DE29724050U1 - Membrantestkopfsystem mit lokaler Kontaktabbürstung - Google Patents
Membrantestkopfsystem mit lokaler KontaktabbürstungInfo
- Publication number
- DE29724050U1 DE29724050U1 DE29724050U DE29724050U DE29724050U1 DE 29724050 U1 DE29724050 U1 DE 29724050U1 DE 29724050 U DE29724050 U DE 29724050U DE 29724050 U DE29724050 U DE 29724050U DE 29724050 U1 DE29724050 U1 DE 29724050U1
- Authority
- DE
- Germany
- Prior art keywords
- contact
- test head
- head device
- arm
- contacts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film
Description
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Claims (11)
1. Testkopfvorrichtung (42) zum Testen einer elektrischen Einheit, welche
umfaßt:
- a) eine vordere Ablage (66) aus inkompressiblen Material;
- b) einen flexiblen Membranaufbau (72), mit einem mittigen Bereich (80), der so positioniert ist, daß er die vordere Ablage (66) übergreift,
- c) eine Vielzahl steifer Kontakte (88), welche in dem mittigen Bereich an gebracht sind, und von denen ein jeder einen Arm (90) sowie einen Kon taktierungsbereich (93) umfaßt, wobei ein jeder Kontaktierungsbereich (93) in passender Lage angebracht ist, um eine Anpressverbindung mit einem entsprechenden Kontaktbereich auf der elektrischen Einheit be reitzustellen, wobei ein jeder Arm (90) mit einem entsprechenden flexi blen Leiter elektrisch verbunden ist, welcher sich in den mittigen Be reich hinein erstreckt;
- d) eine Druckregelungsvorrichtung, welche ein Elastomerelement (98) um faßt, das zwischen einem jeden Kontakt und der Auflage (66) angebracht ist; und
- e) eine Bewegungssteuerungsvorrichtung, welche relativ zu einem jeden Kontakt lokal arbeitet, um dann, wenn der entsprechende Kontaktbe reich in Anpressverbindung mit dem entsprechenden Kontaktbereich ge bracht wird, einen jeden einzelnen Arm (90) zu bewegen, um eine Kipp bewegung auszuüben, so daß verschiedene Bereiche eines jeden Arms (90) sich um unterschiedliche Entfernungen relativ zur vorderen Aufla ge (66) bewegen, und so, daß ein jeder Kontakt (88) in Übereinstimmung mit der Kippbewegung in einer seitliche Bürstbewegung über den ent sprechenden Kontaktbereich bewegt wird, wobei das Elastomerelement (98) so angeordnet ist, daß ein jeder Arm (90) sich auf so eine Weise aus der Kippbewegung zurückstellen kann, daß eine mechanische Beanspru chung des Arms vermieden wird.
2. Testkopfvorrichtung nach Anspruch 1, wobei ein jeder der Arme (90)
unabhängig von den jeweils anderen Armen verkippbar ist.
3. Testkopfvorrichtung nach Anspruch 1, welche eine rückwärtige Basis
umfaßt, wobei die vordere Auflage kippbar mit der rückwärtigen Basis verbun
den ist, damit die vordere Auflage relativ zur rückwärtigen Basis in eine Posi
tion parallel zu der Einzeleinheit automatisch verkippt werden kann als Ant
wort auf eine Anpressverbindung zwischen einander entsprechenden Kontak
tierungsbereichen und Kontaktbereichen.
4. Testkopfvorrichtung nach Anspruch 1, wobei der Kontaktierungsbe
reich (93) eines jeden Kontakts auf einem Kontakthöcker (92) angebracht ist,
welcher mit einem korrespondierenden Arm (90) in einer außermittigen Stel
lung fest verbunden ist.
5. Testkopfvorrichtung nach Anspruch 1, wobei die Kontakte (88) in
Paaren vorgesehen sind, und die entsprechenden seitlichen Bürstbewegungen
der Kontakte in einem jeden Paar in einander entgegengesetzte Richtungen
verlaufen.
6. Testkopfvorrichtung nach Anspruch 1, wobei die Strecke der seitli
chen Bürstbewegung eines jeden Kontakts nach dem Kontaktschluß eines je
den Kontaktierungsbereichs mit dem entsprechende Kontaktbereich für einen
jeden Kontakt von der nach dem Niederdrücken zurückgelegten Entfernung
beim Vermindern des Abstands zwischen der Auflage und dem entsprechenden
Kontaktbereich gleichmäßig abhängig ist.
7. Testkopfvorrichtung nach Anspruch 1, wobei das Elastomerelement
(98) einen einstückig integriert ausgeführten Aufbau aufweist.
8. Testkopfvorrichtung nach Anspruch 1, wobei die Kontakte in Zeilen
und Spalten angeordnet sind.
9. Testkopfvorrichtung nach Anspruch 1, wobei ein jeder Arm (90) mit
dem entsprechenden flexiblen Leiter (76a) in überlappender Anordnung ver
bunden ist.
10. Testkopfvorrichtung nach Anspruch 1, wobei der flexible Membran
aufbau (72) längs des mittigen Bereichs im wesentlichen ununterbrochen aus
geführt ist.
11. Testkopfvorrichtung nach Anspruch 1, wobei ein jeder Kontakt durch
einen kontinuierlichen Bereich des flexiblen Membranaufbaus (72) getragen
wird.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/695,077 US5914613A (en) | 1996-08-08 | 1996-08-08 | Membrane probing system with local contact scrub |
EP97924735A EP0929819B1 (de) | 1996-08-08 | 1997-05-02 | Membransondensystem mit örtlichem kontaktreiniger |
Publications (1)
Publication Number | Publication Date |
---|---|
DE29724050U1 true DE29724050U1 (de) | 2000-01-27 |
Family
ID=24791467
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE29724050U Expired - Lifetime DE29724050U1 (de) | 1996-08-08 | 1997-05-02 | Membrantestkopfsystem mit lokaler Kontaktabbürstung |
DE69726169T Expired - Lifetime DE69726169T2 (de) | 1996-08-08 | 1997-05-02 | Membransondensystem mit örtlichem kontaktreiniger |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69726169T Expired - Lifetime DE69726169T2 (de) | 1996-08-08 | 1997-05-02 | Membransondensystem mit örtlichem kontaktreiniger |
Country Status (9)
Country | Link |
---|---|
US (8) | US5914613A (de) |
EP (1) | EP0929819B1 (de) |
JP (2) | JP3942042B2 (de) |
KR (1) | KR100312835B1 (de) |
AT (1) | ATE254289T1 (de) |
AU (1) | AU3007797A (de) |
DE (2) | DE29724050U1 (de) |
ES (1) | ES2210530T3 (de) |
WO (1) | WO1998007040A1 (de) |
Families Citing this family (107)
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-
1996
- 1996-08-08 US US08/695,077 patent/US5914613A/en not_active Expired - Lifetime
-
1997
- 1997-05-02 EP EP97924735A patent/EP0929819B1/de not_active Expired - Lifetime
- 1997-05-02 AU AU30077/97A patent/AU3007797A/en not_active Abandoned
- 1997-05-02 ES ES97924735T patent/ES2210530T3/es not_active Expired - Lifetime
- 1997-05-02 WO PCT/US1997/008292 patent/WO1998007040A1/en active IP Right Grant
- 1997-05-02 DE DE29724050U patent/DE29724050U1/de not_active Expired - Lifetime
- 1997-05-02 AT AT97924735T patent/ATE254289T1/de not_active IP Right Cessation
- 1997-05-02 JP JP50968198A patent/JP3942042B2/ja not_active Expired - Fee Related
- 1997-05-02 DE DE69726169T patent/DE69726169T2/de not_active Expired - Lifetime
-
1998
- 1998-10-16 US US09/174,384 patent/US6307387B1/en not_active Expired - Lifetime
-
1999
- 1999-02-08 KR KR1019997001052A patent/KR100312835B1/ko not_active IP Right Cessation
-
2000
- 2000-10-10 US US09/686,353 patent/US6437584B1/en not_active Expired - Fee Related
-
2002
- 2002-05-20 US US10/152,228 patent/US6927585B2/en not_active Expired - Fee Related
-
2005
- 2005-06-17 US US11/155,986 patent/US7109731B2/en not_active Expired - Fee Related
-
2006
- 2006-01-12 JP JP2006005111A patent/JP4237761B2/ja not_active Expired - Lifetime
- 2006-05-25 US US11/441,673 patent/US7550983B2/en not_active Expired - Fee Related
-
2007
- 2007-08-29 US US11/897,397 patent/US7541821B2/en not_active Expired - Fee Related
-
2009
- 2009-03-20 US US12/383,209 patent/US7893704B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0929819A1 (de) | 1999-07-21 |
US6927585B2 (en) | 2005-08-09 |
KR20000029882A (ko) | 2000-05-25 |
US5914613A (en) | 1999-06-22 |
US6437584B1 (en) | 2002-08-20 |
JP2001525118A (ja) | 2001-12-04 |
US20060214676A1 (en) | 2006-09-28 |
US7893704B2 (en) | 2011-02-22 |
US20090224783A1 (en) | 2009-09-10 |
US20050231223A1 (en) | 2005-10-20 |
JP3942042B2 (ja) | 2007-07-11 |
ATE254289T1 (de) | 2003-11-15 |
US6307387B1 (en) | 2001-10-23 |
DE69726169T2 (de) | 2004-08-26 |
US7109731B2 (en) | 2006-09-19 |
JP4237761B2 (ja) | 2009-03-11 |
AU3007797A (en) | 1998-03-06 |
EP0929819A4 (de) | 1999-08-11 |
EP0929819B1 (de) | 2003-11-12 |
US20070296431A1 (en) | 2007-12-27 |
US20020135388A1 (en) | 2002-09-26 |
ES2210530T3 (es) | 2004-07-01 |
US7550983B2 (en) | 2009-06-23 |
JP2006177971A (ja) | 2006-07-06 |
KR100312835B1 (ko) | 2001-11-03 |
US7541821B2 (en) | 2009-06-02 |
WO1998007040A1 (en) | 1998-02-19 |
DE69726169D1 (de) | 2003-12-18 |
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