CN105375901A - MEMS piezoelectric resonator for inhibiting stray modality and feed through - Google Patents
MEMS piezoelectric resonator for inhibiting stray modality and feed through Download PDFInfo
- Publication number
- CN105375901A CN105375901A CN201510881021.3A CN201510881021A CN105375901A CN 105375901 A CN105375901 A CN 105375901A CN 201510881021 A CN201510881021 A CN 201510881021A CN 105375901 A CN105375901 A CN 105375901A
- Authority
- CN
- China
- Prior art keywords
- electrode
- resonator
- mode
- electrodes
- differential
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
The invention belongs to the technical fields of radio frequency communication and elements and components in a micro electro mechanical system, and relates to an MEMS piezoelectric resonator for inhibiting stray modality and feed through. The MEMS piezoelectric resonator comprises a differential input structure, a differential output structure, an even-order lateral stretching vibration modality MEMS piezoelectric resonator, wherein the even-order lateral stretching vibration modality MEMS piezoelectric resonator comprises a substrate, a supporting platform, a supporting beam and a vibration block, the vibration modality order of the vibration block is 2N, 2N electrodes are arranged on a piezoelectric film and are uniformly divided into two groups, in-phase electrodes in each group of electrodes are interconnected to form a pair of driving electrode and induction electrode, two pairs of driving electrodes and induction electrodes are correspondingly connected with an external interconnected metal area to form two input ends and output ends of the resonator, an input signal is generated into two paths of differential signals by the differential input structure, the two paths of differential signals are respectively input to the two input ends on the resonator, the two output ends generate two paths of output signals and are output after being performed with differential processing by the differential output structure, and the stray modality and the feed through can be effectively inhibited to improve the performance of the resonator.
Description
Technical field
The invention belongs to the components and parts technical field in radio communication and MEMS (micro electro mechanical system) (MEMS), particularly a kind of MEMS piezo-electric resonator suppressing spuious mode and feedthrough.
Background technology
Along with electronic equipment is to the further requirement of high-performance, microminaturization, electronic devices and components are all at the future development to high-performance, low cost, low-power consumption.High q-factor, miniaturized resonator becomes on future electronic communication system sheet and changes and miniaturized bottleneck.MEMS piezo-electric resonator is a kind of high-performance RF piezoelectric oscillator device based on mechanical oscillation using MEMS technology to make, the signal of telecommunication of input is converted into mechanical oscillation by mechanical-electric coupling, filter function completes in mechanical territory, again mechanical signal is converted into the signal of telecommunication afterwards to export, thus there is extraordinary frequency selective characteristic.The vibrating mass of this MEMS resonator adopts semi-conducting material manufacture mostly, input energy converting structure, the output energy converting structure of resonator are all directly connected with vibrating mass, between the constrained input of resonator, also exist one can the parasitic feedthrough electric capacity of signal transmission, the electric power signal that its existence makes part input, be converted to mechanical energy without resonator and be then converted into electric power signal output again, but be directly passed to output from input through feedthrough electric capacity, reduce the energy conversion efficiency of resonator works; Simultaneously due to the existence of this parasitic capacitance, resonator almost allows each frequency component major part of input signal to pass through, and such result makes the selecting frequency characteristic of resonator be deteriorated, and causes the spuious mode exported to increase.When this resonator carrys out work as the part of oscillator, once this feedthrough electric capacity is large to a certain extent, the signal without frequency-selecting can frequency-selecting signal required for flood system, causes oscillator to work; Construct the devices such as oscillator conventional in communication system or radar system and filter according to above-mentioned resonator, extremely adverse influence will certainly be made to system works performance.
Summary of the invention
The deficiency that the object of the invention is to exist for background technology provides a kind of MEMS piezo-electric resonator suppressing spuious mode and feedthrough, differential input structure is adopted to produce the MEMS piezo-electric resonator of two-way constant power differential signal input even-order mode of oscillation, carry out difference processing through resonator output two paths of signals by difference output structure and obtain final output signal, in order to realize the object suppressing spuious mode and feedthrough.
The technical solution used in the present invention is:
A kind of MEMS piezo-electric resonator suppressing spuious mode and feedthrough, comprise differential input structure, difference output structure and even-order mode of oscillation MEMS piezo-electric resonator, wherein, described even-order mode of oscillation MEMS piezo-electric resonator is comprised substrate, is arranged on suprabasil brace table, the brace summer be connected with brace table and the vibrating mass connected as one by brace summer and brace table, described vibrating mass arranges piezoelectric membrane; It is characterized in that, described vibrating mass works in even-order side direction stretching vibration mode, and mode of oscillation exponent number is 2N, N >=2, anti-phase between adjacent vibration area; Described piezoelectric membrane is provided with 2N the electrode being distributed in each vibration area of vibrating mass successively, 2N electrode is divided into two groups, often organize in electrode and in-phase electrodes is interconnected, forms a pair drive electrode and induction electrode, and to ensure between two drive electrodes and all anti-phase between two induction electrodes; Described brace table arranges four external interconnect metal areas corresponding to two pairs of drive electrodes and induction electrode, is connected respectively by the metal routing be positioned on brace summer is corresponding with drive electrode and induction electrode, forms two inputs and two outputs; Input signal produces two paths of differential signals by differential input structure and inputs two inputs respectively, and two outputs export two paths of signals and export after difference output structure difference processing.
Further, silicon dioxide insulating layer is provided with between described substrate and brace table, between brace summer and metal routing, between external interconnect metal area and brace table.
Bright from the principle: the MEMS piezo-electric resonator of the spuious mode of above-mentioned suppression and feedthrough, monocrystalline silicon layer is adopted to make vibrating mass, brace summer and each electrode structure layer, resonance frequency f is determined by the length L of monocrystalline silicon vibrating mass and resonance rank number of mode n, because need vibrating mass to work in even-order mode of oscillation, so n be greater than 2 even number, therefore the relational expression of resonance frequency f and length L and resonance rank number of mode n is:
Wherein, ρ is density of material, E is the Young's modulus of material; Different according to the centre frequency of design, the design length of resonance block can in several microns to hundreds of micron unrestricted choice.
The constrained input transducer jointly formed mainly through metal electrode and the piezoelectric layer below it and monocrystalline silicon vibrating mass is changed by the power conversion of resonator.Metal electrode, according to the operation mode of vibrating mass, is laid on the different vibration area of vibrating mass successively.Thus inhibit the energy transferring of the spuious mode of resonator.
The invention provides the MEMS piezo-electric resonator suppressing spuious mode and feedthrough, its vibrating mass works in even-order side direction stretching vibration mode; Under operating state, input signal is produced the differential signal of two-way constant power through Differential input circuit, be input to two inputs of vibrate in opposite phase on resonator respectively, produce two-way output signal, wherein, output signal I
mwith I
m'phase place anti-phase each other, and arrive the feedthrough amount I of output electrode by input electrode
fwith I
f'due to not for mechanical oscillation produce but by dielectric coupling arrive output be therefore in-phase signal, therefore be in after output signal that two output electrodes in vibrate in opposite phase region produce completes subtracted each other by differential output circuit, output signal is amplified, and feed-through signal is cancelled out each other after subtracting each other.In addition, be homophase equally for being regarded as the output signal that useless other spuious mode of oscillations (mostly being symmetrical along axis) produce, suppressed after differential amplification, mechanism is similar with the feedthrough amount be coupled.Therefore, MEMS piezo-electric resonator of the present invention can realize the object suppressing spuious mode and feedthrough, promotes resonator behavior.
Accompanying drawing explanation
Fig. 1 is the MEMS piezoelectric resonator structure schematic diagram of 4 rank mode of oscillations in embodiment 1;
Fig. 2 is the A-A cutaway view of Fig. 1;
Fig. 3 is the MEMS piezoelectric resonator structure schematic diagram of 6 rank mode of oscillations in embodiment 2;
Fig. 4 is 4 rank mode of oscillation figure of resonator in embodiment 1;
Fig. 5 is 6 rank mode of oscillation figure of resonator in embodiment 2;
Fig. 6 is the circuit theory diagrams of the MEMS piezo-electric resonator suppressing spuious mode and feedthrough in embodiment 1.
Fig. 7 is the equivalent circuit diagram of the MEMS piezo-electric resonator suppressing spuious mode and feedthrough in embodiment 1.
In figure: 1 is vibration square, 2 is piezoelectric membrane, 3-1, 3-4, 3-5, 3-6 is output PZT (piezoelectric transducer) top electrode, 3-2, 3-3 is input PZT (piezoelectric transducer) top electrode, 4-1, 4-2, 4-3, 4-4 is that metal connects cabling, 5-1, 5-2, 5-3, 5-4 is external interconnect metal area, 6-1, 6-2, 6-3, 6-4 is brace summer, 7-1, 7-2, 7-3, 7-4 is silicon dioxide insulating layer, 8-1, 8-2 is brace table, 9-1, 9-2, 9-3, 9-4 is body silicon layer etch areas, 10-1, 10-2 is substrate silicon dioxide insulating layer, 11-1, 11-2 is (insulation) substrate, 12 is silicon dioxide layer inner chamber, 13 is substrate inner chamber.
Embodiment
Below in conjunction with embodiment and accompanying drawing, the present invention is described in further detail.
Embodiment 1
There is provided the MEMS piezo-electric resonator suppressing spuious mode and feedthrough in the present embodiment, comprise difference channel and 4 rank mode of oscillation MEMS piezo-electric resonators, wherein the structure of 4 rank mode of oscillation MEMS piezo-electric resonators is overlooked as shown in Figure 1, is analysed and observe as shown in Figure 2:
Described 4 rank mode of oscillation MEMS piezo-electric resonators comprise substrate 11, are arranged on suprabasil brace table 8-1, 8-2, arranges substrate silicon dioxide insulating layer 10-1 between substrate and brace table, 10-2, brace table 8-1 is arranged external interconnect metal area 5-2 and external interconnect metal area 5-3, as input, brace table 8-2 is arranged external interconnect metal area 5-1 and external interconnect metal area 5-4, as output, vibration square 1 is by brace summer 6-1, 6-2, 6-3, the vibrating mass that 6-4 and brace table connect as one, vibration square 1 covers piezoelectric membrane 2, and vibration square 1 works in 4 rank mode of oscillations, anti-phase between adjacent mode of oscillation, piezoelectric membrane 2 is arranged 4 the electrode 3-1 being distributed in each mode of oscillation region of vibrating mass successively, 3-2, 3-3, 3-4, electrode 3-1, 3-2, 3-3, 3-4 connects cabling 4-1 respectively by the metal be positioned on brace summer, 4-2, 4-3, 4-4 and external interconnect metal area 5-1, 5-2, 5-3, 5-4 connects, and electrode 3-1 and electrode 3-2 is divided into one group, electrode 3-3 and electrode 3-4 is divided into one group, often to organize in electrode respectively using electrode 3-1 and electrode 3-4 as output PZT (piezoelectric transducer) top electrode (induction electrode), connect output, using electrode 3-2 and electrode 3-3 as input PZT (piezoelectric transducer) top electrode (drive electrode), connect input, two output PZT (piezoelectric transducer) top electrode 3-1 and 3-4 are anti-phase, input PZT (piezoelectric transducer) top electrode 3-2, piezoelectric membrane 2 under output PZT (piezoelectric transducer) top electrode 3-1 and electrode and vibrate square 1 and jointly form piezoelectric resonance unit, in like manner input PZT (piezoelectric transducer) top electrode 3-3, piezoelectric membrane 2 under output PZT (piezoelectric transducer) top electrode 3-4 and electrode and vibrate square 1 and jointly form piezoelectric resonance unit, silicon dioxide insulating layer 7-1,7-2,7-3,7-4 is provided with between described brace summer and metal routing, between external interconnect metal area and brace table, in substrate and substrate, silicon dioxide insulating layer correspondence etches silicon dioxide layer inner chamber 12 and substrate inner chamber 13, makes total unsettled.
Adopt SOI substrate in the present embodiment, this SOI substrate has thicker polycrystalline silicon substrate, the monocrystal silicon structure layer composition of the silicon dioxide insulating layer of 1 μm and 10 μm.
The MEMS piezo-electric resonator of the spuious mode of above-mentioned suppression and feedthrough, its circuit theory diagrams and equivalent circuit diagram are as shown in Figure 6,7, in working order, its suppress principle be: by input signal respectively two paths of signals be input to two pieces of input electrode regions of vibrate in opposite phase on resonator respectively, two-way output signal I
mwith I
m'phase place anti-phase each other, arrive the feedthrough amount I of output electrode by input electrode
fwith I
f'due to not for mechanical oscillation produce but by dielectric coupling arrive output be therefore in-phase signal, therefore by being in after output signal that two output electrodes in reversal of vibrations region produce completes subtracted each other by difference channel, output signal is amplified, and feed-through signal is cancelled out each other after subtracting each other.In addition, for being regarded as useless other spuious mode of oscillations (mostly being symmetrical along axis), the two-way output signal produced due to correspondence is homophase equally, and suppressed after differential amplification, mechanism is similar with the feedthrough amount be coupled.
Embodiment 2
There is provided the MEMS piezo-electric resonator suppressing spuious mode and feedthrough in the present embodiment, comprise difference channel and 6 rank mode of oscillation MEMS piezo-electric resonators, wherein the structure of 6 rank mode of oscillation MEMS piezo-electric resonators is overlooked as shown in Figure 3:
Piezoelectric membrane 2 is arranged 6 electrode 3-1 in this structure, 3-2, 3-3, 3-4, 3-5, 3-6, be distributed in each vibration area of vibrating mass successively, by electrode by electrode 3-1, 3-2, 3-5 is divided into first group, by electrode 3-3, 3-4, 3-6 is divided into second group, electrode 3-1 and electrode 3-5 homophase in first group of electrode, electrode 3-1 and electrode 3-5 is interconnected as the first output PZT (piezoelectric transducer) top electrode (induction electrode), connect output, using electrode 3-2 as the second input PZT (piezoelectric transducer) top electrode (drive electrode), connect input, in second group of electrode, anti-phase for ensureing two outputs, the electrode 3-6 of homophase and electrode 3-4 is interconnected as the second output PZT (piezoelectric transducer) top electrode (induction electrode), connect output, using electrode 3-3 as the second input PZT (piezoelectric transducer) top electrode (drive electrode), connect input, its operation principle is identical with embodiment 1, the object suppressing spuious mode and feedthrough can be realized.
When the exponent number of even-order side direction stretching vibration mode MEMS piezo-electric resonator is higher exponent number, its Electrode connection rule is constant, all can realize the object suppressing spuious mode and feedthrough.
The above, be only the specific embodiment of the present invention, arbitrary feature disclosed in this specification, unless specifically stated otherwise, all can be replaced by other equivalences or the alternative features with similar object; Step in disclosed all features or all methods or process, except mutually exclusive feature and/or step, all can be combined in any way.
Claims (2)
1. one kind is suppressed the MEMS piezo-electric resonator of spuious mode and feedthrough, comprise differential input structure, difference output structure and even-order mode of oscillation MEMS piezo-electric resonator, wherein, described even-order mode of oscillation MEMS piezo-electric resonator is comprised substrate, is arranged on suprabasil brace table, the brace summer be connected with brace table and the vibrating mass connected as one by brace summer and brace table, described vibrating mass arranges piezoelectric membrane; It is characterized in that, described vibrating mass works in even-order side direction stretching vibration mode, and mode of oscillation exponent number is 2N, N >=2, anti-phase between adjacent vibration area; Described piezoelectric membrane is provided with 2N the electrode being distributed in each vibration area of vibrating mass successively, 2N electrode is divided into two groups, often organize in electrode and in-phase electrodes is interconnected, forms a pair drive electrode and induction electrode, and to ensure between two drive electrodes and all anti-phase between two induction electrodes; Described brace table arranges four external interconnect metal areas corresponding to two pairs of drive electrodes and induction electrode, is connected respectively by the metal routing be positioned on brace summer is corresponding with drive electrode and induction electrode, forms two inputs and two outputs; Input signal produces two paths of differential signals by differential input structure and inputs two inputs respectively, and two outputs export two paths of signals and export after difference output structure difference processing.
2. by the MEMS piezo-electric resonator suppressing spuious mode and feedthrough described in claim 1, it is characterized in that, between described substrate and brace table, between brace summer and metal routing, between external interconnect metal area and brace table, be provided with silicon dioxide insulating layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510881021.3A CN105375901B (en) | 2015-12-03 | 2015-12-03 | A kind of MEMS piezo-electric resonators for inhibiting spuious mode and feedthrough |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510881021.3A CN105375901B (en) | 2015-12-03 | 2015-12-03 | A kind of MEMS piezo-electric resonators for inhibiting spuious mode and feedthrough |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105375901A true CN105375901A (en) | 2016-03-02 |
| CN105375901B CN105375901B (en) | 2018-05-18 |
Family
ID=55377758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510881021.3A Expired - Fee Related CN105375901B (en) | 2015-12-03 | 2015-12-03 | A kind of MEMS piezo-electric resonators for inhibiting spuious mode and feedthrough |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105375901B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105871350A (en) * | 2016-03-22 | 2016-08-17 | 电子科技大学 | Piezoelectric resonator with two narrow support beams and high quality factor |
| CN105871351A (en) * | 2016-03-22 | 2016-08-17 | 电子科技大学 | Piezoelectric resonator with narrow support beams and high quality factor |
| CN112073024A (en) * | 2020-09-14 | 2020-12-11 | 电子科技大学 | Differential input and output type MEMS resonator and processing method thereof |
| CN113639733A (en) * | 2021-07-22 | 2021-11-12 | 上海交通大学 | Micro gyroscope interface circuit |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030048520A1 (en) * | 2001-09-07 | 2003-03-13 | Intel Corporation | Vacuum-cavity MEMS resonator |
| CN103281048A (en) * | 2013-06-14 | 2013-09-04 | 中国科学院半导体研究所 | Micromechanical resonator and manufacturing method thereof |
| US20140125431A1 (en) * | 2012-11-02 | 2014-05-08 | Rf Micro Devices, Inc. | Tunable and switchable resonator and filter structures in single crystal piezoelectric mems devices using bimorphs |
| CN104821799A (en) * | 2015-04-28 | 2015-08-05 | 电子科技大学 | Piezoelectric type two-block cascaded micro mechanical filter |
| CN104821800A (en) * | 2015-04-28 | 2015-08-05 | 电子科技大学 | Micro-electromechanical system (MEMS) piezoelectric resonator utilizing double resonance elements to offset feed-through flux |
-
2015
- 2015-12-03 CN CN201510881021.3A patent/CN105375901B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030048520A1 (en) * | 2001-09-07 | 2003-03-13 | Intel Corporation | Vacuum-cavity MEMS resonator |
| US20140125431A1 (en) * | 2012-11-02 | 2014-05-08 | Rf Micro Devices, Inc. | Tunable and switchable resonator and filter structures in single crystal piezoelectric mems devices using bimorphs |
| CN103281048A (en) * | 2013-06-14 | 2013-09-04 | 中国科学院半导体研究所 | Micromechanical resonator and manufacturing method thereof |
| CN104821799A (en) * | 2015-04-28 | 2015-08-05 | 电子科技大学 | Piezoelectric type two-block cascaded micro mechanical filter |
| CN104821800A (en) * | 2015-04-28 | 2015-08-05 | 电子科技大学 | Micro-electromechanical system (MEMS) piezoelectric resonator utilizing double resonance elements to offset feed-through flux |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105871350A (en) * | 2016-03-22 | 2016-08-17 | 电子科技大学 | Piezoelectric resonator with two narrow support beams and high quality factor |
| CN105871351A (en) * | 2016-03-22 | 2016-08-17 | 电子科技大学 | Piezoelectric resonator with narrow support beams and high quality factor |
| CN105871350B (en) * | 2016-03-22 | 2019-02-15 | 电子科技大学 | A kind of piezo-electric resonator of double narrow supporting beam high quality factors |
| CN105871351B (en) * | 2016-03-22 | 2019-02-15 | 电子科技大学 | A kind of piezo-electric resonator of narrow supporting beam high quality factor |
| CN112073024A (en) * | 2020-09-14 | 2020-12-11 | 电子科技大学 | Differential input and output type MEMS resonator and processing method thereof |
| CN112073024B (en) * | 2020-09-14 | 2023-10-20 | 电子科技大学 | Differential input-output MEMS resonator and processing method thereof |
| CN113639733A (en) * | 2021-07-22 | 2021-11-12 | 上海交通大学 | Micro gyroscope interface circuit |
| CN113639733B (en) * | 2021-07-22 | 2023-01-31 | 上海交通大学 | Micro gyroscope interface circuit |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105375901B (en) | 2018-05-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105375901A (en) | MEMS piezoelectric resonator for inhibiting stray modality and feed through | |
| CN104821800A (en) | Micro-electromechanical system (MEMS) piezoelectric resonator utilizing double resonance elements to offset feed-through flux | |
| JP5054491B2 (en) | Piezoelectric vibrator and manufacturing method thereof | |
| JPWO2006134959A1 (en) | Multimode thin film acoustic wave resonator filter | |
| CN106921363B (en) | Film bulk acoustic resonator | |
| JPWO2006062082A1 (en) | Thin film acoustic wave resonator | |
| CN106982042B (en) | MEMS piezoelectric resonator with supporting structure | |
| CN105391420A (en) | MEMS piezoelectric resonator with low insertion loss | |
| KR20140078702A (en) | Piezoelectric resonator having combined thickness and width vibrational modes | |
| Shahmohammadi et al. | Nonlinearity reduction in silicon resonators by doping and re-orientation | |
| CN103036527A (en) | Square block type micromechanical resonator | |
| KR101289982B1 (en) | Filter element, branching filter, and electronic apparatus | |
| US8957745B2 (en) | Superlattice crystal resonator and its usage as superlattice crystal filter | |
| CN104821799A (en) | Piezoelectric type two-block cascaded micro mechanical filter | |
| CN105871351A (en) | Piezoelectric resonator with narrow support beams and high quality factor | |
| JPWO2006062083A1 (en) | Thin film acoustic wave resonator | |
| CN107852134A (en) | With the oscillator for lowering acceleration sensitivity | |
| Li | CMOS-MEMS resonators and their applications | |
| CN103825493A (en) | Opened composite beam vibrational energy self-powered microsensor in radio frequency receiving and transmitting assembly of Internet of Things | |
| Kouomou et al. | Stability and chaos control in electrostatic transducers | |
| US9024708B2 (en) | Micromechanical resonator oscillator structure and driving method thereof | |
| JP2016046613A (en) | Piezoelectric resonance unit, wireless power transmission system and filter | |
| CN103840706A (en) | Perforated cantilever beam vibration energy self-powered microsensor of Internet-of-things radio frequency transceiving assembly | |
| JP2005318562A (en) | Acoustic resonator and filter | |
| Mohammadi et al. | Resonator/waveguide coupling in phononic crystals for demultiplexing and filtering applications |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180518 Termination date: 20201203 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |