CN1207792C - 利用金属诱导横向结晶的多栅薄膜晶体管及其制造方法 - Google Patents
利用金属诱导横向结晶的多栅薄膜晶体管及其制造方法 Download PDFInfo
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- CN1207792C CN1207792C CNB021578117A CN02157811A CN1207792C CN 1207792 C CN1207792 C CN 1207792C CN B021578117 A CNB021578117 A CN B021578117A CN 02157811 A CN02157811 A CN 02157811A CN 1207792 C CN1207792 C CN 1207792C
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- semiconductor layer
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- 238000000034 method Methods 0.000 title claims abstract description 72
- 239000010409 thin film Substances 0.000 title claims abstract description 46
- 229910052751 metal Inorganic materials 0.000 title claims description 66
- 239000002184 metal Substances 0.000 title claims description 66
- 230000001939 inductive effect Effects 0.000 title 1
- 239000004065 semiconductor Substances 0.000 claims abstract description 129
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 239000010410 layer Substances 0.000 claims description 156
- 239000010408 film Substances 0.000 claims description 128
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 46
- 238000002425 crystallisation Methods 0.000 claims description 38
- 230000008025 crystallization Effects 0.000 claims description 37
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 24
- 229920005591 polysilicon Polymers 0.000 claims description 24
- 230000004888 barrier function Effects 0.000 claims description 17
- 239000011229 interlayer Substances 0.000 claims description 13
- 230000015572 biosynthetic process Effects 0.000 claims description 12
- 239000000203 mixture Substances 0.000 claims description 12
- 239000011248 coating agent Substances 0.000 claims description 11
- 238000000576 coating method Methods 0.000 claims description 11
- 238000000151 deposition Methods 0.000 claims description 5
- 239000007772 electrode material Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 239000000428 dust Substances 0.000 claims description 4
- 229910021332 silicide Inorganic materials 0.000 claims description 4
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 4
- 238000000059 patterning Methods 0.000 claims 1
- 239000012535 impurity Substances 0.000 description 26
- 238000004519 manufacturing process Methods 0.000 description 17
- 239000003054 catalyst Substances 0.000 description 5
- 230000002950 deficient Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
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- 150000002500 ions Chemical class 0.000 description 3
- 238000001465 metallisation Methods 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
- 230000008021 deposition Effects 0.000 description 2
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- 238000007796 conventional method Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78696—Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the structure of the channel, e.g. multichannel, transverse or longitudinal shape, length or width, doping structure, or the overlap or alignment between the channel and the gate, the source or the drain, or the contacting structure of the channel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
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- H01L21/02422—Non-crystalline insulating materials, e.g. glass, polymers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
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- H01L21/02532—Silicon, silicon germanium, germanium
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
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- H—ELECTRICITY
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42384—Gate electrodes for field effect devices for field-effect transistors with insulated gate for thin film field effect transistors, e.g. characterised by the thickness or the shape of the insulator or the dimensions, the shape or the lay-out of the conductor
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- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
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- H01L29/6675—Amorphous silicon or polysilicon transistors
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78609—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device for preventing leakage current
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78645—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with multiple gate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/127—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement
- H01L27/1274—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement using crystallisation of amorphous semiconductor or recrystallisation of crystalline semiconductor
- H01L27/1277—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement using crystallisation of amorphous semiconductor or recrystallisation of crystalline semiconductor using a crystallisation promoting species, e.g. local introduction of Ni catalyst
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Thin Film Transistor (AREA)
- Recrystallisation Techniques (AREA)
Abstract
Description
Claims (16)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR81446/2001 | 2001-12-19 | ||
KR10-2001-0081446A KR100477103B1 (ko) | 2001-12-19 | 2001-12-19 | 금속유도화 측면결정화방법을 이용한 멀티플 게이트 박막트랜지스터 및 그의 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1431718A CN1431718A (zh) | 2003-07-23 |
CN1207792C true CN1207792C (zh) | 2005-06-22 |
Family
ID=19717268
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB021578117A Expired - Lifetime CN1207792C (zh) | 2001-12-19 | 2002-12-19 | 利用金属诱导横向结晶的多栅薄膜晶体管及其制造方法 |
Country Status (5)
Country | Link |
---|---|
US (8) | US6815267B2 (zh) |
EP (1) | EP1326282A3 (zh) |
JP (1) | JP2003203928A (zh) |
KR (1) | KR100477103B1 (zh) |
CN (1) | CN1207792C (zh) |
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US7288444B2 (en) * | 2001-04-04 | 2007-10-30 | Samsung Sdi Co., Ltd. | Thin film transistor and method of manufacturing the same |
KR100477102B1 (ko) * | 2001-12-19 | 2005-03-17 | 삼성에스디아이 주식회사 | 금속유도화 측면결정화방법을 이용한 멀티플 게이트씨모스 박막 트랜지스터 및 그의 제조방법 |
KR100477103B1 (ko) * | 2001-12-19 | 2005-03-18 | 삼성에스디아이 주식회사 | 금속유도화 측면결정화방법을 이용한 멀티플 게이트 박막트랜지스터 및 그의 제조방법 |
KR100611225B1 (ko) * | 2003-11-22 | 2006-08-10 | 삼성에스디아이 주식회사 | 박막트랜지스터 및 그의 제조방법 |
KR100611744B1 (ko) | 2003-11-22 | 2006-08-10 | 삼성에스디아이 주식회사 | 금속 유도 측면 결정화 방법을 이용한 박막 트랜지스터 및그의 제조 방법 |
DK1757312T3 (da) * | 2004-06-14 | 2011-04-11 | Ishihara Sangyo Kaisha | Frysetørret sammensætning af inaktiveret viruskappe med membranfusionsaktivitet |
KR100712101B1 (ko) * | 2004-06-30 | 2007-05-02 | 삼성에스디아이 주식회사 | 박막트랜지스터 및 그의 제조 방법 |
KR100721555B1 (ko) * | 2004-08-13 | 2007-05-23 | 삼성에스디아이 주식회사 | 박막트랜지스터 및 그 제조 방법 |
KR100682892B1 (ko) * | 2004-09-25 | 2007-02-15 | 삼성전자주식회사 | 박막 트랜지스터의 제조방법 |
KR100700494B1 (ko) * | 2005-08-25 | 2007-03-28 | 삼성에스디아이 주식회사 | 박막트랜지스터 및 그 제조 방법 |
KR100741975B1 (ko) * | 2005-08-25 | 2007-07-23 | 삼성에스디아이 주식회사 | 열처리 장치 및 이를 이용한 열처리 방법 |
KR100731752B1 (ko) * | 2005-09-07 | 2007-06-22 | 삼성에스디아이 주식회사 | 박막트랜지스터 |
EP1770788A3 (en) | 2005-09-29 | 2011-09-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having oxide semiconductor layer and manufacturing method thereof |
TWI277216B (en) * | 2006-02-16 | 2007-03-21 | Au Optronics Corp | Pixel structure and thin film transistor and fabrication methods thereof |
ES2495423T3 (es) * | 2006-06-20 | 2014-09-17 | Huawei Technologies Co. Ltd. | Método para reducir el gasto general de información de realimentación en sistemas MIMO OFDM precodificados |
WO2008088199A1 (en) * | 2007-01-18 | 2008-07-24 | Terasemicon Corporation. | Method for fabricating semiconductor device |
KR101293570B1 (ko) | 2007-03-21 | 2013-08-06 | 삼성디스플레이 주식회사 | 박막 트랜지스터 및 이를 포함하는 유기 발광 표시 장치 |
US20110074803A1 (en) * | 2009-09-29 | 2011-03-31 | Louis Joseph Kerofsky | Methods and Systems for Ambient-Illumination-Selective Display Backlight Modification and Image Enhancement |
CA2832823C (en) | 2011-04-12 | 2020-06-02 | Ticona Llc | Composite core for electrical transmission cables |
CN102751200B (zh) | 2012-06-29 | 2015-06-10 | 京东方科技集团股份有限公司 | 薄膜晶体管、阵列基板及其制造方法 |
KR101916670B1 (ko) * | 2012-08-29 | 2018-11-08 | 엘지디스플레이 주식회사 | 유기발광다이오드 표시소자 및 그 제조방법 |
CN105990138B (zh) * | 2015-01-30 | 2019-08-27 | 中芯国际集成电路制造(上海)有限公司 | 晶体管及其形成方法 |
KR101695548B1 (ko) | 2015-06-10 | 2017-01-11 | 최재화 | 곤충용 선별장치 |
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CN108735762B (zh) * | 2017-04-24 | 2021-06-15 | 瀚宇彩晶股份有限公司 | 画素结构 |
CN107482066B (zh) * | 2017-09-20 | 2021-01-15 | 京东方科技集团股份有限公司 | 薄膜晶体管及其制备方法、阵列基板和显示装置 |
KR20190034764A (ko) | 2017-09-25 | 2019-04-03 | 양승선 | 귀뚜라미 사육기 |
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-
2001
- 2001-12-19 KR KR10-2001-0081446A patent/KR100477103B1/ko active IP Right Grant
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2002
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- 2002-12-10 JP JP2002358617A patent/JP2003203928A/ja active Pending
- 2002-12-12 EP EP02090405A patent/EP1326282A3/en not_active Withdrawn
- 2002-12-19 CN CNB021578117A patent/CN1207792C/zh not_active Expired - Lifetime
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- 2004-07-15 US US10/890,999 patent/US7001802B2/en not_active Expired - Lifetime
- 2004-12-14 US US11/010,271 patent/US7235434B2/en not_active Expired - Lifetime
- 2004-12-15 US US11/011,584 patent/US7235435B2/en not_active Expired - Lifetime
- 2004-12-29 US US11/023,640 patent/US7381990B2/en not_active Expired - Lifetime
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US20050095753A1 (en) | 2005-05-05 |
KR20030050906A (ko) | 2003-06-25 |
US20040253772A1 (en) | 2004-12-16 |
US7235435B2 (en) | 2007-06-26 |
JP2003203928A (ja) | 2003-07-18 |
EP1326282A3 (en) | 2004-12-15 |
US7381990B2 (en) | 2008-06-03 |
US7001802B2 (en) | 2006-02-21 |
CN1431718A (zh) | 2003-07-23 |
US7294537B2 (en) | 2007-11-13 |
US7112475B2 (en) | 2006-09-26 |
US6815267B2 (en) | 2004-11-09 |
US20050191799A1 (en) | 2005-09-01 |
US20030113957A1 (en) | 2003-06-19 |
US20050093065A1 (en) | 2005-05-05 |
EP1326282A2 (en) | 2003-07-09 |
US20050158928A1 (en) | 2005-07-21 |
US20050191798A1 (en) | 2005-09-01 |
US20050158920A1 (en) | 2005-07-21 |
US7208352B2 (en) | 2007-04-24 |
US7235434B2 (en) | 2007-06-26 |
KR100477103B1 (ko) | 2005-03-18 |
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