CN1204685C - 射频匹配网络的模糊逻辑调谐 - Google Patents
射频匹配网络的模糊逻辑调谐 Download PDFInfo
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- CN1204685C CN1204685C CNB981196446A CN98119644A CN1204685C CN 1204685 C CN1204685 C CN 1204685C CN B981196446 A CNB981196446 A CN B981196446A CN 98119644 A CN98119644 A CN 98119644A CN 1204685 C CN1204685 C CN 1204685C
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- Prior art keywords
- impedance
- fuzzy
- signal
- network
- phase
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- 238000000034 method Methods 0.000 claims description 22
- 239000011159 matrix material Substances 0.000 claims description 13
- 230000008859 change Effects 0.000 claims description 10
- 230000013011 mating Effects 0.000 claims 1
- 230000006870 function Effects 0.000 abstract description 19
- 239000003990 capacitor Substances 0.000 description 10
- 230000008569 process Effects 0.000 description 7
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000010327 methods by industry Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000003362 replicative effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
- G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
- G05B13/0265—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric the criterion being a learning criterion
- G05B13/0275—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric the criterion being a learning criterion using fuzzy logic only
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
- H03H7/38—Impedance-matching networks
- H03H7/40—Automatic matching of load impedance to source impedance
Abstract
Description
Claims (11)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US929870 | 1997-09-15 | ||
US08/929,870 US5842154A (en) | 1997-09-15 | 1997-09-15 | Fuzzy logic tuning of RF matching network |
US929,870 | 1997-09-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1215284A CN1215284A (zh) | 1999-04-28 |
CN1204685C true CN1204685C (zh) | 2005-06-01 |
Family
ID=25458602
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB981196446A Expired - Fee Related CN1204685C (zh) | 1997-09-15 | 1998-09-15 | 射频匹配网络的模糊逻辑调谐 |
Country Status (6)
Country | Link |
---|---|
US (2) | US5842154A (zh) |
EP (1) | EP0902457A1 (zh) |
KR (1) | KR19990029245A (zh) |
CN (1) | CN1204685C (zh) |
IL (1) | IL125157A0 (zh) |
TW (1) | TW418594B (zh) |
Families Citing this family (74)
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US5842154A (en) | 1997-09-15 | 1998-11-24 | Eni Technologies, Inc. | Fuzzy logic tuning of RF matching network |
US5929717A (en) * | 1998-01-09 | 1999-07-27 | Lam Research Corporation | Method of and apparatus for minimizing plasma instability in an RF processor |
US6424232B1 (en) * | 1999-11-30 | 2002-07-23 | Advanced Energy's Voorhees Operations | Method and apparatus for matching a variable load impedance with an RF power generator impedance |
US6472822B1 (en) * | 2000-04-28 | 2002-10-29 | Applied Materials, Inc. | Pulsed RF power delivery for plasma processing |
US6868310B2 (en) * | 2001-04-06 | 2005-03-15 | Eni Technology, Inc. | Predictive failure scheme for industrial thin films processing power delivery system |
US7212078B2 (en) * | 2003-02-25 | 2007-05-01 | Tokyo Electron Limited | Method and assembly for providing impedance matching network and network assembly |
US20040267678A1 (en) * | 2003-06-30 | 2004-12-30 | Gao Xiao M | Fuzzy logic impedance mismatch network for DSL qualification |
US6995545B2 (en) * | 2003-08-18 | 2006-02-07 | Mks Instruments, Inc. | Control system for a sputtering system |
JP3768999B2 (ja) * | 2003-10-29 | 2006-04-19 | 澄英 池之内 | プラズマ処理装置とその制御方法 |
US7157857B2 (en) * | 2003-12-19 | 2007-01-02 | Advanced Energy Industries, Inc. | Stabilizing plasma and generator interactions |
US7554334B2 (en) * | 2006-09-28 | 2009-06-30 | Applied Marterials, Inc. | Matching network characterization using variable impedance analysis |
US7376535B1 (en) * | 2006-10-12 | 2008-05-20 | The United States Of America As Represented By The Secretary Of The Navy | Wideband matching circuit and method of effectuating same |
US7777567B2 (en) | 2007-01-25 | 2010-08-17 | Mks Instruments, Inc. | RF power amplifier stability network |
CN101494947B (zh) * | 2008-01-23 | 2011-07-06 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 一种射频阻抗自动匹配的方法 |
US9370729B2 (en) * | 2008-02-06 | 2016-06-21 | Proxeon Biosystems A/S | Flow control in high performance liquid chromatography |
CN101626656B (zh) * | 2008-07-11 | 2012-10-31 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 射频匹配方法及等离子体处理设备 |
CN101640969B (zh) * | 2008-07-29 | 2012-09-05 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 匹配方法及应用该匹配方法的等离子体装置 |
US8674606B2 (en) * | 2009-04-27 | 2014-03-18 | Advanced Energy Industries, Inc. | Detecting and preventing instabilities in plasma processes |
JP5582823B2 (ja) * | 2010-02-26 | 2014-09-03 | 東京エレクトロン株式会社 | 自動整合装置及びプラズマ処理装置 |
JP5632626B2 (ja) * | 2010-03-04 | 2014-11-26 | 東京エレクトロン株式会社 | 自動整合装置及びプラズマ処理装置 |
US8294632B2 (en) * | 2010-05-18 | 2012-10-23 | Sony Ericsson Mobile Communications Ab | Antenna interface circuits including tunable impedance matching networks, electronic devices incorporating the same, and methods of tuning antenna interface circuits |
CN102573261B (zh) * | 2010-12-10 | 2014-07-16 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 射频匹配方法及装置、等离子体设备 |
US8576013B2 (en) * | 2011-12-29 | 2013-11-05 | Mks Instruments, Inc. | Power distortion-based servo control systems for frequency tuning RF power sources |
CN103246216B (zh) * | 2013-04-02 | 2015-11-25 | 华为技术有限公司 | 一种射频模块和射频模块的负载模式切换方法 |
JP6312405B2 (ja) * | 2013-11-05 | 2018-04-18 | 東京エレクトロン株式会社 | プラズマ処理装置 |
US9697991B2 (en) | 2014-01-10 | 2017-07-04 | Reno Technologies, Inc. | RF impedance matching network |
US10431428B2 (en) | 2014-01-10 | 2019-10-01 | Reno Technologies, Inc. | System for providing variable capacitance |
US9865432B1 (en) | 2014-01-10 | 2018-01-09 | Reno Technologies, Inc. | RF impedance matching network |
US9496122B1 (en) | 2014-01-10 | 2016-11-15 | Reno Technologies, Inc. | Electronically variable capacitor and RF matching network incorporating same |
US9844127B2 (en) | 2014-01-10 | 2017-12-12 | Reno Technologies, Inc. | High voltage switching circuit |
US9755641B1 (en) | 2014-01-10 | 2017-09-05 | Reno Technologies, Inc. | High speed high voltage switching circuit |
US9196459B2 (en) * | 2014-01-10 | 2015-11-24 | Reno Technologies, Inc. | RF impedance matching network |
US10455729B2 (en) | 2014-01-10 | 2019-10-22 | Reno Technologies, Inc. | Enclosure cooling system |
US11017983B2 (en) | 2015-02-18 | 2021-05-25 | Reno Technologies, Inc. | RF power amplifier |
US9525412B2 (en) | 2015-02-18 | 2016-12-20 | Reno Technologies, Inc. | Switching circuit |
US9306533B1 (en) | 2015-02-20 | 2016-04-05 | Reno Technologies, Inc. | RF impedance matching network |
US9729122B2 (en) | 2015-02-18 | 2017-08-08 | Reno Technologies, Inc. | Switching circuit |
CN106291108B (zh) | 2015-05-29 | 2019-02-12 | 台达电子工业股份有限公司 | 逆变器的输出阻抗角检测装置及检测方法 |
US11342161B2 (en) | 2015-06-29 | 2022-05-24 | Reno Technologies, Inc. | Switching circuit with voltage bias |
US11335540B2 (en) | 2015-06-29 | 2022-05-17 | Reno Technologies, Inc. | Impedance matching network and method |
US11150283B2 (en) | 2015-06-29 | 2021-10-19 | Reno Technologies, Inc. | Amplitude and phase detection circuit |
US10984986B2 (en) | 2015-06-29 | 2021-04-20 | Reno Technologies, Inc. | Impedance matching network and method |
US11081316B2 (en) | 2015-06-29 | 2021-08-03 | Reno Technologies, Inc. | Impedance matching network and method |
US11342160B2 (en) | 2015-06-29 | 2022-05-24 | Reno Technologies, Inc. | Filter for impedance matching |
US10879044B2 (en) * | 2017-04-07 | 2020-12-29 | Lam Research Corporation | Auxiliary circuit in RF matching network for frequency tuning assisted dual-level pulsing |
US11315758B2 (en) | 2017-07-10 | 2022-04-26 | Reno Technologies, Inc. | Impedance matching using electronically variable capacitance and frequency considerations |
US11521833B2 (en) | 2017-07-10 | 2022-12-06 | Reno Technologies, Inc. | Combined RF generator and RF solid-state matching network |
US11101110B2 (en) | 2017-07-10 | 2021-08-24 | Reno Technologies, Inc. | Impedance matching network and method |
US11393659B2 (en) | 2017-07-10 | 2022-07-19 | Reno Technologies, Inc. | Impedance matching network and method |
US10483090B2 (en) | 2017-07-10 | 2019-11-19 | Reno Technologies, Inc. | Restricted capacitor switching |
US10727029B2 (en) | 2017-07-10 | 2020-07-28 | Reno Technologies, Inc | Impedance matching using independent capacitance and frequency control |
US11398370B2 (en) | 2017-07-10 | 2022-07-26 | Reno Technologies, Inc. | Semiconductor manufacturing using artificial intelligence |
US10714314B1 (en) | 2017-07-10 | 2020-07-14 | Reno Technologies, Inc. | Impedance matching network and method |
US11476091B2 (en) | 2017-07-10 | 2022-10-18 | Reno Technologies, Inc. | Impedance matching network for diagnosing plasma chamber |
US11114280B2 (en) | 2017-07-10 | 2021-09-07 | Reno Technologies, Inc. | Impedance matching with multi-level power setpoint |
US11289307B2 (en) | 2017-07-10 | 2022-03-29 | Reno Technologies, Inc. | Impedance matching network and method |
US11169231B2 (en) | 2017-11-23 | 2021-11-09 | Qonetec Ag | NMR probe head with piezoelectric actuators |
KR102644960B1 (ko) * | 2017-11-29 | 2024-03-07 | 코멧 테크놀로지스 유에스에이, 인크. | 임피던스 매칭 네트워크 제어를 위한 리튜닝 |
US11521831B2 (en) | 2019-05-21 | 2022-12-06 | Reno Technologies, Inc. | Impedance matching network and method with reduced memory requirements |
US11114279B2 (en) | 2019-06-28 | 2021-09-07 | COMET Technologies USA, Inc. | Arc suppression device for plasma processing equipment |
US11527385B2 (en) | 2021-04-29 | 2022-12-13 | COMET Technologies USA, Inc. | Systems and methods for calibrating capacitors of matching networks |
US11596309B2 (en) | 2019-07-09 | 2023-03-07 | COMET Technologies USA, Inc. | Hybrid matching network topology |
US11107661B2 (en) | 2019-07-09 | 2021-08-31 | COMET Technologies USA, Inc. | Hybrid matching network topology |
US11830708B2 (en) | 2020-01-10 | 2023-11-28 | COMET Technologies USA, Inc. | Inductive broad-band sensors for electromagnetic waves |
US11887820B2 (en) | 2020-01-10 | 2024-01-30 | COMET Technologies USA, Inc. | Sector shunts for plasma-based wafer processing systems |
US11521832B2 (en) | 2020-01-10 | 2022-12-06 | COMET Technologies USA, Inc. | Uniformity control for radio frequency plasma processing systems |
US11670488B2 (en) | 2020-01-10 | 2023-06-06 | COMET Technologies USA, Inc. | Fast arc detecting match network |
US11605527B2 (en) | 2020-01-20 | 2023-03-14 | COMET Technologies USA, Inc. | Pulsing control match network |
US11961711B2 (en) | 2020-01-20 | 2024-04-16 | COMET Technologies USA, Inc. | Radio frequency match network and generator |
US11373844B2 (en) | 2020-09-28 | 2022-06-28 | COMET Technologies USA, Inc. | Systems and methods for repetitive tuning of matching networks |
TW202226899A (zh) * | 2020-12-22 | 2022-07-01 | 荷蘭商Asm Ip私人控股有限公司 | 具匹配器的電漿處理裝置 |
US11923175B2 (en) | 2021-07-28 | 2024-03-05 | COMET Technologies USA, Inc. | Systems and methods for variable gain tuning of matching networks |
WO2023167854A1 (en) * | 2022-03-03 | 2023-09-07 | COMET Technologies USA, Inc. | Retuning for impedance matching network control |
US11657980B1 (en) | 2022-05-09 | 2023-05-23 | COMET Technologies USA, Inc. | Dielectric fluid variable capacitor |
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US4375051A (en) * | 1981-02-19 | 1983-02-22 | The Perkin-Elmer Corporation | Automatic impedance matching between source and load |
US4485360A (en) * | 1982-07-16 | 1984-11-27 | Cincinnati Electronics Corporation | Apparatus for and method of impedance matching |
JPS59221020A (ja) * | 1983-05-30 | 1984-12-12 | Ulvac Corp | プラズマ利用装置におけるインピ−ダンス整合回路 |
US4621242A (en) * | 1984-03-19 | 1986-11-04 | The Perkin-Elmer Corporation | R.F. impedance match control system |
US4557819A (en) * | 1984-07-20 | 1985-12-10 | Varian Associates, Inc. | System for igniting and controlling a wafer processing plasma |
JPS61206322A (ja) * | 1985-03-11 | 1986-09-12 | Fujitsu Ltd | アンテナインピ−ダンス整合回路 |
EP0241286B2 (en) * | 1986-04-11 | 1994-11-09 | Mitsubishi Denki Kabushiki Kaisha | An auto-tuning controller |
JPH0710041B2 (ja) * | 1986-11-10 | 1995-02-01 | 株式会社ダイヘン | 自動インピ−ダンス整合装置 |
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DE3923662A1 (de) * | 1989-07-18 | 1991-01-24 | Leybold Ag | Schaltungsanordnung zum automatischen abstimmen eines anpassungsnetzwerks |
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DE69400916T2 (de) * | 1994-07-01 | 1997-04-03 | Sgs Thomson Microelectronics | Phasenregelkreisschaltung mit Fuzzy-Steuerung |
DE19521387A1 (de) * | 1995-06-13 | 1996-12-19 | Leybold Ag | Verfahren zum automatischen Abstimmen eines Anpassungsnetzwerks, das zwischen einer elektrischen Energiequelle und einer Last angeordnet ist |
US5982099A (en) * | 1996-03-29 | 1999-11-09 | Lam Research Corporation | Method of and apparatus for igniting a plasma in an r.f. plasma processor |
US5654679A (en) * | 1996-06-13 | 1997-08-05 | Rf Power Products, Inc. | Apparatus for matching a variable load impedance with an RF power generator impedance |
US5889252A (en) * | 1996-12-19 | 1999-03-30 | Lam Research Corporation | Method of and apparatus for independently controlling electric parameters of an impedance matching network |
US5842154A (en) | 1997-09-15 | 1998-11-24 | Eni Technologies, Inc. | Fuzzy logic tuning of RF matching network |
-
1997
- 1997-09-15 US US08/929,870 patent/US5842154A/en not_active Ceased
-
1998
- 1998-06-02 TW TW087108583A patent/TW418594B/zh not_active IP Right Cessation
- 1998-06-19 EP EP98304853A patent/EP0902457A1/en not_active Withdrawn
- 1998-06-30 IL IL12515798A patent/IL125157A0/xx unknown
- 1998-07-07 KR KR1019980027188A patent/KR19990029245A/ko not_active Application Discontinuation
- 1998-09-15 CN CNB981196446A patent/CN1204685C/zh not_active Expired - Fee Related
-
2000
- 2000-11-14 US US09/712,596 patent/USRE39051E1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0902457A1 (en) | 1999-03-17 |
KR19990029245A (ko) | 1999-04-26 |
IL125157A0 (en) | 1999-01-26 |
TW418594B (en) | 2001-01-11 |
USRE39051E1 (en) | 2006-03-28 |
CN1215284A (zh) | 1999-04-28 |
US5842154A (en) | 1998-11-24 |
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C14 | Grant of patent or utility model | ||
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Owner name: MKS EQUIPMENT CO., LTD. Free format text: FORMER OWNER: ENNI TECHNOLOGY CO.,LTD. Effective date: 20090717 |
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