DE112008000095A5 - Verfahren zum Schutz von Hochfrequenzverstärkern einer Plasmaversorgungseinrichtung und Plasmaversorgungseinrichtung - Google Patents

Verfahren zum Schutz von Hochfrequenzverstärkern einer Plasmaversorgungseinrichtung und Plasmaversorgungseinrichtung Download PDF

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Publication number
DE112008000095A5
DE112008000095A5 DE112008000095T DE112008000095T DE112008000095A5 DE 112008000095 A5 DE112008000095 A5 DE 112008000095A5 DE 112008000095 T DE112008000095 T DE 112008000095T DE 112008000095 T DE112008000095 T DE 112008000095T DE 112008000095 A5 DE112008000095 A5 DE 112008000095A5
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DE
Germany
Prior art keywords
voltage gain
supply device
plasma supply
gain control
agc
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE112008000095T
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English (en)
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DE112008000095B4 (de
Inventor
Thomas Kirchmeier
Michael Glück
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Trumpf Huettinger GmbH and Co KG
Original Assignee
Huettinger Elektronik GmbH and Co KG
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Publication of DE112008000095A5 publication Critical patent/DE112008000095A5/de
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H01J37/32045—Circuits specially adapted for controlling the glow discharge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R21/00—Arrangements for measuring electric power or power factor
    • G01R21/06—Arrangements for measuring electric power or power factor by measuring current and voltage
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R23/00—Arrangements for measuring frequencies; Arrangements for analysing frequency spectra
    • G01R23/02—Arrangements for measuring frequency, e.g. pulse repetition rate; Arrangements for measuring period of current or voltage
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/003—Constructional details, e.g. physical layout, assembly, wiring or busbar connections
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
    • H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
    • H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
    • H02M7/5383—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a self-oscillating arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/38—Impedance-matching networks
    • H03H7/40—Automatic matching of load impedance to source impedance
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
    • H05B41/14—Circuit arrangements
    • H05B41/26—Circuit arrangements in which the lamp is fed by power derived from dc by means of a converter, e.g. by high-voltage dc
    • H05B41/28—Circuit arrangements in which the lamp is fed by power derived from dc by means of a converter, e.g. by high-voltage dc using static converters
    • H05B41/2806—Circuit arrangements in which the lamp is fed by power derived from dc by means of a converter, e.g. by high-voltage dc using static converters with semiconductor devices and specially adapted for lamps without electrodes in the vessel, e.g. surface discharge lamps, electrodeless discharge lamps
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B20/00—Energy efficient lighting technologies, e.g. halogen lamps or gas discharge lamps
DE112008000095.6T 2007-07-23 2008-07-22 Verfahren zum Schutz von Hochfrequenzverstärkern einer Plasmaversorgungseinrichtung und Plasmaversorgungseinrichtung Active DE112008000095B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US95139207P 2007-07-23 2007-07-23
US60/951,392 2007-07-23
PCT/EP2008/005991 WO2009012973A2 (de) 2007-07-23 2008-07-22 Verfahren zum schutz von hochfrequenzverstärkern einer plasmaversorgungseinrichtung und plasmaversorgungseinrichtung

Publications (2)

Publication Number Publication Date
DE112008000095A5 true DE112008000095A5 (de) 2009-11-05
DE112008000095B4 DE112008000095B4 (de) 2014-07-17

Family

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Family Applications (11)

Application Number Title Priority Date Filing Date
DE112007003667T Withdrawn DE112007003667A5 (de) 2007-07-23 2007-10-04 Plasmaversorgungseinrichtung
DE112007003213.8T Expired - Fee Related DE112007003213B4 (de) 2007-07-23 2007-12-20 Verfahren zur Ermittlung der Wellenlaufzeit zwischen zumindest einem Inverter in einer Plasmaleistungsversorgungseinrichtung und einer an diese angeschlossenen Last und Plasmaleistungsversorgungseinrichtung
DE502007006404T Active DE502007006404D1 (de) 2007-07-23 2007-12-20 Verfahren zur ansteurung zumindest eines inverters in einer plasmaleistungsversorgungseinrichtung und plasmaleistungsversorgungseinrichtung
DE112008000106.5T Active DE112008000106B4 (de) 2007-07-23 2008-04-03 Hochfrequenzleistungsversorgungsanordnung, insbesondere eine Plasmaversorgungseinrichtung und Verfahren zum Betreiben einer Hochfrequenzleistungsversorgungsanordnung
DE112008000092.1T Active DE112008000092B4 (de) 2007-07-23 2008-06-11 Plasmaversorgungseinrichtung und Verfahren zum Betrieb einer Vollbrücke einer Plasmaversorgungseinrichtung
DE112008000105.7T Expired - Fee Related DE112008000105B4 (de) 2007-07-23 2008-06-11 Verfahren und Anordnung zur Messung von Parametern einer Plasmaversorgungseinrichtung
DE112008000115.4T Active DE112008000115B4 (de) 2007-07-23 2008-06-27 Messverfahren und Messeinrichtung für eine Plasmaversorgungseinrichtung
DE112008000120.0T Active DE112008000120B4 (de) 2007-07-23 2008-06-30 Plasmaversorgungseinrichtung
DE112008000107T Withdrawn DE112008000107A5 (de) 2007-07-23 2008-06-30 Plasmaversorgungseinrichtung
DE112008000095.6T Active DE112008000095B4 (de) 2007-07-23 2008-07-22 Verfahren zum Schutz von Hochfrequenzverstärkern einer Plasmaversorgungseinrichtung und Plasmaversorgungseinrichtung
DE112008000104.9T Active DE112008000104B4 (de) 2007-07-23 2008-07-22 Verfahren zum Schutz von Hochfrequenzverstärkern einer Plasmaversorgungseinrichtung und Plasmaversorgungseinrichtung

Family Applications Before (9)

Application Number Title Priority Date Filing Date
DE112007003667T Withdrawn DE112007003667A5 (de) 2007-07-23 2007-10-04 Plasmaversorgungseinrichtung
DE112007003213.8T Expired - Fee Related DE112007003213B4 (de) 2007-07-23 2007-12-20 Verfahren zur Ermittlung der Wellenlaufzeit zwischen zumindest einem Inverter in einer Plasmaleistungsversorgungseinrichtung und einer an diese angeschlossenen Last und Plasmaleistungsversorgungseinrichtung
DE502007006404T Active DE502007006404D1 (de) 2007-07-23 2007-12-20 Verfahren zur ansteurung zumindest eines inverters in einer plasmaleistungsversorgungseinrichtung und plasmaleistungsversorgungseinrichtung
DE112008000106.5T Active DE112008000106B4 (de) 2007-07-23 2008-04-03 Hochfrequenzleistungsversorgungsanordnung, insbesondere eine Plasmaversorgungseinrichtung und Verfahren zum Betreiben einer Hochfrequenzleistungsversorgungsanordnung
DE112008000092.1T Active DE112008000092B4 (de) 2007-07-23 2008-06-11 Plasmaversorgungseinrichtung und Verfahren zum Betrieb einer Vollbrücke einer Plasmaversorgungseinrichtung
DE112008000105.7T Expired - Fee Related DE112008000105B4 (de) 2007-07-23 2008-06-11 Verfahren und Anordnung zur Messung von Parametern einer Plasmaversorgungseinrichtung
DE112008000115.4T Active DE112008000115B4 (de) 2007-07-23 2008-06-27 Messverfahren und Messeinrichtung für eine Plasmaversorgungseinrichtung
DE112008000120.0T Active DE112008000120B4 (de) 2007-07-23 2008-06-30 Plasmaversorgungseinrichtung
DE112008000107T Withdrawn DE112008000107A5 (de) 2007-07-23 2008-06-30 Plasmaversorgungseinrichtung

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE112008000104.9T Active DE112008000104B4 (de) 2007-07-23 2008-07-22 Verfahren zum Schutz von Hochfrequenzverstärkern einer Plasmaversorgungseinrichtung und Plasmaversorgungseinrichtung

Country Status (6)

Country Link
US (11) US8129653B2 (de)
EP (6) EP2097920B1 (de)
JP (3) JP5606312B2 (de)
AT (2) ATE497251T1 (de)
DE (11) DE112007003667A5 (de)
WO (15) WO2009012735A1 (de)

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DE112008000120B4 (de) 2018-02-15
DE112008000105B4 (de) 2015-08-06
US8436543B2 (en) 2013-05-07
EP2097920A1 (de) 2009-09-09
JP5606312B2 (ja) 2014-10-15
US20090027936A1 (en) 2009-01-29
US8866400B2 (en) 2014-10-21
EP2097920B1 (de) 2017-08-09
EP2174338B1 (de) 2012-05-30
DE112008000092A5 (de) 2009-11-05
EP2174339A1 (de) 2010-04-14
DE112008000115A5 (de) 2009-11-19
WO2009012848A1 (de) 2009-01-29
US8357874B2 (en) 2013-01-22
WO2009012849A1 (de) 2009-01-29
US8466622B2 (en) 2013-06-18
WO2009012825A1 (de) 2009-01-29
WO2009012735A1 (de) 2009-01-29
WO2009012867A2 (en) 2009-01-29
EP2097921B1 (de) 2012-10-24
US20090026181A1 (en) 2009-01-29
US20090026968A1 (en) 2009-01-29
DE112008000104A5 (de) 2009-11-26
US20100171427A1 (en) 2010-07-08
WO2009012966A1 (de) 2009-01-29
US8129653B2 (en) 2012-03-06
US8421377B2 (en) 2013-04-16
DE112008000092B4 (de) 2015-08-06
WO2009012973A3 (de) 2009-04-23
DE112008000106B4 (de) 2015-08-06
WO2009012969A3 (de) 2009-05-07
DE112008000115B4 (de) 2014-03-27
DE112008000106A5 (de) 2009-11-26
DE112007003667A5 (de) 2010-07-01

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