CN1542499A - Mems和光调制器阵列的控制 - Google Patents

Mems和光调制器阵列的控制 Download PDF

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CN1542499A
CN1542499A CNA2004100025414A CN200410002541A CN1542499A CN 1542499 A CN1542499 A CN 1542499A CN A2004100025414 A CNA2004100025414 A CN A2004100025414A CN 200410002541 A CN200410002541 A CN 200410002541A CN 1542499 A CN1542499 A CN 1542499A
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array
discrete
voltage
light modulator
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E·T·马丁
A·皮尔
�����ձ���
J·R·普日贝拉
A·L·戈泽尔
P·J·弗里克
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Hewlett Packard Development Co LP
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    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G5/00—Control arrangements or circuits for visual indicators common to cathode-ray tube indicators and other visual indicators
    • G09G5/10—Intensity circuits
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/3433—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2300/00—Aspects of the constitution of display devices
    • G09G2300/08—Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2310/00—Command of the display device
    • G09G2310/02—Addressing, scanning or driving the display screen or processing steps related thereto
    • G09G2310/0264—Details of driving circuits
    • G09G2310/027—Details of drivers for data electrodes, the drivers handling digital grey scale data, e.g. use of D/A converters
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/2007—Display of intermediate tones
    • G09G3/2011—Display of intermediate tones by amplitude modulation

Abstract

具有列线(40)和行线(30)的MEMS器件阵列(10或15)、如光调制器阵列，响应于输入信号，通过提供大量分立电压(70)、从分立电压多路传输将被施加到阵列的每个MEMS器件(20)的一选定电压(21)、并使得选定的分立电压施加到阵列的每个MEMS器件，而得到控制。

Description

MEMS和光调制器阵列的控制
技术领域
本发明涉及模拟MEMS阵列的控制，并尤其涉及光调制器阵列的模拟电压控制。
背景技术
利用每个象素单元的二元数字控制的光调制器阵列已经在单色文本显示和投影仪中得以应用。为了产生灰度和颜色，希望用模拟信号而非简单的二元控制来控制每个象素单元。为了实现光调制器阵列系统中高分辨率颜色或灰度，通常认可的两种方法是脉宽调制和调制器元件的直接模拟控制。利用脉宽调制需要将单帧周期分为多个周期片段并在每个周期片段中为每个调制器元件发送数据。对于大的阵列和高分辨率，需要非常高的数据速率。在光投影仪领域，为找到降低这些数据速率并同时维持理想的颜色分辨率的方法付诸了大量的努力。
对于MEMS器件阵列如光调制元件(如，微反射镜、基于衍射的调制器或基于干涉的调制器)阵列，或LCD调制器阵列，还希望模拟控制驱动调制器的电压以产生灰度和颜色。将阵列的每个单元完全置于模拟控制之下会负面影响光调制系统性能和/或成本。模拟电路在集成电路工艺中面积越大越昂贵(area expensive)，并且各个单元的模拟控制可能需要单元尺寸的增大，这导致调制器阵列的空间分辨率降低。在维持单元的大小的努力中，可以利用具有较高光刻分辨率和较小特征尺寸的制造工艺，这将导致较高的成本。在光调制器阵列的每个象素单元复制模拟控制电路也会负面影响可靠性。
发明内容
根据本发明，提供一种响应于输入信号控制MEMS器件阵列的方法，其中MEMS器件阵列的类型为具有用于选择阵列的特定MEMS器件的列线和行线，所述的方法包括步骤：提供大量分立电压；和响应于输入信号，从分立电压多路传输将被施加到阵列的每个MEMS器件的选定的分立电压；和启动选定的分立电压向阵列的每个MEMS器件的施加。
根据本发明，提供一种响应于输入信号控制光调制器阵列的方法，其中光调制器阵列的类型为具有用于选择阵列的象素的列线和行线，所述的方法包括步骤：提供大量分立模拟电压；和响应于输入信号，从分立模拟电压多路传输将被施加到阵列的每个象素的选定的分立模拟电压；和启动选定的分立模拟电压向阵列的每个象素的施加。
根据本发明，提供一种用于控制光调制器阵列的方法，其中光调制器阵列具有适于响应于模拟电压信号的象素调制元件，该方法包括步骤：提供大量列线和大量行线，列线和行线的每种组合适于选择象素；提供大量分立电压；和对于阵列的每个象素，从分立电压中选择将被施加到象素的电压；将选定的电压施加到象素的列线；和通过选择象素的行线启动选定的电压向象素的施加。
根据本发明，提供一种响应于输入信号控制光调制器阵列的装置，其中光调制器阵列的类型为具有用于选择阵列的象素的列线和行线，所述的装置包括：大量分立电压源；一多路传输器，响应于输入信号，从分立电压源多路传输将被施加到阵列的每个象素的选定的电压，多路传输器包括多个电压选择块，每个电压选择块耦合到一列线；和多个门，用于启动选定的分立电压向阵列的每个象素的施加，每个门耦接到一行线。
根据本发明，提供一种响应于输入信号控制光调制器阵列的装置，其中光调制器阵列的类型为具有用于选择阵列的象素的列线和行线，所述的装置包括：大量分立电压源；和一多路传输器，响应于输入信号，从分立电压源多路传输将被施加到阵列的每个象素的选定的电压，多路传输器包括多个电压选择块，每个电压选择块耦合到一行线；和多个门，启动选定的分立电压向阵列的每个象素的施加，每个门耦接到一列线。
根据本发明，提供一种用于具有多个MEMS器件的光调制器阵列的控制器，该控制器包括：用于提供大量分立模拟电压的装置；用于从分立电压中选择将被施加到每个MEMS器件的模拟电压的装置；和用于将选定的模拟电压施加到每个MEMS器件的装置。
附图说明
通过下面结合附图的详细描述，本领域的技术人员将会更容易地理解本发明的特点和优点，其中：
图1是根据本发明进行控制的光调制器阵列的第一实施例简图；
图2是根据本发明进行控制的光调制器阵列的第二实施例简图；
图3是用于电压驱动的MEMS元件的驱动电路示意框图。
具体实施方式
在此说明书及所附权利要求书中，“MEMS”一词具有微机电系统的通常含义。本发明可以应用到包含多种MEMS器件的阵列。为了清楚和具有针对性，本实施例以光调制器阵列为例进行详细的说明，其中MEMS器件是调制器象素单元。这些实施例举例说明了本发明的原理和实施，本发明也可以应用到其它的可模拟控制的MEMS器件。
本发明提供的优点在于可在多重驱动电压下对单元的单独寻址能力，无需在每个象素单元复制的模拟控制电路的额外开销。通过提供大量的分立电压、从分立电压中多路传输将被施加到阵列的每个象素的一选定电压并启动将选定的分立电压施加到阵列的每个象素，使具有列线和行线的光调制器阵列响应于输入信号而得到控制。
下面详细描述的实施例举例说明了光调制元件阵列、如微反射镜阵列或基于衍射的调制器、或基于干涉的调制阵列中单元的电压控制方法。模拟控制电路置于阵列的边界处，消除了对以象素单元水平复制模拟控制电路的必要性。寻址方案允许将适当的电压电平多路传输到各个单元。
图1是根据本发明控制的光调制器阵列10的第一实施例简图。虽然本实例表示了一个在3×3方阵中只有九个象素单元20的简单的光调制器阵列10，但可以理解，光调制器阵列可以有布置成常规结构的很多象素单元，如矩形阵列，其中每个象素单元由行30和列40寻址。在图1中，行1用标号31表示，行2用标号32表示，行3用标号33表示。类似地，列1用标号41表示，列2用标号42表示，列3用标号43表示。每个象素单元20有一个Vin输入21和一个ENABLE输入22。
大量的电压控制器件50产生一个接线到每个列电压选择块的模拟电压范围。在图1所示的实施例中，电压控制器件50是数字-模拟转换器(DAC)51、52和53。阵列的列数据60控制每列的电压选择总线。DAC 51-53的输入所需的数字信号的位数由所需的不同模拟电压数决定。阵列的行数据类似于常规的二元驱动阵列的情形。行数据用作ENABLE信号，驱动选定的调制器象素单元20的选定列电压。
图2是根据本发明进行控制的光调制器阵列15的第二实施例简图。在图2中，行1-3还用标号31-33表示，列1-3也分别用41-43表示。另外，如图1所示，每个象素单元20有一个电压Vin输入21和一个ENABLE输入22。
在图2的实施例中，提供了大量的分立模拟参考电压70，如Vref171、Vref272和Vref373。模拟多路传输器(MUX)80组根据列数据60为每一列选取模拟参考电压。例如，模拟MUX81从Vref171、Vref272和Vref373中选择模拟电压以施加到列1总线41。类似地，模拟MUX82从相同的模拟参考电压组中选择模拟电压施加到列2总线42，模拟MUX83从相同的模拟参考电压组中选择模拟电压施加到列3总线43。如图1所示，行数据用作ENABLE信号，驱动选定的调制器象素单元20的选定列电压Vin。
可以由整个光调制器阵列15的单组常规DAC(未示出)，将DAC用于分立模拟参考电压71-73中的每一个，产生可编程的模拟参考电压70，如Vref171、Vref272和Vref373。本领域的技术人员将认识到，分立的模拟参考电压的数量不限于图2中所示的三个，可以采用任何所需数量的分立模拟参考电压。
图3在简单的框图中表示了电压驱动MEMS元件如光调制像元的驱动电路，举例说明了如何在每个象素单元20处实现电压Vin输入21和ENABLE输入22。由行ENABLE信号35选通的单个通栅90驱动将被施加到调制器象素单元20的选定的Vin电压输入45。如果需要，可以用电容器25保持施加的模拟电压Vin，或者象素单元20可以有一个内置电容C，取消对独立电容25的需求。
因而图1和图2的实施例分别利用了大量的电压控制元件50或80来产生所需范围的分立模拟电压。然后将分立模拟电压多路传输到调制器阵列的列线。与在每个单元产生模拟电压电平相反，将给定范围的电压中的任一电压多路传输到各个象素单元能够以数据速率最小的增大提高颜色分辨率。
将给定范围的电压中的任一电压多路传输到各个象素单元还可以消除对更昂贵的制造工艺的需求，并允许有尺寸适于在调制器阵列各象元之下的模拟控制电路。
控制光调制器阵列10和15的所述方法包括提供大量的分立模拟电压。所述的方法通过从分立电压中选择将被施加到象素的电压，施加选定的电压到列线，并通过为象素选择行线使选定的电压施加到象素，实现对阵列的每个象素单元20使用行线30和列线40。提供的分立电压是模拟参考电压，该电压既可以在图1所述的每一列，也可以对于如图2所示的整个阵列(或阵列的任何所需部分)利用DAC进行编程。对于光调器制阵列的所有象素基本上可以同时进行电压的选取、电压的应用以及启动。
在此所述的方法也可以用于控制具有象素调制元件20的光调制器阵列，其中象素调制元件20适于响应于模拟电压信号。一种方法是提供了大量的行线30和大量的列线40以及大量的分立模拟电压70，特定列线和特定行线的每种组合都适于选择阵列的象素调制元件。对于阵列的每个象素，从分立模拟电压70中选择将被施加到象素的电压。选定的电压施加到象素的列线上，并且选定电压向象素上的施加通过选择象素的行线启动。或者，在一种等价的方案中，对象素的行线施加选定的电压，并且通过选择象素的列线启动选定电压对象素的应用。同样，对于光调制器阵列的所有象素也可以基本上同时进行电压的选取、电压的应用和启动。在响应于模拟电压信号的象素调制元件20的范围内，每个分立电压可以对应于例如灰度水平或对应于色调、饱和度以及颜色的强度的唯一组合。
本发明的另一方面是一种用于响应于输入信号控制光调制器阵列的装置。光调制器阵列10或15具有用于选择阵列的象素单元20的行线30和列线40。该装置包括大量分立电压源，一个响应于输入信号的多路传输器80，用于从分立电压源多路传输将被施加到阵列的每个象素的选定的电压，和一个或多个门90，用于启动对阵列的每个象素单元20施加选定的分立电压。每个分立电压源可以是一数字-模拟转换器(DAC)。如果需要保持对应于选定模拟电压的电荷，则装置可以包含一个与门90耦接的电容器25。门90可以由行线30或可替换地列线40控制。
要执行多路传输功能，可以使用大量电压选择块，如果行线30控制门90，每个电压选择块耦接到列线40，或可替换地如果列线30控制门90，则每个电压选择块耦接到行线30。
因而本发明提供了用于控制具有多个象素的光调制器阵列的方法和装置。控制装置提供了大量分立模拟电压，从这些分立电压中选择一将被施加到每个象素的特定的模拟电压，并且将选定的模拟电压施加到每个选定的象素。上述装置还提供选定的模拟电压向每个象素的应用的选通。模拟电压的多路传输与光调制器阵列的行/列寻址集成。
工业实用性
本发明的方法和装置用于控制多种可模拟控制的MEMS器件阵列、光调制器阵列和光投影仪，如微反射镜、基于衍射的调制器或基于干涉的调制器，以及用于液晶(LCD)调制器的控制。
虽然前面已经描述并举例说明了本发明的具体实施例，但本领域的技术人员在不脱离本发明由所附的权利要求限定的实质和范围的前提下可以对本发明做各种改型和变化。例如，本领域的技术人员将会知道，行线和列线的作用可以与实施例中的相反。在此方法中，对阵列的每个象素提供大量分立电压，从该分立电压中选择将被施加到象素的电压，将选定的电压施加到象素的行线，并且通过选择象素的列线启动选定电压对象素的应用。
另外，本领域的技术人员将会知道，所述的电压控制也可以与常规的脉宽调制相结合，能够以所需数据速率的最小增长提高颜色分辨率。例如，如果使用两个模拟信号(如1V和2V)，并且使用两位脉宽数据(或四个可能的工作循环)，即可以实现八个强度水平。

Claims (10)

1.一种响应于输入信号控制MEMS器件阵列的方法，其中MEMS器件阵列的类型为具有用于选择阵列的特定MEMS器件的列线和行线，所述的方法包括步骤：
a)提供大量分立电压；和
b)响应于输入信号，从分立电压多路传输将被施加到阵列的每个MEMS器件的选定的分立电压；和
c)启动选定的分立电压向阵列的每个MEMS器件的施加。
2.如权利要求1所述的方法，其特征在于分立电压是模拟参考电压。
3.如权利要求1所述的方法，其特征在于阵列的每个MEMS器件包括光调制器的一象素单元。
4.一种响应于输入信号控制光调制器阵列的方法，其中光调制器阵列的类型为具有用于选择阵列的象素的列线和行线，所述的方法包括步骤：
a)提供大量分立模拟电压；和
b)响应于输入信号，从分立模拟电压多路传输将被施加到阵列的每个象素的选定的分立模拟电压；和
c)启动选定的分立模拟电压向阵列的每个象素的施加。
5.一种用于控制光调制器阵列的方法，其中光调制器阵列具有适于响应于模拟电压信号的象素调制元件，该方法包括步骤：
a)提供大量列线和大量行线，列线和行线的每种组合适于选择象素；
b)提供大量分立电压；和
对于阵列的每个象素，
c)从分立电压中选择将被施加到象素的电压；
d)将选定的电压施加到象素的列线；和
e)通过选择象素的行线启动选定的电压向象素的施加。
6.一种响应于输入信号控制光调制器阵列的装置，其中光调制器阵列的类型为具有用于选择阵列的象素的列线和行线，所述的装置包括：
a)大量分立电压源；
b)一多路传输器，响应于输入信号，从分立电压源多路传输将被施加到阵列的每个象素的选定的电压，多路传输器包括多个电压选择块，每个电压选择块耦合到一列线；和
c)多个门，用于启动选定的分立电压向阵列的每个象素的施加，每个门耦接到一行线。
7.一种响应于输入信号控制光调制器阵列的装置，其中光调制器阵列的类型为具有用于选择阵列的象素的列线和行线，所述的装置包括：
a)大量分立电压源；和
b)一多路传输器，响应于输入信号，从分立电压源多路传输将被施加到阵列的每个象素的选定的电压，多路传输器包括多个电压选择块，每个电压选择块耦合到一行线；和
c)多个门，启动选定的分立电压向阵列的每个象素的施加，每个门耦接到一列线。
8.一种用于具有多个MEMS器件的光调制器阵列的控制器，该控制器包括：
a)用于提供大量分立模拟电压的装置；
b)用于从分立电压中选择将被施加到每个MEMS器件的模拟电压的装置；和
c)用于将选定的模拟电压施加到每个MEMS器件的装置。
9.如权利要求8所述的控制器，还包括：
d)用于向每个MEMS器件选通施加选定的模拟电压的装置。
10.如权利要求8所述的控制器，其特征在于阵列的每个MEMS器件包括光调制器的象素单元。
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