CN1917146A - 形成多晶硅薄膜的方法及用该方法制造薄膜晶体管的方法 - Google Patents
形成多晶硅薄膜的方法及用该方法制造薄膜晶体管的方法 Download PDFInfo
- Publication number
- CN1917146A CN1917146A CNA2006101038567A CN200610103856A CN1917146A CN 1917146 A CN1917146 A CN 1917146A CN A2006101038567 A CNA2006101038567 A CN A2006101038567A CN 200610103856 A CN200610103856 A CN 200610103856A CN 1917146 A CN1917146 A CN 1917146A
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- Prior art keywords
- laser beam
- amorphous silicon
- polysilicon
- membrane
- zone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 133
- 238000000034 method Methods 0.000 title claims abstract description 66
- 239000010409 thin film Substances 0.000 title claims abstract description 29
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 9
- 229910021417 amorphous silicon Inorganic materials 0.000 claims abstract description 85
- 239000000758 substrate Substances 0.000 claims abstract description 44
- 230000008018 melting Effects 0.000 claims abstract description 24
- 238000002844 melting Methods 0.000 claims abstract description 24
- 239000012528 membrane Substances 0.000 claims description 95
- 229920005591 polysilicon Polymers 0.000 claims description 90
- 239000013078 crystal Substances 0.000 claims description 43
- 230000012010 growth Effects 0.000 claims description 39
- 239000010408 film Substances 0.000 claims description 38
- 238000006073 displacement reaction Methods 0.000 claims description 8
- 239000000155 melt Substances 0.000 claims description 4
- 238000000059 patterning Methods 0.000 claims description 2
- 230000005855 radiation Effects 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 28
- 229910052710 silicon Inorganic materials 0.000 abstract description 28
- 239000010703 silicon Substances 0.000 abstract description 27
- 230000001678 irradiating effect Effects 0.000 abstract 1
- 239000007791 liquid phase Substances 0.000 description 30
- 229920001296 polysiloxane Polymers 0.000 description 29
- 230000015572 biosynthetic process Effects 0.000 description 18
- 239000007790 solid phase Substances 0.000 description 17
- 238000002425 crystallisation Methods 0.000 description 11
- 230000008025 crystallization Effects 0.000 description 11
- 230000004888 barrier function Effects 0.000 description 8
- 239000010410 layer Substances 0.000 description 7
- 239000011261 inert gas Substances 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 230000003760 hair shine Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000005224 laser annealing Methods 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 239000002253 acid Substances 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 229910021419 crystalline silicon Inorganic materials 0.000 description 2
- 150000004820 halides Chemical class 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- -1 mercury halide Chemical class 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- RCTYPNKXASFOBE-UHFFFAOYSA-M chloromercury Chemical compound [Hg]Cl RCTYPNKXASFOBE-UHFFFAOYSA-M 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 239000010979 ruby Substances 0.000 description 1
- 229910001750 ruby Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
- H01L21/02686—Pulsed laser beam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02422—Non-crystalline insulating materials, e.g. glass, polymers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/127—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement
- H01L27/1274—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement using crystallisation of amorphous semiconductor or recrystallisation of crystalline semiconductor
- H01L27/1285—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement using crystallisation of amorphous semiconductor or recrystallisation of crystalline semiconductor using control of the annealing or irradiation parameters, e.g. using different scanning direction or intensity for different transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/04—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes
- H01L29/045—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes by their particular orientation of crystalline planes
Abstract
Description
Claims (24)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050076347A KR101132404B1 (ko) | 2005-08-19 | 2005-08-19 | 다결정 실리콘 박막의 제조 방법 및 이를 포함하는 박막트랜지스터의 제조 방법 |
KR1020050076347 | 2005-08-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1917146A true CN1917146A (zh) | 2007-02-21 |
CN100555570C CN100555570C (zh) | 2009-10-28 |
Family
ID=37738099
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2006101038567A Expired - Fee Related CN100555570C (zh) | 2005-08-19 | 2006-08-04 | 形成多晶硅薄膜的方法及用该方法制造薄膜晶体管的方法 |
Country Status (5)
Country | Link |
---|---|
US (2) | US7364992B2 (zh) |
JP (1) | JP4864596B2 (zh) |
KR (1) | KR101132404B1 (zh) |
CN (1) | CN100555570C (zh) |
TW (1) | TWI402989B (zh) |
Cited By (4)
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CN102047384A (zh) * | 2008-06-02 | 2011-05-04 | 康宁股份有限公司 | 处理半导体材料方法和经处理的半导体材料 |
CN102651311A (zh) * | 2011-12-20 | 2012-08-29 | 京东方科技集团股份有限公司 | 一种低温多晶硅薄膜的制备方法及低温多晶硅薄膜 |
CN101631641B (zh) * | 2007-02-12 | 2014-01-22 | Tcz私营有限公司 | 一种用于处理基底的设备 |
CN103854975A (zh) * | 2012-12-06 | 2014-06-11 | 三星显示有限公司 | 多晶硅层的制造方法和有机发光显示设备及其制造方法 |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
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US7318866B2 (en) * | 2003-09-16 | 2008-01-15 | The Trustees Of Columbia University In The City Of New York | Systems and methods for inducing crystallization of thin films using multiple optical paths |
US7164152B2 (en) * | 2003-09-16 | 2007-01-16 | The Trustees Of Columbia University In The City Of New York | Laser-irradiated thin films having variable thickness |
US7364952B2 (en) * | 2003-09-16 | 2008-04-29 | The Trustees Of Columbia University In The City Of New York | Systems and methods for processing thin films |
WO2005034193A2 (en) | 2003-09-19 | 2005-04-14 | The Trustees Of Columbia University In The City Ofnew York | Single scan irradiation for crystallization of thin films |
US7645337B2 (en) * | 2004-11-18 | 2010-01-12 | The Trustees Of Columbia University In The City Of New York | Systems and methods for creating crystallographic-orientation controlled poly-silicon films |
US8221544B2 (en) * | 2005-04-06 | 2012-07-17 | The Trustees Of Columbia University In The City Of New York | Line scan sequential lateral solidification of thin films |
US20090218577A1 (en) * | 2005-08-16 | 2009-09-03 | Im James S | High throughput crystallization of thin films |
JP5519150B2 (ja) * | 2005-08-16 | 2014-06-11 | ザ トラスティーズ オブ コロンビア ユニヴァーシティ イン ザ シティ オブ ニューヨーク | 高周波レーザを用いた薄膜の均一な逐次的横方向結晶化のためのシステム及び方法 |
JP2009518864A (ja) * | 2005-12-05 | 2009-05-07 | ザ トラスティーズ オブ コロンビア ユニヴァーシティ イン ザ シティ オブ ニューヨーク | 膜を加工するためのシステム及び方法並びに薄膜 |
WO2009039482A1 (en) | 2007-09-21 | 2009-03-26 | The Trustees Of Columbia University In The City Of New York | Collections of laterally crystallized semiconductor islands for use in thin film transistors |
WO2009042784A1 (en) | 2007-09-25 | 2009-04-02 | The Trustees Of Columbia University In The City Of New York | Methods of producing high uniformity in thin film transistor devices fabricated on laterally crystallized thin films |
WO2009067688A1 (en) | 2007-11-21 | 2009-05-28 | The Trustees Of Columbia University In The City Of New York | Systems and methods for preparing epitaxially textured polycrystalline films |
CN101919058B (zh) * | 2007-11-21 | 2014-01-01 | 纽约市哥伦比亚大学理事会 | 用于制备外延纹理厚膜的系统和方法 |
US8012861B2 (en) * | 2007-11-21 | 2011-09-06 | The Trustees Of Columbia University In The City Of New York | Systems and methods for preparing epitaxially textured polycrystalline films |
JP5369640B2 (ja) * | 2008-02-19 | 2013-12-18 | 旭硝子株式会社 | Euvl用光学部材、およびその平滑化方法 |
JP2011515834A (ja) * | 2008-02-29 | 2011-05-19 | ザ トラスティーズ オブ コロンビア ユニヴァーシティ イン ザ シティ オブ ニューヨーク | 均一な結晶シリコン薄膜を製造するリソグラフィ方法 |
WO2009111340A2 (en) * | 2008-02-29 | 2009-09-11 | The Trustees Of Columbia University In The City Of New York | Flash lamp annealing crystallization for large area thin films |
EP2248155A4 (en) * | 2008-02-29 | 2011-10-05 | Univ Columbia | FLASH LIGHT-RECOGNIZED FOR THIN FILMS |
CN102232239A (zh) | 2008-11-14 | 2011-11-02 | 纽约市哥伦比亚大学理事会 | 用于薄膜结晶的系统和方法 |
MX2012005204A (es) * | 2009-11-03 | 2012-09-21 | Univ Columbia | Sistemas y metodos para el procesamiento de peliculas por fusion parcial mediante pulsos no periodicos. |
US9087696B2 (en) | 2009-11-03 | 2015-07-21 | The Trustees Of Columbia University In The City Of New York | Systems and methods for non-periodic pulse partial melt film processing |
US8440581B2 (en) * | 2009-11-24 | 2013-05-14 | The Trustees Of Columbia University In The City Of New York | Systems and methods for non-periodic pulse sequential lateral solidification |
US9646831B2 (en) | 2009-11-03 | 2017-05-09 | The Trustees Of Columbia University In The City Of New York | Advanced excimer laser annealing for thin films |
TWI495091B (zh) * | 2012-02-16 | 2015-08-01 | Au Optronics Corp | 陣列基板及多晶矽層的製作方法 |
KR20170041962A (ko) | 2015-10-07 | 2017-04-18 | 삼성디스플레이 주식회사 | 박막 트랜지스터 표시판의 제조 방법 및 박막 트랜지스터 표시판 |
KR20210070417A (ko) | 2019-12-04 | 2021-06-15 | 삼성디스플레이 주식회사 | 표시 장치 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3535241B2 (ja) * | 1994-11-18 | 2004-06-07 | 株式会社半導体エネルギー研究所 | 半導体デバイス及びその作製方法 |
JPH09181013A (ja) * | 1995-12-22 | 1997-07-11 | Seiko Instr Inc | レーザを用いた表面処理方法 |
JP3642546B2 (ja) * | 1997-08-12 | 2005-04-27 | 株式会社東芝 | 多結晶半導体薄膜の製造方法 |
KR100327087B1 (ko) * | 1999-06-28 | 2002-03-13 | 구본준, 론 위라하디락사 | 레이저 어닐링 방법 |
JP2002151410A (ja) * | 2000-08-22 | 2002-05-24 | Sony Corp | 結晶質半導体材料の製造方法および半導体装置の製造方法 |
US6746942B2 (en) | 2000-09-05 | 2004-06-08 | Sony Corporation | Semiconductor thin film and method of fabricating semiconductor thin film, apparatus for fabricating single crystal semiconductor thin film, and method of fabricating single crystal thin film, single crystal thin film substrate, and semiconductor device |
US6686978B2 (en) * | 2001-02-28 | 2004-02-03 | Sharp Laboratories Of America, Inc. | Method of forming an LCD with predominantly <100> polycrystalline silicon regions |
JP2003151904A (ja) * | 2001-11-14 | 2003-05-23 | Fujitsu Ltd | 半導体薄膜の結晶化方法、半導体薄膜、及び、薄膜半導体装置 |
US7105048B2 (en) | 2001-11-30 | 2006-09-12 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation apparatus |
JP2003178978A (ja) * | 2001-12-12 | 2003-06-27 | Sharp Corp | 結晶性半導体薄膜と結晶性半導体薄膜の形成方法、結晶性半導体薄膜の形成装置および結晶性半導体薄膜の形成用マスク、並びに半導体装置 |
JP2003257860A (ja) * | 2001-12-28 | 2003-09-12 | Sharp Corp | 半導体素子およびその製造方法 |
KR100478757B1 (ko) | 2002-04-17 | 2005-03-24 | 엘지.필립스 엘시디 주식회사 | 실리콘 결정화방법 |
JP2003332350A (ja) * | 2002-05-17 | 2003-11-21 | Hitachi Ltd | 薄膜半導体装置 |
JP2004087535A (ja) | 2002-08-22 | 2004-03-18 | Sony Corp | 結晶質半導体材料の製造方法および半導体装置の製造方法 |
US20040087116A1 (en) * | 2002-10-30 | 2004-05-06 | Junichiro Nakayama | Semiconductor devices and methods of manufacture thereof |
JP2004151903A (ja) * | 2002-10-30 | 2004-05-27 | Kureha Elastomer Co Ltd | マウスパッド |
KR100496251B1 (ko) * | 2002-11-25 | 2005-06-17 | 엘지.필립스 엘시디 주식회사 | 순차측면고상 결정화 기술을 이용한 비정질 실리콘층의결정화 방법 |
JP2004193263A (ja) | 2002-12-10 | 2004-07-08 | Canon Inc | 結晶性薄膜の製造方法 |
JP2005005410A (ja) * | 2003-06-11 | 2005-01-06 | Canon Inc | 結晶性薄膜及びその製造方法、該結晶性薄膜を用いた素子、該素子を用いて構成した回路、並びに該素子もしくは該回路を含む装置 |
KR100618184B1 (ko) * | 2003-03-31 | 2006-08-31 | 비오이 하이디스 테크놀로지 주식회사 | 결정화 방법 |
JP2005167007A (ja) * | 2003-12-03 | 2005-06-23 | Sharp Corp | 半導体薄膜の製造方法および薄膜半導体素子 |
KR101041066B1 (ko) * | 2004-02-13 | 2011-06-13 | 삼성전자주식회사 | 실리콘 결정화 방법, 이를 이용한 실리콘 결정화 장치,이를 이용한 박막 트랜지스터, 박막 트랜지스터의 제조방법 및 이를 이용한 표시장치 |
KR101016510B1 (ko) * | 2004-06-30 | 2011-02-24 | 엘지디스플레이 주식회사 | 레이저 결정화방법 및 결정화 장치 |
US7645337B2 (en) * | 2004-11-18 | 2010-01-12 | The Trustees Of Columbia University In The City Of New York | Systems and methods for creating crystallographic-orientation controlled poly-silicon films |
-
2005
- 2005-08-19 KR KR1020050076347A patent/KR101132404B1/ko active IP Right Grant
-
2006
- 2006-08-04 CN CNB2006101038567A patent/CN100555570C/zh not_active Expired - Fee Related
- 2006-08-10 JP JP2006218286A patent/JP4864596B2/ja not_active Expired - Fee Related
- 2006-08-18 TW TW095130404A patent/TWI402989B/zh not_active IP Right Cessation
- 2006-08-18 US US11/506,723 patent/US7364992B2/en active Active
-
2008
- 2008-03-11 US US12/045,932 patent/US7985665B2/en not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101631641B (zh) * | 2007-02-12 | 2014-01-22 | Tcz私营有限公司 | 一种用于处理基底的设备 |
CN102047384A (zh) * | 2008-06-02 | 2011-05-04 | 康宁股份有限公司 | 处理半导体材料方法和经处理的半导体材料 |
CN102651311A (zh) * | 2011-12-20 | 2012-08-29 | 京东方科技集团股份有限公司 | 一种低温多晶硅薄膜的制备方法及低温多晶硅薄膜 |
CN102651311B (zh) * | 2011-12-20 | 2014-12-17 | 京东方科技集团股份有限公司 | 一种低温多晶硅薄膜的制备方法及低温多晶硅薄膜 |
CN103854975A (zh) * | 2012-12-06 | 2014-06-11 | 三星显示有限公司 | 多晶硅层的制造方法和有机发光显示设备及其制造方法 |
CN103854975B (zh) * | 2012-12-06 | 2018-09-28 | 三星显示有限公司 | 多晶硅层的制造方法和有机发光显示设备及其制造方法 |
Also Published As
Publication number | Publication date |
---|---|
US7985665B2 (en) | 2011-07-26 |
CN100555570C (zh) | 2009-10-28 |
TWI402989B (zh) | 2013-07-21 |
US7364992B2 (en) | 2008-04-29 |
US20080213985A1 (en) | 2008-09-04 |
TW200713598A (en) | 2007-04-01 |
JP2007053364A (ja) | 2007-03-01 |
KR20070021747A (ko) | 2007-02-23 |
KR101132404B1 (ko) | 2012-04-03 |
US20070054477A1 (en) | 2007-03-08 |
JP4864596B2 (ja) | 2012-02-01 |
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