CN1305598A - 波导端面 - Google Patents

波导端面 Download PDF

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Publication number
CN1305598A
CN1305598A CN99807231A CN99807231A CN1305598A CN 1305598 A CN1305598 A CN 1305598A CN 99807231 A CN99807231 A CN 99807231A CN 99807231 A CN99807231 A CN 99807231A CN 1305598 A CN1305598 A CN 1305598A
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waveguide
face
light guide
integrated light
arbitrary
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CN1134683C (zh
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A·G·里克曼
A·P·R·哈平
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Lumentum Technology UK Ltd
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Bookham Technology PLC
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
    • G02B6/29361—Interference filters, e.g. multilayer coatings, thin film filters, dichroic splitters or mirrors based on multilayers, WDM filters
    • G02B6/29362—Serial cascade of filters or filtering operations, e.g. for a large number of channels
    • G02B6/29365—Serial cascade of filters or filtering operations, e.g. for a large number of channels in a multireflection configuration, i.e. beam following a zigzag path between filters or filtering operations
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12195—Tapering

Abstract

一种具有端面(2A)的集成光波导(2),端面(2A)设置在宽度大于波导(2)的端部上,如以T形棒(28)的形式设置在波导(2)的端部,由此,在用于形成端面(2A)的制造过程如蚀刻产生的圆化效应不会影响透过大部分光的端面(2A)的部分的平面度。T形棒(2B)最好倾斜,使得端面(2A)的法线与波导(2)的光轴倾斜,从而减少背反射。多条波导(6、7、8)可以终止在一个公共T形棒(6B)中。

Description

波导端面
本发明涉及一种集成光波导的端面，并尤其涉及一形成在硅-绝缘体(SOI)芯片上的肋状波导的端面。
可以通过锯截法或通过机械抛光形成例如由硅形成的集成波导的端面，从而在用于将从另一个组件如激光二极管发来的光耦合到一光纤的波导端部上实现一个光学切面。在其它情况下，例如装置由诸如InP或GaAs的ⅢⅤ材料制成时，可以沿着结晶学平面切割基底以产生一个光学切面。
对于硅波导，如形成在硅-绝缘体芯片上的波导，可以通过利用已知的平版印刷技术的干蚀刻法制作切面，这使得波导切面能够形成在芯片上的任意位置。但是，对于宽度在4-10μm范围内的典型的波导，所述对标准图形清晰度技术的分辨率限制如平版印刷将倾向于造成切面的圆形畸变，这导致在光传输通道中不理想的象差和/或由切面发射或接收的光的聚焦效果。
根据本发明，提供了一种集成光波导，该光波导具有一个设置在波导一端部上的端面，该端面具有在制作端面时形成在其边缘的倒圆的角部，这样形成的端部使得该端部和置于其上的端面具有一个大于通向该端部的波导宽度的宽度，从而使得该倒圆的角部与形成于其间的端面之一基本上平坦的区域隔开，由此，在使用中基本上所有穿过该端面的光都通过该基本上平坦的区域，并且减少了由穿过该端面的光因圆角导致的聚焦效应或象差。
通过下面的描述和所附的权利要求，本发明优选和任选的特征将变得更加清晰。
下面参照附图仅以举例的形式对本发明做进一步地描述，其中：
图1是常规的肋状波导平面图；
图2是根据本发明第一优选实施例的集成波导的平面简图；和
图3、4、5和6是根据本发明集成波导的另一实施例平面简图。
图1是常规的肋状波导平面图，该波导一般具有4-10μm的宽度，并且有一定程度放大地表示在波导的一个端部处形成的圆化形式的切面1A。切面边缘处圆角的半径依赖于用于形成该切面的平版印刷蚀刻技术而变化，并因此导致光在经过切面的透射中可变的象差。该圆角一般具有量级约在1～2μm的之内的半径R。其它的波导制造工艺也会导致类似的圆化效果。
图2是根据本发明第一优选实施例的集成波导的平面图，其中波导2的端面被设置在该波导2之端部处为“T形棒”2B的一端部上。此结果是形成在波导端部的端面2A比通向该端面的波导2要宽。对于宽度Ww在4-10μm之内的波导，端部的宽度，即T形棒2B的长度L将主要处于6-30μm范围之内，并且在某些情况下高达60μm。T形棒2B角度的圆化程度与图1所示的常规波导相同，但是此时圆角与端面2A的中心部分隔离开，光通过端面2A离开或进入波导2。端面2A的中心部分可以大致形成为平面，上述圆化效应导致的象差可以依据T形棒2B的长度L相对于波导2的宽度Ww之比值而减至最小或降低。
对于宽度Ww在4-10μm之内的波导2,T形棒2B的臂宽Wt也主要处于4-10μm的范围之内。
端面2A的大致为平面的中心部分的宽度最好至少与波导1的宽度Ww一样，使得T形棒2B的长度L最好大于波导的宽度为一个两倍于圆角半径R的长度的量，即
L≥Ww+2R
图3-6表示引用相同原理的其它实施例，即采用一个宽度大于通向该端面之波导的切面，从而减小上述的圆化效应导致的象差。
图3表示一个从宽的部分3C逐渐变细到窄的部分3D的波导3，在波导3的窄部3D的端部上设置一个T形棒3B。端面3A的宽度大于波导通向此端的窄部3D的宽度。
图4表示一个从窄的部分4C逐渐变宽到一宽的部分4D的波导4，在波导3的宽部4D的端部上设置一个T形棒4B。端面4A的宽度仍大于波导通向此端的宽部4D的宽度。
应理解，所述的圆滑度，即半径R的大小是通过用于制作波导的工艺限定的，因此与波导的宽度无关。为了确保被光穿过的端面之中心部分基本上为平面，T形棒的臂应该每个都从该端面的侧面伸出至少R的距离。
图5表示一种在其端部设置有T形条5B的波导5,T形棒与波导轴的垂直线相倾斜。图2中所示的T形棒2B的长度基本上垂直于波导2的光轴，而在图5的设置中，T形棒5B的长度处于与垂直方向成θ角。角θ一般高达10度。端面5A类似地倾斜，因此其法向与波导5的光轴成θ角。这种倾斜有助于避免从面5A反射回路的光与沿波导5透射的光之干涉所导致的问题。
对于窄波导，如4μm宽度的波导，如果不采用T形棒将不能实现图5中所示的配置，因为用于制作端面的制作工艺的圆化效应将会消除倾斜端面的任何试图。甚至对于较宽的波导，如宽度有6～8μm的波导，圆化效应将显著地减小所述应是平坦的并且应形成其法向与波导的光轴倾斜的端面部分的宽度。
图6表示一种多个波导6、7和8通向一个共用T形棒6B的配置。T形棒6B布置成端面6A在那些被从波导6、7或8之任何一个中传输的光所透过的区域中基本上为平面。
所以上述的配置确保基本上所有透过端面4A的光都穿过基本上为平面的中心部分。这一点通过对波导的端面整形来实现，使得波导的物理尺寸比其中的光学模式更快地变宽，以致于基本上所有的光都从端面的平坦区域穿过而不是从其边缘的圆化区域穿过。

Claims (13)

1．一种集成光波导，该光波导具有一个设置在波导一端部的端面，该端面有在制作端面时形成在其边缘的倒圆的角部，该端部如此形成，以使得所述端部和置于其上的端面具有一个大于通向该端部之波导宽度的宽度，使得该倒圆的角部与形成于其间的端面之基本上平坦的区域相隔开，由此，在使用中基本上所有穿过端面的光都通过基本上平坦的区域，并且减少了由穿过端面的光因倒圆的角导致的聚焦效应或象差。
2．如权利要求1所述的集成光波导，其特征在于，端部具有至少Ww+2R的宽度，Ww是通向端部的波导宽度，R是在制造端面的制造工艺中所致的端部圆角的曲率半径。
3．如权利要求1或2所述的集成光波导，其特征在于，端面设置在置于波导端部的T形棒上。
4．如前述任一权利要求所述的集成光波导，其特征在于，端面被倾斜配置以使得其法线与波导光轴的夹角θ高达10°。
5．如前述任一权利要求所述的集成光波导，其特征在于，通向端面的波导包括一个较窄部分，其朝着端部倾斜成一较宽部分。
6．如权利要求1-4中任一所述的集成光波导，其特征在于，通向端面的波导包括一个较宽部分，其朝着端部倾斜成一较窄部分。
7．如前述任一权利要求所述的集成光波导，其特征在于，多条波导通向一个公共的端部。
8．如权利要求7所述的集成光波导，其特征在于，通过一个置于波导端部的公共T形棒提供所述公共端部。
9．如前述任一权利要求所述的集成光波导，其特征在于，其为一肋状波导。
10．如权利要求9所述的集成光波导，其特征在于，肋状波导由硅形成。
11．如权利要求10所述的集成光波导，其特征在于，肋状波导形成在硅-绝缘体芯片上。
12．如权利要求2或任何其从属权利要求所述的集成光波导，其特征在于，Ww处于4-10μm的范围，R处于1-2μm的范围。
13．一种集成光波导，实质上与参照和/或与附图2~6中任一所示的描述一样。
CNB998072311A 1998-06-12 1999-04-26 波导端面 Expired - Fee Related CN1134683C (zh)

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GB9812605.5 1998-06-12
GB9812605A GB2334789B (en) 1998-06-12 1998-06-12 A waveguide end face

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CN1134683C CN1134683C (zh) 2004-01-14

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CN (1) CN1134683C (zh)
AU (1) AU3718499A (zh)
CA (1) CA2334756A1 (zh)
DE (1) DE69902171T2 (zh)
GB (1) GB2334789B (zh)
IL (1) IL140045A0 (zh)
WO (1) WO1999066360A1 (zh)

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US7356212B2 (en) 2005-10-24 2008-04-08 Nec Corporation Optical waveguide device and method of adjusting a transmission loss thereof

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AU3718499A (en) 2000-01-05
CN1134683C (zh) 2004-01-14
EP1086395A1 (en) 2001-03-28
GB2334789A (en) 1999-09-01
DE69902171D1 (de) 2002-08-22
JP2002518702A (ja) 2002-06-25
EP1086395B1 (en) 2002-07-17
US6266468B1 (en) 2001-07-24
IL140045A0 (en) 2002-02-10
WO1999066360A1 (en) 1999-12-23
CA2334756A1 (en) 1999-12-23
DE69902171T2 (de) 2003-04-03
GB9812605D0 (en) 1998-08-12
GB2334789B (en) 2000-01-19
KR20010052805A (ko) 2001-06-25

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