CN1255863C - 在半导体器件的夹断的有源区中改善二硅化钛的电阻 - Google Patents
在半导体器件的夹断的有源区中改善二硅化钛的电阻 Download PDFInfo
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- CN1255863C CN1255863C CNB028013433A CN02801343A CN1255863C CN 1255863 C CN1255863 C CN 1255863C CN B028013433 A CNB028013433 A CN B028013433A CN 02801343 A CN02801343 A CN 02801343A CN 1255863 C CN1255863 C CN 1255863C
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/0206—Cleaning during device manufacture during, before or after processing of insulating layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System
- H01L21/28518—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System the conductive layers comprising silicides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31127—Etching organic layers
- H01L21/31133—Etching organic layers by chemical means
- H01L21/31138—Etching organic layers by chemical means by dry-etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Abstract
Description
步骤 | 时间[s] | 压力[Torr] | 温度[℃] | 功率[W] | O2[sccm] | N2/H2[sccm] | N2[sccm] | N2/H2[sccm] |
12(End)3(Over)4 | Min20030%10 | 1.51.51.51.5 | 250250250250 | 2000200020002000 | 2000200019001900 | 314314314314 | 0000 | 0015001500 |
步骤 | 时间[s] | 压力[Torr] | 温度[℃] | 功率[W] | O2[sccm] | CF4[sccm] |
123 | Min1245-60 | 1.51.51.5 | 120120120 | 关关1500 | 230023002300 | 450450450 |
参数 | n-掺杂 | p-掺杂 | ||
现有技术 | 本发明 | 现有技术 | 本发明 | |
薄层电阻(Ω/平方)间隔层宽度(nm)有源区上的TiSi2厚度(nm)多晶Si厚度(nm) | 249565135 | 128075115 | 179065145 | 9.78570115 |
Claims (4)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP01201538.4 | 2001-04-26 | ||
EP01201538 | 2001-04-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1520608A CN1520608A (zh) | 2004-08-11 |
CN1255863C true CN1255863C (zh) | 2006-05-10 |
Family
ID=8180219
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB028013433A Expired - Fee Related CN1255863C (zh) | 2001-04-26 | 2002-04-12 | 在半导体器件的夹断的有源区中改善二硅化钛的电阻 |
Country Status (6)
Country | Link |
---|---|
US (1) | US6630399B2 (zh) |
EP (1) | EP1419522A2 (zh) |
JP (1) | JP4248882B2 (zh) |
KR (1) | KR20030095953A (zh) |
CN (1) | CN1255863C (zh) |
WO (1) | WO2002089191A2 (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI241652B (en) * | 2002-08-13 | 2005-10-11 | Lam Res Corp | Method for hard mask CD trim |
US6825529B2 (en) * | 2002-12-12 | 2004-11-30 | International Business Machines Corporation | Stress inducing spacers |
KR100732860B1 (ko) * | 2004-12-14 | 2007-06-27 | 동부일렉트로닉스 주식회사 | 반도체 기판 상의 산화막 식각 후 애싱 방법 |
CN104538439A (zh) * | 2015-01-19 | 2015-04-22 | 北京大学 | 一种耐高温欧姆接触电极结构及其加工方法 |
CN106033718A (zh) * | 2015-03-15 | 2016-10-19 | 中国科学院微电子研究所 | 一种金属硅化物的形成方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5868854A (en) * | 1989-02-27 | 1999-02-09 | Hitachi, Ltd. | Method and apparatus for processing samples |
JP2814021B2 (ja) * | 1990-07-09 | 1998-10-22 | 三菱電機株式会社 | 半導体基板表面の処理方法 |
JPH07142447A (ja) * | 1993-11-16 | 1995-06-02 | Kawasaki Steel Corp | 半導体装置の製造方法 |
JP3529849B2 (ja) * | 1994-05-23 | 2004-05-24 | 富士通株式会社 | 半導体装置の製造方法 |
EP0945897A1 (en) * | 1998-03-25 | 1999-09-29 | Texas Instruments Incorporated | Organic gate sidewall spacers |
US6376384B1 (en) * | 2000-04-24 | 2002-04-23 | Vanguard International Semiconductor Corporation | Multiple etch contact etching method incorporating post contact etch etching |
US6444404B1 (en) * | 2000-08-09 | 2002-09-03 | Taiwan Semiconductor Manufacturing Company | Method of fabricating ESD protection device by using the same photolithographic mask for both the ESD implantation and the silicide blocking regions |
-
2002
- 2002-04-12 KR KR1020027017534A patent/KR20030095953A/ko not_active Application Discontinuation
- 2002-04-12 JP JP2002586392A patent/JP4248882B2/ja not_active Expired - Fee Related
- 2002-04-12 EP EP02722596A patent/EP1419522A2/en not_active Withdrawn
- 2002-04-12 WO PCT/IB2002/001344 patent/WO2002089191A2/en active Application Filing
- 2002-04-12 CN CNB028013433A patent/CN1255863C/zh not_active Expired - Fee Related
- 2002-04-23 US US10/128,637 patent/US6630399B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP4248882B2 (ja) | 2009-04-02 |
KR20030095953A (ko) | 2003-12-24 |
US6630399B2 (en) | 2003-10-07 |
WO2002089191A2 (en) | 2002-11-07 |
US20020197861A1 (en) | 2002-12-26 |
EP1419522A2 (en) | 2004-05-19 |
CN1520608A (zh) | 2004-08-11 |
WO2002089191A3 (en) | 2004-03-04 |
JP2004528715A (ja) | 2004-09-16 |
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