CN1678940A - 用于调制光束并具有改进的伽玛响应的方法和装置 - Google Patents

用于调制光束并具有改进的伽玛响应的方法和装置 Download PDF

Info

Publication number
CN1678940A
CN1678940A CNA038201615A CN03820161A CN1678940A CN 1678940 A CN1678940 A CN 1678940A CN A038201615 A CNA038201615 A CN A038201615A CN 03820161 A CN03820161 A CN 03820161A CN 1678940 A CN1678940 A CN 1678940A
Authority
CN
China
Prior art keywords
plane
modulator
gamma
voltage
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CNA038201615A
Other languages
English (en)
Other versions
CN100380169C (zh
Inventor
D·T·阿姆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ECHELLE Inc
Silicon Light Machines Inc
Original Assignee
ECHELLE Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ECHELLE Inc filed Critical ECHELLE Inc
Publication of CN1678940A publication Critical patent/CN1678940A/zh
Application granted granted Critical
Publication of CN100380169C publication Critical patent/CN100380169C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1828—Diffraction gratings having means for producing variable diffraction

Abstract

公开了一种具有改进的可调伽玛响应的装置。所述装置包括：光调制器(20)，它具有多个彼此隔开的元件(32)，包括位于单一平面(15)的交错的有源和无源元件的；伽玛控制器；以及移位控制器。伽玛控制器将伽玛电压加到衬底(38)上，使多个彼此隔开的元件移动到偏置平面(16)，更靠近衬底。在反射方式下，多个彼此隔开的元件对入射光束起镜面作用。在衍射方式下，移位控制器将移位电压加到有源元件上。此时有源元件移动到与偏置平面平行的第二平面，使入射到光调制器上的光束被衍射。检测到的光信号的照度正比于上升至大约1.7 5和3之间的次幂的移位电压，即伽玛响应。

Description

用于调制光束并具有改进 的伽玛响应的方法和装置
发明领域
本发明涉及调制光束的方法和装置。更具体地说，本发明涉及机电偏置的光调制器，通过具有改进的伽玛响应更有效地调制光信号。
发明背景
对于光调制装置，外加信号(通常为电压)和结果输出照度之间的关系称为响应函数或转换函数。许多装置的这种响应函数近似于I＝kVγ的函数形式，其中I为输出照度，V为外加电压，k为根据具体装置所选择的任意常数，γ是决定调制器的响应的指数。这样，光调制器可以仅以其伽玛响应来表述。伽玛值为1表示其强度随外加信号呈线性变化的光调制器。在图像显示装置中使用这种装置时，很难提供在图像的最暗部分没有可观察到的颗粒性或可见”台阶”的图像。因此，对于显示器需要有较高的伽玛值。而且，通过使显示装置的伽玛与原来录制图像的方式(称为源伽玛或内容伽玛)相匹配，可以获得最好的图像再现。传统的图像源伽玛值的范围为2到3。
现需要的是一种具有在各种应用情况下可以被优化的可调伽玛响应的光调制器。
发明概述
本发明的实施例包括具有改进的可调伽玛响应的装置。所述装置包括光调制器，所述光调制器具有多个彼此隔开的元件、具有位于第一平面上的交错的有源元件和无源元件并包括伽玛控制器以及移动控制器。伽玛控制器将伽玛电压加到衬底上，形成静电场，所述静电场将彼此隔开的元件拉向与第一平面平行而且最好更靠近衬底的偏置平面。在反射方式下，多个彼此隔开的元件全部位于偏置平面中，照射到多个彼此隔开的元件上的光束基本上被反射，因此所述多个彼此隔开的元件起反射镜的作用。仅接收衍射光的低噪声光接收器(一阶接收器)将检测到具有基本上为零的照度的信号。在衍射方式下，移位控制器将移位电压加到有源元件上。对移位控制器作出响应，把有源元件移位到基本上与偏置平面平行且最好更靠近衬底的第二平面上，使得照射到光调制器上的光束基本上被衍射。此时一阶接收器将检测到具有非零照度的信号。检测到的信号的照度正比于升高到指数幂(称为伽玛响应)的移位电压。最好，伽玛响应在大约1.75和3.0之间。
附图简要说明
图1示意地示出代表性的光调制器。
图2示出图1的光调制器的横截面，在第一平面有细长元件。
图3示出图1的光调制器的横截面，其中，伽玛电压加到衬底上，使得细长元件移位到偏置平面上。
图4示出图1的光调制器的横截面、入射光束和反射光束R。
图5示出图1的光调制器的横截面、入射光束和衍射波前。
图6a是说明图1的光调制器的移位电压和有源元件的偏移之间的关系的曲线图。
图6b是说明图6a所示的偏移和一阶衍射照度I1之间的关系的曲线图。
图6c是说明图6a和图6b二者的卷积的曲线图，并且说明图1的光调制器的移动电压和结果照度之间的关系。
图7是说明当伽玛电压等于0伏、-1伏、-2伏和-3伏时图1的光调制器的移动电压和有源元件相对于偏置平面的偏移之间的关系的曲线图。
图8是上述图7的曲线图，其中图1的光调制器的移动电压和有源元件相对于偏置平面的偏移都是按照对数尺度绘制的。
图9是说明当伽玛电压等于0伏，-1伏，-2伏和-3伏时图1的光调制器的移动电压和归一化一阶衍射强度之间的关系的曲线图。
图10是上述图9的曲线图，其中图1的光调制器的移动电压和归一化一阶衍射强度都是按照对数尺度绘制的。
图11是说明光调制器的伽玛电压和伽玛之间的关系的曲线图。
实施例的详细说明
本发明的实施例包括光调制器，它调制光束并具有可调伽玛响应。在光调制器中，光照射到多个加长的彼此隔开的元件上。通过在交错的彼此隔开的元件上施加输入信号，例如移位电压，使有源元件选择性地变形(弯曲)，以致照射光或基本上被反射或基本上被衍射。当光束基本上被衍射时，仅接收一阶衍射光的低噪声光接收器(一阶接收器)，例如Schlieren光系统，将检测到具有非零照度I1的光，而当光束基本上被反射时，将检测到具有很小照度或无照度的光。用于在输入信号和照度I1之间转换关系的指数称为伽玛响应。将本发明应用于光调制器上就可提供具有可调伽玛响应的光调制器。这样，就可对移位电压和照度之间的关系作最佳调谐，以适应各种需求。
一阶接收器可以和许多利用调制光的装置或对光进行调制以便以光学方式传送信息的装置耦合。所述装置例如可以用于以下场合：高分辨率图像显示器，它利用调制光束照明投影显示器或计算机到平板(computer-to-plate)产品上的各像素；光开关，它在系统失效时利用调制光束将光数据路由到目的端口或冗余设备上；动态增益均衡器，它利用调制光束校正在光纤上传输的光信号功率的不平衡；以及动态可调滤波器，它利用调制光束滤除可变波长范围内的信号。
图1示意地示出按照本发明实施例的光调制器20。光调制器20最好包括由第一和第二支柱34和36悬挂在衬底38的上方的细长元件32。每个细长元件32包括导电和反射表面40。衬底38包括导体42。工作时，光调制器20起产生从反射方式或衍射方式选择的调制光的作用。
光调制器20包括细长元件32。细长元件32加工成互相平行并基本上位于第一平面上。每个细长元件32包括导电和反射表面40以及弹性材料44。衬底38包括导体42。
工作时，将伽玛电压加到衬底38的导体42上。如下所述，在加伽玛电压前，细长元件32基本上位于第一平面上。伽玛电压产生静电场，静电场使细长元件32弯曲，将细长元件32向衬底38移动。当施加伽玛电压时，细长元件32基本上平行于第一平面略微向衬底38移动，并且移动到偏置平面上方间隙长度G(图3)的位置。如下面更详细描述的，这种移动为光调制器20提供了改进的伽玛响应。
图2示出图1的光调制器20的横截面，此时未加伽玛电压到衬底38(即衬底38的导体42)上。图2显示细长元件32基本上位于第一平面15上。
图3示出图2的光调制器20的横截面，此衬底38上加有伽玛电压，细长元件32上加有零电压。图3示出细长元件32已移动了距离H，更靠近衬底38，移动到基本上与第一平面平行的第二(偏置)平面上。偏置平面16位于衬底38上方距离G处。图3中的距离G和H未按比例画出，而是为了便于说明而以放大的距离示出。实际上，距离H是距离G的一小部分。
图4示出反射方式下的光调制器20。在反射方式下，细长元件32的导电和反射表面40位于偏置平面上，所以入射光I从细长元件32上反射，产生反射光R。在图4中，将伽玛电压加到衬底上，零电压加到细长元件32上。
图5示出衍射方式下的光调制器20。在衍射方式下，移位电压使交错的细长元件32移出偏置平面16，移到更靠近导电38的第二平面17上。对移位电压作出响应移动到第二平面的这部分细长元件称为有源元件，其余的细长元件称为无源元件。将移位电压加到细长元件32的有源元件的反射和导电表面40上。移位电压在细长元件32的交错的有源元件和无源元件之间产生高度差，最好是大约入射光I的四分之一波长λ/4，以获得最大的衍射。四分之一波长的高度差产生的衍射光包括正1和负1衍射级D+1和D-1。这样，加到有源元件上的移位电压将使光调制器20从反射方式移到衍射方式。
应当指出，由于图4和5中入射光和反射光的周期性的缘故，有源元件和无源元件之间大约λ/4的任何奇数倍的高度差产生包括有正1和负1衍射级D+1和D-1的衍射光。在以下的讨论中，任何提到的λ/4高度包括λ/4的奇数倍的高度，任何提到的零高度包括λ/4的偶数倍的高度。
如上所述，图4和5分别示出反射方式和衍射方式的光调制器20。对于有源元件小于四分之一波长λ/4的偏移，入射光I既反射也衍射，产生反射光R和包括有正1和负1衍射级D+1和D-1的衍射光。换句话说，通过使有源元件的偏移小于四分之一波长λ/4，光调制器20就可产生可变的反射率。
对本专业的技术人员来说，显然导电和反射表面40可以用多层的介质反射体和导电元件来代替，其中导电元件埋置在每一个细长元件32之中。
虽然图1-5示出的光调制器20具有六个细长元件32，但光调制器20最好具有更多的细长元件32。通过设置两个以上的细长元件32，细长元件32能够起组的作用，所述组称为像素。最好每个像素是一组两个细长元件32。或者，每个像素是一组多个细长元件32。
本专业的技术人员容易明白，术语”像素”在此用作光调制器的一个元件，而非其更具体显示器的像素的定义。
光调制器在例如1994年5月10日授予Bloom等人的题目为”METHOD AND APPARATUS FOR MODULATING A LIGHT BEAM”的美国专利No.5,311,360中，以及1998年11月24日授予Bloom等人的题目为”FLAT DIFFRACTION GRATIONG LIGHT VALVE”的美国专利No.5,841,579中有进一步的说明，这两份专利均作为参考包括在本文内。
参考图6a-c可以更好地理解在图1的光调制器的细长元件32上加伽玛电压的好处。图6a是说明当衬底加有零电压时，加到有源元件上的电压V(移位电压)和有源元件向衬底38移动的距离d之间的关系的曲线图。图6a示出距离d相对于移位电压V大约为方程d∝V2的关系。图6a示出当移位电压V低于某个中间电压V0时，位移d几乎为零，而当移位电压V高于临界电压V1时位移d不成比例地增大。工作时，光调制器通常工作在小于V1的移位电压。
图6b示出d和相应的照度I1之间的关系图，例如照度I1是由仅接收一阶衍射光的低噪声光接收器(例如Schlieren光系统)检测到的照度。图6b示出照度按照公式I1∝sin2(2πd/λ)而改变，式中λ为入射光束的波长，d为有源元件和无源元件之间的距离。图6b尤其示出，对于等于或几乎等于零的小偏移d，相应的照度I1为零。
图6c示出图6a和图6b的曲线图的卷积，示出移位电压V和照度I1之间的关系。图6c示出对于小移位电压V，相应的照度I1就较小，而对于大移位电压V，相应的照度I1就大。对许多光调制器来说，这个关系可以用公式I1＝kVγ来表示，式中γ具有1和4之间的某个数值。图6c还示出对应于足以使有源元件偏离偏置平面而向衬底移动等于入射光束四分之一波长(λ/4)距离的电压的最大强度50。
通过在衬底38的导体42上加伽玛电压Vg＝-V0，图1的光调制器20就可在图6a中V＝V0右侧的那一部分工作。由于光调制器现在工作在图6c中V＝V0右侧的那一部分，即使很小但不同的移位电压将会产生独特的非零照度I1。这样，例如在图像显示装置中，很小但不同的输入信号(即移位电压)将产生独特的照度。这样，即使低照明的像素也将显示一些对比度。输入信号可以是例如二进制权重的电压，但应当指出，任何形式的输入信号都可以使用。
图6a中所示的外加电压V和偏移d之间的关系根据以下事实得出的：对于图1的光调制器，随着细长元件32和衬底38之间的距离减小，衬底38和细长元件32之间的电容增加。所以，当加上移位电压V，使细长元件32向衬底38的方向移动某一距离时，还需要一个更小的附加移位电压ΔV使细长元件32向衬底38移动一附加距离。
应当指出，是细长元件32和衬底38之间的电压差(V-Vg)产生了静电电位(在此为正电压差)，将有源元件32拉向第二平面，更靠近衬底38。伽玛电压可以是任何电压(正、负或零)，只要伽玛电压Vg和移位电压V之间的电压差(V-Vg)足以在细长元件32和衬底38之间产生静电场就可以。这样，例如在一个实施例中，伽玛电压Vg等于-5伏。加到细长元件上的电压和加到衬底上的电压之间的电压差(0伏-(-5)伏，或+5伏)就足以将细长元件32拉向偏置平面，更靠近衬底38。在此实施例中，移位电压V可以从零伏(将光调制器置于反射方式)到10伏(将光调制器置于衍射方式)。
在另一实施例中，伽玛电压Vg等于-3伏。加到细长元件上的电压和加到衬底上的电压之间的电压差(0伏-(-3)伏，或+3伏)足以将细长元件32拉向偏置平面，更靠近衬底38。所以，移位电压V可以从零伏(将光调制器置于反射方式)到12伏(将光调制器置于衍射方式)。
在又一实施例中，伽玛电压Vg等于0伏。可以将正电压V加到细长元件32上，以使细长元件32和衬底38之间的电压差(V(伏)-0伏，或+V(伏))足以产生能将细长元件32拉向偏置平面的静电电位，使之更靠近衬底38。这时光调制器处于反射方式。加到有源元件上的附加电压将有源元件拉向第二平面，更靠近衬底，将光调制器置于衍射方式。应当指出，在将伽玛电压或者加到衬底上或者加到细长元件上以产生电压差，将有源元件拉向偏置平面，最好更靠近衬底的情况下，本发明的实施例都可起作用。
应当指出，上述实施例中的光调制器起三端装置的作用，在有源元件和衬底之间产生静电电位，在无源元件和衬底之间也产生静电电位。
当衬底38上方第二平面的高度大于偏置平面和衬底38之间的间隙距离G的2/3时，图1所示的光调制器20工作最有效。当衬底38上方第二平面的高度小于(2/3)G时，有源元件会碰撞公共平面38，不可修复地损坏光调制器。使有源元件向第二平面移动大约为衬底38上(2/3)G距离的移位电压称为Vsnap，也称为开关电压。在本发明的一个实施例中，第二平面在衬底上方的高度大约为(3/4)G。应当指出，增加间隙距离G会增加Vsnap，因而可降低损坏的可能性。
按照本发明的实施例还提供一种具有可调伽玛响应的光调制器，方法是在衬底38上加一定范围的伽玛电压。图7-10中图解说明可以轻易地这样做，以下将描述图7-10。复习一下用于产生图7-10中描绘的曲线图的方程会有所帮助。
通常，细长元件32中有源元件的偏移与移位电压V、伽玛电压Vg、间隙长度G以及元件拉向衬底的电压Vsnap有关，经验导出的表达式如方程(1)所示：
d(V)＝0.4G[{1-((V-Vg)/Vsnap)2}0.444-1]           (1)
照度I1随移位电压V、方程(1)中描述的函数d(V)、Vg和λ(入射光束的波长)而改变，如方程(2)所示：
I1(V)＝[sin{(2π/λ)(d(V-Vg)-d(0-Vg))}2      (2)
在方程(2)中，表达式d(V-Vg)指衍射方式下有源元件的总偏移，即到偏置平面的偏移加上偏移距离λ/4。表达式d(0-Vg)指无源元件从第一平面到偏置平面的偏移，即图3所示的距离H。
图7-10是对于光调制器20、利用方程(1)和(2)而产生的，用于图形说明光调制器的伽玛如何随伽玛电压Vg而变化。图7中有四条曲线，曲线100-103，各自表示移位电压V(伏)和加有移位电压的细长元件距偏置平面的相应位移(以纳米计)之间的关系。
在图7中，曲线100说明当伽玛电压Vg＝0伏时移位电压V和有源元件距偏置平面的位移d之间的关系。曲线101说明当伽玛电压Vg＝-1伏时移位电压V和有源元件距偏置平面的位移d之间的关系。曲线102说明当伽玛电压Vg＝-2伏时移位电压V和有源元件距偏置平面的位移d之间的关系。曲线103说明当伽玛电压Vg＝-3伏时移位电压V和有源元件距偏置平面的位移d之间的关系。
曲线100-103说明：通过降低伽玛电压Vg，给定的移位电压将会有相应较大的位移d。例如，当伽玛电压Vg＝0时(对应于曲线100)，移位电压V＝V0产生的偏移等于0。曲线100在此点的斜率为零。当伽玛电压Vg降到-3伏时(对应于曲线103)，移位电压V＝V0具有非零数值。曲线103在此点的斜率为正。随着伽玛电压进一步降低，偏置平面上的细长元件更靠近衬底，移位电压V与细长元件的位移d的关系曲线的斜率增加。即：小的移位电压可以产生相当大的位移d。如下所述，这又可产生伽玛数值下降的光调制。
图8示出曲线110-113，它们各自表示移位电压V(伏)和有源元件距偏置平面的位移d(以纳米计)之间的关系，如图7所示。曲线110-113分别与图7的曲线100-103的区别在于曲线110-113是以对数尺度绘制各轴线的。曲线110说明当伽玛电压Vg＝0伏时移位电压V和有源元件距偏置平面的位移d之间的关系，二者均用对数尺度绘制。曲线111说明当伽玛电压Vg＝-1伏时移位电压V和有源元件距偏置平面的位移d之间的关系，二者均用对数尺度绘制。曲线112说明当伽玛电压Vg＝-2伏时移位电压V和有源元件距偏置平面的位移d之间的关系，二者均用对数尺度绘制。曲线113说明当伽玛电压Vg＝-3伏时移位电压V和有源元件距偏置平面的位移d之间的关系，二者均用对数尺度绘制。
图9示出曲线120-123，它们表示图1的光调制器在各种伽玛电压下移位电压V和相应的归一化一阶衍射强度I1之间的关系。曲线120示出当伽玛电压Vg＝0伏时移位电压V和相应的一阶照度I1之间的关系。代表对应于入射光束四分之一波长偏移的最大强度的点，由于处于图9所示的范围之外，故未示出。
曲线121说明当伽玛电压Vg＝-1伏时移位电压V和相应的一阶照度I1之间的关系。点121a代表最大强度，对应于入射光束四分之一波长的偏移。
曲线122说明当伽玛电压Vg＝-2伏时移位电压V和相应的一阶照度I1之间的关系。点122a代表最大强度，对应于入射光束四分之一波长的偏移。
曲线123说明当伽玛电压Vg＝-3伏时移位电压V和相应的一阶照度I1之间的关系。点123a代表最大强度，对应于入射光束四分之一波长的偏移。曲线120-123说明：通过降低伽玛电压Vg(从而将细长元件拉向偏置平面，更靠近衬底)，给定的移位电压将会产生较大的照度。图10中进一步说明这种关系。
图10示出曲线130-133，它们图解说明图1的光调制器在各种伽玛电压下移位电压V和相应的归一化一阶衍射强度I1之间的关系。曲线130-133分别与图9的曲线120-123的区别在于曲线130-133是以对数尺度绘制各轴线的。曲线130-133各自的斜率以方程(3)表示：
γ＝logI1/logV            (3)
方程(3)定义了移位电压V和相应的归一化一阶衍射强度I1之间的关系，它定义了光调制器的伽玛。
曲线130说明当伽玛电压Vg＝0伏时移位电压V的对数和一阶衍射强度I1的对数之间的关系。所述曲线的斜率(因此伽玛响应)大约为4。曲线131说明当伽玛电压Vg＝-1伏时移位电压V的对数和一阶衍射强度I1的对数之间的关系。所述曲线的斜率(因此伽玛响应)大约为3.1。曲线132说明当伽玛电压Vg＝-2伏时移位电压V的对数和一阶衍射强度I1的对数之间的关系。所述曲线的斜率(因此伽玛响应)大约为2.7。曲线133说明当伽玛电压Vg＝-3伏时移位电压V的对数和一阶衍射强度I1的对数之间的关系。所述曲线的斜率(因此伽玛响应)大约为2.5。曲线130-133说明：通过改变光调制器的伽玛电压Vg，可以调谐转换关系以及伽玛响应。
图11描绘把光调制器的伽玛电压Vg和相应的伽玛响应值(γ)绘制成曲线的曲线图。图11的曲线采用正移位电压。但是应当指出，其它电压也可使用，因为光调制器使用电压差而非绝对电压来工作。图11说明可以通过改变图1的光调制器的伽玛电压，将伽玛响应调谐到各种数值。
伽玛响应可调谐的光调制器具有许多应用。例如，为具有第一伽玛响应的第一装置产生的图像可以在调谐成具有第一伽玛响应的第二装置上显示。因此，可以把在第二装置上产生的结果图像调谐成如同在第一装置上显示的一样，或者调谐成具有任何形式的对比度图像。应当指出，伽玛响应可调谐的光调制器在利用调制光的产品中可具有其它用途。
对本专业的技术人员来说，显然可以对实施例作出各种其它的改动，而不背离由所附权利要求书所定义的本发明的精神和范围。

Claims (20)

1.一种用于调制入射光束的调制器，它包括：
多个细长的彼此隔开的元件，它们加工成彼此平行并且基本上位于第一平面内，其中交错的元件处在第一部分，而其余元件处在第二部分；
伽玛控制器，用于将所述多个细长的彼此隔开的元件移动到偏置平面，其中所述偏置平面平行于所述第一平面；以及
移位控制器，用于将所述彼此隔开的元件的所述第一部分移动到所述偏置平面，以反射所述入射光束，以及将所述彼此隔开的元件的所述第一部分移动到与所述偏置平面平行的第二平面，以衍射所述入射光束。
2.如权利要求1所述的调制器，其中所述细长的彼此隔开的元件安装在衬底上方。
3.如权利要求1所述的调制器，其中按照所述入射光束的大约四分之一波长的奇数倍移动所述偏置平面和所述第二平面。
4.如权利要求2所述的调制器，其中所述移位控制器使所述彼此隔开的元件的所述第一部分向所述衬底弯曲。
5.如权利要求2所述的调制器，其中从所述第二平面到所述衬底的距离大于从所述第一平面到所述衬底的距离的大约2/3。
6.如权利要求1所述的调制器，其中激励所述伽玛控制器以便移动所述多个彼此隔开的元件的操作改进了所述调制器的伽玛响应。
7.如权利要求6所述的调制器，其中所述伽玛响应改进到大约1.75到大约3的范围。
8.如权利要求1所述的调制器，其中所述伽玛控制器包括第一电压信号。
9.如权利要求1所述的调制器，其中所述移位控制器包括第二电压信号。
10.一种用于调制入射光束的方法，所述方法包括：
偏置所述多个细长的、彼此隔开的加工成彼此平行的元件，使之基本上位于偏置平面内；以及
将所述彼此隔开的元件的第一部分移动到所述偏置平面，以便反射所述入射光束，并且将所述彼此隔开的元件的第一部分移动到第二平面，以便衍射所述入射光束。
11.如权利要求10所述的方法，其中按照所述入射光束的大约四分之一波长的奇数倍移动所述偏置平面和所述第二平面。
12.如权利要求10所述的方法，其中还包括将所述多个细长的彼此隔开的元件安装在衬底上方的步骤。
13.如权利要求12所述的方法，其中所述偏置步骤包括在所述多个细长的彼此隔开的元件和所述衬底之间加第一电压。
14.如权利要求10所述的方法，其中所述移动步骤包括在所述彼此隔开的元件的所述第一部分和所述衬底之间加第二电压。
15.如权利要求10所述的方法，其中偏置所述多个细长的彼此隔开的元件的操作改进了所述调制器的伽玛响应。
16.如权利要求15所述的方法，其中所述伽玛响应改进到大约1.75到大约3的范围。
17.如权利要求14所述的方法，其中从所述第二平面到所述衬底的距离大于从所述第一平面到所述衬底的距离的大约2/3。
18.一种用于调制入射光束的调制器，它包括：
用于对具有第一转换关系的输入信号作出响应而选择性地反射或衍射所述入射光束的装置，所述第一转换关系是所述输入信号的函数；以及
用于这样偏置所述调制器，使得所述调制器被偏置之后具有第二转换关系的装置。
19.如权利要求18所述的调制器，其中所述入射光束和所述衍射入射光束之间的所述第二转换关系是指数关系，所述指数的幂在大约1.75和3之间。
20.如权利要求19所述的调制器，其中所述第一转换关系和所述第二转换关系是所述调制器的伽玛响应的函数。
CNB038201615A 2002-06-28 2003-05-14 用于调制光束并具有改进的伽玛响应的方法和装置 Expired - Fee Related CN100380169C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/187,137 US6714337B1 (en) 2002-06-28 2002-06-28 Method and device for modulating a light beam and having an improved gamma response
US10/187,137 2002-06-28

Publications (2)

Publication Number Publication Date
CN1678940A true CN1678940A (zh) 2005-10-05
CN100380169C CN100380169C (zh) 2008-04-09

Family

ID=29999347

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB038201615A Expired - Fee Related CN100380169C (zh) 2002-06-28 2003-05-14 用于调制光束并具有改进的伽玛响应的方法和装置

Country Status (6)

Country Link
US (1) US6714337B1 (zh)
EP (1) EP1540405A4 (zh)
JP (1) JP2005531808A (zh)
CN (1) CN100380169C (zh)
AU (1) AU2003229297A1 (zh)
WO (1) WO2004003624A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107561685A (zh) * 2017-09-30 2018-01-09 广东欧珀移动通信有限公司 滤光片、镜头模组和成像模组

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6184969B1 (en) * 1994-10-25 2001-02-06 James L. Fergason Optical display system and method, active and passive dithering using birefringence, color image superpositioning and display enhancement
US6844960B2 (en) * 2002-09-24 2005-01-18 Eastman Kodak Company Microelectromechanical device with continuously variable displacement
US7042611B1 (en) * 2003-03-03 2006-05-09 Silicon Light Machines Corporation Pre-deflected bias ribbons
US8243004B2 (en) 2003-03-10 2012-08-14 Fergason Patent Properties, Llc Apparatus and method for preparing, storing, transmitting and displaying images
KR100879054B1 (ko) 2005-11-03 2009-01-15 삼성전기주식회사 감마 조정이 가능한 스캐닝 컬러 디스플레이 장치, 컬러영상 제어 방법 및 컬러 영상 제어 기록 매체
KR100892068B1 (ko) * 2005-11-03 2009-04-06 삼성전기주식회사 감마 조정이 가능한 스캐닝 컬러 디스플레이 장치, 컬러영상 제어 방법 및 컬러 영상 제어 기록 매체
US7355714B2 (en) * 2005-12-29 2008-04-08 Xerox Corporation Reconfigurable MEMS fabry-perot tunable matrix filter systems and methods

Family Cites Families (633)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE16757E (en) 1922-10-31 1927-10-04 knight
US1548262A (en) 1924-07-02 1925-08-04 Freedman Albert Manufacture of bicolored spectacles
US1814701A (en) 1930-05-31 1931-07-14 Perser Corp Method of making viewing gratings for relief or stereoscopic pictures
US2415226A (en) 1943-11-29 1947-02-04 Rca Corp Method of and apparatus for producing luminous images
US2920529A (en) 1952-05-23 1960-01-12 Blythe Richard Electronic control of optical and near-optical radiation
US2783406A (en) 1954-02-09 1957-02-26 John J Vanderhooft Stereoscopic television means
US2991490A (en) 1959-01-06 1961-07-11 Pirone Nicholas Portable threading die support and pipe support stand
US3256565A (en) 1962-12-31 1966-06-21 Formex Mfg Inc Vacuum forming apparatus
US3388301A (en) 1964-12-09 1968-06-11 Signetics Corp Multichip integrated circuit assembly with interconnection structure
US3443871A (en) 1965-12-07 1969-05-13 Optomechanisms Inc Single optical block interferometer means
US3553364A (en) 1968-03-15 1971-01-05 Texas Instruments Inc Electromechanical light valve
US3576394A (en) 1968-07-03 1971-04-27 Texas Instruments Inc Apparatus for display duration modulation
US3600798A (en) 1969-02-25 1971-08-24 Texas Instruments Inc Process for fabricating a panel array of electromechanical light valves
US3792916A (en) 1969-02-25 1974-02-19 Us Army Anti-laser optical filter assembly
JPS4831507B1 (zh) 1969-07-10 1973-09-29
US3693239A (en) 1969-07-25 1972-09-26 Sidney Dix A method of making a micromodular package
US3871014A (en) 1969-08-14 1975-03-11 Ibm Flip chip module with non-uniform solder wettable areas on the substrate
BE757764A (fr) 1969-10-21 1971-04-21 Itt Systeme d'exploration a l'etat solide
US3743507A (en) 1970-10-23 1973-07-03 Rca Corp Recording of a continuous tone focused image on a diffraction grating
US3752563A (en) 1971-09-01 1973-08-14 Sperry Rand Corp Magnetic film stripe domain diffraction
US3942245A (en) 1971-11-20 1976-03-09 Ferranti Limited Related to the manufacture of lead frames and the mounting of semiconductor devices thereon
US3781465A (en) 1972-03-08 1973-12-25 Hughes Aircraft Co Field sequential color television systems
US3783184A (en) 1972-03-08 1974-01-01 Hughes Aircraft Co Electronically switched field sequential color television
US3802769A (en) 1972-08-28 1974-04-09 Harris Intertype Corp Method and apparatus for unaided stereo viewing
US3811186A (en) 1972-12-11 1974-05-21 Ibm Method of aligning and attaching circuit devices on a substrate
DE2315658C3 (de) 1973-03-29 1980-11-20 Philips Patentverwaltung Gmbh, 2000 Hamburg Verfahren und Vorrichtung zur Verminderung oder Beseitigung der bei Laserstrahlprojektionen auftretenden Granulation
US3862360A (en) 1973-04-18 1975-01-21 Hughes Aircraft Co Liquid crystal display system with integrated signal storage circuitry
US4103273A (en) 1973-04-26 1978-07-25 Honeywell Inc. Method for batch fabricating semiconductor devices
US3915548A (en) 1973-04-30 1975-10-28 Hughes Aircraft Co Holographic lens and liquid crystal image source for head-up display
US3861784A (en) 1973-06-29 1975-01-21 Sperry Rand Corp Programmable diffraction grating
US4093346A (en) 1973-07-13 1978-06-06 Minolta Camera Kabushiki Kaisha Optical low pass filter
US3886310A (en) 1973-08-22 1975-05-27 Westinghouse Electric Corp Electrostatically deflectable light valve with improved diffraction properties
US3947105A (en) 1973-09-21 1976-03-30 Technical Operations, Incorporated Production of colored designs
US3896338A (en) 1973-11-01 1975-07-22 Westinghouse Electric Corp Color video display system comprising electrostatically deflectable light valves
US3969611A (en) 1973-12-26 1976-07-13 Texas Instruments Incorporated Thermocouple circuit
US3943281A (en) 1974-03-08 1976-03-09 Hughes Aircraft Company Multiple beam CRT for generating a multiple raster display
JPS5742849B2 (zh) 1974-06-05 1982-09-10
US4001663A (en) 1974-09-03 1977-01-04 Texas Instruments Incorporated Switching regulator power supply
US4012835A (en) 1974-09-17 1977-03-22 E. I. Du Pont De Nemours And Co. Method of forming a dual in-line package
US4100579A (en) 1974-09-24 1978-07-11 Hughes Aircraft Company AC Operated flat panel liquid crystal display
US3938881A (en) 1974-11-25 1976-02-17 Xerox Corporation Acousto-optic modulation device
US4020381A (en) 1974-12-09 1977-04-26 Texas Instruments Incorporated Cathode structure for a multibeam cathode ray tube
US4090219A (en) 1974-12-09 1978-05-16 Hughes Aircraft Company Liquid crystal sequential color display
US3935500A (en) 1974-12-09 1976-01-27 Texas Instruments Incorporated Flat CRT system
US3935499A (en) 1975-01-03 1976-01-27 Texas Instruments Incorporated Monolythic staggered mesh deflection systems for use in flat matrix CRT's
US3980476A (en) 1975-01-27 1976-09-14 Xerox Corporation Imaging system
US4017158A (en) 1975-03-17 1977-04-12 E. I. Du Pont De Nemours And Company Spatial frequency carrier and process of preparing same
US4006968A (en) 1975-05-02 1977-02-08 Hughes Aircraft Company Liquid crystal dot color display
US4011009A (en) 1975-05-27 1977-03-08 Xerox Corporation Reflection diffraction grating having a controllable blaze angle
US4012116A (en) 1975-05-30 1977-03-15 Personal Communications, Inc. No glasses 3-D viewer
US4034211A (en) 1975-06-20 1977-07-05 Ncr Corporation System and method for providing a security check on a credit card
US4035068A (en) 1975-06-25 1977-07-12 Xerox Corporation Speckle minimization in projection displays by reducing spatial coherence of the image light
US4021766A (en) 1975-07-28 1977-05-03 Aine Harry E Solid state pressure transducer of the leaf spring type and batch method of making same
US3991416A (en) 1975-09-18 1976-11-09 Hughes Aircraft Company AC biased and resonated liquid crystal display
US4084437A (en) 1975-11-07 1978-04-18 Texas Instruments Incorporated Thermocouple circuit
US4184700A (en) 1975-11-17 1980-01-22 Lgz Landis & Gyr Zug Ag Documents embossed with optical markings representing genuineness information
CH595664A5 (zh) 1975-11-17 1978-02-15 Landis & Gyr Ag
US4127322A (en) 1975-12-05 1978-11-28 Hughes Aircraft Company High brightness full color image light valve projection system
US4004849A (en) 1975-12-08 1977-01-25 International Business Machines Corporation Display apparatus and process
US4034399A (en) 1976-02-27 1977-07-05 Rca Corporation Interconnection means for an array of majority carrier microwave devices
CH594495A5 (zh) 1976-05-04 1978-01-13 Landis & Gyr Ag
JPS5321771A (en) 1976-08-11 1978-02-28 Sharp Kk Electronic parts mounting structure
US4135502A (en) 1976-09-07 1979-01-23 Donald Peck Stereoscopic patterns and method of making same
US4139257A (en) 1976-09-28 1979-02-13 Canon Kabushiki Kaisha Synchronizing signal generator
US4067129A (en) 1976-10-28 1978-01-10 Trans-World Manufacturing Corporation Display apparatus having means for creating a spectral color effect
CH604279A5 (zh) 1976-12-21 1978-08-31 Landis & Gyr Ag
US4143943A (en) 1977-02-17 1979-03-13 Xerox Corporation Rear projection screen system
US4093922A (en) 1977-03-17 1978-06-06 Texas Instruments Incorporated Microcomputer processing approach for a non-volatile TV station memory tuning system
US4093921A (en) 1977-03-17 1978-06-06 Texas Instruments Incorporated Microcomputer processing approach for a non-volatile TV station memory tuning system
CH616253A5 (zh) 1977-06-21 1980-03-14 Landis & Gyr Ag
US4126380A (en) 1977-06-30 1978-11-21 International Business Machines Corporation Probe with contact indicating means
US4185891A (en) 1977-11-30 1980-01-29 Grumman Aerospace Corporation Laser diode collimation optics
US4389096A (en) 1977-12-27 1983-06-21 Matsushita Electric Industrial Co., Ltd. Image display apparatus of liquid crystal valve projection type
US4205428A (en) 1978-02-23 1980-06-03 The United States Of America As Represented By The Secretary Of The Air Force Planar liquid crystal matrix array chip
CH622896A5 (zh) 1978-03-20 1981-04-30 Landis & Gyr Ag
US4256787A (en) 1978-05-03 1981-03-17 Massachusetts Institute Of Technology Orientation of ordered liquids and their use in devices
US4195915A (en) 1978-05-05 1980-04-01 Hughes Aircraft Company Liquid crystal image projector system
US4225913A (en) 1978-09-19 1980-09-30 Texas Instruments Incorporated Self-referencing power converter
US4331972A (en) 1978-11-09 1982-05-25 Rajchman Jan A Light valve, light valve display, and method
US4295145A (en) 1978-12-29 1981-10-13 International Business Machines Corporation Acousto-optically modulated laser scanning arrangement for correcting for interference appearing therein
US4257016A (en) 1979-02-21 1981-03-17 Xerox Corporation Piezo-optic, total internal reflection modulator
US4338660A (en) 1979-04-13 1982-07-06 Relational Memory Systems, Inc. Relational break signal generating device
US4249796A (en) 1979-06-21 1981-02-10 International Business Machines Corporation Projection display device
US4290672A (en) 1979-06-29 1981-09-22 International Business Machines Corporation Plural line acousto-optically modulated laser scanning system
US4343535A (en) 1979-12-14 1982-08-10 Hughes Aircraft Company Liquid crystal light valve
DE3001613C2 (de) 1980-01-17 1986-04-03 Siemens AG, 1000 Berlin und 8000 München Befestigung eines, eine monolithisch integrierte Halbleiterschaltung enthaltenden Halbleiterkörpers aus Silicium an einer Unterlage mit einem entsprechenden Verfahren hierzu
US4311999A (en) 1980-02-07 1982-01-19 Textron, Inc. Vibratory scan optical display
US4327966A (en) 1980-02-25 1982-05-04 Bell Telephone Laboratories, Incorporated Variable attenuator for laser radiation
US4327411A (en) 1980-03-04 1982-04-27 Bell Telephone Laboratories, Incorporated High capacity elastic store having continuously variable delay
US4355463A (en) 1980-03-24 1982-10-26 National Semiconductor Corporation Process for hermetically encapsulating semiconductor devices
US4348079A (en) 1980-04-08 1982-09-07 Xerox Corporation Acousto-optic device utilizing Fresnel zone plate electrode array
US4346965A (en) 1980-05-27 1982-08-31 Xerox Corporation Light modulator/deflector using acoustic surface waves
US4454591A (en) 1980-05-29 1984-06-12 Texas Instruments Incorporated Interface system for bus line control
US4430584A (en) 1980-05-29 1984-02-07 Texas Instruments Incorporated Modular input/output system
US4447881A (en) 1980-05-29 1984-05-08 Texas Instruments Incorporated Data processing system integrated circuit having modular memory add-on capacity
US4418397A (en) 1980-05-29 1983-11-29 Texas Instruments Incorporated Address decode system
US4443845A (en) 1980-06-26 1984-04-17 Texas Instruments Incorporated Memory system having a common interface
US4503494A (en) 1980-06-26 1985-03-05 Texas Instruments Incorporated Non-volatile memory system
US4361384A (en) 1980-06-27 1982-11-30 The United States Of America As Represented By The Secretary Of The Army High luminance miniature display
US4336982A (en) 1980-08-04 1982-06-29 Xerox Corporation MgF2 Coating for promoting adherence of thin films to single crystal materials
US4396246A (en) 1980-10-02 1983-08-02 Xerox Corporation Integrated electro-optic wave guide modulator
US4420717A (en) 1980-10-06 1983-12-13 Texas Instruments Incorporated Use of motor winding as integrator to generate sawtooth for switch mode current regulator
US4594501A (en) 1980-10-09 1986-06-10 Texas Instruments Incorporated Pulse width modulation of printhead voltage
US4369524A (en) 1980-10-14 1983-01-18 Xerox Corporation Single component transceiver device for linear fiber optical network
US4398798A (en) 1980-12-18 1983-08-16 Sperry Corporation Image rotating diffraction grating
JPS57122981U (zh) 1981-01-27 1982-07-31
US4456338A (en) 1981-03-05 1984-06-26 Macdonald Dettwiler & Associates Ltd. Electronically tuneable light source
US4440839A (en) 1981-03-18 1984-04-03 United Technologies Corporation Method of forming laser diffraction grating for beam sampling device
US4391490A (en) 1981-04-02 1983-07-05 Xerox Corporation Interface for proximity coupled electro-optic devices
US4374397A (en) 1981-06-01 1983-02-15 Eastman Kodak Company Light valve devices and electronic imaging/scan apparatus with locationally-interlaced optical addressing
US4408884A (en) 1981-06-29 1983-10-11 Rca Corporation Optical measurements of fine line parameters in integrated circuit processes
US4400740A (en) 1981-08-24 1983-08-23 Xerox Corporation Intensity control for raster output scanners
US4414583A (en) 1981-11-02 1983-11-08 International Business Machines Corporation Scanned light beam imaging method and apparatus
US4571603A (en) 1981-11-03 1986-02-18 Texas Instruments Incorporated Deformable mirror electrostatic printer
US4426768A (en) 1981-12-28 1984-01-24 United Technologies Corporation Ultra-thin microelectronic pressure sensors
US4571041A (en) 1982-01-22 1986-02-18 Gaudyn Tad J Three dimensional projection arrangement
US4422099A (en) 1982-02-03 1983-12-20 International Business Machines Corporation Optical communication on variable power beam
US4483596A (en) 1982-03-01 1984-11-20 Xerox Corporation Interface suppression apparatus and method for a linear modulator
US4484188A (en) 1982-04-23 1984-11-20 Texas Instruments Incorporated Graphics video resolution improvement apparatus
US4435041A (en) 1982-05-28 1984-03-06 Sperry Corporation Chromatic aberration correction in a multiwavelength light beam deflection system
US4588957A (en) 1982-06-09 1986-05-13 International Business Machines Corporation Optical pulse compression apparatus and method
US4460907A (en) 1982-06-15 1984-07-17 Minnesota Mining And Manufacturing Company Electrographic imaging apparatus
US4468725A (en) 1982-06-18 1984-08-28 Texas Instruments Incorporated Direct AC converter for converting a balanced AC polyphase input to an output voltage
US4492435A (en) 1982-07-02 1985-01-08 Xerox Corporation Multiple array full width electro mechanical modulator
US4462046A (en) 1982-07-02 1984-07-24 Amaf Industries Incorporated Machine vision system utilizing programmable optical parallel processing
US4467342A (en) 1982-07-15 1984-08-21 Rca Corporation Multi-chip imager
US4511220A (en) 1982-12-23 1985-04-16 The United States Of America As Represented By The Secretary Of The Air Force Laser target speckle eliminator
JPS59117876A (ja) 1982-12-24 1984-07-07 Seiko Epson Corp パ−ソナル液晶映像表示器
JPS602073A (ja) 1983-04-06 1985-01-08 テキサス・インスツルメンツ・インコ−ポレイテツド 交流変換装置及び方法
US4487677A (en) 1983-04-11 1984-12-11 Metals Production Research, Inc. Electrolytic recovery system for obtaining titanium metal from its ore
US4724467A (en) 1983-04-11 1988-02-09 Xerox Corporation Light blocking stop for electro-optic line printers
US4655539A (en) 1983-04-18 1987-04-07 Aerodyne Products Corporation Hologram writing apparatus and method
US4538883A (en) 1983-05-26 1985-09-03 Xerox Corporation Conformable electrodes for proximity coupled electro-optic devices
JPS603164A (ja) 1983-06-21 1985-01-09 Sanyo Electric Co Ltd 光起電力装置の製造方法
CH661683A5 (de) 1983-09-19 1987-08-14 Landis & Gyr Ag Einrichtung zum praegen von reliefmustern hoher aufloesung.
US4561044A (en) 1983-09-22 1985-12-24 Citizen Watch Co., Ltd. Lighting device for a display panel of an electronic device
US4809078A (en) 1983-10-05 1989-02-28 Casio Computer Co., Ltd. Liquid crystal television receiver
FR2553893B1 (fr) 1983-10-19 1986-02-07 Texas Instruments France Procede et dispositif de detection d'une transition de la composante continue d'un signal periodique, notamment pour joncteur telephonique
US4567585A (en) 1983-10-31 1986-01-28 Daniel Gelbart Optical tape recorder using linear scanning
US4545610A (en) 1983-11-25 1985-10-08 International Business Machines Corporation Method for forming elongated solder connections between a semiconductor device and a supporting substrate
US4577933A (en) 1983-12-15 1986-03-25 Xerox Corporation Gap modulator for high speed scanners
JPS60127888A (ja) 1983-12-15 1985-07-08 Citizen Watch Co Ltd 液晶表示装置
JPS60158780A (ja) 1984-01-27 1985-08-20 Sony Corp 表示装置
JPS60185918A (ja) 1984-03-05 1985-09-21 Canon Inc 光変調方法
JPS60214684A (ja) 1984-04-10 1985-10-26 Citizen Watch Co Ltd 液晶テレビ装置
US4577932A (en) 1984-05-08 1986-03-25 Creo Electronics Corporation Multi-spot modulator using a laser diode
US4797918A (en) 1984-05-09 1989-01-10 Communications Satellite Corporation Subscription control for television programming
CH664030A5 (de) 1984-07-06 1988-01-29 Landis & Gyr Ag Verfahren zur erzeugung eines makroskopischen flaechenmusters mit einer mikroskopischen struktur, insbesondere einer beugungsoptisch wirksamen struktur.
US4566935A (en) 1984-07-31 1986-01-28 Texas Instruments Incorporated Spatial light modulator and method
US4710732A (en) 1984-07-31 1987-12-01 Texas Instruments Incorporated Spatial light modulator and method
US4709995A (en) 1984-08-18 1987-12-01 Canon Kabushiki Kaisha Ferroelectric display panel and driving method therefor to achieve gray scale
US4649085A (en) 1984-08-29 1987-03-10 The United States Of America As Represented By The Secretary Of The Air Force Cryogenic glass-to-metal seal
US4596992A (en) 1984-08-31 1986-06-24 Texas Instruments Incorporated Linear spatial light modulator and printer
US4662746A (en) 1985-10-30 1987-05-05 Texas Instruments Incorporated Spatial light modulator and method
US5061049A (en) 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method
US5096279A (en) 1984-08-31 1992-03-17 Texas Instruments Incorporated Spatial light modulator and method
JPS6188676A (ja) 1984-10-05 1986-05-06 Citizen Watch Co Ltd 液晶テレビ装置
US4615595A (en) 1984-10-10 1986-10-07 Texas Instruments Incorporated Frame addressed spatial light modulator
US4558171A (en) 1984-10-12 1985-12-10 General Electric Company Hermetic enclosure for electronic components with an optionally transparent cover and a method of making the same
US5281957A (en) 1984-11-14 1994-01-25 Schoolman Scientific Corp. Portable computer and head mounted display
US4641193A (en) 1984-12-07 1987-02-03 New York Institute Of Technology Video display apparatus and method
JPH0752762B2 (ja) 1985-01-07 1995-06-05 株式会社日立製作所 半導体樹脂パッケージ
US4772094A (en) 1985-02-05 1988-09-20 Bright And Morning Star Optical stereoscopic system and prism window
DE3605516A1 (de) 1985-02-21 1986-09-04 Canon K.K., Tokio/Tokyo Optisches funktionselement sowie optische funktionsvorrichtung
US4660938A (en) 1985-03-11 1987-04-28 Xerox Corporation Optical display device
US4661828A (en) 1985-03-20 1987-04-28 Miller Jr Verelyn A Optical imaging head
US4866488A (en) 1985-03-29 1989-09-12 Texas Instruments Incorporated Ballistic transport filter and device
US4636039A (en) 1985-04-12 1987-01-13 Xerox Corporation Nonuniformity of fringe field correction for electro-optic devices
US4623219A (en) 1985-04-15 1986-11-18 The United States Of America As Represented By The Secretary Of The Navy Real-time high-resolution 3-D large-screen display using laser-activated liquid crystal light valves
US4719507A (en) 1985-04-26 1988-01-12 Tektronix, Inc. Stereoscopic imaging system with passive viewing apparatus
US4751509A (en) 1985-06-04 1988-06-14 Nec Corporation Light valve for use in a color display unit with a diffraction grating assembly included in the valve
US4728185A (en) 1985-07-03 1988-03-01 Texas Instruments Incorporated Imaging system
US4836649A (en) 1985-07-12 1989-06-06 Hughes Aircraft Company Optical layout for a three light valve full-color projector employing a dual relay lens system and a single projection lens
CA1250170A (en) 1985-07-16 1989-02-21 Jerzy A. Dobrowolski Optical mixing/demixing device
JPH0535388Y2 (zh) 1985-07-29 1993-09-08
US5299037A (en) 1985-08-07 1994-03-29 Canon Kabushiki Kaisha Diffraction grating type liquid crystal display device in viewfinder
EP0220404B1 (de) 1985-09-30 1991-02-06 Siemens Aktiengesellschaft Verfahren zur Begrenzung von Ausbrüchen beim Sägen einer Halbleiterscheibe
US4698602A (en) 1985-10-09 1987-10-06 The United States Of America As Represented By The Secretary Of The Air Force Micromirror spatial light modulator
US5172262A (en) 1985-10-30 1992-12-15 Texas Instruments Incorporated Spatial light modulator and method
US4687326A (en) 1985-11-12 1987-08-18 General Electric Company Integrated range and luminance camera
JPS62119521A (ja) 1985-11-19 1987-05-30 Canon Inc 光学変調装置
US4859060A (en) 1985-11-26 1989-08-22 501 Sharp Kabushiki Kaisha Variable interferometric device and a process for the production of the same
US4811210A (en) 1985-11-27 1989-03-07 Texas Instruments Incorporated A plurality of optical crossbar switches and exchange switches for parallel processor computer
US4700276A (en) 1986-01-03 1987-10-13 Motorola Inc. Ultra high density pad array chip carrier
JPS6323105A (ja) 1986-02-06 1988-01-30 Fujitsu Ltd 光合分波器
US4744633A (en) 1986-02-18 1988-05-17 Sheiman David M Stereoscopic viewing system and glasses
US4803560A (en) 1986-02-21 1989-02-07 Casio Computer Co., Ltd. Liquid-crystal television receiver with cassette tape recorder
US4717066A (en) 1986-02-24 1988-01-05 American Telephone And Telegraph Company, At&T Bell Laboratories Method of bonding conductors to semiconductor devices
US4829365A (en) 1986-03-07 1989-05-09 Dimension Technologies, Inc. Autostereoscopic display with illuminating lines, light valve and mask
US4807021A (en) 1986-03-10 1989-02-21 Kabushiki Kaisha Toshiba Semiconductor device having stacking structure
US4856869A (en) 1986-04-08 1989-08-15 Canon Kabushiki Kaisha Display element and observation apparatus having the same
US5835255A (en) 1986-04-23 1998-11-10 Etalon, Inc. Visible spectrum modulator arrays
US5189404A (en) 1986-06-18 1993-02-23 Hitachi, Ltd. Display apparatus with rotatable display screen
US4711526A (en) 1986-07-07 1987-12-08 Coherent, Inc. Attenuating beam splitter
US4897708A (en) 1986-07-17 1990-01-30 Laser Dynamics, Inc. Semiconductor wafer array
US5354416A (en) 1986-09-05 1994-10-11 Sadayuki Okudaira Dry etching method
US4743091A (en) 1986-10-30 1988-05-10 Daniel Gelbart Two dimensional laser diode array
US4811082A (en) 1986-11-12 1989-03-07 International Business Machines Corporation High performance integrated circuit packaging structure
GB2198867A (en) 1986-12-17 1988-06-22 Philips Electronic Associated A liquid crystal display illumination system
US4882683B1 (en) 1987-03-16 1995-11-07 Fairchild Semiconductor Cellular addrssing permutation bit map raster graphics architecture
US4940309A (en) 1987-04-20 1990-07-10 Baum Peter S Tessellator
US4763975A (en) 1987-04-28 1988-08-16 Spectra Diode Laboratories, Inc. Optical system with bright light output
US4765865A (en) 1987-05-04 1988-08-23 Ford Motor Company Silicon etch rate enhancement
US4807965A (en) 1987-05-26 1989-02-28 Garakani Reza G Apparatus for three-dimensional viewing
US4924413A (en) 1987-05-29 1990-05-08 Hercules Computer Technology Color conversion apparatus and method
KR970003915B1 (ko) 1987-06-24 1997-03-22 미다 가쓰시게 반도체 기억장치 및 그것을 사용한 반도체 메모리 모듈
US4814759A (en) 1987-07-08 1989-03-21 Clinicom Incorporated Flat panel display monitor apparatus
US4934773A (en) 1987-07-27 1990-06-19 Reflection Technology, Inc. Miniature video display system
US5003300A (en) 1987-07-27 1991-03-26 Reflection Technology, Inc. Head mounted display for miniature video display system
US4859012A (en) 1987-08-14 1989-08-22 Texas Instruments Incorporated Optical interconnection networks
US5142677A (en) 1989-05-04 1992-08-25 Texas Instruments Incorporated Context switching devices, systems and methods
US5072418A (en) 1989-05-04 1991-12-10 Texas Instruments Incorporated Series maxium/minimum function computing devices, systems and methods
US4879602A (en) 1987-09-04 1989-11-07 New York Institute Of Technology Electrode patterns for solid state light modulator
US4801194A (en) 1987-09-23 1989-01-31 Eastman Kodak Company Multiplexed array exposing system having equi-angular scan exposure regions
US4797694A (en) 1987-09-23 1989-01-10 Eastman Kodak Company Scan-multiplexed light valve printer with band-reducing construction
US5024494A (en) 1987-10-07 1991-06-18 Texas Instruments Incorporated Focussed light source pointer for three dimensional display
US4968354A (en) 1987-11-09 1990-11-06 Fuji Electric Co., Ltd. Thin film solar cell array
US5040052A (en) 1987-12-28 1991-08-13 Texas Instruments Incorporated Compact silicon module for high density integrated circuits
US4952925A (en) 1988-01-25 1990-08-28 Bernd Haastert Projectable passive liquid-crystal flat screen information centers
US5310624A (en) 1988-01-29 1994-05-10 Massachusetts Institute Of Technology Integrated circuit micro-fabrication using dry lithographic processes
US4956619A (en) 1988-02-19 1990-09-11 Texas Instruments Incorporated Spatial light modulator
US5039628A (en) 1988-02-19 1991-08-13 Microelectronics & Computer Technology Corporation Flip substrate for chip mount
US4926241A (en) 1988-02-19 1990-05-15 Microelectronics And Computer Technology Corporation Flip substrate for chip mount
US4961633A (en) 1988-02-22 1990-10-09 Xerox Corporation VLSI optimized modulator
DE3866230D1 (de) 1988-03-03 1991-12-19 Landis & Gyr Betriebs Ag Dokument.
US4817850A (en) 1988-03-28 1989-04-04 Hughes Aircraft Company Repairable flip-chip bumping
JPH01296214A (ja) 1988-05-25 1989-11-29 Canon Inc 表示装置
US4902083A (en) 1988-05-31 1990-02-20 Reflection Technology, Inc. Low vibration resonant scanning unit for miniature optical display apparatus
US5009473A (en) 1988-05-31 1991-04-23 Reflection Technology, Inc. Low vibration resonant scanning unit for miniature optical display apparatus
US4827391A (en) 1988-06-01 1989-05-02 Texas Instruments Incorporated Apparatus for implementing output voltage slope in current mode controlled power supplies
JPH01306886A (ja) 1988-06-03 1989-12-11 Canon Inc 体積位相型回折格子
US4856863A (en) 1988-06-22 1989-08-15 Texas Instruments Incorporated Optical fiber interconnection network including spatial light modulator
JP2612475B2 (ja) 1988-06-24 1997-05-21 日本航空電子工業株式会社 カラー表示パネルの表示制御装置
US4950890A (en) 1988-07-13 1990-08-21 Creo Electronics Corp. Method and apparatus for correcting position errors using writable encoders
US5023905A (en) 1988-07-25 1991-06-11 Reflection Technology, Inc. Pocket data receiver with full page visual display
US5048077A (en) 1988-07-25 1991-09-10 Reflection Technology, Inc. Telephone handset with full-page visual display
US4896325A (en) 1988-08-23 1990-01-23 The Regents Of The University Of California Multi-section tunable laser with differing multi-element mirrors
US5028939A (en) 1988-08-23 1991-07-02 Texas Instruments Incorporated Spatial light modulator system
US5216544A (en) 1988-08-26 1993-06-01 Fuji Photo Film Co., Ltd. Beam-combining laser beam source device
US5058992A (en) 1988-09-07 1991-10-22 Toppan Printing Co., Ltd. Method for producing a display with a diffraction grating pattern and a display produced by the method
US4915463A (en) 1988-10-18 1990-04-10 The United States Of America As Represented By The Department Of Energy Multilayer diffraction grating
US5066614A (en) 1988-11-21 1991-11-19 Honeywell Inc. Method of manufacturing a leadframe having conductive elements preformed with solder bumps
US5184207A (en) 1988-12-07 1993-02-02 Tribotech Semiconductor die packages having lead support frame
US5191405A (en) 1988-12-23 1993-03-02 Matsushita Electric Industrial Co., Ltd. Three-dimensional stacked lsi
US4893509A (en) 1988-12-27 1990-01-16 General Motors Corporation Method and product for fabricating a resonant-bridge microaccelerometer
US4982184A (en) 1989-01-03 1991-01-01 General Electric Company Electrocrystallochromic display and element
US4949148A (en) 1989-01-11 1990-08-14 Bartelink Dirk J Self-aligning integrated circuit assembly
US4896948A (en) 1989-02-21 1990-01-30 International Business Machines Corporation Simplified double-cavity tunable optical filter using voltage-dependent refractive index
US5214420A (en) 1989-02-27 1993-05-25 Texas Instruments Incorporated Spatial light modulator projection system with random polarity light
KR100202246B1 (ko) 1989-02-27 1999-06-15 윌리엄 비. 켐플러 디지탈화 비디오 시스템을 위한 장치 및 방법
US5214419A (en) 1989-02-27 1993-05-25 Texas Instruments Incorporated Planarized true three dimensional display
US5206629A (en) 1989-02-27 1993-04-27 Texas Instruments Incorporated Spatial light modulator and memory for digitized video display
US5192946A (en) 1989-02-27 1993-03-09 Texas Instruments Incorporated Digitized color video display system
US5272473A (en) 1989-02-27 1993-12-21 Texas Instruments Incorporated Reduced-speckle display system
US5079544A (en) 1989-02-27 1992-01-07 Texas Instruments Incorporated Standard independent digitized video system
US5287096A (en) 1989-02-27 1994-02-15 Texas Instruments Incorporated Variable luminosity display system
US5446479A (en) 1989-02-27 1995-08-29 Texas Instruments Incorporated Multi-dimensional array video processor system
US5868854A (en) 1989-02-27 1999-02-09 Hitachi, Ltd. Method and apparatus for processing samples
US5170156A (en) 1989-02-27 1992-12-08 Texas Instruments Incorporated Multi-frequency two dimensional display system
US5162787A (en) 1989-02-27 1992-11-10 Texas Instruments Incorporated Apparatus and method for digitized video system utilizing a moving display surface
US4930043A (en) 1989-02-28 1990-05-29 United Technologies Closed-loop capacitive accelerometer with spring constraint
US4945773A (en) 1989-03-06 1990-08-07 Ford Motor Company Force transducer etched from silicon
FR2645680B1 (fr) 1989-04-07 1994-04-29 Thomson Microelectronics Sa Sg Encapsulation de modules electroniques et procede de fabrication
US5188280A (en) 1989-04-28 1993-02-23 Hitachi Ltd. Method of bonding metals, and method and apparatus for producing semiconductor integrated circuit device using said method of bonding metals
US4978202A (en) 1989-05-12 1990-12-18 Goldstar Co., Ltd. Laser scanning system for displaying a three-dimensional color image
US5068205A (en) 1989-05-26 1991-11-26 General Signal Corporation Header mounted chemically sensitive ISFET and method of manufacture
US5060058A (en) 1989-06-07 1991-10-22 U.S. Philips Corporation Modulation system for projection display
US4943815A (en) 1989-06-29 1990-07-24 International Business Machines Corporation Laser printer with light-exposure prevention
US5022750A (en) 1989-08-11 1991-06-11 Raf Electronics Corp. Active matrix reflective projection system
US5399898A (en) 1992-07-17 1995-03-21 Lsi Logic Corporation Multi-chip semiconductor arrangements using flip chip dies
JPH0343682U (zh) 1989-09-06 1991-04-24
GB8921722D0 (en) 1989-09-26 1989-11-08 British Telecomm Micromechanical switch
US4954789A (en) 1989-09-28 1990-09-04 Texas Instruments Incorporated Spatial light modulator
US5251057A (en) 1989-10-13 1993-10-05 Xerox Corporation Multiple beam optical modulation system
US5251058A (en) 1989-10-13 1993-10-05 Xerox Corporation Multiple beam exposure control
US5185660A (en) 1989-11-01 1993-02-09 Aura Systems, Inc. Actuated mirror optical intensity modulation
US5260798A (en) 1989-11-01 1993-11-09 Aura Systems, Inc. Pixel intensity modulator
US5077598A (en) 1989-11-08 1991-12-31 Hewlett-Packard Company Strain relief flip-chip integrated circuit assembly with test fixturing
US5037173A (en) 1989-11-22 1991-08-06 Texas Instruments Incorporated Optical interconnection network
US5074947A (en) 1989-12-18 1991-12-24 Epoxy Technology, Inc. Flip chip technology using electrically conductive polymers and dielectrics
US5041851A (en) 1989-12-21 1991-08-20 Texas Instruments Incorporated Spatial light modulator printer and method of operation
US5237340A (en) 1989-12-21 1993-08-17 Texas Instruments Incorporated Replaceable elements for xerographic printing process and method of operation
US5072239A (en) 1989-12-21 1991-12-10 Texas Instruments Incorporated Spatial light modulator exposure unit and method of operation
DE4001448C1 (zh) 1990-01-19 1991-07-11 Mercedes-Benz Aktiengesellschaft, 7000 Stuttgart, De
CA2034703A1 (en) 1990-01-23 1991-07-24 Masanori Nishiguchi Substrate for packaging a semiconductor device
AU637874B2 (en) 1990-01-23 1993-06-10 Sumitomo Electric Industries, Ltd. Substrate for packaging a semiconductor device
JPH03217814A (ja) 1990-01-24 1991-09-25 Canon Inc 液晶プロジェクター
US5260718A (en) 1990-01-24 1993-11-09 Xerox Corporation Liquid crystal shutter xerographic printer with offset configuration lamp aperture and copier/printer with optically aligned lamps, image bars, and lenses
US5428259A (en) 1990-02-02 1995-06-27 Nec Corporation Micromotion mechanical structure and a process for the production thereof
GB9006471D0 (en) 1990-03-22 1990-05-23 Surface Tech Sys Ltd Loading mechanisms
US5121231A (en) 1990-04-06 1992-06-09 University Of Southern California Incoherent/coherent multiplexed holographic recording for photonic interconnections and holographic optical elements
JPH0787171B2 (ja) 1990-04-06 1995-09-20 ローム株式会社 固体電解コンデンサの製造方法
WO1991017483A1 (de) 1990-05-02 1991-11-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Belichtungsvorrichtung
US5291473A (en) 1990-06-06 1994-03-01 Texas Instruments Incorporated Optical storage media light beam positioning system
US5165013A (en) 1990-09-26 1992-11-17 Faris Sadeg M 3-D stereo pen plotter
US5502481A (en) 1992-11-16 1996-03-26 Reveo, Inc. Desktop-based projection display system for stereoscopic viewing of displayed imagery over a wide field of view
US5216537A (en) 1990-06-29 1993-06-01 Texas Instruments Incorporated Architecture and process for integrating DMD with control circuit substrates
US5083857A (en) 1990-06-29 1992-01-28 Texas Instruments Incorporated Multi-level deformable mirror device
US5142405A (en) 1990-06-29 1992-08-25 Texas Instruments Incorporated Bistable dmd addressing circuit and method
US5099353A (en) 1990-06-29 1992-03-24 Texas Instruments Incorporated Architecture and process for integrating DMD with control circuit substrates
US5018256A (en) 1990-06-29 1991-05-28 Texas Instruments Incorporated Architecture and process for integrating DMD with control circuit substrates
EP0467048B1 (en) 1990-06-29 1995-09-20 Texas Instruments Incorporated Field-updated deformable mirror device
US5049901A (en) 1990-07-02 1991-09-17 Creo Products Inc. Light modulator using large area light sources
US5291317A (en) 1990-07-12 1994-03-01 Applied Holographics Corporation Holographic diffraction grating patterns and methods for creating the same
GB2249450A (en) 1990-09-05 1992-05-06 Marconi Gec Ltd A display arrangement including linear array of light emitting elements
US5182665A (en) 1990-09-07 1993-01-26 Displaytech, Inc. Diffractive light modulator
US5148157A (en) 1990-09-28 1992-09-15 Texas Instruments Incorporated Spatial light modulator with full complex light modulation capability
US5239806A (en) 1990-11-02 1993-08-31 Ak Technology, Inc. Thermoplastic semiconductor package and method of producing it
US5331454A (en) 1990-11-13 1994-07-19 Texas Instruments Incorporated Low reset voltage process for DMD
US5602671A (en) 1990-11-13 1997-02-11 Texas Instruments Incorporated Low surface energy passivation layer for micromechanical devices
US5231363A (en) 1990-11-26 1993-07-27 Texas Instruments Incorporated Pulse width modulating producing signals centered in each cycle interval
US5181231A (en) 1990-11-30 1993-01-19 Texas Instruments, Incorporated Non-volatile counting method and apparatus
US5493177A (en) 1990-12-03 1996-02-20 The Regents Of The University Of California Sealed micromachined vacuum and gas filled devices
US5220200A (en) 1990-12-10 1993-06-15 Delco Electronics Corporation Provision of substrate pillars to maintain chip standoff
US5221400A (en) 1990-12-11 1993-06-22 Delco Electronics Corporation Method of making a microaccelerometer having low stress bonds and means for preventing excessive z-axis deflection
US5376979A (en) 1990-12-31 1994-12-27 Kopin Corporation Slide projector mountable light valve display
US5172161A (en) 1990-12-31 1992-12-15 Texas Instruments Incorporated Unibody printing system and process
US5258325A (en) 1990-12-31 1993-11-02 Kopin Corporation Method for manufacturing a semiconductor device using a circuit transfer film
CA2060057C (en) 1991-01-29 1997-12-16 Susumu Takahashi Display having diffraction grating pattern
US5255358A (en) 1991-02-14 1993-10-19 International Business Machines Action bar processing on non-programmable workstations
US5212115A (en) 1991-03-04 1993-05-18 Motorola, Inc. Method for microelectronic device packaging employing capacitively coupled connections
US5219794A (en) 1991-03-14 1993-06-15 Hitachi, Ltd. Semiconductor integrated circuit device and method of fabricating same
US5178728A (en) 1991-03-28 1993-01-12 Texas Instruments Incorporated Integrated-optic waveguide devices and method
CA2063744C (en) 1991-04-01 2002-10-08 Paul M. Urbanus Digital micromirror device architecture and timing for use in a pulse-width modulated display system
US5347378A (en) 1991-04-04 1994-09-13 Displaytech, Inc. Fast switching color filters for frame-sequential video using ferroelectric liquid crystal color-selective filters
US5226099A (en) 1991-04-26 1993-07-06 Texas Instruments Incorporated Digital micromirror shutter device
US5329289A (en) 1991-04-26 1994-07-12 Sharp Kabushiki Kaisha Data processor with rotatable display
US5168401A (en) 1991-05-07 1992-12-01 Spectra Diode Laboratories, Inc. Brightness conserving optical system for modifying beam symmetry
US5170269A (en) 1991-05-31 1992-12-08 Texas Instruments Incorporated Programmable optical interconnect system
US5299289A (en) 1991-06-11 1994-03-29 Matsushita Electric Industrial Co., Ltd. Polymer dispersed liquid crystal panel with diffraction grating
US5221982A (en) 1991-07-05 1993-06-22 Faris Sadeg M Polarizing wavelength separator
US5179274A (en) 1991-07-12 1993-01-12 Texas Instruments Incorporated Method for controlling operation of optical systems and devices
US5287215A (en) 1991-07-17 1994-02-15 Optron Systems, Inc. Membrane light modulation systems
US5170283A (en) 1991-07-24 1992-12-08 Northrop Corporation Silicon spatial light modulator
US5164019A (en) 1991-07-31 1992-11-17 Sunpower Corporation Monolithic series-connected solar cells having improved cell isolation and method of making same
US5240818A (en) 1991-07-31 1993-08-31 Texas Instruments Incorporated Method for manufacturing a color filter for deformable mirror device
US5168406A (en) 1991-07-31 1992-12-01 Texas Instruments Incorporated Color deformable mirror device and method for manufacture
CA2075026A1 (en) 1991-08-08 1993-02-09 William E. Nelson Method and apparatus for patterning an imaging member
JP2538456B2 (ja) 1991-08-12 1996-09-25 浜松ホトニクス株式会社 光学的変位量測定装置
US5233874A (en) 1991-08-19 1993-08-10 General Motors Corporation Active microaccelerometer
US5418546A (en) 1991-08-20 1995-05-23 Mitsubishi Denki Kabushiki Kaisha Visual display system and exposure control apparatus
US5198895A (en) 1991-08-29 1993-03-30 Rockwell International Corporation Holographic head-up display
JPH0563029A (ja) 1991-09-02 1993-03-12 Fujitsu Ltd 半導体素子
US5245686A (en) 1991-09-06 1993-09-14 Faris Sadeg M Method of fabricating an image plane translator device and apparatus incorporating such device
US5254980A (en) 1991-09-06 1993-10-19 Texas Instruments Incorporated DMD display system controller
US5307056A (en) 1991-09-06 1994-04-26 Texas Instruments Incorporated Dynamic memory allocation for frame buffer for spatial light modulator
US5255100A (en) 1991-09-06 1993-10-19 Texas Instruments Incorporated Data formatter with orthogonal input/output and spatial reordering
US5208891A (en) 1991-10-07 1993-05-04 The United State Of America As Represented By The Secretary Of The Navy Fiber-optic viewgraph projector
US5177724A (en) 1991-10-08 1993-01-05 Crea Products Inc. Optical tape recorder using a resonant flexure scanner
US5239448A (en) 1991-10-28 1993-08-24 International Business Machines Corporation Formulation of multichip modules
DE69221987T2 (de) 1991-11-01 1998-02-05 Sega Enterprises Kk Am Kopf befestigte Abbildungsvorrichtung
US5230005A (en) 1991-11-05 1993-07-20 The United States Of America As Represented By The Secretary Of The Navy Electronic tuning of a broadband laser
US5210637A (en) 1991-11-12 1993-05-11 International Business Machines Corp. High speed light modulation
US5231432A (en) 1991-12-03 1993-07-27 Florida Atlantic University Projector utilizing liquid crystal light-valve and color selection by diffraction
EP0545412A3 (en) 1991-12-05 1993-11-03 Texas Instruments Inc Method and apparatus to improve a video signal
US5208818A (en) 1991-12-12 1993-05-04 Creo Products Inc. Laser system for recording data patterns on a planar substrate
US5323051A (en) 1991-12-16 1994-06-21 Motorola, Inc. Semiconductor wafer level package
US5231388A (en) 1991-12-17 1993-07-27 Texas Instruments Incorporated Color display system using spatial light modulators
US5212555A (en) 1991-12-17 1993-05-18 Texas Instruments Incorporated Image capture with spatial light modulator and single-cell photosensor
US5311349A (en) 1991-12-18 1994-05-10 Texas Instruments Incorporated Unfolded optics for multiple row spatial light modulators
US5247593A (en) 1991-12-18 1993-09-21 Texas Instruments Incorporated Programmable optical crossbar switch
US5313835A (en) 1991-12-19 1994-05-24 Motorola, Inc. Integrated monolithic gyroscopes/accelerometers with logic circuits
US5233456A (en) 1991-12-20 1993-08-03 Texas Instruments Incorporated Resonant mirror and method of manufacture
CA2084923A1 (en) 1991-12-20 1993-06-21 Ronald E. Stafford Slm spectrometer
US5202785A (en) 1991-12-20 1993-04-13 Texas Instruments Incorporated Method and device for steering light
CA2085961A1 (en) 1991-12-23 1993-06-24 William E. Nelson Method and apparatus for steering light
US5247180A (en) 1991-12-30 1993-09-21 Texas Instruments Incorporated Stereolithographic apparatus and method of use
US5285407A (en) 1991-12-31 1994-02-08 Texas Instruments Incorporated Memory circuit for spatial light modulator
US5233460A (en) 1992-01-31 1993-08-03 Regents Of The University Of California Method and means for reducing speckle in coherent laser pulses
US5296950A (en) 1992-01-31 1994-03-22 Texas Instruments Incorporated Optical signal free-space conversion board
US5224088A (en) 1992-02-10 1993-06-29 Creo Products Inc. High resolution optical scanner
US5504514A (en) 1992-02-13 1996-04-02 Texas Instruments Incorporated System and method for solid state illumination for spatial light modulators
US5315423A (en) 1992-02-18 1994-05-24 Rockwell International Corporation Wavelength multiplexed two dimensional image transmission through single mode optical fiber
US5300813A (en) 1992-02-26 1994-04-05 International Business Machines Corporation Refractory metal capped low resistivity metal conductor lines and vias
US5212582A (en) 1992-03-04 1993-05-18 Texas Instruments Incorporated Electrostatically controlled beam steering device and method
EP0562424B1 (en) 1992-03-25 1997-05-28 Texas Instruments Incorporated Embedded optical calibration system
US5312513A (en) 1992-04-03 1994-05-17 Texas Instruments Incorporated Methods of forming multiple phase light modulators
US5319214A (en) 1992-04-06 1994-06-07 The United States Of America As Represented By The Secretary Of The Army Infrared image projector utilizing a deformable mirror device spatial light modulator
US5357803A (en) 1992-04-08 1994-10-25 Rochester Institute Of Technology Micromachined microaccelerometer for measuring acceleration along three axes
JPH05303348A (ja) 1992-04-24 1993-11-16 Nec Eng Ltd Ｌｃｄビデオ信号インタフェース装置
US6219015B1 (en) 1992-04-28 2001-04-17 The Board Of Directors Of The Leland Stanford, Junior University Method and apparatus for using an array of grating light valves to produce multicolor optical images
US5311360A (en) 1992-04-28 1994-05-10 The Board Of Trustees Of The Leland Stanford, Junior University Method and apparatus for modulating a light beam
US5334991A (en) 1992-05-15 1994-08-02 Reflection Technology Dual image head-mounted display
GB2267579A (en) 1992-05-15 1993-12-08 Sharp Kk Optical device comprising facing lenticular or parallax screens of different pitch
US5307185A (en) 1992-05-19 1994-04-26 Raychem Corporation Liquid crystal projection display with complementary color dye added to longest wavelength imaging element
US5347433A (en) 1992-06-11 1994-09-13 Sedlmayr Steven R Collimated beam of light and systems and methods for implementation thereof
US5281887A (en) 1992-06-15 1994-01-25 Engle Craig D Two independent spatial variable degree of freedom wavefront modulator
US5315418A (en) 1992-06-17 1994-05-24 Xerox Corporation Two path liquid crystal light valve color display with light coupling lens array disposed along the red-green light path
US5486841A (en) 1992-06-17 1996-01-23 Sony Corporation Glasses type display apparatus
FR2693033B1 (fr) 1992-06-30 1994-08-19 Commissariat Energie Atomique Dispositif d'imagerie de grande dimension.
US5256869A (en) 1992-06-30 1993-10-26 Texas Instruments Incorporated Free-space optical interconnection using deformable mirror device
US5340772A (en) 1992-07-17 1994-08-23 Lsi Logic Corporation Method of increasing the layout efficiency of dies on a wafer and increasing the ratio of I/O area to active area per die
US5321416A (en) 1992-07-27 1994-06-14 Virtual Research Systems Head-mounted visual display apparatus
US5313479A (en) 1992-07-29 1994-05-17 Texas Instruments Incorporated Speckle-free display system using coherent light
US5605406A (en) 1992-08-24 1997-02-25 Bowen; James H. Computer input devices with light activated switches and light emitter protection
US5327286A (en) 1992-08-31 1994-07-05 Texas Instruments Incorporated Real time optical correlation system
US5249245A (en) 1992-08-31 1993-09-28 Motorola, Inc. Optoelectroinc mount including flexible substrate and method for making same
US5303043A (en) 1992-09-01 1994-04-12 Florida Atlantic University Projection television display utilizing Bragg diffraction cell for producing horizontal scan
US5348619A (en) 1992-09-03 1994-09-20 Texas Instruments Incorporated Metal selective polymer removal
JP3105089B2 (ja) 1992-09-11 2000-10-30 株式会社東芝 半導体装置
US5325116A (en) 1992-09-18 1994-06-28 Texas Instruments Incorporated Device for writing to and reading from optical storage media
GB9220412D0 (en) 1992-09-28 1992-11-11 Texas Instruments Holland Transponder systems for automatic identification purposes
US5493439A (en) 1992-09-29 1996-02-20 Engle; Craig D. Enhanced surface deformation light modulator
US5661593A (en) 1992-10-01 1997-08-26 Engle; Craig D. Linear electrostatic modulator
US5285196A (en) 1992-10-15 1994-02-08 Texas Instruments Incorporated Bistable DMD addressing method
JP2934357B2 (ja) 1992-10-20 1999-08-16 富士通株式会社 半導体装置
US5289172A (en) 1992-10-23 1994-02-22 Texas Instruments Incorporated Method of mitigating the effects of a defective electromechanical pixel
EP0599375B1 (de) 1992-11-20 1999-03-03 Ascom Tech Ag Lichtmodulator
JPH06260470A (ja) 1992-12-16 1994-09-16 Texas Instr Inc <Ti> パターンに作成された金属層の清浄化法
EP0608440A1 (en) 1992-12-18 1994-08-03 Fujitsu Limited Semiconductor device having a plurality of chips having identical circuit arrangements sealed in package
US5357369A (en) 1992-12-21 1994-10-18 Geoffrey Pilling Wide-field three-dimensional viewing system
FR2699690B1 (fr) 1992-12-22 1995-01-27 Thomson Csf Projecteur d'images mobiles à faible champ.
US5296408A (en) 1992-12-24 1994-03-22 International Business Machines Corporation Fabrication method for vacuum microelectronic devices
US5352926A (en) 1993-01-04 1994-10-04 Motorola, Inc. Flip chip package and method of making
US5371618A (en) 1993-01-05 1994-12-06 Brite View Technologies Color liquid crystal display employing dual cells driven with an EXCLUSIVE OR relationship
AU5306494A (en) 1993-01-08 1994-07-14 Richard A Vasichek Magnetic keeper accessory for wrench sockets
JP3547160B2 (ja) 1993-01-11 2004-07-28 テキサス インスツルメンツ インコーポレイテツド 空間光変調器
JP3457348B2 (ja) 1993-01-15 2003-10-14 株式会社東芝 半導体装置の製造方法
US5359451A (en) 1993-01-29 1994-10-25 Creo Products Inc. High efficiency acousto-optic modulator
US5371543A (en) 1993-03-03 1994-12-06 Texas Instruments Incorporated Monolithic color wheel
US5404485A (en) 1993-03-08 1995-04-04 M-Systems Flash Disk Pioneers Ltd. Flash file system
US5903098A (en) 1993-03-11 1999-05-11 Fed Corporation Field emission display device having multiplicity of through conductive vias and a backside connector
US5293511A (en) 1993-03-16 1994-03-08 Texas Instruments Incorporated Package for a semiconductor device
JPH06281988A (ja) 1993-03-30 1994-10-07 Nikon Corp 防振光学装置
US5510758A (en) 1993-04-07 1996-04-23 Matsushita Electric Industrial Co., Ltd. Multilayer microstrip wiring board with a semiconductor device mounted thereon via bumps
US5539422A (en) 1993-04-12 1996-07-23 Virtual Vision, Inc. Head mounted display system
KR970003007B1 (ko) 1993-05-21 1997-03-13 대우전자 주식회사 투사형 화상표시장치용 광로조절장치 및 그 구동방법
US5485172A (en) 1993-05-21 1996-01-16 Sony Corporation Automatic image regulating arrangement for head-mounted image display apparatus
US5491715A (en) 1993-06-28 1996-02-13 Texas Instruments Deutschland Gmbh Automatic antenna tuning method and circuit
US5345521A (en) 1993-07-12 1994-09-06 Texas Instrument Incorporated Architecture for optical switch
US5489952A (en) 1993-07-14 1996-02-06 Texas Instruments Incorporated Method and device for multi-format television
US5365283A (en) 1993-07-19 1994-11-15 Texas Instruments Incorporated Color phase control for projection display using spatial light modulator
US5673139A (en) 1993-07-19 1997-09-30 Medcom, Inc. Microelectromechanical television scanning device and method for making the same
US5510824A (en) 1993-07-26 1996-04-23 Texas Instruments, Inc. Spatial light modulator array
JP3185831B2 (ja) 1993-07-30 2001-07-11 富士写真フイルム株式会社 偏光コヒーレント合波レーザ
US5453778A (en) 1993-07-30 1995-09-26 Texas Instruments Incorporated Method and apparatus for spatial modulation in the cross-process direction
US5389182A (en) 1993-08-02 1995-02-14 Texas Instruments Incorporated Use of a saw frame with tape as a substrate carrier for wafer level backend processing
US5581272A (en) 1993-08-25 1996-12-03 Texas Instruments Incorporated Signal generator for controlling a spatial light modulator
US5485354A (en) 1993-09-09 1996-01-16 Precision Lamp, Inc. Flat panel display lighting system
EP0657760A1 (en) 1993-09-15 1995-06-14 Texas Instruments Incorporated Image simulation and projection system
KR970003466B1 (ko) 1993-09-28 1997-03-18 대우전자 주식회사 투사형 화상 표시 장치의 광로 조절 장치 제조 방법
US5347321A (en) 1993-09-30 1994-09-13 Texas Instruments Incorporated Color separator for digital television
US5815126A (en) 1993-10-22 1998-09-29 Kopin Corporation Monocular portable communication and display system
US5367585A (en) 1993-10-27 1994-11-22 General Electric Company Integrated microelectromechanical polymeric photonic switch
US5497197A (en) 1993-11-04 1996-03-05 Texas Instruments Incorporated System and method for packaging data into video processor
US5508558A (en) 1993-10-28 1996-04-16 Digital Equipment Corporation High density, high speed, semiconductor interconnect using-multilayer flexible substrate with unsupported central portion
US5452024A (en) 1993-11-01 1995-09-19 Texas Instruments Incorporated DMD display system
US5734224A (en) 1993-11-01 1998-03-31 Canon Kabushiki Kaisha Image forming apparatus and method of manufacturing the same
US5398071A (en) 1993-11-02 1995-03-14 Texas Instruments Incorporated Film-to-video format detection for digital television
US5523619A (en) 1993-11-03 1996-06-04 International Business Machines Corporation High density memory structure
CA2134370A1 (en) 1993-11-04 1995-05-05 Robert J. Gove Video data formatter for a digital television system
US5508561A (en) 1993-11-15 1996-04-16 Nec Corporation Apparatus for forming a double-bump structure used for flip-chip mounting
US5517347A (en) 1993-12-01 1996-05-14 Texas Instruments Incorporated Direct view deformable mirror device
GB2294350A (en) 1994-10-21 1996-04-24 Sharp Kk Light source and display
US5491510A (en) 1993-12-03 1996-02-13 Texas Instruments Incorporated System and method for simultaneously viewing a scene and an obscured object
EP0734589B1 (en) 1993-12-13 1998-03-25 Honeywell Inc. Integrated silicon vacuum micropackage for infrared devices
US5473512A (en) 1993-12-16 1995-12-05 At&T Corp. Electronic device package having electronic device boonded, at a localized region thereof, to circuit board
EP1001323A3 (en) 1993-12-17 2005-10-12 Denso Corporation Data backup apparatus utilized in an electronic control system and data backup method performed in the data backup apparatus
JP2722314B2 (ja) 1993-12-20 1998-03-04 日本信号株式会社 プレーナー型ガルバノミラー及びその製造方法
US5523920A (en) 1994-01-03 1996-06-04 Motorola, Inc. Printed circuit board comprising elevated bond pads
US5499060A (en) 1994-01-04 1996-03-12 Texas Instruments Incorporated System and method for processing video data
CA2139794C (en) 1994-01-18 2006-11-07 Robert John Gove Frame pixel data generation
US5500761A (en) 1994-01-27 1996-03-19 At&T Corp. Micromechanical modulator
US5658698A (en) 1994-01-31 1997-08-19 Canon Kabushiki Kaisha Microstructure, process for manufacturing thereof and devices incorporating the same
US5467106A (en) 1994-02-10 1995-11-14 Hughes-Avicom International, Inc. Retractable face-up LCD monitor with off-monitor power supply and back-EMF braking
US5444566A (en) 1994-03-07 1995-08-22 Texas Instruments Incorporated Optimized electronic operation of digital micromirror devices
US5447600A (en) 1994-03-21 1995-09-05 Texas Instruments Polymeric coatings for micromechanical devices
US5380681A (en) 1994-03-21 1995-01-10 United Microelectronics Corporation Three-dimensional multichip package and methods of fabricating
US6097352A (en) 1994-03-23 2000-08-01 Kopin Corporation Color sequential display panels
JP3537881B2 (ja) 1994-03-29 2004-06-14 株式会社リコー Ｌｅｄアレイヘッド
US5576878A (en) 1994-03-30 1996-11-19 Texas Instruments Incorporated Use of incompatible materials to eliminate sticking of micro-mechanical devices
US5467146A (en) 1994-03-31 1995-11-14 Texas Instruments Incorporated Illumination control unit for display system with spatial light modulator
US5640216A (en) 1994-04-13 1997-06-17 Hitachi, Ltd. Liquid crystal display device having video signal driving circuit mounted on one side and housing
US5486698A (en) 1994-04-19 1996-01-23 Texas Instruments Incorporated Thermal imaging system with integrated thermal chopper
US5544306A (en) 1994-05-03 1996-08-06 Sun Microsystems, Inc. Flexible dram access in a frame buffer memory and system
US6040937A (en) 1994-05-05 2000-03-21 Etalon, Inc. Interferometric modulation
US5512374A (en) 1994-05-09 1996-04-30 Texas Instruments Incorporated PFPE coatings for micro-mechanical devices
US5442414A (en) 1994-05-10 1995-08-15 U. S. Philips Corporation High contrast illumination system for video projector
US5497172A (en) 1994-06-13 1996-03-05 Texas Instruments Incorporated Pulse width modulation for spatial light modulator with split reset addressing
US5534107A (en) 1994-06-14 1996-07-09 Fsi International UV-enhanced dry stripping of silicon nitride films
US5521748A (en) 1994-06-16 1996-05-28 Eastman Kodak Company Light modulator with a laser or laser array for exposing image data
US5454906A (en) 1994-06-21 1995-10-03 Texas Instruments Inc. Method of providing sacrificial spacer for micro-mechanical devices
US5482564A (en) 1994-06-21 1996-01-09 Texas Instruments Incorporated Method of unsticking components of micro-mechanical devices
US5920418A (en) 1994-06-21 1999-07-06 Matsushita Electric Industrial Co., Ltd. Diffractive optical modulator and method for producing the same, infrared sensor including such a diffractive optical modulator and method for producing the same, and display device including such a diffractive optical modulator
US5499062A (en) 1994-06-23 1996-03-12 Texas Instruments Incorporated Multiplexed memory timing with block reset and secondary memory
US5523878A (en) 1994-06-30 1996-06-04 Texas Instruments Incorporated Self-assembled monolayer coating for micro-mechanical devices
US5504504A (en) 1994-07-13 1996-04-02 Texas Instruments Incorporated Method of reducing the visual impact of defects present in a spatial light modulator display
US5704700A (en) 1994-07-25 1998-01-06 Proxima Corporation Laser illuminated image projection system and method of using same
US5696560A (en) 1994-07-25 1997-12-09 Magma, Inc. Motion picture distribution system
US5512748A (en) 1994-07-26 1996-04-30 Texas Instruments Incorporated Thermal imaging system with a monolithic focal plane array and method
US5485304A (en) 1994-07-29 1996-01-16 Texas Instruments, Inc. Support posts for micro-mechanical devices
US5523628A (en) 1994-08-05 1996-06-04 Hughes Aircraft Company Apparatus and method for protecting metal bumped integrated circuit chips during processing and for providing mechanical support to interconnected chips
JP3233535B2 (ja) 1994-08-15 2001-11-26 株式会社東芝 半導体装置及びその製造方法
US5903395A (en) 1994-08-31 1999-05-11 I-O Display Systems Llc Personal visual display system
US5483307A (en) 1994-09-29 1996-01-09 Texas Instruments, Inc. Wide field of view head-mounted display
US5995303A (en) 1994-09-30 1999-11-30 Kabushiki Kaisha Toshiba Optical element and optical device
JP3707084B2 (ja) 1994-10-31 2005-10-19 ソニー株式会社 表示装置及び表示方法
US5490009A (en) 1994-10-31 1996-02-06 Texas Instruments Incorporated Enhanced resolution for digital micro-mirror displays
US5519450A (en) 1994-11-14 1996-05-21 Texas Instruments Incorporated Graphics subsystem for digital television
US5516125A (en) 1994-11-30 1996-05-14 Texas Instruments Incorporated Baffled collet for vacuum pick-up of a semiconductor die
US5486946A (en) 1994-12-21 1996-01-23 Motorola Integrated electro-optic package for reflective spatial light modulators
US5668611A (en) 1994-12-21 1997-09-16 Hughes Electronics Full color sequential image projection system incorporating pulse rate modulated illumination
US5524155A (en) 1995-01-06 1996-06-04 Texas Instruments Incorporated Demultiplexer for wavelength-multiplexed optical signal
US5623361A (en) 1995-01-09 1997-04-22 Engle; Craig D. Enhanced wavefront phase modulator device
US5517359A (en) 1995-01-23 1996-05-14 Gelbart; Daniel Apparatus for imaging light from a laser diode onto a multi-channel linear light valve
US5726480A (en) 1995-01-27 1998-03-10 The Regents Of The University Of California Etchants for use in micromachining of CMOS Microaccelerometers and microelectromechanical devices and method of making the same
US5517340A (en) 1995-01-30 1996-05-14 International Business Machines Corporation High performance projection display with two light valves
JPH08201757A (ja) 1995-01-30 1996-08-09 A G Technol Kk 投射型カラー表示装置
US5504614A (en) 1995-01-31 1996-04-02 Texas Instruments Incorporated Method for fabricating a DMD spatial light modulator with a hardened hinge
US5508750A (en) 1995-02-03 1996-04-16 Texas Instruments Incorporated Encoding data converted from film format for progressive display
DE19503929A1 (de) 1995-02-07 1996-08-08 Ldt Gmbh & Co Farbbilderzeugungssysteme
US5491612A (en) 1995-02-21 1996-02-13 Fairchild Space And Defense Corporation Three-dimensional modular assembly of integrated circuits
US5610438A (en) 1995-03-08 1997-03-11 Texas Instruments Incorporated Micro-mechanical device with non-evaporable getter
DE19511593C2 (de) 1995-03-29 1997-02-13 Siemens Ag Mikrooptische Vorrichtung
JP3209877B2 (ja) 1995-03-31 2001-09-17 アルプス電気株式会社 光学読み取り装置
JP2987750B2 (ja) 1995-05-26 1999-12-06 日本信号株式会社 プレーナ型電磁アクチュエータ
US5744752A (en) 1995-06-05 1998-04-28 International Business Machines Corporation Hermetic thin film metallized sealband for SCM and MCM-D modules
US5798743A (en) 1995-06-07 1998-08-25 Silicon Light Machines Clear-behind matrix addressing for display systems
US5841579A (en) 1995-06-07 1998-11-24 Silicon Light Machines Flat diffraction grating light valve
US5629801A (en) 1995-06-07 1997-05-13 Silicon Light Machines Diffraction grating light doubling collection system
US5661592A (en) 1995-06-07 1997-08-26 Silicon Light Machines Method of making and an apparatus for a flat diffraction grating light valve
US6046840A (en) 1995-06-19 2000-04-04 Reflectivity, Inc. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US5835256A (en) 1995-06-19 1998-11-10 Reflectivity, Inc. Reflective spatial light modulator with encapsulated micro-mechanical elements
US5949570A (en) 1995-06-20 1999-09-07 Matsushita Electric Industrial Co., Ltd. Diffractive optical modulator and method for producing the same, infrared sensor including such a diffractive optical modulator and method for producing the same, and display device including such a diffractive optical modulator
JP3135107B2 (ja) 1995-06-27 2001-02-13 シャープ株式会社 ３次元ディスプレイ装置
US5886675A (en) 1995-07-05 1999-03-23 Physical Optics Corporation Autostereoscopic display system with fan-out multiplexer
US5837562A (en) 1995-07-07 1998-11-17 The Charles Stark Draper Laboratory, Inc. Process for bonding a shell to a substrate for packaging a semiconductor
US5691836A (en) 1995-07-11 1997-11-25 Sy Technology, Inc. Optically addressed spatial light modulator and method
US5742373A (en) 1995-10-13 1998-04-21 Massachusetts Institute Of Technology Color microdisplays and methods of manufacturing same
JP3435925B2 (ja) 1995-08-25 2003-08-11 ソニー株式会社 半導体装置
US5757536A (en) 1995-08-30 1998-05-26 Sandia Corporation Electrically-programmable diffraction grating
KR100424548B1 (ko) 1995-11-01 2004-07-27 마쯔시다덴기산교 가부시키가이샤 출력효율제어장치와투사형디스플레이장치와적외선센서와비접촉온도계
US6025859A (en) 1995-12-27 2000-02-15 Sharp Kabushiki Kaisha Electrostatic printer having an array of optical modulating grating valves
US5689361A (en) 1996-01-22 1997-11-18 Lucent Technologies Inc. Apparatus and method for femtosecond pulse compression based on selective attenuation of a portion of an input power spectrum
US5801074A (en) 1996-02-20 1998-09-01 Kim; Jong Tae Method of making an air tight cavity in an assembly package
JPH09230321A (ja) 1996-02-20 1997-09-05 Denso Corp カラー液晶表示装置
US5942791A (en) 1996-03-06 1999-08-24 Gec-Marconi Limited Micromachined devices having microbridge structure
US5694740A (en) 1996-03-15 1997-12-09 Analog Devices, Inc. Micromachined device packaged to reduce stiction
US6090717A (en) 1996-03-26 2000-07-18 Lam Research Corporation High density plasma etching of metallization layer using chlorine and nitrogen
US5731802A (en) 1996-04-22 1998-03-24 Silicon Light Machines Time-interleaved bit-plane, pulse-width-modulation digital display system
US5699740A (en) 1996-06-17 1997-12-23 Creo Products Inc. Method of loading metal printing plates on a vacuum drum
US5862164A (en) 1996-07-26 1999-01-19 Zygo Corporation Apparatus to transform with high efficiency a single frequency, linearly polarized laser beam into beams with two orthogonally polarized frequency components orthogonally polarized
US5745271A (en) 1996-07-31 1998-04-28 Lucent Technologies, Inc. Attenuation device for wavelength multiplexed optical fiber communications
US5798557A (en) 1996-08-29 1998-08-25 Harris Corporation Lid wafer bond packaging and micromachining
US5914801A (en) 1996-09-27 1999-06-22 Mcnc Microelectromechanical devices including rotating plates and related methods
US5919548A (en) 1996-10-11 1999-07-06 Sandia Corporation Chemical-mechanical polishing of recessed microelectromechanical devices
US6064404A (en) 1996-11-05 2000-05-16 Silicon Light Machines Bandwidth and frame buffer size reduction in a digital pulse-width-modulated display system
US5793519A (en) 1996-11-15 1998-08-11 Eastman Kodak Company Micromolded integrated ceramic light reflector
JP3604844B2 (ja) 1996-11-20 2004-12-22 キヤノン株式会社 カラー画像読取装置
US5898515A (en) 1996-11-21 1999-04-27 Eastman Kodak Company Light reflecting micromachined cantilever
US6154259A (en) 1996-11-27 2000-11-28 Photera Technologies, Inc. Multi-beam laser scanning display system with speckle elimination
US5923475A (en) 1996-11-27 1999-07-13 Eastman Kodak Company Laser printer using a fly's eye integrator
US5986634A (en) 1996-12-11 1999-11-16 Silicon Light Machines Display/monitor with orientation dependent rotatable image
US5844711A (en) 1997-01-10 1998-12-01 Northrop Grumman Corporation Tunable spatial light modulator
US5920411A (en) 1997-02-14 1999-07-06 Duck; Gary S. Optical multiplexing/demultiplexing device
US6177980B1 (en) 1997-02-20 2001-01-23 Kenneth C. Johnson High-throughput, maskless lithography system
US5892505A (en) 1997-03-17 1999-04-06 Tropper Technologies, Inc. Image viewing apparatus and method
US5982553A (en) 1997-03-20 1999-11-09 Silicon Light Machines Display device incorporating one-dimensional grating light-valve array
US5764280A (en) 1997-03-20 1998-06-09 Silicon Light Machines Inc. Display system including an image generator and movable scanner for same
US6071652A (en) 1997-03-21 2000-06-06 Digital Optics Corporation Fabricating optical elements using a photoresist formed from contact printing of a gray level mask
US6069392A (en) 1997-04-11 2000-05-30 California Institute Of Technology Microbellows actuator
US5773473A (en) 1997-04-15 1998-06-30 Green; Jerold L. Creatine supplement
US5768009A (en) 1997-04-18 1998-06-16 E-Beam Light valve target comprising electrostatically-repelled micro-mirrors
CH691559A5 (fr) 1997-04-21 2001-08-15 Asulab Sa Micro-contacteur magnétique et son procédé de fabrication.
US5999319A (en) 1997-05-02 1999-12-07 Interscience, Inc. Reconfigurable compound diffraction grating
US5912094A (en) 1997-05-15 1999-06-15 Lucent Technologies, Inc. Method and apparatus for making a micro device
US6096576A (en) 1997-09-02 2000-08-01 Silicon Light Machines Method of producing an electrical interface to an integrated circuit device having high density I/O count
US5978127A (en) 1997-09-09 1999-11-02 Zilog, Inc. Light phase grating device
US6088102A (en) 1997-10-31 2000-07-11 Silicon Light Machines Display apparatus including grating light-valve array and interferometric optical system
US6018065A (en) 1997-11-10 2000-01-25 Advanced Technology Materials, Inc. Method of fabricating iridium-based materials and structures on substrates, iridium source reagents therefor
US5955771A (en) 1997-11-12 1999-09-21 Kulite Semiconductor Products, Inc. Sensors for use in high vibrational applications and methods for fabricating same
US6075632A (en) 1997-11-26 2000-06-13 Hewlett-Packard Company Optical noise monitor
US6122299A (en) 1997-12-31 2000-09-19 Sdl, Inc. Angled distributed reflector optical device with enhanced light confinement
US6124145A (en) 1998-01-23 2000-09-26 Instrumentarium Corporation Micromachined gas-filled chambers and method of microfabrication
US6396789B1 (en) 1998-02-27 2002-05-28 Calimetrics, Inc. Data storage system and methods using diffractive near-field optics
US6195196B1 (en) 1998-03-13 2001-02-27 Fuji Photo Film Co., Ltd. Array-type exposing device and flat type display incorporating light modulator and driving method thereof
US6163402A (en) 1998-06-11 2000-12-19 3M Innovative Properties Company Rear projection screen
US6359333B1 (en) 1998-03-31 2002-03-19 Honeywell International Inc. Wafer-pair having deposited layer sealed chambers
US6163026A (en) 1998-03-31 2000-12-19 Intel Corporation Chemically stabilized light selective element for imaging applications
US5926318A (en) 1998-04-06 1999-07-20 Optimize Incorporated Biocular viewing system with intermediate image planes for an electronic display device
US5910856A (en) 1998-04-16 1999-06-08 Eastman Kodak Company Integrated hybrid silicon-based micro-reflector
US6084626A (en) 1998-04-29 2000-07-04 Eastman Kodak Company Grating modulator array
US6147789A (en) 1998-05-04 2000-11-14 Gelbart; Daniel High speed deformable mirror light valve
US5953161A (en) 1998-05-29 1999-09-14 General Motors Corporation Infra-red imaging system using a diffraction grating array
US6062461A (en) 1998-06-03 2000-05-16 Delphi Technologies, Inc. Process for bonding micromachined wafers using solder
US6271808B1 (en) 1998-06-05 2001-08-07 Silicon Light Machines Stereo head mounted display using a single display device
US6004912A (en) 1998-06-05 1999-12-21 Silicon Light Machines Vapor phase low molecular weight lubricants
US6101036A (en) 1998-06-23 2000-08-08 Silicon Light Machines Embossed diffraction grating alone and in combination with changeable image display
US6130770A (en) 1998-06-23 2000-10-10 Silicon Light Machines Electron gun activated grating light valve
US6215579B1 (en) 1998-06-24 2001-04-10 Silicon Light Machines Method and apparatus for modulating an incident light beam for forming a two-dimensional image
US6268952B1 (en) 1998-07-14 2001-07-31 Lightconnect, Inc. Micromechanical light steering optical switch
US6303986B1 (en) 1998-07-29 2001-10-16 Silicon Light Machines Method of and apparatus for sealing an hermetic lid to a semiconductor die
JP2000091818A (ja) 1998-09-11 2000-03-31 Toyota Motor Corp フィルム型伝送線路の製造方法および該線路の接続方法
US6300148B1 (en) 1998-10-05 2001-10-09 Advanced Micro Devices Semiconductor structure with a backside protective layer and backside probes and a method for constructing the structure
US6061166A (en) 1998-10-15 2000-05-09 Eastman Kodak Company Diffractive light modulator
JP3919954B2 (ja) 1998-10-16 2007-05-30 富士フイルム株式会社 アレイ型光変調素子及び平面ディスプレイの駆動方法
US6091521A (en) 1998-10-16 2000-07-18 Digilens, Inc. Light collection from diffractive displays
US6261494B1 (en) 1998-10-22 2001-07-17 Northeastern University Method of forming plastically deformable microstructures
US6123985A (en) 1998-10-28 2000-09-26 Solus Micro Technologies, Inc. Method of fabricating a membrane-actuated charge controlled mirror (CCM)
US6115168A (en) 1998-10-29 2000-09-05 Advanced Optical Technologies, Inc. Integrated optical retroreflecting modulator
US6144481A (en) 1998-12-18 2000-11-07 Eastman Kodak Company Method and system for actuating electro-mechanical ribbon elements in accordance to a data stream
US6038057A (en) 1998-12-18 2000-03-14 Eastman Kodak Company Method and system for actuating electro-mechanical ribbon elements in accordance to a data stream
US6181458B1 (en) 1998-12-18 2001-01-30 Eastman Kodak Company Mechanical grating device with optical coating and method of making mechanical grating device with optical coating
US6172796B1 (en) 1998-12-18 2001-01-09 Eastman Kodak Company Multilevel electro-mechanical grating device and a method for operating a multilevel mechanical and electro-mechanical grating device
US6252697B1 (en) 1998-12-18 2001-06-26 Eastman Kodak Company Mechanical grating device
US6188519B1 (en) 1999-01-05 2001-02-13 Kenneth Carlisle Johnson Bigrating light valve
JP4511739B2 (ja) 1999-01-15 2010-07-28 ザ リージェンツ オブ ザ ユニヴァーシティ オブ カリフォルニア マイクロ電子機械システムを形成するための多結晶シリコンゲルマニウム膜
JP4316050B2 (ja) 1999-05-31 2009-08-19 ボールセミコンダクター株式会社 マイクロマシンの製造方法
US6229683B1 (en) 1999-06-30 2001-05-08 Mcnc High voltage micromachined electrostatic switch
US6057520A (en) 1999-06-30 2000-05-02 Mcnc Arc resistant high voltage micromachined electrostatic switch
US6356577B1 (en) 1999-07-15 2002-03-12 Silicon Light Machines Method and apparatus for combining light output from multiple laser diode bars
US6169624B1 (en) 1999-08-11 2001-01-02 Asif A. Godil Achromatic optical modulators
US6222954B1 (en) 1999-09-17 2001-04-24 Light Bytes, Inc. Fault-tolerant fiber-optical beam control modules
US6563974B2 (en) 1999-09-17 2003-05-13 Nuonics, Inc. High resolution fault-tolerant fiber-optical beam control modules
US6229650B1 (en) 1999-10-18 2001-05-08 Agfa Corporation Optical imaging head having a multiple writing bean source
US6290864B1 (en) 1999-10-26 2001-09-18 Reflectivity, Inc. Fluoride gas etching of silicon with improved selectivity
US6290859B1 (en) 1999-11-12 2001-09-18 Sandia Corporation Tungsten coating for improved wear resistance and reliability of microelectromechanical devices
US6497490B1 (en) 1999-12-14 2002-12-24 Silicon Light Machines Laser beam attenuator and method of attenuating a laser beam
US6197610B1 (en) 2000-01-14 2001-03-06 Ball Semiconductor, Inc. Method of making small gaps for small electrical/mechanical devices
US6274469B1 (en) 2000-01-26 2001-08-14 Advanced Micro Devices, Inc. Process using a plug as a mask for a gate
US6525863B1 (en) 2000-02-25 2003-02-25 Nuonics, Inc. Multi-technology multi-beam-former platform for robust fiber-optical beam control modules
US6310018B1 (en) 2000-03-31 2001-10-30 3M Innovative Properties Company Fluorinated solvent compositions containing hydrogen fluoride
US6480634B1 (en) 2000-05-18 2002-11-12 Silicon Light Machines Image projector including optical fiber which couples laser illumination to light modulator
EP1172686A3 (en) 2000-07-03 2004-07-14 Creo IL. Ltd. Controllable diffractive grating array with perpendicular diffraction
CA2352729A1 (en) 2000-07-13 2002-01-13 Creoscitex Corporation Ltd. Blazed micro-mechanical light modulator and array thereof
US6943950B2 (en) 2000-08-07 2005-09-13 Texas Instruments Incorporated Two-dimensional blazed MEMS grating
US6466354B1 (en) 2000-09-19 2002-10-15 Silicon Light Machines Method and apparatus for interferometric modulation of light
US6323984B1 (en) 2000-10-11 2001-11-27 Silicon Light Machines Method and apparatus for reducing laser speckle
US6342690B1 (en) 2000-12-01 2002-01-29 O'donnell Steven B. Glow plug assembly method and construction
US20020105725A1 (en) 2000-12-18 2002-08-08 Sweatt William C. Electrically-programmable optical processor with enhanced resolution
US6384959B1 (en) 2001-01-09 2002-05-07 Eastman Kodak Company Optical data modulation system with self-damped electromechanical conformal grating
US6387723B1 (en) 2001-01-19 2002-05-14 Silicon Light Machines Reduced surface charging in silicon-based devices
US6445502B1 (en) 2001-02-02 2002-09-03 Celeste Optics, Inc. Variable blazed grating

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107561685A (zh) * 2017-09-30 2018-01-09 广东欧珀移动通信有限公司 滤光片、镜头模组和成像模组
CN107561685B (zh) * 2017-09-30 2020-10-02 Oppo广东移动通信有限公司 滤光片、镜头模组和成像模组

Also Published As

Publication number Publication date
EP1540405A1 (en) 2005-06-15
JP2005531808A (ja) 2005-10-20
WO2004003624A1 (en) 2004-01-08
CN100380169C (zh) 2008-04-09
EP1540405A4 (en) 2007-05-30
US6714337B1 (en) 2004-03-30
AU2003229297A1 (en) 2004-01-19

Similar Documents

Publication Publication Date Title
CN1678940A (zh) 用于调制光束并具有改进的伽玛响应的方法和装置
CN1252496C (zh) 显示设备
DE112017001326T5 (de) Anzeige für zweidimensionale und/oder dreidimensionale Bilder
KR101826740B1 (ko) 다층 나노 구조를 갖는 음향광학 소자, 및 상기 음향광학 소자를 이용한 광 스캐너, 광 변조기 및 디스플레이 장치
US20180074352A1 (en) Method and apparatus for contact image sensing
CN1180306C (zh) 具有预定的频啁啾的光学调制器
KR20090022596A (ko) 회절형 광변조기 및 이를 포함하는 디스플레이 장치
CN1653375A (zh) 具有宽光学带宽的电吸收调制器
KR20070086425A (ko) 액정 디스플레이 및 디스플레이 휘도 조정 방법
CN1682132A (zh) 用于提供光束偏振的方法和系统
US9477101B2 (en) Nanostructured acousto-optic device, and optical scanner, optical modulator, and holographic display apparatus using the nanostructured acousto-optic device
CN1672089A (zh) 具有部分转变的半透反射式液晶显示器
CN109031760B (zh) 一种3d液晶显示面板、显示装置和驱动方法
CA3035799C (en) Transparent display and method
US20110090427A1 (en) Light guide plate, backlight device and liquid crystal display device
CN110703466A (zh) 一种二元相变光调制单元、调制方法、光调制装置及设备
KR20160042877A (ko) 액정 결합 광변조
DE10300689B4 (de) Bildscanner mit einem einzigen Motor, der eine zweidimensionale Bewegung von Photosensoren liefert
US11378729B2 (en) Backlight, multiview display and method having a grating spreader
DE102008011852A1 (de) Trapezkorrekturverfahren und Displayvorrichtung
CN114815961A (zh) 片上光学衍射计算处理器及全光学图像分类设备
KR101910983B1 (ko) 나노 구조화된 음향광학 소자, 및 상기 음향광학 소자를 이용한 광 스캐너, 광 변조기 및 홀로그래픽 디스플레이 장치
WO1995005944A1 (en) A printer and a print engine therefor
Nordin et al. Liquid crystal-on-silicon implementation of the partial pixel three-dimensional display architecture
KR20050016932A (ko) 광빔을 변조하며 개선된 감마 응답을 갖는 방법 및 디바이스

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20080409

Termination date: 20100514