CN1328051C - 结合了推进式激励的用于喷墨打印头的打印头芯片 - Google Patents
结合了推进式激励的用于喷墨打印头的打印头芯片 Download PDFInfo
- Publication number
- CN1328051C CN1328051C CNB028287428A CN02828742A CN1328051C CN 1328051 C CN1328051 C CN 1328051C CN B028287428 A CNB028287428 A CN B028287428A CN 02828742 A CN02828742 A CN 02828742A CN 1328051 C CN1328051 C CN 1328051C
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- Prior art keywords
- ink
- print head
- head chip
- nozzle
- substrate
- Prior art date
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Abstract
多个喷嘴排列(70)被设置在打印头芯片的基片(12)。每个装置包括设置在基片上的喷嘴室结构(72,74,76,78),并限定墨从中被喷出的喷嘴室(80)。一喷墨机构被相对于喷嘴室结构可操作地设置。该喷墨机构包括至少一个移动部件(106),其可移位以在喷嘴室内产生压力脉冲以喷出墨。一激励器(92)被设置在基片上且具有至少一个工作元件(4),其材料所具有的热膨胀系数使得该工作元件能基本上直线地膨胀和收缩。一能量传送装置互连该移动部件和该工作元件以使由于该工作元件的膨胀和随后的收缩而产生的能量被传送给该移动部件,结果导致所述压力脉冲的产生。
Description
技术领域
本发明涉及一种用于喷墨打印头的打印头芯片。更具体而言,本发明涉及一种用于喷墨打印头的打印头芯片,其结合了推进式激励以实现墨滴喷出。
背景技术
如在以上参考的申请/专利中所提出的,申请人已在开发打印头上花费了大量的时间和精力,该打印头结合了基于微机电系统(MEMS)的部件以实现打印所必要的喷墨。
作为申请人研究和开发的结果,申请人已能开发具有一个或多个打印头芯片的打印头,所述打印芯片总共结合了高达84000喷嘴的装置。申请人亦已开发了能控制这种打印头的操作的适当处理器技术。具体而言,所述处理器技术和打印头在一些情况下能合作产生1600dpi或更高的分辨率。适当的处理器技术的实例被提供在以上参考的专利申请/专利中。
申请人已开发的大多数打印头所共有的是相对于基片移动以从喷嘴室喷出墨的部件。该部件可处于喷墨元件的形式,其可在喷嘴室中移位以从喷嘴室喷出墨。
如从以上申请亦可清楚的,申请人已开发了实现从相应喷嘴室喷出墨的许多方式。这些的大多数基于对具有一热膨胀系数的材料的选择,该系数是这样的,在MEMS尺度上,基于加热的膨胀和基于冷却的随后收缩可被利用以进行工作。材料被形成以限定包括加热电路的热激励器的至少一部分。加热电路被成形以当电流经过电路时被电阻性加热。所述电流以取决于打印要求的频率以脉冲形式被提供给电路。脉冲通常从被设置在打印头芯片的基片上的CMOS层被提供。脉冲被成形并具有亦取决于打印要求的大小。脉冲的产生和控制亦借助于以上参考的申请中所描述的适当类型的微处理器。
在宏观尺度上,使用材料的热膨胀和随后收缩来做功的性能是与人们的直觉相悖的。申请人认为,所感觉的膨胀和收缩的缓慢速度会导致宏观工程领域的普通技术人员寻求可替换的能量源。
然而,在MEMS尺度上,申请人已发现可以利用这种材料的膨胀和收缩来做功。其原因是在该尺度上,膨胀和收缩是相对快的并且可传送相对大的力。
但仍有运动范围的问题。尽管膨胀和收缩是快且强有力的,但申请人已发现,将理想的是,提供这样一种机构,使得运动的这种速度和力量可在需要功来进行喷墨的区域被放大。
以上申请和专利所覆盖的大多数喷嘴排列使用热激励器中的差热膨胀来实现热激励器的弯曲。该弯曲运动被传送给喷墨部件,其被直线地或带有一定角度地移位以喷出墨。
申请人已发现将热激励器的简单直线膨胀传送给喷墨部件将是理想的,这是因为MEMS尺度上的这种简单直线膨胀是相对有效的。
申请人已设想了本发明以实现上述期望的对运动的传送和放大。
发明内容
将热激励器的简单直线膨胀传送给喷墨部件将是理想的,这是因为MEMS尺度上的这种简单直线膨胀是相对有效的。
为了实现上述期望的对运动的传送和放大,依照本发明,提供了一种用于喷墨打印头的打印头芯片,该打印头芯片包括
基片;以及
多个喷嘴排列,其被设置在基片上,每个喷嘴排列都包括
喷嘴室结构,其被设置在基片上并且限定墨从中被喷出的喷嘴室;
喷墨机构,其相对于喷嘴室结构被可操作地设置,该喷墨机构包括至少一个部件,其可移位以在喷嘴室内产生压力脉冲以从喷嘴室喷出墨;
激励器,其被设置在基片上并且具有至少一个工作元件,其由具有这样的热膨胀系数的材料制成:当被加热并且随后被冷却时,该工作元件或每个工作元件能基本上直线地膨胀和收缩;以及
能量传送装置,其互连该移动部件或每个移动部件和该工作元件或每个工作元件以使由于该工作元件或每个工作元件的膨胀和随后收缩而产生的能量被传送给该移动部件或每个移动部件,从而导致该移动部件或每个移动部件的位移和所述压力脉冲的产生。
通过举例,现在参照附图来描述本发明。以下描述并不旨在限制以上概述的宽广范围。
附图说明
在附图中:
图1示出用于喷墨打印头的依照本发明的打印头芯片的第一实施例的喷嘴排列的示意图;
图2示出用于喷墨打印头的依照本发明的打印头芯片的第二实施例的喷嘴排列的示意图;
图3示出依照本发明的打印头芯片的第三实施例的喷嘴排列的示意图;
图4示出依照本发明的打印头芯片的第四实施例的喷嘴排列的示意图;
图5示出依照本发明的打印头芯片的第五实施例的喷嘴排列的示意图;
图6示出一个示意侧视图,其示出静止状况下图5的喷嘴排列的进一步细节;
图7示出操作状况下图5的喷嘴排列的示意侧视图;
图8示出图5的喷嘴排列的示意平面视图;并且
图9示出用于喷墨打印头的依照本发明的打印头芯片的第六实施例的喷嘴排列的示意侧视图。
具体实施方式
在图1中,参考数字10概括指示依照本发明的用于喷墨打印头芯片的第一实施例的喷嘴排列。
喷嘴排列10是被形成于硅晶片基片12(图6)上以限定本发明的打印头芯片的多个此喷嘴排列之一。如在本说明书的发明背景中所提出的,单个打印头可包含高达84000个这种喷嘴排列。为了清楚且容易地描述,仅描述一个喷嘴排列。应理解,本领域的普通技术人员可通过在晶片基片12上简单地复制喷嘴排列10而容易地获得打印头芯片。
打印头芯片是集成电路制造技术的产物。具体而言,每个喷嘴排列10都是基于MEMS的制造技术的产物。如所知的,这种制造技术包含淀积集成电路材料的功能层和牺牲层。功能层被刻蚀以限定不同移动部件,而牺牲层被刻蚀掉以释放所述部件。如所知的,这种制造技术通常包含在单个晶片上复制大量类似的部件,所述晶片随后被切成小块以使不同部件彼此分离。这加强了这样的看法,即本领域的普通技术人员可通过复制喷嘴排列10而容易地获得本发明的打印头芯片。
电驱动电路层14被设置在硅晶片基片12上。电驱动电路层14包括CMOS驱动电路。CMOS驱动电路的特定配置对于本说明书并不重要,并因此在附图中已被示意性地示出。说明以下就足够了:它被连接于适当的微处理器并且一旦从所述适当的微处理器收到使能信号则提供电流给喷嘴排列10。适当微处理器的实例被描述在以上参考的专利/专利申请中。由此,这种程度的细节将不在本说明书中提出。
墨钝化层16被设置在驱动电路层14上。墨钝化层16可以是任何适当的材料,如氮化硅。
如广泛概念上的,喷嘴排列10被示出于图1中。喷嘴排列10包括电热激励器18形式的激励器。激励器18包括电阻性加热电路20。电路20结合了传导性加热元件22形式的工作元件。加热元件22的材料所具有的热膨胀系数使得:当该材料被加热并且随后被冷却时,该材料能够膨胀并且随后收缩到足以在MEMS尺度上进行工作的程度。用于集成电路制造中的许多材料的任何一个可能是适合的。这样的材料可包括金、铜或钛。申请人已发现,氮化铝钛(TiAlN)特别适合于该目的。
如所知的,每单位长度的加热元件22都会发生热膨胀和收缩。喷嘴排列10背后的原理是提供具有足够长度的加热元件22以使当加热元件22膨胀和收缩时的运动范围足以产生有用的能量。这样,加热元件22的长度就是限定有用能量传送装置的因素。具体而言,加热元件22具有这样的长度:其使运动的范围类似于在以上参考的专利/专利申请中所描述的喷嘴排列的部件的运动范围。
加热元件22被连接于喷墨元件或活塞24形式的喷墨机构。活塞24被置于喷嘴室结构26中。喷嘴室结构26具有喷嘴室壁28和顶30。顶30限定喷墨端口32。
加热元件22具有固定端34和工作端36,从而在加热元件22膨胀和收缩时,工作端36相对于固定端34以直线方式移位。这导致活塞24相对于顶30的相互的运动并且随后从喷墨端口32喷出墨。
在图2中,参考数字40概括指示用于喷墨打印头的依照本发明的打印头芯片的第二实施例的喷嘴排列。参照图1,除非另外指定,相同的参考数字代表相同的部件。
同样,仅概念性地示出喷嘴排列40。在此敬意地提出,MEMS制造领域的普通技术人员可容易地制造利用图2中所说明的概念的喷嘴排列。
喷嘴排列40亦包括加热电路42。然而,加热电路42的加热元件44是方便的长度。喷嘴排列40利用液压原理以实现有用的力传送装置。在该实施例中,活塞24的横截面面积并因此喷嘴室26的横截面积比喷墨端口32的横截面面积大足够高的数量级。这样,活塞24运动所需的范围可从在以上参考的申请中所描述的喷嘴排列中通常所需的范围显著减小,同时仍实现墨滴喷出。
在图3中,参考数字50概括指示用于依照本发明的打印头芯片的第三实施例的喷嘴排列。参照图1和2,除非另外指定,相同的参考数字代表相同的部件。
喷嘴排列50同样被示为广泛的概念。具体而言,喷嘴排列50说明了不是具有在先前实施例中描述的尺寸配置,而是适当的运动放大装置52可被设置在加热元件44和活塞24之间。运动放大装置52可采取许多不同的形式。具体而言,运动放大装置可处于诸如齿轮系统的常规微机械装置的形式。
在图4中,参考数字60概括指示用于喷墨打印头的依照本发明的打印头芯片的第四实施例的喷嘴排列。参照图1到3,除非另外指定,相同的参考数字代表相同的部件。
喷嘴排列60被示为广义的概念。在该实施例中,杠杆机构62被设置在加热元件44的工作端36和活塞24的中间。杠杆机构62具有有效动力臂64,其被连接于具有支点68的有效负载臂66。应指出,图4中所示的杠杆机构62是示意性的,并且限定杠杆机构62的许多微机械系统的任何一个均可被使用。
杠杆机构62被配置成使有效负载臂66比有效动力臂64长近似20和60倍之间。具体而言,杠杆机构62被配置成使有效负载臂66比有效动力臂64长近似40倍。
在图5到图8中,参考数字70概括指示用于喷墨打印头的依照本发明的打印头芯片的第五实施例的喷嘴排列。参照图1到图4,除非另外指定,相同的参考数字代表相同的部件。
喷嘴排列70包括喷嘴室壁,其为远端壁72、近端壁74和一对相对的侧壁76的形式。顶78横跨壁72、74、76。顶78和壁72、74、76限定喷嘴室80。顶78限定与喷嘴室80流体连通的喷墨端口82。壁72、74、76和顶78被定尺寸以使其喷嘴室80的平面图具有矩形形状。喷墨端口82被相邻于喷嘴室80的远端84而放置。
多个墨入口通道86被限定通过基片12和层14、16。每个墨入口通道86都与相应的喷嘴室80流体连通。此外,每个墨入口通道86的开口88与其关联喷嘴室80的喷墨端口82对准。
一对固定器90形式的固定器构造在喷嘴室80的近侧上与基片12是紧固的。加热电路44包括电热膨胀激励器92,该激励器与固定器90是紧固的,并且向着近端壁74而延伸。热膨胀激励器92由传导性材料制成,并且被成形以限定部分加热电路44。激励器92由具有这样的热膨胀系数的材料制成:即当被加热并且随后被冷却时,该材料的膨胀和收缩可被利用以在MEMS尺度上进行工作。适当材料的实例是氮化钛铝。具体而言,热膨胀激励器92具有由桥部分96互连的一对臂94。激励器92具有固定部分,其由与相应的固定器90紧固的臂94的固定端98来限定。
每个固定器90都被配置成提供固定端98和电驱动电路层14之间的电连接。具体而言,固定器90被配置成提供一个固定端98和负接触以及另一个固定端98和正接触之间的电连接。电驱动电路层14被连接于在以上参考的专利/申请中所描述的类型的微处理器以使适当形状和大小的电流脉冲可被提供给激励器92。
激励器92的桥部分96限定激励器92的工作部分。
喷嘴排列70包括被枢轴地安排在近端壁74上的枢轴元件100。激励器92的桥部分96在由枢轴元件100和近端壁74限定的、以102指示的枢轴点的中间的位置处被连接于枢轴元件100。应理解,枢轴点46可由枢轴元件44和近端壁20的任何数量的配置来限定。为此,枢轴点102仅被示意性地指示。在一个可能的实施例中,近端壁74可限定枢轴元件100。在此情况下,枢轴点102将被限定于近端壁74和侧壁76之间。具体而言,这将需要将近端壁74用绞接地连接于侧壁76。
将理解,在任何情况下,枢轴元件100是要形成近端壁74的一部分。由此,密封元件104被提供于枢轴元件100和墨钝化层16的中间。密封元件104被配置成适应由于热膨胀激励器92的膨胀和随后收缩而引起的枢轴元件100的枢轴运动。
喷嘴排列70包括桨板106形式的喷墨元件。桨板106被定尺寸以与喷嘴室80一般对应。具体而言,桨板106被定尺寸以使桨板106的端部分108被定位在喷墨端口82和墨入口通道86的开口88的中间。
桨板106和枢轴元件100被配置成使桨板106比由桨板106和枢轴元件100限定的、以110指示的有效杠杆臂长近似20和60倍之间。具体而言,桨板106可比有效杠杆臂110长近似40倍。应指出,杠杆臂110仅被示意性地示出,这是由于有可用于限定杠杆臂110的各种各样的不同的可能配置。此外,桨板长度与杠杆臂长度之比可大大不同于40∶1的比率。这可取决于许多因素,如驱动信号强度和激励器材料。例如,在一个实施例中,申请人已设计激励器92膨胀50纳米,同时桨板106的末端部分108移动经过1和2微米之间。
将理解,桨板106运动的最大范围发生在桨板106的末端部分108处。此外,该运动外延比有效杠杆臂110的运动范围大高达40倍。由此得出结论,热激励器92的膨胀在末端部分108处被显著放大,因此便于如图7中的114处所示从喷墨端口82喷出墨112。当激励器92冷却时,激励器92的随后收缩导致末端部分108运动的扩大的范围返回到图6中所示的静止位置。这导致墨114与墨112的分离以形成墨滴116。
桨板106包括加强肋118以强化桨板106。这是有必要的,因为有桨板106的相对长度和被施加于桨板106上的合成弯曲力矩。
将理解,根据以上参考的申请和专利,喷嘴排列70适合于用集成电路制造技术来制造。此外,枢轴元件100和枢轴点102可由任何数量的微机械装置来限定。例如,挠性构件可被形成于枢轴元件100和侧壁76或者近端壁74的中间,其被形变以适应枢轴元件100的枢轴运动。
在图9中,参考数字120概括指示了用于喷墨打印头的依照本发明的打印头芯片的第六实施例的喷嘴排列。参照图1到8,除非另外指定,相同的参考数字代表相同的部件。
喷嘴排列120包括有源喷墨结构122形式的喷嘴室结构。有源喷墨结构122具有顶124和壁126,其从顶124延伸向基片12。顶124限定喷墨端口128。顶124和壁126一起限定喷嘴室130。
壁126包括近端壁132、相对的远端壁134和一对相对的侧壁136。喷墨端口128被相邻于远端壁134而放置,而墨入口通道86的开口88被相邻于近端壁132而放置。
近端壁132被枢轴地安装在基片12上以使有源喷墨结构122相对于基片12是枢轴的。具体而言,有源喷墨结构122在箭头138的方向上是枢轴的,到达足以便于从喷墨端口128喷出墨的程度。
顶124和壁126被定尺寸以使喷嘴室130是矩形的并且具有比喷嘴室130的高度大3倍的长度。这与喷墨端口128和开口88被设置在喷嘴室130的相对端处的事实一起,当结构122向着基片12枢轴地移位时,便于阻滞墨从喷墨端口128流向开口88。该流动被称为回流,并且是高度不期望的。
激励器92的桥部分96被固定于近端壁132。这样,在以上述方式激励器92升温并随后膨胀时,喷墨结构122向着基片12而转动。基于以上述方式激励器92冷却并随后收缩时,喷墨结构122远离基片12而转动。喷墨结构122的这种可逆运动导致墨滴从喷墨端口128喷出。
桥部分96在一位置处被连接于近端壁132,其中,喷墨结构122的长度比以140指示的有效杠杆臂的长度长达40倍。由此得出结论,作为基于激励器的加热和随后冷却而移位桥部分96的结果的有效杠杆臂140的枢轴运动可被放大40倍之高。申请人已发现,这便于有效的墨滴喷出。
喷嘴排列120包括密封结构140,其从墨钝化层16延伸。壁126重叠密封结构140以使当喷嘴室130被填充了墨时,流体密封被限定于密封结构140和壁126之间。
申请人认为,本发明提供了一种可以将简单热膨胀和收缩以直线方式转换成有用功的装置。
Claims (9)
1.一种用于喷墨打印头的打印头芯片,该打印头芯片包括
基片;以及
多个喷嘴排列,其被设置在基片上,每个喷嘴排列包括
喷嘴室结构,其被设置在基片上并且限定墨从中被喷出的喷嘴室;
喷墨机构,其被相对于喷嘴室结构可操作地设置,该喷墨机构包括至少一个移动部件,其可移位以在喷嘴室内产生压力脉冲以从喷嘴室喷出墨;
激励器,其被设置在基片上并且具有至少一个工作元件,其材料的热膨胀系数使得:当被加热并且随后被冷却时,工作元件或每个工作元件能基本上直线地膨胀和收缩;以及
能量传送装置,其互连该移动部件或每个移动部件和该工作元件或每个工作元件以使由于该工作元件或每个工作元件的膨胀和随后的收缩而产生的能量被传送给该移动部件或每个移动部件,结果导致该移动部件或每个移动部件的位移和所述压力脉冲的产生。
2.如权利要求1的打印头芯片,其中基片包括硅晶片基片和被设置在硅晶片基片上的CMOS驱动电路层。
3.如权利要求2的打印头芯片,其中每个激励器都包括一个伸长的工作臂,其具有固定端部分和工作端部分,该工作臂被配置成限定电阻性加热电路的部分,所述工作臂还被电连接至驱动电路层以在工作臂中产生电流脉冲,以在工作臂由于所述电流脉冲而加热并随后冷却时相对于固定端部分来移位工作端部分。
4.如权利要求3的打印头芯片,其中每个喷嘴室结构都包括喷嘴室壁和被设置在喷嘴室壁上的顶,该顶限定墨基于所述压力脉冲的产生而从中被喷出的喷墨端口。
5.如权利要求4的打印头芯片,其中每个喷墨机构包括一喷墨元件形式的一移动部件,其被设置在喷嘴室中并且可向着和远离所述顶移位以产生所述压力脉冲。
6.如权利要求5的打印头芯片,其中所述能量传送装置由所述喷墨元件来限定,所述喷墨元件的喷墨表面积比喷墨端口的开口面积大预定数量级。
7.如权利要求5的打印头芯片,其中所述能量传送装置为运动放大装置的形式,其被配置为使得喷墨元件的运动比所述工作元件的工作端部分的运动大预定数量级。
8.如权利要求7的打印头芯片,其中所述运动放大装置包括杠杆机构,该杠杆机构限定一动力臂,其被连接于工作元件的工作端部分,并且喷墨元件限定负载臂,该负载臂的有效长度具比动力臂的有效长度大预定数量级,所述杠杆机构进一步限定一支点,其将动力臂和负载臂枢轴地连接于基片和喷嘴室结构之一。
9.一种喷墨打印头,包括权利要求1的至少一个打印头芯片。
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CN1328051C true CN1328051C (zh) | 2007-07-25 |
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EP (1) | EP1494868B1 (zh) |
KR (1) | KR100707844B1 (zh) |
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- 2002-08-29 EP EP02759890A patent/EP1494868B1/en not_active Expired - Lifetime
- 2002-08-29 DE DE60231154T patent/DE60231154D1/de not_active Expired - Lifetime
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- 2002-08-29 IL IL16444502A patent/IL164445A0/xx active IP Right Grant
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2004
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2005
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