with data acquisition module, motor control module, motor drives digital I/O model calling, and power module is connected with main control module, general purpose I/O module, data acquisition module, motor control module respectively; Described communication module is connected with display unit;
Main control module is used for the control command received by display unit to send to digital I/O module, and drives the motor operating state information of digital I/O module feedback to be shown in real time by display unit in the electromagnetically operated valve state of digital I/O module feedback, the pressure sensor information of data collecting module collected and motor;
Algoritic module is used for driving the motor operating state information of digital I/O module acquires to carry out computing to the pressure sensor information of data collecting module collected and motor and sending instruction to digital I/O module and motor control module;
Numeral I/O module is used for being connected with electromagnetically operated valve and the opening and closing of the instruction Controlling solenoid valve sent through main control module according to algoritic module;
Data acquisition module is used for acquisition cavity pressure sensor data;
Motor drives digital I/O module to be connected with motor control module, for being obtained motor operating state information by access motor control module and fed back to algoritic module.
2. Chemical oxygen-iodine laser optical resonator according to claim 1 regulates and supervisory control system, characterized by further comprising chamber mirror driving mechanism, is made up of mirror holder and pull bar; Described mirror holder comprises the frame of hollow structure, the X-direction conditioning box of ring-type and Y-direction conditioning box, it is inner that chamber mirror is embedded in Y-direction conditioning box, X-direction conditioning box is arranged in Y-direction conditioning box by the first rotating shaft, and Y-direction conditioning box is arranged in frame by the second rotating shaft; On X-direction conditioning box, vertical minute surface direction is provided with the first pull bar, on conditioning box, vertical minute surface direction is provided with the second pull bar in the Y direction, first pull bar is connected with the first motor and the second motor-driven respectively with the second pull bar, and first, second motor drives first, second pull bar to move back and forth in the direction perpendicular to mirror body reflecting surface respectively.
3. Chemical oxygen-iodine laser optical resonator according to claim 2 regulates and supervisory control system, it is characterized in that described first rotating shaft is vertical with the second rotating shaft and is positioned at same plane.
4. Chemical oxygen-iodine laser optical resonator according to claim 2 regulates and supervisory control system, it is characterized in that described chamber mirror is convex lens or concave mirror.
5. a kind of Chemical oxygen-iodine laser optical resonator according to claim 1 regulates and method for supervising, it is characterized in that comprising the following steps:
1) main control module receives the cavity pressure data of the pressure sensor induction of data acquisition module Real-time Collection, delivers to display unit show in real time after low-pass filtering by communication module;
2) whether master control module judges cavity pressure data exceed optical cavity internal pressure allowed band; If do not exceed, perform step 3); If exceed, then reported to the police by display unit, selected the switch of electromagnetically operated valve according to the cavity pressure value shown by display unit, then perform step 3);
3) algoritic module Real-Time Monitoring motor operating state; The light spot shape exported according to optical resonator and luminance uniformity, regulated, until light spot shape and luminance uniformity reach setting requirement to the motor of the X-direction of motor control module control chamber mirror and Y-direction by display unit input instruction.
6. Chemical oxygen-iodine laser optical resonator according to claim 5 regulates and method for supervising, it is characterized in that described Real-Time Monitoring motor operating state comprises the following steps:
Motor drives the stroke limiting unit of digital I/O module to obtain the pull bar move distance of motor output end connection by the counter of motor control card in access motor control module, and judges whether this distance reaches setting threshold;
Then send signal to main control module as reached, main control module sends instruction makes motor out of service, and is reported to the police by display unit; If do not reach, then monitor motor driver output signal in motor control module; If motor driver operation irregularity, then send signal to main control module, it is out of service that main control module sends instruction control motor; Otherwise execution step 3).
7. Chemical oxygen-iodine laser optical resonator according to claim 5 regulates and method for supervising, it is characterized in that described chamber mirror is convex lens or concave mirror; Convex lens is for controlling light spot shape, and concave mirror is for controlling luminance uniformity.
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| CN201410143863.4A CN104979742B (en) | 2014-04-11 | 2014-04-11 | COIL optical resonator adjusts and monitoring system and method |
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| CN201410143863.4A CN104979742B (en) | 2014-04-11 | 2014-04-11 | COIL optical resonator adjusts and monitoring system and method |
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| CN104979742B CN104979742B (en) | 2018-01-16 |
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Citations (4)
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| US5002391A (en) * | 1987-12-03 | 1991-03-26 | Mutek-Laser Und Optoelectronische Gerate Gmbh | Method and system for (trace) gas analysis |
| CN103107477A (en) * | 2013-01-23 | 2013-05-15 | 深圳市大族激光科技股份有限公司 | Method of restraining oil pollution in resonant cavity of gas laser |
| CN103134634A (en) * | 2011-12-01 | 2013-06-05 | 中国科学院大连化学物理研究所 | Gas pressure safety alarm system |
| CN203149341U (en) * | 2013-01-28 | 2013-08-21 | 江苏益林金刚石工具有限公司 | Radio frequency lath CO2 laser PLC control system |
-
2014
- 2014-04-11 CN CN201410143863.4A patent/CN104979742B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5002391A (en) * | 1987-12-03 | 1991-03-26 | Mutek-Laser Und Optoelectronische Gerate Gmbh | Method and system for (trace) gas analysis |
| CN103134634A (en) * | 2011-12-01 | 2013-06-05 | 中国科学院大连化学物理研究所 | Gas pressure safety alarm system |
| CN103107477A (en) * | 2013-01-23 | 2013-05-15 | 深圳市大族激光科技股份有限公司 | Method of restraining oil pollution in resonant cavity of gas laser |
| CN203149341U (en) * | 2013-01-28 | 2013-08-21 | 江苏益林金刚石工具有限公司 | Radio frequency lath CO2 laser PLC control system |
Non-Patent Citations (1)
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| 刘岩等: "PID 调节器在氧碘化学激光器谐振腔调腔中的应用", 《强激光与粒子束》 * |
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