DE2966886D1 - Article comprising a substrate and an overlying layer of electron beam radiation-sensitive material and process for fabrication thereof - Google Patents

Article comprising a substrate and an overlying layer of electron beam radiation-sensitive material and process for fabrication thereof

Info

Publication number
DE2966886D1
DE2966886D1 DE7979101530T DE2966886T DE2966886D1 DE 2966886 D1 DE2966886 D1 DE 2966886D1 DE 7979101530 T DE7979101530 T DE 7979101530T DE 2966886 T DE2966886 T DE 2966886T DE 2966886 D1 DE2966886 D1 DE 2966886D1
Authority
DE
Germany
Prior art keywords
fabrication
article
substrate
electron beam
sensitive material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE7979101530T
Other languages
English (en)
Inventor
Murrae John Stanley Bowden
Eugene David Feit
Larry Flack Thompson
Wilkins, Jr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Application granted granted Critical
Publication of DE2966886D1 publication Critical patent/DE2966886D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
DE7979101530T 1978-05-23 1979-05-21 Article comprising a substrate and an overlying layer of electron beam radiation-sensitive material and process for fabrication thereof Expired DE2966886D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/908,791 US4208211A (en) 1978-05-23 1978-05-23 Fabrication based on radiation sensitive resists and related products

Publications (1)

Publication Number Publication Date
DE2966886D1 true DE2966886D1 (en) 1984-05-17

Family

ID=25426244

Family Applications (1)

Application Number Title Priority Date Filing Date
DE7979101530T Expired DE2966886D1 (en) 1978-05-23 1979-05-21 Article comprising a substrate and an overlying layer of electron beam radiation-sensitive material and process for fabrication thereof

Country Status (7)

Country Link
US (1) US4208211A (de)
EP (1) EP0005551B1 (de)
JP (1) JPS54155826A (de)
AU (1) AU523178B2 (de)
CA (1) CA1166885A (de)
DE (1) DE2966886D1 (de)
ES (1) ES480851A1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5511217A (en) * 1978-07-10 1980-01-26 Nippon Telegr & Teleph Corp <Ntt> Pattern forming method using radiation sensitive high polymer
US4289573A (en) * 1979-03-30 1981-09-15 International Business Machines Corporation Process for forming microcircuits
US4318976A (en) * 1980-10-27 1982-03-09 Texas Instruments Incorporated High gel rigidity, negative electron beam resists
DE3174780D1 (en) * 1980-11-05 1986-07-10 Nec Corp Radiation-sensitive negative resist
JPS5786831A (en) * 1980-11-20 1982-05-31 Fujitsu Ltd Pattern forming material
JPS5786830A (en) * 1980-11-20 1982-05-31 Fujitsu Ltd Pattern forming material
JPS57109943A (en) * 1980-12-26 1982-07-08 Nippon Telegr & Teleph Corp <Ntt> Formation of submicron pattern using radiation sensitive resist
US4367281A (en) * 1981-01-12 1983-01-04 Toyo Soda Manufacturing Co., Ltd. Fine fabrication process using radiation sensitive resist
DE3109809C2 (de) * 1981-03-13 1986-07-31 Siemens AG, 1000 Berlin und 8000 München Verfahren zur Herstellung von Resiststrukturen
JPS57189134A (en) * 1981-05-16 1982-11-20 Toyo Soda Mfg Co Ltd Formation of pattern using negative type resist material
JPS589141A (ja) * 1981-07-10 1983-01-19 Nippon Telegr & Teleph Corp <Ntt> 放射線感応性ネガ形レジストの感度向上方法
JPS5979247A (ja) * 1982-10-29 1984-05-08 Japan Synthetic Rubber Co Ltd 遠紫外線または電子線感応用レジスト
JPS5866938A (ja) * 1981-10-19 1983-04-21 Hitachi Ltd 遠紫外光感応材料被膜の形成方法
JPS58115433A (ja) * 1981-12-28 1983-07-09 Toppan Printing Co Ltd 水溶性感光材料の製造方法
JPS5923341A (ja) * 1982-07-30 1984-02-06 Japan Synthetic Rubber Co Ltd 樹脂組成物
JPS59116744A (ja) * 1982-12-24 1984-07-05 Japan Synthetic Rubber Co Ltd 感電離放射線樹脂組成物
US4568734A (en) * 1983-02-15 1986-02-04 Eastman Kodak Company Electron-beam and X-ray sensitive polymers and resists
US4515886A (en) * 1983-02-16 1985-05-07 Toyo Soda Manufacturing Co., Ltd. Photosensitive compositions
US4451329A (en) * 1983-08-22 1984-05-29 Wheaton Industries Methods and compositions for producing decorative frosting effects on glass
JPS6060641A (ja) * 1983-09-14 1985-04-08 Japan Synthetic Rubber Co Ltd Ｘ線レジスト
JPS60102628A (ja) * 1983-11-10 1985-06-06 Japan Synthetic Rubber Co Ltd Ｘ線レジスト
DE3409888A1 (de) * 1984-03-17 1985-09-19 Hoechst Ag, 6230 Frankfurt Lichtempfindliches aufzeichnungsmaterial und dessen verwendung in einem verfahren zum herstellen einer druckform oder einer gedruckten schaltung
JPS6247049A (ja) * 1985-08-26 1987-02-28 Hoya Corp パタ−ン形成方法
JPH0441015Y2 (de) * 1987-01-19 1992-09-25
US5209847A (en) * 1989-10-03 1993-05-11 Nippon Oil And Fats Co., Ltd. Ultrathin membrane of polymethacrylate or polycrotonate and device provided with ultrathin membrane

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1572062C3 (de) * 1966-01-07 1974-11-07 Kalle Ag, 6202 Wiesbaden-Biebrich Lichtempfindliche Kopierschicht
US3885060A (en) * 1968-08-23 1975-05-20 Hitachi Ltd Production of insolubilized organic polymers
US3953309A (en) * 1972-12-14 1976-04-27 Dynachem Corporation Polymerization compositions and processes having polymeric binding agents
JPS5520572B2 (de) * 1973-06-25 1980-06-03
US4061799A (en) * 1973-11-05 1977-12-06 Texas Instruments Incorporated Method of patterning styrene diene block copolymer electron beam resists
US3996393A (en) * 1974-03-25 1976-12-07 International Business Machines Corporation Positive polymeric electron beam resists of very great sensitivity
US4056393A (en) * 1974-09-26 1977-11-01 American Can Company Method of recording information using a copolymer of glycidyl methacrylate and allyl glycidyl ether
ZA757984B (en) * 1974-10-04 1976-12-29 Dynachem Corp Polymers for aqueous processed photoresists
FR2290458A1 (fr) * 1974-11-08 1976-06-04 Thomson Csf Resine sensible aux electrons et son application a la realisation de masques de haute resolution pour la fabrication de composants electroniques
JPS5299776A (en) * 1976-02-18 1977-08-22 Hitachi Ltd Radiation sensitive high polymeric material
US4061829A (en) * 1976-04-26 1977-12-06 Bell Telephone Laboratories, Incorporated Negative resist for X-ray and electron beam lithography and method of using same
US4130424A (en) * 1976-08-06 1978-12-19 Bell Telephone Laboratories, Incorporated Process using radiation curable epoxy containing resist and resultant product

Also Published As

Publication number Publication date
ES480851A1 (es) 1980-09-01
EP0005551A3 (en) 1979-12-12
AU523178B2 (en) 1982-07-15
CA1166885A (en) 1984-05-08
EP0005551B1 (de) 1984-04-11
US4208211A (en) 1980-06-17
EP0005551A2 (de) 1979-11-28
JPS6116972B2 (de) 1986-05-02
JPS54155826A (en) 1979-12-08
AU4719379A (en) 1979-11-29

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Legal Events

Date Code Title Description
8328 Change in the person/name/address of the agent

Free format text: BLUMBACH, KRAMER & PARTNER, 65193 WIESBADEN