DE20114542U1 - Meßstation - Google Patents
MeßstationInfo
- Publication number
- DE20114542U1 DE20114542U1 DE20114542U DE20114542U DE20114542U1 DE 20114542 U1 DE20114542 U1 DE 20114542U1 DE 20114542 U DE20114542 U DE 20114542U DE 20114542 U DE20114542 U DE 20114542U DE 20114542 U1 DE20114542 U1 DE 20114542U1
- Authority
- DE
- Germany
- Prior art keywords
- chuck
- chuck device
- rotating element
- rotary
- measuring station
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T279/00—Chucks or sockets
- Y10T279/29—More than one set of gripping means
Description
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Claims (31)
1. Meßstation, welche ein Spannfutter (20) umfaßt, das relativ zu einem Hilfsspannfutter
(92, 94) drehbar ist.
2. Spannfuttervorrichtung, welche ein Drehelement umfaßt sowie ein Hilfsspannfutter
(92, 94), wobei
- a) das Drehelement geeignet ist zum Stützen eines Spannfutters darauf, wobei das Drehelement drehbar ist relativ zur Spannfuttervorrichtung (20); und
- b) das Hilfsspannfutter (92, 94) in der Lage ist, sich relativ zu der Spannfuttervorrichtung (20) zu drehen.
3. Spannfuttervorrichtung nach Anspruch 2, wobei das Drehelement eine plane
Oberfläche aufweist.
4. Spannfuttervorrichtung nach Anspruch 3, wobei die Spannfuttervorrichtung (20) eine
plane Oberfläche aufweist.
5. Spannfuttervorrichtung nach Anspruch 4, wobei die plane Oberfläche des
Drehelements sowie die plane Oberfläche der Spannfuttervorrichtung (20) im
wesentlichen koplanar zueinander sind.
6. Spannfuttervorrichtung nach Anspruch 2, wobei die Spannfuttervorrichtung eine
Verschiebungsvorrichtung zum Bewegen des Drehelements in seitlicher Richtung
umfaßt.
7. Spannfuttervorrichtung nach Anspruch 2, wobei das Hilfsspannfutter (92, 94) geeignet
ist, zumindest ein Testsubstrat darauf aufzunehmen.
8. Spannfuttervorrichtung nach Anspruch 3, wobei das Hilfsspannfutter (92, 94) das
Testsubstrat an einem Ort oberhalb des Drehelements aufnimmt.
9. Spannfuttervorrichtung nach Anspruch 6, wobei das Hilfsspannfutter (92, 94) sich
zusammen mit dem Drehelement in seitlicher Richtung bewegt.
10. Spannfuttervorrichtung, welche ein Drehelement und ein Verschiebungselement
umfaßt,
- a) wobei das Drehelement zum Aufnehmen eines Spannfutters darauf ausgelegt ist, wobei das Drehelement relativ zur Spannfuttervorrichtung (20) drehbar ist;
- b) wobei das Verschiebungselement mit einem Drehelement verbunden ist, so daß das Drehelement wahlweise verdrehbar ist; und
- c) wobei das Drehelement im wesentlichen keine nach unten gerichtete Kraft auf das Verschiebungselement ausübt, während sich das Verschiebungselement mit dem Drehelement dreht.
11. Spannfuttervorrichtung nach Anspruch 10, wobei das Drehelement eine Nase (203)
umfaßt, wobei das Verschiebungselement einen Schlitz umfaßt, welcher in diese Nase
(203) eingreift.
12. Spannfuttervorrichtung nach Anspruch 11, wobei die Drehbewegung des Schlitzes für
eine Drehbewegung des Drehelements sorgt.
13. Spannfuttervorrichtung nach Anspruch 10, wobei das Drehelement durch eine
Positionierungsbühne gestützt wird.
14. Spannfuttervorrichtung nach Anspruch 13, wobei die Positionierungsbühne ein Paar
von von einander beabstandet angebrachten Linearlagern umfaßt.
15. Spannfuttervorrichtung nach Anspruch 14, wobei die Positionierungsbühne die
Hauptauflage für das Drehelement bildet.
16. Spannfuttervorrichtung nach Anspruch 10, wobei zwischen dem
Verschiebungselement und dem Drehelement ein im wesentlichen konstanter
vertikaler Abstand eingehalten wird, während das Drehelement gedreht wird.
17. Spannfuttervorrichtung nach Anspruch 16, wobei das Spannfutter für eine
Verschiebung des Drehelements in Richtung der Z-Achse sorgt, während ein im
wesentlichen konstanter vertikaler Abstand eingehalten wird.
18. Spannfuttervorrichtung, welche eine Drehelement und eine Basiseinheit (10) umfaßt,
wobei
- a) das Drehelement zur Aufnahme eines Spannfutters darauf geeignet ist, wobei das Drehelement relativ zu der Spannfuttervorrichtung verdrehbar ist; und
- b) wobei das Drehelement relativ zur Basiseinheit (10) seitlich verschiebbar ist, wenn sich das Drehelement in einer vorbestimmten Drehausrichtung befindet.
19. Spannfuttervorrichtung nach Anspruch 18, wobei die vorbestimmte Drehausrichtung
Null Grad beträgt.
20. Spannfuttervorrichtung nach Anspruch 18, wobei die vorbestimmte Drehausrichtung
ein vorbestimmter Bereich von Werten ist.
21. Spannfuttervorrichtung nach Anspruch 18, wobei das Drehelement im wesentlichen
von allen Drehbewegungen freigehalten wird, während das Drehelement sich in einer
herausgezogenen Position relativ zur Basis (10) befindet.
22. Spannfuttervorrichtung, welche ein Drehelement umfaßt, wobei
- a) das Drehelement ein Spannfutter darauf stützt; und
- b) eine Vielzahl von Anpassungselementen vorgesehen ist, welche geeignet sind, die Orientierung des Spannfutters relativ zum Drehelement anzupassen, während das Drehelement und das Spannfutter in einem Spannungszustand gehalten werden, während die Richtung ausgerichtet wird.
23. Spannfuttervorrichtung nach Anspruch 22, wobei dieser Spannungszustand von den
Anpassungselementen erzeugt wird, während der Abstand zwischen dem Drehelement
und dem Spannfutter eingehalten wird.
24. Spannfuttervorrichtung nach Anspruch 23, wobei die Justierungselemente mit
Gewinde versehene Schrauben (240) sind.
25. Vorrichtung, welche umfaßt:
- a) eine Meßstation zum Ausmessen einer zu testenden Vorrichtung;
- b) eine Isolierungsbühne, welche für das Isolieren der Meßstation gegenüber Schwingungen sorgt; und
- c) ein Rahmen, welcher im wesentlichen die gesamte Meßstation und die Isolierungsbühne umgibt.
26. Vorrichtung nach Anspruch 25, wobei der Rahmen gegenüber der Meßstation isoliert
ist.
27. Vorrichtung, welche umfaßt:
- a) eine Meßstation zum Ausmessen einer zu testenden Vorrichtung; und
- b) eine Isolierungsbühne, welche für eine Isolierung der Meßstation gegenüber Schwingungen sorgt, wobei die Oberseite der Isolierungsbühne ein horizontal ausgerichtetes Element umfaßt, welches die Unterseite der Meßstation ist.
28. Vorrichtung nach Anspruch 27, wobei das horizontal ausgerichtete Element ein festes
Element ist.
29. Vorrichtung nach Anspruch 27, wobei das feste Element im wesentlichen
rechteckförmig ausgeführt ist.
30. Ein Gehäuse (42, 44) zur Abschirmung von Umwelteinflüssen für eine Meßstation,
welches umfaßt:
- a) eine Vielzahl von Seitenwänden (49a, 49b);
- b) eine obere Oberfläche; und
- c) eine untere Oberfläche, wobei das Gehäuse (42, 44) im wesentlichen keine geradlinig verlaufende Pfade vom Inneren des Gehäuses hin zum Äußeren des Gehäuses an Stellen umfaßt, wo die Seitenwände, die obere Oberfläche und die untere Oberfläche in Kontakt miteinander stehen.
31. Das Gehäuse nach Anspruch 30, wobei das Gehäuse keine geradlinig verlaufenden
Pfade umfaßt.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US23055200P | 2000-09-05 | 2000-09-05 | |
US09/881,312 US6914423B2 (en) | 2000-09-05 | 2001-06-12 | Probe station |
Publications (1)
Publication Number | Publication Date |
---|---|
DE20114542U1 true DE20114542U1 (de) | 2002-02-21 |
Family
ID=26924344
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE20114542U Expired - Lifetime DE20114542U1 (de) | 2000-09-05 | 2001-09-04 | Meßstation |
DE10143174A Withdrawn DE10143174A1 (de) | 2000-09-05 | 2001-09-04 | Meßstation |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE10143174A Withdrawn DE10143174A1 (de) | 2000-09-05 | 2001-09-04 | Meßstation |
Country Status (4)
Country | Link |
---|---|
US (5) | US6914423B2 (de) |
JP (1) | JP4505160B2 (de) |
KR (1) | KR100770174B1 (de) |
DE (2) | DE20114542U1 (de) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6445202B1 (en) | 1999-06-30 | 2002-09-03 | Cascade Microtech, Inc. | Probe station thermal chuck with shielding for capacitive current |
US6914423B2 (en) | 2000-09-05 | 2005-07-05 | Cascade Microtech, Inc. | Probe station |
US6965226B2 (en) | 2000-09-05 | 2005-11-15 | Cascade Microtech, Inc. | Chuck for holding a device under test |
US7492172B2 (en) | 2003-05-23 | 2009-02-17 | Cascade Microtech, Inc. | Chuck for holding a device under test |
US7250626B2 (en) * | 2003-10-22 | 2007-07-31 | Cascade Microtech, Inc. | Probe testing structure |
US7187188B2 (en) * | 2003-12-24 | 2007-03-06 | Cascade Microtech, Inc. | Chuck with integrated wafer support |
US7535247B2 (en) | 2005-01-31 | 2009-05-19 | Cascade Microtech, Inc. | Interface for testing semiconductors |
US7656172B2 (en) | 2005-01-31 | 2010-02-02 | Cascade Microtech, Inc. | System for testing semiconductors |
US7724004B2 (en) * | 2005-12-21 | 2010-05-25 | Formfactor, Inc. | Probing apparatus with guarded signal traces |
US8528804B2 (en) * | 2006-04-10 | 2013-09-10 | Blackberry Limited | Method and apparatus for testing solderability of electrical components |
DE102008013978B4 (de) * | 2007-03-16 | 2021-08-12 | Cascade Microtech, Inc. | Chuck mit triaxialem Aufbau |
US8319503B2 (en) | 2008-11-24 | 2012-11-27 | Cascade Microtech, Inc. | Test apparatus for measuring a characteristic of a device under test |
CN101788620B (zh) * | 2009-12-31 | 2013-07-03 | 西安开容电子技术有限责任公司 | 用于中频电源的线路阻抗稳定网络及其设计方法 |
EP2539724B1 (de) * | 2010-02-22 | 2015-01-28 | Cascade Microtech, Inc. | Sondenstation mit verbesserter verbindung |
EP2390906A1 (de) * | 2010-05-26 | 2011-11-30 | Applied Materials, Inc. | Vorrichtung und Verfahren zur elektrostatischen Abgabeverringerung |
WO2011159390A1 (en) | 2010-06-07 | 2011-12-22 | Cascade Microtech, Inc. | High voltage chuck for a probe station |
CN102384990A (zh) * | 2010-08-27 | 2012-03-21 | 向熙科技股份有限公司 | 单面快速调整探针高度的迫紧机构、方法及电阻测量设备 |
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US9364925B2 (en) * | 2012-04-30 | 2016-06-14 | Globalfoundries Inc. | Assembly of electronic and optical devices |
US10281487B2 (en) * | 2013-09-17 | 2019-05-07 | The Micromanipulator Company, Llc | Probe system designed for probing of electronic parts mounted into application or test boards |
CN108020745B (zh) * | 2018-01-22 | 2023-11-28 | 深圳市恒宝通光电子股份有限公司 | 光模块老化测试上下料装置 |
KR102172933B1 (ko) * | 2018-12-26 | 2020-11-03 | 주식회사 쎄믹스 | 상판 슬라이딩 가능한 웨이퍼 검사 장치 |
JP7371885B2 (ja) * | 2019-07-08 | 2023-10-31 | ヤマハファインテック株式会社 | 電気検査装置及び保持ユニット |
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-
2001
- 2001-06-12 US US09/881,312 patent/US6914423B2/en not_active Expired - Lifetime
- 2001-09-04 DE DE20114542U patent/DE20114542U1/de not_active Expired - Lifetime
- 2001-09-04 KR KR1020010054115A patent/KR100770174B1/ko not_active IP Right Cessation
- 2001-09-04 DE DE10143174A patent/DE10143174A1/de not_active Withdrawn
- 2001-09-05 JP JP2001269047A patent/JP4505160B2/ja not_active Expired - Fee Related
-
2005
- 2005-03-16 US US11/083,677 patent/US7554322B2/en not_active Expired - Fee Related
-
2007
- 2007-10-18 US US11/975,174 patent/US7688062B2/en not_active Expired - Fee Related
- 2007-10-18 US US11/975,243 patent/US20080042376A1/en not_active Abandoned
- 2007-10-18 US US11/975,173 patent/US20080042669A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US20020027434A1 (en) | 2002-03-07 |
US20050179427A1 (en) | 2005-08-18 |
US6914423B2 (en) | 2005-07-05 |
US20080042669A1 (en) | 2008-02-21 |
KR100770174B1 (ko) | 2007-10-26 |
JP4505160B2 (ja) | 2010-07-21 |
US20080042376A1 (en) | 2008-02-21 |
JP2002164396A (ja) | 2002-06-07 |
DE10143174A1 (de) | 2002-04-18 |
KR20020019408A (ko) | 2002-03-12 |
US7554322B2 (en) | 2009-06-30 |
US7688062B2 (en) | 2010-03-30 |
US20080042670A1 (en) | 2008-02-21 |
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