CN1853130A - 可分开式调制器 - Google Patents

可分开式调制器 Download PDF

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CN1853130A
CN1853130A CNA2004800267657A CN200480026765A CN1853130A CN 1853130 A CN1853130 A CN 1853130A CN A2004800267657 A CNA2004800267657 A CN A2004800267657A CN 200480026765 A CN200480026765 A CN 200480026765A CN 1853130 A CN1853130 A CN 1853130A
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catoptron
modulator
electrode
sacrifice layer
optical stack
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杰弗里·B·桑普塞尔
马克·W·迈尔斯
克拉伦斯·徐
马尼什·科塔里
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Qualcomm MEMS Technologies Inc
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IDC LLC
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    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/137—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering
    • G02F1/13725—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering based on guest-host interaction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12104—Mirror; Reflectors or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/216—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference using liquid crystals, e.g. liquid crystal Fabry-Perot filters
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/03—Function characteristic scattering
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/3433—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
    • G09G3/3466—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices based on interferometric effect

Abstract

本发明揭示一种可分开式调制器架构。所述调制器具有一在一空腔上方悬挂于一挠性层上的反射镜。所述挠性层还形成所述反射镜的支撑件及支撑柱。一替代的可分开式调制器架构具有一悬挂于一空腔上方的反射镜。所述调制器由支撑件及支撑柱来支撑。所述支撑柱包括一位于支撑柱插塞上方的挠性层。一总线结构可形成于设置在所述支撑柱上方的所述挠性层上。

Description

可分开式调制器
相关申请案交叉参考
本申请案为2002年2月19日提出申请的第10/078,282号美国专利申请案的部分接续式申请案，第10/078,282号美国专利申请案为2001年11月21日提出申请的第09/991,378号申请案的分案申请，第09/991,378号申请案为1996年12月19提出申请的第08/769,947号申请案(现已放弃)的接续式申请案，第08/769,947号申请案为1994年5月5日提出申请的第08/238,750号申请案(现为第5,835,255号专利)的部分接续式申请案，而第08/238,750号申请案则为在1995年11月6日提出申请的第08/554,630号申请案(现已放弃)的部分接续式申请案。
技术领域
用于成像应用的空间光调制器具有许多种不同的形式。透射式液晶装置(LCD)调制器通过控制晶体材料的扭转及/或配向以阻断或通过光来对光进行调制。反射式空间光调制器则利用不同的物理效应来控制反射至成像表面的光量。这种反射式调制器的实例包括反射式LCD及数字微反射镜器件(DMDTM)。
空间光调制器的另一实例是一通过干涉对光进行调制的干涉式调制器，例如iMoDTM。iMoD采用一具有至少一个可移动或可偏转的壁的空腔。当该壁(其通常至少部分地由金属构成)朝该空腔的正面移动时会发生干涉，此种干涉会影响在该正面处观看到的光的色彩。由于iMOD是直视式装置，因而该正面通常是显现由观察者所看到的图像的表面。
目前，iMoD是由形成于支撑件上的薄膜构造而成，这些支撑件界定构成图像像素(pixel)的各个机械元件。在单色显示器(例如一在黑色与白色之间转换的显示器)中，一个iMoD元件可对应于一个像素。在彩色显示器中，三个iMoD元件可构成每一像素—红色、绿色及蓝色各一个。
分别控制各个iMoD元件来产生所需的像素反射率。通常，对空腔的可移动壁施加一电压，使其被静电吸引至正面，此又会影响观察者所看到的像素的色彩。不过，因iMoD是基于一薄膜，故在元件的边缘周围可能会出现一些讨厌的假象。当薄膜朝正面偏转或变形时，薄膜通常达不到一均匀的平整度。薄膜的弯离牢牢抵靠所述正面的完全变形薄膜的部分距所述正面不同的距离，此可造成讨厌的假象。
由于iMoD通常用作直视式装置，因此可对空腔的可移动部分的背面进行操作而不会对图像质量造成负面影响。这还可在制造这些器件的其他方面中提供更多的自由。
背景技术
本申请案为2002年2月19日提出申请的第10/078,282号美国专利申请案分部分接续式申请案，第10/078,282号美国专利申请案为2001年11月21日提出申请的第09/991,378号申请案的分案申请，第09/991,378号申请案为1996年12月19提出申请的第08/769,947号申请案(现已放弃)的接续式申请案，第08/769,947号申请案为1994年5月5日提出申请的第08/238,750号申请案(现为第5,835,255号专利)的部分接续式申请案，而第08/238,750号申请案则为在1995年11月6日提出申请的第08/554,630号申请案(现已放弃)的部分接续式申请案。
用于成像应用的空间光调制器具有许多种不同的形式。透射式液晶装置(LCD)调制器通过控制晶体材料的扭转及/或配向以阻断或通过光来对光进行调制。反射式空间光调制器则利用不同的物理效应来控制反射至成像表面的光量。这种反射式调制器的实例包括反射式LCD及数字微反射镜器件(DMDTM)。
空间光调制器的另一实例是一通过干涉对光进行调制的干涉式调制器，例如iMoDTM。iMoD采用一具有至少一个可移动或可偏转的壁的空腔。当该壁(其通常至少部分地由金属构成)朝该空腔的正面移动时会发生干涉，此种干涉会影响在该正面处观看到的光的色彩。由于iMOD是直视式装置，因而该正面通常是显现由观察者所看到的图像的表面。
目前，iMoD是由形成于支撑件上的薄膜构造而成，这些支撑件界定构成图像像素(pixel)的各个机械元件。在单色显示器(例如一在黑色与白色之间转换的显示器)中，一个iMoD元件可对应于一个像素。在彩色显示器中，三个iMoD元件可构成每一像素—红色、绿色及蓝色各一个。
分别控制各个iMoD元件来产生所需的像素反射率。通常，对空腔的可移动壁施加一电压，使其被静电吸引至正面，此又会影响观察者所看到的像素的色彩。不过，因iMoD是基于一薄膜，故在元件的边缘周围可能会出现一些讨厌的假象。当薄膜朝正面偏转或变形时，薄膜通常达不到一均匀的平整度。薄膜的弯离牢牢抵靠所述正面的完全变形薄膜的部分距所述正面不同的距离，此可造成讨厌的假象。
由于iMoD通常用作直视式装置，因此可对空腔的可移动部分的背面进行操作而不会对图像质量造成负面影响。这还可在制造这些器件的其他方面中提供更多的自由。
发明内容
本发明的一个实施例是一种可分开式调制器架构。所述调制器具有一在一空腔上方悬挂于一挠性层上的反射镜。所述挠性层还可形成所述反射镜的支撑件及支撑柱。
所述可分开式调制器架构的一替代实施例具有一悬挂于一空腔上方的反射镜。所述反射镜由一挠性层、若干支撑件及若干支撑柱支撑。所述挠性层形成所述支撑件并位于所述支撑柱顶部。在此实施例中，所述支撑柱与所述挠性层分开制成。
在再一替代实施例中，一总线结构形成于所述挠性层上面。所述总线结构设置成电连接至并由所述支撑柱的全部或其一子集支撑。
附图说明
通过参照附图来阅读所揭示内容，可更好地理解本发明，在图式中：
图1显示一干涉式调制器的一实施例。
图2显示一干涉式调制器的一替代实施例。
图3显示一干涉式调制器的一剖面图。
图4显示一干涉式调制器的另一实施例的一剖面图。
图5显示一具有位于一挠性层后面的地址总线连接的干涉式调制器实施例的一剖面图。
图6a-6g显示贯穿于一种干涉式调制器制造方法的一实施例的初期步骤的调制器剖面图。
图7a-7f显示贯穿一种使用一平坦化层的干涉式调制器制造方法的一实施例的后期步骤的调制器剖面图。
图8a-8d显示贯穿一种不使用平坦化层的干涉式调制器制造方法的一实施例的后期步骤的调制器剖面图。
图9a-9f显示一种具有位于一挠性层后面的地址总线连接的干涉式调制器制造方法的后期步骤的剖面图。
图10a及10b显示用于一可分开式干涉式调制器的底板支撑件的替代实施例。
图11a-11d显示其中像素色彩可由挠性层性质来控制的干涉式调制器替代实施例的布置图及剖面图。
图12a及12b显示其中使用着陆垫来修改移动反射镜及挠性层机电性质的实施例的剖面图。
具体实施方式
图1显示一干涉式调制器的一侧视图。调制器2设置于一通常为玻璃的透明衬底10上。一主反射镜12设置于一电极顶部上，该电极允许对一干涉式调制器阵列中的各个元件进行寻址。悬挂于一空腔14上方的是一副反射镜16，其位于一薄膜15上或为薄膜15的一部分。支撑臂(例如13)可为与薄膜15相同的层的一部分，其支撑反射镜16并将其固定至支撑柱18。支撑臂及薄膜15是挠性的。这使副反射镜16能够移动进入空腔14中，从而将其带至更接近于主反射镜且因此影响空腔的干涉性质。
通常，副反射镜呈一远离主反射镜的静止状态—亦可称作“白色”状态或远位置。必须了解，“白色”(或ON)状态可为除白色以外的任何离散色彩。如下文将更详细说明，任何由若干彩色元件(例如红色、绿色及蓝色)构成的像素均可能对观察者呈白色。
当这两个反射镜分开时，图像中的合成像素呈现白色或ON。当对一个或另一个反射镜施加一电压时，会在空腔中建立一静电电位，所述静电电位将副反射镜拉向主反射镜。反射镜的移动会改变空腔的尺寸。在一“近”位置中，干涉效应使合成像素变成黑色—在一单色系统中。或者，如将进一步说明，该近位置可能引起干涉以产生其他色彩的光，例如红色、绿色及蓝色。
改变空腔14的干涉性质会使从透明衬底10的正面(与上面设置有调制器的面相反的面)观察到的图像能够发生改变。例如，假如在正面上观察到图像为单色的，则对应于干涉式调制器元件4的一像素(pixel)可能显现成一黑色像素。对彩色图像而言，对于在正面上观察到的每一像素均可有三个干涉式调制器元件。此将在下文中进一步详细说明。
如可在图1的元件4中见到，存在一区域17，其中支撑壁的弯曲可使主反射镜与副反射镜之间的距离不等。这种不等的距离又可影响所观察像素的边缘周围的空腔的干涉性质。可将副反射镜悬挂于一背面支撑件上来缓解这一问题。
如可在图2中见到，副反射镜24由一背面支撑件26悬挂于主反射镜22的上方。衬底20为一透射式衬底，例如也为玻璃。图2中所示的构造可对出现在例如图1所示构造中的边缘效应提供更好的控制。另外，高架线28可提供将控制互连线远离衬底定位的机会，从而增加透射式衬底上可供用于像素的有效区域。
图3、4及5中显示可比现有构建方案提供更好性能的干涉式调制器的替代实施例的剖面图。在图3中，调制器100包括一由一薄膜40悬挂在一空腔上方的反射镜38。玻璃衬底30上已形成了一电极层32、一由一金属层(例如铬)34及一氧化层36形成的光学堆叠。在此实施例中，薄膜40(其可为一挠性金属且因此在此处称作挠性层)与形成支撑柱的光学堆叠接触。
相比之下，图4的调制器200具有的支撑柱插塞(例如42)，挠性层40位于这些支撑柱插塞上。反射镜38仍如在前一调制器中一样悬挂在空腔上方，但挠性层并不通过填充挠性层与光学堆叠之间的孔来形成支撑柱。而是，如下文所更详细说明，支撑柱是由一平坦化材料形成。
在图5中，显示干涉式元件的再一实施例。调制器300的此具体实施例是基于图4的调制器200，但可经修改后与实施例100或200以及干涉式调制器的其他构造一起使用。在实施例300中，已使用一额外的金属或其他导电材料层形成一总线结构44。这将允许信号沿干涉式调制器的背面选路，从而可能会消除多个原本可能不得不形成于玻璃衬底上的电极。
调制器100、200及300具有不同的构造，但具有某些共同的处理步骤。图6a-6g中显示用于形成各种构造的初始过程。图6a显示一由适当材料(例如氧化铟锡(ITO))形成电极层32、及一由金属(例如铬)形成的光学堆叠34的形成。这些材料形成于一透明衬底30上。透明衬底的观察表面位于衬底的“底部”(即与上面形成所述电极及光学堆叠的衬底面相反的面)上。在一此处未显示的过程中，对电极32及金属层34进行图案化及蚀刻，以根据显示器设计要求形成电极列、行或其他适用的形状。
在图6b中，形成于金属层32顶部并填充各已图案化电极元件之间的间隙的是一氧化层36、一第一牺牲层46及反射镜金属层38。第一牺牲层46将决定上方悬挂有所述反射镜的空腔的尺寸。如上文所述，色彩调制器可通过对合成图像中的每一像素使用三个调制器元件来形成。在干涉式调制器中，空腔的尺寸决定干涉的性质。如前面所述，在一单色构建方案中使反射镜完全朝光学堆叠移动反射镜会使一“彩色”像素变“黑”。同样地，使反射镜部分地朝光学堆叠移动可使像素色彩变成不同于静态色彩值的值。
一种形成彩色像素的方法是构造具有不同深度的空腔以便来自三个不同深度空腔的合成静态色彩为红色、绿色和蓝色。所述空腔的干涉性质直接受其深度影响。为了影响这些不同的空腔尺寸，可沉积三个牺牲层46。将沉积、遮罩及图案化一第一层，从而对形成每一像素的这三个调制器之一的区域加以界定；然后沉积一第二层。然后，对该层施加一第二掩模，并对其图案化以对形成每一像素的上文所界定第一调制器以及第二调制器的组合区域加以界定。最后，施加一第三牺牲层。该第三层不需要图案化，因为其厚度将包括在形成每一像素的所有三个调制器中。
此处所述的三个单独的沉积层未必是相同厚度。这将使每一像素中有一个调制器具有一由三个层组合成的厚度、有一个调制器具有一由两层组合成的厚度且有一个调制器具有单个牺牲层的厚度。在移除牺牲层材料以后，空腔尺寸将因这三个牺牲层的不同组合厚度而异，由此产生三种不同的色彩，例如红色、绿色和蓝色。
回到图6c，适当沉积并图案化一光阻剂层48。然后，如图6d所示，按光阻剂图案所规定对所述结构进行蚀刻，从而在牺牲岛50顶部形成反射镜。然后，在图6e中，沉积一第二牺牲层51。然后，在图6f中，将光阻剂52应用至第二牺牲层上并对其进行图案化。在图6g中，第一牺牲层46及第二牺牲层51的某些部分已被蚀刻掉，从而形成诸如支撑柱位置54b及支撑件位置54a等位置，而且光阻剂层也已被剥离。
在此过程中，这时，制造图3中的调制器100或图4中的调制器200的方法出现偏离。具有支撑柱插塞42的图4所示调制器200具有如图7a-7f所示的过程。在图7a中，图6g所示的结构上添加了一平坦化层56。平坦化材料填充位置54a及54b。如图7b中所示，部分地移除平坦化材料，从而形成支撑柱插塞58。然后，在图7c中，将挠性层—亦可称作机械层40-应用于支撑柱插塞上。
在图7d中，应用并图案化一光阻剂层62。此用作一蚀刻掩模来图案化挠性层40。在图7e中，已对挠性层40进行了图案化。在此处所示的剖面图中，图案化效果并不明显。下文将参照图10a及10b来说明显示挠性层图案化实施例的调制器元件的后视图。最后，在图7f中，如果将不使用总线连接层，则将牺牲层移除—通常通过等离子体蚀刻。所得到的调制器200具有一空腔60，其中反射镜悬挂在光学堆叠上方。
回到图6g，现在将对调制器100的处理进行说明。并非如图7a中所述应用一平坦化层，而是如图8a中所示将金属层40直接应用至第二牺牲层51及位置54a和54b上。这使挠性层在其填充位置54b处形成支撑柱并在其充填例如54a等位置处形成背面支撑件。此方法具有取消平坦化过程的优点，此既可简化制造过程又可简化所形成的结构。
如图8b中所示，在应用挠性层40之后，使用一光阻剂62来对挠性层40进行图案化。在图8c中，虽然从该视图中辨别不出，但已对挠性层40进行了图案化来形成调制器的独特机械性质，此将在下文中作进一步说明。最后，在图8d中，已移除牺牲层，从而形成调制器100中的空腔60。在此实施例中，未使用背面总线连接结构。
图9a-9c中显示一用于添加一背面总线连接结构的过程流程的实例。所示过程始于在将挠性层图案化后但在将牺牲层移除前的图7e及8c中所形成的结构。为便于说明，使用具有图7e中所示支撑柱插塞的调制器构造，但该构造可同等地适用于如图8c所示的其中不存在支撑柱插塞的各实施例。
在图9a中，对挠性层40应用一第三牺牲层64。在图9b中，应用一光阻剂层66。然后对该光阻剂层进行图案化并对该结构进行蚀刻以形成若干例如69的孔。在图9c中，应用一导电总线层68来经由孔69提供总线层68与挠性层40之间的接触。此会提供使总线层68上的信号可用于控制挠性层40的电连接。
在图9d中，应用一光阻剂层70并对其进行图案化。在图9e中，图案化并蚀刻或以其他方式移除总线层68，以使总线层68的其余部分形成图9f所示的总线结构71。在图9f中，也移除牺牲层，从而产生具有总线结构71及空腔60的调制器300。
由于反射镜在衬底的观察面与挠性层背面之间提供光学屏蔽，因而总线结构是可能的。此会提供将调制器的光学性质与机电性质分开的能力。光学性质(其通过使用任一实施例中的悬挂式反射镜38得到改良)与机电性质(例如寻址及由寻址引起的移动)相分开。这种可分开式调制器架构使得在调制器背面的使用具有更多的自由，因为其会防止对挠性薄膜背面实施的任何过程或所添加的结构影响调制器的光学性能。
图10a及10b中显示用于挠性薄膜40背面上的可能图案。这些视图是自调制器背面进行观察，其亦可视为前面图式中所示的调制器的顶部。在图10a中，牺牲层52经图案化形成大的中心背面支撑件74，所述大的中心背面支撑件74由四个随后由挠性层40填充的小的支撑件76a-d环绕。层40只有在经过图案化并从薄膜边缘移除后才能使其与毗邻的调制器元件分开，否则会使反射镜悬挂在支撑柱72a-72b上。
或者，在图10b中，对挠性层进行图案化以形成与每一支撑柱72a-d连接的薄的线性带。通过中心支撑件74将这些带固定至反射镜上。这两种主要替代方案可影响反射镜的移动自由及该移动的详细机械特性。在某些情形中，这可能是一优点。
例如，在上文给出的彩色调制器实例中，需要三个遮罩及沉积过程来形成三个不同的空腔深度。作为一替代方案，可通过不同的设计及过程参数来改变挠性层、支撑结构及挠性层与支撑柱之间界面的详细机械特性。这使同一深度的空腔能够用于不同色彩的像素。在牺牲层被移除后，不同的设计参数会修改反射镜在空腔内的静态位置。
图11a中显示一种可能的像素构造80。此视图是观察者从衬底的正面所看到的，且由九个元件构成：红色、绿色和蓝色各三个。如图所示，调制器802可对应于蓝色，804对应于绿色，而806对应于红色。可通过改变反射镜与光学堆叠之间的距离来获得这三种不同的色彩。当对调制器施加一电压时，所述调制器可均朝电极移动一相同的距离或者其可均朝电极移动不同的距离。事实上，所有三个调制器均可横越整个空腔并移动至一使其与衬底106直接接触的近位置。空腔在静止状态下的尺寸分别如图11b、11c和11d中的垂直尺寸82、84、和86所示。
例如，一个对应于合成像素中一种色彩的调制器的一个反射镜38a可具有设计用于使反射镜停留在一小于所制成牺牲层的距离82上的背部支撑件、一挠性层及支撑柱界面。一个对应于另一种色彩的调制器的一第二反射镜38b可具有设计用于在移除牺牲层后使反射镜停留在牺牲层的制成厚度84处的背部支撑件、一挠性层及支撑柱界面。最后，另一对应于又一种色彩的调制器的一第三反射镜38c可具有设计用于在移除牺牲层后使反射镜停留在一大于牺牲层的制成厚度的距离86上的背部支撑件、一挠性层及支撑柱界面。通过这种方式，控制支持件的机械特性及/或物理限制的结果是形成三种不同的空腔尺寸，且由此使用单个牺牲材料厚度产生三种不同的像素色彩。
另一选择为，各调制器可全部从牺牲层释放并停留在同一位置。可操纵挠性层和支撑件的不同特性以使反射镜在施加相同的电压时移动不同的距离。又一选择为，所有调制器可具有相同的结构，但施加不同电压来获得不同色彩。
除通过将调制器的机电性质与光学性质分开所获得的自由外，悬挂式反射镜还提供其他机会。如上文所述，悬挂式反射镜可缓解可因薄膜弯曲而出现的讨厌的假象。如上文所述，可通过将反射镜偏转至非常接近于或直接接触空腔正面上的光学堆叠来获得像素的一黑色状态。这两种获得黑状态的方法均可能具有缺点。以静电方式使一反射镜阵列保持非常小的间隙可能要求调制器以相当高的精度构造而成。允许反射镜直接接触光学堆叠会防止设计者使用某些不兼容的反射镜/光学堆叠材料组合。
为了消除这些限制，可在氧化层36顶上制作一系列应用至调制器100的如图12所示的小着陆垫90。这些着陆垫可使用用于其他iMoD层的相同沉积及微影技术、由普通的与薄膜工艺兼容的材料构造而成。这些着陆垫可足够小以便当其分布于整个空腔的正面上来影响整个反射镜38的作业时，基本上不会为人眼所看到。
使用这些着陆垫可达到几个不同的目的。着陆垫可使得在选择光学堆叠材料时完全自由，因为着陆垫会防止反射镜38接触氧化层36。实际上，绝缘着陆垫90将原则上允许光学堆叠的顶层为一导体而不是一绝缘体。着陆垫可通过改变空腔中的电场分布来改变iMoD的机械作业。着陆垫可实现一双模作业类别，其中反射镜38保持平坦直至其碰撞到着陆垫为止，然后，随着电压的升高，像一薄膜那样弯曲以使每一像素能够获得多个精确的色彩值。
图12b中显示一第二着陆垫构造，其中挠性层40而非反射镜38接触着陆垫92。通过此种方式，调制器具有两个分开的机械行为范围：一个是在挠性层接触着陆垫之前，而一个是在挠性层接触着陆垫之后。这就允许以由着陆垫92的厚度所设定的精确均匀性获得每一像素多种色彩。
通过此种方式，可改良干涉式调制器的制造和作业。悬挂式反射镜会增加可用于形成图像中一合成像素的有效区域并消除许多种可能的讨厌的假象。将支撑结构固定至反射镜背面上还会在制造过程中提供更多自由。由背面支撑件所实现的互连还可使须沉积在玻璃上的电极减少，从而获得更大的可用空间。光学性质与机电性质相分开可因挠性薄膜与调制器光学性质相分开而带来先前无法获得的机会。
因此，虽然本文至此已对一种用于干涉式调制器的方法及装置以及其制造方法的一具体实施例进行了阐述，但除非在随附权利要求书中提及外，并不打算将这些特定说明视为对本发明范围的限制。

Claims (33)

1、一种光调制器，其包括：
一具有第一和第二表面的反射镜，其悬挂在一设置在所述第一表面下面的空腔上方；
固定至所述反射镜的所述第二表面的支撑件；
通过所述支撑件将所述反射镜悬挂于所述空腔上方的支撑柱，所述支撑柱及支撑件由一相同的材料层形成；及
一电极及一光学堆叠，其从所述反射镜跨过所述空腔与所述第一表面相对地定位，以使所述电极的启动使所述反射镜朝所述电极移动，从而改变所述空腔的尺寸和干涉性质。
2、如权利要求1所述的光调制器，所述调制器包括一总线结构，所述总线结构固定至毗邻所述反射镜的所述第二表面的所述支撑柱。
3、如权利要求1所述的光调制器，所述调制器包括一设置于所述电极及光学堆叠上的着陆垫。
4、如权利要求3所述的光调制器，所述着陆垫设置于所述反射镜的下面。
5、如权利要求3所述的光调制器，所述着陆垫设置成接触所述支撑件。
6、一种光调制器，其包括：
一具有第一及第二表面的反射镜，其悬挂于一设置于所述第一表面下面的空腔上方；
固定至所述反射镜的所述第二表面上的支撑件；
通过所述支撑件将所述反射镜悬挂于所述空腔上方的支撑柱，所述支撑柱具有支撑柱插塞；及
一电极及一光学堆叠，其从所述反射镜跨过所述空腔与所述第一表面相对地定位，以使所述电极的启动使所述反射镜朝所述电极移动，从而改变所述空腔的尺寸及干涉性质。
7、如权利要求6所述的光调制器，所述调制器包括一总线结构，所述总线结构固定至毗邻所述反射镜的所述第二表面的所述支撑柱。
8、如权利要求6所述的光调制器，所述调制器包括一设置于所述电极及光学堆叠上的着陆垫。
9、如权利要求8所述的光调制器，所述着陆垫设置于所述反射镜下面。
10、如权利要求8所述的光调制器，所述着陆垫设置成接触所述支撑件。
11、一种光调制器，其包括：
一具有第一及第二表面的反射镜，其悬挂于一设置在所述第一表面下面的空腔上方；
固定至所述反射镜的所述第二表面上的支撑件；
通过所述支撑件将所述反射镜悬挂于所述空腔上方的支撑柱；
一总线结构，其毗邻所述反射镜的所述第二表面固定至所述支撑柱；及
一电极及一光学堆叠，其从所述反射镜跨过所述空腔与所述第一表面相对地定位，以使所述电极的启动会使所述反射镜朝所述电极移动，从而改变所述空腔的尺寸及干涉性质。
12、如权利要求11所述的调制器，所述支撑柱由一与所述支撑件相同的层形成。
13、如权利要求11所述的调制器，所述支撑柱由支撑柱插塞形成。
14、如权利要求11所述的调制器，所述调制器包括一设置于所述电极及光学堆叠上的着陆垫。
15、一种光调制器阵列，其包括：
至少三个调制器，其经设置以形成一合成像素；
每一调制器均包括一由支撑件悬挂于一空腔上方的反射镜，所述支撑件形成为使对应于每一色彩的每一调制器均呈一对应于一具有一不同尺寸的空腔的静止状态。
16、一种制造一光调制器的方法，所述方法包括：
在一透明衬底的背面上形成一电极及光学堆叠；
在所述电极及光学堆叠上沉积一第一牺牲层；
在所述第一牺牲层上形成反射镜；
在所述反射镜上沉积一第二牺牲层；
毗邻所述反射镜形成柱孔；
使用一平坦化层来形成支撑柱插塞；
在所述支撑柱插塞上沉积一挠性层并在所述挠性层与所述反射镜之间形成固定；及
移除所述第一及第二牺牲层。
17、如权利要求16所述的方法，所述方法包括在设置于所述支撑柱插塞上方的所述挠性层上形成总线结构。
18、如权利要求16所述的方法，形成固定进一步包括形成具有预定机械性质的支撑件，以使所述反射镜呈一相对于所述电极及光学堆叠处于一预定垂直位置上的静止状态。
19、如权利要求16所述的方法，形成固定进一步包括形成具有预定物理限制的支撑件，在施加一恒定电压时，所述预定物理限制使所述反射镜相对于所述电极及光学堆叠移动至一预定位置。
20、如权利要求16所述的方法，所述方法包括在所述电极及光学堆叠上形成一着陆垫阵列。
21、如权利要求20所述的方法，形成一着陆垫进一步包括形成具有不同厚度的着陆垫以控制所述反射镜的一移动量。
22、如权利要求16所述的方法，沉积一第一牺牲层进一步包括沉积所述第一牺牲层的三种厚度，一调制器的所述所沉积厚度相依于所述调制器的一色彩名称。
23、一种制造一光调制器的方法，所述方法包括：
在一透明衬底的背面上形成一电极及光学堆叠；
在所述电极及光学堆叠上沉积一第一牺牲层；
在所述第一牺牲层上形成反射镜；
在所述反射镜上形成一第二牺牲层；
毗邻所述反射镜形成柱孔；
在所述第二牺牲层上沉积一挠性层以便形成所述挠性层与所述反射镜之间的固定且使所述挠性层填充所述柱孔从而形成支撑柱；及
移除所述第一及第二牺牲层。
24、如权利要求23所述的方法，所述方法包括在所述支撑柱上形成总线结构。
25、如权利要求23所述的方法，沉积所述挠性层进一步包括沉积所述挠性层并对其进行图案化及蚀刻，以提供具有预定机械性质的支撑件，以使所述反射镜呈一相对所述电极及光学堆叠处于一预定垂直位置上的静止状态。
26、如权利要求23所述的方法，形成固定进一步包括沉积所述挠性层并对其进行图案化及蚀刻，以形成具有预定物理限制的支撑件，在施加一恒定电压时，所述预定物理限制使所述反射镜相对于所述电极及光学堆叠移动至一预定位置。
27、如权利要求23所述的方法，所述方法包括在所述电极及光学堆叠上形成一着陆垫阵列。
28、如权利要求27所述的方法，形成一着陆垫阵列进一步包括形成具有不同厚度的着陆垫以控制所述反射镜的一移动量。
29、如权利要求23所述的方法，沉积一第一牺牲层进一步包括沉积所述第一牺牲层的三种厚度，一调制器的所述所沉积厚度相依于所述调制器的一色彩名称。
30、一种制造一光调制器的方法，所述方法包括：
在一第一牺牲层上面形成一反射镜，所述反射镜固定至一第二牺牲层上面的一挠性层上并具有支撑柱；
在所述挠性层上面沉积一第三牺牲层；
在设置于所述支撑柱上方的所述第三牺牲层顶上的一导电层中形成总线结构；及
移除所述牺牲层。
31、如权利要求30所述的方法，形成一反射镜包括形成一具有由所述挠性层的一部分所构成的支撑柱的反射镜。
32、如权利要求30所述的方法，形成一反射镜包括形成一具有支撑柱插塞的反射镜。
33、如权利要求30所述的方法，所述方法包括在所述第一牺牲层下面形成一着陆垫。
CNA2004800267657A 2003-08-19 2004-08-12 可分开式调制器 Pending CN1853130A (zh)

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